Adjustable needle seat

By combining front-to-back, left-to-right, and up-to-down driving mechanisms with magnetic adjustment and angle adjustment, the problem of existing needle holders being unable to be adjusted quickly and reliably is solved, enabling precise position and angle adjustment of the probe, and ensuring the accuracy and reliability of semiconductor device testing.

CN224019875UActive Publication Date: 2026-03-20MICROPROBE TECH SUZHOU
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2025-01-15
Publication Date
2026-03-20

AI Technical Summary

Technical Problem

Existing probe holders cannot quickly and reliably adjust the angle and position of the probe, resulting in poor adaptability of the testing station during semiconductor device testing.

Method used

The device employs a combination of front-to-back, left-to-right, and up-to-down drive mechanisms with magnetic and angle adjustment mechanisms to achieve precise position and angle adjustment of the probe, ensuring compatibility with the testing station.

Benefits of technology

It enables rapid and reliable adjustment of the probe, ensuring the accuracy and reliability of semiconductor device testing.

✦ Generated by Eureka AI based on patent content.

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    Figure CN224019875U_ABST
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Abstract

The utility model discloses an adjustable needle seat which enables a probe to carry out adaptive adjustment aiming at a detection station and ensures that detection is carried out accurately and reliably. The device comprises a base; the front-back driving mechanism comprises a first seat body, a front-back driving screw rod and a front-back moving seat body; the left-right driving mechanism comprises a left-right driving screw rod and a left-right moving seat body; the up-and-down driving mechanism comprises an up-and-down driving screw rod and an up-and-down moving seat body; the vertical mounting seat comprises a vertical plate and a horizontal mounting plate; the needle seat mounting end comprises a needle seat end and a connecting rod; a first seat body is fixedly arranged on the upper surface of the base, a front-back driving lead screw is arranged on the first seat body, a front-back moving seat body is supported on a corresponding front-back linear rail on the upper surface of the first seat body, the bottom of the front-back moving seat body is connected with the front-back driving lead screw through a lead screw nut, and the first driving end of the front-back driving lead screw protrudes out of the rear end of the first seat body. And the front-back driving screw rod drives the front-back moving seat body to move front and back.
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Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of semiconductor device detection equipment, specifically is adjustable needle seat. BACKGROUND

[0002] When the semiconductor device is detected, the circular detection table needs to be set, and the outer circumferential ring of the circular detection table is provided with a plurality of detection stations, and a detection probe needs to be arranged at each detection station, which is used to detect whether the performance of the semiconductor device meets the standard, and since the angle and position of each detection station are different, the angle and position of the detection probe need to be adjusted accordingly, but the existing needle seat cannot be quickly and reliably adjusted, therefore, it is urgent to develop a needle seat that can be quickly and reliably adjusted. UTILITY MODEL CONTENTS

[0003] In view of the above problems, the utility model provides an adjustable needle seat, which can adapt to the detection station and ensure accurate and reliable detection.

[0004] An adjustable needle seat, characterized in that it comprises:

[0005] a base;

[0006] a front and rear driving mechanism comprising a first seat body, a front and rear driving screw, and a front and rear moving seat body;

[0007] a left and right driving mechanism comprising a left and right driving screw and a left and right moving seat body;

[0008] an up and down driving mechanism comprising an up and down driving screw and an up and down moving seat body;

[0009] a vertical mounting seat comprising a vertical plate and a horizontal mounting plate;

[0010] and a needle seat mounting end comprising a needle seat end and a connecting rod;

[0011] The upper surface of the base is fixedly provided with the first seat body, the first seat body is provided with the front and rear driving screw, the front and rear moving seat body is supported on the corresponding front and rear linear tracks on the upper surface of the first seat body, and the bottom of the front and rear moving seat body is connected to the front and rear driving screw through a screw nut, the first driving end of the front and rear driving screw protrudes outward from the rear end of the first seat body, and the front and rear driving screw drives the front and rear moving seat body to move forward and backward;

[0012] The upper surface of the front and rear moving seat is provided with left and right driving lead screws, the left and right moving seat is supported by the left and right linear rails on the upper surface of the front and rear moving seat, and the left and right moving seat is connected with the left and right driving lead screws through lead screw nuts, the second driving end of the left and right driving lead screws is arranged outwardly on one side of the front and rear moving seat, and the left and right driving lead screws drive the left and right moving seat to move left and right;

[0013] The front end of the left and right moving seat is fixedly provided with a vertical mounting seat, the front surface of the vertical mounting seat is provided with up and down driving lead screws, the up and down moving seat is supported by the lifting linear rails on the front surface of the vertical mounting seat, and the rear end surface of the up and down moving seat is connected with the up and down driving lead screws through lead screw nuts, the third driving end of the up and down driving lead screws is arranged outwardly on the upper end of the vertical mounting seat, and the up and down driving lead screws drive the up and down moving seat to move up and down;

[0014] The up and down moving seat is fixedly connected with the vertical plate through the connecting assembly, the bottom of the vertical plate is fixedly provided with a front-protruding horizontal mounting plate, the connecting rod of the needle seat mounting end is inserted into the inner cavity of the horizontal mounting plate, and the needle seat end of the needle seat mounting end is front-protruding for fixedly arranging a detection needle.

[0015] It is further characterized in that:

[0016] The horizontal mounting plate is provided with an inner cavity, the inner end of the connecting rod is inserted into the inner cavity and is axially limitedly installed, a transmission rod is fixedly sleeved with the inner end of the connecting rod, a reset torsion spring is further sleeved with the inner end of the connecting rod, one end of the reset torsion spring is fixedly connected with the inner wall of the inner cavity of the horizontal mounting plate, the other end of the reset torsion spring is fixedly connected with the transmission rod, the driving end of the transmission rod is arranged corresponding to the lower end of the adjusting knob, the fourth driving end of the adjusting knob is arranged outwardly on the corresponding side of the horizontal mounting plate, the adjusting knob is screw-connected with the corresponding threaded hole of the horizontal mounting plate, and the adjusting knob is twisted to adjust the lifting of the lower end and drive the connecting rod to rotate under the cooperation of the reset torsion spring, so as to adjust the rotation angle of the needle seat end.

[0017] The base comprises a mounting cavity, the upper surface of the mounting cavity is provided with a magnet, the mounting cavity is provided with a magnetic force adjusting block, the center of the magnetic force adjusting block is pivotally connected with the center of the bottom of the base through a connecting shaft, and the magnetic force adjusting block is further provided with a driving handle which is outwardly protruding from the rear end surface of the base.

[0018] After the structure of the utility model is adopted, the whole adjustable needle holder position is fixedly arranged through the base, then the corresponding positions of the needle holder end are adjusted through the front and back driving mechanism, the left and right driving mechanism and the up and down driving mechanism respectively, so that the detection needle can be adjusted to adapt to the detection station, and the detection is ensured to be accurate and reliable. BRIEF DESCRIPTION OF DRAWINGS

[0019] Figure 1 It is a three-dimensional structure diagram of the utility model Figure 1 ;

[0020] Figure 2 It is a three-dimensional structure diagram of the utility model Figure 2 ;

[0021] Figure 3 It is a side view structure diagram of the utility model;

[0022] Figure 4 It is an A-A section structure diagram of the utility model;

[0023] Figure 5 It is a B-B section structure diagram of the utility model;

[0024] The names corresponding to the serial numbers in the drawing are as follows:

[0025] The base 10, the mounting cavity 11, the magnetic force adjusting block 12, the driving handle 121, the connecting shaft 13, the front and back driving mechanism 20, the first seat body 21, the front and back driving lead screw 22, the first driving end 221, the front and back moving seat body 23, the front and back linear rail 24, the left and right driving mechanism 30, the left and right driving lead screw 31, the second driving end 311, the left and right moving seat body 32, the left and right linear rail 33, the vertical mounting seat 34, the up and down driving mechanism 40, the up and down driving lead screw 41, the third driving end 411, the up and down moving seat body 42, the lifting linear rail 43, the connecting assembly 44, the vertical mounting seat 50, the vertical plate 51, the horizontal mounting plate 52, the needle holder mounting end 60, the needle holder end 61, the connecting rod 62, the connecting rod angle adjusting mechanism 70, the transmission rod 71, the reset torsional spring 72 and the adjusting knob 73. DETAILED DESCRIPTION

[0026] An adjustable needle holder, seen Figures 1-5 , comprises a base 10, a front and back driving mechanism 20, a left and right driving mechanism 30, an up and down driving mechanism 40, a vertical mounting seat 50 and a needle holder mounting end 60;

[0027] The front and back driving mechanism 20 comprises a first seat body 21, a front and back driving lead screw 22 and a front and back moving seat body 23.

[0028] The left and right driving mechanism 30 comprises a left and right driving lead screw 31 and a left and right moving seat body 32.

[0029] The up-down driving mechanism 40 comprises an up-down driving screw 41, an up-down moving seat 42;

[0030] The vertical mounting seat 50 comprises a vertical plate 51, a horizontal mounting plate 52;

[0031] The needle seat mounting end 30 comprises a needle seat end 61, a connecting rod 62;

[0032] The upper surface of the base 10 is fixed with a first seat 21, the first seat 21 is provided with a front-rear driving screw 22, a front-rear moving seat 23 is supported on the corresponding front-rear linear track 24 of the upper surface of the first seat 21, and the bottom of the front-rear moving seat 23 is connected to the front-rear driving screw 22 through a screw nut, the first driving end 221 of the front-rear driving screw 22 protrudes outward from the rear end of the first seat 21, and the front-rear driving screw 22 drives the front-rear moving seat 23 to move forward and backward;

[0033] The upper surface of the front-rear moving seat 23 is provided with a left-right driving screw 31, a left-right moving seat 32 is supported on the left-right linear track 33 of the upper surface of the front-rear moving seat 23, and the left-right moving seat 32 is connected to the left-right driving screw 31 through a screw nut, the second driving end 311 of the left-right driving screw 31 is arranged outward from one side of the front-rear moving seat 23, and the left-right driving screw 31 drives the left-right moving seat 32 to move left and right;

[0034] The front end of the left-right moving seat 32 is fixed with a vertical mounting seat 34, the front surface of the vertical mounting seat 34 is provided with an up-down driving screw 41, an up-down moving seat 42 is supported on the lifting linear track 43 of the front surface of the vertical mounting seat 34, and the rear end surface of the up-down moving seat 42 is connected to the up-down driving screw 41 through a screw nut, the third driving end 411 of the up-down driving screw 41 protrudes upward from the upper end of the vertical mounting seat 34, and the up-down driving screw 41 drives the up-down moving seat 42 to move up and down;

[0035] The up-down moving seat 42 is fixed to the vertical plate 51 through a connecting assembly 44, the bottom of the vertical plate 51 is fixed with a front-protruding horizontal mounting plate 52, the connecting rod 62 of the needle seat mounting end 60 is inserted into the inner cavity of the horizontal mounting plate 52, the needle seat end 61 of the needle seat mounting end 60 protrudes forward and is used for fixing a detection needle.

[0036] In particular implementation: the horizontal mounting plate 52 is provided with a connecting rod angle adjusting mechanism 70, which comprises a transmission rod 71, a reset torsional spring 72 and an adjusting knob 73; the horizontal mounting plate 52 is provided with an inner cavity, the inner end of the connecting rod 62 is inserted and axially limitedly mounted in the inner cavity, the inner end of the connecting rod 62 is fixedly sleeved with the transmission rod 71, the inner end of the connecting rod 62 is also sleeved with the reset torsional spring 72, one end of the reset torsional spring 72 is fixedly connected to the inner wall of the inner cavity of the horizontal mounting plate 52, the other end of the reset torsional spring 72 is fixedly connected to the transmission rod 71, the driving end of the transmission rod 71 is arranged corresponding to the lower end of the adjusting knob 73, the fourth driving end 731 of the adjusting knob 73 is located at the corresponding side position of the horizontal mounting plate 52 and is provided with an upper protrusion, the adjusting knob 73 is screw-connected to the corresponding threaded hole of the horizontal mounting plate 52, the adjusting knob 73 is twisted to adjust the lifting of the lower end and drive the connecting rod 62 to rotate, under the synergistic action of the reset torsional spring 72, the rotating angle of the needle holder end 61 is adjusted;

[0037] The base 10 comprises a mounting cavity 11, the upper surface of the mounting cavity 11 is provided with a magnet (which is blocked in the figure and can be directly fixed), the mounting cavity 11 is provided with a magnetic force adjusting block 12, the center of the magnetic force adjusting block 12 is pivotally connected to the bottom center of the base 10 through a connecting shaft 13, the magnetic force adjusting block 12 is further provided with a driving handle 121, the driving handle 121 is protruded outwardly from the rear end surface of the base 10, when the magnetic force adjusting block 12 blocks most of the surface area of the magnet, the adsorption force of the entire base 10 is relatively small, which enables the entire adjustable needle holder to be transported, when the magnetic force adjusting block 12 blocks a small part of the surface area of the magnet, the adsorption force of the entire base 10 is relatively large, the base adsorbs the iron fixed object, which enables the position of the entire adjustable needle holder to be fixed and reliable.

[0038] The working principle is as follows: after the base is transported to a suitable iron fixed object, the magnetic force adjusting block is blocked by the driving handle to block a small part of the surface area of the magnet, the adsorption force of the entire base is relatively large, the base adsorbs the iron fixed object, the base fixes and arranges the position of the entire adjustable needle holder, then the corresponding positions of the needle holder ends are adjusted by the front and rear driving mechanisms, the left and right driving mechanisms and the up and down driving mechanisms, then the angle of the needle holder end is adjusted by the rotating adjusting knob, so that the detection probe can be adjusted to adapt to the detection station, and the detection is ensured to be accurate and reliable.

[0039] It is apparent for a person skilled in the art that the present application is not limited to the details of the above-described exemplary embodiments, but that it can be implemented in other concrete forms without departing from the spirit or the essential characteristics of the present application. Therefore, the embodiments should be considered as exemplary and non-limiting, the scope of the present application being defined by the claims appended hereto rather than by the above description, and all the changes which fall within the meaning and the scope of the equivalent elements of the claims are intended to be embraced therein. Any reference signs in the claims should not be construed as limiting the claims to the figures in which the reference signs are used.

[0040] Furthermore, it should be understood that although the present specification describes exemplary embodiments, not every embodiment contains only one independent technical solution, and the present specification is described in this way only for the sake of clarity, and a person skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that a person skilled in the art can understand.

Claims

1. An adjustable needle holder, characterized in that, It includes: Base; A front and rear drive mechanism, comprising a first base, a front and rear drive screw, and a front and rear movable base; The left and right drive mechanism includes left and right drive screws and left and right moving seats; The up-and-down drive mechanism includes an up-and-down drive screw and an up-and-down movable base; A vertical mounting base, comprising a vertical plate and a horizontal mounting plate; And the needle holder mounting end, which includes the needle holder end and the connecting rod; The upper surface of the base is fixed with a first seat body, and the first seat body is provided with a front and rear drive screw. The front and rear movable seat body is supported on the corresponding front and rear linear tracks on the upper surface of the first seat body, and the bottom of the front and rear movable seat body is connected to the front and rear drive screw through a screw nut. The first drive end of the front and rear drive screw protrudes outward from the rear end of the first seat body, and the front and rear drive screw drives the front and rear movable seat body to move back and forth. The upper surface of the front and rear movable seat is provided with a left and right drive screw. The left and right movable seat is supported on the left and right linear tracks on the upper surface of the front and rear movable seat. The left and right movable seat is connected to the left and right drive screw through a screw nut. The second drive end of the left and right drive screw protrudes outward from one side of the front and rear movable seat. The left and right drive screw drives the left and right movable seat to move left and right. A vertical mounting base is fixed at the front end of the left and right movable seat. A vertical drive screw is provided on the front surface of the vertical mounting base. The up and down movable seat is supported on the lifting linear track on the front surface of the vertical mounting base. The rear end of the up and down movable seat is connected to the vertical drive screw through a screw nut. The third driving end of the vertical drive screw protrudes from the upper end of the vertical mounting base. The vertical drive screw drives the up and down movable seat to move up and down. The vertically movable base is fixed to the upright plate via a connecting assembly. A forward-protruding horizontal mounting plate is fixed to the bottom of the upright plate. The connecting rod of the needle seat mounting end is inserted into the inner cavity of the horizontal mounting plate. The needle seat end of the needle seat mounting end protrudes forward and is used to fix the probe needle.

2. An adjustable needle holder according to claim 1, characterized in that: A connecting rod angle adjustment mechanism is arranged on the horizontal mounting plate. The horizontal mounting plate has an inner cavity. The inner end of the connecting rod is inserted into the inner cavity and axially limited. A transmission rod is fixedly sleeved on the inner end of the connecting rod. A return torsion spring is also sleeved on the inner end of the connecting rod. One end of the return torsion spring is fixed to the inner wall of the inner cavity of the horizontal mounting plate, and the other end of the return torsion spring is fixed to the transmission rod. The driving end of the transmission rod is arranged corresponding to the lower end of the adjustment knob. The fourth driving end of the adjustment knob is located on the corresponding side of the horizontal mounting plate and is convex. The adjustment knob is threaded to the corresponding threaded hole of the horizontal mounting plate. After the adjustment knob is turned, the lower end is adjusted to drive the connecting rod to rotate. Under the synergistic action of the return torsion spring, the rotation angle of the needle seat end is adjusted.

3. An adjustable needle holder according to claim 1, characterized in that: The base includes a mounting cavity, a magnet is provided on the upper surface of the mounting cavity, a magnetic adjustment block is provided inside the mounting cavity, the center of the magnetic adjustment block is pivotally connected to the bottom center of the base via a connecting shaft, the magnetic adjustment block is also provided with a drive handle, the drive handle is provided protruding from the rear end face of the base, when the magnetic adjustment block covers most of the magnet's surface area, the overall adsorption force of the base is relatively small, which allows the entire adjustable pin seat to be rotated, when the magnetic adjustment block covers only a small part of the magnet's surface area, the overall adsorption force of the base is relatively large, and the base adsorbs ferrous solids.