Semiconductor processing equipment and pipeline sealing structure

Abstract

The utility model relates to the technical field of semiconductor processing equipment, in particular to semiconductor processing equipment and a pipeline sealing structure. Due to the fact that the sealing seat of the pipeline sealing structure is detachably installed on one side of the installation flange, the sealing ring supporting face is arranged in the sealing seat hole of the sealing seat, the pressing piece is detachably connected with the sealing seat, the pipeline sealing ring is pressed on the sealing ring supporting face through the pressing sleeve of the pressing piece, under the pressing effect of the pressing piece, the pipeline sealing ring and a pipeline are tightly squeezed, and therefore the pipeline sealing structure is formed. And the pipeline and the sealing seat are fixed. That is to say, the pipeline sealing ring in the embodiment can be used for sealing the pipeline and fixing the pipeline at the same time. And when the pipeline is maintained, the pressing piece and the sealing seat can be detached from the mounting flange, so that the maintenance is more convenient, and the problem that the pipeline in the existing semiconductor processing equipment is inconvenient to maintain is solved.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor processing equipment, in particular to a semiconductor processing equipment and a pipeline sealing structure. BACKGROUND

[0002] The ion source module of the semiconductor processing equipment is used for making electrons collide with impurity gas molecules to generate required ions. The shell of the ion source module needs to be connected with a pipeline to make gas enter the ion source module. At present, the pipeline is usually fixed on a flange by welding. This connection mode is not convenient for maintenance because the pipeline and the flange cannot be disassembled when the pipeline has a problem later. CONTENT OF THE INVENTION

[0003] The present application provides a pipeline sealing structure for a semiconductor processing equipment to improve the problem of inconvenient maintenance of the pipeline in the semiconductor processing equipment.

[0004] In addition, the present application also aims to provide a semiconductor processing equipment using the above pipeline sealing structure.

[0005] In the first aspect, some embodiments provide a pipeline sealing structure for a semiconductor processing equipment, which comprises:

[0006] a pipeline;

[0007] a mounting flange having a flange hole through which the pipeline passes;

[0008] a sealing seat which is detachably and sealingly mounted on one side of the mounting flange; the sealing seat has a sealing seat hole through which the pipeline passes;

[0009] a pipeline sealing ring which is sleeved on the pipeline; the sealing seat hole has a pipeline sealing ring mounting section which has a sealing ring supporting surface, the pipeline sealing ring is mounted in the pipeline sealing ring mounting section, and the sealing ring supporting surface supports the pipeline sealing ring;

[0010] and a pressing member which is detachably connected with the sealing seat or the mounting flange; the pressing member comprises a pressing sleeve which is inserted into the pipeline sealing ring mounting section, and the pipeline passes through the pressing sleeve; one end of the pressing sleeve presses the pipeline sealing ring against the sealing ring supporting surface to extrude the pipeline sealing ring against the pipeline, thereby fixing the pipeline and the sealing seat.

[0011] Further, in some embodiments, the sealing ring support surface gradually approaches the pipe from a direction away from the mounting flange to a direction close to the mounting flange, or the end surface of the compression sleeve gradually moves away from the pipe from a direction away from the mounting flange to a direction close to the mounting flange.

[0012] Further, in some embodiments, the sealing ring support surface gradually approaches the pipe from a direction away from the mounting flange to a direction close to the mounting flange, and the sealing ring support surface is a side surface of a circular truncated cone.

[0013] Further, in some embodiments, the pipe sealing structure further comprises a fastener connected with the mounting flange and fixing the compression member, and the compression member and the mounting flange clamp the sealing seat.

[0014] Further, in some embodiments, the fastener is a fastening bolt, the mounting flange has a threaded blind hole, and the fastening bolt is threadedly connected in the threaded blind hole through the compression member and the sealing seat.

[0015] Further, in some embodiments, the pipe sealing structure further comprises a flange sealing ring, and the sealing seat and the mounting flange are sealed by the flange sealing ring.

[0016] Further, in some embodiments, the number of pipes is more than two, each of the pipes shares the same sealing seat and the same compression member, the flange holes correspond to the pipes one by one, the sealing seat holes correspond to the pipes one by one, and the compression sleeves correspond to the pipes one by one.

[0017] Further, in some embodiments, the compression member comprises a compression block, the compression sleeve is located on a side of the compression block facing the pipe sealing ring, the compression block has a compression block hole, and the pipe passes through the compression block hole.

[0018] Further, in some embodiments, the compression block hole has a secondary sealing ring support surface gradually approaching the pipe from a direction away from the mounting flange to a direction close to the mounting flange, the pipe sealing structure comprises a secondary compression member detachably connected with the compression block, the secondary compression member comprises a secondary compression sleeve inserted into the compression block hole, the pipe passes through the secondary compression sleeve, the pipe sealing structure further comprises a secondary sealing ring, and one end of the secondary compression sleeve compresses the secondary sealing ring on the secondary sealing ring support surface to extrude the secondary sealing ring against the pipe.

[0019] In a second aspect, some embodiments provide a semiconductor processing equipment comprising an ion source module, and the ion source module comprises a pipe sealing structure, and the pipe sealing structure comprises:

[0020] a pipe;

[0021] a mounting flange having a flange hole through which the pipe passes;

[0022] a seal seat detachably and sealingly mounted on one side of the mounting flange; the seal seat has a seal seat hole through which the pipe passes;

[0023] a pipe sealing ring sleeved on the pipe; the seal seat hole has a pipe sealing ring mounting section having a sealing ring supporting surface, the pipe sealing ring is mounted in the pipe sealing ring mounting section, and the sealing ring supporting surface supports the pipe sealing ring;

[0024] and a pressing member detachably connected with the seal seat or the mounting flange; the pressing member comprises a pressing sleeve for being inserted into the pipe sealing ring mounting section, and the pipe passes through the pressing sleeve; one end of the pressing sleeve presses the pipe sealing ring against the sealing ring supporting surface, so that the pipe sealing ring is extruded against the pipe, and the pipe is fixed with the seal seat.

[0025] Further, in some embodiments, the sealing ring supporting surface gradually approaches the pipe from a direction away from the mounting flange to a direction close to the mounting flange, or an end surface of the pressing sleeve towards the pipe sealing ring gradually moves away from the pipe from a direction away from the mounting flange to a direction close to the mounting flange.

[0026] Further, in some embodiments, the sealing ring supporting surface gradually approaches the pipe from a direction away from the mounting flange to a direction close to the mounting flange, and the sealing ring supporting surface is a side surface of a circular truncated cone.

[0027] Further, in some embodiments, the pipe sealing structure further comprises a fastener connected with the mounting flange and fixing the pressing member, and the pressing member and the mounting flange clamp the seal seat.

[0028] Further, in some embodiments, the fastener is a fastening bolt, the mounting flange has a threaded blind hole, and the fastening bolt is threadedly connected in the threaded blind hole through the pressing member and the seal seat.

[0029] Further, in some embodiments, the pipe sealing structure further comprises a flange sealing ring, and the seal seat and the mounting flange are sealed by the flange sealing ring.

[0030] Further, in some embodiments, the number of pipes is more than two, each of the pipes shares the same sealing seat and the same pressing member; the flange holes correspond to the pipes one by one, the sealing seat holes correspond to the pipes one by one, and the pressing sleeves correspond to the pipes one by one.

[0031] Further, in some embodiments, the pressing member includes a pressing block, the pressing sleeve is located on a side of the pressing block facing the pipe sealing ring, and the pressing block has a pressing block hole through which the pipe passes.

[0032] Further, in some embodiments, the pressing block hole has a secondary sealing ring support surface that gradually approaches the pipe from a direction away from the mounting flange to a direction close to the mounting flange; the pipe sealing structure includes a secondary pressing member that is detachably connected to the pressing block, the secondary pressing member includes a secondary pressing sleeve inserted into the pressing block hole, the pipe passes through the secondary pressing sleeve, and the pipe sealing structure further includes a secondary sealing ring, one end of the secondary pressing sleeve pressing the secondary sealing ring against the secondary sealing ring support surface so that the secondary sealing ring is pressed against the pipe.

[0033] According to the pipe sealing structure of the above-mentioned embodiments, since the sealing seat of the pipe sealing structure is detachably mounted on one side of the mounting flange, the sealing seat hole of the sealing seat has a sealing ring support surface, the pressing member is detachably connected to the sealing seat, and the pressing sleeve of the pressing member presses the pipe sealing ring against the sealing ring support surface, under the pressing action of the pressing member, the pipe sealing ring is pressed against the pipe, and the pipe is fixed to the sealing seat. That is, the pipe sealing ring in the above-mentioned embodiments not only seals the pipe, but also fixes the pipe. When maintaining the pipe, the pressing member and the sealing seat can be detached from the mounting flange, which makes maintenance more convenient and improves the problem of inconvenient pipe maintenance in current semiconductor processing equipment. BRIEF DESCRIPTION OF DRAWINGS

[0034] Figure 1 FIG. 1 is a structural schematic diagram of an ion source module of a semiconductor detection device in some embodiments;

[0035] Figure 2 FIG. 2 is a structural schematic diagram of a pipe sealing structure in some embodiments.

[0036] The list of feature names corresponding to the reference signs in the drawings is as follows: 100, ion source module; 101, shell; 102, pipe sealing structure; 1, pipe; 2, mounting flange; 21, flange hole; 3, sealing seat; 31, sealing seat hole; 311, pipe sealing ring mounting section; 312, sealing ring support surface; 313, small-diameter section; 4, pipe sealing ring; 5, pressing member; 51, pressing sleeve; 52, pressing block; 521, pressing block hole; 6, flange sealing ring.

[0037] Explanation of bracketed reference numerals in the drawings: In the bracketed reference numerals in the drawings, the feature indicated by the reference numeral is both the feature indicated by the number within the bracket and the feature indicated by the number outside the bracket. DETAILED DESCRIPTION

[0038] The application will be further described below in connection with specific embodiments with reference to the drawings. Like numbers in different figures refer to like elements. In the following description, numerous specific details are described to provide a thorough understanding of the application. However, those of skill in the relevant art will recognize that the application can be practiced without one or more of the specific details. In some instances, well-known structures have not been described in order to avoid obscuring the application. Other embodiments can be used and structural or other modifications can be made without departing from the scope of the application.

[0039] In addition, features, operations, or steps described in the specification can be combined in any suitable manner without departing from the scope of the application. Similarly, the various steps or actions in a method described in the specification can be combined or reordered without departing from the scope of the application. Accordingly, the specification and drawings are to be regarded in an illustrative, rather than a restrictive, sense.

[0040] In the description of the present application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", and the like are used to indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are used only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the indicated device or element must have a particular orientation, be constructed and operated in a particular orientation, and therefore should not be understood as limiting the application.

[0041] In addition, the terms "first", "second", etc. are used only for descriptive purposes and should not be understood as indicating or implying relative importance or a specific number of the indicated technical features. Therefore, the features defined as "first", "second", etc. can explicitly or implicitly include one or more of the features.

[0042] In the present application, unless specifically defined and limited otherwise, the terms "mount", "connect", "connection", "fix", and the like, should be understood broadly, for example, can be fixed connection, can also be detachable connection, or integrated; can be mechanical connection, can also be electrical connection; can be directly connected, can be abutted, can also be indirectly connected through an intermediate medium, can be the internal communication of two elements or the interaction relationship between two elements. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0043] In the present application, unless specifically defined and limited otherwise, the first feature is "on" or "under" the second feature. The first and second features can be in direct contact, or the first and second features can be in indirect contact through an intermediate medium. Moreover, the first feature "above", "above" and "above" the second feature can be the first feature directly above or obliquely above the second feature, or only indicates that the horizontal height of the first feature is higher than that of the second feature. The first feature "below", "below" and "below" the second feature can be the first feature directly below or obliquely below the second feature, or only indicates that the horizontal height of the first feature is less than that of the second feature.

[0044] The embodiments described in the detailed description can be combined in any suitable manner, for example, different embodiments can form different embodiments, without contradiction, in order to avoid unnecessary repetition, various possible combinations of each embodiment are not described again.

[0045] In view of the inconvenient maintenance of the pipe sealing structure in the current semiconductor processing equipment, the pipe is squeezed by pressing the pipe sealing ring in the present application to realize the fixation and sealing of the pipe. The pipe sealing ring is squeezed after being pressed by the sealing seat and the pressing member, and the sealing seat and the pressing member can be detached to facilitate the later maintenance of the pipe. The semiconductor processing equipment and the pipe sealing structure in the present application will be described in detail below with reference to the drawings.

[0046] Please refer to Figure 1 , the semiconductor processing equipment includes an ion source module 100 for ionizing neutral atoms or molecules and generating plasma therefrom. During the operation of the ion source module, it is usually necessary to vacuumize the ion source module. The ion source module 100 includes a housing 101 and a pipe sealing structure 102 fixed on the housing 101.

[0047] Please refer to Figure 1 and Figure 2 , the pipe sealing structure 102 includes a pipe 1, a mounting flange 2, a sealing seat 3, a pipe sealing ring 4 and a pressing member 5, wherein the mounting flange 2 has a flange hole 21 for the pipe 1 to pass through. The sealing seat 3 is detachably mounted on one side of the mounting flange 2, and the sealing seat 3 has a sealing seat hole 31 for the pipe 1 to pass through.

[0048] The sealing seat hole 31 has a pipe sealing ring mounting section 311 with a sealing ring support surface 312, the pipe sealing ring 4 is sleeved on the pipe 1 and mounted in the pipe sealing ring mounting section 311, and the sealing ring support surface 312 supports the pipe sealing ring 4.

[0049] The pressing part 5 is detachably connected with the sealing seat 3, the pressing part 5 includes a pressing sleeve 51 for being inserted into the pipe sealing ring mounting section 311, the pipe 1 passes through the pressing sleeve 51, one end of the pressing sleeve 51 presses the pipe sealing ring 4 on the sealing ring support surface 312, so that the pipe sealing ring 4 is extruded with the pipe 1, and the pipe 1 is fixed with the sealing seat 3.

[0050] Since the pipe sealing ring 4 is extruded with the pipe 1 under the pressing action of the pressing part 5, the pipe 1 is fixed with the sealing seat 3, therefore, the pipe sealing ring 4 of the present application not only seals the pipe 1, but also fixes the pipe 1. When the pipe 1 is maintained, the pressing part 5 and the sealing seat 3 can be detached from the mounting flange 2, so that the maintenance is more convenient, and the problem that the pipe 1 is inconvenient to maintain in the current semiconductor processing equipment is improved.

[0051] Further, please refer to Figure 2 The sealing ring support surface 312 gradually approaches the pipe 1 from the direction away from the mounting flange 2 to the direction close to the mounting flange 2. The direction from the direction away from the mounting flange 2 to the direction close to the mounting flange 2 is the direction from the sealing seat 3 to the mounting flange 2. The sealing ring support surface 312 can have a certain guiding effect on the deformation of the pipe sealing ring 4, so that the contact area of the pipe sealing ring 4 with the pipe 1 is larger after deformation, the sealing effect is better, and the fixing effect of the pipe sealing ring 4 on the pipe 1 is better.

[0052] Of course, in some other embodiments, the end face of the pressing sleeve 51 towards the pipe sealing ring 4 can also be specially designed, such as the end face of the pressing sleeve 51 towards the pipe sealing ring 4 gradually away from the pipe 1 from the direction away from the mounting flange 2 to the direction close to the mounting flange 2. In this way, the deformation of the pipe sealing ring 4 can also be guided, and the contact area of the pipe sealing ring 4 with the pipe 1 can be increased.

[0053] Further, in some embodiments, please refer to Figure 2 The sealing ring support surface 312 is a circular truncated cone side surface. The circular truncated cone side surface is more consistent with the pipe sealing ring 4, and the sealing effect is better. It should be noted that the circular truncated cone side surface refers to the shape being the same as the outer peripheral side surface of a circular truncated cone, rather than the sealing ring support surface being on a circular truncated cone. In some other embodiments, the sealing ring support surface 312 can also be in other forms, such as a prismatic side surface.

[0054] Specifically, in some embodiments, the sealing seat hole 31 comprises a large-diameter section and a small-diameter section 313, wherein the large-diameter section is located on the side of the small-diameter section 313 away from the mounting flange 2. The pipe sealing ring mounting section 311 is the large-diameter section. The sealing ring supporting surface 312 is located at the end of the large-diameter section connected with the small-diameter section 313. The small-diameter section 313 is in clearance fit with the pipe 1, and the compression sleeve 51 is also in clearance fit with the pipe 1.

[0055] Regarding the mounting mode of the sealing seat 3 and the compression member 5, in some embodiments, please refer to Figure 2 , the pipe sealing structure 102 further comprises fasteners (not shown in the figure) connected with the mounting flange 2 and fixing the compression member 5, and the compression member 5 and the mounting flange 2 clamp the sealing seat 3. In this way, the mounting structure between the sealing seat 3, the compression member 5 and the mounting flange 2 can be simplified. In some other embodiments, the sealing seat 3 and the mounting flange 2 can be fixed by first fasteners, and the sealing seat 3 and the compression member 5 can be fixed by second fasteners. In some other embodiments, the compression member 5 can also be fixed on the sealing seat 3 or the mounting flange 2 by clamping.

[0056] In some embodiments, the fasteners are fastening bolts, the mounting flange 2 has threaded blind holes, and the fastening bolts are threadedly connected in the threaded blind holes through the compression member 5 and the sealing seat 3. The threaded blind holes can ensure the sealing performance of the mounting flange 2, and the fastening bolt structure is simple and convenient to install.

[0057] Specifically, in some embodiments, the compression member 5 has a compression member through hole, and the sealing seat 3 has a sealing seat through hole, and the fastening bolt is connected with the threaded blind hole after passing through the compression member through hole and the sealing seat through hole. In some embodiments, please refer to Figure 2 , the compression member 5 comprises a pressing block 52, and the compression sleeve 51 is located on the side of the pressing block 52 facing the mounting flange 2. The compression member through hole is located on the pressing block 52. In some embodiments, please refer to Figure 2 , the pressing block 52 has a pressing block hole 521, and the pipe 1 passes through the pressing block hole 521. The pressing block hole 521 is through about the inner hole of the compression sleeve 51. The pressing block 52 is integrally formed with the compression sleeve 51. In some other embodiments, the compression sleeve 51 and the pressing block 52 can also be fixed together by welding or fasteners.

[0058] In some embodiments, please refer to Figure 2 , the pipe sealing structure 102 further comprises a flange sealing ring 6, and the sealing seat 3 and the mounting flange 2 are sealed by the flange sealing ring 6. The flange sealing ring 6 can further improve the sealing performance of the pipe sealing structure 102. In some other embodiments, the sealing seat 3 and the mounting flange 2 can also be sealed by sealing grease, sealing strips and other sealing structures.

[0059] Specifically, in some embodiments, please refer to Figure 2The sealing ring groove is arranged on the mounting flange 2, and the flange sealing ring 6 is arranged in the sealing ring groove and in contact with the sealing seat 3.

[0060] In some embodiments, referring to Figure 2 The number of pipes 1 is two or more, and each pipe 1 shares the same sealing seat 3 and the same pressing member 5. The flange hole 21 corresponds to the pipe 1 one by one, the sealing seat hole 31 corresponds to the pipe 1 one by one, and the pressing sleeve 51 corresponds to the pipe 1 one by one. Specifically, in some embodiments, the number of pipes 1 is two. Of course, in some other embodiments, according to actual needs, the number of pipes 1 can also be one, three, four, etc.

[0061] Specifically, in some embodiments, referring to Figure 2 The number of pipes 1 is two or more, and the flange sealing ring 6 corresponds to the pipe 1 one by one. In some other embodiments, the number of flange sealing rings 6 can also be only one, at which time the size of the flange sealing ring 6 needs to be increased so that each pipe 1 passes through the flange sealing ring 6.

[0062] In some embodiments, referring to Figure 1 and Figure 2 The sealing seat 3 is square, and the shape of the pressing block 52 is also square.

[0063] In some embodiments not shown, in order to further improve the sealing performance and stability and reliability of the pipe sealing structure 102 and the pipe 1, the pressing block hole 521 has a secondary sealing ring supporting surface. The pipe sealing structure 102 includes a secondary pressing member, which is detachably connected with the pressing block 52. The secondary pressing member includes a secondary pressing sleeve inserted into the pressing block hole 521, and the pipe 1 passes through the secondary pressing sleeve. The pipe sealing structure 102 further includes a secondary sealing ring, and one end of the secondary pressing sleeve presses the secondary sealing ring on the secondary sealing ring supporting surface, so that the secondary sealing ring is tightly pressed against the pipe 1. The secondary sealing ring supporting surface gradually approaches the pipe 1 from the direction away from the mounting flange 2 to the direction close to the mounting flange 2. In this way, through the extrusion of the secondary sealing ring on the pipe 1, the stability of the pipe 1 can be improved, and the pipe 1 is less likely to shake. And it can also improve the sealing effect of the pipe sealing structure 102. Specifically, the secondary pressing member is fixed on the pressing block by bolts.

[0064] In some embodiments, referring to Figure 1 and Figure 2Under the action of the flange sealing ring 6 and the pipeline sealing ring 4, the sealing structure of the pipeline sealing structure 102 is better, can effectively seal the vacuum, and can keep the relative fixation of the pipeline and the mounting flange 2. By tightening the bolts, the mounting flange 2, the sealing seat 3 and the pressing member 5 are fixed, the installation is more convenient, the maintainability is high, the maintenance cost is low, after the pipeline is damaged, the sealing seat 3, the pressing member 5 and the pipeline can be disassembled and replaced separately. In addition, the number of pipelines can be designed according to the needs, and the number of pipelines can be increased or decreased according to the needs, and the design flexibility is high.

[0065] The above application of specific examples is used to help understand the application and does not limit the application. For those skilled in the art to which the application belongs, according to the idea of the application, a number of simple deductions, deformations or substitutions can be made.

Claims

1. A pipe sealing structure for semiconductor processing equipment, characterized in that, The pipeline sealing structure includes: pipeline; A mounting flange having a flange hole through which the pipe passes; A sealing seat, which is detachably and sealingly mounted on one side of the mounting flange; the sealing seat has a sealing seat hole for the pipe to pass through; A pipe sealing ring is fitted onto the pipe; the sealing seat hole has a pipe sealing ring mounting section, the pipe sealing ring mounting section has a sealing ring support surface, the pipe sealing ring is installed in the pipe sealing ring mounting section, and the sealing ring support surface supports the pipe sealing ring; The device includes a clamping element, which is detachably connected to the sealing seat or the mounting flange. The clamping element includes a clamping sleeve for insertion into the pipe sealing ring mounting section, through which the pipe passes. One end of the clamping sleeve presses the pipe sealing ring against the sealing ring support surface, thereby squeezing the pipe sealing ring and the pipe together to fix the pipe to the sealing seat.

2. The pipe sealing structure as described in claim 1, characterized in that, The sealing ring support surface gradually approaches the pipe from away from the mounting flange towards the mounting flange, or the end face of the compression sleeve facing the pipe sealing ring gradually moves away from the pipe from away from the mounting flange towards the mounting flange.

3. The pipe sealing structure as described in claim 1, characterized in that, The sealing ring support surface gradually approaches the pipe from the direction away from the mounting flange and towards the mounting flange, and the sealing ring support surface is the side of a frustum.

4. The pipe sealing structure as described in any one of claims 1-3, characterized in that, The pipeline sealing structure also includes fasteners, which are connected to the mounting flange and fix the clamping member, and the clamping member and the mounting flange clamp the sealing seat.

5. The pipe sealing structure as described in claim 4, characterized in that, The fastener is a fastening bolt, and the mounting flange has a threaded blind hole. The fastening bolt passes through the clamping member and the sealing seat and is threadedly connected in the threaded blind hole.

6. The pipe sealing structure as described in any one of claims 1-3, characterized in that, The pipeline sealing structure also includes a flange sealing ring, and the sealing seat and the mounting flange are sealed by the flange sealing ring.

7. The pipe sealing structure as described in any one of claims 1-3, characterized in that, The number of pipes is two or more, and each pipe shares the same sealing seat and the same clamping element; the flange holes correspond one-to-one with the pipes, the sealing seat holes correspond one-to-one with the pipes, and the clamping sleeves correspond one-to-one with the pipes.

8. The pipe sealing structure as described in any one of claims 1-3, characterized in that, The clamping element includes a clamping block, and the clamping sleeve is located on the side of the clamping block facing the pipe sealing ring. The clamping block has a clamping hole through which the pipe passes.

9. The pipe sealing structure as described in claim 8, characterized in that, The pressure block hole has a secondary sealing ring support surface, which gradually approaches the pipeline from away from the mounting flange towards the mounting flange; the pipeline sealing structure includes a secondary clamping member, which is detachably connected to the pressure block, and includes a secondary clamping sleeve inserted into the pressure block hole, through which the pipeline passes; the pipeline sealing structure also includes a secondary sealing ring, one end of which presses the secondary sealing ring against the secondary sealing ring support surface, thereby squeezing the secondary sealing ring tightly against the pipeline.

10. A semiconductor processing apparatus, comprising an ion source module, characterized in that, The ion source module includes the pipeline sealing structure as described in any one of claims 1-9.

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