Anti-blocking semiconductor waste liquid filtering mechanism

Abstract

The utility model discloses an anti-blocking semiconductor waste liquid filtering mechanism which comprises a filtering tank, the top of the filtering tank is detachably connected with a top cover through a bolt, a liquid inlet pipe is fixedly connected to the position, close to the top, of one side of the filtering tank, and a filtering cylinder is fixedly connected to the position, located in the center, of the inner wall of the bottom of the filtering tank. A liquid outlet pipe is fixedly connected to the position, located in the filter cylinder, of the bottom of the filter tank, two threaded rods are rotationally connected to the inner wall of the bottom of the filter tank through bearings, and connecting plates are in threaded connection to the outer sides of the two threaded rods. According to the utility model, the filter cartridge can be prevented from being blocked, the filter cartridge does not need to be disassembled and cleaned, the time is saved, the filtering efficiency is improved, solid particles can be prevented from being adhered to the inner wall of the filtering tank, and the use effect of the filtering mechanism is improved; and solid particles in the filtering tank can be conveniently cleaned out of the filtering tank by a worker.

Description

TECHNICAL FIELD

[0001] The utility model relates to semiconductor waste liquid filtration technical field especially relates to a kind of anti-blocking semiconductor waste liquid filtering mechanism. BACKGROUND

[0002] Semiconductor industry produces waste liquid contains such as arsenic gallium-containing grinding fluid, polishing liquid and other toxic and harmful substances, in order to make it reach environmental protection discharge standard, semiconductor waste liquid needs to be handled, to avoid semiconductor waste liquid in the process of handling, solid particles (such as grinding fine powder, alumina precipitate) in waste liquid deposit on pipe, valve, vacuum gauge and other equipment components, so semiconductor waste liquid filtration is one of essential treatment measures.

[0003] At present, when semiconductor waste liquid is filtered and handled, filter plate is usually used to filter out solid particles in semiconductor waste liquid, and after long time use, solid particles can cause the filter hole of filter plate to be blocked, thereby affecting the use effect of filter plate, and at present, filter plate is disassembled and cleaned, which is more troublesome, and affects the filtration efficiency of semiconductor waste liquid. UTILITARY MODEL

[0004] The utility model aims at solving the shortcomings in prior art, and provides a kind of anti-blocking semiconductor waste liquid filtering mechanism.

[0005] In order to realize the above-mentioned purpose, the utility model adopts the following technical scheme:

[0006] An anti-blocking semiconductor waste liquid filtering mechanism, comprising a filter tank, the top of the filter tank is detachably connected with a top cover by bolts, one side of the filter tank near the top is fixedly connected with a liquid inlet pipe, the inner wall of the bottom of the filter tank is fixedly connected with a filter cartridge at the center position, the bottom of the filter tank is fixedly connected with a liquid outlet pipe in the filter cartridge, the inner wall of the bottom of the filter tank is rotatably connected with two threaded rods by bearings, the outer sides of the two threaded rods are both threadedly connected with connecting plates, the connecting plates are fixedly connected between the two connecting plates, a scraping ring is fixedly connected between the connecting plates, the inner ring of the scraping ring is provided with bristles, the filter cartridge passes through the inner ring of the scraping ring, so that the scraping ring moves up and down along the outer ring of the filter cartridge, the top cover is provided with a power assembly for driving the threaded rods to rotate.

[0007] As a further scheme of the utility model, the power assembly comprises a U-shaped frame, the U-shaped frame is fixedly connected to the top outer wall of the top cover, a reduction motor is fixedly connected to the top of the U-shaped frame, a connecting shaft is connected to one end of the output shaft of the reduction motor by a key, a connecting frame is fixedly connected to the bottom end of the connecting shaft, a tooth ring is fixedly connected to the outer side of the connecting frame, the top ends of the two threaded rods are both keyed to gears engaged with the tooth ring.

[0008] As a further scheme of the utility model, the outer side of the gear ring is fixedly connected with two symmetrically distributed scraping frames, and the scraping frames are attached to the inner wall of the filter tank.

[0009] As a further scheme of the utility model, a blowdown port is formed at the position close to the bottom of one side of the filter tank, a baffle door is clamped in the blowdown port, two sealing plates are fixedly connected to one side of the baffle door, and the sealing plates are fixed to the filter tank through bolts.

[0010] As a further scheme of the utility model, a sealing gasket is arranged between the baffle door and the blowdown port, and the sealing gasket is fixed to the baffle door.

[0011] As a further scheme of the utility model, two symmetrically distributed insertion rods are fixedly connected to the top of the filter tank, two insertion grooves are formed in the bottom of the top cover, and the insertion rods are inserted into the insertion grooves.

[0012] As a further scheme of the utility model, the height of the filter cartridge is equal to the height of the inside of the filter tank, and the liquid inlet pipe is located below the scraping ring.

[0013] The utility model has the advantages of:

[0014] 1. Through the cooperation of the threaded rod and the scraping ring, the threaded rod drives the scraping ring to move downward along the outer ring of the filter cartridge, so that the scraping ring scrapes and cleans the solid particles on the outer ring of the filter cartridge, thereby avoiding the blockage of the filter cartridge, and without the need to disassemble and clean the filter cartridge, time is saved, and the filtering efficiency is improved.

[0015] 2. Through the arrangement of the scraping frame, the scraping frame rotates in the filter tank, so that the scraping frame scrapes and cleans the solid particles adhered to the inside of the filter tank, thereby avoiding the adhesion of the solid particles to the inner wall of the filter tank, and improving the use effect of the filtering mechanism.

[0016] 3. Through the cooperation of the blowdown port and the baffle door, the blowdown port facilitates the cleaning of the solid particles in the filter tank out of the filter tank by the staff, and the baffle door seals the blowdown port through the sealing gasket, so that liquid leakage is avoided, and the convenience of solid particle cleaning is improved. BRIEF DESCRIPTION OF DRAWINGS

[0017] Fig. 1 It is a perspective structural schematic view of the semiconductor waste liquid filtering mechanism of the utility model;

[0018] Fig. 2 It is an internal overhead structural schematic view of the semiconductor waste liquid filtering mechanism of the utility model;

[0019] Fig. 3 It is a partial sectional view of the semiconductor waste liquid filtering mechanism of the utility model.

[0020] In the figure: 1, filter tank; 2, top cover; 3, connecting shaft; 4, speed reducer motor; 5, U-shaped frame; 6, liquid inlet pipe; 7, sewage outlet; 8, baffle door; 9, sealing plate; 10, liquid outlet pipe; 11, filter cartridge; 12, threaded rod; 13, scraping ring; 14, connecting plate; 15, gear; 17, connecting frame; 18, gear ring; 19, scraping frame; 20, insertion rod; 21, insertion slot. DETAILED DESCRIPTION

[0021] The technical solutions in the embodiments of the utility model will be clearly and completely described below with reference to the drawings in the embodiments of the utility model. The described embodiments are only part of the embodiments of the utility model, rather than all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by those skilled in the art without creative labor fall within the protection scope of the utility model.

[0022] Reference Figs. 1-3 A kind of anti-clogging semiconductor waste liquid filtering mechanism, including filter tank 1, the top of filter tank 1 is detachably connected with top cover 2 by bolt, liquid inlet pipe 6 is welded to the position of one side of filter tank 1 close to top, filter cartridge 11 is fixed in the position of the center of the inner wall of the bottom of filter tank 1 by bolt, liquid outlet pipe 10 is welded to the position of the bottom of filter tank 1 below filter cartridge 11, the height of filter cartridge 11 is equal to the height inside filter tank 1, liquid inlet pipe 6 is below scraping ring 13, semiconductor waste liquid is added to filter tank 1 by liquid inlet pipe 6, and since liquid outlet pipe 10 is below filter cartridge 11, semiconductor waste liquid is filtered by filter cartridge 11 and then discharged through liquid outlet pipe 10, so that the filtration of semiconductor waste liquid is realized;

[0023] In the utility model, the bottom inner wall of filter tank 1 is rotatably connected with two threaded rods 12 by bearing, the bearing is waterproof bearing with model number 6004, the outer side of the two threaded rods 12 is all threadedly connected with connecting plate 14, scraping ring 13 is welded between the two connecting plates 14, the inner ring of scraping ring 13 is equipped with bristles, filter cartridge 11 passes the inner ring of scraping ring 13, so that scraping ring 13 moves up and down along the outer ring of filter cartridge 11, by the up and down movement of scraping ring 13 along the outer ring of filter cartridge 11, the solid particles on the outer ring of filter cartridge 11 are scraped and cleaned by scraping ring 13 and bristles during the downward movement of scraping ring 13, so that filter cartridge 11 is prevented from being blocked, and filter cartridge 11 does not need to be disassembled and cleaned, time is saved, and the filtration efficiency is improved;

[0024] In particular, the top cover 2 is provided with a power assembly for driving the threaded rod 12 to rotate, the power assembly comprises a U-shaped frame 5, the U-shaped frame 5 is fixed on the top outer wall of the top cover 2 by bolts, the top of the U-shaped frame 5 is fixed with a speed reducer motor 4 by bolts, the model of the speed reducer motor 4 is 5IK180RGN-CF+5GN7.5K, one end of the output shaft of the speed reducer motor 4 is connected with a connecting shaft 3 by keys, the bottom end of the connecting shaft 3 is fixed with a connecting frame 17 by bolts, the outer side of the connecting frame 17 is fixed with a gear ring 18 by bolts, the top end of the two threaded rods 12 is connected with a gear 15 engaged with the gear ring 18 by keys, starting the forward rotation of the speed reducer motor 4, the speed reducer motor 4 will drive the connecting frame 17 to rotate through the connecting shaft 3, the connecting frame 17 will drive the gear ring 18 to rotate, the gear ring 18 will drive the gear 15 to rotate through the engagement between the gear ring 18 and the gear 15, the gear 15 will drive the threaded rod 12 to rotate, the threaded rod 12 will drive the connecting plate 14 to move downward along the outer circle of the filter cylinder 11 through the threaded engagement between the threaded rod 12 and the connecting plate 14, when the speed reducer motor 4 reverses, the scraper ring 13 will move upward along the outer circle of the filter cylinder 11 to reset.

[0025] Need to be particularly pointed out, the outer side of the gear ring 18 is welded with two symmetrically distributed scraping frames 19, and the scraping frame 19 is attached to the inner wall of the filter tank 1, and the scraping frame 19 will rotate at the same time as the gear ring 18 rotates, so that the scraping frame 19 scrapes and cleans the solid particles adhered to the inner wall of the filter tank 1, thereby avoiding the solid particles adhered to the inner wall of the filter tank 1, and improving the use effect of the filtering mechanism, the filter tank 1 is provided with a blowdown port 7 near the bottom, the blowdown port 7 is connected with a baffle door 8, the baffle door 8 is welded with two sealing plates 9 on one side, and the sealing plates 9 are fixed with the filter tank 1 by bolts, a sealing gasket is arranged between the baffle door 8 and the blowdown port 7, and the sealing gasket is fixed with the baffle door 8, through the arrangement of the blowdown port 7, after the semiconductor waste liquid is filtered, the baffle door 8 is removed from the blowdown port 7, at this time, the solid particles cleaned in the filter tank 1 can be cleaned out of the filter tank 1 through the blowdown port 7, which is convenient for the staff to clean the solid particles in the filter tank 1 out of the filter tank 1, and in the process of filtering the semiconductor waste liquid, the baffle door 8 seals the blowdown port 7 through the sealing gasket, thereby avoiding the leakage of liquid, the top of the filter tank 1 is welded with two symmetrically distributed insertion rods 20, the bottom of the top cover 2 is provided with two insertion grooves 21, and the insertion rod 20 is inserted into the insertion groove 21, so that the top cover 2 can be positioned and installed.

[0026] Working principle: when cleaning is needed, the deceleration motor 4 is started in forward rotation, the deceleration motor 4 drives the connecting frame 17 to rotate through the connecting shaft 3, the connecting frame 17 drives the gear ring 18 to rotate, the gear ring 18 drives the gear 15 to rotate through the meshing between the gear ring 18 and the gear 15, the gear 15 drives the threaded rod 12 to rotate, the threaded rod 12 drives the connecting plate 14 to move along the outer circle of the filter cylinder 11 through the threaded meshing between the threaded rod 12 and the connecting plate 14, so that the scraping ring 13 and the brush remove the solid particles on the outer circle of the filter cylinder 11, thereby avoiding the filter cylinder 11 from being blocked, and the filter cylinder 11 does not need to be disassembled and cleaned, time is saved, and the filtering efficiency is improved, while the gear ring 18 rotates to drive the scraping frame 19 to rotate, so that the scraping frame 19 scrapes and cleans the solid particles adhered to the inner wall of the filter tank 1, thereby avoiding the solid particles from adhering to the inner wall of the filter tank 1, and the use effect of the filtering mechanism is improved.

[0027] In addition, although the embodiments of the utility model have been shown and described, it can be understood by those skilled in the art that various changes, modifications, replacements and variations can be made to these embodiments without departing from the principles and spirits of the utility model, and the scope of the utility model is defined by the appended claims and their equivalents.

Claims

1. A clogging-preventive semiconductor waste liquid filtering mechanism comprising a filtering tank (1), characterized by, The top of the filter tank (1) is detachably connected with a top cover (2) through bolts, one side of the filter tank (1) is fixedly connected with a liquid inlet pipe (6) near the top, the inner wall of the bottom of the filter tank (1) is fixedly connected with a filter cartridge (11) at the center, the bottom of the filter tank (1) is fixedly connected with a liquid outlet pipe (10) in the filter cartridge (11), the inner wall of the bottom of the filter tank (1) is rotatably connected with two threaded rods (12) through bearings, the outer sides of the two threaded rods (12) are both threadedly connected with connecting plates (14), the two connecting plates (14) are fixedly connected with a scraping ring (13) therebetween, the inner ring of the scraping ring (13) is provided with bristles, the filter cartridge (11) passes through the inner ring of the scraping ring (13), so that the scraping ring (13) moves up and down along the outer ring of the filter cartridge (11), and the top cover (2) is provided with a power assembly for driving the threaded rods (12) to rotate.

2. A clog resistant semiconductor waste fluid filtration mechanism as defined in claim 1, wherein, The power assembly comprises a U-shaped frame (5), the U-shaped frame (5) is fixedly connected to the top outer wall of the top cover (2), the top of the U-shaped frame (5) is fixedly connected with a speed reducer motor (4), one end of the output shaft of the speed reducer motor (4) is journally connected with a connecting shaft (3) penetrating through the U-shaped frame (5), the bottom end of the connecting shaft (3) is fixedly connected with a connecting frame (17), the outer side of the connecting frame (17) is fixedly connected with a tooth ring (18), and the top ends of the two threaded rods (12) are both journally connected with gear wheels (15) engaged with the tooth ring (18).

3. A non-clogging semiconductor waste fluid filtering mechanism according to claim 2, wherein The outer side of the tooth ring (18) is fixedly connected with two symmetrically distributed scraping frames (19), and the scraping frames (19) are in close contact with the inner wall of the filter tank (1).

4. The anti-clogging semiconductor waste liquid filtering mechanism according to claim 1, wherein A blowdown opening (7) is formed in one side of the filter tank (1) close to the bottom, a baffle door (8) is clamped in the blowdown opening (7), two sealing plates (9) are fixedly connected to one side of the baffle door (8), and the sealing plates (9) are fixed to the filter tank (1) through bolts.

5. A non-clogging semiconductor waste fluid filtering mechanism according to claim 4, wherein A sealing gasket is arranged between the baffle door (8) and the blowdown opening (7), and the sealing gasket is fixed to the baffle door (8).

6. The anti-clogging semiconductor waste liquid filtering mechanism according to claim 1, wherein The top of the filter tank (1) is fixedly connected with two symmetrically distributed insertion rods (20), the bottom of the top cover (2) is provided with two insertion grooves (21), and the insertion rods (20) are inserted into the insertion grooves (21).

7. The anti-clogging semiconductor waste liquid filtering mechanism according to claim 1, wherein The height of the filter cartridge (11) is equal to the height of the inside of the filter tank (1), and the liquid inlet pipe (6) is located below the scraping ring (13).

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