Gripper and manipulator
By designing grippers with multiple support components and guiding mechanisms, the problem of low handling efficiency of existing robotic arms was solved, enabling simultaneous handling and collision protection of multiple graphite boats, thus improving handling efficiency and safety.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-03-18
- Publication Date
- 2026-03-20
AI Technical Summary
Existing robotic grippers typically have a single-layer structure, which means they can only handle one graphite boat at a time, resulting in low handling efficiency.
Design a gripper including a mounting base and at least two support members spaced apart in a vertical direction. Each support member supports a graphite boat, and the stability and accurate positioning of the graphite boat are ensured by elastic elements and guiding mechanisms. Combined with anti-collision detection and in-situ detection mechanisms, multiple graphite boats can be transported simultaneously.
It improves the handling efficiency of graphite boats, enabling the handling of multiple graphite boats at once, avoiding collision damage, and preventing empty grabs or missed grabs through in-situ detection.
Smart Images
Figure CN224012346U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The application belongs to the technical field of silicon wafer processing, and more particularly to a grabbing claw and a mechanical hand. BACKGROUND
[0002] Before coating, a silicon wafer needs to be loaded on a graphite boat, and then the graphite boat is put into a reaction furnace by a mechanical hand for coating.
[0003] In the related art, the grabbing claw of the mechanical hand is usually a single-layer structure, and only one graphite boat can be carried at a time, so the carrying efficiency is low. CONTENT OF THE UTILITY MODEL
[0004] The embodiment of the application provides a grabbing claw which can carry multiple graphite boats at a time, so that the carrying efficiency can be improved.
[0005] The technical scheme adopted by the embodiment of the application is as follows: a grabbing claw is provided, which comprises:
[0006] a mounting seat; and
[0007] at least two supporting members, each of which is arranged on the mounting seat, and each of which is arranged in a vertical direction, and each of which supports a graphite boat.
[0008] Further, the at least two supporting members are a first supporting member and at least one second supporting member, the first supporting member and each of the second supporting members are arranged in the vertical direction, and the first supporting member is located below each of the second supporting members.
[0009] The second supporting member comprises:
[0010] a connecting plate arranged on the mounting seat;
[0011] a supporting plate and an elastic member,
[0012] one end of the elastic member abuts against the connecting plate, the other end abuts against the bottom of the supporting plate, and the top of the supporting plate supports the graphite boat.
[0013] Further, the second supporting member further comprises a guide column, the connecting plate is provided with a movable hole, one end of the guide column is movably arranged in the movable hole, and the other end of the guide column is connected with the supporting plate.
[0014] Further, the elastic member comprises two groups or more groups, the guide column comprises two groups or more groups, and one elastic member is sleeved outside one guide column.
[0015] Further, the grabber further comprises at least two groups of guiding mechanisms, each of the guiding mechanisms corresponding to one of the supporting members, and each of the guiding mechanisms comprising:
[0016] a vertical member, a bottom end of the vertical member being connected to one side of the supporting member close to the mounting base; and
[0017] a guiding member, a top end of the guiding member being connected to a top end of the vertical member, and a bottom end of the guiding member being connected to one side of the supporting member away from the mounting base, and the graphite boat being supported on one side of the supporting member away from the mounting base.
[0018] Further, the mounting base comprises:
[0019] a fixing member; and
[0020] a rotating frame, the rotating frame being rotatably installed on the fixing member, and each of the supporting members being arranged on the rotating frame.
[0021] Further, the grabber further comprises a collision detection mechanism arranged on the rotating frame and a sensing member arranged on the fixing member, and when the rotating frame rotates to a preset angle, the collision detection mechanism and the sensing member collide to trigger a sensing signal.
[0022] Further, the grabber further comprises at least two in-place detection mechanisms arranged on the mounting base, each of the in-place detection mechanisms corresponding to one of the supporting members, and each of the in-place detection mechanisms being capable of detecting whether the corresponding supporting member supports the graphite boat.
[0023] The embodiment of the application further provides a mechanical hand, comprising:
[0024] a rack;
[0025] a lifting frame, the lifting frame being movably arranged on the rack in a vertical direction;
[0026] a moving frame, the moving frame being movably arranged on the lifting frame in a first direction; and
[0027] a clamping mechanism, the clamping mechanism comprising two grabbers arranged in a second direction, and each of the grabbers being the grabber as described above.
[0028] The vertical direction is arranged at an angle with the first direction and the second direction.
[0029] Further, the clamping mechanism comprises two groups or more groups, and each of the clamping mechanisms is arranged in the second direction in sequence.
[0030] The grabber provided by the embodiment of the present application has the beneficial effect that the grabber of the embodiment of the present application can carry multiple graphite boats at a time by arranging at least two supporting members on the mounting seat and spacing the supporting members along the vertical direction, and thus the carrying efficiency is improved. BRIEF DESCRIPTION OF DRAWINGS
[0031] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings needed to be used in the embodiments or prior art description will be briefly introduced as follows. Obviously, the drawings in the following description are only some embodiments of the present application, and other drawings can be obtained by those skilled in the art without creative labor.
[0032] Figure 1 The three-dimensional structure schematic diagram of the grabber provided by the embodiment of the present application is shown in the figure.
[0033] Figure 2 The partial enlarged schematic diagram of the grabber provided by the embodiment of the present application is shown in the figure.
[0034] Figure 3 The three-dimensional structure schematic diagram of the grabber provided by another embodiment of the present application is shown in the figure.
[0035] Figure 4 The three-dimensional structure schematic diagram of the mechanical hand provided by the embodiment of the present application is shown in the figure.
[0036] Figure 5 The side view of the mechanical hand provided by the embodiment of the present application is shown in the figure.
[0037] In the figure, various reference signs are as follows:
[0038] 100, grabber; 10, mounting seat; 11, fixing member; 12, rotating frame; 20, supporting member; 21, first supporting member; 22, second supporting member; 221, connecting plate; 222, supporting plate; 223, elastic member; 30, guiding mechanism; 31, vertical member; 32, guiding member; 40, anti-collision detection mechanism; 50, in-place detection mechanism; 200, rack; 300, lifting frame; 400, moving frame; 500, graphite boat. DETAILED DESCRIPTION
[0039] In order to make the technical problems, technical solutions and beneficial effects of the present application more clearly understood, the present application will be further described in detail in combination with the drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application and not to limit the present application.
[0040] It should be noted that when an element is referred to as being "fixed" or "set" on another element, it can be directly on the other element or indirectly on the other element. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or indirectly connected to the other element.
[0041] It should be understood that the terms "length", "width", "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer" and the like indicate directions or positions based on the directions or positions shown in the drawings, and are used for the purpose of facilitating the description of the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the present application.
[0042] In addition, the terms "first", "second", "third", etc. are used only for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, the features defined with "first", "second", etc. can explicitly or implicitly include one or more of the features. In the description of the present application, the meaning of "a plurality of" is two or more, unless otherwise explicitly specified.
[0043] Please refer to Figure 1 The present application provides a gripper 100. The gripper 100 includes a mounting seat 10 and at least two supporting members 20.
[0044] Each supporting member 20 is arranged on the mounting seat 10, and each supporting member 20 is arranged in a vertical direction. Each supporting member 20 supports a graphite boat 500. That is, the supporting member 20 is arranged in multiple, and can support multiple graphite boats 500 at the same time, so as to realize simultaneous carrying of multiple graphite boats 500 and improve the carrying efficiency. Specifically, the supporting member 20 can be arranged in two, three or more.
[0045] Please refer to Figure 1 The "vertical direction" can be represented by the Z-axis, please refer to Figure 4 The "first direction" described below is represented by the X-axis, and the "second direction" described below is represented by the Y-axis.
[0046] The gripper 100 provided by the present application can carry multiple graphite boats 500 at the same time by arranging at least two supporting members 20 on the mounting seat 10, each supporting member 20 supporting a graphite boat 500, thereby improving the carrying efficiency.
[0047] Please refer to Figure 1 and Figure 2At least two supporting members 20 can be a first supporting member 2120 and at least one second supporting member 2220, the first supporting member 2120 and each second supporting member 2220 are arranged in a vertical direction and the first supporting member 2120 is below each second supporting member 2220. That is, the first supporting member 2120 is located at the bottom layer, and the first supporting member 2120 and each second supporting member 2220 are arranged in a vertical direction from bottom to top.
[0048] Referring to Figure 2 The second supporting member 2220 can include a connecting plate 221, a supporting plate 222, and an elastic member 223. The connecting plate 221 is arranged on the mounting seat 10. One end of the elastic member 223 abuts against the connecting plate 221, and the other end abuts against the bottom of the supporting plate 222. The top of the supporting plate 222 supports the graphite boat 500. When the second supporting member 2220 supports the graphite boat 500, the supporting plate 222 will move downward under the action of the elastic force of the elastic member 223 to make the upper graphite boat 500 and the lower graphite boat 500 in flexible contact, so as to avoid the separation of the upper graphite boat 500 and the lower graphite boat 500. Specifically, the elastic member 223 can be a spring.
[0049] It can be understood that the structure of the first supporting member 2120 can be the same as or different from that of the second supporting member 2220. For example, since the first supporting member 2120 is located at the bottom layer, the first supporting member 2120 can also be arranged to be in hard abutment with the graphite boat 500, and does not need to be additionally provided with an elastic member 223 to achieve elastic contact with the graphite boat 500.
[0050] Referring to Figure 2 The second supporting member 2220 can further include a guide column (not shown in the figure), the connecting plate 221 is provided with a movable hole (not shown in the figure), one end of the guide column is movably arranged in the movable hole, and the other end of the guide column is connected with the supporting plate 222. Through the arrangement of the guide column, the movement of the supporting plate 222 can be guided to avoid displacement.
[0051] Referring to Figure 2 The elastic member 223 can include two or more groups, and the guide column can include two or more groups, and each elastic member 223 is sleeved outside each guide column. Through the cooperation of multiple groups of elastic members 223 and multiple groups of guide columns, the guiding effect of the movement of the supporting plate 222 can be further improved.
[0052] Referring to Figure 1 The supporting member 20 and the mounting seat 10 can be in an L-shaped structure. Through the arrangement of the L-shaped structure, the mounting seat 10 can avoid interfering with the supporting member 20 to support the graphite boat 500.
[0053] Referring toFigure 1 and Figure 2 The gripper 100 can further include at least two sets of guide mechanisms 30, each of which corresponds to a support member 20. The guide mechanism 30 includes a vertical member 31 and a guide member 32.
[0054] The bottom end of the vertical member 31 is connected to the side of the support member 20 close to the mounting base 10. The top end of the guide member 32 is connected to the top end of the vertical member 31, and the bottom end of the guide member 32 is connected to the side of the support member 20 away from the mounting base 10, and the graphite boat 500 is supported on the side of the support member 20 away from the mounting base 10. That is, the guide member 32 is inclined, and the guide member 32 is inclined downward along the side gradually away from the mounting base 10. When the graphite boat 500 is gripped, if the graphite boat 500 is offset, the position offset of the graphite boat 500 during the handling process can be automatically corrected through the arrangement of the guide member 32.
[0055] Please refer to Figure 1 The mounting base 10 can include a fixed member 11 and a rotating frame 12. The rotating frame 12 is rotatably mounted on the fixed member 11, and each support member 20 is arranged on the rotating frame 12. The fixed member 11 can be connected to external components. The rotating frame 12 is rotatably arranged relative to the fixed member 11, and when the support member 20 collides with the graphite boat 500, the rotating frame 12 can rotate at this time to avoid damaging the graphite boat 500.
[0056] Please refer to Figure 2 The gripper 100 can further include a collision detection mechanism 40 and a sensing member (not shown in the figure). The collision detection mechanism 40 is arranged on the rotating frame 12, and the sensing member is arranged on the fixed member 11. When the rotating frame 12 rotates to a preset angle, the collision detection mechanism 40 collides with the sensing member to trigger a sensing signal, so that an alarm can be issued to avoid damaging the graphite boat 500. When the support member 20 is not aligned with the graphite boat 500, it may collide with the graphite boat 500, thereby causing the rotating frame 12 to rotate, so that the collision detection mechanism 40 collides with the sensing member, thereby triggering an alarm.
[0057] Please refer to Figure 1 The gripper 100 can further include at least two in-place detection mechanisms 50 arranged on the mounting base 10, each of which corresponds to a support member 20. Each in-place detection mechanism 50 can detect whether the corresponding support member 20 supports the graphite boat 500 to prevent empty gripping or missed gripping.
[0058] Please refer to Figure 4 and Figure 5This application also provides a robotic arm, including a frame 200, a lifting frame 300, a movable frame 400, and a gripping mechanism. The lifting frame 300 is vertically movably mounted on the frame 200. The movable frame 400 is movably mounted on the lifting frame 300 along a first direction. The gripping mechanism includes two grippers 100 spaced apart along a second direction. The support members 20 of the two grippers 100 can respectively support the two sides of the graphite boat 500 along the second direction, thereby achieving the gripping and fixing of the graphite boat 500. Specifically, the graphite boat 500 has grooves on both sides along the second direction, and the support members 20 of the grippers 100 extend into the grooves of the graphite boat 500, thereby lifting the graphite boat 500. The grippers 100 can be any of the grippers 100 described in the above embodiments.
[0059] The vertical direction is set at an angle to the first and second directions. Specifically, it can be 90° or any other angle.
[0060] The robotic arm in this application embodiment has the beneficial effects brought by the gripper 100 in any of the above embodiments because it adopts the gripper 100 in any of the above embodiments, which will not be repeated here.
[0061] The robotic arm provided in this embodiment works as follows:
[0062] When the graphite boat 500 needs to be moved, firstly, the lifting frame 300 descends to a preset position; then, the moving frame 400 moves along a first direction so that the support members 20 of the gripper 100 just engage with both sides of the graphite boat 500; finally, the lifting frame 300 rises, thereby lifting the graphite boat 500 and thus realizing the movement of the graphite boat 500. Since the gripper 100 has multiple support members 20, multiple graphite boats 500 can be moved at once.
[0063] Please see Figure 4 and Figure 5 The clamping mechanism includes two or more sets, each set sequentially arranged along the second direction. By setting two or more sets of clamping mechanisms, multiple graphite boats 500 can be transported simultaneously along the second direction, further improving transport efficiency.
[0064] Please see Figure 3 and Figure 4When the clamping mechanism comprises two or more groups, the gripper 100 on one side of one group of the clamping mechanism adjacent to another group of the clamping mechanism can share one mounting base 10 with the gripper 100 on one side of the other group of the clamping mechanism adjacent to the one group of the clamping mechanism, so as to save space and make the overall structure more simple and compact. For example, when the clamping mechanism comprises two groups, the gripper 100 on one side of the first group of the clamping mechanism adjacent to the second group of the clamping mechanism can share one mounting base 10 with the gripper 100 on one side of the second group of the clamping mechanism adjacent to the first group of the clamping mechanism.
[0065] The above only describes the preferred embodiments of the present application and is not intended to limit the present application. Any modification, equivalent replacement and improvement made within the spirit and principle of the present application shall be included in the protection scope of the present application.
Claims
1. A gripper, characterized in that, include: Mounting base; as well as, At least two support members are provided, each of which is disposed on the mounting base and is spaced apart in the vertical direction, and each of the support members supports a graphite boat.
2. The gripper according to claim 1, characterized in that, At least two of the support members are a first support member and at least one second support member, wherein the first support member and each of the second support members are spaced apart along the vertical direction, and the first support member is located below each of the second support members; The second support component includes: A connecting plate is disposed on the mounting base; Support plate and elastic components, One end of the elastic element abuts against the connecting plate, and the other end abuts against the bottom of the support plate, while the top of the support plate supports the graphite boat.
3. The gripper according to claim 2, characterized in that, The second support also includes a guide post. The connecting plate has a movable hole. One end of the guide post is movably and vertically disposed in the movable hole, and the other end of the guide post is connected to the support plate.
4. The gripper according to claim 3, characterized in that, The elastic element includes two or more sets, and the guide post includes two or more sets, with each elastic element being sleeved on the outside of one of the guide posts.
5. The gripper according to any one of claims 1-4, characterized in that, The gripper further includes at least two sets of guiding mechanisms, each of which corresponds one-to-one with a support member. The guiding mechanism includes: A vertical member, the bottom end of which is connected to the side of the support member near the mounting base; and, A guide member, the top end of which is connected to the top end of the vertical member, and the bottom end of which is connected to the side of the support member away from the mounting base, wherein the graphite boat is supported by the side of the support member away from the mounting base.
6. The gripper according to any one of claims 1-4, characterized in that, The mounting base includes: Fasteners; and, A rotating frame is rotatably mounted on the fixed member, and each of the supporting members is respectively disposed on the rotating frame.
7. The gripper according to claim 6, characterized in that, The gripper also includes an anti-collision detection mechanism and a sensor. The anti-collision detection mechanism is mounted on the rotating frame, and the sensor is mounted on the fixed component. When the rotating frame rotates to a preset angle, the collision between the anti-collision detection mechanism and the sensor can trigger a sensing signal.
8. The gripper according to any one of claims 1-4, characterized in that, The gripper also includes at least two in-situ detection mechanisms disposed on the mounting base. Each in-situ detection mechanism corresponds one-to-one with one of the support members, and each in-situ detection mechanism can detect whether the corresponding support member supports a graphite boat.
9. A robotic arm, characterized in that, include: frame; The lifting frame is vertically movable and adjustable on the machine frame; A movable frame, movably mounted on the lifting frame along a first direction; and, A clamping mechanism, the clamping mechanism comprising two grippers spaced apart along a second direction, the grippers being the grippers as described in any one of claims 1-8; The vertical direction is set at an angle to the first direction and the second direction.
10. The robotic arm according to claim 9, characterized in that, The clamping mechanism includes two or more sets, and each clamping mechanism is arranged sequentially along the second direction.