Thin film defect detection device

Abstract

The utility model relates to the technical field of film detection, in particular to a film defect detection device. The device comprises a film viewing cavity arranged in a darkroom, the film viewing cavity comprises a main cavity defined by baffles and a middle platform layer arranged in the main cavity, a light through hole is formed in the middle platform layer, a xenon lamp is installed at the top of an upper cavity so that light can irradiate a to-be-detected film at the light through hole, and a defect imaging curtain is laid at the bottom of a lower cavity so that the to-be-detected film can be detected. The shadow left by the thin film at the light through hole is received; light penetrates through the thin film, shadow is projected on the defect imaging curtain laid at the bottom of the lower cavity, due to the fact that the xenon lamp with higher light penetrating power is selected, slight deformation type defects of the thin film can be seen on the defect imaging curtain, the defects of an existing thin film defect observation mode are overcome, and the tiny and slight deformation type defects of the thin film can be seen.

Description

Technical Field

[0001] This utility model relates to the field of thin film detection technology, and in particular to a thin film defect detection device. Background Technology

[0002] Thin film materials are increasingly widely used, such as thin films for optical applications and thin films for displays. During the fabrication process, defects such as uneven thickness, film lip lines, indentations, and foreign matter are prone to occur, which can adversely affect subsequent use. Therefore, defect detection is necessary after the thin film material is formed.

[0003] Currently, defects are observed by shining a flashlight on the film or by directly observing the film itself with a polarizing microscope. However, these methods are limited by unstable light sources and cannot detect small and slight deformation defects in the film.

[0004] Therefore, the utility model proposes a thin film defect detection device. Utility Model Content

[0005] (a) Technical problems to be solved

[0006] The technical problem to be solved by this utility model is to provide a thin film defect detection device to solve the problem that the existing technology cannot detect small and slight deformation defects in thin films.

[0007] (II) Technical Solution

[0008] To solve the above-mentioned technical problems, this utility model provides a thin film defect detection device, including a viewing cavity set in a dark chamber. The viewing cavity includes a main cavity surrounded by a baffle and an intermediate platform layer set in the main cavity. The baffle is a black board with low gloss. The main cavity is divided into an upper cavity and a lower cavity by the intermediate platform layer. The intermediate platform layer has a light-transmitting hole and is used to lay the thin film to be detected. A xenon lamp is installed on the top of the upper cavity to illuminate the thin film to be detected at the light-transmitting hole. A defect imaging screen is laid on the bottom of the lower cavity to receive the shadow left by the thin film from the light-transmitting hole.

[0009] The baffle includes a top baffle, a bottom baffle, a front baffle, a rear baffle, a left baffle, and a rear baffle.

[0010] The left baffle has a thin film input channel, and the right baffle has a thin film output channel.

[0011] The light-transmitting hole is a rectangular hole.

[0012] The defect imaging screen is a white screen.

[0013] The light-transmitting hole is a circular hole.

[0014] A xenon lamp mounting plate is provided below the top baffle, near the xenon lamp.

[0015] The ratio of the distance from the xenon lamp light source to the light-transmitting aperture to the distance from the light-transmitting aperture to the defect imaging screen is 1:1.

[0016] (III) Beneficial Effects

[0017] The above-mentioned technical solution of this utility model has the following advantages:

[0018] In this invention, the viewing chamber is placed in a dark room. A black baffle with low gloss is used to prevent light penetration and reflection. The film to be tested is laid on the middle platform layer, and the film to be tested covers the light-transmitting hole of the middle platform layer. A xenon lamp at the top of the upper chamber illuminates the film to be tested at the light-transmitting hole. The light then penetrates the film, and the shadow is projected onto the defect imaging screen laid at the bottom of the lower chamber. Because a xenon lamp with stronger light penetration is selected, the projection of tiny deformations on the white screen is magnified, and slight deformation defects of the film can be seen on the defect imaging screen. The above solution improves the shortcomings of existing methods for observing film defects and can see small and slight deformation defects of the film. Attached Figure Description

[0019] Figure 1 This is a schematic diagram of the structure of a thin film defect detection device according to the present invention.

[0020] In the diagram: 1. Membrane cavity; 2. Xenon lamp; 3. Intermediate platform layer; 4. Light transmission hole; 5. Defect imaging screen; 6. Thin film input channel; 7. Thin film output channel. Detailed Implementation

[0021] The specific embodiments of this utility model will be further described in detail below with reference to the accompanying drawings and examples. The following examples are used to illustrate this utility model, but are not intended to limit the scope of this utility model.

[0022] In the description of this utility model, it should be understood that the terms "center," "longitudinal," "lateral," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," and "outer," etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0023] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0024] The thin film defect detection device provided by this utility model includes a viewing chamber set in a dark room. The viewing chamber includes a main cavity 1 surrounded by baffles and an intermediate platform layer 3 set in the main cavity. The baffles are made of black board with low gloss. The main cavity is divided into an upper cavity and a lower cavity by the intermediate platform layer. The intermediate platform layer has a light-transmitting hole 4, which is used to lay the thin film to be inspected. A xenon lamp 2 is installed on the top of the upper cavity to illuminate the thin film to be inspected at the light-transmitting hole. A defect imaging screen 5 is laid at the bottom of the lower cavity to receive the shadow left by the thin film from the light-transmitting hole. In this embodiment, the power of the xenon lamp is required, and about 75W is currently used. The xenon lamp is not very bright, but the light has strong penetrating power and is not easily scattered. Due to the light characteristics of the xenon lamp, the projection of small deformations on the white screen will be magnified, which is more conducive to observing small deformation defects of the thin film.

[0025] In the above technical solution, the viewing chamber is set in a dark room, and a black plate with low gloss is selected as the baffle to avoid light penetration and reflection. The film to be tested is laid on the middle platform layer, and the film to be tested covers the light-transmitting hole of the middle platform layer. The xenon lamp at the top of the upper chamber illuminates the film to be tested at the light-transmitting hole, and then the light penetrates the film, and the shadow is projected onto the defect imaging screen laid at the bottom of the lower chamber. Because a xenon lamp with stronger light penetration is selected, slight deformation defects of the film can be seen on the defect imaging screen. The above solution improves the shortcomings of the existing methods for observing film defects and can see small and slight deformation defects of the film.

[0026] Specifically, the baffle includes a top baffle, a bottom baffle, a front baffle, a rear baffle, a left baffle, and a rear end baffle, forming a cube. Of course, other baffle forms can be used in this application, and the enclosed main cavity can be of other shapes.

[0027] Preferably, the left baffle has a film input channel 6, and the right baffle has a film output channel 7. This allows long, wide films to enter the middle platform layer of the main cavity through the film input channel, be inspected by light, and then output through the film output channel, enabling continuous and efficient inspection operations.

[0028] Preferably, the light-transmitting aperture is rectangular, allowing for more complete lateral detection of the wide film. It can also be circular, as long as its diameter is equal to or greater than the film width. Of course, a smaller light-transmitting aperture results in higher imaging clarity.

[0029] Preferably, the defect imaging screen is a white screen, which makes the defect contrast display clearer.

[0030] Specifically, a xenon lamp mounting plate is provided below the top baffle near the xenon lamp to facilitate the installation of the xenon lamp.

[0031] Preferably, the ratio of the distance from the xenon lamp light source to the light-transmitting aperture to the distance from the light-transmitting aperture to the defect imaging screen is:

[0032] To further illustrate the solution of this application, the following embodiments will provide a detailed description of this utility model.

[0033] This embodiment constructs a sealed film viewing device. The size of the device is not limited, and it consists of two layers, with the baffle constructed from a low-gloss black material. A xenon lamp is placed on top of the constructed device, shining vertically downwards onto the center of the middle layer. The middle layer is a platform with an opening in the center to hold the film, and gaps on both sides to allow for the film to be pulled and transported. The film is placed in the center of the middle layer, with the xenon lamp shining directly onto it. The bottom layer of the device is a white screen, creating the shadow left by the xenon lamp on the film. By observing defects on the white screen, small and slight deformation defects in that section of the film can be clearly seen. This solution innovatively uses a xenon lamp light source, enabling the detection of small and slight deformation defects in the film that are not visible using other methods.

[0034] It should be clarified that the various embodiments in this specification are described in a progressive manner, and the same or similar parts between the various embodiments can be referred to mutually. Each embodiment focuses on describing the differences from other embodiments. For the embodiments of the method, relevant parts can be referred to the description of the device embodiments (as appropriate). This utility model is not limited to the specific steps and structures described above and shown in the figures. Furthermore, for the sake of brevity, detailed descriptions of known methods and techniques are omitted here.

[0035] The above description is only a preferred embodiment of the present utility model. It should be noted that for those skilled in the art, several improvements and modifications can be made without departing from the technical principles of the present utility model, and these improvements and modifications should also be considered within the protection scope of the present utility model.

Claims

1. A thin film defect detection apparatus characterized by comprising: The film viewing cavity is arranged in a dark room, and includes a main cavity surrounded by a baffle and an intermediate platform layer arranged in the main cavity, the baffle is a black plate with low glossiness, the main cavity is divided into an upper cavity and a lower cavity by the intermediate platform layer, the intermediate platform layer is provided with a light transmission hole, and the intermediate platform layer is used for laying a film to be detected, a xenon lamp is arranged on the top of the upper cavity to irradiate light on the film to be detected at the light transmission hole, and a defect imaging curtain is arranged at the bottom of the lower cavity to receive a shadow left by the film from the light transmission hole.

2. The film defect inspection apparatus of claim 1, wherein The baffle includes a top baffle, a bottom baffle, a front baffle, a rear baffle, a left baffle and a right baffle.

3. The film defect inspection apparatus of claim 2, wherein The left baffle is provided with a film input channel, and the right baffle is provided with a film output channel.

4. The film defect inspection apparatus of claim 1, wherein The light transmission hole is a rectangular hole.

5. The film defect inspection apparatus of claim 1, wherein The defect imaging curtain is a white curtain.

6. The film defect inspection apparatus of claim 1, wherein The light transmission hole is a circular hole.

7. The film defect inspection apparatus of claim 2, wherein A xenon lamp mounting plate is arranged on the lower surface of the top baffle and close to the xenon lamp.

8. The film defect inspection apparatus of claim 1, wherein The ratio of the distance from the xenon lamp light source to the light transmission hole to the distance from the light transmission hole to the defect imaging curtain is 1:1.

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