Heating furnace and processing equipment
By dividing the furnace tubes into multiple zones and installing heating and temperature measuring devices in the furnace, the problem of uneven temperature in traditional furnaces is solved, achieving more efficient temperature control and processing results.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-03-03
- Publication Date
- 2026-03-24
AI Technical Summary
The integrated design of traditional heating furnaces results in uneven temperature distribution throughout the furnace tubes, affecting processing efficiency and product quality.
The furnace tubes of the heating furnace are divided into multiple zones along the axial direction. Each zone is equipped with a heating device and a temperature measuring device. The temperature is monitored by the temperature measuring device and the power of the heating device is adjusted to achieve zoned temperature control.
It improves the uniformity of furnace tube temperature, thereby enhancing the processing efficiency and product quality of the heating furnace.
Smart Images
Figure CN224034362U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to the field of semiconductor manufacturing, in particular to a heating furnace and processing equipment. BACKGROUND
[0002] With the vigorous development of photovoltaic industry, the continuous progress of process technology promotes the continuous optimization of a series of key processes such as diffusion, oxidation, annealing, doping, PECVD (plasma enhanced chemical vapor deposition), LPCVD (low pressure chemical vapor deposition). These processes in the production process, whether it is vertical furnace or horizontal furnace, depends on loading silicon wafer or wafer in a specific carrier, through the transmission system into the reaction chamber of the furnace body. In the reaction chamber, through the precise control of the heating device to the heating of the cavity and the input of the specific reaction gas, the specific coating, diffusion, oxidation and film deposition process steps on the surface of the silicon wafer or wafer.
[0003] The performance of the heating device directly affects the heating speed and temperature uniformity of the material in the furnace tube, and further determines the production efficiency and product quality of the whole process. The heating device of the traditional heating furnace generally adopts an integrated design scheme. Since the heating furnace body has a certain length, the heat transfer path of the heating device is relatively fixed and long, and the heat is difficult to uniformly transfer to the furnace tube, resulting in the difficulty in controlling the uniformity of the overall temperature of the furnace tube, which affects the processing of the battery piece by the heating furnace body. SUMMARY
[0004] The utility model discloses in order to solve the above-mentioned prior art heating furnace heating device integrated design, lead to the technical problems of the poor uniformity of the overall temperature of the furnace tube, proposes a kind of heating furnace and processing equipment.
[0005] The technical scheme adopted by the utility model is:
[0006] The utility model discloses a kind of heating furnace, heating furnace includes shell and the furnace tube being set in shell, further include: heating device and temperature measuring device for measuring temperature being set on furnace tube, furnace tube is divided into multiple regions along the axial direction, and each region is separately provided with heating device and temperature measuring device.
[0007] Further, the heating device is arranged along the radial direction and / or the axial direction of the furnace tube.
[0008] Further, the heating furnace further includes a partitioning member arranged between two adjacent heating devices.
[0009] Further, the partitioning member is provided with a plurality of grooves, and the electric wires of the heating device are arranged in the grooves.
[0010] Further, the cross section of the heating wire of the heating device is circular or flat.
[0011] Further, the heating device is arranged on the inner wall of the furnace tube, and the temperature measuring device is arranged on the outer wall of the furnace tube.
[0012] Further, the heating wire of the heating device is arranged in a spiral shape around the inner wall of the furnace tube.
[0013] Further, the heating device comprises a plurality of heating wires, each of which is in a spiral shape, and the plurality of heating wires are arranged in a radial direction or an axial direction of the furnace tube.
[0014] Further, at least two heating devices are arranged in any one or more regions of the furnace tube, one of which is arranged in a radial direction, and the other is arranged in an axial direction.
[0015] The utility model also provides a kind of processing equipment, including the heating furnace of any item.
[0016] The utility model provides a kind of heating furnace, the furnace tube of heating furnace is divided into multiple regions along the axial direction, heating device and temperature measuring device are respectively arranged in each region, the temperature of the region is monitored by temperature measuring device, and the power of the heating device of the region is adjusted according to the temperature detected, so as to carry out zoned temperature control to furnace tube, it is beneficial to control the uniformity of furnace tube overall temperature, avoid the problem that the processing of battery piece by heating furnace body is affected due to the temperature inconsistency in furnace tube. BRIEF DESCRIPTION OF DRAWINGS
[0017] In order to more clearly illustrate the technical scheme in the embodiments of the utility model, the following will briefly introduce the drawings needed to be used in the embodiment or prior art description, obviously, the drawings in the following description are only some embodiments of the utility model, and for those skilled in the art, other drawings can also be obtained according to these drawings without creative labor.
[0018] Figure 1 It is a three-dimensional structure schematic view of the embodiment of the utility model;
[0019] Figure 2 It is a spiral heating wire structure schematic view of the embodiment of the utility model;
[0020] Figure 3 It is a spiral heating wire and spacer structure schematic view of the embodiment of the utility model;
[0021] Figure 4 It is a flat heating wire structure schematic view of the embodiment of the utility model;
[0022] Figure 5 It is a circular heating wire structure schematic view of the embodiment of the utility model;
[0023] 1, furnace tube;2, temperature measuring device;3, heating device;4, spacer;41, recess;42, electric wire. Detailed Implementation
[0024] To make the technical problems, technical solutions, and beneficial effects of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present utility model and are not intended to limit the present utility model.
[0025] The principle and structure of this utility model will be described in detail below with reference to the accompanying drawings and embodiments.
[0026] like Figures 1-3 As shown, this utility model proposes a heating furnace, which includes a shell and a furnace tube 1 disposed within the shell, the internal space of the furnace tube 1 being a reaction chamber. The heating furnace also includes multiple heating devices 3 disposed on the furnace tube 1 and multiple temperature measuring devices 2 for measuring the temperature of the furnace tube 1. The temperature measuring devices 2 are temperature sensors or other devices capable of monitoring temperature. The heating furnace tube 1 is divided into multiple regions along its axial direction (length direction), with each region equipped with a heating device 3 and a temperature measuring device 2. The temperature of each region of the furnace tube 1 can be monitored by the temperature measuring devices 2, and the power of the heating devices 3 can be adjusted according to the different temperatures of each region, achieving zoned temperature control of the furnace tube 1, saving energy. Furthermore, because the furnace tube 1 is divided into multiple regions, with each region equipped with a heating device 3, the heating effect of the heating devices 3 is improved. Uneven heating is not caused by the long length of the furnace tube 1.
[0027] like Figures 2-3 As shown, specifically, the furnace tube 1 is divided into multiple sections along the axial direction, each section being a ring. Each ring is equipped with a heating device 3 and a temperature measuring device 2 (if the furnace tube 1 is large, multiple heating devices 3 can also be installed). Based on the temperature measured by each temperature measuring device 2, the power of the corresponding heating device 3 is adjusted. When the temperature of a certain ring is found to be too low, the heating device 3 corresponding to that ring will start heating it, thereby adjusting the temperature of different areas of the furnace tube 1 as a whole, so that the area of the furnace tube 1 with a low temperature can be heated to the same temperature as the other rings in time, which is more conducive to ensuring the uniformity of the temperature of the furnace tube 1 during use.
[0028] In a further embodiment, the heating device 3 is arranged radially and / or axially along the furnace tube 1.
[0029] The heating device 3 is arranged in the axial direction of the furnace tube 1 (the same as the height direction of the furnace tube 1), that is, the direction in which the carrier filled with the battery pieces enters the furnace tube 1 for processing and the direction of the gas flow in the furnace tube 1. By arranging the heating device 3 in the axial direction of the furnace tube 1, the heating device 3 is arranged in the same direction as the gas flow in the furnace tube 1, so that the heat emitted by the heating device 3 can better circulate in the furnace tube 1, and the gas flow can drive the heat emitted by the heating device 3 to flow in each annular ring in the furnace tube 1, so that the heat emitted by the heating device 3 arranged in the axial direction can make the heat in the furnace tube 1 more uniform.
[0030] The heating device 3 can also be arranged in the radial direction of each annular region in the furnace tube 1, and the radial direction is the same as the circumferential direction of the furnace tube 1.
[0031] Preferably, the heating device 3 arranged in the axial direction and the radial direction is bent into a shape (for example, a ring shape, a bent curve shape, etc.) that expands the area of the heating device 3, so that the heating device 3 can timely emit more heat and faster meet the required temperature of the battery pieces in the heating furnace, thereby improving the working efficiency of the heating furnace.
[0032] It should be noted that the size and power of each annular heating device 3 in the furnace tube 1, the length range in the radial direction and the axial direction, are determined according to the power, current, and voltage of the heating furnace, and are not limited herein.
[0033] As shown in FIG. 1, Figure 3 In a further embodiment, the heating furnace further comprises a separation piece 4 arranged between two adjacent heating devices 3 to separate the plurality of heating devices 3 distributed on the inner wall of the furnace tube 1 to avoid mutual influence. The separation piece 4 is made of insulating materials such as thermal insulation cotton or ceramic sheets, and a plurality of grooves 41 are arranged on the separation piece 4, and the wires 42 of the heating devices 3 are clamped on the grooves 41 of the separation piece 4.
[0034] As shown in FIG. 1, Figure 3 The heating device 3 comprises a heating wire and a power line connected to the heating wire.
[0035] As shown in FIG. 1, Figures 4-5 The cross section of the heating wire of the heating device 3 is circular or flat.
[0036] The heating device 3 comprises at least one heating wire.
[0037] When the heating device 3 has only one heating wire, the heating wire is relatively thick, and the heating wire is arranged around the inner wall of the furnace tube 1.
[0038] In another embodiment, the heating device 3 comprises a plurality of heating wires, the heating wires are relatively thin, the plurality of heating wires are respectively bent into a spiral shape, and the plurality of spiral heating wires are arranged in the radial direction or the axial direction of the furnace tube 1.
[0039] The heating wire is bent into different shapes, which can increase the area of the heating device 3, so that the heating device 3 can emit more heat.
[0040] The heating wire itself can be provided in a shape of expanding its area, for example, flat, cylindrical, prismatic, irregular pattern, etc., which can expand the area of the heating wire, and emit more heat during heating.
[0041] The heating device 3 and the furnace pipe 1 are connected by a connecting piece, which is a rivet or a bolt or a buckle. The connecting piece can also have other shapes, which can fix the heating device 3 on the furnace pipe 1.
[0042] In another embodiment, at least two heating devices 3 are arranged in any one or more regions of the furnace pipe 1 for arranging the heating device 3. One of the heating devices 3 is arranged radially along the region, and the other heating device 3 is arranged axially along the region, and the two heating devices 3 can be arranged coincidentally.
[0043] The arrangement of the axial heating device 3 and the radial heating device 3 allows the inner wall of the furnace pipe 1 to distribute more heating devices 3, further increasing the heat emitted by the heating device 3 in one installation region of the furnace pipe 1.
[0044] In a specific embodiment, the heating device 3 is arranged on the inner wall of the furnace pipe 1, and the temperature measuring device 2 is arranged on the outer wall of the furnace pipe 1. The heating device 3 is arranged on the inner wall of the furnace pipe 1, and the temperature measuring device 2 is arranged on the outer wall of the furnace pipe 1 corresponding to each heating device 3, for monitoring the temperature in the corresponding annular region. When the temperature in a certain region is detected to be too low, the corresponding heating device 3 in the region can be used to heat the region, so as to realize the individual control of each region of the furnace pipe 1.
[0045] The heating furnace in the utility model is a vertical or horizontal heating furnace, which does not affect the function of the heating device 3.
[0046] The utility model also provides a processing equipment using the heating furnace.
[0047] Compared with the prior art, the utility model discloses a heating furnace, the furnace tube 1 of heating furnace is divided into a plurality of regions along the axial direction, and heating device 3 and temperature measuring device 2 are arranged respectively in each region, the temperature of the region is monitored through temperature measuring device 2, and the power of the heating device 3 of the region is adjusted according to the temperature of detection, and the furnace tube 1 is controlled to the temperature of the region, is favorable to control the uniformity of furnace tube 1 overall temperature, avoids the problem that the processing of heating furnace body to the battery piece is affected due to the temperature inconsistency in furnace tube 1. The utility model discloses still bend the heating wire of heating device 3 and present other shapes, increase the heating area of furnace tube 1, provide efficient heating for furnace tube 1, improve the working efficiency of heating furnace in the processing process.
[0048] It should be noted that the terms used above are only for describing specific embodiments and are not intended to limit the exemplary embodiments according to the utility model. As used herein, the singular forms "a", "an" and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise, and it will be further understood that the terms "comprising" and / or "including" when used in this specification, specify the presence of features, steps, operations, devices, components and / or combinations thereof.
[0049] In addition, it should be noted that the use of the terms "first", "second" and the like is merely intended to differentiate the corresponding components, and unless otherwise stated, the above terms have no special meaning, and therefore cannot be understood as limiting the scope of protection of the utility model.
[0050] The above only describes the preferred embodiments of the utility model, and is not used to limit the utility model, and the utility model can have various changes and changes for the person skilled in the art. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the utility model should be included in the protection scope of the utility model.
Claims
1. A heating furnace, the heating furnace comprising a shell and furnace tubes disposed within the shell, characterized in that, Also includes: The furnace tube is equipped with a heating device and a temperature measuring device, which are installed on the furnace tube. The furnace tube is divided into multiple regions along the axial direction, and each region is equipped with the heating device and the temperature measuring device respectively.
2. The heating furnace as described in claim 1, characterized in that, The heating device is arranged radially and / or axially along the furnace tube.
3. The heating furnace as described in claim 1, characterized in that, The heating furnace also includes an isolation element disposed between two adjacent heating devices.
4. The heating furnace as described in claim 3, characterized in that, The isolation element has multiple grooves, and the wires of the heating device are disposed in the grooves.
5. The heating furnace as described in claim 1, characterized in that, The heating wire of the heating device has a circular or flat cross-section.
6. The heating furnace according to any one of claims 1 to 5, characterized in that, The heating device is disposed on the inner wall of the furnace tube, and the temperature measuring device is disposed on the outer wall of the furnace tube.
7. The heating furnace as described in claim 1, characterized in that, The heating wire of the heating device is arranged around the inner wall of the furnace tube.
8. The heating furnace according to any one of claims 1 to 5, characterized in that, The heating device includes multiple heating wires, each of which is spiral-shaped and arranged radially or axially along the furnace tube.
9. The heating furnace as described in claim 2, characterized in that, At least two heating devices are provided in one or more areas of the furnace tube, one of which is arranged radially and the other is arranged axially.
10. A processing device, characterized in that, Includes the heating furnace as described in any one of claims 1 to 9.