Cleaning type semiconductor gas throttle valve maintenance equipment

Abstract

The utility model provides cleaning type semiconductor gas throttle valve maintenance equipment, and belongs to the technical field of flow valve maintenance. Comprising a cleaning assembly, the cleaning assembly comprises a first fixing ring slidably arranged on a guide rod, an open groove is formed in the first fixing ring, a rotating ring is arranged on the first fixing ring through the open groove, first cleaning wheels are evenly arranged on the rotating ring, a fixed open groove is formed in the other end of the first fixing ring, and a second cleaning wheel is rotatably arranged in the fixed open groove; the first fixing ring can slide along the guide rod, the axial position of the cleaning assembly is adjusted, the rotating ring is embedded in an open groove of the first fixing ring and can flexibly rotate, the first cleaning wheels evenly distributed on the rotating ring are driven to rotate, and the inner wall of the semiconductor gas throttling valve is circumferentially wiped and cleaned. And the second cleaning wheel is installed in a fixing open groove in the other end of the first fixing ring and can rotate, cleaning is assisted from different angles, and dirt and impurities in the throttling valve can be efficiently removed in an omnibearing mode through cooperation of the assemblies.

Description

TECHNICAL FIELD

[0001] The utility model relates to flow valve maintenance technical field especially relates to a clean type semiconductor gas throttling valve maintenance equipment. BACKGROUND

[0002] The clean type semiconductor gas throttling valve maintenance equipment can clean the throttling valve in all directions, remove internal impurities and dirt, and restore the gas flow control accuracy.

[0003] The existing throttling valve maintenance equipment cannot clean the deep part inside the valve body when in use. The narrow and winding internal passage is difficult for conventional cleaning tools to reach, resulting in long-term retention of dirt and impurities. This not only affects the accurate control of the throttling valve on the gas flow, but also accelerates the corrosion and wear of the internal components, significantly shortens the service life of the throttling valve, and increases the cost of semiconductor production and equipment maintenance frequency.

[0004] Therefore, the present application provides a clean type semiconductor gas throttling valve maintenance equipment to meet the needs. SUMMARY

[0005] The utility model discloses a clean type semiconductor gas throttling valve maintenance equipment to solve the problems existing in the prior art.

[0006] To achieve the above object, the utility model adopts the following technical scheme: a clean type semiconductor gas throttling valve maintenance equipment, comprising:

[0007] A fixed rod and a guide rod placed on one side of the fixed rod;

[0008] A cleaning assembly, the cleaning assembly includes a first fixed ring slidingly arranged on the guide rod, the first fixed ring is provided with a slot, the first fixed ring is provided with a rotating ring through the slot, the rotating ring is uniformly provided with a first cleaning wheel, the other end of the first fixed ring is provided with a fixed slot, and the second cleaning wheel is rotatably arranged in the fixed slot;

[0009] An adjusting assembly, the adjusting assembly includes a rotating block rotatably arranged on the end of the guide rod away from the fixed rod, the end of the rotating block away from the guide rod is fixedly provided with a guide pipe, and the end of the guide pipe away from the rotating block is fixedly provided with an anti-dropping block.

[0010] Further, the moving assembly includes a clamping ring clamped on the top of the fixed rod, the top of the clamping ring is fixedly provided with a connecting block, the side of the connecting block on the door lock is provided with a telescopic rod, and the other end of the telescopic rod is rotatably provided with a fixed block.

[0011] The beneficial effect of the further scheme is that when the moving assembly is used, the clamping ring is first clamped on the top of the fixed rod to realize the preliminary positioning of the assembly, the connecting block is fixed on the top of the clamping ring to provide a connecting point for the telescopic rod, the telescopic rod can be adjusted in length to change the position of the fixed block, and the fixed block moves under the driving of the telescopic rod.

[0012] Further, the fixed assembly comprises a guide plate fixed on the bottom of the fixed block, a slot is formed in the inside of the guide plate, a lead screw is arranged in the guide plate through the slot, a driving motor is arranged on the outside of the guide plate, a positioning ring is slidably arranged in the inside of the guide plate, a damage prevention pad is fixed in the inside of the positioning ring, and a nut is arranged on the bottom of the positioning ring.

[0013] The beneficial effect of the further scheme is that when the fixed assembly is used, the driving motor is installed on the outside of the guide plate, and drives the lead screw in the inside of the guide plate to rotate after being started, the positioning ring slides in the guide plate along the direction of the lead screw through the cooperation of the slot in the inside of the positioning ring and the lead screw, the damage prevention pad in the inside of the positioning ring can prevent the semiconductor gas throttle valve from being damaged during clamping, and the positioning ring is fixed by the nut after being moved to a suitable position.

[0014] Further, the inside of the first cleaning wheel is fixed with a fixed plate, a second fixed ring is arranged in the middle of the fixed plate, a slot is formed in the inside of the second fixed ring, and a damage prevention wheel is arranged in the second fixed ring through the slot.

[0015] The beneficial effect of the further scheme is that when the cleaning operation is carried out, the first cleaning wheel rotates on the operation surface, the inside fixed plate plays a supporting and stabilizing role, the second fixed ring is fixed in the middle of the fixed plate, the damage prevention wheel rotates in the slot of the second fixed ring and contacts the guide rod, and the cleaning assembly where the first cleaning wheel is located is moved along the guide rod by means of the rolling friction force.

[0016] Compared with the prior art, the advantages and positive effects of the utility model lie in that:

[0017] 1、The first fixed ring can slide along the guide rod to adjust the position of the cleaning assembly in the axial direction, the rotating ring is embedded in the slot of the first fixed ring and can rotate flexibly to drive the first cleaning wheels uniformly distributed thereon to rotate and wipe and clean the inner wall of the semiconductor gas throttle valve in the circumferential direction, the second cleaning wheel is installed in the fixed slot on the other end of the first fixed ring and can rotate to assist cleaning from different angles, and through the cooperation of these assemblies, the dirt and impurities in the throttle valve can be cleaned in all directions and efficiently.

[0018] 2、adjusting assembly in use, the rotating block can rotate around the guide rod away from the end of the fixed rod, so as to adjust the angle of the guide pipe, the guide pipe provides guidance for the cleaning assembly, so that it can move accurately in a specific direction, and the anti-drop block is fixed at the end of the guide pipe away from the rotating block, which can prevent the components connected to the guide pipe from being accidentally separated, by adjusting the angle of the rotating block, the guidance of the guide pipe and the anti-drop of the anti-drop block, the adjusting assembly realizes accurate adjustment of the position and direction of the related components. BRIEF DESCRIPTION OF DRAWINGS

[0019] Figure 1 It is a front view of the semiconductor gas throttling valve maintenance equipment of the utility model;

[0020] Figure 2 It is a structure diagram of the fixed assembly in the semiconductor gas throttling valve maintenance equipment of the utility model;

[0021] Figure 3 It is a structure diagram of the cleaning assembly in the semiconductor gas throttling valve maintenance equipment of the utility model;

[0022] Figure 4 It is a sectional view of the cleaning assembly in the semiconductor gas throttling valve maintenance equipment of the utility model.

[0023] REFERENCE NUMERALS

[0024] 1, fixed rod; 2, guide rod;

[0025] 3, cleaning assembly; 31, first fixed ring; 32, rotating ring; 33, first cleaning wheel; 34, fixed slot; 35, second cleaning wheel; 36, fixed plate; 37, second fixed ring; 38, damage prevention wheel;

[0026] 4, adjusting assembly; 41, rotating block; 42, guide pipe; 43, anti-drop block;

[0027] 5, fixed assembly; 51, guide plate; 52, driving motor; 53, positioning ring; 54, damage prevention pad; 55, nut;

[0028] 6, fixed block;

[0029] 7, moving assembly; 71, connecting block; 72, clamping ring; 73, telescopic rod. DETAILED DESCRIPTION

[0030] The technical solutions in the embodiments of the utility model will be clearly and completely described below with reference to the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, rather than all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of the utility model.

[0031] As shown in Figure 1 - Figure 4 The utility model provides a kind of technical scheme: a clean type semiconductor gas throttle valve maintenance equipment, comprising: fixed rod 1 and the guide rod 2 of being placed in fixed rod 1 side;

[0032] Cleaning assembly 3, cleaning assembly 3 includes the first fixed ring 31 of sliding being arranged on guide rod 2, first fixed ring 31 is equipped with slot, first fixed ring 31 is equipped with rotating ring 32 by slot, rotating ring 32 is evenly provided with first cleaning wheel 33, another end of first fixed ring 31 is equipped with fixed slot 34, second cleaning wheel 35 is rotatably arranged in fixed slot 34, first fixed ring 31 can slide along guide rod 2, adjust the position of cleaning assembly 3 in axial direction, rotating ring 32 is embedded in the slot of first fixed ring 31, can flexibly rotate, drive the first cleaning wheel 33 evenly distributed on it rotation, the inner wall of semiconductor gas throttle valve is circumferentially wiped and cleaned, and second cleaning wheel 35 is installed in the fixed slot 34 of another end of first fixed ring 31 and can rotate, and it is assisted to clean from different angles, by the cooperation of these components, dirt and impurities in throttle valve can be removed efficiently in all directions;

[0033] Adjusting assembly 4, adjusting assembly 4 includes the rotating block 41 of being rotatably arranged at the end of guide rod 2 away from fixed rod 1, the guide pipe 42 of being fixed at the end of rotating block 41 away from guide rod 2, the anti-drop block 43 of being fixed at the end of guide pipe 42 away from rotating block 41, adjusting assembly 4 is used, rotating block 41 can rotate around the end of guide rod 2 away from fixed rod 1, to adjust the angle of guide pipe 42, guide pipe 42 provides direction for cleaning assembly 3, so that it can accurately move in a particular direction, and anti-drop block 43 is fixed at the end of guide pipe 42 away from rotating block 41, can prevent the components connected on guide pipe 42 from accidentally separating, by rotating block 41 adjusting angle, guide pipe 42 guiding and anti-drop block 43 preventing, adjusting assembly 4 realizes accurate adjustment of the position and direction of relevant components.

[0034] Further, as shown in Figure 1 - Figure 2As shown: the moving assembly 7 includes a clamping ring 72 clamped on the top of the fixed rod 1, the top of the clamping ring 72 is fixed with a connecting block 71, one side of the connecting block 71 is provided with a telescopic rod 73, the other end of the telescopic rod 73 is rotatably provided with a fixed block 6, the moving assembly 7 is used, first, the clamping ring 72 is clamped on the top of the fixed rod 1, the preliminary positioning of the assembly is realized, the connecting block 71 is fixed on the top of the clamping ring 72, the connecting point for the telescopic rod 73 is provided, the telescopic rod 73 can be telescopic adjusted in length, the position of the fixed block 6 is changed, and the fixed block 6 is moved under the driving of the telescopic rod 73.

[0035] Further, as Figure 1 - Figure 2 As shown: in this scheme, the fixed assembly 5 includes a guide plate 51 fixed on the bottom of the fixed block 6, the inside of the guide plate 51 is provided with a slot, the guide plate 51 is provided with a lead screw through the slot, the outside of the guide plate 51 is provided with a driving motor 52, the inside of the guide plate 51 is slidably provided with a positioning ring 53, the inside of the positioning ring 53 is fixed with a damage prevention pad 54, and the bottom of the positioning ring 53 is provided with a nut 55, when the fixed assembly 5 is used, the driving motor 52 is installed on the outside of the guide plate 51, after starting, the inside lead screw of the guide plate 51 is driven to rotate, the positioning ring 53 is slid along the direction of the lead screw in the guide plate 51 through the cooperation of the inside slot and the lead screw, the damage prevention pad 54 in the inside of the positioning ring 53 can prevent the semiconductor gas throttle valve from being damaged when clamping, and after moving to the appropriate position, the positioning ring 53 is fixed with the nut 55.

[0036] Working principle: as Figure 1 - Figure 4As shown, the fixed assembly 5 plays a leading role first, the driving motor 52 is located outside the guide plate 51, after starting to drive the screw rod to rotate, the positioning ring 53 is matched with the screw rod through the internal slot and slides in the guide plate 51, the anti-damage pad 54 in the positioning ring 53 can prevent damage when clamping the throttle valve, after reaching the appropriate position, the nut 55 is fixed, the fixing of the throttle valve is completed, the moving assembly 7 clamps the clamping ring 72 on the top of the fixed rod 1 to realize preliminary positioning, the connecting block 71 provides a connecting point for the telescopic rod 73, the telescopic rod 73 changes the position of the fixed block 6 by stretching and retracting, so as to adjust the position of the entire maintenance equipment, in the cleaning assembly 3, the first fixed ring 31 slides along the guide rod 2 to adjust the axial position of the cleaning assembly 3, the rotating ring 32 rotates in the slot of the first fixed ring 31, drives the first cleaning wheel 33 to rotate, and the inner wall of the throttle valve is wiped in the circumferential direction, the second cleaning wheel 35 is installed in the fixed slot 34 at the other end of the first fixed ring 31 and rotates to assist cleaning from different angles, the fixed plate 36 in the first cleaning wheel 33 plays a supporting role, the second fixed ring 37 is fixed in the middle of the fixed plate 36, the anti-damage wheel 38 rotates in the slot of the second fixed ring 37 and contacts the guide rod 2, pushes the cleaning assembly 3 to move along the guide rod 2, the rotating block 41 of the adjusting assembly 4 rotates away from the one end of the fixed rod 1 around the guide rod 2, adjusts the angle of the guide pipe 42, the guide pipe 42 guides the cleaning assembly 3 to move accurately, and the anti-dropping block 43 prevents the components on the guide pipe 42 from accidentally falling off, so as to accurately adjust the position and direction of the related components.

[0037] The above is only a preferred embodiment of the present application, and is not intended to limit the present application in other forms. Any skilled person in the art can modify or change the above disclosed technical content to equivalent embodiments applied to other fields, but any simple modification, equivalent change and modification of the above embodiments made according to the technical essence of the present application without departing from the technical scheme of the present application still belongs to the protection scope of the present application.

Claims

1. A clean type semiconductor gas throttle valve repair equipment characterized by, Include: Fixed rod (1) and guide rod (2) placed on one side of fixed rod (1); Cleaning assembly (3), the first fixed ring (31) is slidably arranged on the guide rod (2), the first fixed ring (31) is provided with a rotating ring (32) through the slot, the rotating ring (32) is uniformly provided with a first cleaning wheel (33), the other end of the first fixed ring (31) is provided with a fixed slot (34), the second cleaning wheel (35) is rotatably arranged in the fixed slot (34); Adjusting assembly (4), the rotating block (41) is rotatably arranged on the guide rod (2) away from the fixed rod (1), the guide pipe (42) is fixed on the end of the rotating block (41) away from the guide rod (2), the anti-off block (43) is fixed on the end of the guide pipe (42) away from the rotating block (41).

2. The cleaning type semiconductor gas throttling valve repair apparatus according to claim 1, wherein The top of the fixed rod (1) is provided with a moving assembly (7).

3. The cleanable semiconductor gas throttling valve repair kit of claim 2, wherein, The moving assembly (7) includes a clamping ring (72) clamped on the top of the fixed rod (1), the clamping ring (72) is fixed with a connecting block (71) on the top, the connecting block (71) is provided with a telescopic rod (73) on one side of the door lock, the other end of the telescopic rod (73) is rotatably provided with a fixed block (6).

4. The cleanable semiconductor gas throttling valve repair kit of claim 3, wherein, The bottom of the fixed block (6) is provided with a fixed assembly (5).

5. The cleanable semiconductor gas throttling valve service equipment according to claim 4, characterized in that The fixed assembly (5) includes a guide plate (51) fixed on the bottom of the fixed block (6), the inside of the guide plate (51) is provided with a slot, the guide plate (51) is provided with a lead screw through the slot, the outside of the guide plate (51) is provided with a driving motor (52), the inside of the guide plate (51) is slidably provided with a positioning ring (53), the inside of the positioning ring (53) is fixed with a damage prevention pad (54), the bottom of the positioning ring (53) is provided with a nut (55).

6. The cleanable semiconductor gas throttling valve repair kit of claim 1, wherein: The inside of the first cleaning wheel (33) is fixed with a fixed plate (36), the middle of the fixed plate (36) is provided with a second fixed ring (37), the inside of the second fixed ring (37) is provided with a slot, the second fixed ring (37) is provided with a damage prevention wheel (38) through the slot.

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