Vacuum coating equipment

Abstract

The utility model provides vacuum coating equipment which comprises an equipment body, at least one heating chamber and at least one process chamber which are alternately arranged are arranged in the equipment body, at least one heater is arranged in the heating chamber and the process chamber, and the heater is provided with a plurality of heating areas with independent temperature control; the transmission device is arranged on the equipment body and is used for transmitting a carrying disc carrying a substrate between the heating chamber and the process chamber; according to the utility model, the heater is provided with a plurality of independent temperature control heating areas, and the heating temperature of each heating area can be regulated and controlled in real time according to the temperature change distribution condition of the carrying disc, so that the temperature distribution uniformity of a substrate on the carrying disc is ensured, the film layer uniformity requirement is met, and the film coating quality is improved.

Description

TECHNICAL FIELD

[0001] The utility model belongs to the field of coating equipment technology, more specifically, relate to a vacuum coating equipment. BACKGROUND

[0002] With the continuous development of photovoltaic industry, the equipment scheme of perovskite solar cell industrialization gradually tends to vacuum coating equipment. RPD (reactive plasma plating), multi-source evaporation, RF (radio frequency) sputtering, pulse DC sputtering and DC sputtering and other technologies are favored by perovskite solar cell customers.

[0003] In the existing perovskite solar cell manufacturing part vacuum coating process, the substrate needs to be preheated before coating, so as to improve the film thickness uniformity of the film layer and the sheet resistance uniformity. When the temperature requirement of the coating process exceeds a certain temperature, the temperature uniformity deviation is too large, and the quality of the film layer coated on each area of the substrate is not ideal. UTILITY MODEL CONTENT

[0004] The utility model aims at providing a kind of vacuum coating equipment, mainly solve the problem of ideal coating quality.

[0005] To achieve the above object, the utility model employs the technical scheme that:

[0006] The utility model provides a kind of vacuum coating equipment, comprising:

[0007] Equipment body, at least one heating chamber and at least one process chamber are arranged alternately in the equipment body, at least one heater is arranged in the heating chamber and the process chamber, and the heater has multiple independently temperature-controlled heating zones;

[0008] Transportation device, installed on the equipment body, for conveying the carrier disc carrying the substrate between the heating chamber and the process chamber.

[0009] Further, one upper heater and one lower heater are vertically spaced in the heating chamber, two lower heaters are transversely spaced in the process chamber, and the upper heater and the lower heater have five independently temperature-controlled heating zones.

[0010] Further, the five heating zones of the upper heater include one upper inner heating zone and four upper outer heating zones surrounding the upper inner heating zone, and two upper outer heating zones located on the left and right sides of the upper inner heating zone occupy four corners of the upper heater.

[0011] The five heating zones of the lower heater include one lower inner heating zone and four lower outer heating zones arranged around the lower inner heating zone, wherein two lower outer heating zones located at the front and back sides of the lower inner heating zone occupy four corners of the lower heater.

[0012] Further, the number of heating chambers is greater than the number of process chambers, and the equipment body is sequentially provided with a left heating chamber, a first process chamber, a middle heating chamber, a second process chamber and a right heating chamber from left to right.

[0013] Further, the heater is provided with a reflection plate.

[0014] Further, the reflection plate includes a reflection inner plate arranged at the bottom of the inner side of the heater and a reflection outer plate arranged around the outer side of the heater.

[0015] Further, the transmission device includes a transmission shaft group for transmitting the carrier disc and a driving assembly for driving the transmission shaft group to rotate, each transmission shaft in the transmission shaft group includes a magnetic fluid main shaft arranged close to the heater.

[0016] Further, each transmission shaft in the transmission shaft group further includes a rotary joint and a water inlet pipe internally formed with a water inlet channel, the rotary joint and the magnetic fluid main shaft are both provided with cooling holes, the water inlet pipe is placed in the cooling holes and a gap between the pipe wall of the water inlet pipe and the hole wall of the cooling hole forms a water outlet channel, the rotary joint is provided with a first water inlet joint for connecting the water inlet channel and a first water outlet joint for connecting the water outlet channel.

[0017] Further, the rotary joint has a joint main shaft and a joint shell, the joint shell wraps the first end of the joint main shaft, the second end of the joint main shaft is sleeved inside the first end of the magnetic fluid main shaft, the joint shell is internally provided with a graphite seat, a spring and a first bearing, the first bearing is sleeved outside the first end of the joint main shaft, the graphite seat abuts against the first end of the joint main shaft to form a face seal, and the spring is elastically arranged at the side of the graphite seat away from the joint main shaft.

[0018] Further, the equipment body includes a cavity and at least one cavity cover for jointly forming the heating chamber with the cavity, and the cavity and the cavity cover are provided with cold water pipes.

[0019] Compared with the prior art, the vacuum coating equipment provided by the present application has at least one of the following beneficial effects:

[0020] 1. The heater is provided with multiple independent temperature control heating zones, the heating temperature of each heating zone can be adjusted in real time according to the temperature change distribution of the carrier, so as to ensure the uniform temperature distribution of the substrate on the carrier, meet the uniformity requirement of the film layer, and improve the film coating quality.

[0021] 2. The reflection plate is arranged inside and outside the heater, and the heating efficiency is improved.

[0022] 3. The water-cooling heat dissipation structure is arranged for the transmission device and the equipment body respectively, so as to improve the high-temperature resistance and reliability. BRIEF DESCRIPTION OF DRAWINGS

[0023] In order to more clearly illustrate the technical scheme in the embodiments of the present application, the drawings needed to be used in the embodiments or prior art description will be briefly introduced as follows. Obviously, the drawings in the following description are only some embodiments of the present application, and other drawings can also be obtained according to these drawings without creative labor for those skilled in the art.

[0024] Figure 1 It is a schematic diagram of the three-dimensional structure of the vacuum coating equipment body in the present application;

[0025] Figure 2 It is a schematic diagram of the sectional structure of the vacuum coating equipment body in the present application;

[0026] Figure 3 It is a schematic diagram of the distribution of the five heating zones of the upper heater in the present application;

[0027] Figure 4 It is a schematic diagram of the distribution of the five heating zones of the lower heater in the present application;

[0028] Figure 5 It is a schematic diagram of the position of the reflection inner plate inside the heater in the present application;

[0029] Figure 6 It is a schematic diagram of the position of the reflection outer plate outside the heater in the present application;

[0030] Figure 7 It is a schematic diagram of one structure of the reflection outer plate in the present application;

[0031] Figure 8 It is a schematic diagram of the top view structure of the transmission device in the present application;

[0032] Figure 9 It is a schematic diagram of the side view structure of the transmission device in the present application;

[0033] Figure 10 It is a schematic diagram of the side view structure of the transmission shaft in the present application;

[0034] Figure 11 It is a cross-section structure schematic view of the transmission shaft in the utility model;

[0035] Figure 12 It is a side view structure schematic view of the cavity cover in the utility model;

[0036] Figure 13 It is a top view structure schematic view of the cavity cover in the utility model;

[0037] Figure 14 It is a bottom structure schematic view of the cavity in the utility model;

[0038] Figure 15 It is a side structure schematic view of the cavity in the utility model;

[0039] Figure 16 It is a position schematic view of the sheet metal assembly fixed in the cavity in the utility model;

[0040] Figure 17 It is a side view structure schematic view of the non-standard bolt of the first and second fixed assemblies in the utility model;

[0041] Figure 18 It is a side view structure schematic view of the third fixed assembly in the utility model;

[0042] Figure 19 It is a cross-section structure schematic view of the side plate assembly fixed in the cavity in the utility model;

[0043] Figure 20 It is a general assembly structure schematic view of the vacuum coating equipment in the utility model;

[0044] In the drawings, the main marks are:

[0045] 11, left heating chamber; 12, first process chamber; 121, first coating area; 13, middle heating chamber; 14, second process chamber; 141, second coating area; 15, right heating chamber;

[0046] 21, upper heater; 211, upper inner heating area; 212, upper outer heating area; 22, lower heater; 221, lower inner heating area; 222, lower outer heating area;

[0047] 31, reflecting inner plate; 32, reflecting outer plate; 321, upper reflecting outer plate; 322, side reflecting outer plate; 323, lower reflecting outer plate;

[0048] 400, transmission shaft; 401, rotary joint; 402, magnetic fluid assembly;

[0049] 42, magnetic fluid main shaft; 43, magnetic fluid housing; 44, synchronous pulley; 45, conveying guide wheel; 46, synchronous belt; 47, connecting main shaft; 48, motor; 49, speed reducer; 410, joint main shaft; 411, joint housing; 412, water inlet pipe; 413, cooling hole; 414, first water inlet joint; 415, first water outlet joint; 416, graphite seat; 417, spring; 418, first bearing; 419, water seal ring; 420, flange; 421, second bearing; 423, second water inlet joint; 424, second water outlet joint; 425, vacuum seal ring;

[0050] 51, cavity; 52, cavity cover; 53, cold water pipe;

[0051] 61, anti-sticking plate; 62, reflection side plate;

[0052] 71, first fixing assembly; 72, second fixing assembly; 73, third fixing assembly;

[0053] 701, non-standard bolt; 702, gasket; 703, nut;

[0054] 81, first plated cover plate; 82, second plated cover plate. DETAILED DESCRIPTION

[0055] In order to make the technical problems, technical schemes and beneficial effects of the utility model clearer and more apparent, the utility model will be further described in detail below in combination with the drawings and examples. It should be understood that the specific examples described herein are only used to explain the utility model and do not limit the utility model.

[0056] In the existing perovskite solar cell manufacturing partial vacuum plating process, the substrate needs to be preheated before plating to improve the film thickness uniformity and sheet resistance uniformity of the film layer. However, when the temperature requirement of the plating process exceeds a certain temperature, the temperature uniformity deviation is too large, and the quality of the film layer plated on each area of the substrate is not ideal. Moreover, when the existing substrate heating requirement exceeds a certain temperature, the components in the cavity are deformed beyond the limit due to thermal expansion, which interferes with or damages the parts, and cannot be used.

[0057] Based on this, the problems to be solved by the utility model are: 1) how to improve the heating temperature uniformity when the substrate temperature requirement exceeds high temperature, and meet the film layer uniformity requirement; 2) how to solve the problem of limited use caused by the thermal expansion deformation of other components in the cavity, and the increase of maintenance cost; such as the deformation and damage of the magnetic fluid bearing of the conveying structure at high temperature, which will cause vacuum leakage; the cavity is hot to the touch at high temperature; the interference caused by the thermal deformation and warping of the sheet metal in the cavity.

[0058] In view of the above problems to be solved, the vacuum coating equipment adjusts the distribution and position of the heating area, sets the temperature of each area to be adjustable, improves the temperature resistance of the assembly, and provides an anti-deformation structure design of the assembly.

[0059] For the convenience of understanding, the specific structure of the vacuum coating equipment will be described in detail in combination with the drawings.

[0060] First, please refer to Figures 1 to 4 、 Figures 7 to 8 The vacuum coating equipment at least comprises:

[0061] The equipment body is provided with at least one heating chamber and at least one process chamber arranged alternately, at least one heater is arranged in the heating chamber and the process chamber, and the heater has a plurality of independently temperature-controlled heating zones;

[0062] The transmission device is installed on the equipment body and is used for conveying the carrier disc carrying the substrate between the heating chamber and the process chamber.

[0063] The structure of the heater is improved while the substrate is preheated and then coated, the heater is provided with a plurality of independently temperature-controlled heating zones, the heating temperature of each heating zone can be real-time regulated according to the temperature change distribution (such as the temperature rise distribution or the heat loss distribution) of the carrier disc, the temperature distribution of the substrate on the carrier disc is ensured to be uniform, the uniformity requirement of the film layer is met, and the coating quality is improved.

[0064] It should be noted that different numbers of heaters can be arranged in the heating chamber and the process chamber.

[0065] Preferably, as shown in Figure 2 An upper heater 21 and a lower heater 22 are vertically and spacedly arranged in the heating chamber, two lower heaters 22 are transversely and spacedly arranged in the process chamber, and the upper heater 21 and the lower heater 22 have five independently temperature-controlled heating zones.

[0066] The upper heater 21 and the lower heater 22 arranged in the heating chamber are used for heating, which can improve the heating efficiency and meet the high-temperature heating requirement of the substrate; the two lower heaters 22 arranged in the process chamber are used for heat preservation, which can also adapt to the double-substrate coating application scenario; the upper heater 21 and the lower heater 22 have five independently temperature-controlled heating zones, which can meet the heating and heat preservation effect of the substrate with a specific size specification.

[0067] Of course, in other optional embodiments, the number of heating zones of each heater can be three, seven or other values, and different heaters can also be provided with different numbers of heating zones.

[0068] Preferably, as shown in Figure 3As shown, the five heating zones of the upper heater 21 include an upper inner heating zone 211 and four upper outer heating zones 212 surrounding the upper inner heating zone 211, wherein two upper outer heating zones 212 located at the left and right sides of the upper inner heating zone 211 occupy the four corners of the upper heater 21.

[0069] As shown, the five heating zones of the upper heater 21 include an upper inner heating zone 211 and four upper outer heating zones 212 surrounding the upper inner heating zone 211, wherein two upper outer heating zones 212 located at the left and right sides of the upper inner heating zone 211 occupy the four corners of the upper heater 21. Figure 4 As shown, the five heating zones of the lower heater 22 include a lower inner heating zone 221 and four lower outer heating zones 222 surrounding the lower inner heating zone 221, wherein two lower outer heating zones 222 located at the front and rear sides of the lower inner heating zone 221 occupy the four corners of the lower heater 22.

[0070] With this heating zone distribution, the local heating zones at the four corners of the upper heater 21 and the local heating zones at the four corners of the lower heater 22 are combined into a cross shape, i.e. a cross structure, which can compensate for the defect of non-uniform temperature of the substrate on the carrier due to the most heat loss at the four corner edge zones of the carrier.

[0071] Generally, the heat loss of the peripheral zone of the carrier is more than that of the central zone of the carrier. In this regard, the heating temperature of each upper outer heating zone 212 of the upper heater 21 can be set to be higher than that of the upper inner heating zone 211, and the heating temperature of each lower outer heating zone 222 of the lower heater 22 can be set to be higher than that of the lower inner heating zone 221, so as to more quickly supplement the lost heat of the peripheral zone of the carrier, and make the temperature uniformity of the substrate on the carrier better. Moreover, by setting different heating temperature combinations for the five heating zones of the upper heater 21 and the lower heater 22, the smallest temperature range of the entire substrate can be adjusted.

[0072] It should be understood that for the heating zones of each heater, a single layer or multiple layers of heating wires can be arranged in a set area according to a set winding manner.

[0073] It should be further noted that in order to ensure that the temperature of the substrate on the carrier can reach the set temperature before multiple film plating, the number of heating chambers can be set to be greater than the number of process chambers.

[0074] Preferably, as shown, the equipment body is sequentially provided with a left heating chamber 11, a first process chamber 12, an intermediate heating chamber 13, a second process chamber 14 and a right heating chamber 15 from left to right. This design can also meet the repeated film plating process requirement of the substrate on the carrier. Figure 2

[0075] ​The left heating chamber 11 and the right heating chamber 15 are both provided with an upper heater 21 and a lower heater 22 for heating, which can meet the process requirements of left or right feeding of the carrier plate. The middle heating chamber 13 is also provided with an upper heater 21 and a lower heater 22 for heat preservation. The first process chamber 12 and the second process chamber 14 are both provided with two lower heaters 22 for heat preservation. For example, the carrier plate carrying the substrate first enters the left heating chamber 11, and the temperature of the carrier plate and the substrate reaches the first set temperature under the combined heating of the upper heater 21 and the lower heater 22; then the carrier plate carrying the substrate continues to move forward, and the temperature drops rapidly during the passing through the position without a heater, and then enters the first process chamber 12, and the temperature of the carrier plate and the substrate is maintained at the first set temperature under the heating of the lower heater 22, and the first film coating is started; after the first film coating is completed, the carrier plate carrying the substrate continues to move forward, and the temperature drops rapidly during the passing through the position without a heater, and then enters the middle heating chamber 13, and the temperature of the carrier plate and the substrate reaches the second set temperature under the combined heating of the upper heater 21 and the lower heater 22; then the carrier plate carrying the substrate continues to move forward, and the temperature drops rapidly during the passing through the position without a heater, and then enters the second process chamber 14, and the temperature of the carrier plate and the substrate is maintained at the second set temperature under the heating of the lower heater 22, and the second film coating is started; after the second film coating is completed, the carrier plate carrying the substrate continues to move forward, and the temperature drops rapidly during the passing through the position without a heater, and then enters the right heating chamber 15, and the temperature of the carrier plate and the substrate reaches the third set temperature under the combined heating of the upper heater 21 and the lower heater 22, and then the carrier plate carrying the substrate moves to the next process equipment, or the film coating can be repeated back and forth.

[0076] It should be further explained that, in order to further improve the heating efficiency, the heater is provided with a reflection plate, which can be a single layer or multiple layers inside and / or outside the heater. The reflection plate can have the following effects: under the vacuum environment, the reflection plate can reflect the radiant heat of the heater, reduce the heat loss of the heater, and effectively improve the heating speed of the substrate on the carrier plate; at the same time, the reflection plate can also improve the rapid temperature rise of the equipment cavity caused by high heat, and reduce the flow of cooling water in the external water pipe for heat conduction.

[0077] Preferably, as shown in Figures 5 to 7 , at least one layer of reflection inner plate 31 is arranged at the inner bottom of the heater, and multiple layers of reflection outer plate 32 are arranged around the outer side of the heater. It should be understood that the reflection inner plate 31 and the reflection outer plate 32 are both reflection plates, and the shape and size of the reflection inner plate 31 can be various, and the shape and size of the reflection outer plate 32 can also be various, wherein one structure of the reflection outer plate 32 can be as shown in Figure 7 .

[0078] As shown in Figure 5 , the inner bottom of the upper heater 21 is provided with a layer of reflection inner plate 31. As shown in Figure 6 , the outer side of the upper heater 21 is provided with multiple layers of reflection outer plate 32.As shown, two layers of upper reflection outer plates 321 and two layers of side reflection outer plates 322 are arranged outside the upper heater 21, and two layers of lower reflection outer plates 323 and two layers of side reflection outer plates 322 are arranged outside the lower heater 22. In addition, all the joints of the upper heater 21 and the lower heater 22 can be concentrated and wired together, so as to reduce the opening area of the upper reflection outer plates 321 and the lower reflection outer plates 323.

[0079] Preferably, as Figures 8 to 11 shown, the transmission device comprises two transmission shaft groups arranged symmetrically, and a driving assembly for driving the two transmission shaft groups to rotate synchronously.

[0080] The transmission shaft group comprises a plurality of transmission shafts 400 arranged at intervals along the transmission direction, and each transmission shaft 400 comprises a magnetorheological assembly 402 having a magnetorheological main shaft 42, a synchronous pulley 44 and a conveying guide wheel 45. The synchronous pulley 44 is sleeved outside the first end of the magnetorheological main shaft 42, any two adjacent synchronous pulleys 44 in the transmission shaft group are connected by a synchronous belt 46, and the conveying guide wheel 45 is sleeved outside the second end of the magnetorheological main shaft 42 and used for conveying the carrier disc.

[0081] The driving assembly comprises a connecting main shaft 47 and a motor 48. The driving end of the motor 48 is connected to the first end of the connecting main shaft 47 through the synchronous belt 46. A speed reducer 49 can also be arranged on the motor 48 at a position close to the driving end. The first end of the connecting main shaft 47 is also connected to the two synchronous pulleys 44 of one of the transmission shaft groups through the synchronous belt 46, and the second end of the connecting main shaft 47 is connected to the two synchronous pulleys 44 of the other transmission shaft group through the synchronous belt 46. The rotation of the motor 48 drives the rotation of the connecting main shaft 47, which in turn drives the rotation of all the synchronous pulleys 44 of the two transmission shaft groups, and further drives the rotation of all the conveying guide wheels 45 of the two transmission shaft groups, thereby realizing the transmission of the carrier disc.

[0082] It should be further noted that the magnetorheological main shaft 42 in the transmission device is close to the heater. Too fast heating can cause damage to the internal bearing and cause vacuum leakage. In order to quickly export the heat inside the transmission device, a water-cooling heat dissipation flow channel is arranged for the transmission device.

[0083] Preferably, as Figure 8 、 Figure 10 、 Figure 11As shown, the drive shaft 400 also includes a rotary joint 401 having a connector spindle 410 and a connector housing 411, and a water inlet pipe 412 forming a water inlet channel inside. The connector housing 411 covers the first end of the connector spindle 410, and the second end of the connector spindle 410 is sleeved inside the first end of the magnetic fluid spindle 42. The connector housing 411, the connector spindle 410 and the magnetic fluid spindle 42 are all provided with cooling holes 413. The water inlet pipe 412 is placed in the cooling hole 413 and the gap between the pipe wall of the water inlet pipe 412 and the hole wall of the cooling hole 413 forms a water outlet channel. The connector housing 411 is provided with a first water inlet connector 414 for connecting to the water inlet channel and a first water outlet connector 415 for connecting to the water outlet channel.

[0084] When the overall internal temperature of the transmission device is reduced by water cooling, external cooling water flows in from the first water inlet connector 414 on the connector housing 411, and flows through the water inlet pipe 412 in sequence through the connector housing 411, the connector main shaft 410 and the magnetofluid main shaft 42; after heat exchange, the water returns from the gap between the pipe wall of the water inlet pipe 412 and the hole wall of the cooling hole 413, and finally flows out from the first water outlet connector 415 on the connector housing 411.

[0085] It should also be noted that a sealing structure is installed for the transmission device to prevent water from flowing out from the front bearing.

[0086] Preferably, such as Figure 11 As shown, the connector housing 411 contains a graphite seat 416, a spring 417, and a first bearing 418. The first bearing 418 is sleeved on the outer side of the first end of the connector spindle 410. The graphite seat 416 abuts against the first end of the connector spindle 410 to form a surface seal. The spring 417 is telescopically positioned on the side of the graphite seat 416 away from the connector spindle 410. Normally, the spring 417 is compressed to press the graphite seat 416 tightly, so that the graphite surface of one end of the graphite seat 416 is in close contact with the end face of the first end of the connector spindle 410, thereby forming a surface seal. In addition, a compressed water seal ring 419 is provided at the tapered part of the graphite seat 416 to further prevent water from flowing out from the first bearing 418.

[0087] It should also be noted that, in order to improve the heat dissipation efficiency of other bearings in the transmission device, a water-cooling heat dissipation structure is also set up for other bearings.

[0088] Preferably, such as Figure 11As shown, the magnetic fluid assembly 402 also has a magnetic fluid shell 43, which is sleeved outside the middle section of the magnetic fluid main shaft 42. The magnetic fluid shell 43 is provided with a flange 420 and a second bearing 421 at one end close to the synchronous belt pulley 44. The second bearing 421 is located in the flange 420 and is sleeved on the joint main shaft 410. The flange 420 is provided with a water inlet and outlet channel. The flange 420 is provided with a second water inlet joint 423 and a second water outlet joint 424 for connecting the water inlet and outlet channel, respectively. In addition, the flange 420 is also provided with a vacuum sealing ring 425.

[0089] When the water cooling heat dissipation mode is used to reduce the local temperature inside the transmission device, the external water for cooling flows into the second water inlet joint 423 on the magnetic fluid shell 43, directly enters the water inlet and outlet channel, passes through the second bearing 421 during the process, and the heat-exchanged water directly flows out of the second water inlet joint 423 on the magnetic fluid shell 43.

[0090] It should be understood that when the transmission device adopts the above structure, the magnetic fluid main shaft 42 and the joint main shaft 410 are fixed together and rotate by threads. The magnetic fluid shell 43, the joint shell 411, the graphite seat 416, and the device cavity are fixed together and do not move.

[0091] It should be further explained that in order to improve the heat dissipation efficiency of the device body itself, a water cooling heat dissipation structure is also provided for the device body.

[0092] Preferably, as shown in Figures 12 to 15 The device body includes a cavity 51 and at least one cavity cover 52 for jointly surrounding a heating chamber with the cavity 51. The cavity 51 and the cavity cover 52 are provided with a cold water pipe 53. It should be understood that the number of cavity covers 52 is the same as the number of heating chambers.

[0093] As shown in Figure 12 , Figure 13 The upper part of the cavity cover 52 is provided with a cold water pipe 53. As shown in Figure 14 The bottom of the cavity 51 is provided with a cold water pipe 53. As shown in Figure 15 The side of the cavity 51 is provided with a cold water pipe 53. It should be understood that the cold water pipe 53 can be fixed on the cavity 51 and the cavity cover 52 by a welding connection mode. The pipe diameter and distribution density of the cold water pipe 53 can be set as needed according to the heat loss distribution of the heater. The cold water pipe 53 can have a cooling effect to prevent the cavity 51 and the cavity cover 52 from being scalded.

[0094] It should be further explained that in order to prevent the components inside the device body from being deformed due to thermal expansion, a component anti-deformation structure design is given.

[0095] Preferably, as shown in Figure 2 , Figures 16 to 19As shown, the process chamber has a coating area located above the two lower heaters 22. For example, the first process chamber 12 has a first coating area 121, and the second process chamber 14 has a second coating area 141. Multiple side plate assemblies are provided on the front and rear walls of the process chamber at positions corresponding to the coating areas. Each side plate assembly includes a single anti-stick plate 61 and multiple reflective side plates 62 stacked together. The side plate assemblies are fixed to the chamber wall by a first fixing assembly 71 and multiple second fixing assemblies 72. The first fixing assembly 71 consists of a non-standard bolt 701, a washer 702, and a nut 703. The second fixing assembly 72 consists of a non-standard bolt 701 and a nut 703. The non-standard bolt 701 includes a first head, a protrusion, a screw, and a second head connected in sequence. The first head penetrates into the chamber wall, the protrusion abuts against the chamber wall and the side plate assembly, the screw passes through the side plate assembly, the washer 702 is fitted at the connection between the screw and the second head, and the nut 703 is fitted onto the second head.

[0096] like Figure 19 As shown, the side panel assembly includes a single anti-adhesion plate 61 and two layers of reflective side panels 62 stacked together. The anti-adhesion plate 61 is used to block unused coating particles, preventing them from adhering to the cavity wall and becoming difficult to remove, thus avoiding damage to equipment components. The reflective side panels 62 are used to reflect heat, preventing the cavity wall from heating up too quickly.

[0097] like Figure 16 , Figure 19 As shown, the side plate assembly is fixed to the cavity wall by a first fixing component 71 and three second fixing components 72. The length L of the threaded portion of the non-standard bolt 701 in the first fixing component 71 and the second fixing component 72 is greater than the total thickness of the side plate assembly. The first fixing component 71 has a gasket 702, while the second fixing components 72 omit the gasket 702. Since the thickness of the gasket 702 is missing in the three second fixing components 72, the side plate assembly is not pressed tightly at these three locations, only the positioning hole area is used. This unpressurized state allows the anti-collision plate 61 and the reflective side plate 62 to freely extend to one side due to thermal expansion, preventing interference caused by surface deformation. At the same time, based on the thermal expansion length of the anti-collision plate 61 and the reflective side plate 62, the reserved interval between the anti-collision plate 61 and the reflective side plate 62, and between the reflective side plates 62, is greater than this expansion length.

[0098] It should also be noted that, such as Figure 16 , Figure 17 As shown, the main body of the equipment is also equipped with a variety of sheet metal parts. The sheet metal parts are fixed in the equipment cavity by multiple third fasteners 73. The third fasteners 73 are external hexagonal stepped screws, and the length L1 of the screw part in the third fastener 73 is greater than the total thickness of the sheet metal parts.

[0099] It should also be noted that, in order to integrate multiple coating methods into the same vacuum coating equipment, various coating cover plates are also configured for the equipment body.

[0100] As Figure 2 , Figure 14 , Figure 20 shown, the device body includes a cavity 51, and a plurality of plated cover plates for co-enclosing the process chamber with the cavity 51. It should be understood that the plated cover plate is obtained by integrating the cover plate and the plating mechanism. The plating mechanism can use sputtering plating technology, which is a gas ionization generated by gas discharge, and the positive ions hit the cathode target at high speed under the action of the electric field, and the cathode target atoms or molecules are ejected to the plated substrate surface to deposit into a thin film. Common sputtering methods include direct current sputtering and radio frequency sputtering, and the sputtering cathode can be selected from a planar cathode or a rotating cathode.

[0101] Specifically, as Figure 2 , Figure 20 shown, the number of plated cover plates is set to two, which are a first plated cover plate 81 for co-enclosing a first process chamber 12 with the cavity 51, and a second plated cover plate 82 for co-enclosing a second process chamber 14 with the cavity 51. The mounting structure of the plating mechanism in the first plated cover plate 81 and the second plated cover plate 82 can be set to the same structure, so that the cover plates can be interchanged, thereby providing different combinations of film layers.

[0102] The above is only a preferred embodiment of the present application, and is not intended to limit the present application. Any modification, equivalent replacement and improvement within the spirit and principles of the present application shall be included in the protection scope of the present application.

Claims

1. A vacuum coating equipment, characterized in that, include: The equipment body contains at least one heating chamber and at least one process chamber arranged alternately. Each heating chamber and process chamber contains at least one heater, which has multiple independently temperature-controlled heating zones. A transfer device, installed on the main body of the equipment, is used to transfer a carrier disk carrying a substrate between the heating chamber and the process chamber.

2. The vacuum coating equipment as described in claim 1, characterized in that, The heating chamber is vertically spaced with an upper heater and a lower heater, and the process chamber is horizontally spaced with two lower heaters. The upper heater and the lower heater have five independently temperature-controlled heating zones.

3. The vacuum coating equipment as described in claim 2, characterized in that, The upper heater has five heating zones, including an upper inner heating zone and four upper outer heating zones surrounding the upper inner heating zone, wherein the two upper outer heating zones located on the left and right sides of the upper inner heating zone occupy the four corners of the upper heater. The lower heater has five heating zones, including one lower inner heating zone and four lower outer heating zones surrounding the lower inner heating zone, wherein the two lower outer heating zones located on the front and rear sides of the lower inner heating zone occupy the four corners of the lower heater.

4. The vacuum coating equipment as described in claim 1, characterized in that, The number of heating chambers is greater than the number of process chambers. The equipment body is provided with a left heating chamber, a first process chamber, a middle heating chamber, a second process chamber and a right heating chamber from left to right.

5. The vacuum coating equipment as described in claim 1, characterized in that, The heater is equipped with a reflector.

6. The vacuum coating equipment as described in claim 5, characterized in that, The reflector includes an inner reflector plate disposed at the bottom inside the heater and an outer reflector plate disposed around the outside of the heater.

7. The vacuum coating equipment as described in claim 1, characterized in that, The transmission device includes a drive shaft assembly for transmitting the carrier disk and a drive assembly for driving the drive shaft assembly to rotate, wherein each drive shaft in the drive shaft assembly includes a magnetohydrodynamic spindle disposed near the heater.

8. The vacuum coating equipment as described in claim 7, characterized in that, Each drive shaft in the drive shaft assembly also includes a rotary joint and a water inlet pipe that forms a water inlet channel inside. Both the rotary joint and the magnetohydrodynamic spindle are provided with cooling holes. The water inlet pipe is placed in the cooling holes, and the gap between the pipe wall of the water inlet pipe and the hole wall of the cooling holes forms a water outlet channel. The rotary joint is provided with a first water inlet connector for connecting to the water inlet channel and a first water outlet connector for connecting to the water outlet channel.

9. The vacuum coating equipment as described in claim 8, characterized in that, The rotary joint has a joint spindle and a joint housing. The joint housing encloses the first end of the joint spindle. The second end of the joint spindle is sleeved inside the first end of the magnetohydrodynamic spindle. A graphite seat, a spring, and a first bearing are disposed inside the joint housing. The first bearing is sleeved outside the first end of the joint spindle. The graphite seat abuts against the first end of the joint spindle to form a surface seal. The spring is telescopically disposed on the side of the graphite seat away from the joint spindle.

10. The vacuum coating equipment as described in claim 1, characterized in that, The device body includes a cavity and at least one cavity cover for forming the heating chamber together with the cavity, and cold water pipes are provided on the cavity and the cavity cover.

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