Heavy hammer device and single crystal furnace system

Abstract

The utility model discloses a heavy hammer device and a single crystal furnace system, the heavy hammer device comprises a heavy hammer with a hollow structure, and a pendulum damper structure is arranged in the hollow structure and is used for reducing the crystal oscillation phenomenon. The pendulum damper structure comprises a plurality of tungsten wire ropes, a tungsten oscillator and a plurality of dampers, the tungsten oscillator is hung in the hollow structure through the tungsten wire ropes, the dampers are arranged at the bottom of the hollow structure, and the upper ends of the dampers are connected with the tungsten oscillator. According to the utility model, the heavy hammer with the hollow structure is arranged in the heavy hammer device, and the pendulum damper structure is arranged in the hollow structure, so that the stability and the reliability of the heavy hammer device are enhanced, crystal shaking is effectively inhibited, meanwhile, human intervention is avoided, the labor intensity of personnel is reduced, production accidents caused by crystal shaking are reduced, and the production efficiency is improved. Therefore, the production safety is improved.

Description

Technical Field

[0001] This utility model relates to the field of monocrystalline silicon production technology, and in particular to a hammer device and a monocrystalline furnace system. Background Technology

[0002] In the Czochralski process for producing monocrystalline silicon, crystal wobble is a critical issue affecting production efficiency and product quality. Crystal wobble is mainly caused by factors such as airflow disturbances in the hot zone, crystal rotational wobble, mechanical problems with the rotating mechanism of the single crystal furnace, and external vibrations. These factors make the crystal prone to breakage during critical processes such as crystal pulling and shoulder formation, thus severely impacting the production capacity of monocrystalline silicon rods.

[0003] To address this issue, existing single-crystal furnaces incorporate damping sleeves at the connection point between the top rotating mechanism and the seed crystal rope. While this reduces crystal sway and arcing to some extent, several shortcomings remain in actual production. First, the detection and intervention of crystal sway are highly dependent on manual inspection and the operator's skill level, requiring manual methods such as reducing the crystal rotation speed and argon gas flow to stabilize the crystal. Second, because the lifting head and the counterweight are connected by a flexible seed crystal rope, counterweight sway cannot be completely avoided under current conditions. Therefore, manual stabilization of the counterweight is still necessary during the single-crystal pulling preparation stage. These manual interventions not only increase wasted time but may also lead to production accidents caused by improper operation, further impacting production efficiency and the safety of the production environment. Utility Model Content

[0004] The purpose of this invention is to provide a weighted hammer device and a single crystal furnace system. By optimizing the structure of the weighted hammer device, crystal shaking can be effectively suppressed, thereby improving the production efficiency and quality of single crystal silicon.

[0005] To solve the above-mentioned technical problems, this utility model provides a weighted hammer device and a single crystal furnace system. The weighted hammer device includes a weight with a hollow structure, and a pendulum damper structure is provided inside the hollow structure to reduce crystal swaying.

[0006] The pendulum damper structure includes multiple tungsten wire ropes, a tungsten oscillator, and multiple dampers. The tungsten oscillator is suspended inside the hollow structure by the multiple tungsten wire ropes. The multiple dampers are located at the bottom of the hollow structure, and the upper ends of the multiple dampers are connected to the tungsten oscillator.

[0007] Furthermore, it also includes multiple connecting blocks; the multiple connecting blocks are evenly arranged around the tungsten oscillator, and the tungsten oscillator is connected to the multiple tungsten wire ropes through the multiple connecting blocks.

[0008] Furthermore, it also includes multiple pins; the multiple dampers are fixedly connected to the tungsten oscillator through the multiple pins.

[0009] Furthermore, the upper end of the hammer is also provided with a seed crystal rope connection hole.

[0010] Furthermore, the mass of the tungsten oscillator can be selected according to the mass of the crystal to match the mass of the crystal and reduce crystal wobble.

[0011] Furthermore, the length of the tungsten wire rope is 110-150mm.

[0012] Furthermore, the damping magnitude of the damper is adjustable.

[0013] A single crystal furnace system includes the aforementioned counterweight device, and further includes a single crystal furnace, a lifting head, and a seed crystal rope; the lifting head is disposed above the single crystal furnace; the seed crystal rope is located inside the single crystal furnace, with one end connected to the lifting head and the other end connected to the counterweight through a seed crystal rope connection hole.

[0014] Furthermore, it also includes a graphite chuck and a seed crystal, wherein the upper end of the graphite chuck is connected to the lower end of the weight, and the lower end is connected to the seed crystal.

[0015] Furthermore, it also includes monocrystalline silicon and molten silicon; the molten silicon is located at the bottom of the monocrystalline furnace, the seed crystal is located above the molten silicon, and the monocrystalline silicon is pulled out from the molten silicon.

[0016] Compared with the prior art, the present invention has at least the following beneficial effects:

[0017] This invention enhances the stability and reliability of the hammer device by incorporating a hollow hammer with a pendulum damper within the hollow structure, effectively suppressing crystal swaying and thus significantly improving the quality of monocrystalline silicon. It also avoids human intervention, reduces labor intensity, and minimizes production accidents caused by crystal swaying, thereby improving production safety. Attached Figure Description

[0018] Figure 1 This is a longitudinal sectional view of the counterweight device in one embodiment of the present invention;

[0019] Figure 2 This is a schematic diagram of the pendulum damper structure in one embodiment of the present invention;

[0020] Figure 3 This is a longitudinal sectional view of a single crystal furnace system in one embodiment of the present invention.

[0021] Reference numerals: 1. Seed crystal rope connection hole; 2. Weight; 3. Tungsten wire rope; 4. Connecting block; 5. Tungsten oscillator; 6. Damper; 7. Graphite chuck; 8. Pin; 9. Seed crystal; 10. Seed crystal rope; 11. Monocrystalline silicon; 12. Molten silicon; 13. Lifting head. Detailed Implementation

[0022] The following is a more detailed description of a hammer device and a single crystal furnace system according to the present invention, with reference to the schematic diagrams, which illustrate preferred embodiments of the present invention. It should be understood that those skilled in the art can modify the present invention described herein while still achieving its advantageous effects. Therefore, the following description should be understood as being of general knowledge to those skilled in the art and is not intended to limit the present invention.

[0023] The present invention will be described in more detail below by way of example with reference to the accompanying drawings. The advantages and features of the present invention will become clearer from the following description. It should be noted that the drawings are in a very simplified form and use non-precise proportions, and are only used to facilitate and clarify the illustration of the embodiments of the present invention.

[0024] Example 1

[0025] like Figures 1-2 As shown in the figure, this embodiment proposes a hammer device, including a hammer 2 with a hollow structure. A pendulum damper structure is disposed within the hollow structure to reduce crystal wobble. Compared to a solid hammer, the hollow hammer provides sufficient mass while offering installation space for the pendulum damper structure, facilitating its arrangement and making the entire hammer device more compact. Simultaneously, the hollow structure reduces heat transfer from the hammer 2 to the seed crystal 9, contributing to a stable crystal growth environment.

[0026] Specifically, the pendulum damper structure includes multiple tungsten wire ropes 3, a tungsten oscillator 5, and multiple dampers 6. The tungsten oscillator 5 is suspended within the hollow structure by the multiple tungsten wire ropes 3, allowing it to swing freely within the hollow structure and exert a damping effect. The multiple dampers 6 are located at the bottom of the hollow structure, and their upper ends are connected to the tungsten oscillator 5. The pendulum damper 6 structure, through the principle of physical damping and the synergistic effect of the tungsten oscillator 5 and the dampers 6, absorbs and dissipates vibrational energy, reduces crystal swaying during growth, improves crystal growth stability, and also avoids steps requiring human intervention, reducing labor intensity and improving production efficiency.

[0027] In this first embodiment, the pendulum damper structure further includes multiple connecting blocks 4. These connecting blocks 4 are evenly arranged around the tungsten oscillator 5, which can evenly distribute the stress between the tungsten oscillator 5 and the tungsten wire rope 3, avoiding stress concentration and improving the overall stability of the counterweight device. The tungsten oscillator 5 is firmly connected to the multiple tungsten wire ropes 3 via the connecting blocks 4, allowing the tungsten oscillator 5 to be suspended within the counterweight 2 via the tungsten wire ropes 3, thereby enabling the tungsten oscillator 5 to stably perform its damping function during operation.

[0028] In this first embodiment, the pendulum damper structure further includes multiple pins 8. The multiple dampers 6 are fixedly connected to the tungsten oscillator 5 via the multiple pins 8. The pins 8 have high strength and good high-temperature resistance, enabling them to securely connect the dampers 6 to the tungsten oscillator 5 and ensure that the dampers 6 do not loosen during operation. Simultaneously, the use of pins 8 makes the connection between the dampers 6 and the tungsten oscillator 5 more convenient, facilitating installation and disassembly and improving the maintainability of the counterweight device. Furthermore, the pins 8 can effectively transfer the damping force of the dampers 6 to the tungsten oscillator 5, further enhancing the damping effect of the counterweight device.

[0029] In a preferred embodiment, the pin 8 is made of copper. Copper has high mechanical strength and can withstand large tensile and shear forces, ensuring that the pin 8 will not break or deform due to external forces during operation. Secondly, copper has a high melting point (approximately 1085°C), which allows it to remain stable in the high-temperature environment of a single crystal furnace and will not soften or be damaged due to high temperatures, thereby extending the service life of the pin 8.

[0030] In a preferred embodiment, the number of tungsten wire ropes 3 is set to four, the number of dampers 6 is set to four, and correspondingly, the number of connecting blocks 4 and pins 8 is also four. The four tungsten wire ropes 3 are evenly arranged at 90-degree intervals around the tungsten oscillator 5, thereby better controlling the swing amplitude and direction of the tungsten oscillator 5, enabling it to exert a more stable damping effect within the weight 2. The four dampers 6 are evenly arranged at 90-degree intervals along the bottom end of the tungsten oscillator 5, ensuring that the damping force is evenly distributed in all directions, effectively avoiding structural imbalance caused by the damping force being concentrated in one direction, thus improving the stability of the entire weight device. Furthermore, the dampers 6 can provide damping force from multiple directions, ensuring that vibrations in any direction can be effectively suppressed. Especially in complex production environments, where vibrations may come from multiple directions, this all-around damping effect can effectively reduce crystal wobble.

[0031] In this first embodiment, the upper end of the weight 2 is also provided with a seed crystal rope connection hole 1. The seed crystal rope connection hole 1 provides a fixed connection point for the seed crystal rope 10, ensuring that the seed crystal rope 10 can be firmly connected to the weight 2, thereby maintaining stability throughout the entire crystal growth process.

[0032] In this first embodiment, the mass of the tungsten oscillator can be selected according to the mass of the crystal to match the mass of the crystal and reduce crystal wobble.

[0033] In a preferred embodiment, the mass of the tungsten oscillator 5 is 25-45 kg, preferably 30 kg or 40 kg. During crystal production, the mass of the crystal varies depending on production conditions and process requirements. The mass of the tungsten oscillator 5 is one of the key factors affecting the structural performance of the pendulum damper. A heavier tungsten oscillator can provide greater inertia, more effectively absorb and dissipate vibrational energy, and reduce crystal sway. The mass range of 25-45 kg covers the requirements of most common crystal masses. The mass of the tungsten oscillator 5 can be adjusted according to the different crystal mass requirements to optimize the damping effect, enabling the counterweight device to adapt to different specifications of single crystal furnaces and crystal growth processes.

[0034] In a preferred embodiment, the length of the tungsten wire rope 3 is 110-150 mm, preferably 120 mm or 140 mm. The length of the tungsten wire rope 3 directly affects the swing amplitude and frequency of the tungsten oscillator 5. An appropriate length of tungsten wire rope 3 ensures that the tungsten oscillator 5 swings freely within the hollow structure while maintaining a stable suspension state, avoiding instability caused by excessive or insufficient length. The length range of 110-150 mm can cover the quality requirements of most common crystals, enabling the counterweight 2 device to adapt to single crystal furnaces of different specifications. This ensures the stability of the counterweight device during operation, reduces production accidents caused by crystal shaking, thereby reducing the frequency of manual intervention and improving production efficiency.

[0035] In a preferred embodiment, the damping magnitude of the damper 6 is adjustable. During crystal production, factors such as crystal quality, growth rate, and furnace airflow may change, leading to variations in vibration intensity and frequency. Selecting an adjustable damper allows for flexible adjustment of the damping force based on these changes, thereby optimizing the overall damping effect of the device. This enables the counterweight device to better adapt to complex production environments, improving the stability and quality of crystal growth.

[0036] Example 2

[0037] like Figure 3 As shown, this embodiment two proposes a single crystal furnace system, including the hammer device proposed in embodiment one.

[0038] In this second embodiment, the single crystal furnace system further includes a single crystal furnace, a lifting head 13, and a seed crystal rope 10. The lifting head 13 is positioned above the single crystal furnace; the seed crystal rope 10 is located inside the single crystal furnace, with one end connected to the lifting head 13 and the other end connected to the counterweight 2 through the seed crystal rope connection hole 1. The lifting head 13 transmits power to the counterweight device through the seed crystal rope 10, ensuring that the counterweight 2 can stably exert a damping effect, further reducing crystal sway and improving the stability of single crystal growth.

[0039] In this second embodiment, the single crystal furnace system further includes a graphite chuck 7 and a seed crystal 9. The upper end of the graphite chuck 7 is connected to the lower end of the counterweight 2, and the lower end is connected to the seed crystal 9. The graphite chuck 7 can effectively transmit the damping force of the counterweight 2 to the seed crystal 9, ensuring that the seed crystal 9 can work stably.

[0040] In this second embodiment, the single crystal furnace system further includes single crystal silicon 11 and molten silicon 12. The molten silicon 12 is located at the bottom of the single crystal furnace, and the seed crystal 9 is located above the molten silicon 12, pulling the single crystal silicon 11 out from the molten silicon 12. The lifting head 13 transmits power to the counterweight device through the seed crystal rope 10, thereby driving the seed crystal 9 to pull the single crystal silicon 11 out from the molten silicon 12, so that the counterweight device can effectively play a damping role and reduce defects in the single crystal silicon 11 caused by vibration.

[0041] In summary, this utility model enhances the stability and reliability of the hammer device by incorporating a hollow hammer 2 within the hammer device and a pendulum damper structure within the hollow structure, thereby effectively suppressing crystal swaying and significantly improving the quality of monocrystalline silicon. It also avoids human intervention, reduces labor intensity, and minimizes production accidents caused by crystal swaying, thus improving production safety.

[0042] Obviously, those skilled in the art can make various modifications and variations to this utility model without departing from its spirit and scope. Therefore, if these modifications and variations fall within the scope of the claims of this utility model and their equivalents, this utility model also intends to include these modifications and variations.

Claims

1. A counterweight device, characterized in that, It includes a weight with a hollow structure, wherein a pendulum damper structure is provided inside the hollow structure to reduce crystal swaying. The pendulum damper structure includes multiple tungsten wire ropes, a tungsten oscillator, and multiple dampers. The tungsten oscillator is suspended inside the hollow structure by the multiple tungsten wire ropes. The multiple dampers are located at the bottom of the hollow structure, and the upper ends of the multiple dampers are connected to the tungsten oscillator.

2. The counterweight device as described in claim 1, characterized in that, It also includes multiple connecting blocks; the multiple connecting blocks are evenly arranged around the tungsten oscillator, and the tungsten oscillator is connected to the multiple tungsten wire ropes through the multiple connecting blocks.

3. The counterweight device as described in claim 1, characterized in that, It also includes multiple pins; the multiple dampers are fixedly connected to the tungsten oscillator through the multiple pins.

4. The counterweight device as described in claim 1, characterized in that, The upper end of the hammer is also provided with a seed crystal rope connection hole.

5. The counterweight device as described in claim 1, characterized in that, The mass of the tungsten oscillator can be selected according to the mass of the crystal to match the mass of the crystal and reduce crystal wobble.

6. The counterweight device as described in claim 1, characterized in that, The length of the tungsten wire rope is 110-150mm.

7. The counterweight device as described in claim 1, characterized in that, The damping magnitude of the damper is adjustable.

8. A single crystal furnace system, comprising the counterweight device as described in any one of claims 1-7, characterized in that, It also includes a single crystal furnace, a lifting head, and a seed crystal rope; the lifting head is located above the single crystal furnace; the seed crystal rope is located inside the single crystal furnace, with one end connected to the lifting head and the other end connected to the counterweight through the seed crystal rope connection hole.

9. The single crystal furnace system as described in claim 8, characterized in that, It also includes a graphite chuck and a seed crystal, wherein the upper end of the graphite chuck is connected to the lower end of the weight, and the lower end is connected to the seed crystal.

10. The single crystal furnace system as described in claim 9, characterized in that, This also includes monocrystalline silicon and molten silicon; The molten silicon is located at the bottom of the single crystal furnace, and the seed crystal is located above the molten silicon and is pulled out from the molten silicon.

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