Anti-springback ALD aluminum boat device
By replacing the pin with a rack and spring mechanism in the ALD aluminum boat device, the penetration problem of the pin-type locking mechanism was solved, improving the silicon wafer loading accuracy and equipment reliability, and reducing maintenance costs.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-03-31
- Publication Date
- 2026-03-31
AI Technical Summary
In existing ALD aluminum boat devices, under high temperature and high pressure environments, the pin-type locking mechanism causes the reaction precursor to penetrate, forming an alumina/silicon nitride composite coating accumulation, which leads to mechanical jamming, affecting the silicon wafer positioning accuracy and equipment reliability, and increasing maintenance costs.
The design employs a rack and spring mechanism, eliminating the traditional pin and using the spring mechanism to provide preload to maintain the rack position, reducing moving parts, preventing particles from getting stuck, and simplifying maintenance.
It improves silicon wafer loading accuracy, reduces defective products, extends equipment lifespan, and lowers maintenance frequency and costs.
Smart Images
Figure CN224062888U_ABST
Abstract
Description
Technical Field
[0001] This application relates to the field of wafer placement technology, and in particular to an ALD aluminum boat device for preventing springback. Background Technology
[0002] As a crucial step in the PERC / TOPCon manufacturing process of photovoltaic cells, tubular ALD (Atomic Layer Deposition) technology directly impacts cell performance and yield. In crystalline silicon cell production, ALD technology, with its excellent surface passivation properties, has become a core process for back surface passivation (PERC) and front polycrystalline silicon passivation (TOPCon). This technology requires silicon wafers to be vertically mounted in specially designed aluminum boat slots and stacked back-to-back to improve equipment throughput. However, the self-limiting reaction mechanism unique to ALD technology leads to unintended deposition phenomena (i.e., deflection) on non-target surfaces of adjacent silicon wafers. This uncontrollable ALD film poses multiple challenges to subsequent process chains and cell reliability.
[0003] The deflection phenomenon originates from the diffusion and infiltration of precursors between silicon wafers. When two silicon wafers are placed back-to-back, the reactant gases form micron-sized diffusion channels at the wafer edges and the contact area on the back side, resulting in irregular film deposition on the non-working surfaces. This type of deposition not only alters the surface properties of the silicon wafers but also interferes with the wettability of the silver paste in the screen printing process, forcing adaptive adjustments to sintering process parameters and paste formulations. More seriously, the deflection area may induce localized stress concentration during high-temperature sintering, thereby inducing microcracks or fragmentation risks, ultimately negatively impacting cell efficiency and yield.
[0004] To address this technical challenge, the industry has implemented physical suppression by optimizing the aluminum boat structure design. However, the pin-type locking mechanism used in the aluminum boat top rod system exhibits significant manufacturing defects. This structure achieves positioning and locking through the mechanical engagement of a metal pin with the top rod hole. During the continuous deposition process of ALD (Alternating Current Deposition), the reaction precursor, under high temperature and pressure, can penetrate along the pin's sliding gap, causing the alumina / silicon nitride composite coating to gradually accumulate on the friction pair surface. With accumulated equipment operating cycles, the coating undergoes brittle spalling under thermal stress, generating micron-sized particles that intrude into the pin guide groove, triggering mechanical jamming—specifically, the pin cannot complete the reciprocating motion within the preset stroke, resulting in an abnormal top rod locking state. This type of failure is insidious and sudden, directly triggering a chain reaction of inaccurate silicon wafer loading and positioning, process chamber pressure fluctuations, and ultimately leading to fatal defects such as edge passivation failure or uneven film thickness in the entire batch of silicon wafers.
[0005] The systemic risks posed by this design flaw are mainly reflected in three dimensions: First, in terms of process reliability, intermittent jamming caused by coating particles is difficult to detect in a timely manner through conventional monitoring methods, and can often only be traced after a batch of defective products are produced, posing a continuous threat to product yield. Second, in terms of equipment maintenance, cleaning and maintenance of traditional pin structures requires complete disassembly of the locking unit, which not only involves repeated disassembly and assembly of precision transmission components (which can easily cause loss of positioning reference), but also requires mechanical scraping or chemical corrosion treatment of accumulated coatings. This process accelerates the wear of parts and significantly increases downtime. Finally, in terms of economy, because the pin assembly and push rod mechanism adopt a high-precision matching design, frequent replacement of wear parts significantly increases the cost of spare parts procurement, while the stringent requirements for the professionalism of technicians in maintenance operations further increase the burden of labor costs. Utility Model Content
[0006] Therefore, it is necessary to provide an ALD aluminum boat device that is stable to operate and has a simple structure to prevent rebound, in order to address the above-mentioned technical problems.
[0007] A rebound-resistant ALD aluminum boat device, the aluminum boat device comprising:
[0008] Two side plates, which are arranged parallel to each other and spaced apart along a first direction;
[0009] At least one toothed rod is disposed between the two side plates along a second direction, the toothed rod forming a placement cavity for loading silicon wafers, the toothed rod having a plurality of placement slots, and at least one silicon wafer being spaced apart within the placement cavity, each silicon wafer corresponding to one placement slot; the second direction is perpendicular to the first direction; at least one toothed rod is movably connected to the side plates; and
[0010] A spring mechanism is provided on one of the two side plates, the spring mechanism being connected to one end of at least one of the racks, the spring mechanism being used to apply an elastic force parallel to and opposite to the second direction to the rack when the rack moves toward the spring mechanism in the second direction.
[0011] In one embodiment, a first mounting groove is provided on one of the side plates, and the spring mechanism includes:
[0012] A bullet stop seat is disposed within the first mounting groove, the bullet stop seat having at least one first moving hole, and one end of the toothed rod being disposed within the first moving hole; and
[0013] An elastic element is disposed in the first moving hole and abuts against one end of the rack, for applying an elastic force to the rack that is parallel to and opposite to the second direction.
[0014] In one embodiment, the rack includes a first end and a second end, the first end being connected to the spring mechanism, the second end being movably connected to the opposite side plate, and the second end being provided with a snap-fit groove.
[0015] In one embodiment, the aluminum boat device further includes a motion seat with a second motion hole. When the rack moves toward the spring mechanism in the second direction, the locking groove is used to engage with the second motion hole.
[0016] In one embodiment, one of the side plates is provided with a first mounting groove, and the other side plate is provided with a second mounting groove opposite to the first mounting groove, and the motion seat is disposed in the second mounting groove.
[0017] In one embodiment, the rack includes an upper rack and a lower rack arranged parallel to each other, and one end of the upper rack and / or the lower rack is connected to the spring mechanism.
[0018] In one embodiment, the toothed bar has a hexagonal cross-sectional shape in a plane parallel to the side plate.
[0019] In one embodiment, the rack is provided with two sets of placement grooves, the bottom of the placement grooves is straight or arc-shaped, and the groove wall of each set of placement grooves is V-shaped to form two sides of the hexagonal rack.
[0020] In one embodiment, the placement slot is oriented in a direction parallel to the first direction.
[0021] In one embodiment, the aluminum boat device further includes a support rod disposed between the side plates along a second direction.
[0022] The above-mentioned aluminum boat device has the following technical advantages:
[0023] 1) Solve the problem of particulate matter getting stuck in the pin, reduce defective products, and improve product yield. The independent locking unit of the traditional pin is eliminated, avoiding the existence of micron-level gaps between the pin and the side plate hole wall, which can cause the film to peel off and form particulate matter stuck in the gap. This also prevents the subsequent movement of the rack from being obstructed. When the rack reciprocates, the airflow disturbance can actively expel some of the deposits. Instead, the rack position is directly maintained by the preload of the spring mechanism, reducing the number of moving parts.
[0024] 2) It can extend the service life, reduce the number of maintenance operations, and decrease the manpower and time spent, as well as reduce the wear and tear of parts. The traditional separate pin structure is eliminated, avoiding maintenance needs arising from the cooperation of multiple components; the spring mechanism is made independent, making replacement convenient. Eliminating the traditional separate pin structure reduces the amount of parts used and saves maintenance costs. Attached Figure Description
[0025] Figure 1 This is a schematic diagram of the aluminum boat device in one embodiment of this application.
[0026] Figure 2 This is a front view schematic diagram of an aluminum boat device in one embodiment of this application.
[0027] Figure 3 for Figure 2 A cross-sectional view of the C-plane.
[0028] Figure 4 for Figure 3 A magnified view of a portion of point A in the middle.
[0029] Figure 5 for Figure 3 Schematic diagram of cross-section of the DD plane.
[0030] Explanation of icon numbers:
[0031] 10. Aluminum boat device; 100. Side plate; 110. First mounting groove; 120. Second mounting groove; 200. Toothed rod; 201. First end; 202. Second end; 210. Placement groove; 211. Groove bottom; 212. Groove wall; 220. End; 230. Snap-fit groove; 300. Spring mechanism; 310. Spring stop seat; 311. First moving hole; 320. Elastic element; 330. Moving seat; 400. Support rod. Detailed Implementation
[0032] To make the above-mentioned objectives, features, and advantages of this application more apparent and understandable, the specific embodiments of this application are described in detail below with reference to the accompanying drawings. Many specific details are set forth in the following description to provide a thorough understanding of this application. However, this application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar modifications without departing from the spirit of this application. Therefore, this application is not limited to the specific embodiments disclosed below.
[0033] In the description of this application, it should be understood that if terms such as "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential" appear, these terms indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application.
[0034] Furthermore, where the terms "first" and "second" appear, these terms are for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined with "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this application, where the term "multiple" appears, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified.
[0035] In this application, unless otherwise expressly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise expressly limited. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.
[0036] In this application, unless otherwise expressly specified and limited, the use of descriptions such as "above" or "below" the second feature indicates that the first and second features are in direct contact or indirect contact via an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. Similarly, "below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.
[0037] It should be noted that if an element is referred to as being "fixed to" or "set on" another element, it can be directly on the other element or there may be an intervening element. If an element is considered to be "connected to" another element, it can be directly connected to the other element or there may be an intervening element. If so, the terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions used in this application are for illustrative purposes only and do not represent the only possible implementation.
[0038] Atomic Layer Deposition (ALD) is a high-precision thin-film deposition technique based on Chemical Vapor Deposition (CVD). It involves depositing materials as single-atom films layer by layer onto a substrate surface using chemical vapor deposition. Two or more precursor chemicals, each containing different elements of the material to be deposited, are introduced onto the substrate surface one at a time. Each precursor saturates the surface, forming a monolayer of material.
[0039] When ALD precursors are adsorbed on the surface, fluctuations in process parameters (such as temperature and pressure) can lead to excessively high precursor concentrations in some areas, potentially exceeding the self-limiting reaction threshold and resulting in multilayer adsorption. In subsequent reactions, these areas experience internal stress concentration due to differences in chemical bonding energies. For example, the difference in thermal expansion coefficients of alumina (Al2O3) films on silicon substrates can cause microcracks due to uncoordinated shrinkage during cooling after high-temperature deposition. During the initial deposition stage (nucleation period), if contamination or defects exist on the substrate surface (such as uneven hydroxyl distribution), precursor molecules preferentially aggregate at active sites, forming discrete island structures. These isolated micro-islands gradually merge during subsequent deposition, but lattice mismatch at the interface leaves residual pores or weak bonding regions, becoming weak points for coating peeling. In aluminum boat devices that load silicon wafers, the sliding contact surfaces (such as pins and guide grooves) between the toothed rod and the side plates move repeatedly. After Al2O3 (Al2O3) coatings are deposited on the surface of the friction pair, their high hardness (HV~15GPa) and brittleness make them prone to microcracks under periodic shear forces. Crack propagation leads to coating fragmentation, resulting in 1-10μm particles. These micron-sized particles intrude into the pin guide groove, causing mechanical jamming—specifically, the pin cannot complete its pre-set reciprocating motion, resulting in abnormal pin locking. This type of failure is insidious and sudden, directly triggering a chain reaction of misaligned silicon wafer loading and positioning, pressure fluctuations in the process chamber, and ultimately leading to fatal defects such as edge passivation failure or uneven film thickness in the entire batch of silicon wafers.
[0040] See Figure 1-5 , Figure 1-5 A schematic diagram of the anti-rebound ALD aluminum boat device 10 in one embodiment of this application is shown. The aluminum boat device 10 provided in one embodiment of this application is suitable for accommodating and placing silicon wafers, and is particularly suitable for placing ALD silicon wafers.
[0041] The aluminum boat device 10 includes two side plates 100, at least one toothed rod 200, and a spring mechanism 300. The two side plates 100 are arranged parallel to and spaced apart along a first direction. At least one toothed rod 200 is disposed between the two side plates 100 along a second direction, forming a placement cavity for loading silicon wafers. The toothed rod 200 has multiple placement slots 210, and at least one silicon wafer is spaced apart within the placement cavity, each silicon wafer corresponding to one placement slot 210. The second direction is perpendicular to the first direction. At least one toothed rod 200 is movably connected to the side plates 100. The spring mechanism 300 is disposed in one of the two side plates 100, and is connected to one end of at least one toothed rod 200. When the toothed rod 200 moves toward the spring mechanism 300 along the second direction, the spring mechanism 300 applies an elastic force parallel to and opposite to the second direction to the toothed rod 200. The first direction is as follows: Figure 1 The X direction is shown, and the second direction is as follows: Figure 1 Y direction shown.
[0042] The aforementioned aluminum boat device 10 has the following technical effects: it solves the problem of particulate matter getting stuck in the pin, reduces defective products, and improves product yield. It eliminates the traditional independent locking unit for the pin, avoiding the micron-level gap between the pin and the side plate 100 hole wall, which could cause the film to peel off and form particulate matter stuck in the gap. It also prevents the subsequent movement of the rack 200 from being obstructed; during the reciprocating motion of the rack 200, airflow disturbance can actively expel some of the deposits. Instead, it utilizes the preload of the spring mechanism 300 to directly maintain the position of the rack 200, reducing the number of moving parts. This extends the service life, reduces maintenance frequency, manpower and time consumption, and reduces parts wear. It eliminates the traditional separate pin structure, avoiding maintenance needs caused by the cooperation of multiple parts; the spring mechanism 300 is an independent mechanism, making replacement convenient. Eliminating the traditional separate pin structure reduces the amount of parts used and saves maintenance costs.
[0043] Specifically, the aluminum boat device 10 is formed between the two parallel and spaced-apart side plates 100 along the first direction. Each placement area can have multiple placement cavities arranged side-by-side, meaning that each pair of side plates 100 has at least two placement cavities along the first direction, which is defined as the longitudinal direction of the side plates 100. The spacing between the side plates 100 is determined by the number of silicon wafers to be placed, and the length of the toothed rod 200 is also determined according to the spacing between the two side plates 100.
[0044] Specifically, in an embodiment of the aluminum boat device 10, two sets of racks 200 are provided, each set of racks 200 is arranged side by side along a first direction, and each set of racks 200 contains two racks 200. The two racks 200 in each set are spaced apart in a third direction perpendicular to the first direction. The third direction is defined as the width direction of the side plate 100, and the third direction is as follows: Figure 1 The Z direction is shown. The area enclosed by the two sets of toothed rods 200 is the aforementioned placement cavity. A group of multiple silicon wafers arranged in parallel are placed in one placement cavity. The placement slots 210 on the two sets of toothed rods 200 are positioned in correspondence with each other, and one silicon wafer is placed in every four placement slots 210.
[0045] In one embodiment, the rack 200 includes an upper rack and a lower rack arranged parallel to each other. Specifically, each set of racks 200 has two racks 200, namely an upper rack and a lower rack. When the aluminum boat device 10 is normally placed on the external platform, in the third direction, the upper rack is located at the upper part of the placement area, and the lower rack is located at the lower part of the placement area.
[0046] In one embodiment, the rack 200 has a hexagonal cross-sectional shape in a plane parallel to the side plate 100. Specifically, the rack 200 is provided with a placement groove 210, which includes a groove bottom 211 and a groove wall 212. The outer contour of the groove wall 212 forms part of the outer contour of the rack 200. The cross-sectional shape of the rack 200 in the plane parallel to the side plate 100 refers to the cross-sectional shape at the location of the groove wall 212. Two opposite sides of the hexagonal rack 200 are arranged parallel to a first direction, and the remaining two sets of opposite sides (four sides) of the hexagonal rack 200 are arranged at an angle to the first direction.
[0047] In one embodiment, the toothed bar 200 is provided with two sets of placement slots 210. The bottom 211 of each placement slot 210 is either straight or arc-shaped, and the wall 212 of each set of placement slots 210 is V-shaped, forming two sides of the hexagonal toothed bar 200. Specifically, when the bottom 211 is straight, its extension direction is parallel to a third direction, or its extension direction is slightly inclined (1-10°) relative to a third direction. Furthermore, the two ends of the straight bottom 211 can be chamfered, with the chamfer direction facing away from the orientation of the placement slot 210, to facilitate the placement of the silicon wafer. When the bottom 211 is arc-shaped, the curvature of the bottom 211 matches the curvature of the silicon wafer, and the center of the arc-shaped bottom 211 substantially coincides with the center of the silicon wafer placed in the placement slot 210. The groove wall 212 is triangular in cross-sectional shape in a plane parallel to the side plate 100, that is, the edge of the groove wall 212 is V-shaped, forming two adjacent inclined sides of the hexagonal toothed rod 200.
[0048] In one embodiment, one end of the upper toothed bar and / or the lower toothed bar is connected to the spring mechanism 300. Specifically, one or more of the upper and lower toothed bars are provided with spring mechanisms 300. At least the lower toothed bar is provided with a spring mechanism 300 to prevent springback and to cooperate with the silicon wafer; the other toothed bars 200 that fix the same set of silicon wafers may not be provided with spring mechanisms 300.
[0049] In one embodiment, a first mounting groove 110 is provided on one of the side plates 100, and the spring mechanism 300 includes: a spring stop seat 310 disposed in the mounting groove, the spring stop seat 310 having at least one first movement hole 311, one end of the rack 200 being disposed in the first movement hole 311; and an elastic member 320 disposed in the first movement hole 311, abutting against one end of the rack 200, for applying an elastic force parallel to and opposite to the second direction to the rack 200.
[0050] Specifically, the bullet stop 310 is strip-shaped and detachably embedded in the first mounting groove 110 of the side plate 100 along a third direction. The bullet stop 310 is provided with a first moving hole 311 extending along a second direction. One end of the toothed rod 200 is movably disposed in the first moving hole 311. The elastic element 320 is located between the hole wall of the first moving hole 311 and the toothed rod 200.
[0051] Furthermore, the first moving hole 311 includes a large-diameter section and a small-diameter section. The diameter of the end portion 220 of the rack 200 is smaller than the diameter of the middle portion of the rack 200, so as to form a stepped surface at the junction of the end portion 220 and the middle portion of the rack 200. There is a stepped surface between the large-diameter section and the small-diameter section. The size of the small-diameter section is the same as the size of the end portion 220 of the rack 200, so that the rack 200 can pass through the small-diameter section. The large-diameter section is provided with an elastic element 320, which is located between the hole wall of the large-diameter section and the rack 200. The elastic element 320 is sleeved on one end of the rack 200, and one end of the elastic element 320 abuts against the stepped surface of the rack 200, and the other end abuts against the stepped surface of the first moving hole 311. When the rack 200 moves, the elastic element 320 provides the rack 200 with an elastic force to prevent rebound.
[0052] In one embodiment, the rack 200 includes a first end 201 and a second end 202. The first end 201 is connected to the spring mechanism 300, and the second end 202 is movably connected to the side plate 100 on the opposite side. The second end 202 is provided with a snap-fit groove 230. Specifically, both the first end 201 and the second end 202 of the rack 200 belong to the aforementioned end 220, that is, the diameters of the first end 201 and the second end 202 are both smaller than the diameter of the middle part of the rack 200. When the first end 201 is provided with an elastic mechanism, the second end 202 is provided with a snap-fit groove 230. The second end 202 passes through the side plate 100 on that side, and the snap-fit groove 230 engages with the through hole on the side plate 100 on that side to achieve docking.
[0053] In one embodiment, the aluminum boat device 10 further includes a motion seat 330, which has a second motion hole. When the rack 200 moves toward the spring mechanism 300 in the second direction, the locking groove 230 is used to engage with the second motion hole.
[0054] In one embodiment, one of the side plates 100 is provided with a first mounting groove 110, and the other side plate 100 is provided with a second mounting groove 120 opposite to the first mounting groove 110, and the motion seat 330 is disposed in the second mounting groove 120.
[0055] Specifically, the first end 201 and the second end 202 of the rack 200 both belong to the aforementioned end 220, meaning that the diameters of the first end 201 and the second end 202 are both smaller than the diameter of the middle part of the rack 200. When the first end 201 is provided with an elastic mechanism, the second end 202 is provided with a snap-fit groove 230. The second end 202 passes through the side plate 100 on that side, and the snap-fit groove 230 engages with the second moving hole on the side plate 100 on that side to achieve docking. The moving seat 330 has a similar structure to the spring stop seat 310. The moving seat 330 is also strip-shaped and is detachably embedded in the second mounting groove 120 of the side plate 100 along a third direction.
[0056] In one embodiment, the first end 201 of different toothed bars 200 can be provided with an elastic mechanism or a snap-fit groove 230, and the second end 202 can be provided with a snap-fit groove 230 or an elastic mechanism. Multiple toothed bars 200 can be provided on the moving seat 330 and the spring-stopping seat 310. The toothed bar 200 corresponding to the snap-fit groove 230 is called the moving seat 330, and the toothed bar 310 corresponding to the elastic mechanism is called the spring-stopping seat 310. Figure 4In the illustrated embodiment, for the lower gear, the first end 201 of the lower gear has a spring stop 310 with an elastic element 320, and the second end 202 of the lower gear has a moving seat 330 and a locking groove 230. Meanwhile, for the upper gear, the first end 201 of the upper gear (on the same side as the first end 201 of the lower gear) has a spring stop 310 and a locking groove 230, and the second end 202 of the upper gear (on the same side as the first end 201 of the lower gear) has a spring stop 310 with an elastic element 320.
[0057] In other embodiments, the rack 200 includes a first end 201 and a second end 202. The first end 201 is connected to the spring mechanism 300, and the second end 202 passes through the opposite side plate 100. The second end 202 is in zero-clearance fit with the through hole or groove on the side plate 100 to form a contact connection with friction damping.
[0058] In one embodiment, the aluminum boat device 10 further includes support rods 400 disposed between the two side plates 100 along a second direction. Specifically, the support rods 400 are disposed at both ends of the side plates 100, and there are two sets of support rods 400. Each set of support rods 400 is arranged side by side at both ends of the side plates 100 along a first direction, and there are two support rods 400 in each set. The two support rods 400 in each set are spaced apart in a third direction.
[0059] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.
[0060] The embodiments described above are merely illustrative of several implementation methods of this application, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the patent application. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this application, and these all fall within the protection scope of this application. Therefore, the protection scope of this patent application should be determined by the appended claims.
Claims
1. A non-rebound ALD aluminum boat apparatus, characterized by, The aluminum boat device comprises: two side plates, the two side plates are arranged in parallel and spaced apart along a first direction; at least one rack rod arranged between the two side plates along a second direction, the rack rod surrounds a placing cavity for loading silicon wafers, the rack rod is provided with a plurality of placing grooves, at least one silicon wafer is arranged in the placing cavity in a spaced apart manner, each silicon wafer corresponds to one placing groove; the second direction is perpendicular to the first direction; at least one rack rod is movably connected to the side plate; and a spring mechanism arranged in one of the two side plates, the spring mechanism is connected to one end of the rack rod, and when the rack rod moves towards the spring mechanism along the second direction, the spring mechanism is used to apply an elastic force to the rack rod, which is parallel and opposite to the second direction.
2. The anti-rebound ALD aluminum boat apparatus of claim 1, wherein, A first mounting groove is arranged on one of the side plates, and the spring mechanism comprises: a stop seat arranged in the first mounting groove, the stop seat is provided with at least one first movement hole, and one end of the rack rod is arranged in the first movement hole; and a resilient member arranged in the first movement hole and abutting against one end of the rack rod, used to apply an elastic force to the rack rod, which is parallel and opposite to the second direction.
3. The anti-rebound ALD aluminum boat apparatus of claim 1, wherein, The rack rod comprises a first end and a second end, the first end is connected to the spring mechanism, the second end is movably connected to the side plate on the opposite side, and the second end is provided with a clamping groove.
4. The anti-rebound ALD aluminum boat apparatus of claim 3, wherein, The aluminum boat device further comprises a movement seat provided with a second movement hole, and when the rack rod moves towards the spring mechanism along the second direction, the clamping groove is used to cooperate with the second movement hole for clamping.
5. The anti-rebound ALD aluminum boat apparatus of claim 4, wherein, One of the side plates is provided with a first mounting groove, and the other side plate is provided with a second mounting groove opposite to the first mounting groove, and the movement seat is arranged in the second mounting groove.
6. The anti-rebound ALD aluminum boat apparatus of claim 1, wherein, The rack rod comprises an upper rack rod and a lower rack rod arranged in parallel with each other, and one end of the upper rack rod and / or the lower rack rod is connected to the spring mechanism.
7. The anti-rebound ALD aluminum boat apparatus of claim 1, wherein, The cross-sectional shape of the rack rod in the plane parallel to the side plate is hexagonal.
8. The anti-rebound ALD aluminum boat apparatus of claim 7, wherein, The rack rod is provided with two groups of placing grooves, the groove bottom of the placing groove is in a straight line or arc shape, and the groove wall of each group of placing grooves is in a V shape, so as to form two sides of the hexagonal rack rod.
9. The anti-rebound ALD aluminum boat apparatus of claim 1, wherein, The placing grooves are arranged towards a direction parallel to the first direction.
10. The anti-rebound ALD aluminum boat apparatus of claim 1, wherein, The aluminum boat device further comprises a support rod arranged between the side plates along the second direction.