Vacuum coating equipment for downward linear evaporation coating

Abstract

The utility model relates to the field of vacuum coating, and provides vacuum coating equipment for downward linear evaporation coating, which comprises a vacuum cavity, a conveying mechanism and an evaporation source, valves are arranged on the side walls of two ends of the vacuum cavity, a base plate can pass through the valves, and an assembly hole is arranged at the top of the vacuum cavity; the conveying mechanism is arranged in the vacuum cavity, is relatively positioned below the substrate and is suitable for conveying the substrate; the evaporation source is suitable for being installed in an assembly hole in the top of the vacuum cavity and is suitable for conducting full-area downward linear evaporation coating on a substrate. The evaporation source is arranged in the assembling hole in the top of the vacuum cavity, the base plate is arranged in the vacuum cavity and relatively located below the evaporation source, the conveying mechanism is located below the base plate, the evaporation source is not blocked at all, the evaporation source is suitable for conducting full-area downward linear evaporation coating on the base plate, the deformation quantity requirement of the base plate can be met, and the production efficiency is improved. And the coating quality and the process effect of the coating can also be ensured.

Description

TECHNICAL FIELD

[0001] The utility model relates to the field of vacuum coating, further relates to a vacuum coating equipment for downward linear evaporation coating. BACKGROUND

[0002] In the photovoltaic field, generally adopt flat plate type coating process, current linear evaporation coating is mostly upward evaporation coating structure, but with more and more large-format components appearing in the photovoltaic field, in the flat plate type transmission coating process, if the middle is not supported due to the large format, then the deformation such as bending will be generated, which influences process effect and efficiency etc., if supporting, then the upward linear evaporation coating structure cannot satisfy full-area coating or the coating quality and process effect near the support will be influenced, further influencing the whole large-format component. SUMMARY

[0003] In view of the above technical problems, the utility model aims at providing a vacuum coating equipment for downward linear evaporation coating, the evaporation source is arranged in the assembly hole at the top of the vacuum cavity, the substrate is arranged inside the vacuum cavity and is located below the evaporation source, the conveying mechanism is located below the substrate, the evaporation source does not produce any shielding, so that the evaporation source is suitable for full-area downward linear evaporation coating of the substrate, which can guarantee the deformation requirement of the substrate and the coating quality and process effect of the coating.

[0004] In order to achieve the above-mentioned purpose, the utility model provides a vacuum coating equipment for downward linear evaporation coating, which comprises a vacuum cavity, a conveying mechanism and an evaporation source, the vacuum cavity is provided with a valve on the side wall of both ends, the valve is suitable for passing through the substrate, and the vacuum cavity is provided with an assembly hole at the top;

[0005] The conveying mechanism is arranged in the vacuum cavity, and the conveying mechanism is located below the substrate and is suitable for conveying the substrate;

[0006] The evaporation source is suitable for being installed in the assembly hole at the top of the vacuum cavity, and the evaporation source is suitable for full-area downward linear evaporation coating of the substrate.

[0007] In some embodiments, a plurality of supporting blocks are further arranged in the vacuum cavity, the supporting blocks are suitable for supporting the upper cover of the vacuum cavity, the supporting blocks are located on both sides of the assembly hole, and notches are further arranged on the supporting blocks, the notches correspond to the valve and are suitable for passing through the substrate.

[0008] In some embodiments, the valve is arranged at both ends of the length direction of the vacuum cavity, and the top of the vacuum cavity is further provided with a pair of mounting holes, and the mounting holes are oppositely arranged at both sides of the assembly hole in the length direction of the vacuum cavity, and the mounting holes are suitable for mounting a cavity door, and the supporting blocks are oppositely arranged between the mounting holes and the assembly hole.

[0009] In some embodiments, the vacuum cavity is further provided with a position detection assembly arranged inside the cavity door and suitable for detecting the position of the substrate.

[0010] In some embodiments, the inner bottom wall of the cavity of the vacuum cavity is further provided with a plurality of auxiliary supporting blocks arranged below the substrate and suitable for supporting the substrate, and a film layer detection assembly suitable for detecting the film thickness of the substrate.

[0011] In some embodiments, the inner side wall of the vacuum cavity and the side of the cavity door are further provided with a stoving plate.

[0012] In some embodiments, the inner bottom wall of the cavity of the vacuum cavity is further provided with an air extraction hole, and the air extraction hole is further provided with a shielding plate arranged below the substrate.

[0013] In some embodiments, a supporting frame is further included, and the supporting frame is arranged at the bottom of the vacuum cavity and is suitable for horizontally arranging the vacuum cavity.

[0014] In some embodiments, the conveying mechanism includes a driving member and a conveying rod, the driving member is arranged at one end of the width direction of the vacuum cavity and drives the conveying rod to rotate, the conveying rod is suitable for extending to the inside of the vacuum cavity along the width direction of the vacuum cavity, and the conveying rod is oppositely arranged below the substrate.

[0015] In some embodiments, the outer side of the driving member is further provided with a protective cover.

[0016] Compared with the prior art, the vacuum coating equipment for downward linear evaporation coating provided by the present application has at least one of the following beneficial effects:

[0017] 1. The evaporation source is arranged in the assembly hole at the top of the vacuum cavity, the substrate is arranged inside the vacuum cavity and oppositely arranged below the evaporation source, and the conveying mechanism is arranged below the substrate. The evaporation source does not produce any shielding, so that the evaporation source is suitable for full-area downward linear evaporation coating of the substrate, which can not only ensure the deformation requirement of the substrate, but also ensure the coating quality and process effect of the coating.

[0018] 2. The support block is suitable for supporting the upper cover of the vacuum cavity, ensuring that the upper cover plate does not deform after the evaporation source is installed, and ensuring the stability and reliability of the vacuum coating equipment under complex working environments such as high temperature and high pressure.

[0019] 3. The auxiliary support block is arranged below the substrate to provide stable support for the substrate, ensuring the uniformity and quality of the coating; the film layer detection assembly is arranged on the inner bottom wall of the vacuum cavity, which can detect the coating thickness of the substrate in real time.

[0020] 4. The inner bottom wall of the vacuum cavity is also provided with an exhaust hole for discharging waste gas and excess gas in the cavity to maintain the vacuum degree and stability of the gas environment in the cavity; the shielding plate not only effectively prevents the substrate from being impacted by the airflow, optimizes the gas discharge efficiency, prevents the backflow of the coating material, but also protects the substrate and the equipment, facilitating maintenance and cleaning. BRIEF DESCRIPTION OF DRAWINGS

[0021] The above-mentioned characteristics, technical features, advantages and implementation modes of the present application will be further described in a clear and understandable manner in combination with the preferred embodiments and the accompanying drawings.

[0022] Figure 1 is a side view of the vacuum coating equipment;

[0023] Figure 2 is a structural view of the vacuum coating equipment;

[0024] Figure 3 is a sectional view of the vacuum cavity;

[0025] Figure 4 is a structural view of the vacuum cavity.

[0026] BRIEF DESCRIPTION OF DRAWINGS

[0027] vacuum cavity 1, valve 11, assembly hole 12, support block 13, slot 131, mounting hole 14, cavity door 141, auxiliary support block 15, film layer detection assembly 16, shielding plate 17, exhaust hole 18, shielding plate 181, conveying mechanism 2, driving part 21, protective cover 211, conveying rod 22, evaporation source 3, support frame 4. DETAILED DESCRIPTION

[0028] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the specific implementation modes of the present application will be described below with reference to the drawings. Obviously, the drawings described below are only some embodiments of the present application, and for those skilled in the art, other drawings can be obtained from these drawings without creative labor, and other embodiments can also be obtained.

[0029] For the sake of simplicity of the drawings, only parts related to the utility model are shown in the drawings, which do not represent the actual structure of the product. In addition, in order to make the drawings simple and easy to understand, in some drawings, only one of the parts with the same structure or function is shown schematically, or only one of them is marked. In this text, "one" not only means "only one", but also means "more than one".

[0030] It should be further understood that the term "and / or" used in the specification and appended claims of the present application means any combination of one or more of the associated listed items and all possible combinations, and includes these combinations.

[0031] In this text, it should be noted that, unless otherwise explicitly specified and limited, the terms "mounting", "connecting", "connection" should be understood broadly, for example, it can be fixed connection, or detachable connection, or integrally connected; it can be mechanical connection, or electrical connection; it can be directly connected, or indirectly connected through intermediate medium, or the communication inside two elements. For ordinary skilled in the art, the specific meaning of the above terms in the utility model can be understood according to the specific circumstances.

[0032] In addition, in the description of the present application, the terms "first", "second" and the like are only used to distinguish the description, and cannot be understood as indicating or implying relative importance. It should be noted that the above examples can be freely combined according to the needs. The above is only the preferred embodiment of the utility model, and it should be pointed out that, for ordinary skilled in the art, without departing from the principle of the utility model, a number of improvements and refinements can be made, which should be regarded as the protection scope of the utility model.

[0033] Reference Figure 1 And Figure 2 The utility model provides a kind of vacuum coating equipment for linear evaporation coating downwards, including vacuum cavity 1, conveying mechanism 2 and evaporation source 3, vacuum cavity 1 both ends side wall is equipped with valve 11, valve 11 is suitable for passing through substrate, vacuum cavity 1 top is equipped with assembly hole 12;Conveying mechanism 2 is set in vacuum cavity 1, conveying mechanism 2 is located below substrate and is suitable for conveying substrate;Evaporation source 3 is suitable for being installed in the assembly hole 12 of vacuum cavity 1 top, evaporation source 3 is suitable for the full-area linear evaporation coating downwards to substrate.

[0034] In this embodiment, the evaporation source 3 is arranged in the assembly hole 12 at the top of the vacuum chamber 1, the substrate is arranged inside the vacuum chamber 1 and is located below the evaporation source 3, and the conveying mechanism 2 is located below the substrate. The evaporation source 3 does not produce any obstruction, so that the evaporation source 3 is suitable for full-area downward linear evaporation plating of the substrate, which can not only ensure the deformation requirement of the substrate, but also ensure the plating quality and process effect of the plating.

[0035] Specifically, the vacuum chamber 1 is the basic framework of the entire vacuum plating device. The two end sidewalls are provided with valves 11, the size of the valves 11 can perfectly adapt to the passing requirement of the substrate, ensure smooth passage of the substrate in and out of the vacuum chamber 1, and effectively maintain the vacuum environment in the chamber, providing stable conditions for the plating process. In addition, the top of the vacuum chamber 1 also reserves an assembly hole 12, which provides precise positioning for the installation of the evaporation source 3, so that the evaporation source 3 can be stably and accurately installed at the top of the chamber, laying a solid foundation for subsequent plating operations. The conveying mechanism 2 is arranged inside the vacuum chamber 1 and is located below the substrate. The conveying mechanism 2 undertakes the key task of accurately conveying the substrate in the vacuum chamber 1, which can ensure that the substrate always maintains a stable position and posture during plating, providing a strong guarantee for uniform plating effect. The evaporation source 3 is the core component for realizing the plating function, which is adapted to the assembly hole 12 at the top of the vacuum chamber 1. During work, the evaporation source 3 can produce high-energy evaporation materials, which are uniformly sprayed downward in a linear manner to perform full-area evaporation plating on the substrate located below. Since the evaporation source 3 is located directly above the substrate, and the conveying mechanism 2 is located below the substrate, the evaporation source 3 will not be obstructed during work, so that it can uniformly cover the surface of the substrate with evaporation materials without any obstruction. This not only ensures that the substrate hardly deforms during plating, meeting the requirements of high-precision processing, but also ensures the uniform thickness and stable quality of the plating layer, greatly improving the overall effect of the plating process.

[0036] The prior art mainly uses upward linear evaporation plating. As the width of photovoltaic modules becomes larger and larger, the original upward linear evaporation plating structure cannot perform full-area plating due to the substrate support structure, or the plating quality and process effect near the support will be affected. In this application, the evaporation source 3 is arranged at the top of the vacuum chamber 1, ensuring that the downward linear evaporation source 3 is fixedly installed and supported stably without any obstruction. The conveying mechanism 2 is arranged below the substrate, and the lower side of the substrate is sufficiently supported without deformation, thereby ensuring the deformation requirement of the substrate and the plating quality and process effect of the plating.

[0037] It is worth noting that the support frame 4 is also included, which is arranged at the bottom of the vacuum cavity 1 and is suitable for horizontally arranging the vacuum cavity 1. The support frame 4 is arranged at the bottom of the vacuum cavity 1 and can horizontally arrange the vacuum cavity 1, ensuring that the equipment always remains stable during operation.

[0038] Further, referring to Figure 2 and Figure 3 , a plurality of support blocks 13 are also provided in the vacuum cavity 1, which are suitable for supporting the upper cover of the vacuum cavity 1. The support blocks 13 are located on both sides of the assembly hole 12, and the support blocks 13 are also provided with notches 131 corresponding to the valve 11 and suitable for passing the substrate.

[0039] In this embodiment, the support blocks 13 are suitable for supporting the upper cover of the vacuum cavity 1, ensuring that the upper cover does not deform after the evaporation source 3 is installed, and ensuring the stability and reliability of the vacuum coating equipment in complex working environments such as high temperature and high pressure.

[0040] Specifically, the support blocks 13 are located on both sides of the assembly hole 12, which can accurately support the upper cover and the bottom of the vacuum cavity 1, ensuring that the upper cover can still remain stable and not deformed after the evaporation source 3 is installed. Because the evaporation source 3 generates high temperature and high pressure during operation, and its weight cannot be ignored, the existence of the support blocks 13 is crucial to maintaining the stability and reliability of the entire equipment structure. They can evenly disperse the pressure borne by the upper cover, avoiding deformation caused by excessive local stress, thereby providing a solid guarantee for the stable operation of the evaporation source 3. In addition, the support blocks 13 are also provided with notches 131, which are designed to correspond to the position of the valve 11 and are accurately matched in size and shape, and can perfectly adapt to the passing demand of the substrate. When the substrate is moved in the vacuum cavity 1 under the driving of the conveying mechanism 2, the notches 131 provide a smooth channel for the passing of the substrate, ensuring that the substrate will not be hindered in the process of entering and leaving the vacuum cavity 1. This not only optimizes the conveying process of the substrate, but also further improves the operation efficiency of the entire vacuum coating equipment.

[0041] It is worth noting that through the support blocks 13, not only can the upper cover be effectively ensured not to deform after the evaporation source 3 is installed, ensuring the stability and reliability of the equipment in complex working environments such as high temperature and high pressure, but also can closely cooperate with the valve 11 and the conveying mechanism 2, providing all-round support for the conveying and coating operation of the substrate.

[0042] Further, referring to Figure 1 and Figure 4, the valve 11 is arranged at both ends of the length direction of the vacuum cavity 1, and a pair of mounting holes 14 are arranged at the top of the vacuum cavity 1, which are located on both sides of the assembly hole 12 in the length direction of the vacuum cavity 1, and a cavity door 141 is arranged in the mounting hole 14.

[0043] In this embodiment, the valve 11 ensures smooth transportation of the substrate and sealing of the vacuum cavity 1; the mounting hole 14 and the cavity door 141 provide convenience for maintenance and operation of the equipment; and the support block 13 ensures the stability and reliability of the equipment in structure.

[0044] Specifically, the valve 11 is arranged at both ends of the length direction of the vacuum cavity 1, and the substrate can enter the vacuum cavity 1 from one end and smoothly move out from the other end after coating, which not only optimizes the transportation process of the substrate, but also improves the automation degree and operation efficiency of the equipment. When the substrate does not enter or leave the cavity, the valve 11 can be tightly closed to ensure that the vacuum environment in the cavity is not disturbed by the outside world, thereby providing stable conditions for the coating process. A pair of mounting holes 14 are arranged at the top of the vacuum cavity 1, which are located on both sides of the assembly hole 12 in the length direction of the vacuum cavity 1. The mounting hole 14 is suitable for installing the cavity door 141, and the arrangement of the cavity door 141 provides great convenience for the maintenance and operation of the vacuum cavity 1. When the evaporation source 3 needs to be installed, debugged or replaced, the cavity door 141 can be easily opened, and the operator can easily access the evaporation source 3 in the assembly hole 12, and after completing the related operation, the cavity door 141 is closed to restore the sealing of the vacuum cavity 1. This not only improves the maintainability of the equipment, but also reduces the damage to the structure of the equipment caused by frequent disassembly of the upper cover. The support block 13 is located between the mounting hole 14 and the assembly hole 12, which can fully play its role in structural support and functional assistance. On the one hand, the support block 13 can provide stable support for the upper cover of the vacuum cavity 1, ensuring that the upper cover does not deform after installing the evaporation source 3, thereby ensuring the stable operation of the evaporation source 3 and the high-quality completion of the coating process. On the other hand, the existence of the support block 13 also provides additional structural support for the installation and operation of the cavity door 141, so that the cavity door 141 can be stably installed in the mounting hole 14 and smoothly opened and closed when needed.

[0045] It is worth noting that the opening mode of the cavity door 141 can be both hinged and fixed by screws, electric hydraulic support rods, etc., which are all prior art in the field, and the present application does not make further limitations. Moreover, the vacuum cavity 1 is also provided with other functional structures inside, which are all located on the bottom of the substrate or the cavity door 141, and do not block the evaporation source 3. Among them, the vacuum cavity 1 is also provided with a position detection assembly, which is arranged on the inner side of the cavity door 141 and is suitable for detecting the position of the substrate. The position detection assembly ensures the accuracy of the substrate during transportation, coating and removal, and can accurately judge whether the substrate has reached the predetermined position when it enters the vacuum cavity 1, thereby providing reliable position information for the subsequent coating process. The position detection assembly is arranged on the cavity door 141, which also provides great convenience for the maintenance and operation of the equipment. When it is necessary to check or maintain the inside of the vacuum cavity 1, the cavity door 141 can be easily opened, and the position detection assembly can monitor the opening state of the cavity door 141 in real time to ensure the safety of the operator.

[0046] Further, referring to Figure 2 and Figure 4 , the inner wall of the vacuum cavity 1 is also provided with a plurality of auxiliary support blocks 15 and a film layer detection assembly 16, the auxiliary support blocks 15 are arranged below the substrate and are suitable for supporting the substrate, and the film layer detection assembly 16 is suitable for detecting the coating thickness of the substrate.

[0047] In this embodiment, the auxiliary support blocks 15 are arranged below the substrate to provide stable support for the substrate and ensure the uniformity and quality of the coating; the film layer detection assembly 16 is arranged on the inner wall of the vacuum cavity 1 and can detect the coating thickness of the substrate in real time.

[0048] Specifically, the auxiliary support blocks 15 are arranged below the substrate, and during the vacuum coating process, the substrate needs to be kept flat and stable in a complex environment of high temperature and high vacuum, etc. The auxiliary support blocks 15 can ensure that the substrate always remains horizontal during transportation, providing ideal conditions for subsequent coating operations and ensuring the uniformity and quality of the coating. The auxiliary support blocks 15 can also effectively distribute the pressure borne by the substrate, avoiding deformation or damage of the substrate caused by uneven local stress, thereby improving the stability of the substrate during the coating process and prolonging the service life of the substrate. The film layer detection assembly 16 can detect the coating thickness of the substrate in real time, so that the equipment can timely adjust the evaporation rate of the evaporation source 3, the speed of the conveying mechanism 2 or other related parameters during the coating process, thereby ensuring the uniformity and consistency of the coating thickness. Through the accurate measurement of the film layer detection assembly 16, the equipment can realize precise control of the coating process, significantly improving the quality and reliability of the product. The detection method of the film layer detection assembly 16 is various, which is all prior art in the field, and the present application does not make further limitations here.

[0049] Preferably, the inner side wall of the vacuum cavity 1 and the cavity door 141 are also provided with a deposition-preventing plate 17. In this embodiment, the deposition-preventing plate 17 not only effectively prevents the deposition of the coating material, protects the cavity structure and sealing, but also optimizes the coating process and efficiency, and facilitates the maintenance and cleaning of the equipment.

[0050] Specifically, during the vacuum coating process, the coating material generated by the evaporation source 3 will diffuse in the form of gas or particles to the surrounding and deposit on the surface of the substrate to form a thin film. However, in actual operation, part of the coating material may be deposited on the inner side wall of the vacuum cavity 1 and the cavity door 141 due to diffusion. This deposition not only wastes valuable coating material, but also may cause the internal surface of the cavity to become rough, affecting the subsequent coating quality. The deposition of the deposition-preventing plate 17 can effectively block the deposition of these excess coating materials, ensuring the cleanliness and smoothness of the cavity interior, thereby providing a stable environment for high-quality coating process. The integrity and sealing of the surface of the inner side wall of the vacuum cavity 1 and the cavity door 141 are directly related to the performance and service life of the equipment. During the coating process, the high temperature and high pressure environment may cause certain corrosion or damage to the surface of the cavity, especially when the evaporation source 3 is working, the temperature and pressure inside the vacuum cavity 1 change more dramatically. The presence of the deposition-preventing plate 17 can provide an additional layer of protection for the surface of the vacuum cavity 1, preventing the deposition of coating materials from causing chemical corrosion or physical damage to the surface of the cavity, thereby prolonging the service life of the vacuum cavity 1, while ensuring the sealing of the vacuum cavity 1 is not affected. Moreover, since the deposition-preventing plate 17 can effectively block the deposition of the coating material, during maintenance, the operator does not need to spend a lot of time and effort to clean the deposits inside the cavity. Only the surface of the deposition-preventing plate 17 needs to be cleaned regularly to maintain the cleanliness of the cavity interior, thereby reducing the maintenance time and cost of the equipment.

[0051] Further, referring to Figure 2 and Figure 3 , the inner bottom wall of the vacuum cavity 1 is also provided with an exhaust hole 18, and the exhaust hole 18 is also covered with a shielding plate 181, which is located below the substrate.

[0052] In this embodiment, the inner bottom wall of the vacuum cavity 1 is also provided with an exhaust hole 18 for exhausting waste gas and excess gas inside the cavity to maintain the vacuum degree and stability of the gas environment inside the cavity; the shielding plate 181 not only effectively prevents the substrate from being impacted by the gas flow, optimizes the gas exhaust efficiency, and prevents the backflow of the coating material, but also protects the substrate and the equipment, facilitating maintenance and cleaning.

[0053] Specifically, during the vacuum coating process, the gas exhaust from the exhaust holes 18 can cause a certain air flow impact on the substrate, especially when the substrate is in a state of static or slow movement. This air flow impact can cause slight vibration of the substrate, which in turn affects the uniformity and quality of the coating. The shielding plate 181 can effectively block the air flow directly exhausted from the exhaust holes 18, avoiding direct impact of the air flow on the substrate, thereby ensuring that the substrate remains stable during the coating process and improving the coating quality. The shielding plate 181 can also guide the flow direction of the gas exhausted from the exhaust holes 18, making it more uniformly distributed at the bottom of the cavity, thereby optimizing the efficiency of gas exhaust, avoiding vortex or local accumulation of gas in the cavity, and ensuring that the gas in the cavity can be quickly and uniformly exhausted, maintaining the stability of the vacuum degree and gas environment in the cavity. During the coating process, the coating material generated by the evaporation source 3 will diffuse in the form of particles in all directions, and part of the material may flow into the exhaust holes 18 along with the gas flow. The shielding plate 181 can effectively block the backflow of these coating materials, preventing them from entering the exhaust holes 18 and depositing on the inner wall or pipeline of the exhaust holes 18. This not only reduces the waste of coating materials, but also avoids the blockage of the exhaust holes 18 caused by material deposition, prolonging the service life of the equipment. Moreover, the shielding plate 181 is located below the substrate, which can provide additional protection for the substrate, preventing the high-temperature gas or plasma near the exhaust holes 18 from directly contacting the substrate, thereby reducing the thermal damage to the substrate. At the same time, the shielding plate 181 can also protect the exhaust holes 18 from the deposition of coating materials, ensuring the smoothness of the exhaust holes 18 and maintaining the normal operation of the equipment. Since the shielding plate 181 can block most of the impurities and coating materials, the cleaning frequency of the exhaust hole 18 area can be significantly reduced. This not only reduces the time and cost of equipment maintenance, but also improves the operating efficiency of the equipment. In addition, the design of the shielding plate 181 also makes the maintenance of the exhaust hole 18 area more convenient, and the operator can easily clean the surface of the shielding plate 181 without frequent disassembly of the exhaust hole 18 components.

[0054] Further, referring to Figure 2 and Figure 4 , the conveying mechanism 2 includes a driving member 21 and a conveying rod 22, the driving member 21 is arranged at one end of the vacuum cavity 1 in the width direction and drives the conveying rod 22 to rotate, and the conveying rod 22 extends into the vacuum cavity 1 in the width direction of the vacuum cavity 1 and is located below the substrate.

[0055] In this embodiment, the conveying rod 22 extends into the vacuum cavity 1 in the width direction of the vacuum cavity 1 and is located below the substrate, which not only saves space but also provides stable support for the conveying of the substrate.

[0056] Specifically, the driving member 21 is arranged at one or both ends of the vacuum cavity 1 in the width direction, used to provide power for the conveying rod 22, and drive the conveying rod 22 to rotate. The driving member 21 can effectively transmit power to the conveying rod 22, ensuring the stable operation of the conveying rod 22 inside the vacuum cavity 1. Through the precise control of the driving member 21, the conveying rod 22 can rotate at a preset speed and direction, thereby realizing the accurate conveying of the substrate. This not only improves the efficiency of substrate conveying, but also ensures the position accuracy of the substrate during the coating process, avoiding the decline of coating quality caused by unstable conveying. The driving member 21 is also provided with a protective cover outside. The protective cover can prevent the operator from accidentally contacting the moving parts of the driving member 21 during the operation of the equipment, thereby improving the safety of the equipment. It can also prevent dust and other impurities from entering the inside of the driving member 21, reduce the wear of mechanical parts, and prolong the service life of the driving member 21.

[0057] Further, the present application aims to match the downward linear evaporation source 3 structure, the vacuum cavity 1 does not produce any shielding to the evaporation source 3, and the conveying mechanism 2 can convey the substrate, which can ensure the transmission of the substrate in the vacuum cavity 1, and can be adjusted according to the process requirements to realize the requirements of swinging or accelerating transmission. In addition, the present vacuum cavity 1 provides the installation of various detection signals, and the four around the inside of the vacuum cavity 1 can be installed with the anti-reflecting plate 17, and has a detachable cavity door 141, which can be used by the operator. Therefore, the vacuum cavity 1 not only meets the functions of installing and fixing the evaporation source 3 and not shielding the evaporation source 3, but also meets the functions of installing the film layer detection assembly 16 and the position detection assembly, installing the valve 11 or the blind plate on the side of the vacuum cavity 1, installing the hinge of the cavity door 141, the position of the exhaust port, the support of the support block 13, etc. And the inner wall side of the vacuum cavity 1 can fix the anti-reflecting plate 17 as needed to maintain the cleanliness of the inside of the vacuum cavity 1, and can process and weld various flange interfaces as needed for function expansion, etc.

[0058] Specifically, the length, width, and height of the vacuum chamber 1 can be adjusted according to actual needs. The installation position of the evaporation source 3 and the position of the sealing groove can also be adjusted according to actual needs. The vacuum chamber 1 can meet all the above requirements and can be processed and supplemented according to actual process requirements. A support frame 4 is installed on the lower side of the vacuum chamber 1 to fix the chamber and ensure it is level. The vacuum chamber 1 is manufactured using a welding process. To ensure that the upper cover plate does not deform after the evaporation source 3 is installed, a support block 13 can be added inside the vacuum chamber 1. A groove 131 is machined inside the support block 13 to ensure that the substrate does not scrape during transport. The four sides of the vacuum chamber 1 can be processed as needed to accommodate the installation of the conveying mechanism 2 for substrate transport, the position detection component for substrate position detection signals, the film layer detection component 16 for film thickness detection, the maintenance door 141, and the air extraction port, etc. The processing positions can be adjusted according to actual needs to meet process requirements. The inner wall of the vacuum chamber 1 can be machined with threaded holes for fixing the anti-fall plate 17 and other structures, and the outer wall can also be used to fix protective covers and other mechanisms.

[0059] It should be noted that the above embodiments can be freely combined as needed. The above are merely preferred embodiments of this utility model. It should be pointed out that for those skilled in the art, several improvements and modifications can be made without departing from the principle of this utility model, and these improvements and modifications should also be considered within the protection scope of this utility model.

Claims

1. A vacuum coating apparatus for downward linear evaporation coating, characterized in that, include: A vacuum chamber, wherein valves are provided on the side walls at both ends of the vacuum chamber, the valves are adapted to allow the passage of a substrate, and an assembly hole is provided on the top of the vacuum chamber; A conveying mechanism is disposed within the vacuum cavity, and is positioned below the substrate and adapted to convey the substrate. An evaporation source, which is adapted to be installed in the mounting hole at the top of the vacuum chamber, is adapted to perform downward linear evaporation coating on the substrate over its entire area.

2. The vacuum coating equipment for downward linear evaporation coating according to claim 1, characterized in that, The vacuum chamber is also provided with several support blocks, which are adapted to support the upper cover of the vacuum chamber. The support blocks are located opposite each other on both sides of the assembly hole. The support blocks are also provided with slots, which correspond to the valve and are adapted to allow passage of the base plate.

3. The vacuum coating equipment for downward linear evaporation coating according to claim 2, characterized in that, The valve is located at both ends of the vacuum cavity along its length. The top of the vacuum cavity is also provided with a pair of mounting holes, which are located opposite to the assembly hole on both sides of the vacuum cavity along its length. The mounting holes are suitable for mounting a cavity door, and the support block is located between the mounting hole and the assembly hole.

4. A vacuum coating apparatus for downward linear evaporation coating according to claim 3, characterized in that, The vacuum chamber is also provided with a position detection component, which is disposed inside the chamber door and is adapted to detect the position of the substrate.

5. A vacuum coating apparatus for downward linear evaporation coating according to claim 2, characterized in that, The vacuum chamber is further provided with several auxiliary support blocks and a film detection component on its inner bottom wall. The auxiliary support blocks are located below the substrate and are adapted to support the substrate. The film detection component is adapted to detect the coating thickness of the substrate.

6. A vacuum coating apparatus for downward linear evaporation coating according to claim 3, characterized in that, The inner wall of the vacuum cavity and the side of the cavity door are also provided with anti-stick plates.

7. A vacuum coating apparatus for downward linear evaporation coating according to claim 1, characterized in that, The vacuum chamber is provided with an air extraction hole on its inner bottom wall, and a baffle plate is provided on the air extraction hole, with the baffle plate located opposite to the substrate.

8. A vacuum coating apparatus for downward linear evaporation coating according to claim 1, characterized in that, It also includes a support frame, which is disposed at the bottom of the vacuum chamber and is adapted to horizontally position the vacuum chamber.

9. A vacuum coating apparatus for downward linear evaporation coating according to claim 1, characterized in that, The conveying mechanism includes a driving member and a conveying rod. The driving member is disposed at one end of the vacuum cavity in the width direction and drives the conveying rod to rotate. The conveying rod is adapted to extend into the vacuum cavity along the width direction and is located below the substrate.

10. A vacuum coating apparatus for downward linear evaporation coating according to claim 9, characterized in that, The drive component is also equipped with a protective cover on its outer side.

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