Chain type machine liquid medicine circulation system

By introducing a transfer unit into the chain-type machine's liquid circulation system, the problems of liquid waste during tank cleaning and evaporation during standby are solved, achieving efficient utilization of the liquid and cost savings.

CN224050167UActive Publication Date: 2026-03-27CHINT NEW ENERGY TECH CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2025-04-14
Publication Date
2026-03-27

AI Technical Summary

Technical Problem

The existing chain-type machine's liquid circulation system requires emptying the liquid when cleaning the tank, resulting in waste and increased wastewater treatment costs. Furthermore, the liquid evaporates during standby, leading to increased costs.

Method used

An intermediate transfer section is introduced, including a second auxiliary tank and a transfer pipeline. When cleaning or in standby mode, the liquid medicine can be transferred to the second auxiliary tank through the transfer pipeline, and then returned to the first auxiliary tank after cleaning, thus avoiding the liquid medicine from being drained and evaporating.

Benefits of technology

It effectively avoids waste of medicine and wastewater treatment costs, reduces the volatilization of medicine, and improves the utilization efficiency of medicine.

✦ Generated by Eureka AI based on patent content.

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Patent Text Reader

Abstract

The utility model provides a chained machine liquid medicine circulation system which comprises a circulation part, a liquid medicine circulation part and a liquid medicine circulation part, the circulation part comprises a main tank body, a first auxiliary tank body and a circulation pipeline, the main tank body is communicated with the first auxiliary tank body through the circulation pipeline, and liquid medicine circulates between the main tank body and the first auxiliary tank body through the circulation pipeline; the transfer part comprises a second auxiliary tank body and a transfer pipeline, and the second auxiliary tank body is communicated with the first auxiliary tank body through the transfer pipeline or is respectively communicated with the main tank body and the first auxiliary tank body through the transfer pipeline; the liquid medicine flows into the second auxiliary tank body from the circulating part through the transfer pipeline, and flows back to the first auxiliary tank body from the second auxiliary tank body through the transfer pipeline; and the discharging part is communicated with the main tank body and / or the first auxiliary tank body so as to discharge the liquid medicine in the circulating part. When the tank body is cleaned or the production line is in a standby state, the liquid medicine can be transferred from the circulation part to the transfer part for temporary storage, and waste of the liquid medicine can be prevented.
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Description

TECHNICAL FIELD

[0001] The utility model relates to photovoltaic technology field especially relates to a chain type machine table liquid medicine circulation system. BACKGROUND

[0002] Chain type machine table liquid medicine circulation system is a kind of common industrial equipment in manufacturing industry, it is used to realize the circulation of liquid medicine.For photovoltaic manufacturing industry, chain type machine table liquid medicine circulation system is mainly applied to etching link.Liquid medicine circulation can effectively reduce production cost, improve production efficiency and reduce environmental pollution.

[0003] Please refer to Figure 1 , Figure 1 It is the structure diagram of chain type machine table liquid medicine circulation system in prior art.As shown in the figure, the existing chain type machine table liquid medicine circulation system includes main groove tank body 100, auxiliary groove tank body 101, liquid pump 102, liquid pump liquid inlet pipe 103, first valve 103', liquid pump liquid outlet pipe 104, main groove liquid inlet pipe 105, auxiliary groove liquid inlet pipe 106, auxiliary groove liquid outlet pipe 107, main groove liquid outlet pipe 108, second valve 108', waste liquid discharge pipe 109 and third valve 09'.Among them, main groove tank body 100 is arranged above auxiliary groove tank body 101;Auxiliary groove tank body 101 is connected with the liquid inlet of liquid pump 102 through liquid pump liquid inlet pipe 103, first valve 103' is arranged on liquid pump liquid inlet pipe 103, the liquid outlet of liquid pump 102 is connected with main groove liquid inlet pipe 105 through liquid pump liquid outlet pipe 104, and main groove liquid inlet pipe 105 is connected to main groove tank body 100;Main groove tank body 100 and auxiliary groove tank body 101 are connected to waste liquid discharge pipe 109 through main groove liquid outlet pipe 108 and auxiliary groove liquid outlet pipe 107 respectively, second valve 108' is arranged on main groove liquid outlet pipe 108 close to the position of main groove tank 200, third valve 109' is arranged on waste liquid discharge pipe 109 close to the position of auxiliary groove tank 201;One end of auxiliary groove liquid inlet pipe 106 is communicated with auxiliary groove tank 201, the other end is connected to the position of main groove discharge pipe 108 between main groove tank 200 and second valve 108', and auxiliary groove tank 200 is communicated through main groove discharge pipe 108.

[0004] When the chain-type machine's liquid circulation system is processing photovoltaic semi-finished products or the production line is in standby mode, the liquid pump 102 is started, the first valve 103' is opened, and the second valve 108' and the third valve 109' are closed. In this state, the liquid stored in the auxiliary tank 101 enters the liquid pump 102 through the liquid pump inlet pipe 103. Under the action of the liquid pump 102, it flows into the main tank 100 through the liquid pump outlet pipe 104 and the main tank inlet pipe 105 to process the photovoltaic semi-finished products or wait for processing. At the same time, the liquid in the main tank 100 enters the auxiliary tank inlet pipe 106 through the main tank outlet pipe 108 and flows into the auxiliary tank 100 through the auxiliary tank inlet pipe 106, thus forming a continuous circulation of the liquid. When the production line is cleaning the main tank 100 and the auxiliary tank 101, the liquid pump 102 is turned off, and the first valve 103' is closed, while the second valve 108' and the third valve 109' are open. In this state, the liquid in the main tank 100 and the auxiliary tank 101 is discharged into the waste liquid discharge pipe 109 through the main tank outlet pipe 108 and the auxiliary tank outlet pipe 107, respectively.

[0005] The main shortcomings of the existing chain-type machine liquid circulation system are: (1) When the production line cleans the main tank and the auxiliary tank, all the liquid inside needs to be emptied. After cleaning, the liquid needs to be re-mixed, which will undoubtedly lead to waste of liquid and increase the cost of wastewater treatment; (2) There is usually an exhaust device near the main tank. When the production line is on standby, the liquid in the main tank will evaporate with the exhaust. If the standby time is too long, chemicals need to be added to the main tank to maintain the original concentration of the liquid, which will also increase the cost of using the liquid. Utility Model Content

[0006] To overcome the aforementioned deficiencies in the prior art, this utility model provides a chain-type machine tool liquid circulation system, which includes:

[0007] The circulation section, transfer section, and emission section;

[0008] The circulation section includes a main tank, a first auxiliary tank, and a circulation pipeline. The main tank is connected to the first auxiliary tank through the circulation pipeline, and the medicine circulates between the main tank and the first auxiliary tank through the circulation pipeline.

[0009] The transfer part comprises a second sub-tank tank body and a transfer pipeline, the second sub-tank tank body is communicated with the first sub-tank tank body through the transfer pipeline, or is respectively communicated with the main-tank tank body and the first sub-tank tank body through the transfer pipeline, and the liquid medicine flows into the second sub-tank tank body from the tank body in the circulation part through the transfer pipeline and flows back to the first sub-tank tank body from the second sub-tank tank body through the transfer pipeline.

[0010] The discharge part is communicated with the main-tank tank body and / or the first sub-tank tank body, and the liquid medicine in the tank body in the circulation part is discharged through the discharge part.

[0011] According to one aspect of the utility model, in the chain type machine table liquid medicine circulation system, the first sub-tank tank body is arranged below the main-tank tank body, and the second sub-tank tank body is arranged at the same height as the first sub-tank tank body, or the first sub-tank tank body is arranged below the main-tank tank body, and the second sub-tank tank body is arranged below the first sub-tank tank body.

[0012] According to another aspect of the utility model, in the chain type machine table liquid medicine circulation system, the circulation pipeline comprises a main-tank liquid inlet pipe, a first sub-tank liquid inlet pipe, a first liquid pump, a first liquid pump connecting pipe, a second liquid pump connecting pipe and a first valve, wherein the first liquid pump is a one-way pump, one end of the first liquid pump connecting pipe is communicated with the first sub-tank tank body, the other end is connected with a liquid inlet of the first liquid pump, a liquid outlet of the first liquid pump is connected with one end of the second liquid pump connecting pipe, the other end of the second liquid pump connecting pipe is communicated with the main-tank tank body through the main-tank liquid inlet pipe, the first valve is arranged on the first liquid pump connecting pipe, and the first sub-tank liquid inlet pipe is respectively communicated with the first sub-tank tank body and the main-tank tank body.

[0013] According to still another aspect of the utility model, in the chain type machine table liquid medicine circulation system, when the first sub-tank tank body is arranged below the main-tank tank body, the second sub-tank tank body is arranged at the same height as the first sub-tank tank body, and the second sub-tank tank body is communicated with the first sub-tank tank body through the transfer pipeline, the transfer pipeline comprises a second liquid pump, a third liquid pump connecting pipe, a fourth liquid pump connecting pipe and a second valve, wherein the second liquid pump is a two-way pump, one end of the third liquid pump connecting pipe is communicated with the first sub-tank tank body, the other end is connected with a first liquid port of the second liquid pump, a second liquid port of the second liquid pump is communicated with the second sub-tank tank body through the fourth liquid pump connecting pipe, and the second valve is arranged on the third liquid pump connecting pipe.

[0014] According to another aspect of the utility model, in the chain type machine table liquid circulating system, first vice tank body setting below main tank body, second vice tank body setting below first vice tank body, and second vice tank body is communicated with main tank body and first vice tank body through transfer pipeline, transfer pipeline includes third liquid pump, third liquid pump connecting pipe, fourth liquid pump connecting pipe, second vice tank liquid inlet pipe, second valve and third valve, wherein, third liquid pump is one way pump, one end of third liquid pump connecting pipe is communicated with first vice tank body, other end is connected with liquid inlet of third liquid pump, liquid outlet of third liquid pump is communicated with second vice tank body through fourth liquid pump connecting pipe, second vice tank liquid inlet pipe is communicated with second vice tank body and first vice tank body respectively, second valve is arranged on third liquid pump connecting pipe, third valve is arranged on second vice tank liquid inlet pipe.

[0015] According to another aspect of the utility model, in the chain type machine table liquid circulating system, first vice tank body setting below main tank body, second vice tank body setting below first vice tank body, and second vice tank body is communicated with main tank body and first vice tank body through transfer pipeline respectively, transfer pipeline includes third liquid pump, third liquid pump connecting pipe, fourth liquid pump connecting pipe, second vice tank liquid inlet pipe, second valve and third valve, wherein, third liquid pump is one way pump, one end of third liquid pump connecting pipe is communicated with first vice tank body, other end is connected with liquid inlet of third liquid pump, liquid outlet of third liquid pump is communicated with second vice tank body through fourth liquid pump connecting pipe, one end of second vice tank liquid inlet pipe is communicated with second vice tank body, other end of second vice tank liquid inlet pipe is connected to first vice tank liquid inlet pipe and is communicated with main tank body through first vice tank liquid inlet pipe, second valve is arranged on third liquid pump connecting pipe, third valve is arranged on second vice tank liquid inlet pipe.

[0016] According to another aspect of the utility model, in the chain type machine table liquid circulating system, discharge part is communicated with main tank body and first vice tank body respectively, wherein, discharge part includes liquid discharge pipe, fourth valve and fifth valve, liquid discharge pipe includes first liquid inlet, second liquid inlet and discharge port, first liquid inlet is communicated with main tank body, second liquid inlet is connected with vice tank body, fourth valve is arranged on liquid discharge pipe on the position close to main tank body, fifth valve is arranged on liquid discharge pipe on the position close to first vice tank body.

[0017] According to another aspect of the utility model, in the chain type machine table liquid medicine circulating system, all liquid pumps in the chain type machine table liquid medicine circulating system are circulating pumps.

[0018] According to another aspect of the utility model, in the chain type machine table liquid medicine circulating system, all liquid pumps in the chain type machine table liquid medicine circulating system are circulating pumps.

[0019] According to another aspect of the utility model, in the chain type machine table liquid medicine circulating system, all valves in the chain type machine table liquid medicine circulating system are pneumatic valves.

[0020] The chain type machine table liquid medicine circulating system provided by the utility model includes a circulating part, a transfer part and a discharge part.The circulating part includes a main tank body, a first auxiliary tank body and a circulating pipeline, the main tank body is communicated with the first auxiliary tank body through the circulating pipeline, and liquid medicine circulates between the main tank body and the first auxiliary tank body through the circulating pipeline.The transfer part includes a second auxiliary tank body and a transfer pipeline, the second auxiliary tank body is communicated with the first auxiliary tank body through the transfer pipeline, or is communicated with the main tank body and the first auxiliary tank body through the transfer pipeline respectively, liquid medicine flows from the tank body in the circulating part into the second auxiliary tank body through the transfer pipeline, and flows back to the first auxiliary tank body from the second auxiliary tank body through the transfer pipeline.The discharge part is communicated with the main tank body and / or the first auxiliary tank body, and liquid medicine in the tank body of the circulating part is discharged through the discharge part.The chain type machine table liquid medicine circulating system provided by the utility model is additionally provided with the transfer part in addition to the conventional circulating part and discharge part, when the main tank body and the first auxiliary tank body in the circulating part need to be cleaned, liquid medicine in the tank body of the circulating part can be caused to flow into the second auxiliary tank body through the transfer pipeline first, and then caused to flow back to the first auxiliary tank body through the transfer pipeline after cleaning, so that liquid medicine does not need to be emptied like the prior art, thereby effectively avoiding waste of liquid medicine, and correspondingly avoiding increase of waste water treatment cost.In addition, when a production line is on standby, liquid medicine can also be transferred to the second auxiliary tank body through the transfer pipeline first, and then transferred back to the circulating part through the transfer pipeline after the production line is on standby, so that liquid medicine volatilization problem during the standby process of the production line can be effectively avoided, and liquid medicine can be saved. BRIEF DESCRIPTION OF DRAWINGS

[0021] Other features, objects and advantages of the utility model will become more apparent from the following detailed description of non-restrictive embodiments made with reference to the accompanying drawings:

[0022] Figure 1 It is a structure schematic view of the chain type machine table liquid medicine circulating system in the prior art;

[0023] Figure 2 is a structural schematic diagram of a chain type machine table liquid circulating system according to one specific embodiment of the present application;

[0024] Figure 3 is a structural schematic diagram of a chain type machine table liquid circulating system according to another specific embodiment of the present application;

[0025] Figure 4 is a structural schematic diagram of a chain type machine table liquid circulating system according to still another specific embodiment of the present application.

[0026] The same or similar reference signs in the drawings represent the same or similar components.

[0027] Reference sign explanation

[0028] 100-main tank body, 101-sub tank body, 102-liquid pump, 103-liquid pump liquid inlet pipe, 103'-first valve, 104-liquid pump liquid outlet pipe, 105-main tank liquid inlet pipe, 106-sub tank liquid inlet pipe, 107-sub tank liquid outlet pipe, 108-main tank liquid outlet pipe, 108'-second valve 108', 109-waste liquid discharge pipe, 109'-third valve;

[0029] 200-main tank body, 201-first sub tank body, 202-first liquid pump, 203-first liquid pump connecting pipe, 203'-first valve, 204-second liquid pump connecting pipe, 205-main tank liquid inlet pipe, 206-first sub tank liquid inlet pipe, 207-first sub tank liquid outlet pipe, 208-main tank liquid outlet pipe, 208'-fourth valve, 209-waste liquid discharge pipe, 209'-fifth valve, 210-second sub tank body, 211-second liquid pump, 212-third liquid pump connecting pipe, 212'-second valve, 213-fourth liquid pump connecting pipe, 214-second sub tank liquid inlet pipe, 214'-third valve. DETAILED DESCRIPTION

[0030] In order to better understand and illustrate the present application, the present application will be further described in detail below in conjunction with the drawings.

[0031] The chain type machine table liquid circulating system provided by the present application comprises:

[0032] a circulating part, a transfer part and a discharge part;

[0033] The circulating part comprises a main tank body, a first sub tank body and a circulating pipeline, the main tank body is communicated with the first sub tank body through the circulating pipeline, and liquid is circulated between the main tank body and the first sub tank body through the circulating pipeline;

[0034] The transfer part comprises a second sub-tank tank body and a transfer pipeline, the second sub-tank tank body is communicated with the first sub-tank tank body through the transfer pipeline, or is respectively communicated with the main-tank tank body and the first sub-tank tank body through the transfer pipeline, and the liquid medicine flows into the second sub-tank tank body from the tank body in the circulation part through the transfer pipeline and returns to the first sub-tank tank body from the second sub-tank tank body through the transfer pipeline.

[0035] The discharge part is communicated with the main-tank tank body and / or the first sub-tank tank body, and the liquid medicine in the tank body in the circulation part is discharged through the discharge part.

[0036] The chain machine table liquid medicine circulation system will be described in detail below.

[0037] Specifically, the chain machine table liquid medicine circulation system comprises a circulation part. In the embodiment, the circulation part comprises a main-tank tank body, a first sub-tank tank body and a circulation pipeline, wherein the circulation pipeline is arranged between the main-tank tank body and the first sub-tank tank body and is communicated with the main-tank tank body and the first sub-tank tank body respectively. The first sub-tank tank body is used for storing liquid medicine required for processing, the circulation pipeline is used for forming circulation of the liquid medicine between the first sub-tank tank body and the main-tank tank body, and the main-tank tank body is used for processing semi-finished products in the state of liquid medicine circulation, for example, etching photovoltaic semi-finished products. The specific layout mode of the main-tank tank body and the first sub-tank tank body and the specific structure of the circulation pipeline are not limited, any tank body layout mode and circulation pipeline structure which can realize circulation of the liquid medicine between the first sub-tank tank body and the main-tank tank body are suitable for the utility model, and all possible tank body layout modes and circulation pipeline structures are not listed one by one for the sake of simplicity.

[0038] The chain type machine table liquid medicine circulating system further comprises a transfer part. In the embodiment, the transfer part comprises a second auxiliary groove groove body and a transfer pipeline, wherein the transfer pipeline is arranged between the circulating part and the second auxiliary groove groove body. In a first case, the transfer pipeline is arranged between the first auxiliary groove groove body and the second auxiliary groove groove body and is in communication with both of them respectively; in a second case, the transfer pipeline is arranged between the main groove groove body, the first auxiliary groove groove body and the second auxiliary groove groove body and is in communication with all of them respectively. When the main groove groove body and the first auxiliary groove groove body are cleaned or the production line is in standby, the transfer pipeline is used for transferring the liquid medicine in the circulating part groove body into the second auxiliary groove groove body, and the second auxiliary groove groove body is used for temporarily storing the liquid medicine; after the main groove groove body and the first auxiliary groove groove body are cleaned or the production line standby ends, the transfer pipeline is further used for conveying the liquid medicine in the second auxiliary groove groove body back into the first auxiliary groove groove body. The specific layout mode of the second auxiliary groove groove body and the specific structure of the transfer pipeline are not limited, and any layout mode and structure of the transfer pipeline which can realize the transfer of the liquid medicine from the circulating part to the transfer part and the conveying back of the liquid medicine from the transfer part to the circulating part are applicable to the utility model, and all possible layout modes of the second auxiliary groove groove body and all possible structures of the transfer pipeline are not enumerated one by one for the sake of simplicity.

[0039] The chain type machine table liquid medicine circulating system further comprises a discharge part. In the embodiment, the discharge part is arranged between the main groove groove body and the first auxiliary groove groove body and is in communication with the main groove groove body and the first auxiliary groove groove body respectively, wherein the discharge part is used for discharging the liquid medicine in the circulating part groove body. The discharge part is in communication with the main groove groove body and the first auxiliary groove groove body at the same time, which is beneficial to improving the discharging efficiency of the liquid medicine. In other embodiments, according to actual design requirements, the discharge part can be in communication with only the main groove groove body or only the first auxiliary groove groove body, and the utility model is not limited to this. In addition, the specific structure of the discharge part is not limited, and any structure which can realize the emptying of the liquid medicine from the circulating part is applicable to the discharge part in the utility model, and all possible structures of the discharge part are not enumerated one by one for the sake of simplicity.

[0040] The chain-type machine medicine circulation system provided by this utility model, in addition to the conventional circulation and discharge sections, also includes a transfer section. When cleaning is required in the tank of the circulation section, the medicine in the tank can flow into the second auxiliary tank through the transfer pipeline. After cleaning, the medicine can flow back into the first auxiliary tank through the transfer pipeline. In this way, there is no need to empty the medicine as in existing technologies, thus effectively avoiding waste of medicine and correspondingly avoiding increased wastewater treatment costs. In addition, when the production line is in standby mode, the medicine can also be transferred to the second auxiliary tank through the transfer pipeline. After the production line is in standby mode, the medicine can be transferred back to the circulation section through the transfer pipeline. This effectively avoids the problem of medicine evaporation with exhaust air during production line standby, which is conducive to the conservation of medicine.

[0041] The following will combine Figures 2 to 4 The chain-type machine liquid circulation system provided by this utility model will be described with reference to specific embodiments.

[0042] In one specific embodiment, such as Figure 2 As shown, the chain-type machine's liquid circulation system includes a circulation section, a transfer section, and a discharge section. The circulation section includes a main tank 200, a first auxiliary tank 201, and circulation pipelines. The circulation pipelines further include a first liquid pump connecting pipe 203, a first liquid pump 202, a first valve 203', a second liquid pump connecting pipe 204, a main tank inlet pipe 205, and a first auxiliary tank inlet pipe 206. The transfer section includes a second auxiliary tank 210 and transfer pipelines. The transfer pipelines further include a third liquid pump connecting pipe 212, a second liquid pump 211, a fourth liquid pump connecting pipe 213, and a second valve 212'. The discharge section includes a discharge pipe, a fourth valve 208', and a fifth valve 209'. The discharge pipe further includes a main tank outlet pipe 208, a first auxiliary tank outlet pipe 207, and a waste liquid discharge pipe 209. In this embodiment, the first liquid pump 202 is implemented as a unidirectional pump (i.e., a pump that only allows fluid to flow in one direction), and the second liquid pump 211 is implemented as a bidirectional pump (i.e., a pump that can achieve bidirectional fluid flow).

[0043] In this embodiment, the main tank body 200 is arranged above the first sub-tank body 201. One end of the main tank outlet pipe 208 (i.e. the first liquid inlet of the whole liquid discharge pipe) is in communication with the bottom of the main tank body 200, and the other end is connected to the waste liquid discharge pipe 209. One end of the first sub-tank outlet pipe 207 (i.e. the second liquid inlet of the whole liquid discharge pipe) is in communication with the bottom of the first sub-tank body 201, and the other end is connected to the waste liquid discharge pipe 209. The fourth valve 208' is arranged on the main tank outlet pipe 208 near the main tank body 200, and the fifth valve 209' is arranged on the waste liquid discharge pipe 209 near the first sub-tank body 201. One end of the first liquid pump connecting pipe 203 is in communication with the bottom of the first sub-tank body 201, and the other end is connected to the liquid inlet of the first liquid pump 202. The liquid outlet of the first liquid pump 202 is connected to one end of the second liquid pump connecting pipe 204, and the other end of the second liquid pump connecting pipe 204 is connected to the liquid inlet of the main tank liquid inlet pipe 205. The liquid outlet of the main tank liquid inlet pipe 205 is in communication with the main tank body 200. One end of the first sub-tank liquid inlet pipe 206 is in communication with the first sub-tank body 201, and the other end is connected to the main tank outlet pipe 208 between the main tank body 200 and the fourth valve 208', and forms communication with the main tank body 200 through the main tank outlet pipe 208. The second sub-tank body 210 is arranged at the same height as the first sub-tank body 201. One end of the third liquid pump connecting pipe 212 is in communication with the bottom of the first sub-tank body 201, and the other end is connected to the first liquid inlet of the second liquid pump 211. The second liquid inlet of the second liquid pump 211 is connected to one end of the fourth liquid pump connecting pipe 213, and the other end of the fourth liquid pump connecting pipe 213 is in communication with the bottom of the second sub-tank body 210.

[0044] When Figure 2 When the chain machine liquid circulating system shown in the figure is used to process photovoltaic semi-finished products, the first liquid pump 202 is started, the second liquid pump 211 is closed, the first valve 203' is in an open state, and the second valve 212', the fourth valve 208' and the fifth valve 209' are in a closed state. In this state, the liquid stored in the first sub-tank body 201 enters the first liquid pump 202 through the first liquid pump connecting pipe 203, and under the action of the first liquid pump 202, enters the main tank liquid inlet pipe 205 through the second liquid pump connecting pipe 204, and enters the main tank body 200 through the main tank liquid inlet pipe 205 to process photovoltaic semi-finished products. At the same time, since the main tank body 200 is arranged above the first sub-tank body 201, the liquid in the main tank body 200 directly enters the first sub-tank liquid inlet pipe 206 through the main tank outlet pipe 208 under the action of gravity, and flows back to the first sub-tank body 201 through the first sub-tank liquid inlet pipe 206. The liquid flowing back to the first sub-tank body 201 repeats the above process, so that the circulation of the liquid between the first sub-tank body 201 and the main tank body 200 is realized, thereby processing photovoltaic semi-finished products.

[0045] When Figure 2When the main tank 200 and the first auxiliary tank 201 in the chain machine liquid circulating system need to be cleaned, or the production line is waiting, the first liquid pump 202 is closed and the second liquid pump 211 is started, and the first valve 203', the fourth valve 208' and the fifth valve 209' are in the closed state, and the second valve 212' is in the open state. In this state, the liquid in the main tank 200 enters the first auxiliary tank 206 through the main tank outlet pipe 208, and then enters the first auxiliary tank 201 through the first auxiliary tank inlet pipe 206. The liquid in the first auxiliary tank 201 enters the second liquid pump 211 through the third liquid pump connecting pipe 212 from the first liquid port of the second liquid pump 211 (at this time, the first liquid port is used as the inlet of the second liquid pump 211), and then enters the fourth liquid pump connecting pipe 213 from the second liquid port of the second liquid pump 211 (at this time, the second liquid port is used as the outlet of the second liquid pump 211) under the action of the second liquid pump 211, and then enters the second auxiliary tank 210 through the fourth liquid pump connecting pipe 213. When all the liquid enters the second auxiliary tank 210, the second liquid pump 211 and the second valve 212' are closed, and then the main tank 200 and the first auxiliary tank 201 can be cleaned or wait for the end of the production line standby. It should be noted that in other embodiments, according to the actual design requirements, the second liquid pump 211 can be closed first, and then started when part or all of the liquid in the main tank 200 enters the first auxiliary tank 201, so that the liquid in the first auxiliary tank 201 enters the second auxiliary tank 210. After cleaning or the end of the production line standby, when the chain machine liquid circulating system processes photovoltaic semi-finished products again, the first liquid pump 202 and the second liquid pump 211 are started, the first valve 203' and the second valve 212' are opened, and the fourth valve 208' and the fifth valve 209' are kept closed. In this state, the liquid in the second auxiliary tank 210 enters the second liquid pump 211 from the second liquid port of the second liquid pump 211 (at this time, the second liquid port is used as the inlet of the second liquid pump 211) through the fourth liquid pump connecting pipe 213, and the second liquid pump 211 is controlled to change the direction of rotation, so that the liquid enters the third liquid pump connecting pipe 212 from the first liquid port of the second liquid pump 211 (at this time, the first liquid port is used as the outlet of the second liquid pump 211), and then enters the first auxiliary tank 201 through the third liquid pump connecting pipe 212. The liquid in the first auxiliary tank 201 circulates between the first auxiliary tank 201 and the main tank 200 through the circulating pipeline. When all the liquid in the second auxiliary tank 210 enters the first auxiliary tank 201, the second liquid pump 211 and the second valve 212' are closed.It should be noted that in other embodiments, according to actual design requirements, the first liquid pump 202 and the first valve 203' can also be closed first, and then the first liquid pump 202 is started and the first valve 203' is opened after part or all of the liquid medicine in the second sub-tank 210 enters the first sub-tank 201, so that the liquid medicine entering the first sub-tank 201 circulates between the first sub-tank 201 and the main tank 200.

[0046] When Figure 2 When the liquid medicine in the main tank 200 and the first sub-tank 201 in the chain machine liquid circulating system as shown needs to be emptied, the first liquid pump 202 and the second liquid pump 211 are in a closed state, the first valve 203', the second valve 212' are in a closed state, and the fourth valve 208' and the fifth valve 209' are in an open state. In this state, the liquid medicine in the main tank 200 and the first sub-tank 201 enters the waste liquid discharge pipe 209 through the main tank outlet pipe 208 and the first sub-tank outlet pipe 207 respectively, and is discharged through the waste liquid discharge pipe 209 (the outlet of the waste liquid discharge pipe 209 discharging the liquid medicine is the discharge port of the entire liquid discharge pipe).

[0047] In another specific embodiment, as shown in Figure 3 The chain machine liquid circulating system includes a circulating part, a transfer part, and a discharge part. Among them, Figure 3 The difference between the system as shown in Figure 2 For the sake of simplicity, only the structure of the transfer part will be described here, and the structure of the circulating part and the discharge part will not be repeated.

[0048] In this embodiment, the transfer part includes a second sub-tank 210 and a transfer pipeline. The second sub-tank 210 is arranged below the first sub-tank 201. The transfer pipeline further includes a third liquid pump connection pipe 212, a second liquid pump 211, a fourth liquid pump connection pipe 213, a second sub-tank inlet pipe 214, a second valve 212', and a third valve 214'. The second liquid pump 211 is implemented as a one-way pump. Specifically, one end of the third liquid pump connection pipe 212 is in communication with the bottom of the first sub-tank 201, and the other end is connected to the liquid inlet of the second liquid pump 211. The liquid outlet of the second liquid pump 211 is connected to one end of the fourth liquid pump connection pipe 213, and the other end of the fourth liquid pump connection pipe 213 is in communication with the second sub-tank 210. The second valve 212' is arranged on the third liquid pump connection pipe 212. One end of the second sub-tank inlet pipe 214 is in communication with the first sub-tank 201, and the other end is in communication with the second sub-tank 210. The third valve 214' is arranged on the second sub-tank inlet pipe 214.

[0049] When Figure 3When the chain-type machine's chemical circulation system processes photovoltaic semi-finished products, the first liquid pump 202 is started, the second liquid pump 211 is turned off, and the first valve 203' is opened while the second valve 212', third valve 214', fourth valve 208', and fifth valve 209' are closed. In this state, the chemical solution circulates between the first auxiliary tank 201 and the main tank 200 through the circulation pipeline. The circulation process between the first auxiliary tank 201 and the main tank 200 can be referred to the previous text. Figure 2 For the sake of brevity, the contents of the corresponding parts of the system shown will not be described in detail here.

[0050] when Figure 3 When the main tank 200 and the first auxiliary tank 201 in the chain-type pharmaceutical circulation system need cleaning, or when the production line is in standby mode, the first liquid pump 202 and the second liquid pump 211 are shut down, and the first valve 203', second valve 212', fourth valve 208', and fifth valve 209' are closed, while the third valve 214' is open. In this state, the pharmaceutical solution in the main tank 200 enters the first auxiliary tank inlet pipe 206 through the main tank outlet pipe 208, and then enters the first auxiliary tank 201 through the first auxiliary tank inlet pipe 206. The pharmaceutical solution in the first auxiliary tank 201 then enters the second auxiliary tank 210 through the second auxiliary tank inlet pipe 214. After all the pharmaceutical solution has entered the second auxiliary tank 210, the third valve 214' is closed, and cleaning of the main tank 200 and the first auxiliary tank 201 can begin, or the production line can wait for the standby mode to end. After cleaning or production line standby, when the chain-type machine's chemical circulation system processes the photovoltaic semi-finished product again, the first liquid pump 202 and the second liquid pump 211 are started, the third valve 214' is closed, the first valve 203' and the second valve 212' are opened, and the fourth valve 208' and the fifth valve 209' remain closed. In this state, the chemical solution in the second auxiliary tank 210 enters the second liquid pump 211 via the third liquid pump connecting pipe 212, and under the action of the second liquid pump 211, enters the first auxiliary tank 201 via the third liquid pump connecting pipe 212. The chemical solution entering the first auxiliary tank 201 circulates between the first auxiliary tank 201 and the main tank 200 through the circulation pipeline. Once all the chemical solution in the second auxiliary tank 210 has entered the first auxiliary tank 201, the second liquid pump 211 and the second valve 212' are closed.

[0051] when Figure 3When the liquid in the main tank 200 and the first auxiliary tank 201 needs to be emptied, the first liquid pump 202 and the second liquid pump 211 are in the closed state, the first valve 203', the second valve 212' and the third valve 214' are in the closed state, and the fourth valve 208' and the fifth valve 209' are in the open state. In this state, the liquid in the main tank 200 and the first auxiliary tank 201 enters the waste liquid discharge pipe 209 through the main tank liquid outlet pipe 208 and the first auxiliary tank liquid outlet pipe 207 respectively, and is discharged through the waste liquid discharge pipe 209.

[0052] In yet another specific embodiment, as shown in Figure 4 The chain machine liquid circulating system includes a circulating part, a transfer part and a discharge part. Among them, Figure 4 The difference between the system shown in Figure 2 For the sake of simplicity, only the structure of the transfer part is described here, and the structure of the circulating part and the discharge part is not repeated.

[0053] In this embodiment, the transfer part includes a second auxiliary tank 210 and a transfer pipeline. The second auxiliary tank 210 is arranged below the first auxiliary tank 201. The transfer pipeline further includes a third liquid pump connecting pipe 212, a second liquid pump 211, a fourth liquid pump connecting pipe 213, a second auxiliary tank liquid inlet pipe 214, a second valve 212' and a third valve 214', wherein the second liquid pump 211 is realized by a one-way pump. Specifically, one end of the third liquid pump connecting pipe 212 is in communication with the bottom of the first auxiliary tank 201, and the other end is connected to the liquid inlet of the second liquid pump 211. The liquid outlet of the second liquid pump 211 is connected to one end of the fourth liquid pump connecting pipe 213, and the other end of the fourth liquid pump connecting pipe 213 is in communication with the second auxiliary tank 210. The second valve 212' is arranged on the third liquid pump connecting pipe 212. One end of the second auxiliary tank liquid inlet pipe 214 is connected to the first auxiliary tank liquid inlet pipe 206 and forms communication with the main tank 200 through the first auxiliary tank liquid inlet pipe 206 and the main tank liquid outlet pipe 208. The other end of the second auxiliary tank liquid inlet pipe 214 is in communication with the second auxiliary tank 210. The third valve 214' is arranged on the second auxiliary tank liquid inlet pipe 214.

[0054] When the chain machine liquid circulating system shown in Figure 4 When the chain machine liquid circulating system shown in is used for processing photovoltaic semi-finished products, the first liquid pump 202 is started, the second liquid pump 211 is closed, the first valve 203' is in the open state, and the second valve 212', the third valve 214', the fourth valve 208' and the fifth valve 209' are in the closed state. In this state, the liquid is circulated between the first auxiliary tank 201 and the main tank 200 through the circulating pipeline. The circulation process of the liquid between the first auxiliary tank 201 and the main tank 200 can be referred to in the foregoingFigure 2 The contents of the corresponding parts of the system shown are not described here again for the sake of brevity.

[0055] When Figure 4 When the main tank 200 and the first auxiliary tank 201 in the chain machine liquid circulating system shown need to be cleaned, or the production line is on standby, the first liquid pump 202 is in an open state, the second liquid pump 211 is in a closed state, the second valve 212', the fourth valve 208', and the fifth valve 209' are in a closed state, and the first valve 203' and the third valve 214' are in an open state. In this state, the liquid in the first auxiliary tank 201 enters the main tank 200 through the first liquid pump connecting pipe 203, the first liquid pump 202, the second liquid pump connecting pipe 204, and the main tank liquid inlet pipe 205. The liquid in the main tank 200 first enters the first auxiliary tank liquid outlet pipe 207 through the main tank liquid outlet pipe 208, then enters the second auxiliary tank liquid inlet pipe 214 through the first auxiliary tank liquid outlet pipe 207, and finally enters the second auxiliary tank 210 through the second auxiliary tank liquid inlet pipe 214. After the liquid enters the second auxiliary tank 210, the first liquid pump 202, the first valve 203', and the third valve 214' are closed, and cleaning of the main tank 200 and the first auxiliary tank 201, or waiting for the end of the production line standby, can begin. After cleaning or the end of the production line standby, when the chain machine liquid circulating system processes photovoltaic semi-finished products again, the first liquid pump 202 and the second liquid pump 211 are started, the first valve 203' and the second valve 212' are opened, and the third valve 214', the fourth valve 208', and the fifth valve 209' remain closed. In this state, the liquid in the second auxiliary tank 210 enters the second liquid pump 211 through the fourth liquid pump connecting pipe 213, and enters the first auxiliary tank 201 through the third liquid pump connecting pipe 212 under the action of the second liquid pump 211. The liquid entering the first auxiliary tank 201 circulates between the first auxiliary tank 201 and the main tank 200 through the circulating pipeline. When the liquid in the second auxiliary tank 210 enters the first auxiliary tank 201, the second liquid pump 211 and the second valve 212' are closed.

[0056] When Figure 4 When the liquid in the main tank 200 and the first auxiliary tank 201 in the chain machine liquid circulating system shown needs to be emptied, the first liquid pump 202 and the second liquid pump 211 are in a closed state, the first valve 203', the second valve 212', and the third valve 214' are in a closed state, and the fourth valve 208' and the fifth valve 209' are in an open state. In this state, the liquid in the main tank 200 and the first auxiliary tank 201 enters the waste liquid discharge pipe 209 through the main tank liquid outlet pipe 208 and the first auxiliary tank liquid outlet pipe 207, respectively, and is discharged through the waste liquid discharge pipe 209.

[0057] It should be noted that:

[0058] (1) In the above specific embodiment, the first sub-tank body, the second sub-tank body, the circulating pipeline, the transfer pipeline and the discharge part are all arranged below the main tank body. This layout makes full use of the space below the main tank body, which is conducive to saving the land area occupied by the entire chain machine liquid circulation system. Those skilled in the art can understand that, according to actual design requirements, other layout modes can also be used in other embodiments, for example, the main tank body, the first sub-tank body and the second sub-tank body are arranged at the same height, and the present application does not make specific limitations thereon. When the layout of each tank body is different from the layout in the above specific embodiment, the structure of the circulating pipeline, the transfer pipeline and the discharge part needs to be adjusted accordingly. For example, when the main tank body and the first sub-tank body are arranged at the same height, a liquid pump needs to be arranged on the first sub-tank liquid inlet pipe, and so on. In order to be simple, all possible structures are not listed here.

[0059] (2) The structure of the above circulating pipeline, transfer pipeline and discharge part is only a preferred embodiment, which should not be a limitation on the circulating pipeline, the transfer pipeline and the discharge part. For example, in the above specific embodiment, the liquid discharge pipe includes the main tank liquid outlet pipe, the first sub-tank liquid outlet pipe and the waste liquid discharge pipe. In other embodiments, the liquid discharge pipe can also only include the main tank liquid outlet pipe and the waste liquid discharge pipe, wherein the main tank liquid outlet pipe is connected to one end of the waste liquid discharge pipe, and the other end of the waste liquid discharge pipe is directly communicated with the bottom of the first sub-tank body (in this case, the end of the main tank liquid outlet pipe communicated with the main tank body serves as the first liquid inlet of the entire liquid discharge pipe, the end of the waste liquid discharge pipe communicated with the first sub-tank body serves as the second liquid inlet of the entire liquid discharge pipe, and the other end of the waste liquid discharge pipe serves as the discharge port of the entire liquid discharge pipe). For another example, in the above specific embodiment, the first sub-tank liquid inlet pipe is communicated with the main tank body through the main tank liquid outlet pipe. In other embodiments, the first sub-tank liquid inlet pipe can also be directly communicated with the main tank body. For another example, in the above specific embodiment, the fifth valve is arranged on the waste liquid discharge pipe. In other embodiments, the fifth valve can also be arranged on the first sub-tank liquid outlet pipe. The present application does not make specific limitations thereon.

[0060] (3) In the above embodiment, the discharge part is in communication with the main tank body and the first auxiliary tank body at the same time, which is only a preferred embodiment. In another embodiment, the discharge part can only include the first auxiliary tank outflow pipe (as the main tank outflow pipe is not needed, the first auxiliary tank inflow pipe can be directly in communication with the main tank body), when the liquid medicine in the circulation part needs to be discharged, the first valve and the first liquid pump are closed, the liquid medicine in the main tank body enters the first auxiliary tank body through the first auxiliary tank inflow pipe, and then is discharged through the first auxiliary tank outflow pipe. In another embodiment, the discharge part can only include the main tank outflow pipe, when the liquid medicine in the circulation part needs to be discharged, the first liquid pump is started, and the first valve and the fourth valve are opened, the liquid medicine in the first auxiliary tank body enters the main tank body under the action of the first liquid pump, and then is discharged through the main tank outflow pipe. The present application does not make any limitation on this.

[0061] (4) In the above embodiment, the number of the main tank inflow pipes is multiple, that is, the liquid medicine output from the first liquid pump is divided into multiple paths to be delivered into the main tank body. This way can reduce the disturbance caused by the liquid medicine entering the main tank body, and is beneficial to ensure the stability of processing.

[0062] (5) In the above embodiment, the first liquid pump and the second liquid pump are preferably implemented by using a circulating pump. Those skilled in the art can understand that the circulating pump is only a preferred embodiment, which should not be a limitation on the first liquid pump and the second liquid pump. In other embodiments, other types of pumps that can be used in the chain machine liquid medicine circulation system are also applicable to the present application. In order to be simple, all possible types of pumps are not listed here.

[0063] (6) In the above embodiment, the first valve, the second valve, the third valve, the fourth valve and the fifth valve are preferably implemented by using a pneumatic valve. Those skilled in the art can understand that the pneumatic valve is only a preferred embodiment, which should not be a limitation on the first valve, the second valve, the third valve, the fourth valve and the fifth valve. In other embodiments, other types of valves that can be used in the chain machine liquid medicine circulation system are also applicable to the present application. In order to be simple, all possible types of valves are not listed here.

[0064] (7) In the above embodiment, the first liquid pump and the first valve are two independent devices. In other embodiments, an integrated liquid pump having a valve and capable of realizing the functions of the above first liquid pump and first valve can also be used, and the present application does not make any limitation on this. The same is true for the second liquid pump and the second valve.

[0065] (8) In the above specific embodiments, the liquid pump connecting pipe is connected with the liquid pump by means of welding or screwing, and the liquid pump connecting pipe is connected with the tank by means of welding. Those skilled in the art can understand that in other embodiments, any connection mode between the liquid pump connecting pipe and the liquid pump and the tank is applicable to the present application, and for the sake of simplicity, all possible connection modes are not listed here.

[0066] It is apparent for those skilled in the art that the present application is not limited to the details of the above exemplary embodiments, but can be implemented in other concrete forms without departing from the spirit or essential characteristics of the present application. Therefore, the embodiments should be considered in all aspects as illustrative and not restrictive, and the scope of the present application is defined by the appended claims rather than the above description, and all changes falling within the meaning and range of the equivalent elements of the claims are intended to be embraced in the present application. Any reference signs in the claims should not be considered as limiting the claims involved. In addition, it is clear that the word "comprise" does not exclude other components, units or steps, and the singular does not exclude the plural. The plurality of components, units or devices stated in the system claims can also be implemented by one component, unit or device through software or hardware.

[0067] The above disclosed are only some preferred embodiments of the present application, and of course cannot limit the scope of the present application, and therefore equivalent changes made according to the claims of the present application are still within the scope of the present application.

Claims

1. A chain machine liquid circulating system, comprising a circulating part, a transfer part and a discharge part, characterized in that: the circulating part comprises a main tank, a first auxiliary tank and a circulating pipeline, the main tank is communicated with the first auxiliary tank through the circulating pipeline, and liquid is circulated between the main tank and the first auxiliary tank through the circulating pipeline; the transfer part comprises a second auxiliary tank and a transfer pipeline, the second auxiliary tank is communicated with the first auxiliary tank through the transfer pipeline, or is communicated with the main tank and the first auxiliary tank through the transfer pipeline respectively, and the liquid flows from the circulating part into the second auxiliary tank through the transfer pipeline, and flows back from the second auxiliary tank to the first auxiliary tank through the transfer pipeline; the discharge part is communicated with the main tank and / or the first auxiliary tank to discharge the liquid in the circulating part. 2.The chain machine liquid circulating system according to claim 1, characterized in that: the first auxiliary tank is arranged below the main tank, and the second auxiliary tank is arranged at the same height as the first auxiliary tank; or the first auxiliary tank is arranged below the main tank, and the second auxiliary tank is arranged below the first auxiliary tank. 3.The chain machine liquid circulating system according to claim 2, characterized in that: the circulating pipeline comprises a main tank liquid inlet pipe, a first auxiliary tank liquid inlet pipe, a first liquid pump, a first liquid pump connecting pipe, a second liquid pump connecting pipe and a first valve, wherein the first liquid pump is a one-way pump, one end of the first liquid pump connecting pipe is communicated with the first auxiliary tank, the other end is connected with a liquid inlet of the first liquid pump, a liquid outlet of the first liquid pump is connected with one end of the second liquid pump connecting pipe, the other end of the second liquid pump connecting pipe is communicated with the main tank through the main tank liquid inlet pipe, the first valve is arranged on the first liquid pump connecting pipe, and the first auxiliary tank liquid inlet pipe is communicated with the first auxiliary tank and the main tank respectively. 4.The chain machine liquid circulating system according to claim 2, characterized in that: when the first auxiliary tank is arranged below the main tank, the second auxiliary tank is arranged at the same height as the first auxiliary tank, and the second auxiliary tank is communicated with the first auxiliary tank through the transfer pipeline, the transfer pipeline comprises a second liquid pump, a third liquid pump connecting pipe, a fourth liquid pump connecting pipe and a second valve, wherein the second liquid pump is a two-way pump, one end of the third liquid pump connecting pipe is communicated with the first auxiliary tank, the other end is connected with a first liquid port of the second liquid pump, a second liquid port of the second liquid pump is communicated with the second auxiliary tank through the fourth liquid pump connecting pipe, and the second valve is arranged on the third liquid pump connecting pipe. 5.The chain machine liquid circulating system according to claim 2, characterized in that: ​ ​ ​ ​ ​ ​ ​ The first sub-tank body is arranged below the main-tank body, the second sub-tank body is arranged below the first sub-tank body, and the second sub-tank body is communicated with the first sub-tank body through the transfer pipeline, and the transfer pipeline comprises a third liquid pump, a third liquid pump connecting pipe, a fourth liquid pump connecting pipe, a second sub-tank liquid inlet pipe, a second valve and a third valve, wherein the third liquid pump is a one-way pump, one end of the third liquid pump connecting pipe is communicated with the first sub-tank body, the other end of the third liquid pump connecting pipe is connected with the liquid inlet of the third liquid pump, the liquid outlet of the third liquid pump is communicated with the second sub-tank body through the fourth liquid pump connecting pipe, the second sub-tank liquid inlet pipe is respectively communicated with the second sub-tank body and the first sub-tank body, the second valve is arranged on the third liquid pump connecting pipe, and the third valve is arranged on the second sub-tank liquid inlet pipe.

6. The chain machine liquid circulating system according to claim 3, wherein: The first sub-tank body is arranged below the main-tank body, the second sub-tank body is arranged below the first sub-tank body, and the second sub-tank body is communicated with the first sub-tank body through the transfer pipeline, and the transfer pipeline comprises a third liquid pump, a third liquid pump connecting pipe, a fourth liquid pump connecting pipe, a second sub-tank liquid inlet pipe, a second valve and a third valve, wherein the third liquid pump is a one-way pump, one end of the third liquid pump connecting pipe is communicated with the first sub-tank body, the other end of the third liquid pump connecting pipe is connected with the liquid inlet of the third liquid pump, the liquid outlet of the third liquid pump is communicated with the second sub-tank body through the fourth liquid pump connecting pipe, one end of the second sub-tank liquid inlet pipe is communicated with the second sub-tank body, the other end of the second sub-tank liquid inlet pipe is connected to the first sub-tank liquid inlet pipe and communicated with the main-tank body through the first sub-tank liquid inlet pipe, the second valve is arranged on the third liquid pump connecting pipe, and the third valve is arranged on the second sub-tank liquid inlet pipe.

7. The chain machine liquid circulating system according to claim 3, wherein: The discharge part is respectively communicated with the main-tank body and the first sub-tank body, wherein the discharge part comprises a liquid discharge pipe, a fourth valve and a fifth valve, the liquid discharge pipe comprises a first liquid inlet, a second liquid inlet and a discharge port, the first liquid inlet is communicated with the main-tank body, the second liquid inlet is connected with the sub-tank body, the fourth valve is arranged on the liquid discharge pipe close to the main-tank body, and the fifth valve is arranged on the liquid discharge pipe close to the first sub-tank body.

8. The chain conveyor liquid circulating system according to claim 7, wherein, The first sub-tank liquid inlet pipe is respectively communicated with the first sub-tank body and the main-tank body, comprising: One end of the first sub-tank liquid inlet pipe is communicated with the first sub-tank body, and the other end of the first sub-tank liquid inlet pipe is connected to the liquid discharge pipe at a position between the main-tank body and the fourth valve.

9. The chain conveyor liquid circulation system according to any one of claims 3 to 6, wherein All liquid pumps in the chain machine liquid circulating system are circulating pumps.

10. The chain conveyor liquid circulation system according to any one of claims 3 to 7, wherein All valves in the chain machine liquid circulating system are pneumatic valves.