AOI multifunctional detection device

By integrating a multi-functional AOI inspection device, the problems of high cost and large footprint caused by multi-device inspection are solved, achieving efficient and multi-functional inspection results.

CN224035270UActive Publication Date: 2026-03-24GUANGDONG HONHOR SEMICON EQUIP CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2025-04-15
Publication Date
2026-03-24

AI Technical Summary

Technical Problem

Existing AOI equipment requires multiple devices due to different inspection types, resulting in inconvenient operation, high cost, large footprint, and low efficiency.

Method used

An AOI multifunctional inspection device was designed, integrating multiple inspection functions into one unit, including a marble base, bearing platforms of different specifications, X-axis, Y-axis and Z-axis drive units, combined with multiple inspection cameras, to realize the inspection of surface, internal, depth and thickness defects.

Benefits of technology

It enables multi-functional testing on the same equipment, reduces upfront costs, improves testing efficiency, reduces space occupation, and meets different testing requirements.

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Patent Text Reader

Abstract

The utility model discloses an AOI (automatic optical inspection) multifunctional detection device, which comprises a marble base, bearing tables, an X-axis driving unit, two Y-axis driving units and a first-stage Z-axis driving unit, the bearing tables are used for loading detection objects and have different specifications, the X-axis driving unit is mounted on a cross beam on one side of a marble support frame, and the Y-axis driving unit is mounted on a cross beam on the other side of the marble support frame. A primary detection camera for detecting surface defects of a detected object and a secondary detection camera for detecting internal and deep defects of the detected object are assembled on the X-axis driving unit, the two Y-axis driving units are mounted on a marble base in parallel, and the bearing table is located between the two Y-axis driving units; the first-stage Z-axis driving unit is installed on a cross beam on the other side of the marble supporting frame, a third-stage detection camera for detecting the thickness defect of a detected object is installed on the first-stage Z-axis driving unit, and the multi-defect detection device has the advantages of being small in occupied area and capable of detecting various defects of the same detected object.
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Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of visual inspection, especially an AOI multifunctional detection device. BACKGROUND

[0002] In general, different devices need to be used to complete the detection of products by AOI equipment according to different detection types, which is not only very inconvenient to operate, but also has high initial investment cost, long execution time for the same workload, and large floor area occupied by multiple devices.

[0003] Therefore, the present application is based on the above technical problems, and a kind of AOI multifunctional detection device with reasonable structure, convenient to use, small floor area is proposed. CONTENT OF UTILITY MODEL

[0004] The utility model aims at overcoming the deficiencies of prior art, and provides a kind of AOI multifunctional detection device with reasonable structure, convenient to use, small floor area.

[0005] In order to achieve the above purpose, the utility model provides an AOI multifunctional detection device, which comprises a marble base, a bearing table for loading detection objects and having different specifications, an X-axis drive unit, two Y-axis drive units and a primary Z-axis drive unit, the marble base is formed with a marble support frame, wherein the marble support frame is a gantry structure; the X-axis drive unit is installed on the crossbeam on one side of the marble support frame, and a primary detection camera and a secondary detection camera are assembled on the X-axis drive unit, wherein the primary detection camera is used to detect the surface defects of the detection object, and the secondary detection camera is used to detect the internal and depth defects of the detection object; the X-axis drive unit is used to drive the primary detection camera or the secondary detection camera to move along the X-axis direction to the primary detection area, the two Y-axis drive units are installed in parallel on the marble base, and the bearing table is located between the two Y-axis drive units, the Y-axis drive unit is used to drive the bearing table to reciprocate along the Y-axis direction, the primary Z-axis drive unit is installed on the crossbeam on the other side of the marble support frame, and a tertiary detection camera is installed on the primary Z-axis drive unit, the primary Z-axis drive unit is used to drive the tertiary detection camera to move along the Z-axis direction, and the tertiary detection camera is used to detect the thickness defects of the detection object.

[0006] Further, it further comprises a secondary Z-axis drive unit, a through hole penetrating along the Z-axis direction is formed on the secondary detection area of the marble base, the secondary Z-axis drive unit is installed at the bottom of the marble base, the movable end of the secondary Z-axis drive unit can move in the through hole, and the secondary Z-axis drive unit is used to cooperate with the primary Z-axis drive unit to detect the thickness defects of the detection object.

[0007] Further, a third Z-axis driving unit is arranged between the first detection camera and the X-axis driving unit, and a fourth Z-axis driving unit is arranged between the second detection camera and the X-axis driving unit.

[0008] Further, two transmission blocks are arranged, two guide slides are formed on the marble base and are parallel to each other, the Y-axis driving units are arranged outside the guide slides, at least one through slot is formed on the bottom of the bearing table, and the transmission blocks are used for connecting the Y-axis driving units and the bearing table.

[0009] Further, the first detection camera, the second detection camera and the third detection camera are all provided with sensors for transmitting data.

[0010] The utility model discloses the above-mentioned scheme, its beneficial effect lies in:

[0011] Distinguish from traditional delivery to at most equipment respectively carries out detection, through with the integration of multiple AOI detection equipment, improve optimization space occupancy, satisfy to the different detection requirement of same detection object, reach one machine multi -measurement function, reduce the investment of early stage cost, improve the running efficiency, realize efficient operation. BRIEF DESCRIPTION OF DRAWINGS

[0012] Figure 1 It is the structure diagram of AOI multifunctional detection device in this embodiment Figure 1 .

[0013] Figure 2 It is the structure diagram of AOI multifunctional detection device in this embodiment Figure 2 .

[0014] Figure 3 It is the structure diagram of bearing table in embodiment one.

[0015] Figure 4 It is the structure diagram of bearing table in embodiment two.

[0016] Figure 5 It is the structure diagram of bearing table in embodiment three.

[0017] Wherein, 1-marble base, 11-marble support frame, 12-first detection area, 13-second detection area, 14-through hole, 15-guiding slide, 2-bearing table, 21-grid piece, 22-light transmission piece, 23-clamping groove, 24-take piece, 25-through slot, 3-X-axis drive unit, 31-first detection camera, 32-second detection camera, 33-third Z-axis drive unit, 34-fourth Z-axis drive unit, 4-Y-axis drive unit, 5-first Z-axis drive unit, 51-third detection camera, 6-second Z-axis drive unit, 7-driving block, 71-matching part, 72-driving part, 8-detection object. DETAILED DESCRIPTION

[0018] In order to facilitate the understanding of the present application, the present application will be described more fully below with reference to the drawings. The preferred embodiments of the present application are shown in the drawings. However, the present application can be implemented in many different forms and is not limited to the embodiments described herein. The purpose of providing these embodiments is to make the disclosure of the present application more thorough and comprehensive.

[0019] Referring to the drawings Figure 1 As shown in the drawings, in the present embodiment, an AOI multifunctional detection device includes a marble base 1, a bearing table 2 for loading a detection object 8 and having different specifications, two driving blocks 7, an X-axis drive unit 3, two Y-axis drive units 4, and a first Z-axis drive unit 5. The marble base 1 is formed with a marble support frame 11, wherein the marble support frame 11 is a gantry structure, thereby facilitating the division of the working area of the marble base 1 into a first detection area 12 for detecting surface, internal and depth defects and a second detection area 13 for detecting thickness defects, increasing the user's sense of operation; secondly, the X-axis drive unit 3, Y-axis drive unit 4 and Z-axis drive unit in the present embodiment are all equipped with a grating ruler to ensure that the positioning accuracy and repeat positioning accuracy of the movement is not greater than 1 μm; in addition, referring to the drawings Figure 1 As shown in the drawings, a spatial coordinate system is established, thereby illustrating the X-axis, Y-axis and Z-axis directions mentioned in the present embodiment.

[0020] Referring to the drawings Figure 1As shown, in the embodiment, the X-axis driving unit 3 is mounted on the beam on one side of the marble support frame 11, and a first detection camera 31 and a second detection camera 32 are assembled on the X-axis driving unit 3, wherein the first detection camera 31 is used to detect the surface defects of the detection object 8, and the second detection camera 32 is used to detect the internal and deep defects of the detection object 8; the X-axis driving unit 3 is used to drive the first detection camera 31 or the second detection camera 32 to move to the first detection area 12 along the X-axis direction; it should be noted that the above-mentioned first detection camera 31 is preferably a high-precision optical camera, so as to facilitate the operator to more accurately and carefully analyze and judge the surface of the detection object 8; secondly, the second detection camera 32 is preferably an industrial CT or X-ray camera, so as to realize the analysis and judgment of the internal of the detection object 8.

[0021] Referring to the accompanying drawings Figure 1 As shown, in the embodiment, a third Z-axis driving unit 33 and a fourth Z-axis driving unit 34 are further included, the third Z-axis driving unit 33 is arranged between the first detection camera 31 and the X-axis driving unit 3, and the first detection camera 31 is driven by the third Z-axis driving unit 33 to move along the Z-axis direction, so as to focus on the detection object 8 and realize high-precision sampling, thereby improving the detection accuracy; the fourth Z-axis driving unit 34 is arranged between the second detection camera 32 and the X-axis driving unit 3; secondly, the second detection camera 32 is driven by the third Z-axis driving unit 33 to move along the Z-axis direction, so as to calibrate the shooting position of the second detection camera 32 on the detection object 8, thereby ensuring to obtain the internal image of the detection object 8 and improving the detection accuracy.

[0022] Referring to the accompanying drawings Figure 1As shown, further, the two Y-axis drive units 4 are installed in parallel on the marble base 1, and the carrying table 2 is located between the two Y-axis drive units 4, the Y-axis drive units 4 are used to drive the carrying table 2 to reciprocate along the Y-axis direction, two mutually parallel guide slides 15 are formed on the marble base 1, the two Y-axis drive units 4 are located on the outer side of the guide slides 15, at least one, preferably two through grooves 25 are formed on the bottom of the carrying table 2, the transmission blocks 7 are used to connect the Y-axis drive units 4 and the carrying table 2, wherein each transmission block 7 is provided with a matching part 71 for clamping the guide slide 15 and a transmission part 72 for clamping the through groove 25, specifically, the above-mentioned Y-axis drive unit 4 is preferably composed of a sliding guide rail and a traction block in sliding cooperation with the sliding guide rail, by clamping the matching part 71 on the guide slide 15, one side of the matching part 71 is in cooperation with the traction block; the traction block drives the transmission block 7 to move along the Y-axis direction on the guide slide 15, so that the carrying table 2 clamped and cooperated with the transmission part 72 moves synchronously, thereby adjusting the relative position of the carrying table 2 in the Y-axis direction; in addition, the detection items carried out in the first detection area 12 and the second detection area 13 are different, so the placement position of the detection object 8 and the type of the carrying table 2 used are also different, by providing two through grooves 25 on the above-mentioned carrying table 2, when corresponding detection is carried out in the first detection area 12, the transmission block 7 is clamped with one of the through grooves 25, when corresponding detection is carried out in the second detection area 13, the transmission block 7 is clamped with the other through groove 25, thereby cooperating with the above-mentioned three-axis drive unit, corresponding adjustment of the placement of the detection object 8 is carried out, and the detection effect of the detection object 8 is improved.

[0023] Referring to the drawings Figure 2 As shown, in the present embodiment, the second Z-axis drive unit 6 is also included, the first Z-axis drive unit 5 is installed on the beam on the other side of the marble support frame 11, the third detection camera 51 is installed on the first Z-axis drive unit 5, the first Z-axis drive unit 5 is used to drive the third detection camera 51 to move along the Z-axis direction, the through hole 14 penetrating along the Z-axis direction is formed on the second detection area 13 of the marble base 1, the second Z-axis drive unit 6 is installed on the bottom of the marble base 1, the movable end of the second Z-axis drive unit 6 can move in the through hole 14, wherein the third detection camera 51 and the second Z-axis drive unit 6 are located on the same axis line position; the third detection camera 51 is used to detect the thickness defect of the detection object 8, the second Z-axis drive unit 6 is used to cooperate with the first Z-axis drive unit 5 to detect the thickness defect of the detection object 8; it should be noted that the above-mentioned third detection camera 51 is a laser ranging or optical ranging camera, thereby cooperating with the second Z-axis drive unit 6 to more accurately and carefully analyze and judge the thickness of the detection object 8;

[0024] Further, the first detection camera 31, the second detection camera 32 and the third detection camera 51 are all provided with sensors for transmitting data.

[0025] Referring to the drawings Figure 3 As shown in the embodiment one, when detecting the internal and deep defects of the detection object 8, the grid member 21 is arranged on the center position of the bearing table 2, and the grid member 21 is made of flexible material, so as to ensure the integrity of the detection object 8 and reduce the influence of the bearing table 2 during the detection process, and avoid the damage of the detection object 8 due to collision and other factors, and affect the detection accuracy.

[0026] In order to facilitate the understanding of the AOI multifunctional detection device of the embodiment one, the following is further explained:

[0027] S1, the bearing table 2 used for detecting the internal and deep defects of the detection object 8 is clamped on the transmission block 7;

[0028] S2, the detection object 8 is placed on the center position of the grid member 21;

[0029] S3, the Y-axis driving unit 4 drives the bearing table 2 to make the bearing table 2 located in the first-level detection area 12; the X-axis driving unit 3 drives the second-level detection camera 32 to make the detection object 8 and the second-level detection camera 32 located in the coaxial position,

[0030] S4, the fourth-level Z-axis driving unit 34 drives the second-level detection camera 32 to take samples from top to bottom for the internal and deep defects of the detection object 8;

[0031] S5, the operator judges by analyzing the related internal pattern transmitted by the sensor;

[0032] S6, if there is no internal and deep defect, the detection object 8 is qualified in this detection, and the detection object 8 is sent to the next detection item;

[0033] S7, if there is internal and deep defect, the detection object 8 is unqualified in this detection, and the related process is adjusted.

[0034] In the embodiment two, different from the embodiment one, there are the following aspects:

[0035] Referring to the drawings Figure 4 As shown in the embodiment two, when detecting the surface defects of the detection object 8, the light-transmitting member 22 is arranged on the center position of the bearing table 2, and the light-transmitting member 22 is made of transparent material, so as to ensure that the back defects of the detection object 8 can be detected, and improve the comprehensiveness of the detection.

[0036] In order to facilitate the understanding of the AOI multifunctional detection device of the embodiment two, the following is further explained under the premise that the use method is unchanged:

[0037] S1, the bearing table 2 used for detecting the surface defects of the detection object 8 is clamped on the transmission block 7;

[0038] S2 places the object to be tested 8 at the center of the light-transmitting element 22;

[0039] S3 instructs the Y-axis drive unit 4 to drive the support stage 2, positioning the support stage 2 within the primary detection area 12; and instructs the X-axis drive unit 3 to drive the primary detection camera 31, positioning the object to be detected 8 and the primary detection camera 31 coaxially.

[0040] S4 instructs the three-stage Z-axis drive unit 33 to drive the first-stage detection camera 31 to perform internal imaging and sampling of the detection object 8 from top to bottom.

[0041] The S5 operator makes a judgment by analyzing the relevant surface patterns transmitted by the sensors;

[0042] If no surface defects are found in S6, then the test item 8 is qualified for this test and will be sent to the next test item.

[0043] If surface defects are found in S7, the test item 8 will fail this test, and the relevant processes will be adjusted.

[0044] In this third embodiment, the differences from embodiments one and two are as follows:

[0045] See appendix Figure 5 As shown in this embodiment three, when performing thickness defect detection on the test object 8, the side end of the support platform 2 is provided with a snap-fit ​​groove 23 extending along the Y-axis. The snap-fit ​​groove 23 is used to snap into the test object 8. The outer dimensions of the snap-fit ​​groove 23 are slightly larger than the outer dimensions of the snap-fit ​​part of the test object 8, so that the test object 8 can be easily snapped into the snap-fit ​​groove 23. This avoids the situation where some test objects 8 cannot be snapped into the snap-fit ​​groove 23 due to size factors, thus improving the adaptability of the equipment. The two sides of the opening of the snap-fit ​​groove 23 are also provided with a part removal part 24, which makes it convenient for the operator to remove the test object 8 that is snapped into the snap-fit ​​groove 23. This avoids the test object 8 shrinking into the snap-fit ​​groove 23, making it impossible for the operator to remove it, thus improving practicality.

[0046] To facilitate understanding of the AOI multifunctional detection device in Embodiment 1, the following further explains the usage method 3, while keeping its usage method unchanged:

[0047] S1 attaches the support platform 2, used to detect thickness defects in the test object 8, to the transmission block 7;

[0048] S2 partially snaps the test object 8 into the snap-fit ​​slot 23;

[0049] S3 instructs the Y-axis drive unit 4 to drive the carrier stage 2, so that the carrier stage 2 is located in the secondary detection area 13;

[0050] S4 makes the movable end of the secondary Z-axis driving unit 6 extend along the Z-axis direction until the movable end is higher than the height position of the clamping groove 23;

[0051] S5 makes the tertiary detection camera 51 emit detection light downward along the Z-axis direction, and makes the Y-axis driving unit 4 drive the bearing table 2 to move along the Y-axis direction;

[0052] S6 moves the bearing table 2 along the Y-axis direction, so that the detection light moves to contact the surface of the detection object 8, and records relevant data;

[0053] S7 until the detection object 8 is stopped by the movable end of the secondary Z-axis driving unit 6, and is retracted into the clamping groove 23;

[0054] S8 the operator makes a judgment by analyzing the relevant data transmitted by the sensor;

[0055] S9 if there is no thickness defect, the detection object 8 passes the detection, and is sent to the next detection item;

[0056] S10 if there is a thickness defect, the detection object 8 fails the detection, and the relevant process is adjusted.

[0057] The above-mentioned embodiments are only preferred embodiments of the present application, and do not limit the present application in any form. Any skilled person in the art, without departing from the technical scheme of the present application, can make more possible changes and modifications to the technical scheme of the present application by using the disclosed technical content, or make modifications, which are equivalent embodiments of the present application. Therefore, any equivalent changes within the technical scheme of the present application, according to the idea of the present application, should be covered in the protection scope of the present application.

Claims

1. An AOI multifunctional detection device, characterized in that: The system includes a marble base (1), a support platform (2) with different specifications for loading the test object (8), an X-axis drive unit (3), two Y-axis drive units (4), and a primary Z-axis drive unit (5). A marble support frame (11) is formed on the marble base (1), wherein the marble support frame (11) is a gantry structure. The X-axis drive unit (3) is installed on a crossbeam on one side of the marble support frame (11). The X-axis drive unit (3) is equipped with a primary inspection camera (31) and a secondary inspection camera (32). The primary inspection camera (31) is used to detect surface defects of the test object (8), and the secondary inspection camera (32) is used to detect internal and depth defects of the test object (8). The X-axis drive unit (5) 3) Used to drive the first-level detection camera (31) or the second-level detection camera (32) to move along the X-axis to the first-level detection area (12). The two Y-axis drive units (4) are installed in parallel on the marble base (1), and the support platform (2) is located between the two Y-axis drive units (4). The Y-axis drive unit (4) is used to drive the support platform (2) to move back and forth along the Y-axis. The first-level Z-axis drive unit (5) is installed on the crossbeam on the other side of the marble support frame (11). The first-level Z-axis drive unit (5) is equipped with a third-level detection camera (51). The first-level Z-axis drive unit (5) is used to drive the third-level detection camera (51) to move along the Z-axis. The third-level detection camera (51) is used to detect the thickness defects of the test object (8).

2. The AOI multifunctional detection device according to claim 1, characterized in that: It also includes a secondary Z-axis drive unit (6). The secondary detection area (13) of the marble base (1) is formed with a through hole (14) extending along the Z-axis direction. The secondary Z-axis drive unit (6) is installed at the bottom of the marble base (1). The movable end of the secondary Z-axis drive unit (6) can move in the through hole (14). The secondary Z-axis drive unit (6) is used to cooperate with the primary Z-axis drive unit (5) to detect the thickness defects of the test object (8).

3. The AOI multifunctional detection device according to claim 1, characterized in that: It also includes a three-level Z-axis drive unit (33) and a four-level Z-axis drive unit (34). The three-level Z-axis drive unit (33) is located between the first-level detection camera (31) and the X-axis drive unit (3), and the four-level Z-axis drive unit (34) is located between the second-level detection camera (32) and the X-axis drive unit (3).

4. The AOI multifunctional detection device according to claim 1, characterized in that: It also includes two transmission blocks (7), two parallel guide slides (15) are formed on the marble base (1), two Y-axis drive units (4) are located on the outer side of the guide slides (15), and at least one through groove (25) is formed on the bottom of the support platform (2). The transmission blocks (7) are used to connect the Y-axis drive units (4) and the support platform (2). Each transmission block (7) is provided with a mating part (71) for engaging the guide slides (15) and a transmission part (72) for engaging the through groove (25).

5. The AOI multifunctional detection device according to claim 1, characterized in that: The first-level detection camera (31), the second-level detection camera (32), and the third-level detection camera (51) are all equipped with sensors for transmitting data.