Silicon carbide boat for wafer

Abstract

The utility model discloses a silicon carbide boat for wafers, and relates to the technical field of silicon carbide boats. The silicon boat comprises a silicon boat body, wherein a protection device is arranged outside the silicon boat body; the protection device comprises an outer containing frame body which is vertically arranged, openings are formed in the two ends of the outer containing frame body, two mounting plates are symmetrically distributed and slidably mounted on the inner circumferential side of the outer containing frame body, a limiting frame is rotatably mounted between the two mounting plates, and the adjacent sides of the two limiting frames are attached to each other. According to the utility model, the silicon boat body can be protected to a certain extent through the protection device, the silicon boat body is convenient to take, and meanwhile, by utilizing the synergistic effect of the protection device and the damping assembly, the problem that a wafer is possibly damaged due to lack of protection when the wafer boat collides with an external object in the carrying process is avoided; omnibearing protection and damping of the silicon boat body are achieved, and safety and stability of wafers in the semiconductor production and transportation process are guaranteed.

Description

Technical Field

[0001] This utility model relates to the field of silicon carbide boat technology, specifically a silicon carbide boat for wafers. Background Technology

[0002] As is well known, silicon carbide boats are carriers for large-scale integrated circuits in ultra-high temperature processing and play a very important role in the production of semiconductor wafers. They have the characteristics of high strength, high purity, high thermal conductivity, no porosity, resistance to acid and alkali corrosion, no pollution at high temperatures, no deformation, and good thermal shock resistance.

[0003] In the semiconductor manufacturing process, silicon carbide boats are used as key carriers for wafers, and their performance directly affects the quality of semiconductor products and production efficiency. However, traditional boat designs have some shortcomings, especially in terms of protection measures. Specifically, some parts of the boat are exposed during operation and lack effective anti-collision protection components. When the boat collides with external objects during transportation, the wafer may be damaged due to the lack of protection. This damage not only reduces the product yield but may also damage the production equipment, thereby affecting the operating efficiency of the entire production line. Utility Model Content

[0004] The purpose of this invention is to provide a silicon carbide boat for wafers to solve the problems mentioned in the background art.

[0005] To achieve the above objectives, this utility model provides the following technical solution: a silicon carbide boat for wafers, comprising: a silicon boat body, wherein a protective device is provided on the outside of the silicon boat body; the protective device includes a vertically arranged outer container frame, both ends of the outer container frame having openings, two mounting plates symmetrically distributed and slidably mounted on the inner periphery of the outer container frame, a limiting frame rotatably mounted between the two mounting plates, the adjacent sides of the two limiting frames being in contact with each other, the silicon boat body being placed between the two limiting frames, and a closing plate rotatably mounted on both ends of the outer container frame via a damping shaft; and two shock-absorbing components, the two shock-absorbing components being respectively mounted on the two closing plates.

[0006] As a further preferred embodiment of this technical solution, the shock absorption assembly includes a buffer frame that is slidably sleeved on the outer periphery of the closed plate, a plurality of shock absorption springs are fixedly installed between the buffer frame and the closed plate, and a plurality of small dampers are fixedly installed between the buffer frame and the closed plate.

[0007] As a further preferred embodiment of this technical solution, the sealing plate is provided with an installation groove, and a positioning plate is slidably inserted between the two sides of the inner wall of the installation groove. A return spring is fixedly installed between the top of the positioning plate and the top of the inner wall of the installation groove. The outer container frame is provided with two through holes, and one end of the positioning plate is inserted into the through hole.

[0008] As a further preferred embodiment of this technical solution, a rotating rod is fixedly installed at one end of each of the two limiting frames, and the two ends of the rotating rod are respectively rotatably mounted on the two mounting plates.

[0009] As a further preferred embodiment of this technical solution, protective silicone pads are fixedly installed on the inner circumference of both ends of the two limiting frames.

[0010] As a further preferred embodiment of this technical solution, a handle is fixedly installed on one side of the outer container frame, and a rubber sleeve is fixedly fitted on the outer periphery of the buffer frame.

[0011] As a further preferred embodiment of this technical solution, one of the limiting frames is fixedly inserted with a magnet on one side, and the other limiting frame is fixedly inserted with an iron block on one side, and the magnet and the iron block are magnetically connected.

[0012] This invention provides a silicon carbide boat for wafer fabrication, which has the following advantages:

[0013] This invention provides protection for the silicon boat body through a protective device, making it easy to handle. At the same time, by utilizing the synergistic effect of the protective device and the shock-absorbing components, it avoids the problem that the wafers may be damaged due to lack of protection when the crystal boat collides with external objects during transportation. It achieves all-round protection and shock absorption for the silicon boat body, ensuring the safety and stability of the wafers during semiconductor production and transportation. Attached Figure Description

[0014] Figure 1 This is a three-dimensional structural diagram of the present invention;

[0015] Figure 2 This is a utility model Figure 1 A side view of the sectional three-dimensional structure;

[0016] Figure 3 This is a utility model Figure 1 Top-view sectional view of the three-dimensional structure;

[0017] Figure 4 This is a utility model Figure 1 Another top-down sectional view of the three-dimensional structure;

[0018] Figure 5 This is a utility model Figure 1 Another three-dimensional structural state diagram;

[0019] In the diagram: 1. Silicon boat body; 2. Protective device; 21. Outer housing frame; 22. Mounting plate; 23. Limiting frame; 24. Enclosure plate; 3. Shock absorption assembly; 31. Buffer frame; 32. Shock absorption spring; 33. Small damper; 4. Mounting slot; 5. Positioning plate; 6. Return spring; 7. Rotating rod; 8. Protective silicone pad; 9. Handle; 10. Rubber sleeve; 11. Magnet; 12. Iron block. Detailed Implementation

[0020] The technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present invention.

[0021] This utility model provides a technical solution: such as Figure 1-5 As shown in this embodiment, a silicon carbide boat for wafers includes: a silicon boat body 1, and a protective device 2 is provided on the outside of the silicon boat body 1;

[0022] The protective device 2 includes a vertically arranged outer container frame 21 with openings at both ends. Two mounting plates 22 are symmetrically distributed and slidably installed on the inner periphery of the outer container frame 21. A limit frame 23 is rotatably installed between the two mounting plates 22, with adjacent sides of the two limit frames 23 fitting together. The silicon boat body 1 is placed between the two limit frames 23. Both ends of the outer container frame 21 are rotatably installed with a closing plate 24 via a damping shaft. A rotating rod 7 is fixedly installed at an adjacent end of each of the two limit frames 23, with both ends of the rotating rod 7 rotatably installed on the two mounting plates 22 respectively.

[0023] Two shock-absorbing components 3 are provided, and each of the two shock-absorbing components 3 is respectively installed on one of the two sealing plates 24. Each shock-absorbing component 3 includes a buffer frame 31 that is slidably sleeved on the outer periphery of the sealing plate 24. Multiple shock-absorbing springs 32 are fixedly installed between the buffer frame 31 and the sealing plate 24, and multiple small dampers 33 are fixedly installed between the buffer frame 31 and the sealing plate 24.

[0024] The silicon boat body 1 is placed between two limiting frames 23, which are mounted between two mounting plates 22 by rotation. When the two limiting frames 23 are combined, they form a complete placement frame, clamping and limiting the silicon boat body 1 between the two limiting frames 23, ensuring the stability of the silicon boat body 1 during transportation. The outer container frame 21 is vertically arranged, and its openings at both ends allow the silicon boat body 1 to be easily placed and removed. The mounting plates 22 are symmetrically distributed and slidably mounted on the inner periphery of the outer container frame 21, providing stable support for the limiting frames 23. The slidably mounted mounting plates 22 facilitate the movement of the limiting frames 23.

[0025] The enclosing plates 24 are rotatably mounted at both ends of the outer container frame 21 via damping shafts. This design allows the enclosing plates 24 to be rotated to open the opening when needed, facilitating the loading and unloading of the silicon boat body 1. The addition of the shock-absorbing components 3 is a major highlight of this design. Each enclosing plate 24 is equipped with two shock-absorbing components 3, which consist of a buffer frame 31, a shock-absorbing spring 32, and a small damper 33. The buffer frame 31 is slidably fitted onto the outer periphery of the enclosing plate 24 and is fixedly installed with the enclosing plate 24 by the shock-absorbing spring 32 and the small damper 33, forming a highly efficient shock-absorbing structure.

[0026] When the wafer boat encounters a collision or impact during transportation, the shock-absorbing spring 32 first comes into play, absorbing the impact force through its elastic deformation and reducing the direct impact on the wafer boat body 1. At the same time, the small damper 33 further mitigates and disperses the impact force through its damping effect, ensuring the stability and safety of the wafer boat body 1. The two work together to form a buffering and shock-absorbing effect. This design not only improves the impact resistance of the wafer boat, but also helps to reduce wafer damage caused by collisions, thereby improving the production efficiency and quality of semiconductor products.

[0027] In summary, through the synergistic effect of the protection device 2 and the shock absorption component 3, all-round protection and shock absorption of the silicon boat body 1 are achieved, ensuring the safety and stability of the wafer in the semiconductor production process.

[0028] like Figure 2 As shown, the enclosed plate 24 has an installation groove 4, and a positioning plate 5 is slidably inserted between the two sides of the inner wall of the installation groove 4. A return spring 6 is fixedly installed between the top of the positioning plate 5 and the top of the inner wall of the installation groove 4. The outer container frame 21 has two openings, and one end of the positioning plate 5 is inserted into the opening.

[0029] The purpose of the positioning plate 5 is to limit and fix the closing plate 24 to prevent it from rotating at will. When it is necessary to rotate the closing plate 24, push the positioning plate 5 into the mounting groove 4, and at the same time squeeze the return spring 6. When the positioning plate 5 is completely moved out of the opening, the closing plate 24 can be rotated to open the opening. When it is necessary to remove the limiting frame 23 from the outer container frame 21, you can put your finger through the opening and touch the mounting plate 22 to push out the mounting plate 22. The operation is simple and convenient.

[0030] like Figure 5 As shown, protective silicone pads 8 are fixedly installed on the inner circumference of both ends of the two limiting frames 23.

[0031] The protective silicone pad 8 is used to protect the end of the silicone boat and prevent it from directly contacting the limit frame 23, thus avoiding wear.

[0032] like Figure 4As shown, a handle 9 is fixedly installed on one side of the outer container frame 21, and a rubber sleeve 10 is fixedly fitted on the outer periphery of the buffer frame 31.

[0033] The handle 9 facilitates the handling of the outer container 21, thereby facilitating the transport of the silicon boat body 1. The rubber sleeve 10 is used to improve its anti-slip stability, making it easy to place the device stably.

[0034] like Figure 2-3 As shown, one of the limiting frames 23 has a magnet 11 fixedly inserted on one side, and the other limiting frame 23 has an iron block 12 fixedly inserted on one side. The magnet 11 and the iron block 12 are magnetically connected.

[0035] One end of each of the two limiting brackets 23 is rotatably mounted, and the other end is magnetically connected by an iron block 12 and a magnet 11 to improve the stability of fixing the silicon boat body 1.

[0036] This utility model provides a tire vulcanizing bladder production transfer trolley, the specific working principle of which is as follows:

[0037] The silicon boat body 1 is placed between two limiting frames 23. These two limiting frames 23 are installed between two mounting plates 22 by rotation. When the two limiting frames 23 are combined, they form a complete placement frame. The silicon boat body 1 is clamped and limited between the two limiting frames 23, ensuring the stability of the silicon boat body 1 during transportation. The outer container frame 21 is set vertically, and the opening design at both ends allows the silicon boat body 1 to be placed and taken out conveniently. Mounting plates 22 are symmetrically distributed and slidably mounted on the inner periphery of the outer container frame 21, providing stable support for the limiting frame 23. The sliding mounting plates 22 facilitate the movement of the limiting frame 23. After the two limiting frames 23 are moved out, they can be rotated so that one end of the two limiting frames 23 moves away from each other, thereby opening and releasing the limiting fixation on the silicon boat body 1, so that the silicon boat body 1 can be taken out. The sealing plate 24 is rotatably mounted on both ends of the outer container frame 21 through a damping shaft. This design allows the sealing plate 24 to be rotated to open the opening when needed, so as to carry out loading and unloading operations of the silicon boat body 1. When the crystal boat encounters a collision or impact during transportation, the shock-absorbing spring 32 first plays its role, absorbing the impact force through its elastic deformation and reducing the direct impact on the silicon boat body 1. The small damper 33 further reduces and disperses the impact force through its damping effect, ensuring the stability and safety of the silicon boat body 1. The two work together to form a buffering and shock-absorbing effect.

[0038] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A silicon carbide boat for wafers, characterized by, Include: Silicon boat body (1), the outside of the silicon boat body (1) is provided with a protection device (2); The protection device (2) includes an outer containing frame (21) arranged vertically, both ends of the outer containing frame (21) are configured with openings, and the inner circumferential side of the outer containing frame (21) is symmetrically distributed with two mounting plates (22) slidingly mounted, two limit frames (23) are rotatably mounted between the two mounting plates (22), the side of the two limit frames (23) adjacent to each other is in close contact, the silicon boat body (1) is placed between the two limit frames (23), and the both ends of the outer containing frame (21) are rotatably mounted with a closing plate (24) through a damping rotating shaft. Two shock absorbing assemblies (3) are mounted on the two closing plates (24) respectively.

2. The SiC boat for a wafer according to claim 1, wherein: The shock absorbing assembly (3) includes a buffer frame (31) slidingly sleeved on the outer circumferential side of the closing plate (24), a plurality of shock absorbing springs (32) are fixedly mounted between the buffer frame (31) and the closing plate (24), and a plurality of small dampers (33) are fixedly mounted between the buffer frame (31) and the closing plate (24).

3. The SiC boat for wafer according to claim 1, wherein: The closing plate (24) is configured with a mounting groove (4), a positioning plate (5) is slidingly inserted between the two sides of the inner wall of the mounting groove (4), a return spring (6) is fixedly mounted between the top of the positioning plate (5) and the top of the inner wall of the mounting groove (4), and the outer containing frame (21) is configured with two through openings, and one end of the positioning plate (5) is inserted into the through opening.

4. The SiC boat for wafer according to claim 1, wherein: Both ends of the two limit frames (23) are rotatably mounted on the two mounting plates (22) respectively.

5. The SiC boat for wafer according to claim 1, wherein: The inner circumferential side of both ends of the two limit frames (23) is fixedly mounted with a protective silica gel pad (8).

6. The SiC boat for wafer according to claim 2, wherein: One side of the outer containing frame (21) is fixedly mounted with a handle (9), and the outer circumferential side of the buffer frame (31) is fixedly sleeved with a rubber sleeve (10).

7. The SiC boat for wafer according to claim 6, wherein: One side of one of the limit frames (23) is fixedly inserted with a magnet (11), and one side of the other limit frame (23) is fixedly inserted with an iron block (12), and the magnet (11) and the iron block (12) are magnetically connected.

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