Cartridge and substrate loading device
By setting an adjustable baffle inside the material box, which can be adjusted along the width direction to divide it into chambers of different sizes, the problem that existing material boxes can only hold a single type of substrate is solved, thus improving applicability and efficiency.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-04-16
- Publication Date
- 2026-03-27
AI Technical Summary
The existing material box can only hold a single type of substrate and cannot be adjusted according to the substrate size, resulting in low efficiency and poor applicability.
A material box was designed with an adjustable baffle inside. The two sides of the baffle are movably connected to the two side walls of the inner cavity, and the position can be adjusted along the width direction to divide the inner cavity into chambers of different sizes to accommodate the placement of different substrates.
It enables adjustment based on substrate size, improving the applicability of the material box, allowing it to hold substrates of different sizes, and increasing efficiency.
Smart Images
Figure CN224054756U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to the technical field of semiconductor packaging, specifically, relates to a material box and substrate loading device. BACKGROUND
[0002] With the rapid development of the semiconductor industry, in the manufacturing process of semiconductor devices, substrate operation process needs to use material box for loading operation. However, the material box in the prior art can usually only place a single type of substrate, can only operate a single substrate type in the material box, and cannot be adjusted according to the substrate size, so there are problems of low efficiency and poor applicability. SUMMARY
[0003] The utility model aims at providing a material box and substrate loading device, which can place different substrates and can be adjusted according to the substrate size, and has better applicability.
[0004] The embodiment of the utility model is realized as follows:
[0005] In one aspect, the utility model embodiment provides a material box, which comprises:
[0006] The material box body has a placing inner cavity;
[0007] The adjusting baffle is arranged in the placing inner cavity, and the two side edges of the adjusting baffle are movably connected with the two side walls of the placing inner cavity along the length direction, so that the adjusting baffle can be adjusted in position along the width direction of the placing inner cavity, and the placing inner cavity is divided into a first cavity for placing a first substrate and a second cavity for placing a second substrate.
[0008] In the optional implementation, the two sides of the material box body along the length direction are provided with sliding grooves, the sliding grooves penetrate into the placing inner cavity, the two side edges of the adjusting baffle are provided with adjusting sliding blocks, the adjusting sliding blocks are slidably accommodated in the sliding grooves, and the adjusting baffle is used for adjusting the position along the width direction under the driving of the adjusting sliding blocks.
[0009] In the optional implementation, a positioning sliding strip is detachably assembled in the sliding groove, the positioning sliding strip is provided with a positioning groove close to one side of the placing inner cavity, and the adjusting sliding block is adapted in the positioning groove.
[0010] In the optional implementation, the positioning sliding strip comprises a magnetic sliding strip, the adjusting sliding block comprises a magnetic suction block, and the magnetic suction block is magnetically adsorbed with the positioning sliding strip.
[0011] In an optional embodiment, the adjusting baffle comprises a magnetic baffle, and the magnetic block is magnetically attracted to the bottom side edge of the adjusting baffle, so that the adjusting baffle is kept relatively fixed with the positioning slide bar.
[0012] In an optional embodiment, the length of the adjusting baffle is adapted to the length of the placing inner cavity, and the adjusting baffle is parallel to the opposite inner walls of the placing inner cavity in the width direction.
[0013] In an optional embodiment, a plurality of side edge holes are arranged on the opposite side walls of the cartridge body, and the plurality of side edge holes are all through to the placing inner cavity.
[0014] In an optional embodiment, the plurality of side edge holes are arranged on the side walls of the cartridge body, and the aperture of the side edge hole is less than or equal to 1 / 3 of the length of the placing inner cavity.
[0015] In an optional embodiment, the bottom wall of the cartridge body is provided with a plurality of positioning holes arranged for positioning installation on the machine table.
[0016] In another aspect, the utility model embodiment provides a substrate loading device, comprising a machine table and the cartridge described above, and the cartridge body is detachably assembled on the machine table.
[0017] The utility model embodiment has the advantages of:
[0018] The utility model embodiment provides a cartridge and a substrate loading device, a placing inner cavity is formed in the cartridge body, and an adjusting baffle is arranged in the placing inner cavity, the two side edges of the adjusting baffle are movably connected with the two side walls of the placing inner cavity in the length direction, so that the adjusting baffle can be positionally adjusted in the width direction of the placing inner cavity, and the placing inner cavity is divided into a first chamber for placing a first substrate and a second chamber for placing a second substrate.Compared with the prior art, the utility model divides the placing inner cavity by the adjusting baffle to realize the placement of different substrates, and adjusts the size of the first chamber and the second chamber by positional adjustment, which can be adjusted according to the size of the substrate, is suitable for substrates of different sizes, and has better applicability. BRIEF DESCRIPTION OF DRAWINGS
[0019] In order to more clearly illustrate the technical scheme of the utility model embodiment, the following will briefly introduce the drawings needed to be used in the embodiment, and it should be understood that the following drawings only show some embodiments of the utility model, and therefore should not be regarded as a limitation to the scope, and for those skilled in the art, other related drawings can also be obtained without creative labor on the basis of these drawings.
[0020] Figure 1The first visual angle assembly structure schematic view of the material box is provided for the embodiment of the utility model.
[0021] Figure 2 The exploded structure schematic view of the material box under the first visual angle is provided for the embodiment of the utility model.
[0022] Figure 3 The exploded structure schematic view of the material box under the second visual angle is provided for the embodiment of the utility model.
[0023] Figure 4 For Figure 2 The local structure schematic view of the material box is provided for the embodiment of the utility model.
[0024] Figure 5 The second visual angle assembly structure schematic view of the material box is provided for the embodiment of the utility model.
[0025] Icon:
[0026] 100-material box, 110-material box body, 111-placing inner cavity, 113-first cavity, 115-second cavity, 117-side hole, 119-positioning hole, 130-adjusting baffle, 131-adjusting sliding block, 150-sliding slot, 170-positioning sliding strip, 171-positioning slot, 200-first base plate, 300-second base plate. DETAILED DESCRIPTION
[0027] In order to make the purpose, technical scheme and advantages of the embodiments of the utility model clearer, the technical scheme in the embodiments of the utility model will be described clearly and completely below in combination with the drawings in the embodiments of the utility model. Obviously, the described embodiments are part of the embodiments of the utility model, rather than all the embodiments. The components of the embodiments of the utility model described and shown in the drawings here can be arranged and designed in various different configurations.
[0028] Therefore, the following detailed description of the embodiments of the utility model provided in the drawings is not intended to limit the scope of the claimed utility model, but only represents selected embodiments of the utility model. Based on the embodiments in the utility model, all other embodiments obtained by those of ordinary skill in the art without creative labor are within the scope of protection of the utility model.
[0029] It should be noted that: similar signs and letters represent similar items in the following drawings, therefore, once an item is defined in one drawing, it does not need to be further defined and explained in the subsequent drawings.
[0030] In the description of the utility model, it needs to be explained that, the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, or the orientation or positional relationship commonly used when the utility model product is used, which is only for the convenience of describing the utility model and simplifying the description, and does not indicate or imply that the indicated device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the utility model. In addition, the terms "first", "second", "third" and the like are only used for differentiation in description and cannot be understood as indicating or implying relative importance.
[0031] In addition, the terms "horizontal", "vertical" and the like do not mean that the components must be absolutely horizontal or vertical, but can be slightly inclined. For example, "horizontal" only means that it is more horizontal relative to "vertical", and does not mean that the structure must be completely horizontal, but can be slightly inclined.
[0032] In the description of the utility model, it also needs to be explained that, unless otherwise explicitly specified and limited, the terms "set", "mount", "connected", "connected" should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or integrally connected; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium; it can be the communication between two elements. For ordinary skilled persons in the art, the specific meaning of the above terms in the utility model can be understood according to the specific circumstances.
[0033] As disclosed in the background art, the existing material box is usually a single-cavity material box, that is, there is only one cavity for placing the substrate, which can only accommodate a single substrate, and the cavity size is fixed, so it can only place substrates within a specific size range and cannot be adjusted according to the size of the substrate, so the applicability is poor.
[0034] Further, the existing technology also has a multi-cavity material box, that is, two or more cavities are used to place the substrate, and the different cavities are of the same size or different sizes. However, this material box still cannot solve the problem of adjusting the cavity for substrates of different sizes, and can only place substrates of a single size, so the applicability is limited.
[0035] In order to solve the above problems, the utility model embodiment provides a new type of material box and substrate loading device, and the basic structure and working principle of the material box and substrate loading device are introduced in detail below. It should be noted that the features in the embodiments of the utility model can be combined with each other without conflict.
[0036] Referring to Figures 1 to 5The utility model embodiment provides a material box 100, it can realize the placement of different substrate, and can adjust according to substrate size, better applicability.
[0037] The utility model embodiment provides a material box 100, including material box body 110 and adjusting baffle 130, material box body 110 has a place inner chamber 111, adjusting baffle 130 sets up in place inner chamber 111, and the both sides edge of adjusting baffle 130 is movably connected with the both sides wall of place inner chamber 111 along length direction, to make adjusting baffle 130 can carry out position adjustment along the width direction of place inner chamber 111, and place inner chamber 111 is divided into first chamber 113 for placing first substrate 200 and second chamber 115 for placing second substrate 300.
[0038] It needs to be explained that the utility model embodiment forms place inner chamber 111 in material box body 110, and sets up adjusting baffle 130 in place inner chamber 111, the both sides edge of this adjusting baffle 130 is movably connected with the both sides wall of place inner chamber 111 along length direction, to make adjusting baffle 130 can carry out position adjustment along the width direction of place inner chamber 111, and place inner chamber 111 is divided into first chamber 113 for placing first substrate 200 and second chamber 115 for placing second substrate 300. By adjusting baffle 130 to divide place inner chamber 111, realize the placement of different substrate. And through position adjustment to adjust the size of first chamber 113 and second chamber 115, can adjust according to substrate size, adapt to the substrate of different size, better applicability.
[0039] It is worth noting that the material box body 110 in the embodiment is rectangular, and the place inner chamber 111 is also rectangular. The width direction mentioned in the embodiment refers to the horizontal short side direction of the place inner chamber 111. The length direction mentioned in the embodiment refers to the horizontal long side direction of the place inner chamber 111.
[0040] In some embodiments, the material box body 110 has a sliding groove 150 on both sides along the length direction, the sliding groove 150 penetrates into the place inner chamber 111, the both sides edges of the adjusting baffle 130 are provided with adjusting sliding blocks 131, the adjusting sliding blocks 131 are slidingly accommodated in the sliding grooves 150, and the adjusting baffle 130 is used for position adjustment along the width direction under the driving of the adjusting sliding blocks 131. Specifically, the sliding grooves 150 are arranged close to the bottom of the place inner chamber 111, so that the adjusting baffle 130 can be assembled in the sliding grooves 150 through the adjusting sliding blocks 131 on the bottom, and the position adjustment is realized.
[0041] It should be noted that the adjusting slider 131 in the embodiment is configured to slide along the sliding groove 150 under the action of an external force, so as to be able to adjust the relative position of the adjusting baffle 130. The adjusting sliders 131 on the two sides need to be kept synchronous sliding, and have a certain resistance after sliding in place, to prevent free sliding. In the process of placing the substrate, displacement of the adjusting baffle 130 can be effectively avoided.
[0042] Further, the positioning sliding strip 170 is detachably assembled in the sliding groove 150. The positioning sliding strip 170 is provided with a positioning groove 171 near a side close to the placing cavity 111, and the adjusting slider 131 is fitted in the positioning groove 171. Specifically, the extending direction of the positioning groove 171 is the same as the extending direction of the sliding groove 150, the positioning sliding strip 170 is fixedly assembled in the sliding groove 150, and the opening of the positioning groove 171 faces inward. The shape of the adjusting slider 131 is adapted to the shape of the positioning groove 171, so that it can be fitted in the positioning groove 171 and can slide along the positioning groove 171 under the action of an external force.
[0043] It should be noted that the sliding groove 150 is arranged along the width direction in the embodiment, and both ends of the sliding groove 150 penetrate to the two side walls of the material box body 110. The positioning sliding strip 170 can be interference-fitted in the sliding groove 150, or fixed by screws or other structures, so that the positioning sliding strip 170 can be conveniently taken out of the sliding groove 150.
[0044] In some embodiments, the positioning sliding strip 170 includes a magnetic sliding strip, and the adjusting slider 131 includes a magnetic suction block which is magnetically attracted to the positioning sliding strip 170. Specifically, the positioning sliding strip 170 can be a magnetic metal, such as iron, nickel, cobalt or an alloy of the three, and the adjusting slider 131 is a magnet block which can be attracted and fixed in the positioning groove 171 of the positioning sliding strip 170 to achieve positioning.
[0045] Further, the adjusting baffle 130 includes a magnetic baffle, and the magnetic suction block is magnetically attracted to the bottom side edge of the adjusting baffle 130, so that the adjusting baffle 130 and the positioning sliding strip 170 are relatively fixed. Specifically, the adjusting baffle 130 is made of a magnetic metal, such as iron, nickel, cobalt or an alloy of the three, and the adjusting slider 131 can be arranged at the bottom side edge of the adjusting baffle 130 by magnetic attraction.
[0046] It should be noted that the magnetic suction block is always attracted in the positioning groove 171, and the adjusting baffle 130 can be directly detached and taken out when disassembled. When the setting position of the adjusting baffle 130 needs to be adjusted, the positioning sliding strip 170 can be taken out, the magnetic suction block in it is poked with a tool, and the magnetic suction blocks in the two positioning sliding strips 170 are aligned before being reassembled in the sliding groove 150. Finally, the adjusting baffle 130 is put in, so that the adjusting baffle 130 and the magnetic suction block are attracted and fixed.
[0047] Of course, in other preferable embodiments of the present application, the adjusting slider 131 can also be fixedly arranged at the bottom side edge of the adjusting baffle 130, and the adjusting baffle 130 can be directly actuated by a tool when adjustment is needed.
[0048] In some embodiments, the length of the adjusting baffle 130 is adapted to the length of the placing inner cavity 111, and the adjusting baffle 130 is parallel to the inner walls opposite in the width direction of the placing inner cavity 111. Specifically, the length of the adjusting baffle 130 in the length direction is the same as the length of the placing inner cavity 111, so that the adjusting baffle 130 can be abutted against the side wall surface of the placing inner cavity 111, thereby separating the placing inner cavity 111 into two rectangular first and second chambers 113 and 115 for conveniently placing the substrate.
[0049] In some embodiments, the material box body 110 is provided with a plurality of side edge holes 117 on the side walls opposite in the width direction, and the plurality of side edge holes 117 all penetrate into the placing inner cavity 111. Specifically, the material box body 110 is provided with side edge holes 117 on both sides, which can realize external communication of the first and second chambers 113 and 115, thereby being used for heat dissipation after the frame is baked.
[0050] Further, the plurality of side edge holes 117 are arrayed on the side walls of the material box body 110, and the aperture of the side edge hole 117 is less than or equal to 1 / 3 of the length of the placing inner cavity 111. On the one hand, the plurality of side edge holes 117 are uniformly arrayed, thereby being able to realize more uniform heat dissipation, and on the other hand, the aperture of the side edge hole 117 is small, which can avoid interference with the placement of the substrate.
[0051] In some embodiments, the bottom wall of the material box body 110 is provided with a plurality of positioning holes 119, which are arrayed for positioning installation on the machine table. Specifically, the positioning holes 119 can be four, which are rectangularly distributed on the bottom wall of the material box body 110, and the bottom wall of the material box body 110 is planar, so that the material box 100 can be stably installed on the surface of the machine table to realize fixation.
[0052] The embodiment of the present application also provides a substrate loading device, which comprises a machine table and a material box 100, the material box 100 comprises a material box body 110 and an adjusting baffle 130, and the material box body 110 has a placing inner cavity 111; the adjusting baffle 130 is arranged in the placing inner cavity 111, and the two side edges of the adjusting baffle 130 are movably connected with the two side walls in the length direction of the placing inner cavity 111, so that the adjusting baffle 130 can be positionally adjusted in the width direction of the placing inner cavity 111, and the placing inner cavity 111 is separated into a first chamber 113 for placing a first substrate 200 and a second chamber 115 for placing a second substrate 300. The material box body 110 is detachably assembled on the machine table.
[0053] In summary, the utility model discloses an embodiment provides a kind of material box 100 and substrate loading device, form the placement inner cavity 111 in material box body 110, and setting adjusting baffle 130 in placement inner cavity 111, the two side edges of the adjusting baffle 130 are movably connected with the two side walls of placement inner cavity 111 along length direction, so that adjusting baffle 130 can be position adjusted along the width direction of placement inner cavity 111, and placement inner cavity 111 is divided into first chamber 113 for placing first substrate 200 and second chamber 115 for placing second substrate 300.Adjusting baffle 130 is used to divide placement inner cavity 111 compared with prior art, the placement of different substrate is realized.And the size of first chamber 113 and second chamber 115 is adjusted by position adjustment, can be adjusted according to substrate size, adapt to different size substrate, better applicability.
[0054] The above only is the preferred embodiment of the utility model, and does not use to limit the utility model, for the person skilled in the art, the utility model can have various changes and changes.For any modification, equivalent replacement, improvement etc.that is made within the spirit and principle of the utility model, should be included in the protection scope of the utility model.
Claims
1. A cartridge, characterized by, The utility model relates to a material box, comprising: a material box body having a placing inner cavity; an adjusting baffle arranged in the placing inner cavity, and two side edges of the adjusting baffle movably connected with two side walls of the placing inner cavity along the length direction, so that the adjusting baffle can be adjusted in position along the width direction of the placing inner cavity, and the placing inner cavity is divided into a first cavity for placing a first substrate and a second cavity for placing a second substrate.
2. The cartridge of claim 1, wherein, The material box body is provided with a sliding groove on each side along the length direction, the sliding groove penetrating into the placing inner cavity, and the two side edges of the adjusting baffle are provided with adjusting sliding blocks which are slidingly accommodated in the sliding grooves, and the adjusting baffle is used for adjusting in position along the width direction under the driving of the adjusting sliding blocks.
3. The cartridge of claim 2, wherein, The sliding groove is detachably fitted with a positioning sliding strip, the positioning sliding strip is provided with a positioning groove close to one side of the placing inner cavity, and the adjusting sliding block is fitted in the positioning groove.
4. The cartridge of claim 3, wherein, The positioning sliding strip comprises a magnetic sliding strip, the adjusting sliding block comprises a magnetic suction block, and the magnetic suction block is magnetically adsorbed with the positioning sliding strip.
5. The cartridge of claim 4, wherein, The adjusting baffle comprises a magnetic baffle, the magnetic suction block is magnetically adsorbed at the bottom side edge of the adjusting baffle, so that the adjusting baffle and the positioning sliding strip are relatively fixed.
6. The cartridge of claim 1, wherein, The length of the adjusting baffle is adapted to the length of the placing inner cavity, and the adjusting baffle is parallel to the inner wall opposite to the placing inner cavity along the width direction.
7. The cartridge of claim 1, wherein, The material box body is provided with a plurality of side edge holes on the side walls opposite along the width direction, and the side edge holes all penetrate into the placing inner cavity.
8. The cartridge of claim 7, wherein, The side edge holes are arrayed on the side walls of the material box body, and the aperture of the side edge holes is less than or equal to 1 / 3 of the length of the placing inner cavity.
9. The cartridge of claim 1, wherein, The bottom wall of the material box body is provided with a plurality of positioning holes which are arrayed for positioning installation on a machine table.
10. A substrate loading device, characterized by comprising: The utility model relates to a machine table and a material box as claimed in any one of claims 1-9, and the material box body is detachably fitted on the machine table.