Chemical vapor deposition furnace with multi-sample deposition tool

Abstract

The utility model discloses a chemical vapor deposition furnace with a multi-sample deposition tool, and belongs to the technical field of deposition furnace equipment. The multi-sample deposition tool is arranged in a traditional deposition furnace, the multi-sample deposition tool can independently store various workpieces through the objective table through the multiple deposition chambers, and raw materials are evenly led into the independent deposition chambers to be deposited through the arranged lower channel; according to the structure, the advantages of high precision and small cavity size of a vertical tube furnace are combined, and the advantage of mass production of a deposition furnace is also combined, so that workpieces can be precisely processed in a large scale in the furnace body, and the problems of low yield of the tube furnace, insufficient precision of the deposition furnace and waste of raw materials are effectively solved.

Description

TECHNICAL FIELD

[0001] The utility model belongs to the technical field of deposition furnace equipment, specifically relates to a chemical vapour deposition furnace with multiple sample deposition tooling. BACKGROUND

[0002] The vertical tube furnace is a common laboratory and industrial heating equipment, widely used in high temperature experiment, material processing, pyrolysis and other fields. Its design structure is to arrange the heating pipes in vertical direction, and heat treatment is carried out through the airflow or material in the pipe. Its working principle is to generate heat through electric heating elements (such as heating wire, ceramic heating element, etc.), and then heat the pipes in the furnace. When the heated airflow or material passes through the vertical heating pipe, the pipe wall provides uniform heat, so that the heated material can reach the required temperature. Its design is usually suitable for laboratory use, and can carry out high-precision and small-scale experiments.

[0003] The chemical vapor deposition furnace is a device for depositing thin film materials on the surface of a substrate, widely used in semiconductor manufacturing, solar cells, coating technology and other fields. Its working principle is to convert gaseous precursors into solid deposits through chemical reaction and adhere to the substrate. The CVD method can realize uniform deposition on a large area of substrate, suitable for large-scale production.

[0004] Although the vertical tube furnace has advantages for high-precision and small-scale experiments, it takes a lot of time to prepare when large quantities are needed; although the chemical vapor deposition furnace is suitable for large-scale production, the precision of the prepared material is relatively low, and when preparing small-sized composite materials, the large cavity volume will waste a lot of raw materials. SUMMARY

[0005] The utility model mainly solves the technical problems existing in the prior art, and provides a chemical vapor deposition furnace with multiple sample deposition tooling.

[0006] The technical problems of the above-mentioned utility model are mainly solved by the following technical scheme: a chemical vapor deposition furnace with a multi-sample deposition tool, comprising a gas source and a furnace body, the gas source comprises a gas tank, a raw material tank and a gas mixing tank, the gas tank and the raw material tank are communicated with the gas mixing tank, and a mass flow meter is arranged between the gas tank, the raw material tank and the gas mixing tank, an air inlet pipeline is connected between the gas mixing tank and the furnace body, a gas heater is arranged on the air inlet pipeline, the furnace body comprises an upper furnace body and a lower furnace body, and the two can be separated and closed, the air inlet pipeline extends to the inside of the lower furnace body, and a lower furnace body air inlet is arranged at the end portion, a multi-sample deposition tool is arranged in the furnace body, the multi-sample deposition tool comprises a tool upper portion and a tool lower portion, the tool lower portion is arranged in the lower furnace body, the tool upper portion is arranged in the upper furnace body, the tool lower portion comprises a plurality of lower channels arranged in an annular array, the lower ends of each lower channel are gathered together to form a tool air inlet, a channel switch is arranged in each lower channel, a deposition chamber is arranged at the upper end of each lower channel, the deposition chamber is vertically arranged in a longitudinal direction, a support table is arranged at the bottom of the deposition chamber, the tool air inlet of the tool lower portion is connected with the lower furnace body air inlet in the lower furnace body, the tool upper portion comprises a plurality of upper channels arranged in an annular array, the upper ends of each upper channel are gathered together to form a tool air outlet, the tool upper portion is connected with the upper furnace body through the tool air outlet, the plurality of upper channels and the plurality of lower channels are arranged in one-to-one alignment, and the upper channels and the lower channels are connected with each other when the upper furnace body and the lower furnace body are closed.

[0007] Preferably, a heating graphite is arranged on the inner wall surface of the upper furnace body, and the height of the heating graphite is consistent with the height of the support table.

[0008] Preferably, a cold trap and a vacuum pump are arranged outside the furnace body, a tail gas pipeline is connected between the cold trap and the furnace body, and the tail gas pipeline is connected with the tool air outlet of the tool upper portion.

[0009] Preferably, the bottom of the support table is conical.

[0010] The utility model has the beneficial effect that: by arranging the multi-sample deposition tool in the traditional deposition furnace, the multi-sample deposition tool can store a plurality of workpieces through the plurality of deposition chambers and the support table, the raw materials are uniformly led to the separate deposition chambers through the lower channels for deposition, the structure combines the advantages of high precision of the vertical tube furnace and small volume of the cavity, and combines the advantage that the deposition furnace can produce in large quantities, so that the workpieces can be precisely processed in large quantities in the inside of the furnace body, and the problems of low yield of the tube furnace, insufficient precision of the deposition furnace and waste of raw materials are effectively solved. BRIEF DESCRIPTION OF DRAWINGS

[0011] Fig. 1 is a structural schematic view of the utility model;

[0012] Fig. 2 This is a schematic diagram of the structure of a multi-sample deposition fixture of this utility model.

[0013] In the diagram: 2. Heated graphite; 5. Channel switch; 6. Tooling inlet; 7. Lower furnace body inlet; 8. Inlet pipe; 9. Exhaust pipe; 10. Upper furnace body; 11. Lower furnace body; 12. Mixing tank; 13. Raw material tank; 14. Gas tank; 15. Gas heater; 16. Mass flow meter; 17. Cold trap; 18. Vacuum pump; 19. Tooling outlet; 20. Upper part of tooling; 21. Lower part of tooling; 22. Deposition chamber; 24. Stage; 25. Lower channel; 26. Upper channel. Detailed Implementation

[0014] The technical solution of this utility model will be further described in detail below through embodiments and in conjunction with the accompanying drawings.

[0015] Example: A chemical vapor deposition furnace with a multi-sample deposition fixture, such as Figs. 1-2 As shown, the furnace includes a gas source and a furnace body. The gas source includes a gas tank 14, a raw material tank 13, and a mixing tank 12. Both the gas tank 14 and the raw material tank 13 are connected to the mixing tank 12, and a mass flow meter 16 is installed between them. An inlet pipe 8 connects the mixing tank 12 and the furnace body, and a gas heater 15 is installed on the inlet pipe 8. The furnace body includes an upper furnace body 10 and a lower furnace body 11, which can be separated and closed. The inlet pipe 8 extends into the lower furnace body 11 and has a lower furnace body inlet 7 at its end. A multi-sample deposition fixture is installed inside the furnace body. The multi-sample deposition fixture includes an upper fixture part 20 and a lower fixture part 21. The lower fixture part 21 is located in the lower furnace body 11, and the upper fixture part 20 is located in the upper furnace body 10. The lower fixture part 21 includes multiple annular arrays. The lower channels 25 are arranged in a row, and the lower ends of each lower channel 25 converge to form a tooling air inlet 6. A channel switch 5 is provided inside each lower channel 25. A sedimentation chamber 22 is provided at the upper end of each lower channel 25. The sedimentation chamber 22 is arranged vertically. A platform 24 is provided at the bottom of the sedimentation chamber 22. The tooling air inlet 6 of the lower part 21 of the tooling is connected to the lower furnace body air inlet 7 in the lower furnace body 11. The upper part 20 of the tooling includes multiple upper channels 26 arranged in a ring array. The upper ends of each upper channel 26 converge to form a tooling air outlet 19. The upper part 20 of the tooling is connected to the upper furnace body 10 through the tooling air outlet 19. The multiple upper channels 26 and multiple lower channels 25 are aligned one by one. When the upper furnace body 10 and the lower furnace body 11 are closed, the upper channels 26 and lower channels 25 are connected to each other.

[0016] Heating graphite 2 is provided on the inner wall surface of the upper furnace body 10, and the height of the heating graphite 2 is the same as the height of the platform 24.

[0017] The furnace body is externally provided with a cold trap 17 and a vacuum pump 18, the cold trap 17 is connected with the furnace body through a tail gas pipeline 9, the tail gas pipeline 9 is connected with a tool upper portion 20 gas outlet 19, and the bottom of the carrier platform 24 is conical.

[0018] The principle of the utility model is: the gas inlet pipeline 8 is connected with the mixed gas tank 12, the mixed gas tank 12 is connected with the raw material tank 13 and the gas tank 14 through two pipelines respectively, and in order to ensure that the two-way gas entering the mixed gas tank 12 is accurately proportioned, the two pipelines are all equipped with mass flow meters 16, and a gas heater 15 is arranged on the gas inlet pipeline 8;

[0019] The mixed gas is heated and enters each single deposition chamber 22 through the uniformly distributed lower channel 25, and is deposited on the workpiece on the carrier platform 24, and the excess gas is collected through the upper channel 26 and discharged from the tool gas outlet 19, and is discharged through the processing of the cold trap 17 and the vacuum pump 18;

[0020] When the specified deposition chamber 22 needs to be used and the other lower channels 25 need to be closed, the channel switch 5 and the graphite plug are used to close the lower channel 25, so that the mixed gas can be guided to the specified deposition chamber 22;

[0021] When the upper furnace body 10 and the lower furnace body 11 are combined, the tool upper portion 20 and the tool lower portion 21 are also combined. The lower furnace body gas inlet 7 is connected with the tool gas inlet 6, the tool gas outlet 19 is connected with the upper furnace body 10 gas outlet, in order to reduce heat loss, the deposition chamber 22 and the heating graphite 2 are at the same height, and in order to make the gas flow uniformly distributed around the sample when passing through the carrier platform 24, the bottom of the carrier platform 24 is conical.

[0022] Finally, it should be pointed out that the above embodiments are only representative examples of the utility model. Obviously, the utility model is not limited to the above embodiments, and there can be many variations. Any simple modification, equivalent change and modification according to the technical essence of the utility model to the above embodiments should be considered as belonging to the protection scope of the utility model.

Claims

1. A chemical vapor deposition furnace having a multi-sample deposition tool comprising a gas source and a furnace body, characterized in that: The gas source comprises a gas tank (14), a raw material tank (13) and a mixed gas tank (12), the gas tank (14) and the raw material tank (13) are communicated with the mixed gas tank (12), and the gas tank (14) and the raw material tank (13) are provided with mass flow meters (16) between the gas tank (14) and the mixed gas tank (12) and between the raw material tank (13) and the mixed gas tank (12), the mixed gas tank (12) is connected with the gas inlet pipeline (8) between the mixed gas tank (12) and the furnace body, the gas heater (15) is arranged on the gas inlet pipeline (8), the furnace body comprises an upper furnace body (10) and a lower furnace body (11), the upper furnace body (10) and the lower furnace body (11) can be separated and closed, the gas inlet pipeline (8) extends to the inside of the lower furnace body (11) and is provided with a lower furnace body gas inlet (7) at the end, a plurality of sample deposition tools are arranged in the furnace body, the plurality of sample deposition tools comprise a tool upper part (20) and a tool lower part (21), the tool lower part (21) is arranged in the lower furnace body (11), the tool upper part (20) is arranged in the upper furnace body (10), the tool lower part (21) comprises a plurality of lower channels (25) arranged in an annular array, the lower ends of each lower channel (25) are gathered together to form a tool gas inlet (6), a channel switch (5) is arranged in each lower channel (25), the upper end of each lower channel (25) is provided with a deposition chamber (22), the deposition chamber (22) is vertically arranged longitudinally, a carrier (24) is arranged at the bottom of the deposition chamber (22), the tool gas inlet (6) of the tool lower part (21) is connected with the lower furnace body gas inlet (7) in the lower furnace body (11), the tool upper part (20) comprises a plurality of upper channels (26) arranged in an annular array, the upper ends of each upper channel (26) are gathered together to form a tool gas outlet (19), the tool upper part (20) is connected with the upper furnace body (10) through the tool gas outlet (19), a plurality of upper channels (26) and a plurality of lower channels (25) are arranged in one-to-one alignment, and the upper channel (26) and the lower channel (25) are connected with each other when the upper furnace body (10) and the lower furnace body (11) are closed.

2. The chemical vapor deposition furnace with multiple sample deposition fixtures of claim 1, wherein: The inner wall surface of the upper furnace body (10) is provided with a heating graphite (2), and the height of the heating graphite (2) is consistent with the height of the carrier (24).

3. The chemical vapor deposition furnace with multiple sample deposition stations of claim 1, wherein: A cold trap (17) and a vacuum pump (18) are arranged outside the furnace body, the tail gas pipeline (9) is connected between the cold trap (17) and the furnace body, and the tail gas pipeline (9) is connected with the tool gas outlet (19) of the tool upper part (20).

4. The chemical vapor deposition furnace with multiple sample deposition stations of claim 1, wherein: The bottom of the carrier (24) is conical.

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