Ejector pin pushing and lifting device and pushing and lifting equipment

Abstract

An ejector pin pushing and lifting device comprises a lifting unit and a pushing and jacking unit, and the pushing and jacking unit comprises a fixing base, a pushing and lifting motor, a cam, a base and a pushing rod; the fixing base is installed on the lifting unit and provided with a sliding rail extending in the jacking direction. The pushing and lifting motor is connected with the fixing base, and the axis of an output shaft of the pushing and lifting motor is perpendicular to the jacking direction. The cam is mounted on an output shaft of the pushing and lifting motor and rotates along with the output shaft; the base abuts against the cam, is clamped to the sliding rail and slides along the sliding rail. The push rod is used for pushing the ejector pin, is arranged on the base and extends in the jacking direction. In addition, the utility model further provides pushing and lifting equipment using the ejector pin pushing and lifting device. Compared with the prior art, the ejector pin pushing and lifting device and the pushing and lifting equipment can improve the continuity and the stability of the movement of the push rod.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing equipment technology, and in particular to a pin lifting device and lifting equipment. Background Technology

[0002] A wafer is an important basic material in semiconductor manufacturing. Multiple wafers can be formed on the same wafer through a series of processes such as photolithography and etching. After the wafer is cut, the wafers are attached to a blue film. The vision system can move the wafers together with the blue film to the wafer picking position for pickup and send them to the packaging equipment for the next step of the process.

[0003] During wafer pickup, the equipment first uses a vacuum to hold the blue film in place to prevent it from shifting. Then, a pick slowly rises from below the blue film, lifting the wafer to create a gap between it and the blue film, facilitating pickup. During this process, strict control over the pick's rising height and positional accuracy is crucial. Otherwise, inaccurate lifting positions and uneven stress on the wafer may lead to cracks or damage, or the blue film may be punctured, introducing foreign matter and contaminating the wafer. Therefore, ensuring the accuracy of the pick's lifting position on the wafer is critical to chip quality.

[0004] On the other hand, due to the different specifications of chips in existing technologies, different sizes and numbers of ejector pins are often required to lift different chips during production. However, it has been found that such replaceable ejector pin devices are prone to misalignment of the ejector pins when lifting the chip, resulting in pin tilting, chip damage, and a high chip defect rate. Utility Model Content

[0005] Therefore, the purpose of this utility model is to overcome the defects or deficiencies of the prior art and provide a pin lifting device.

[0006] The technical solution adopted by this utility model is as follows:

[0007] A push pin lifting device includes a lifting unit and a pushing unit. The pushing unit includes a fixed base, a lifting motor, a cam, a base, and a push rod. The fixed base is mounted on the lifting unit and has a slide rail extending along the lifting direction. The lifting motor is connected to the fixed base, and the axis of its output shaft is perpendicular to the lifting direction. The cam is mounted on the output shaft of the lifting motor. The base abuts against the cam and engages with the slide rail, sliding along the slide rail. The push rod is used to push the push pin and is disposed on the base and extends along the lifting direction.

[0008] Compared with existing technologies, the ejector pin lifting device of this invention, on the one hand, lifts the base via a cam, and then the base drives the push rod to move along the lifting direction. Because the cam has a linear profile, the push rod's movement is continuous and smooth. On the other hand, by combining the base with a slide rail extending along the lifting direction, the contact area between the cam and the push rod is increased. Even if the point of contact between the cam and the push rod is not on the axis of the push rod, the push rod can still move along the lifting direction without tilting. This makes the push rod's ascent smoother and more stable, reducing the requirements for processing and installation accuracy. Simultaneously, the ejector pin pushed by the push rod can also maintain movement along the lifting direction, reducing deviations in the ejector pin's lifting position, thereby reducing damage to the wafer and lowering the wafer defect rate.

[0009] In one embodiment, a transmission component protrudes from the side of the base, and the outer peripheral surface of the transmission component is in contact with the outer peripheral surface of the cam, making the movement of the base more stable and smooth.

[0010] In one embodiment, a first insulating element is further included, located between the transmission element and the base, to reduce the impact of static electricity generated by the push motor on the ejector pin.

[0011] In one embodiment, the lifting unit includes a lifting frame, a lifting motor, and a support base; the lifting frame is provided with a guide rail extending along the lifting direction, and the lifting motor is mounted on the lifting frame; the support base engages with the guide rail and slides along the guide rail under the drive of the lifting motor, and the fixed base is mounted on the support base, thereby increasing the speed of the fixed base moving along the lifting direction, facilitating the rapid separation of the pushing unit and the ejector pin, and improving the speed of work such as replacing parts or maintenance.

[0012] In one embodiment, the pushing unit further includes a mounting plate; the fixed base includes a first plate extending along the lifting direction and a second plate extending perpendicular to the lifting direction, the first plate being mounted on the support base, and the slide rail being located on the first plate; the second plate being spaced apart from the support base; the mounting plate being connected to the first plate and the second plate respectively to form an accommodating space, the base being located within the accommodating space, and the push rod extending from the base out of the accommodating space; the pushing motor is mounted on the mounting plate and located outside the accommodating space, thereby simplifying the structure and reducing space occupation.

[0013] In one embodiment, the pushing unit further includes a mounting component, which is fixed to the mounting plate and disposed opposite to the first plate, thereby enclosing the base therein, protecting the base, preventing it from being affected during operation, and improving the stability of the base's movement.

[0014] In one embodiment, a second insulating element is further included, located between the base and the first plate, to reduce the impact of static electricity generated by the lifting motor on the ejector pin.

[0015] In one embodiment, a third displacement sensor is also included, which is disposed on the support base and used to detect the amount of movement of the base, thereby improving the movement accuracy of the push rod.

[0016] In one embodiment, the third displacement sensor is a photoelectric displacement sensor; the base is provided with a baffle on the side facing the support, which can block the light from the third displacement sensor to simplify the structure for detecting the amount of push rod movement.

[0017] In addition, this utility model also provides a lifting device, including a pin seat and any of the above-mentioned pin lifting devices. The pin seat is disposed on the fixed base and is correspondingly arranged with the push rod along the lifting direction. The pin seat includes a pin and a seat body. The seat body has a sliding hole extending and penetrating along the lifting direction. The pin is slidably connected to the sliding hole. The sliding hole is correspondingly arranged with the push rod.

[0018] To better understand and implement this invention, the following detailed description is provided in conjunction with the accompanying drawings. Attached Figure Description

[0019] Figure 1 This is a schematic diagram of the overall structure of the ejector pin switching device of this utility model from one viewing direction;

[0020] Figure 2 This is a schematic diagram of the overall structure of the ejector pin switching device of this utility model from another perspective.

[0021] Figure 3 This is a side view of the ejector pin switching device of this utility model;

[0022] Figure 4 For along Figure 3 The sectional projection after YY line sectioning;

[0023] Figure 5 This is a simplified schematic diagram of the pushing unit of this utility model;

[0024] Figure 6 for Figure 4 A magnified view of a section at point A in the middle;

[0025] Figure 7 for Figure 4 A magnified view of a section at point B in the middle;

[0026] Figure 8 This is a schematic diagram of the overall structure of the ejector pin assembly of this utility model from one viewing direction;

[0027] Figure 9 This is a side sectional view of the ejector pin assembly of this utility model;

[0028] Figure 10 This is a schematic diagram of the overall structure of the ejector pin assembly of this utility model from another perspective.

[0029] Figure 11 This is a schematic diagram of the internal structure of the outer shell of this utility model;

[0030] Figure 12 This is a top view of the internal structure of the outer shell of this utility model.

[0031] Reference numerals: 10. Lifting assembly; 11. Lifting unit; 111. Lifting frame; 111A. Guide rail; 112. Lifting motor; 113. Support base; 12. Pushing unit; 121. Fixed base; 1211. First plate; 1211A. Slide rail; 1212. Second plate; 122. Mounting plate; 123. Lifting motor; 124. Cam; 125. Base; 1251. Transmission component; 1252. Baffle; 126. Push rod; 127. Push rod seat; 1271. Push rod mounting hole; 1272. First mounting hole; 1273. Air guide sleeve; 1274. First air passage; 1275. Side hole; 1276. First vent hole; 1277. Suction nozzle; 1278. Sealing component; 1278A. O-ring; 127 8B, First sealing ring; 1278C, Second sealing ring; 1279, Second connecting piece; 1280, Positioning groove; 128, Mounting piece; 13, Suction unit; 131, Solenoid valve; 132, Air tube; 14, Micro-pressure switch; 15, Third displacement sensor; 16, Insulation unit; 161, First insulating piece; 162, Second insulating piece; 20, Ejector pin assembly; 21, Housing; 211, Second air passage; 212, Second mounting hole; 213, Extension hole; 214, Suction hole; 215, Protruding edge; 216, Third vent hole; 218, First connecting piece; 219, Pin; 22, Ejector pin; 221, Needle body; 222, Needle tip; 224, Second vent hole; 225, Spring; 226, Reset piece; Z, Lifting direction. Detailed Implementation

[0032] The applicant analyzed and studied existing ejector pin lifting devices and found that: Existing replaceable ejector pin devices have separate ejector pin and lifting components; that is, the ejector pin and the push rod that pushes the ejector pin are separate structures. Since the ejector pin relies on the push rod to provide thrust to move the wafer, the coaxiality between the push rod and the ejector pin is crucial. Otherwise, the ejector pin will tilt due to the push rod's lifting position shifting, ultimately causing a misalignment in its lifting position on the wafer. Furthermore, the push rod is driven by a lifting motor. When the push rod is not aligned with its axis, the push rod is prone to tilting, affecting the coaxiality with the ejector pin and directly impacting wafer quality.

[0033] Therefore, in view of the defects of the existing ejector pin ejection device, the applicant proposes an ejector pin pushing device, which pushes the pin through the outer periphery of a cam. It has a base connected to a push rod, and the cam contacts the base to increase the contact area with the protrusion, making the cam push the push rod more stably. Furthermore, it has a slide rail extending along the lifting direction, and the base contacts and slides along the guide rail. This ensures that even if the position where the cam contacts the push rod is not on the axis of the push rod, the push rod can still move along the lifting direction without tilting, reducing machining accuracy and installation difficulty. The following are some specific embodiments of this application:

[0034] Please see Figure 1 The ejector pin switching device of this utility model includes a lifting assembly 10, an ejector pin assembly 20, and a controller (not shown). The rotating assembly 20 is mounted on the lifting assembly 10. The lifting assembly 10 can push the ejector pin assembly 20 to move along the lifting direction Z. The ejector pin assembly 20 can adsorb the blue film and move along the lifting direction Z to push the wafer, thereby separating the blue film from the wafer. The controller is electrically connected to the lifting assembly 10 and the ejector pin assembly 20 respectively to control their respective movements. In this embodiment, the lifting direction Z is a vertical direction perpendicular to the horizontal plane, but it is not limited to this.

[0035] Specifically, please refer to Figure 2 The lifting assembly 10 includes a lifting unit 11, a pushing unit 12, a suction unit 13, a micro-pressure switch 14, a third displacement sensor 15, and an insulation unit 16.

[0036] The lifting unit 11 includes a lifting frame 111, a lifting motor 112, and a support base 113. The lifting frame 111 is used to mount the ejector pin switching device onto the fixed device and supports the entire ejector pin switching device. The lifting frame 111 is provided with a guide rail 111A extending in a direction parallel to the lifting direction Z. The support base 113 engages with the guide rail 111 and slides along it. The lifting motor 112 is mounted on the lifting frame 111 and drives the support base 113 to slide through a gear, rack, or other transmission method. The pushing unit 12 and the suction unit 13 are mounted on the support base 13 and move accordingly. The lifting unit 11 allows for quick adjustment of the position of the pushing unit 12, facilitating installation and maintenance. For example, when the pushing unit 12 is worn, the distance between the pushing unit 12 and the ejector pin assembly 20 can be quickly increased, making it easier for maintenance personnel to replace parts.

[0037] Please refer to the following: Figures 3 to 8 The pushing unit 12 includes a fixed base 121, a mounting plate 122, a pushing motor 123, a cam 124, a base 125, a push rod 126, and a push rod seat 127.

[0038] The fixed base 121 is generally L-shaped, including a first plate 1211 extending along the lifting direction Z and a second plate 1212 extending in a direction perpendicular to the lifting direction Z. The first plate 1211 is mounted on the support base 113 and engages with the guide rail 111A. The second plate 1212 is connected to the first plate 1211 and extends away from the guide rail 111A, spaced apart from the support base 113. The mounting plate 122 connects the second plate 1212 and the support base 13, with one side connected to the first plate 1211. An accommodating space (not labeled) is formed between the mounting plate 122, the first plate 1211, and the second plate 1212. The push motor 123 is mounted on the mounting plate 122, and its output shaft passes through the mounting plate 122 and extends into the accommodating space, with the axis of the output shaft perpendicular to the lifting direction Z. The cam 124 is mounted on the output shaft of the push motor 123 and rotates accordingly.

[0039] The base 125 is disposed within the accommodating space and can slide in a direction parallel to the lifting direction Z. In this embodiment, the first plate 1211 is provided with a slide rail 1211A extending in a direction parallel to the lifting direction Z. The base 125 engages with the slide rail 1211A. A transmission member 1251 protrudes from the side of the base 125. The transmission member 1251 may be a roller, bearing, etc., hinged to the base 125. The outer peripheral surface of the transmission member 1241 abuts against the outer peripheral surface of the cam 124. When the cam 124 rotates, the transmission member 1241 pushes the base 125 to slide along the slide rail 1211A. The push rod 126 is mounted on the base 125 and extends through the second plate 1212 toward the ejector pin assembly 20. The push rod seat 127 covers the plate surface of the second plate 1212 facing away from the accommodating space. Furthermore, the pushing unit 12 also includes a mounting component 128, which is fixed on the mounting plate 122 and is disposed opposite to the first plate 1211 to further enclose the accommodating space.

[0040] The push rod seat 127 is provided with a push rod mounting hole 1271, a first mounting hole 1272, an air guide sleeve 1273, a first air passage 1274, a side hole 1275, a first vent hole 1276, a suction nozzle 1277, and a sealing element 1278. The push rod mounting hole 1271 is located near the middle of the push rod seat 127 and extends through the push rod seat 127 along the lifting direction Z, with one end near the base 125 and the other end near the ejector pin assembly 20. The first mounting hole 1272 is located on the side of the push rod mounting hole 1271 near the ejector pin assembly 20. The air guide sleeve 1273 is fixedly disposed within the push rod mounting hole 1271. The push rod 126 is inserted into the air guide sleeve 1273, with one end protruding from the first mounting hole 1272. There is a certain gap between the air guide sleeve 1273 and the push rod 126 to allow the push rod 126 to slide within the air guide sleeve 1273. The air guide sleeve 1273, the push rod 126, and the push rod mounting hole 1271 are coaxially arranged. The air guide sleeve 1273 extends within the push rod mounting hole 1271. In the lifting direction Z, the cross-sectional area of ​​both ends of the air guide sleeve 1273 is larger than the cross-sectional area of ​​its middle portion, such that the middle portion of the air guide sleeve 1273 forms the first air passage 1274 between itself and the wall of the push rod mounting hole 1271. Several side holes 1275 are radially formed on the side wall of the push rod seat 127 along the push rod mounting hole 1271 and are spaced circumferentially. They are located on the side near the base 125 and communicate with the first air passage 1274. The side holes 1275 are evenly spaced around the outer periphery of the first air passage 1274 to prevent the push rod 126 from being subjected to suction on the side near the base 125 while uniformly distributing the airflow within the first air passage 1274. Several first vent holes 1276 are radially formed on the side wall of the air guide sleeve 1273 along the push rod mounting hole 1271 and are evenly spaced around the outer periphery of the push rod 126, communicating with the first air passage 1274. The first vent holes 1276 are located on the side near the ejector pin assembly 20, so that the side of the push rod 126 near the ejector pin assembly 20 is also subjected to uniform suction. The above-mentioned gas channel structure enables the first gas path 1274 and the push rod 126 to be coaxially arranged, and the end of the push rod 126 is subjected to uniform adsorption force, thereby reducing the offset of the push rod 126 caused by the gas path, improving the alignment accuracy with the ejector pin assembly 20, and the gas channel structure is simple and can improve the gas flow speed.

[0041] The suction nozzle 1277 is an elastic element made of elastic material, roughly trumpet-shaped, with its small end opening inserted into the air guide sleeve 1273 through the first mounting hole 1272 to seal one end of the air guide sleeve 1273. The push rod 126 protrudes from the suction nozzle 1277. The suction nozzle 1277 surrounds the outer circumference of the push rod 126 and has a gap between it and the push rod 126. Its large end opening faces the lifting assembly 20, and its small end opening faces the inside of the air guide sleeve 1273, so that when the airflow flows from the lifting assembly 20 to the base 125, it enters the air guide sleeve 1273 and then flows into the first vent hole 1276.

[0042] The sealing element 1278 includes an O-ring 1278A, a first sealing ring 1278B, and a second sealing ring 1278C. The O-ring 1278A is located at the opening of the air guide sleeve 1273 near the base 125, surrounding the push rod 126 and positioned between the push rod 126 and the air guide sleeve 1273, sealing the gap between them. The O-ring 1278A also helps maintain the push rod 126 coaxial with the air guide sleeve 1273, reducing the need for machining precision. The first sealing ring 1278B is located inside the push rod mounting hole 1271 near the ejector pin assembly 20, and between the air guide sleeve 1273 and the push rod seat 127, preventing airflow leakage from one end of the first air passage 1274. The second sealing ring 1278C is located inside the push rod mounting hole 1271 on the side near the base 125, and between the air guide sleeve 1273 and the push rod seat 127, to prevent airflow from leaking from the other end of the first air passage 1274.

[0043] The suction unit 13 includes a solenoid valve 131 and an air pipe 132. The solenoid valve 131 is mounted on the fixed base 121 and connected to the side hole 1275 through the air pipe 132, thereby communicating with the first air passage 1274. During operation, the solenoid valve 131 draws in air to generate negative pressure, causing the airflow to flow from the suction nozzle 1277 to the first vent hole 1276, and then out of the push rod mounting hole 1271 through the first air passage 1274. The O-ring rubber ring 1278A, the first sealing ring 1278B, and the second sealing ring 1278C respectively provide sealing.

[0044] The micro switch 14 is a trigger-type switch with a triggering mechanism, which is electrically connected to the controller and the push motor 123, and is located on the side of the push rod seat 127 near the ejector pin assembly 20. When the ejector pin assembly 20 approaches the push rod seat 127, the ejector pin assembly 20 can press against the micro switch 14 to trigger it and send a signal, so that the controller can recognize that the ejector pin assembly 20 has moved to a position where it can connect with the push rod seat 127, realizing docking with the push rod seat 127. The ejector pin assembly 20 and the push rod seat 127 are connected in place, thereby improving the docking accuracy of the ejector pin assembly 20 and the push rod seat 127, and providing conditions for the air path alignment between the ejector pin assembly 20 and the push rod seat 127.

[0045] The third displacement sensor 15 is mounted on the support base 13 and electrically connected to the controller, used to detect the movement of the base 125. In this embodiment, the third displacement sensor 15 is a photoelectric displacement sensor, mounted on the support base 13. A baffle 1252 is provided on the side of the base 125 facing the support base 13. As the base 125 moves, the baffle 1252 approaches the third displacement sensor 15 and blocks part of the light. The third displacement sensor 15 determines the movement of the base 125 based on the amount of light and sends the result to the controller. Alternatively, the third displacement sensor 15 can also be a sensor for measuring displacement, such as a laser displacement sensor or an ultrasonic displacement sensor, using existing technologies.

[0046] The insulating unit 16 includes a first insulating member 161 and a second insulating member 162. The first insulating member 161 is installed between the transmission member 1251 and the base 125 to prevent static electricity on the lifting motor 123 from being conducted to the base 125 and then to the push rod 126. The second insulating member 162 is disposed between the base 125 and the fixed seat 121 to prevent static electricity on the lifting motor 12 from being conducted to the base 125.

[0047] Please refer to the following: Figures 9 to 12 The ejector assembly 20 includes a housing 21 and an ejector pin 22. The housing 21 is connected to the mounting plate 23 and is disposed on the outward-facing surface of the mounting plate 23. The ejector pin 22 is slidable within the housing 21 along the lifting direction Z, and its end is extendable and retractable within and outside the housing 21 to push the wafer.

[0048] The outer casing 21 includes a second air passage 211, a second mounting hole 212, an extension hole 213, a suction hole 214, a raised edge 215, a third vent hole 216, and a connecting portion 217. The second air passage 211 is formed inside the outer casing 21 and extends along the lifting direction Z. The second mounting hole 212 and the extension hole 213 are formed on the outer casing 21 and communicate with both ends of the second air passage 211, respectively. The second mounting hole 212 is located on the side near the push rod seat 127. The ejector pin 22 is mounted in the second air passage 211. One end of the second air passage 211 communicates with the suction nozzle 1277 of the push unit 12 through the second mounting hole 212. The opening diameter of the suction nozzle 1277 facing the housing 21 is larger than the diameter of the second mounting hole 212. In use, the suction nozzle 1277 abuts against the housing 21, the second air passage 211 communicates with the first air passage 1274, and the suction nozzle 127 covers the second mounting hole 212 to prevent gas leakage. The protruding hole 213 is coaxially arranged with the second air passage 211 to ensure that the ejector pin 22 is coaxially arranged with the second air passage 211. Depending on the wafer size, the number of protruding holes 213 can be one or more, and they are located close to the axis of the second air passage 211.

[0049] A plurality of adsorption holes 214 are formed on the outer casing 21 and arranged circumferentially around the protrusion hole 213. The adsorption holes 214 are connected to the second air passage 211 to form a negative pressure for adsorption. In this embodiment, the adsorption holes 214 are arranged in a row radially along the protrusion hole 213, and multiple rows of adsorption holes 214 are evenly arranged radially around the outside of the protrusion hole 213 to provide uniform adsorption force. In addition, when there are multiple protrusion holes 213, the adsorption holes 214 are evenly spaced around the axis of the second air passage 211.

[0050] The protruding edge 215 protrudes from the inner wall of the second air passage 211 and extends a certain distance around the ejector pin 22 along the lifting direction Z. The third vent hole 216 penetrates the protruding edge 215 along the lifting direction Z to increase the adsorption force. In this embodiment, there are four third vent holes 216, which are evenly arranged around the outside of the ejector pin 22 in the circumference.

[0051] The ejector pin 22 includes a needle body 221, a needle tip 222, a flange 223, a second vent 224, a spring sleeve 225, and a reset member 226. The needle body 221 extends in the second air passage 211 and passes through the flange 215. The outer diameter of the needle tip 222 is smaller than the outer diameter of the needle body 221 and is located on the side of the needle body 221 near the protrusion hole 213, extending out of the housing 21 from the protrusion hole 213. The flange 223 surrounds the needle body 221 and is located on the side of the flange 215 facing the protrusion hole 213. Projected along the lifting direction Z, the cross-sectional area of ​​the flange 223 is larger than the cross-sectional area of ​​the flange 215 and can abut against the side of the flange 215 facing the suction hole 214. As the needle body 221 slides in the second air passage 211, the flange 223 covers the convex edge 215 and limits the sliding of the needle body 221, preventing it from falling off the outer shell 21. The flange 223 can be a separate structure from the needle body 221 or an integral structure. The second vent 224 passes through the flange 223 and the convex edge 215 along the lifting direction Z and communicates with the second air passage 211. In this embodiment, there are four second vents 224, which are evenly arranged around the outside of the ejector pin 22 in the circumferential direction. Projected along the ejector pin direction Z, the second vents 224 and the third vent 216 are staggered. When the flange 223 covers the convex edge 215, the third vent 216 is closed by the flange 223 and therefore cannot communicate with the adsorption hole 214. The spring sleeve 225 is fitted onto the end of the needle body 221 away from the needle tip 121 and is separated from the protruding edge 215 by a certain distance. The two ends of the reset member 226 abut against the side of the protruding edge 215 facing away from the suction hole 214 and the spring sleeve 225, respectively. When the needle tip 222 moves outward from the outer shell 21, the reset member 226 is compressed and applies a force to the spring sleeve 225 in the lifting direction facing away from the protruding hole 213, so that the needle tip 222 retracts into the outer shell 21.

[0052] Furthermore, the bottom surface of the outer casing 21 facing the push rod seat 127 is provided with a plurality of first connecting members 218 and a retractable pin 219; correspondingly, the top surface of the push rod seat 127 facing the outer casing 21 is provided with a plurality of second connecting members 1279 and a plurality of positioning grooves 1280, wherein the positioning grooves 1280 may be V-shaped grooves. The first connecting members 218 and the second connecting members 1279 are magnetic. When the outer casing 21 and the push rod seat 127 approach each other, even if there is a deviation between the outer casing 21 and the push rod seat 127, due to the mutual attraction of the first connecting members 218 and the second connecting members 1279, the outer casing 21 and the push rod seat 127 rotate slightly relative to each other, and the pin 219 can slide to the bottom of the positioning groove 1280, thereby aligning the outer casing 21 and the push rod seat 127 and ensuring the communication between the second air passage 211 and the first air passage 1274. Preferably, the outer end of the pin 219 is hemispherical. Furthermore, it is understood that the pin 219 can also be disposed on the top surface of the push rod seat 127, and correspondingly, the positioning groove 1280 is formed on the bottom surface of the housing 21, which also enables the housing 21 to be aligned with the push rod seat 127, ensuring the communication between the second air passage 211 and the first air passage 1274.

[0053] Based on the above structure, the working process of the pin switching device in this embodiment will be explained.

[0054] The ejector pin 22 is pushed out of the outer casing 21:

[0055] Step S10: Place the ejector pin assembly 20 of the required specifications above the push rod seat 127;

[0056] Step S20: The lifting motor 112 is turned on by the controller, which drives the pushing unit 12 to slide along the lifting frame 111 and move towards the ejector pin assembly 20;

[0057] Step S30: The outer casing 21 pushes the micro-pressure switch 14, the controller controls the lifting motor 112 to stop running, the first connector 218 and the second connector 1279 attract each other, the pin 219 is inserted into the positioning groove 1280, the suction nozzle 1277 presses against the outer casing 21 and covers the second mounting hole 212, and the first air passage 1274 is connected to the second air passage 212;

[0058] Step S40: The controller activates the solenoid valve 131 to generate an airflow from the adsorption hole 214 through the second air passage 212, the second mounting hole 212, the suction nozzle 1277, the first vent hole 1277, the first air passage 1274, and the side hole 1275, and the blue film is adsorbed.

[0059] Step S50: The controller starts the push motor 123, the push motor 123 drives the cam 124 to lift the push rod 126, the push rod 126 pushes the ejector pin 22 out of the housing 21, thereby pushing the wafer away from the blue film; the third displacement sensor 15 detects the amount of movement of the push rod 126;

[0060] Step S60: After the wafer is picked up, under the control of the controller, the push motor 123 reverses, the push rod 126 moves away from the ejector pin 22 until the ejector pin 22 retracts into the housing 21; the solenoid valve 131 stops pumping air, the lifting motor 112 reverses, and the lifting frame 111 resets.

[0061] Compared with the prior art, the ejector pin lifting device of this utility model has the following advantages:

[0062] 1. The push rod moves continuously and smoothly, with good stability and high precision;

[0063] 2. The small deviation in the lifting position of the ejector pin can reduce the defect rate of the wafer;

[0064] 3. Static electricity is not easily conducted to the ejector pins, which can effectively protect the chip;

[0065] 4. It has a simple structure, occupies little space, and is highly efficient in replacing parts or performing maintenance.

[0066] The terminology used in the embodiments of this application is for the purpose of describing particular embodiments only and is not intended to limit the embodiments of this application. The singular forms “a,” “the,” and “the” used in the embodiments and claims of this application are also intended to include the plural forms, unless the context clearly indicates otherwise. It should also be understood that, unless otherwise stated, “a plurality” means two or more; the terms “first,” “second,” “third,” etc., are used only to distinguish and not to describe a particular order or sequence, nor should they be construed as indicating or implying relative importance. The term “and / or” as used herein refers to and includes any or all possible combinations of one or more associated listed items. When the above description relates to drawings, unless otherwise indicated, the same numbers in different drawings represent the same or similar elements. In the description of this application, those skilled in the art will understand the specific meaning of the above terms in this application according to the specific circumstances.

[0067] The embodiments described above are merely examples of several implementations of this utility model, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the utility model patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this utility model, and these modifications and improvements all fall within the protection scope of this utility model.

Claims

1. A needle ejecting device characterized by comprising: The push-up unit comprises a lifting unit and a push-up unit, wherein the push-up unit comprises: A fixed seat is mounted on the lifting unit and is provided with a sliding rail extending in the lifting direction; A push-up motor is connected to the fixed seat, and the axis of the output shaft is perpendicular to the lifting direction; A cam is mounted on the output shaft of the push-up motor; A base is abutted with the cam and is clamped on the sliding rail and slides along the sliding rail; A push rod is used to push the ejector pin, and the push rod is arranged on the base and extends in the lifting direction.

2. The ejector device according to claim 1, characterized in that: A transmission member is protruded on the side surface of the base, and the outer peripheral surface of the transmission member is connected with the outer peripheral surface of the cam.

3. The ejector device according to claim 2, characterized in that: A first insulating member is arranged between the transmission member and the base.

4. The ejector device of claim 1, wherein: The lifting unit comprises a lifting frame, a lifting motor and a support seat; the lifting frame is provided with a guide rail extending in the lifting direction; the lifting motor is mounted on the lifting frame; the support seat is clamped with the guide rail and slides along the guide rail under the driving of the lifting motor; and the fixed seat is mounted on the support seat.

5. The ejector device according to claim 4, characterized in that: The push-up unit further comprises a mounting plate; the fixed seat comprises a first plate member extending in the lifting direction and a second plate member extending in a direction perpendicular to the lifting direction; the first plate member is mounted on the support seat, and the sliding rail is arranged on the first plate member; The second plate member is arranged in a spaced manner with the support seat; the mounting plate is connected with the first plate member and the second plate member respectively to form a containing space; the base is arranged in the containing space, and the push rod extends out of the containing space from the base; The push-up motor is mounted on the mounting plate and is arranged outside the containing space.

6. The ejector device of claim 5, wherein: The push-up unit further comprises a mounting member, which is fixedly arranged on the mounting plate and is arranged opposite to the first plate member.

7. The ejector device of claim 5, wherein: A second insulating member is arranged between the base and the first plate member.

8. The ejector device of claim 4, wherein: A third displacement sensor is arranged on the support seat and is used to detect the movement of the base.

9. The ejector device of claim 8, wherein: The third displacement sensor is an optical displacement sensor; the base is provided with a baffle on the side facing the support seat, and the baffle can block the light of the third displacement sensor.

10. A push-up apparatus characterized by: The ejector pin seat is arranged on the fixed seat and is arranged in correspondence with the push rod in the lifting direction; the ejector pin seat comprises an ejector pin and a seat body, the seat body has a sliding hole extending in the lifting direction and penetrating through, the ejector pin is slidingly connected to the sliding hole, and the sliding hole is arranged in correspondence with the push rod.

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