Self-energy-feedback type water-cooling disc temperature measuring device

Abstract

The utility model relates to a self-energy-feedback type water cooling disc temperature measuring device which comprises a polishing disc, a plurality of temperature sensors are installed on the polishing disc, a connecting base is installed on the polishing disc and comprises a fixed base and a rotating base, the fixed base is installed on polishing equipment, the rotating base is rotationally arranged on the fixed base, and the temperature sensors are installed on the rotating base. The polishing disc is installed on the rotating seat, a stator is installed on the fixing seat, a rotor is installed on the rotating seat, and the rotor is connected with a temperature sensor through an electric wire. The method has the effect of reducing the dismounting and charging frequency of the temperature sensor.

Description

Technical Field

[0001] This application relates to the field of temperature measurement of a self-powered water-cooled plate. Background Technology

[0002] In the field of semiconductor materials, wafer production typically requires polishing. The polishing mechanism involves a chemical reaction that forms a complex with the material to be polished, followed by mechanical removal of the complex. This chemical reaction releases heat, causing a temperature rise, which is a key factor affecting the reaction rate.

[0003] In existing technologies, temperature control is usually achieved by circulating cooling water through the grinding disc. To facilitate temperature control, a temperature sensor is usually installed on the grinding disc. The temperature sensor requires power, and the installation of the external power supply line on the rotating grinding disc is relatively complicated. It is also easy for the wire to break due to twisting caused by the rotation of the grinding disc. Therefore, existing temperature sensors usually adopt the method of disassembly and charging. However, the charging frequency of the temperature sensor is relatively high, which can easily lead to loosening of the installation point. Utility Model Content

[0004] To reduce the frequency of temperature sensor disassembly and recharging, this application provides a self-powered water-cooled plate temperature measuring device.

[0005] The self-powered water-cooled plate temperature measuring device provided in this application adopts the following technical solution:

[0006] A self-powered water-cooled plate temperature measuring device includes a polishing plate, on which several temperature sensors are installed. A connecting seat is installed on the polishing plate, and the connecting seat includes a fixed seat and a rotating seat. The fixed seat is installed on the polishing equipment, and the rotating seat is rotatably mounted on the fixed seat. The polishing plate is installed on the rotating seat. A stator is installed on the fixed seat, and a rotor is installed on the rotating seat. The rotor is connected to the temperature sensors via wires.

[0007] By adopting the above technical solution, the rotating seat drives the rotor, and the rotor rotates in the stator magnetic field to generate current. The current is then transmitted to the temperature sensor through wires to power the temperature sensor, which facilitates power supply to the temperature sensor and reduces the frequency of disassembly and charging of the temperature sensor.

[0008] Optionally, the polishing disc is provided with a cooling channel, and the polishing disc is provided with a water inlet and a water outlet. The water inlet and the water outlet are respectively connected to the two ends of the cooling channel. The fixed base is provided with a water inlet, and the fixed base is provided with a cooling channel. The rotating base is provided with a water outlet. The water inlet is connected to the cooling channel, the cooling channel is connected to the water outlet, and the water outlet is connected to the water inlet through a pipe.

[0009] By adopting the above technical solution, the opening of the cooling channel facilitates the cooling of the polishing pad.

[0010] Optionally, the cooling channels are located around the stator.

[0011] By adopting the above technical solution, opening the cooling channel on the periphery of the stator can reduce the probability of the coolant passing through the middle of the stator and affecting the stator magnetic field.

[0012] Optionally, the rotating seat has a placement groove, one end of the fixed seat is inserted into the placement groove, and a bearing is sleeved on the other end of the fixed seat inserted into the placement groove. An end cover is detachably installed on the rotating seat, and the end cover is pressed onto the bearing.

[0013] By adopting the above technical solution, a bearing can be installed between the rotating seat and the fixed seat by opening a placement groove, thereby making the rotation of the rotating seat smoother, and the end cover facilitates the installation and replacement of the bearing.

[0014] Optionally, the stator is detachably mounted on a fixed base, and the rotor is detachably mounted on a rotating base.

[0015] By adopting the above technical solution, the detachable stator and rotor can be easily replaced when damaged.

[0016] Optionally, the polishing disc includes an upper disc body and a lower disc body, the upper disc body being mounted on a rotating base, and the lower disc body being detachably mounted on the upper disc body.

[0017] By adopting the above technical solution, and by separating the polishing disc into an upper disc body and a lower disc body, the number of parts that need to be replaced can be reduced when the polishing disc is damaged.

[0018] Optionally, a bracket is installed on the upper plate, and the temperature sensor is mounted on the upper plate via the bracket.

[0019] By adopting the above technical solution, the bracket is used to fix the temperature sensor. The lower plate of the polishing plate is a vulnerable part. By installing the temperature sensor on the upper plate, the frequency of disassembly and assembly of the temperature sensor can be reduced.

[0020] Optionally, a hanging plate is provided at the end of the fixed seat away from the rotating seat.

[0021] By adopting the above technical solution, the hanging plate is used to connect with the fixed base, thereby facilitating the installation and fixation of the fixed base on the equipment.

[0022] In summary, this application includes at least one of the following beneficial technical effects:

[0023] The rotating base drives the rotor, which rotates in the stator magnetic field to generate current. The current is then transmitted to the temperature sensor through wires to power the temperature sensor, which facilitates power supply to the temperature sensor and reduces the frequency of disassembly and recharging of the temperature sensor.

[0024] The opening of cooling channels facilitates the cooling of the polishing disc. The opening of cooling channels on the periphery of the stator can reduce the probability of coolant passing through the middle of the stator and affecting the stator magnetic field.

[0025] By separating the polishing disc into an upper and lower disc body, the number of parts that need to be replaced can be reduced when the polishing disc is damaged. The bracket is used to fix the temperature sensor. The lower disc body of the polishing disc is the easily damaged part. By installing the temperature sensor on the upper disc body, the frequency of temperature sensor disassembly and assembly can be reduced. Attached Figure Description

[0026] Figure 1 This is a schematic diagram of the overall structure of an embodiment of this application.

[0027] Figure 2 This is a schematic diagram of the structure of the connector in an embodiment of this application.

[0028] Explanation of reference numerals in the attached drawings: 1. Polishing disc; 101. Upper disc body; 102. Lower disc body; 2. Temperature sensor; 3. Connecting seat; 31. Fixed seat; 32. Rotating seat; 4. Stator; 5. Rotor; 6. Cooling channel; 7. Water inlet; 8. Water outlet; 9. Water inlet; 10. Water outlet; 11. Cooling channel; 12. Placement slot; 13. Bearing; 14. End cap; 15. Bracket; 16. Hanging plate. Detailed Implementation

[0029] The following is in conjunction with the appendix Figure 1-2 This application will be described in further detail.

[0030] First, it should be noted that in the description of this application, the use of directional terms such as "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer" indicates the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. These terms are used solely for descriptive purposes and do not indicate or imply that the device or component referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application. Furthermore, the use of numerical quantifiers such as "first," "second," and "third" is for descriptive purposes only and should not be construed as indicating or implying relative importance. Additionally, in this application, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to fixed connections, detachable connections, interference fits, transition fits, or integral connections; they can refer to direct connections or indirect connections through an intermediate medium. Therefore, those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0031] This application discloses a self-powered water-cooled plate temperature measuring device, referring to... Figure 1 and Figure 2 The system includes a polishing disc 1, on which several temperature sensors 2 are mounted. A connecting seat 3 is also mounted on the polishing disc 1. The connecting seat 3 includes a fixed seat 31 mounted on the polishing equipment and a rotating seat 32 rotatably mounted on the fixed seat 31. A hanging plate 16 is provided at the end of the fixed seat 31 away from the rotating seat 32. The fixed seat 31 is mounted on the polishing equipment via the hanging plate 16. The polishing disc 1 is mounted on the rotating seat 32. A stator 4 is mounted on the fixed seat 31. The stator 4 consists of several pieces, which are evenly distributed along the axis of the fixed seat 31. The stator 4 is a permanent magnet with magnetic force. A rotor 5 is mounted on the rotating seat 32. A copper coil is wound around the rotor 5. The rotor 5 is connected to the temperature sensors 2 via wires. In this embodiment, the temperature sensor 2 is selected as a sensor with battery and transformer functions. The rotor 5 is driven by the rotation of the rotating seat 32. The rotor 5 rotates in the magnetic field of the stator 4, cutting the magnetic field lines to form a current. The current is transmitted to the temperature sensor 2 through the wires to power the temperature sensor 2, which facilitates power supply to the temperature sensor 2 and reduces the frequency of disassembly and charging of the temperature sensor 2.

[0032] Reference Figure 1 and Figure 2The polishing disc 1 is provided with a cooling channel 6. The polishing disc 1 is provided with a water inlet 7 and a water outlet 8. The water inlet 7 and the water outlet 8 are respectively connected to the two ends of the cooling channel 6. The fixed base 31 is provided with a water inlet 9. The fixed base 31 is provided with a cooling channel 11. The rotating base 32 is provided with a water outlet 10. The water inlet 9 is connected to the cooling channel 11. The cooling channel 11 is connected to the water outlet 10. The water outlet 10 is connected to the water inlet 7 through a pipe. The opening of the cooling channel 6 facilitates the cooling of the polishing disc 1. The cooling channel 6 is set on the periphery of the stator 4. The opening of the cooling channel 6 on the periphery of the stator 4 can reduce the probability of the coolant passing through the middle of the stator 4 and affecting the magnetic field of the stator 4.

[0033] Reference Figure 1 and Figure 2 The rotating seat 32 has a placement groove 12. One end of the fixed seat 31 is inserted into the placement groove 12, and the other end of the fixed seat 31 inserted into the placement groove 12 is fitted with a bearing 13. An end cover 14 is detachably installed on the rotating seat 32. The end cover 14 is pressed onto the bearing 13. The placement groove 12 allows the bearing 13 to be installed between the rotating seat 32 and the fixed seat 31, making the rotation of the rotating seat 32 smoother. The end cover 14 facilitates the installation and replacement of the bearing 13. The stator 4 is detachably installed on the fixed seat 31, and the rotor 5 is detachably installed on the rotating seat 32. The detachable stator 4 and rotor 5 can be easily replaced in case of damage.

[0034] Reference Figure 1 and Figure 2 The polishing disc 1 includes an upper disc body 101 and a lower disc body 102. The upper disc body 101 is mounted on the rotating base 32, and the lower disc body 102 is detachably mounted on the upper disc body 101. By mounting the polishing disc 1 on the upper disc body 101 and the lower disc body 102, the number of parts to be replaced can be reduced when the polishing disc 1 is damaged. A bracket 15 is mounted on the upper disc body 101, and the temperature sensor 2 is mounted on the upper disc body 101 through the bracket 15. The bracket 15 is used to fix the temperature sensor 2. The lower disc body 102 of the polishing disc is a vulnerable part. By mounting the temperature sensor 2 on the upper disc body 101, the frequency of disassembly and assembly of the temperature sensor 2 can be reduced.

[0035] The implementation principle of this application embodiment is as follows: After charging the temperature sensor 2, the temperature sensor 2 is installed on the polishing disk 1 through the bracket 15, and the detection end of the temperature sensor 2 is in contact with the polishing disk 1 to detect the temperature of the polishing disk 1; when the polishing disk 1 is working, the temperature sensor 2 is turned on to monitor the temperature of the polishing disk 1 in real time and provide temperature feedback. While the temperature sensor 2 is turned on and consumes power, the polishing disk 1 rotates, thereby driving the rotating seat 32 to rotate relative to the fixed seat 31, so that the rotor 5 rotates and cuts the magnetic field of the stator 4 to generate current. The current is transmitted to the temperature sensor 2 through the wire for storage, forming the self-feeding energy of the temperature sensor 2, thereby reducing the frequency of the temperature sensor 2 needing to be recharged when the power is exhausted.

[0036] It should be noted that the above embodiments are only used to illustrate this application and are not intended to limit the technical solutions described in this application. Although this specification has described this application in detail with reference to the above embodiments, those skilled in the art should understand that they can still make modifications or equivalent substitutions to this application. All technical solutions and improvements that do not depart from the spirit and scope of this application should be covered within the scope of the claims of this application.

Claims

1. A self-powered water-cooled disc temperature measuring device, comprising a polished disc (1) on which a plurality of temperature sensors (2) are installed, characterized in that: The polishing disc (1) is provided with a connecting seat (3), the connecting seat (3) comprises a fixed seat (31) and a rotating seat (32), the fixed seat (31) is installed on the polishing equipment, the rotating seat (32) is rotatably arranged on the fixed seat (31), the polishing disc (1) is installed on the rotating seat (32), the fixed seat (31) is provided with a stator (4), the rotating seat (32) is provided with a rotor (5), and the rotor (5) is connected with a temperature sensor (2) through a wire.

2. The self-powered water-cooled disc temperature measuring device according to claim 1, characterized in that: The polishing disc (1) is provided with a cooling flow channel (6), the polishing disc (1) is provided with a water inlet hole (7) and a water outlet hole (8), the water inlet hole (7) and the water outlet hole (8) are respectively communicated with two ends of the cooling flow channel (6), the fixed seat (31) is provided with a water inlet (9), the fixed seat (31) is provided with a cooling channel (11), the rotating seat (32) is provided with a water outlet (10), the water inlet (9) is communicated with the cooling channel (11), the cooling channel (11) is communicated with the water outlet (10), and the water outlet (10) is communicated with the water inlet hole (7) through a pipeline.

3. The self-powered water-cooled disc temperature measuring device according to claim 2, characterized in that: The cooling flow channel (6) is arranged outside the stator (4).

4. The self-powered water-cooled disc temperature measuring device according to claim 3, characterized in that: The rotating seat (32) is provided with a placing groove (12), one end of the fixed seat (31) is inserted into the placing groove (12), a bearing (13) is arranged at one end of the fixed seat (31) inserted into the placing groove (12), and a end cover (14) is detachably arranged on the rotating seat (32), and the end cover (14) is pressed on the bearing (13).

5. The self-powered water-cooled disc temperature measuring device according to claim 4, characterized in that: The stator (4) is detachably arranged on the fixed seat (31), and the rotor (5) is detachably arranged on the rotating seat (32).

6. The self-powered water-cooled probe of claim 1, wherein: The polishing disc (1) comprises an upper disc body (101) and a lower disc body (102), the upper disc body (101) is arranged on the rotating seat (32), and the lower disc body (102) is detachably arranged on the upper disc body (101).

7. The self-powered water-cooled disc temperature measuring device according to claim 6, characterized in that: The upper disc body (101) is provided with a support (15), and the temperature sensor (2) is arranged on the upper disc body (101) through the support (15).

8. The self-powered water-cooled probe of claim 1, wherein: The fixed seat (31) is provided with a hanging plate (16) away from the rotating seat (32).

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