Substrate frame main body mechanism for coated glass sheet

Abstract

The utility model relates to the technical field of coated glass sheets, and discloses a substrate rack main body mechanism for coated glass sheets, which comprises a substrate rack framework, a guide rail assembly and an insulated wire supporting assembly, and is characterized in that the top and the bottom of the substrate rack framework are respectively provided with a top connecting plate and a bottom connecting plate; the top connecting plate and the bottom connecting plate are connected through a guide rail assembly, the guide rail assembly comprises an upper guide rail, and according to the main body mechanism for the coated glass sheet substrate frame, an insulating block is embedded into a guide rail gap so as to block current conduction between metal frames; an operator can adjust the overall height of the substrate frame through the sliding characteristic of the guide rails, the insulating blocks effectively eliminate electrostatic interference while ensuring the structural stability, and the design of the double connecting plates at the top and the bottom is matched with the rail assemblies, so that the substrate frame keeps controllable deformation when bearing loads in a vacuum environment, and the service life of the substrate frame is prolonged. The problem of deviation caused by traditional single-point fixing is solved.

Description

TECHNICAL FIELD

[0001] The utility model relates to a coated glass sheet technical field, concretely for a kind of coated glass sheet substrate rack main body mechanism. BACKGROUND

[0002] Coated glass sheet substrate rack main body mechanism is the core device for carrying glass substrate in vacuum coating process, it is through the cooperation of frame structure, guide assembly and fixed module, realizes the accurate positioning and stable support of substrate in coating cavity.The traditional substrate rack is usually composed of metal frame, bolt locking type connecting plate and simple guide rail, the traditional substrate rack adopts the mode of single-sided connecting plate and frame welding fixed, the installation positioning of substrate rack is realized by single-point rigid connection, single fixed point is set on the top or bottom of frame to simplify structure.

[0003] However, this single-point fixed mode has serious defects: when substrate rack carries large-size glass substrate, since single-sided connecting plate bears all load, frame is easy to occur distortion under vacuum negative pressure and high-temperature environment, leading to the relative position deviation of substrate and coating target material, directly causing uneven film thickness. INVENTION CONTENTS

[0004] The utility model aims at providing a kind of for coated glass sheet substrate rack main body mechanism to solve the problem that the serious defects of the single-point fixed mode of the prior art exist: when substrate rack carries large-size glass substrate, since single-sided connecting plate bears all load, frame is easy to occur distortion under vacuum negative pressure and high-temperature environment, leading to the relative position deviation of substrate and coating target material, directly causing uneven film thickness.

[0005] In order to solve the above technical problems, the utility model provides the following technical scheme: a kind of for coated glass sheet substrate rack main body mechanism, including substrate rack frame, guide rail assembly and insulating wire supporting wire assembly, the top and bottom of the substrate rack frame are respectively provided with top connecting plate and bottom connecting plate, the top connecting plate and bottom connecting plate are connected by guide rail assembly, the guide rail assembly includes upper guide rail, lower guide rail and insulating block embedded in the gap between guide rail.

[0006] Preferably, the insulating wire supporting wire assembly includes top wire supporting module and bottom wire supporting module, the top wire supporting module, middle wire supporting module and bottom wire supporting module are connected to substrate by wire.

[0007] Preferably, the insulating wire is ceramic-coated copper core wire, and the two ends of the insulating wire are locked by elastic washer and standard flat washer.

[0008] Preferably, the guide rail assembly further includes a positioning bushing and a gasket, the positioning bushing is embedded in the interior of the upper guide rail, and the gasket is provided at the connection between the lower guide rail and the substrate rack frame.

[0009] Preferably, the top connecting plate is connected with the substrate holder frame by a hexagonal socket head screw, and the bottom connecting plate is fixedly connected with the substrate holder frame by a hexagonal countersunk head screw.

[0010] Preferably, vertical beams are arranged on both sides of the substrate holder frame, and the two vertical beams are arranged in a symmetrical distribution.

[0011] Preferably, the insulating block is of a split structure, and a heat dissipation groove is arranged on the surface of the insulating block.

[0012] Compared with the prior art, the utility model has the beneficial effects that:

[0013] Firstly, the substrate holder frame is used as a main support structure, the top connecting plate and the bottom connecting plate are rigidly connected through a guide rail assembly, the upper guide rail and the lower guide rail constitute a sliding rail system, the insulating block is embedded in the gap between the guide rails to block the current conduction between the metal frames, when the substrate is installed, the operator can adjust the overall height of the substrate holder through the sliding characteristics of the guide rail, the insulating block can effectively eliminate the static interference while ensuring the structural stability, the double connecting plate design of the top and the bottom cooperates with the rail assembly, so that the substrate holder can keep the deformation controllable when bearing the load in the vacuum environment, and the deviation problem caused by the traditional single-point fixing is solved.

[0014] Secondly, the insulating wire supporting assembly is formed by three-level wire supporting modules of the top, the middle and the bottom, the insulating wire is transversely penetrated through the substrate holder, when the glass substrate is installed, the operator places the glass substrate in the groove of the wire supporting assembly, and cooperates with the insulating characteristics of the ceramic coating of the insulating wire, so that the uneven defect of the film layer caused by the static adsorption in the film plating process can be avoided. BRIEF DESCRIPTION OF DRAWINGS

[0015] Figure 1 It is a whole structure schematic view of the utility model;

[0016] Wherein: 1, substrate holder frame; 2, guide rail assembly; 3, insulating wire supporting assembly; 11, top connecting plate; 12, bottom connecting plate; 13, vertical beam; 21, upper guide rail; 22, lower guide rail; 23, insulating block; 24, positioning bushing; 25, pad sleeve; 31, top wire supporting module; 32, middle wire supporting module; 33, bottom wire supporting module; 34, insulating wire. DETAILED DESCRIPTION

[0017] The technical solutions in the embodiments of the utility model will be clearly and completely described below with reference to the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, rather than all the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of the utility model.

[0018] The utility model provides the following technical scheme:

[0019] Please refer to Figure 1 A kind of for coating glass piece substrate frame main body mechanism, including substrate frame frame 1, guide rail assembly 2 and insulating wire line supporting component 3, the top and bottom of substrate frame frame 1 are equipped with top connecting plate 11 and bottom connecting plate 12 respectively, top connecting plate 11 and bottom connecting plate 12 are connected by guide rail assembly 2, guide rail assembly 2 includes upper guide rail 21, lower guide rail 22 and insulating block 23 embedded in the gap of guide rail.

[0020] Through the above technical scheme, substrate frame frame 1 is used as main body support structure, and the top connecting plate 11 and the bottom connecting plate 12 are rigidly connected by the guide rail assembly 2, wherein the upper guide rail 21 and the lower guide rail 22 constitute a sliding rail system, and the insulating block 23 is embedded in the gap of the guide rail to block the current conduction between the metal frames. When the substrate is installed, the operator can adjust the overall height of the substrate frame by the sliding characteristics of the guide rail, and the insulating block 23 effectively eliminates the static interference while ensuring the stability of the structure. The double connecting plate design of the top and the bottom cooperates with the track assembly, so that the substrate frame remains controllable deformation when bearing load in a vacuum environment, solving the deviation problem caused by traditional single-point fixation.

[0021] Specifically, the insulating wire line supporting component 3 includes a top wire supporting module 31, a middle wire supporting module 32, and a bottom wire supporting module 33. The top, middle, and bottom wire supporting modules 31, 32, and 33 are connected to the substrate through wires.

[0022] Through the above technical scheme, the insulating wire line supporting component 3 forms a distributed fixing system through the top, middle, and bottom three wire supporting modules. The insulating wire transversely penetrates the substrate frame. When installing, the operator places the glass substrate in the groove of the insulating wire line supporting component 3. In combination with the insulating property of the ceramic coating of the insulating wire, the uneven defects of the film layer caused by static adsorption during the coating process can be avoided.

[0023] Specifically, the insulating wire is a ceramic-coated copper core wire, and the two ends of the insulating wire 34 are locked by elastic washers and standard flat washers.

[0024] Through the technical scheme, the ceramic-coated copper core wire constitutes an insulating wire, elastic washers and flat washers are combined to lock the two ends, a torque wrench is used to tighten the screw during installation, and the installation and disassembly are convenient.

[0025] Specifically, the guide rail assembly 2 further comprises a positioning bush 24 and a gasket 25, the positioning bush 24 is embedded in the inner part of the upper guide rail 21, and the gasket 25 is arranged at the connection between the lower guide rail 22 and the substrate holder frame 1.

[0026] Through the technical scheme, the positioning bush 24 is pressed into the inner hole of the upper guide rail 21, and forms a precise guide pair with the gasket 25 of the lower guide rail 22, during assembly, the inner diameter tolerance of the positioning bush 24 ensures the coaxiality of the sliding shaft, and the polyurethane material of the gasket 25 absorbs vibration energy, improving the working stability.

[0027] Specifically, the top connecting plate 11 is screwed to the substrate holder frame 1 through an inner hexagonal flat round head screw, and the bottom connecting plate 12 is screwed to the substrate holder frame 1 through an inner hexagonal countersunk screw.

[0028] Through the technical scheme, the top connecting plate 11 is locked in a matrix layout by an inner hexagonal flat round head screw, and the bottom connecting plate 12 is seamlessly installed by an inner hexagonal countersunk screw, and during assembly, it is tightened in three times according to the diagonal line order, and the flatness of the connecting plate surface is matched, so that the overall torsional stiffness of the frame is improved, and the plastic deformation is not generated under the acceleration impact.

[0029] Specifically, the substrate holder frame 1 is provided with vertical beams 13 on both sides, and the two vertical beams 13 are arranged in a symmetrical distribution.

[0030] Through the technical scheme, the symmetrical distribution of the vertical beams 13 improves the rigidity of the main structure and avoids structural cracking.

[0031] Specifically, the insulating block 23 is of a split structure, and the surface of the insulating block 23 is provided with a heat dissipation groove.

[0032] Through the technical scheme, the split insulating block 23 is composed of two modules with heat dissipation grooves, and is quickly locked by a spring pin during installation, the heat dissipation grooves increase the heat dissipation area and improve the heat dissipation effect.

[0033] In use, the substrate holder frame 1 serves as the main support structure, with the top connecting plate 11 and the bottom connecting plate 12 rigidly connected by the guide rail assembly 2, wherein the upper guide rail 21 and the lower guide rail 22 form a sliding rail system, and the insulating block 23 is embedded in the gap between the guide rails to block the conduction of current between the metal frames. When the substrate is installed, the operator can adjust the overall height of the substrate holder through the sliding characteristics of the guide rail, and the insulating block 23 effectively eliminates static interference while ensuring structural stability. The double-plate design of the top and bottom connecting plates cooperates with the rail assembly to keep the substrate holder deformation controllable when it bears load in a vacuum environment, solving the deviation problem caused by traditional single-point fixation.

[0034] Although the embodiments of the present application have been shown and described, it is to be understood that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the application, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A main body mechanism for a coated glass substrate holder, comprising a substrate holder frame (1), a guide rail assembly (2), and an insulating wire support assembly (3), characterized in that: The substrate frame (1) is provided with a top connecting plate (11) and a bottom connecting plate (12) at the top and bottom respectively. The top connecting plate (11) and the bottom connecting plate (12) are connected by a guide rail assembly (2). The guide rail assembly (2) includes an upper guide rail (21), a lower guide rail (22) and an insulating block (23) embedded in the gap between the guide rails.

2. The main body mechanism for a coated glass substrate holder according to claim 1, characterized in that: The insulated wire support assembly (3) includes a top wire support module (31), a middle wire support module (32), and a bottom wire support module (33), which are connected to the substrate by wires.

3. The main body mechanism for a coated glass substrate holder according to claim 2, characterized in that: The insulated wire is a ceramic-coated copper core wire, and both ends of the insulated wire are locked with elastic washers and standard flat washers.

4. The main body mechanism for a coated glass substrate holder according to claim 1, characterized in that: The guide rail assembly (2) also includes a positioning bushing (24) and a pad (25). The positioning bushing (24) is embedded inside the upper guide rail (21), and the pad (25) is located at the connection between the lower guide rail (22) and the substrate frame (1).

5. The main body mechanism for a coated glass substrate holder according to claim 1, characterized in that: The top connecting plate (11) is screwed to the substrate frame (1) by a hexagonal flathead screw, and the bottom connecting plate (12) is screwed to fix the substrate frame (1) by a hexagonal countersunk screw.

6. The main body mechanism for a coated glass substrate holder according to claim 1, characterized in that: The substrate frame (1) has vertical beams (13) on both sides, and the two vertical beams (13) are arranged symmetrically.

7. The main body mechanism for a coated glass substrate holder according to claim 1, characterized in that: The insulating block (23) has a split structure, and the surface of the insulating block (23) is provided with heat dissipation grooves.

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