Pressing device and testing system

Abstract

The utility model relates to a pressing device and a test system. The pressing device comprises a base plate and a covering plate, wherein the base plate is used for setting a target object; the covering plate is arranged on one side of the base plate, the covering plate is rotatably connected with the base plate, the covering plate has a locking state and an unlocking state relative to the base plate, and when the covering plate is in the locking state relative to the base plate, the covering plate is matched with the base plate and used for locking the target object; and when the covering plate is in an unlocking state relative to the base plate, the target object can move relative to the base plate. The pressing device can lock a target object, and when the pressing device is applied to the test system, the pressing device can lock a test machine, so that the test machine is fixed on one side of the test base station.

Description

TECHNICAL FIELD

[0001] The application relates to the technical field of wafer detection, in particular to a pressing device and a test system. BACKGROUND

[0002] In a wafer probe station, when a wafer is detected by a test machine, the test machine needs to be turned over and arranged on a turn-over plate of a base station, so that the test machine is electrically connected to a probe card, so as to realize the electrical connection between the probe card and the wafer and detect the wafer. Therefore, a pressing device needs to be arranged to stably arrange the test machine on the turn-over plate of the base station. CONTENT OF THE UTILITY MODEL

[0003] In view of this, the application provides a pressing device and a test system. The pressing device can lock a target object. When the pressing device is applied to the test system, the pressing device can lock a test machine, so that the test machine is fixed to one side of a test base station.

[0004] The application provides a pressing device. The pressing device comprises a base plate and a cover plate. The base plate is used for arranging a target object. The cover plate is arranged on one side of the base plate. The cover plate is rotatably connected to the base plate. The cover plate has a locked state and an unlocked state relative to the base plate. When the cover plate is in the locked state relative to the base plate, the cover plate cooperates with the base plate to lock the target object. When the cover plate is in the unlocked state relative to the base plate, the target object can move relative to the base plate.

[0005] Further, the pressing device further comprises a support shaft mechanism. The support shaft mechanism is connected to the base plate and the cover plate respectively, so that the cover plate can rotate relative to the base plate. The support shaft mechanism comprises a support shaft, a first rotating wheel, a second rotating wheel, a first tensioning member and a second tensioning member. The support shaft is installed on the base plate. The first rotating wheel and the second rotating wheel are rotatably arranged on opposite sides of the support shaft. The first rotating wheel and the second rotating wheel abut against the cover plate respectively. The opposite ends of the first tensioning member are connected to the cover plate and the support shaft respectively and are arranged close to the first rotating wheel. The opposite ends of the second tensioning member are connected to the cover plate and the support shaft respectively and are arranged close to the second rotating wheel. The first tensioning member and the second tensioning member cooperate to abut the cover plate against the first rotating wheel and the second rotating wheel, so as to realize the rotation of the cover plate relative to the base plate.

[0006] Further, the first rotating wheel comprises a first outer ring and a first inner ring, the first outer ring is sleeved on the outer periphery of the first inner ring, the first outer ring is rotatably connected with the first inner ring, and the first inner ring is sleeved on the outer periphery of the support shaft; the second rotating wheel comprises a second outer ring and a second inner ring, the second outer ring is sleeved on the outer periphery of the second inner ring, the second outer ring is rotatably connected with the second inner ring, and the second inner ring is sleeved on the outer periphery of the support shaft.

[0007] Further, the pressing device further comprises a driving mechanism, the driving mechanism comprises a cylinder body and an output shaft, the cylinder body is arranged on the side of the backing plate away from the cover plate, the output shaft is at least partially arranged in the cylinder body, the output shaft is movable relative to the cylinder body in a preset direction, and the output shaft is rotatably connected with the cover plate; when the output shaft moves relative to the cylinder body in the preset direction, the cover plate is driven to rotate relative to the backing plate, so that the locking state and the unlocking state are switched; wherein the preset direction is the arrangement direction of the cover plate and the backing plate.

[0008] Further, the pressing device further comprises a first detection assembly, the first detection assembly is arranged on the cover plate, the first detection assembly comprises a first detection element, a second detection element and a detected element, the first detection element is arranged on the backing plate and close to the support shaft; the second detection element is arranged on the backing plate and close to the side of the cover plate away from the support shaft, and the detected element is arranged on the cover plate and located between the first detection element and the second detection element; when the first detection element detects a first signal of the detected element, the cover plate is in the unlocking state; when the second detection element detects a second signal of the detected element, the cover plate is in the locking state.

[0009] Further, the detected element comprises a first part, a second part and a third part which are bent and connected, the first part and the third part are bent towards the two opposite sides of the second part, the first part is connected with the cover plate, the third part is located between the first detection element and the second detection element, when the first detection element detects a first signal of the third part, the cover plate is in the unlocking state; when the second detection element detects a second signal of the third part, the cover plate is in the locking state.

[0010] Further, the pressing device further comprises a second detection assembly, the second detection assembly comprises a third detection element and a fourth detection element, the third detection element and the fourth detection element are arranged on the opposite sides of the backing plate respectively, and the third detection element and the fourth detection element cooperate to detect the target object on the backing plate.

[0011] Further, the pressing device further comprises a supporting column, which is arranged on the side of the base plate away from the cover plate, and is used for supporting the base plate.

[0012] Further, the pressing device further comprises a controller, which is electrically connected with the first detection assembly, the second detection assembly and the driving mechanism respectively, and is used for controlling the driving mechanism to drive the cover plate to rotate relative to the base plate according to the first signal, the second signal and the detection signal of the second detection assembly, so as to realize the locking and unlocking of the target object.

[0013] The application further provides a test system, which comprises a test base, a test machine and the pressing device provided by the application.

[0014] In the application, the cover plate is rotatably connected with the base plate, in other words, the cover plate can rotate relative to the base plate, so as to realize the switching of the cover plate between the locked state and the unlocked state relative to the base plate, so as to facilitate the taking and placing of the target object. Specifically, when the cover plate is in the locked state relative to the base plate, the target object is arranged on the base plate, and the cover plate cooperates with the base plate to lock the target object, so as to prevent the target object from moving. When the pressing device is applied to the test system, the target object is the test machine, and the cover plate and the base plate can fix the position of the target object, so as to improve the stability of the electrical connection between the test machine and the probe card, thereby improving the detection performance of the test system on the detection of the sample to be detected. When the cover plate is in the unlocked state relative to the base plate, the target object can move relative to the base plate, in other words, the target object can be directly taken out from between the cover plate and the base plate freely, so as to realize the separability of the test machine and the test base, and the pressing device has good use performance. BRIEF DESCRIPTION OF DRAWINGS

[0015] In order to more clearly illustrate the technical solutions of the embodiments of the application, the following will briefly introduce the drawings needed to be used in the embodiments. Obviously, the drawings described in the following embodiments are some embodiments of the application, and other drawings can also be obtained by those skilled in the art without creative labor.

[0016] Figure 1 FIG. 1 is a structural schematic view of a test system according to an embodiment of the application;

[0017] Figure 2Structure schematic diagram of a testing machine according to an embodiment of the present application;

[0018] Figure 3 Structure schematic diagram of a pressing device according to a first embodiment of the present application;

[0019] Figure 4 Structure schematic diagram of a pressing device according to a second embodiment of the present application;

[0020] Figure 5 Structure schematic diagram of a pressing device according to a third embodiment of the present application;

[0021] Figure 6 Exploded structure schematic diagram of a pressing device according to a first embodiment of the present application;

[0022] Figure 7 Top structure schematic diagram of a pressing device according to an embodiment of the present application;

[0023] Figure 8 Structure schematic diagram of Figure 7 Sectional structure schematic diagram in A-A direction;

[0024] Figure 9 Exploded structure schematic diagram of a pressing device according to a second embodiment of the present application;

[0025] Figure 10 Circuit block diagram of a pressing device according to an embodiment of the present application.

[0026] Explanation of reference numerals:

[0027] 100 - pressing device, 110 - base plate, 120 - cover plate, 130 - support shaft mechanism, 131 - support shaft, 132 - first rotating wheel, 1321 - first outer ring, 1322 - first inner ring, 133 - second rotating wheel, 1331 - second outer ring, 1332 - second inner ring, 134 - first tensioning member, 135 - second tensioning member, 140 - driving mechanism, 141 - cylinder body, 142 - output shaft, 150 - first detection assembly, 151 - first detection element, 152 - second detection element, 153 - detected element, 1531 - first part, 1532 - second part, 1533 - third part, 160 - second detection assembly, 161 - third detection element, 162 - fourth detection element, 170 - support column, 180 - controller, 200 - testing system, 210 - testing base, 220 - testing machine, 221 - body part, 222 - pressing part, 2221 - first subpart, 2222 - second subpart, 2223 - guide inclined surface. DETAILED DESCRIPTION

[0028] With reference to the drawings of the embodiments of the present application, the technical solutions in the embodiments of the present application will be clearly and completely described. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments of the present application. Based on the embodiments in the present application, all the other embodiments obtained by those of ordinary skill in the art without creative effort should fall within the scope of the present application.

[0029] The terms "first", "second", and the like in the specification and claims of the present application and the above-described drawings are used to distinguish different objects, rather than to describe a particular order. In addition, the terms "include" and "have" and any variations thereof are intended to cover non-exclusive inclusion. For example, a process, method, system, product, or device including a series of steps or units is not limited to the listed steps or units, but can optionally include other steps or units not listed, or can optionally include other steps or units inherent to the process, method, product, or device.

[0030] Reference herein to "an embodiment" or "an implementation" means that a particular feature, structure, or characteristic described in connection with the embodiment or implementation can be included in at least one embodiment of the present application. The appearance of the phrase in various places in the specification does not necessarily all refer to the same embodiment, nor is it necessarily independent or alternative implementations to other embodiments. It is explicitly and implicitly understood by those skilled in the art that the embodiments described herein can be combined with other embodiments.

[0031] In a wafer probe station, when a wafer is detected by a test machine, the test machine needs to be flipped and arranged on the flip cover plate of the base station, so that the test machine is electrically connected to the probe card, so as to realize the electrical connection between the probe card and the wafer and detect the wafer. Therefore, a pressing device needs to be arranged to stably arrange the test machine on the flip cover plate of the base station.

[0032] Please refer to Figure 1 and Figure 2 The present application provides a test system 200, which comprises a test base station 210, a test machine 220, and a pressing device 100 provided by the present application. The test base station 210 is used to carry a probe card, the test machine 220 is arranged on one side of the test base station 210 and is used to electrically connect the probe card, and the pressing device 100 is installed on the test base station 210 and is used to press the test machine 220.

[0033] It can be understood that the test machine 220 can be arranged on one side of the test base station 210, that is, when the test machine 220 needs to be electrically connected to the probe card, the test machine 220 is arranged on one side of the test base station 210; when the test system 200 stops testing, the test machine 220 can be separated from one side of the test base station 210.

[0034] It can be understood that, in the test system 200, the test machine 220 is electrically connected with the probe card, the probe card contacts and is electrically connected with the sample to be detected, so as to detect the performance of the sample to be detected.

[0035] Optionally, in some embodiments, the test system 200 is a wafer probe station, and the sample to be detected is a wafer.

[0036] In the embodiment, the pressing device 100 is installed on the test base 210, and the test machine 220 is arranged on one side of the test base 210 when the test machine 220 needs to be electrically connected with the probe card. The pressing device 100 is used to lock the test machine 220, so that the test machine 220 is fixed on one side of the test base 210, and the electrical connection between the test machine 220 and the probe card is ensured, so that the probe card can contact the wafer and detect the performance of the wafer, and the accuracy of the test system 200 for detecting the sample to be detected is improved.

[0037] Optionally, in some embodiments, the test machine 220 includes a body part 221 and a pressing part 222 connected with each other. The body part 221 is used to be electrically connected with the probe card, and the pressing part 222 is arranged on the side of the body part 221. When the pressing part 222 is arranged in the pressing device 100 and the cover plate 120 of the pressing device 100 is in the locked state relative to the base plate 110, the pressing part 222 is locked by the pressing device 100, so that the test machine 220 is fixedly arranged on one side of the test base 210.

[0038] Optionally, the relative position of the pressing part 222 and the body part 221 is adjustable, so as to adjust the relative position of the pressing part 222 and the pressing device 100 according to the relative position of the test machine 220 and the test base 210, so that the pressing device 100 can lock the test machine 220.

[0039] Optionally, in some embodiments, the number of the pressing part 222 is at least one, that is, the number of the pressing part 222 is one or more. In the terms of the present application, “a plurality of” means more than or equal to two.

[0040] Optionally, in some embodiments, the pressing part 222 includes a first sub-part 2221 and a second sub-part 2222 connected with each other by bending. The first sub-part 2221 is connected with the body part 221 and the side of the body part 221, and the second sub-part 2222 is bent towards the side away from the body part 221, and is arranged in the pressing device 100.

[0041] Optionally, in some embodiments, the second sub-portion 2222 has a guiding slope 2223 at one end away from the first sub-portion 2221, so as to facilitate locking of the pressing device 100.

[0042] Please refer to Figure 3 and Figure 4 , the present application provides a pressing device 100, which comprises a base plate 110 and a cover plate 120, the base plate 110 is used for setting a target object; the cover plate 120 is arranged on one side of the base plate 110, the cover plate 120 is rotatably connected to the base plate 110, the cover plate 120 has a locked state and an unlocked state relative to the base plate 110, when the cover plate 120 is in the locked state relative to the base plate 110, the cover plate 120 cooperates with the base plate 110 to lock the target object; when the cover plate 120 is in the unlocked state relative to the base plate 110, the target object can move relative to the base plate 110.

[0043] It can be understood that the cover plate 120 is rotatably connected to the base plate 110, which can be that the cover plate 120 can be opened or closed relative to the base plate 110, so as to switch the cover plate 120 between the locked state and the unlocked state relative to the base plate 110.

[0044] Optionally, when the pressing device 100 is arranged in the test system 200, the target object is the test machine 220. More specifically, the target object is the pressing portion 222 of the test machine 220. Further, the target object is the second sub-portion 2222 of the pressing portion 222 of the test machine 220.

[0045] It can be understood that, in Figure 3 embodiments, the cover plate 120 is in the unlocked state relative to the base plate 110, in Figure 4 embodiments, the cover plate 120 is in the locked state relative to the base plate 110.

[0046] In the embodiment, the cover plate 120 is rotatably connected to the base plate 110, in other words, the cover plate 120 is rotatable relative to the base plate 110 to switch the cover plate 120 between the locked state and the unlocked state relative to the base plate 110, so as to facilitate the taking and placing of the target object. Specifically, when the cover plate 120 is in the locked state relative to the base plate 110, the target object is arranged on the base plate 110, the cover plate 120 cooperates with the base plate 110 to lock the target object, so as to prevent the target object from moving. When the compression device 100 is applied to the test system 200, the target object is the test machine 220, and the cover plate 120 and the base plate 110 can fix the position of the target object, so as to improve the stability of the electrical connection between the test machine 220 and the probe card, thereby improving the detection performance of the test system 200 in detecting the sample to be detected. When the cover plate 120 is in the unlocked state relative to the base plate 110, the target object can move relative to the base plate 110, in other words, the target object can be directly removed from between the cover plate 120 and the base plate 110 freely, so as to realize the separation of the test machine 220 and the test base 210, and the compression device 100 has better use performance.

[0047] Please refer to Figure 5 and Figure 6 In some embodiments, the compression device 100 further comprises a support shaft mechanism 130 connected to the base plate 110 and the cover plate 120 respectively, so that the cover plate 120 is rotatable relative to the base plate 110. The support shaft mechanism 130 comprises a support shaft 131, a first rotating wheel 132, a second rotating wheel 133, a first tensioning member 134 and a second tensioning member 135. The support shaft 131 is installed on the base plate 110, and the first rotating wheel 132 and the second rotating wheel 133 are rotatably arranged on opposite sides of the support shaft 131. The first rotating wheel 132 and the second rotating wheel 133 abut against the cover plate 120 respectively. The opposite ends of the first tensioning member 134 are connected to the cover plate 120 and the support shaft 131 respectively and are arranged close to the first rotating wheel 132. The opposite ends of the second tensioning member 135 are connected to the cover plate 120 and the support shaft 131 respectively and are arranged close to the second rotating wheel 133. The first tensioning member 134 and the second tensioning member 135 cooperate to abut the cover plate 120 against the first rotating wheel 132 and the second rotating wheel 133, so as to realize the rotation of the cover plate 120 relative to the base plate 110.

[0048] It can be understood that the support shaft 131 is installed on the base plate 110, and the support shaft 131 can be fixedly arranged on the base plate 110, and the relative position of the support shaft 131 and the base plate 110 is limited.

[0049] It can be understood that the first rotating wheel 132 and the first tensioning piece 134 are located on one side of the support shaft 131, and the second rotating wheel 133 and the second tensioning piece 135 are located on the other side of the support shaft 131.

[0050] Optionally, the first rotating wheel 132 and the second rotating wheel 133 can be, but are not limited to, rotating bearing pieces.

[0051] It can be understood that the cover plate 120 is tangent to the first rotating wheel 132, and the cover plate 120 is tangent to the second rotating wheel 133.

[0052] In the embodiment, the support shaft mechanism 130 connects the base plate 110 and the cover plate 120 respectively, and the cover plate 120 rotates relative to the base plate 110 with the support shaft mechanism 130 as the axis, so as to switch between the unlocked state and the locked state relative to the base plate 110. In the embodiment, the support shaft 131 is installed on the base plate 110, and the first rotating wheel 132 and the second rotating wheel 133 are rotatably arranged on opposite sides of the support shaft 131. The first rotating wheel 132 and the second rotating wheel 133 abut against the cover plate 120 respectively. In other words, when the first rotating wheel 132 and the second rotating wheel 133 rotate relative to the support shaft 131, the cover plate 120 is also driven to rotate relative to the support shaft 131, and the relative position between the support shaft 131 and the base plate 110 is fixed, that is, the cover plate 120 rotates relative to the base plate 110, so as to switch between the unlocked state and the locked state relative to the base plate 110. In addition, the opposite ends of the first tensioning member 134 are connected to the cover plate 120 and the support shaft 131 respectively and arranged close to the first rotating wheel 132, and the opposite ends of the second tensioning member 135 are connected to the cover plate 120 and the support shaft 131 respectively and arranged close to the second rotating wheel 133. The first tensioning member 134 and the second tensioning member 135 cooperate to abut the cover plate 120 against the first rotating wheel 132 and the second rotating wheel 133. The first tensioning member 134 and the second tensioning member 135 ensure that the cover plate 120 is always in abutment with the first rotating wheel 132 and the second rotating wheel 133, so as to reduce the gap between the cover plate 120 and the first rotating wheel 132 and the second rotating wheel 133, and realize the rotation of the cover plate 120 relative to the base plate 110.

[0053] Optionally, the first tensioning member 134 can be, but is not limited to, an elastic member, and the second tensioning member 135 can be, but is not limited to, an elastic member.

[0054] Optionally, when the cover plate 120 is in the locked state relative to the base plate 110, the first tensioning member 134 is in the elongated state and has a first stretching length. When the cover plate 120 is in the unlocked state relative to the base plate 110, the first tensioning member 134 has a second stretching length, and the first stretching length is greater than the second stretching length. In the normal state, the first tensioning member 134 is in the original length, which drives the cover plate 120 to change from the locked state to the unlocked state, so as to facilitate the taking and placing of the target object.

[0055] Optionally, when the cover plate 120 is in the locked state relative to the base plate 110, the second tensioning member 135 is in the elongated state and has a third stretched length; when the cover plate 120 is in the unlocked state relative to the base plate 110, the second tensioning member 135 has a fourth stretched length, the third stretched length being greater than the fourth stretched length, so that in the normal state, the second tensioning member 135 is restored to the original length, which drives the cover plate 120 to change from the locked state to the unlocked state, facilitating the taking and placing of the target object.

[0056] In some embodiments, the first rotating wheel 132 comprises a first outer ring 1321 and a first inner ring 1322, the first outer ring 1321 being sleeved on the outer periphery of the first inner ring 1322, the first outer ring 1321 being rotatably connected to the first inner ring 1322, and the first inner ring 1322 being sleeved on the outer periphery of the support shaft 131; the second rotating wheel 133 comprises a second outer ring 1331 and a second inner ring 1332, the second outer ring 1331 being sleeved on the outer periphery of the second inner ring 1332, the second outer ring 1331 being rotatably connected to the second inner ring 1332, and the second inner ring 1332 being sleeved on the outer periphery of the support shaft 131.

[0057] In the present embodiment, the first inner ring 1322 and the second inner ring 1332 are sleeved on the outer periphery of the support shaft 131 and located on opposite sides of the support shaft 131, respectively, and the first outer ring 1321 is rotatably connected to the first inner ring 1322, and the second outer ring 1331 is rotatably connected to the second inner ring 1332, and the cover plate 120 abuts against the first outer ring 1321 and the second outer ring 1331, respectively. When the first outer ring 1321 rotates relative to the first inner ring 1322 and the second outer ring 1331 rotates relative to the second inner ring 1332, the cover plate 120 will be driven to rotate relative to the support shaft 131, thereby realizing the rotation of the cover plate 120 relative to the base plate 110, so that the cover plate 120 can be switched between the unlocked state and the locked state relative to the base plate 110, thereby realizing the locking or separation of the target object.

[0058] Optionally, the first rotating wheel 132 further comprises a plurality of first rolling balls, which are arranged between the first outer ring 1321 and the first inner ring 1322 to realize the rotation of the first outer ring 1321 relative to the first inner ring 1322.

[0059] Optionally, the second rotating wheel 133 further comprises a plurality of second rolling balls, which are arranged between the second outer ring 1331 and the second inner ring 1332 to realize the rotation of the second outer ring 1331 relative to the second inner ring 1332.

[0060] Please refer to Figure 7 and Figure 8 In some embodiments, the pressing device 100 further comprises a driving mechanism 140, which comprises a cylinder body 141 and an output shaft 142. The cylinder body 141 is arranged on the side of the base plate 110 away from the cover plate 120. The output shaft 142 is at least partially arranged in the cylinder body 141. The output shaft 142 is movable relative to the cylinder body 141 in a preset direction. The output shaft 142 is rotatably connected to the cover plate 120. When the output shaft 142 moves relative to the cylinder body 141 in the preset direction, the cover plate 120 is driven to rotate relative to the base plate 110, thereby switching between the locked state and the unlocked state. The preset direction is the arrangement direction of the cover plate 120 and the base plate 110.

[0061] It can be understood that the preset direction is the arrangement direction of the base plate 110 and the cylinder body 141.

[0062] It can be understood that the output shaft 142 is at least partially arranged in the cylinder body 141. In some embodiments, the output shaft 142 is entirely arranged in the cylinder body 141. In other embodiments, the output shaft 142 is partially arranged in the cylinder body 141 and partially located outside the cylinder body 141.

[0063] It can be understood that the output shaft 142 is rotatably connected to the cover plate 120. Therefore, during the movement of the output shaft 142 relative to the cylinder body 141 in the preset direction, there is a certain amount of movement between the output shaft 142 and the cover plate 120.

[0064] In the embodiment, the output shaft 142 is movable relative to the cylinder body 141 along a preset direction, and the output shaft 142 is rotatably connected to the cover plate 120. When the output shaft 142 moves relative to the cylinder body 141 along the preset direction, the cover plate 120 is driven to rotate relative to the base plate 110, so as to switch the cover plate 120 between the locked state and the unlocked state relative to the base plate 110. Specifically, when the output shaft 142 moves relative to the cylinder body 141 along the preset direction and away from the cylinder body 141, the cover plate 120 is driven to rotate relative to the base plate 110 and towards the side close to the support shaft 131, so as to switch the cover plate 120 from the locked state to the unlocked state, and facilitate the movement of the target object relative to the base plate 110. When the output shaft 142 moves relative to the cylinder body 141 along the preset direction and towards the cylinder body 141, the cover plate 120 is driven to rotate relative to the base plate 110 and away from the support shaft 131, so as to switch the cover plate 120 from the unlocked state to the locked state, and facilitate the locking of the target object.

[0065] Optionally, the number of the cylinder bodies 141 is two, the output shaft 142 comprises a first output sub-shaft and a second output sub-shaft, the first output sub-shaft is at least partially arranged in one of the cylinder bodies 141 and is movable relative to the cylinder body 141 along a preset direction, and the second output sub-shaft is at least partially arranged in the other cylinder body 141 and is movable relative to the cylinder body 141 along a preset direction. One end of the first output sub-shaft away from the cylinder body 141 is connected to one end of the second output sub-shaft away from the cylinder body 141. The first output sub-shaft is rotatably connected to the cover plate 120, and the second output sub-shaft is rotatably connected to the cover plate 120.

[0066] Please refer to Figure 9In some embodiments, the pressing device 100 further comprises a first detection assembly 150 disposed on the cover plate 120, the first detection assembly 150 comprising a first detection element 151, a second detection element 152 and a detected element 153, the first detection element 151 disposed on the base plate 110 and close to the support shaft 131; the second detection element 152 disposed on the base plate 110 and close to the side of the cover plate 120 away from the support shaft 131, the detected element 153 disposed on the cover plate 120 and between the first detection element 151 and the second detection element 152, when the first detection element 151 detects a first signal of the detected element 153, the cover plate 120 is in an unlocked state; when the second detection element 152 detects a second signal of the detected element 153, the cover plate 120 is in a locked state.

[0067] It can be understood that the first detection element 151 is closer to the support shaft 131 than the second detection element 152.

[0068] In the present embodiment, the detected element 153 is connected to the cover plate 120, so when the cover plate 120 rotates relative to the base plate 110, it will drive the detected element 153 to rotate relative to the base plate 110, so that the relative positions of the detected element 153 and the first detection element 151 and the second detection element 152 change. The first detection element 151 is closer to the support shaft 131 than the second detection element 152, when the cover plate 120 moves relative to the base plate 110 towards the side close to the support shaft 131, it drives the detected element 153 to move close to the first detection element 151, the first detection element 151 detects a first signal of the detected element 153, and determines that the cover plate 120 is in an unlocked state. When the cover plate 120 moves relative to the base plate 110 towards the side away from the support shaft 131, it drives the detected element 153 to move close to the second detection element 152, the second detection element 152 detects a second signal of the detected element 153, and determines that the cover plate 120 is in a locked state. The first detection element 151, the second detection element 152 and the detected element 153 cooperate to detect the position of the cover plate 120, thereby facilitating the adjustment of the state of the cover plate 120 to lock the target object or allow the target object to move relative to the base plate 110.

[0069] Optionally, the first signal can be, but is not limited to, an optical signal, an electrical signal, and the second signal can be, but is not limited to, an optical signal, an electrical signal.

[0070] Optionally, the first detection element 151 and the second detection element 152 are photoelectric sensors. When the detected element 153 moves close to the first detection element 151, the detected element 153 blocks the light emitted by the first detection element 151 to obtain a first signal; when the detected element 153 moves close to the second detection element 152, the detected element 153 blocks the light emitted by the second detection element 152 to obtain a second signal.

[0071] In some embodiments, the detected element 153 comprises a first portion 1531, a second portion 1532 and a third portion 1533 connected in a zigzag manner, the first portion 1531 and the third portion 1533 are bent towards opposite sides of the second portion 1532, the first portion 1531 is connected to the cover plate 120, and the third portion 1533 is located between the first detection element 151 and the second detection element 152. When the first detection element 151 detects a first signal of the third portion 1533, the cover plate 120 is in an unlocked state; when the second detection element 152 detects a second signal of the third portion 1533, the cover plate 120 is in a locked state.

[0072] It can be understood that the detected element 153 forms a structure similar to a "Z" shape.

[0073] In the present embodiment, the first portion 1531, the second portion 1532 and the third portion 1533 are connected in a zigzag manner, the first portion 1531 is connected to the cover plate 120, the second portion 1532 is used to connect the first portion 1531 and the third portion 1533, and the third portion 1533 serves as a detected portion and is located between the first detection element 151 and the second detection element 152, in other words, the third portion 1533 can move close to the first detection element 151 or the second detection element 152 under the driving of the cover plate 120. When the cover plate 120 moves relative to the base plate 110 towards a side close to the support shaft 131, the third portion 1533 is driven to move close to the first detection element 151, and the first detection element 151 detects a first signal of the third portion 1533 of the detected element 153, thereby determining that the cover plate 120 is in an unlocked state. When the cover plate 120 moves relative to the base plate 110 towards a side away from the support shaft 131, the third portion 1533 is driven to move close to the second detection element 152, and the second detection element 152 detects a second signal of the third portion 1533 of the detected element 153, thereby determining that the cover plate 120 is in a locked state.

[0074] In some embodiments, the pressing device 100 further comprises a second detection assembly 160, the second detection assembly 160 comprises a third detection element 161 and a fourth detection element 162, the third detection element 161 and the fourth detection element 162 are respectively arranged on opposite sides of the base plate 110, and the third detection element 161 and the fourth detection element 162 are matched to detect the target object on the base plate 110.

[0075] In the embodiment, the third detection element 161 and the fourth detection element 162 are respectively arranged on opposite sides of the base plate 110, and the third detection element 161 and the fourth detection element 162 are matched to detect the target object on the base plate 110. Specifically, the third detection element 161 and the fourth detection element 162 are matched to detect whether the target object is arranged on the base plate 110, so that the user controls the driving mechanism 140 to adjust the position of the cover plate 120, thereby achieving the locking of the target object or the relative movement of the target object relative to the base plate 110.

[0076] Optionally, the third detection element 161 and the fourth detection element 162 are photoelectric sensors.

[0077] In some embodiments, the pressing device 100 further comprises a support column 170, the support column 170 is arranged on the side of the base plate 110 away from the cover plate 120, and the support column 170 is used to support the base plate 110.

[0078] In the embodiment, the support column 170 and the cylinder body 141 are located on the same side of the base plate 110 to provide a containing space for the cylinder body 141, thereby improving the use performance of the pressing device 100. When the pressing device 100 is applied to the test system 200, the support column 170 is arranged on the test base 210 to connect the base plate 110 and the test base 210, so that the pressing device 100 can be stably arranged on the test base 210.

[0079] Please refer to Figures 1 to 10 In some embodiments, the pressing device 100 further comprises a controller 180, the controller 180 is electrically connected with the first detection assembly 150, the second detection assembly 160 and the driving mechanism 140 respectively, and the controller 180 is used to control the driving mechanism 140 to drive the cover plate 120 to rotate relative to the base plate 110 according to the first signal, the second signal and the detection signal of the second detection assembly 160, thereby achieving the locking and unlocking of the target object.

[0080] Optionally, the detection signal of the second detection component 160 can be, but is not limited to, an optical signal, an electrical signal, etc.

[0081] In the embodiment, the controller 180 is configured to control the driving mechanism 140 to drive the cover plate 120 to rotate relative to the base plate 110 according to the first signal, the second signal and the detection signal of the second detection component 160, so as to realize the locking and unlocking of the target object. Specifically, the controller 180 is configured to determine the relative position between the cover plate 120 and the base plate 110 according to the first signal and the second signal, and determine whether the cover plate 120 is in the unlocked state or the locked state. The controller 180 is further configured to determine whether the target object is placed on the base plate 110 and the relative position between the target object and the base plate 110 according to the detection signal of the second detection component 160. When the pressing device 100 is used to lock the target object, the second detection component 160 detects that the target object is placed on the base plate 110 and the first detection component 150 obtains the first signal, the controller 180 receives the detection signal of the second detection component 160 and the first signal, and controls the driving mechanism 140 to drive the output shaft 142 to move away from the cylinder body 141, so as to drive the cover plate 120 to move away from the support shaft 131 relative to the base plate 110, thereby realizing the switching of the cover plate 120 from the unlocked state to the locked state. Further, the first detection component 150 obtains the second signal, and the controller 180 receives the second signal, the controller 180 controls the output shaft 142 to stop moving relative to the cylinder body 141, so as to make the cover plate 120 stop in the locked state relative to the base plate 110, thereby realizing the locking of the target object. When the pressing device 100 is used to make the target object movable relative to the base plate 110, the controller 180 controls the output shaft 142 to move towards the cylinder body 141, so as to drive the cover plate 120 to move towards the support shaft 131 relative to the base plate 110, thereby realizing the switching of the cover plate 120 from the locked state to the unlocked state. When the first detection component 150 obtains the first signal and the controller 180 receives the first signal, the controller 180 controls the output shaft 142 to stop moving relative to the cylinder body 141, so as to make the cover plate 120 stop in the unlocked state relative to the base plate 110, and the target object is movable relative to the base plate 110, thereby facilitating the user to remove the target object.

[0082] In this application, the terms "embodiment" and "implementation" mean that a specific feature, structure, or characteristic described in connection with an embodiment can be included in at least one embodiment of this application. The appearance of these phrases in various locations throughout the specification does not necessarily refer to the same embodiment, nor are they independent or alternative embodiments mutually exclusive with other embodiments. Those skilled in the art will understand, explicitly and implicitly, that the embodiments described in this application can be combined with other embodiments. Furthermore, it should be understood that the features, structures, or characteristics described in the various embodiments of this application can be arbitrarily combined to form another embodiment that does not depart from the spirit and scope of the technical solution of this application, provided there is no contradiction between them.

[0083] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this application and are not intended to limit it. Although this application has been described in detail with reference to the above preferred embodiments, those skilled in the art should understand that modifications or equivalent substitutions to the technical solutions of this application should not depart from the spirit and scope of the technical solutions of this application.

Claims

1. A pressing device, characterized in that, The pressing device includes: A pad, the pad being used to set the target object; and A cover plate is disposed on one side of the pad plate and is rotatably connected to the pad plate. The cover plate has a locked state and an unlocked state relative to the pad plate. When the cover plate is in the locked state relative to the pad plate, the cover plate cooperates with the pad plate to lock the target object. When the cover plate is in the unlocked state relative to the pad plate, the target object can move relative to the pad plate.

2. The pressing device according to claim 1, characterized in that, The pressing device further includes a support shaft mechanism, which connects the pad and the cover plate respectively, so that the cover plate can rotate relative to the pad. The support shaft mechanism includes a support shaft, a first rotating wheel, a second rotating wheel, a first tensioning member, and a second tensioning member. The support shaft is mounted on the pad. The first rotating wheel and the second rotating wheel are rotatably disposed on opposite sides of the support shaft. The first rotating wheel and the second rotating wheel abut against the cover plate. The opposite ends of the first tensioning member are respectively connected to the cover plate and the support shaft and are disposed near the first rotating wheel. The opposite ends of the second tensioning member are respectively connected to the cover plate and the support shaft and are disposed near the second rotating wheel. The first tensioning member and the second tensioning member cooperate to make the cover plate abut against the first rotating wheel and the second rotating wheel, thereby realizing the rotation of the cover plate relative to the pad.

3. The pressing device according to claim 2, characterized in that, The first rotating wheel includes a first outer ring and a first inner ring. The first outer ring is fitted around the outer periphery of the first inner ring and is rotatably connected to the first inner ring. The first inner ring is fitted around the outer periphery of the support shaft. The second rotating wheel includes a second outer ring and a second inner ring. The second outer ring is fitted around the outer periphery of the second inner ring and is rotatably connected to the second inner ring. The second inner ring is fitted around the outer periphery of the support shaft.

4. The pressing device according to claim 2, characterized in that, The pressing device further includes a driving mechanism, which includes a cylinder body and an output shaft. The cylinder body is disposed on the side of the pad away from the cover plate. The output shaft passes through the cylinder body at least partially. The output shaft can move relative to the cylinder body in a preset direction and is rotatably connected to the cover plate. When the output shaft moves relative to the cylinder body in the preset direction, it can drive the cover plate to rotate relative to the pad, thereby switching between a locked state and an unlocked state. The preset direction is the arrangement direction of the cover plate and the pad.

5. The pressing device according to claim 4, characterized in that, The pressing device further includes a first detection component, which is disposed on the cover plate. The first detection component includes a first detection element, a second detection element, and a detected element. The first detection element is disposed on the pad plate and is located near the support shaft. The second detection element is disposed on the pad plate and is located near the side of the cover plate opposite to the support shaft. The detected element is disposed on the cover plate and is located between the first detection element and the second detection element. When the first detection element detects a first signal from the detected element, the cover plate is in an unlocked state. When the second detection element detects a second signal from the detected element, the cover plate is in a locked state.

6. The pressing device according to claim 5, characterized in that, The detected element includes a first part, a second part, and a third part that are bent and connected together. The first part and the third part are bent toward opposite sides of the second part. The first part is connected to the cover plate. The third part is located between the first detection element and the second detection element. When the first detection element detects a first signal from the third part, the cover plate is in an unlocked state. When the second detection element detects a second signal from the third part, the cover plate is in a locked state.

7. The pressing device according to claim 5, characterized in that, The pressing device further includes a second detection component, which includes a third detection element and a fourth detection element. The third detection element and the fourth detection element are respectively disposed on opposite sides of the pad. The third detection element and the fourth detection element cooperate to detect the target object on the pad.

8. The pressing device according to any one of claims 1 to 7, characterized in that, The pressing device further includes a support column, which is disposed on the side of the pad away from the cover plate, and the support column is used to support the pad.

9. The pressing device according to claim 7, characterized in that, The pressing device further includes a controller, which is electrically connected to the first detection component, the second detection component, and the driving mechanism. The controller is used to control the driving mechanism to drive the cover plate to rotate relative to the pad plate according to the first signal, the second signal, and the detection signal of the second detection component, so as to realize the locking and unlocking of the target object.

10. A testing system, characterized in that, The testing system includes: A test base for supporting a probe card; The testing machine, detachably mounted on the testing base, is used for electrical connection to the probe card; and The pressing device according to any one of claims 1 to 9, wherein the pressing device is mounted on the test base and is used to press the test machine.

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