PIN protection tool
By designing a PIN protective fixture, the problem of inaccurate local masking during PIN coating was solved, achieving precise masking of the contact area between the PIN and the wafer, simplifying the coating process, and improving coating efficiency and accuracy.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-03-04
- Publication Date
- 2026-03-24
AI Technical Summary
Existing PIN spraying processes cannot achieve precise masking of small, localized areas, resulting in the need for mechanical removal of the Teflon coating after spraying, which is time-consuming and labor-intensive.
Design a PIN pin protective fixture, including a connecting part and a protective part. It is detachably connected to a metal conductive workpiece. The protective part shields a local area of the PIN pin to avoid spraying. The structure is simple and easy to use.
It achieves precise masking of the contact area between the PIN pin and the wafer, avoiding spraying, saving time and effort, simplifying the spraying process, and improving spraying accuracy and efficiency.
Smart Images
Figure CN224025337U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to wafer manufacturing technical field especially, relates to a PIN needle protection frock. BACKGROUND
[0002] Wafer manufacturing process needs to carry out electroplating technology in copper sulfate solution, makes copper ion deposition on wafer surface. When wafer carries out electroplating technology in copper sulfate solution, wafer needs to be fixed in metal conductive work piece, to prevent metal conductive work piece from producing pollution to copper sulfate solution, work piece surface needs to be sprayed Teflon coating, to increase the anticorrosion ability of work piece. The conductive PIN needle of metal conductive work piece and wafer contact needs to be protected during Teflon spraying, makes PIN needle to retain part metal layer and wafer contact conductive.
[0003] For the area that PIN needle does not need to be sprayed, shielding is needed before spraying, and the existing spraying process has limitations in local shielding of PIN needle during Teflon spraying, and can only achieve shielding of the entire surface or a larger area, and cannot achieve precise shielding of a smaller local area, which affects the use area of the product after spraying. In order to ensure normal use of the product, after Teflon spraying is completed, a mechanical method is also needed to remove the local Teflon coating, such as milling, but precise removal is not possible, and it is time-consuming and labor-intensive.
[0004] Therefore, it is urgent to provide a PIN needle protection frock to solve the above problems. UTILITY MODEL CONTENTS
[0005] The utility model aims at providing a PIN needle protection frock, which is assembled and connected with a metal conductive work piece, can precisely shield the local area of the PIN needle during Teflon spraying, and makes the part of the PIN needle contacting the wafer not be sprayed.
[0006] To achieve this purpose, the utility model adopts the following technical solutions:
[0007] A PIN needle protection frock is used to cooperate with a metal conductive work piece, the metal conductive work piece includes a work piece main body and a plurality of PIN needles arranged on the work piece main body, the PIN needle protection frock includes a connecting part and a protection part, the connecting part is configured to be detachably connected with the work piece main body, the protection part is connected with the connecting part and located on the inner side of the work piece main body, and the protection part can shield one side of the free end of the PIN needle.
[0008] As an optional solution, the protection part is a circular ring.
[0009] As an optional scheme, a plurality of grooves corresponding to the PIN needles are formed on the protection part, the plurality of grooves are arranged along the circumference of the protection part, and the end of each PIN needle can be accommodated in the corresponding groove.
[0010] As an optional scheme, the connecting part comprises a connecting sheet and a fastener, the connecting sheet is connected with the protection part, a first connecting hole is formed on the workpiece body, a second connecting hole is formed on the connecting sheet at a position corresponding to the first connecting hole, and the fastener is sequentially threaded through the second connecting hole and the first connecting hole to fixedly connect the connecting sheet with the workpiece body.
[0011] As an optional scheme, the first connecting hole is a threaded hole, the second connecting hole is a light hole, and the fastener is a bolt, which is screwed through the light hole and the threaded hole.
[0012] As an optional scheme, a connecting rod is further included, one end of the connecting rod is connected with the protection part, and the other end of the connecting rod is connected with the connecting sheet.
[0013] As an optional scheme, the connecting rod and the protection part are integrally formed, a third connecting hole is formed on the connecting sheet, and the end of the connecting rod away from the protection part is connected to the third connecting hole.
[0014] As an optional scheme, the connecting rod, the connecting sheet and the protection part are integrally formed.
[0015] As an optional scheme, the connecting rod, the connecting sheet and the protection part are separately formed.
[0016] As an optional scheme, a plurality of connecting parts are arranged, and the plurality of connecting parts are uniformly and spacedly arranged along the circumference of the protection part.
[0017] The utility model discloses beneficial effect:
[0018] The utility model provides a PIN needle protection tool, through connecting department and metal conductive workpiece assembly connection, in the process of spraying Teflon, the protection part can carry out accurate shielding to the local area of PIN needle, makes the part of PIN needle and wafer contact not be sprayed, and this PIN needle protection tool is simple in structure, convenient and fast to use, can assist one -time to complete spraying, and need not remove the local Teflon coating after spraying by using the mechanical mode, saves time and energy. DRAWINGS
[0019] Figure 1is a structure schematic view of the first side of the PIN needle protection tool cooperating with the metal conductive workpiece provided by the embodiment of the utility model;
[0020] Figure 2 is a structure schematic view of the PIN needle protection tool provided by the embodiment of the utility model;
[0021] Figure 3 is Figure 2 is a partial enlarged view of A in the middle;
[0022] Figure 4 is a schematic view of the PIN needle cooperating with the protection part provided by the utility model;
[0023] Figure 5 is a structure schematic view of the second side of the PIN needle protection tool cooperating with the metal conductive workpiece provided by the embodiment of the utility model.
[0024] in the figure,
[0025] 10, PIN needle protection tool, 11, connecting part, 111, connecting sheet, 112, second connecting hole, 113, third connecting hole, 12, protection part, 121, recess, 13, connecting rod,
[0026] 20, metal conductive workpiece, 21, workpiece main body, 22, PIN needle. DETAILED DESCRIPTION
[0027] The utility model will be further explained in detail in combination with the drawings and embodiments. It can be understood that the specific embodiments described herein are only used to explain the utility model, and not limited to the utility model. In addition, it should be noted that, in order to facilitate the description, only the part related to the utility model is shown in the drawings, not all structures.
[0028] In the description of the utility model, unless otherwise explicitly specified and limited, the terms "connected", "connected", "fixed" should be understood broadly, for example, it can be fixed connection, or detachable connection, or integral; it can be mechanical connection, or electrical connection; it can be directly connected, or indirectly connected through intermediate medium, it can be the communication of two elements or the interaction of two elements. For ordinary skilled in the art, the specific meaning of the above terms in the utility model can be understood according to the specific circumstances.
[0029] In the utility model, unless another definite provision and limitation, first feature is "on" or "under" second feature can include that first and second features are in direct contact, also can include that first and second features are not in direct contact but contact through other feature between them.Moreover, first feature "on", "above" and "upper surface" of second feature includes that first feature is directly above and obliquely above second feature, or only indicates that horizontal height of first feature is higher than second feature.First feature "under", "below" and "lower surface" of second feature includes that first feature is directly below and obliquely below second feature, or only indicates that horizontal height of first feature is less than second feature.
[0030] In the description of the embodiment, the terms "upper", "lower", "right", "left", "horizontal", "vertical", and "radial" are terms of convenience and are not intended to be limiting of the application to any particular orientation of the device or element described.
[0031] The wafer manufacturing process needs to be carried out in the copper sulfate solution to carry out the electroplating process, so that the copper ions are deposited on the wafer surface. When the wafer is electroplated in the copper sulfate solution, the wafer needs to be fixed in the metal conductive workpiece 20, in order to prevent the metal conductive workpiece 20 from polluting the copper sulfate solution, the surface of the workpiece needs to be sprayed with a Teflon coating to increase the corrosion resistance of the workpiece. The conductive PIN needle 22 of the metal conductive workpiece 20 in contact with the wafer needs to be protected during the Teflon spraying process, so that the PIN needle 22 retains a part of the metal layer in contact with the wafer.
[0032] For the area of the PIN needle 22 that does not need to be sprayed, shielding is needed before spraying. The existing spraying process has limitations in local shielding of the PIN needle 22 during Teflon spraying, and can only achieve shielding of the entire surface or a larger area, and cannot achieve precise shielding of a smaller local area, which affects the use area of the product after spraying. In order to ensure the normal use of the product, after the Teflon spraying is completed, a mechanical method is also needed to remove the local Teflon coating, such as milling, but it cannot be precisely removed and is time-consuming and laborious.
[0033] In order to solve the above problems, such as Figure 1 and Figure 2As shown, the embodiment provides a PIN needle protection tool 10 for cooperating with a metal conductive workpiece 20, the metal conductive workpiece 20 comprising a workpiece body 21 and a plurality of PIN needles 22 arranged on the workpiece body 21, the PIN needle protection tool 10 comprising a connecting portion 11 and a protection portion 12, the connecting portion 11 being configured to be detachably connected with the workpiece body 21, the protection portion 12 being connected with the connecting portion 11 and located at the inner side of the workpiece body 21, and the protection portion 12 being capable of shielding one side of the free end of the PIN needle 22.
[0034] In use, first, the metal conductive workpiece 20 is cleaned to ensure the cleanliness of the surface of the metal conductive workpiece 20; then, the PIN needle protection tool 10 is assembled with the metal conductive workpiece 20, the connecting portion 11 is connected with the workpiece body 21, so that the protection portion 12 shields one side of the free end of the PIN needle 22, and the position shielded by the protection portion 12 is the part of the PIN needle 22 in contact with the wafer, i.e. the area without spraying; then, the assembled metal conductive workpiece 20 and PIN needle protection tool 10 are subjected to sandblasting treatment as a whole to increase the roughness of the surface layer of the metal conductive workpiece 20 and improve the adhesion of the subsequent Teflon coating; then, the Teflon raw material powder is sprayed at a high temperature of 200-300°C to ensure the consistency of the Teflon raw material spraying, and the part shielded by the protection portion 12 is not sprayed; after the spraying is completed, the PIN needle protection tool 10 is removed, and the sprayed metal conductive workpiece 20 is sent into an oven to solidify the Teflon coating; after the solidification is completed, the spraying is finished.
[0035] As can be seen, the PIN needle protection tool 10 provided by the embodiment is assembled and connected with the metal conductive workpiece 20 through the connecting portion 11, in the Teflon spraying process, the protection portion 12 can precisely shield the local area of the PIN needle 22, so that the part of the PIN needle 22 in contact with the wafer is not sprayed, the PIN needle protection tool 10 is simple in structure and convenient and fast to use, and can assist in one-time completion of the spraying, without the need for removing the local Teflon coating by using a mechanical method after the spraying, thereby saving time and effort.
[0036] Specifically, as shown, the protection portion 12 is in the shape of a circular ring. Figure 2 In combination with Figure 1 Since the wafer is usually circular, in order to adapt to the shape of the wafer, the workpiece body 21 is in the shape of a circular ring, the plurality of PIN needles 22 are uniformly and spacedly arranged along the circumference of the workpiece body 21, and the protection portion 12 is in the shape of a circular ring and located at the inner circle of the workpiece body 21, so as to locally shield the free end of a circle of PIN needles 22.
[0037] In the process of sand blasting and Teflon raw material spraying, the metal conductive workpiece 20 is easy to deform under external force, for example, the PIN pin 22, and it is difficult to ensure the size accuracy. For the part whose size exceeds the tolerance after Teflon spraying, manual shaping is usually used to restore the original size, but manual operation often cannot be accurately controlled and needs to be repaired repeatedly, which may damage the Teflon coating during the repair process.
[0038] To solve the above problems, as shown in Figure 3 and Figure 4 , a plurality of grooves 121 corresponding to the PIN pin 22 are formed on the protection part 12, and the plurality of grooves 121 are arranged along the circumference of the protection part 12, and the end part of each PIN pin 22 can be accommodated in the corresponding groove 121. The groove 121 not only has a good local shielding and protection effect on the PIN pin 22, but also has a positioning effect on the PIN pin 22, enhances the structural strength, effectively avoids the product deformation caused by external force during the spraying process, ensures the size accuracy of the PIN pin 22 after spraying, and saves the subsequent manual shaping time.
[0039] Further, in combination with Figure 3 and Figure 5 , the connecting part 11 includes a connecting sheet 111 and a fastener (not shown), the connecting sheet 111 is connected with the protection part 12, a first connecting hole is formed on the workpiece body 21, a second connecting hole 112 is formed on the connecting sheet 111 corresponding to the first connecting hole, and the fastener is sequentially arranged through the second connecting hole 112 and the first connecting hole to fixedly connect the connecting sheet 111 with the workpiece body 21. By using the first connecting hole on the workpiece body 21, the fastener is used to realize the fixed connection of the connecting sheet 111 with the workpiece body 21, and the disassembly is also relatively convenient.
[0040] Optionally, the first connecting hole is a threaded hole, the second connecting hole 112 is a light hole, and the fastener is a bolt, which is screwed through the light hole and the threaded hole. In this way, the stable connection of the connecting sheet 111 with the workpiece body 21 can be realized, and the disassembly is also relatively convenient.
[0041] As shown in Figure 5 , in this embodiment, the number of connecting parts 11 is six, and the six connecting parts 11 are uniformly and spacedly arranged along the circumference of the protection part 12, which can ensure the stability and reliability of the connection between the PIN pin protection tool 10 and the workpiece body 21. In other optional embodiments, the number of connecting parts 11 can also be four, five or other numbers, which can be flexibly set according to actual needs, and no specific limitation is made here.
[0042] Further, as shown in Figure 3 and Figure 5As shown, the PIN protection tool 10 further comprises a connecting rod 13, one end of the connecting rod 13 is connected with the protection part 12, and the other end of the connecting rod 13 is connected with the connecting sheet 111. The connecting sheet 111 and the protection part 12 are connected through the connecting rod 13, which is simple and compact in structure and low in cost.
[0043] In an optional embodiment, the connecting rod 13 and the protection part 12 can be an integral structure, and the connecting sheet 111 can be a split structure. Figure 5 As shown, the connecting sheet 111 is provided with a third connecting hole 113, and one end of the connecting rod 13 away from the protection part 12 is connected in the third connecting hole 113. The connecting mode of the connecting rod 13 and the third connecting hole 113 can be screw connection, welding or bonding, etc., as long as the connecting rod 13 can be fixed in the third connecting hole 113, which is not limited here.
[0044] In another optional embodiment, the connecting rod 13, the connecting sheet 111 and the protection part 12 can be an integral structure. In this way, the structural strength of the entire PIN protection tool 10 is improved, and the assembly process between the connecting rod 13, the connecting sheet 111 and the protection part 12 is saved, which saves time and effort.
[0045] In another optional embodiment, the connecting rod 13, the connecting sheet 111 and the protection part 12 can also be a split structure, that is, the connecting rod 13, the connecting sheet 111 and the protection part 12 are manufactured separately, and then connected by mechanical mode, which is convenient for processing of single parts. Optionally, the connecting mode between the connecting rod 13 and the connecting sheet 111 and the connecting mode between the connecting rod 13 and the protection part 12 can be screw connection, welding or bonding, etc., as long as the fixed connection between the connecting rod 13 and the connecting sheet 111 and the fixed connection between the connecting rod 13 and the protection part 12 can be realized, which is not limited here.
[0046] Obviously, the above embodiments of the utility model are only examples for clearly explaining the utility model, and are not the limitation of the embodiments of the utility model. For ordinary skilled in the art, various obvious changes, re-adjustment and replacement can be made without departing from the protection scope of the utility model. Here, it is not necessary and impossible to enumerate all the embodiments. Any modification, equivalent replacement and improvement, etc. made within the spirit and principle of the utility model should be included in the protection scope of the utility model claim.
Claims
1. A PIN protection tool for cooperating with a metal conductive workpiece (20) comprising a workpiece body (21) and a plurality of PINs (22) provided on the workpiece body (21), characterized in that, The PIN needle protection tool comprises a connecting part (11) configured to be detachably connected with the workpiece body (21) and a protection part (12) connected with the connecting part (11) and located on the inner side of the workpiece body (21), which can shield one side of the free end of the PIN needle (22).
2. The PIN protection tool of claim 1, wherein, The protection part (12) is a circular ring.
3. The PIN protection tool of claim 2, wherein, A plurality of grooves (121) corresponding to the PIN needles (22) are formed on the protection part (12), and the plurality of grooves (121) are arranged along the circumference of the protection part (12) at intervals, and the end of each PIN needle (22) can be accommodated in the corresponding groove (121).
4. The PIN protection tool of claim 1, wherein, The connecting part (11) comprises a connecting sheet (111) connected with the protection part (12) and a fastener, a first connecting hole is formed on the workpiece body (21), a second connecting hole (112) corresponding to the first connecting hole is formed on the connecting sheet (111), and the fastener is sequentially threaded through the second connecting hole (112) and the first connecting hole to fixedly connect the connecting sheet (111) with the workpiece body (21).
5. The PIN protection tool of claim 4, wherein, The first connecting hole is a threaded hole, the second connecting hole (112) is a light hole, and the fastener is a bolt.
6. The PIN protection tool of claim 4, wherein, A connecting rod (13) is further included, one end of the connecting rod (13) is connected with the protection part (12), and the other end of the connecting rod (13) is connected with the connecting sheet (111).
7. The PIN protection tool of claim 6, wherein, The connecting rod (13) and the protection part (12) are an integral structure, a third connecting hole (113) is formed on the connecting sheet (111), and the end of the connecting rod (13) away from the protection part (12) is connected in the third connecting hole (113).
8. The PIN protection tool of claim 6, wherein, The connecting rod (13), the connecting sheet (111) and the protection part (12) are an integral structure.
9. The PIN protection tool of claim 6, wherein, The connecting rod (13), the connecting sheet (111) and the protection part (12) are a split structure.
10. The PIN protection tool of claim 1, wherein, The number of the connecting parts (11) is multiple, and the plurality of connecting parts (11) are uniformly and spacedly arranged along the circumference of the protection part (12).