Anti-splashing water retaining device

Abstract

The utility model relates to an anti-splashing water retaining device which comprises a groove body and a conveying assembly arranged in the groove body, two opposite side walls of the groove body are respectively provided with a conveying port, the conveying assembly comprises a plurality of idler wheels which are arranged up and down, the idler wheels convey workpieces to penetrate through the conveying ports, and the anti-splashing water retaining device is characterized by further comprising a clamping groove which is arranged on the groove body; the partition plate comprises a partition plate body and first clamping arm bodies symmetrically arranged on the two sides, in the thickness direction, of the partition plate body, the first clamping arm bodies clamp the side walls from the two sides, the partition plate body is arranged at the conveying opening and extends into the position between the two horizontally-adjacent rolling wheels from top to bottom, and the first clamping arm bodies are provided with first clamping parts; the first clamping part is clamped with the clamping groove; according to the utility model, the water retaining effect of the water baffle is improved, the water baffle can be quickly replaced, and the assembly and maintenance efficiency of the rinsing bath is greatly improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of wet process, especially refers to a splash-proof water baffle device. BACKGROUND

[0002] Wet process is an indispensable key technology in the semiconductor manufacturing industry, which realizes the surface treatment of workpieces through the steps of spraying and cleaning chemical liquid in the machine table water washing tank. However, during the operation of the spraying machine, the problem of liquid splashing is common. The splashing of liquid can contaminate the internal and surrounding environment of the machine table, affecting product quality. The problem of liquid splashing mainly comes from the following aspects: first, during the spraying process, the liquid is ejected from the nozzle under high pressure, collides with the air or the surface of the workpiece, and generates fine droplets and scatters; second, there are usually gaps in the tank body of the machine table for conveying workpieces, which become channels for liquid splashing to adjacent tank bodies, causing contamination of the liquid in different tank bodies.

[0003] To solve the above problems, the current industry generally uses the method of installing a water baffle at the gap of the tank body. The traditional water baffle is usually a simple flat plate structure, which can block the liquid splashing to some extent, but often ignores the complexity of liquid flow, and still cannot effectively prevent the mutual penetration of liquid. Moreover, the installation and maintenance of the existing water baffle are relatively inconvenient, therefore, the practicality of the water baffle still needs to be further optimized. SUMMARY

[0004] Therefore, the technical problem to be solved by the utility model is to overcome the problem that the traditional water baffle in the prior art cannot effectively prevent the mutual penetration of liquid, and the installation and maintenance are relatively inconvenient, and to provide a splash-proof water baffle device, which not only improves the water blocking effect of the water baffle, but also enables quick replacement of the water baffle, greatly improving the assembly and maintenance efficiency of the washing tank.

[0005] To solve the above technical problems, the utility model provides a splash-proof water baffle device, which comprises a tank body and a conveying assembly arranged in the tank body, and the opposite sides of the tank body are provided with conveying ports, the conveying assembly comprises a plurality of rollers arranged vertically, and the rollers convey workpieces through the conveying ports, further comprising,

[0006] A clamping groove is arranged on the tank body;

[0007] A partition plate comprises a partition plate body, first clamping arm bodies symmetrically arranged on both sides of the partition plate body in the thickness direction, and the first clamping arm bodies clamp the side walls from both sides, the partition plate body is arranged at the conveying port, and the partition plate body extends into the horizontal adjacent two rollers from top to bottom, the first clamping arm bodies are provided with first clamping parts, and the first clamping parts are clamped with the clamping grooves.

[0008] In one embodiment of the utility model, still include setting in the upper water baffle of the conveying component, and the upper water baffle is located the both sides or one side of conveying port, the upper water baffle includes baffle body, the baffle body is opposite the baffle body setting.

[0009] In one embodiment of the utility model, the second clamping part of baffle body is provided with the second clamping part, and the buckle is clamped.

[0010] In one embodiment of the utility model, the first clamping arm body is provided with the plug-in groove opening upwards, the upper end of the baffle body is provided with the plug-in part, and the plug-in part is inserted into the plug-in groove.

[0011] In one embodiment of the utility model, the upper end of the baffle body is bent to the side of the first clamping arm body to form a bending part, and the bottom of the bending part is provided with the plug-in part.

[0012] In one embodiment of the utility model, the bottom of the bending part is provided with a reinforcing convex part, the reinforcing convex part is located on the side of the plug-in part relative to the first clamping arm body, and the reinforcing convex part abuts against the first clamping arm body.

[0013] In one embodiment of the utility model, the lower water baffle is further provided below the conveying component, the lower water baffle includes a water retaining convex part and a second clamping arm body symmetrically arranged on both sides of the water retaining convex part, the second clamping arm body clamps the side wall from both sides, and the water retaining convex part is located in the conveying port and extends along the edge of the conveying port.

[0014] In one embodiment of the utility model, the second clamping arm body is provided with a third clamping part, and the third clamping part is clamped with the clamping groove.

[0015] In one embodiment of the utility model, the water retaining convex part extends upwards between two horizontally adjacent rollers.

[0016] In one embodiment of the utility model, the water retaining convex part is provided with a circular arc concave surface on both sides along the edge direction of the conveying port.

[0017] In one embodiment of the utility model, the clamping groove is arranged above and below the conveying port.

[0018] In one embodiment of the utility model, the thickness of the baffle body gradually decreases from top to bottom.

[0019] In one embodiment of the utility model, the distance between the two first clamping arm bodies is less than twice the wall thickness of the groove body.

[0020] In one embodiment of the utility model, the interval between two second clamping arms is less than twice the wall thickness of the groove.

[0021] The above technical scheme of the utility model has the following beneficial effects compared with the prior art:

[0022] The two first clamping arms of the baffle clamp the two sides of the groove through elastic restoring force, not only achieving baffle fixation, but also achieving quick installation and disassembly of the baffle and the groove, greatly reducing the maintenance difficulty of the baffle; the first clamping arms are clamped with the clamping grooves of the groove through the first clamping portions, further improving the reliability of the baffle; the baffle body extends between the two horizontally adjacent rollers, and the roller surface and the baffle body together form a horizontal liquid seal barrier for the splashing liquid and cleaning liquid, directly blocking the horizontal splashing of the liquid, reducing the mutual interflow of the liquid and the cleaning liquid between adjacent grooves, effectively ensuring the cleanliness of the groove, and thus improving the yield of the workpiece. BRIEF DESCRIPTION OF DRAWINGS

[0023] In order to make the content of the utility model more easily understood clearly, the utility model is further described in detail below according to the specific embodiments of the utility model and in combination with the drawings, wherein

[0024] Figure 1 It is a structure schematic view of the anti-splashing water baffle device in the preferred embodiment of the utility model;

[0025] Figure 2 It is Figure 1 the enlarged view of A shown in the figure;

[0026] Figure 3 It is Figure 2 the structure schematic view of the baffle;

[0027] Figure 4 It is Figure 1 the structure schematic view of the upper water baffle cover;

[0028] Figure 5 It is Figure 1 the structure schematic view of the lower water baffle cover.

[0029] DESCRIPTION OF DRAWINGS: 1, groove; 11, conveying port; 12, clamping groove; 13, clamping groove; 2, roller; 3, baffle; 31, baffle body; 32, plug-in groove; 33, first clamping arm; 34, first clamping portion; 35, first clamping arm; 4, upper water baffle cover; 41, baffle body; 42, plug-in portion; 43, reinforcing convex portion; 44, bending portion; 45, second clamping portion; 5, lower water baffle cover; 51, second clamping arm; 52, water baffle convex portion; 53, third clamping portion; 54, circular arc concave surface; 55, second clamping arm; 6, buckle. DETAILED DESCRIPTION

[0030] The utility model will be further explained in connection with the drawings and specific embodiments, so that the person skilled in the art can better understand the utility model and can be implemented, but the embodiment is not as the limitation of the utility model.

[0031] Referring to Figure 1 And Figure 3 As shown in the utility model in one embodiment, a kind of splash-proof water baffle device is disclosed, it includes tank 1 and the conveying assembly being arranged in the tank 1, tank 1 is equipped with the spraying machine for being sprayed, cleaning to workpiece above and below conveying assembly, the opposite two side walls of the tank 1 is equipped with conveying port 11, the conveying assembly includes multiple rollers 2 being arranged above and below, the roller 2 conveys workpiece to pass through the conveying port 11, this water baffle device further includes,

[0032] Clamping groove 13 / 12, it is arranged on the tank 1;

[0033] Baffle 3, it includes baffle body 31, and first clamping arm body 33 and first clamping arm body 35 being arranged on the two sides of the baffle body 31 along the thickness direction, and first clamping arm body 33 and first clamping arm body 35 are clamped from two sides the side wall, the baffle body 31 is arranged at the conveying port 11, and the baffle body 31 is from top to bottom and extends between two horizontally adjacent rollers 2, first clamping arm body 33 and first clamping arm body 35 are equipped with first clamping portion 34, and two first clamping portions 34 are clamped with clamping groove 12 respectively.

[0034] The splash-proof water baffle device described in the embodiment, after the baffle 3 is vertically aligned with the tank wall at the conveying port 11, the baffle 3 is pushed upwards so that the first clamping arm body 33 and the first clamping arm body 35 are reversely opened by their own elasticity, the tank wall is inserted between the first clamping arm body 33 and the first clamping arm body 35, and the first clamping portion 34 is automatically popped into the clamping groove 12 after sliding to a predetermined height, achieving clamping and fixing of the baffle 3 and the tank 1, improving the installation and disassembly efficiency of the baffle 3. At the same time, the two first clamping arm bodies 33 and the first clamping arm bodies 35 clamp the tank wall, achieving clamping and fixing between the baffle 3 and the tank 1, further improving the reliability of the baffle 3. The two first clamping arm bodies 33 and the first clamping arm bodies 35 clamp the tank wall 1 side wall by elastic restoring force, which can adapt to different tank wall thickness tolerances and achieve self-adaptive fixing. The roller 2 and the baffle body 31 form a horizontal liquid seal barrier, directly blocking the splashing chemical liquid and cleaning liquid, reducing the mutual interference of chemical liquid and cleaning liquid between adjacent tanks 1, and effectively ensuring the cleanliness of the tank 1.

[0035] Referring to Figure 2As shown in the utility model, in one embodiment of the utility model, the clamping groove 12 is arranged on the inner wall of the groove body 1, when two groove bodies 1 are closely arranged side by side, the first clamping arm body 33 and the first clamping arm body 35 can respectively extend into two groove bodies to complete clamping with the clamping groove 12, at this time, the partition plate body 31 separates two butted conveying ports 11.

[0036] In one embodiment of the utility model, the workpiece includes a wafer, a glass substrate.

[0037] In one embodiment of the utility model, the clamping groove 12 can be arranged on the inner wall and the outer wall of the groove body 1 at the same height, in this way, the first clamping arm body 33 can be clamped on the outer wall of the groove body 1, and the first clamping arm body 35 is located inside the groove body 1, reducing the risk of the partition plate 3 contacting the outside and being knocked off.

[0038] Referring to Figure 3 As shown, the partition plate body 31, the first clamping arm body 33 and the first clamping arm body 35 are integrally formed, the two first clamping arm bodies have a certain elasticity, and the first clamping part 34 is a hook on the upper end of the first clamping arm body 33 and the first clamping arm body 35.

[0039] Referring to Figure 2 And Figure 4 As shown in one embodiment of the utility model, an upper water blocking cover 4 is arranged above the conveying assembly, and the upper water blocking cover 4 is located on the side opposite to the conveying port 11, for blocking splashed chemical liquid and cleaning liquid, at the butting position of two conveying ports 11, an upper water blocking cover 4 can be arranged in each of two adjacent groove bodies 1, to form multiple protections between adjacent groove bodies 1, preventing splashed chemical liquid from intermingling between adjacent groove bodies 1, at only one conveying port 11, an upper water blocking cover 4 can be arranged inside the groove body 1, to prevent chemical liquid from splashing from the groove body 1 to the outside of the groove body 1, further, the upper water blocking cover 4 includes a baffle body 41, the baffle body 41 is arranged opposite to the partition plate body 31, and the baffle body 41 and the partition plate body 31 jointly form two layers of blocking for splashed chemical liquid and cleaning liquid.

[0040] Referring to Figure 2 As shown, the groove body 1 is provided with a buckle 6, the lower end of the baffle body 41 is provided with a second clamping part 45, the second clamping part 45 is clamped with the buckle 6, and the lower part of the baffle body 41 is fixed.

[0041] Further, the buckle 6 is a shaft sleeve buckle arranged on the shaft sleeve of the rotating shaft of the roller 2.

[0042] Referring to Figure 3As shown in the utility model, in one embodiment of the utility model, the first clamping arm body 33 and the first clamping arm body 35 are both provided with an upwardly open plug-in slot 32, the upper end of the baffle body 41 is provided with a plug-in part 42, and the plug-in part 42 is plugged into the plug-in slot 32, so that two upper water retaining covers 4 can be symmetrically arranged on both sides of the conveying port 11 by using the partition plate 3, and the upper water retaining cover 4 can be quickly fixed on the partition plate 3 without tools, thereby improving the assembly and maintenance efficiency.

[0043] Referring to Figure 4 As shown in the utility model, in one embodiment of the utility model, the upper end of the baffle body 41 is bent to the side of the first clamping arm body to form a bent part 44, the bottom of the bent part 44 is provided with the plug-in part 42, the bent part 44 is used to shield the liquid medicine, prevent the liquid medicine from spreading from above the first clamping arm body 33 and the first clamping arm body 35, and can also guide the liquid medicine to flow back by using the inclined surface.

[0044] Referring to Figure 4 As shown in the utility model, in one embodiment of the utility model, the bottom of the bent part 44 is provided with a reinforcing convex part 43, the reinforcing convex part 43 is located on the side of the plug-in part 42 relative to the first clamping arm body 33, and the reinforcing convex part 43 abuts against the first clamping arm body 33, the reinforcing convex part 43 is used to increase the stability of the bent part 44, thereby improving the plug-in stability of the plug-in part 42 and the plug-in slot 32.

[0045] Referring to Figure 1 And Figure 5 As shown in the utility model, in one embodiment of the utility model, the lower water retaining cover 5 is arranged below the conveying assembly, is used to horizontally block the liquid medicine splashed below the conveying assembly, and specifically, the lower water retaining cover 5 comprises a water retaining convex part 52 and second clamping arm bodies 55 and 51 symmetrically arranged on both sides of the water retaining convex part 52, the second clamping arm bodies 55 and 51 clamp the side wall from both sides, so that the lower water retaining cover 5 is stably sleeved on the conveying port 11, the installation and maintenance difficulty of the lower water retaining cover 5 is greatly reduced, the water retaining convex part 52 is located in the conveying port 11 and extends along the edge of the conveying port 11, can block the gap that the traditional water retaining plate cannot cover, and prevents liquid from escaping from the gap between the conveying port 11 and the roller 2.

[0046] Referring to Figure 5 As shown in the utility model, in one embodiment of the utility model, the water retaining convex part 52, the second clamping arm bodies 55 and 51 are integrally formed, and the second clamping arm bodies 55 and 51 have a certain elasticity.

[0047] Referring to Figure 5As shown in the utility model, in one embodiment of the utility model, the second clamping arm body 55 and the second clamping arm body 51 are each provided with a third clamping portion 53, the third clamping portion 53 is clamped with the clamping groove 13, multi-stage fixing of the upper water baffle 4 is realized, so that the second clamping arm body 55 and the second clamping arm body 51 can also be clamped on the conveying port 11 in the case of lacking clamping force, the clamping principle of the third clamping portion 53 and the clamping groove 13 is similar to the clamping of the first clamping portion 34 and the clamping groove 12, and will not be repeated.

[0048] In one embodiment of the utility model, the water baffle convex part 52 extends upwards between two horizontally adjacent rollers 2, and the rollers 2 and the water baffle convex part 52 form an up-and-down staggered blocking structure, which blocks the horizontal direction of the transversely splashed liquid medicine, further reduces the phenomenon that the liquid medicine and the cleaning liquid escape from below the conveying assembly to the adjacent tank body 1.

[0049] Referring to Figure 5 As shown in the utility model, in one embodiment of the utility model, the water baffle convex part 52 is provided with a circular arc concave surface 54 on both sides along the edge direction of the conveying port 11, the circular arc concave surface 54 guides the liquid medicine dripping from above to flow back to the tank body 1, reduces stagnation and secondary splashing, and can also avoid interference between the water baffle convex part 52 and the roller 2.

[0050] Referring to Figure 1 As shown in the utility model, in one embodiment of the utility model, the clamping groove 12 and the clamping groove 13 are arranged above and below the conveying port 11 respectively, so that the first clamping portion 34 and the clamping groove 12, and the third clamping portion 53 and the clamping groove 13 can be clamped flexibly and quickly.

[0051] Referring to Figure 3 As shown in the utility model, in one embodiment of the utility model, the thickness of the partition body 31 gradually decreases from top to bottom, the water mist liquid on the partition body 31 can be condensed into water droplets and gathered, and the water droplets are prevented from flowing disorderly.

[0052] In one embodiment of the utility model, the distance between the first clamping arm body 33 and the first clamping arm 35 is less than or equal to twice the wall thickness of the tank body 1, when two tank bodies 1 are closely arranged side by side, the first clamping arm body 33 and the first clamping arm 35 clamp the adjacent tank walls through elastic force respectively, so that the partition body 31 is located between the two abutting conveying ports 11.

[0053] In one embodiment of the utility model, the distance between the first clamping arm body 33 and the first clamping arm 35 is less than the wall thickness of the tank body 1, the first clamping arm body 33 and the first clamping arm 35 can clamp the tank wall, so that the partition body 31 is located in one conveying port 11.

[0054] In an embodiment of the utility model, the depth of the clamping groove 13 and the clamping groove 12 is 1mm.

[0055] The working principle of the splash-proof water baffle device is:

[0056] After the cleaning and spraying work starts, above the conveying assembly, the liquid medicine splashes to the surface of the upper water baffle cover 4, the upper water baffle cover 4 horizontally blocks the liquid medicine to prevent it from splashing to the partition plate 3, finally, the liquid medicine condenses into water droplets on the surface of the upper water baffle cover 4 and flows back to the tank body 1, at the same time, the partition plate 3 horizontally blocks the misty liquid medicine diffused to its surface, preventing it from diffusing out of the conveying port 11 and entering the adjacent tank body 1 or outside the tank body 1, finally, the misty liquid medicine condenses into water droplets on the surface of the partition plate 3 and drops back to the tank body 1; below the conveying assembly, the lower water baffle cover 5 horizontally blocks the splashing liquid medicine, preventing it from splashing out of the conveying port 11 and diffusing to the adjacent tank body 1 or outside the tank body 1, causing environmental pollution, finally, the liquid medicine flows back to the tank body 1 on the circular arc concave surface 54.

[0057] Obviously, the above embodiments are only examples for clearly illustrating, and are not limited to the embodiments. For ordinary skilled in the art, other different forms of changes or variations can be made on the basis of the above description. Here, all the embodiments need not and cannot be exhausted. The obvious changes or variations derived therefrom are still within the protection scope of the utility model.

Claims

1. A splash-proof and water-blocking device, comprising a tank and a conveying assembly disposed within the tank, wherein conveying ports are provided on both opposite side walls of the tank, and the conveying assembly includes a plurality of rollers arranged vertically, the rollers conveying workpieces through the conveying ports, characterized in that, It also includes, A snap-fit ​​slot is provided on the slot body; The partition includes a partition body and first clamping arms symmetrically arranged on both sides of the partition body along the thickness direction. The first clamping arms clamp the side walls from both sides. The partition body is located at the conveying port and extends from top to bottom between two horizontally adjacent rollers. The first clamping arm is provided with a first snap-fit ​​part, which snaps into the snap-fit ​​groove.

2. The anti-splash and water-blocking device according to claim 1, characterized in that, It also includes an upper water baffle disposed above the conveying assembly, and the upper water baffle is located on both sides or one side of the conveying port. The upper water baffle includes a baffle body, which is disposed opposite to the partition body.

3. The anti-splash water-blocking device according to claim 2, characterized in that, The groove is provided with a buckle, and the lower end of the baffle body is provided with a second snap-fit ​​part, which snaps into the buckle.

4. The anti-splash water-blocking device according to claim 2, characterized in that, The first clamping arm is provided with an upward-opening insertion groove, and the upper end of the baffle body is provided with an insertion part, which is inserted into the insertion groove.

5. A splash-proof and water-blocking device according to claim 4, characterized in that, The upper end of the baffle body is bent toward the first clamping arm to form a bent portion, and the bottom of the bent portion is provided with the insertion portion.

6. The anti-splash water-blocking device according to claim 5, characterized in that, The bottom of the bent portion is provided with a reinforcing protrusion, which is located on the side of the insertion portion relative to the first clamping arm body, and the reinforcing protrusion abuts against the first clamping arm body.

7. The anti-splash water-blocking device according to claim 1, characterized in that, It also includes a lower water baffle disposed below the conveying assembly. The lower water baffle includes a water baffle protrusion and a second clamping arm symmetrically disposed on both sides of the water baffle protrusion. The second clamping arm clamps the side wall from both sides, and the water baffle protrusion is located inside the conveying port and extends along the edge of the conveying port.

8. A splash-proof and water-blocking device according to claim 7, characterized in that, The second clamping arm is provided with a third locking part, which engages with the locking groove.

9. A splash-proof and water-blocking device according to claim 7, characterized in that, The water-blocking protrusion extends upward between two horizontally adjacent rollers.

10. A splash-proof and water-blocking device according to claim 7, characterized in that, The water-blocking protrusion has arc-shaped concave surfaces on both sides along the edge direction of the conveying port.

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