Exposure device and exposure equipment

Abstract

The utility model relates to the technical field of exposure equipment, and discloses an exposure device and exposure equipment. The exposure device comprises a workpiece table, a bearing module and an exposure module, the bearing module is used for bearing a to-be-exposed part, and the bearing module is slidably arranged on the workpiece table in the first direction; the exposure module comprises at least one first exposure unit and at least one second exposure unit, the first exposure unit comprises an exposure head, the second exposure unit comprises at least two exposure heads which are relatively fixed, and the exposure module further comprises at least one supporting piece arranged on the workpiece table. At least one first exposure unit and / or at least one second exposure unit are / is arranged on the supporting piece in a sliding mode in the second direction, and an included angle is formed between the second direction and the first direction. The exposure device and the exposure equipment disclosed by the utility model can realize integral exposure and edge exposure, are compact in structure, low in cost, high in exposure precision and high in exposure efficiency, and are applicable to more scenes.

Description

Technical Field

[0001] The utility model relates to the technical field of exposure equipment, in particular to an exposure device and an exposure equipment. Background Art

[0002] In the existing exposure trend, for a complete PCB board, the exposure alignment accuracy requirements for the exposure patterns on its surface are different. Generally speaking, for the full-surface exposure of large-range full-surface complete patterns, the alignment accuracy of exposure is pursued, and for the edge exposure (such as patterns like "field", "mouth", "river" in a whole board), the exposure efficiency is pursued.

[0003] In the prior art, the full-surface exposure and the edge exposure are respectively realized by different exposure machines. When using dual exposure machines, on the one hand, it occupies a large space and has a high cost; on the other hand, a connecting guide rail is required between the dual exposure machines, and it takes time for the PCB board to pass through the connecting guide rail, increasing the overall exposure processing time of the PCB board and reducing the exposure efficiency.

[0004] Therefore, there is an urgent need for an exposure device and an exposure equipment to solve the above problems. Content of the Utility Model

[0005] Based on the above, the purpose of the utility model is to provide an exposure device and an exposure equipment, which can not only achieve overall exposure but also achieve edge exposure, with a compact structure, low cost, high exposure accuracy and high exposure efficiency. In addition, it has more applicable scenarios.

[0006] To achieve the above object, the utility model adopts the following technical solutions:

[0007] An exposure device, comprising:

[0008] A workpiece table;

[0009] A carrying module for carrying the parts to be exposed, and the carrying module is slidably arranged on the workpiece table along a first direction;

[0010] An exposure module, including at least one first exposure unit and at least one second exposure unit. The first exposure unit includes one exposure head, and the second exposure unit includes at least two relatively fixed exposure heads. The exposure module further includes at least one support member arranged on the workpiece table, and at least one of the first exposure units and / or at least one of the second exposure units is / are slidably arranged on the support member along a second direction, and the second direction is arranged at an angle with the first direction.

[0011] As a preferred scheme of the exposure device, two support members are provided, and the exposure heads are arranged on the opposite sides of the two support members.

[0012] As a preferred embodiment of the exposure device, one support member is provided, and at least one first exposure unit and at least one second exposure unit are provided on the support member; or two support members are provided, and at least one first exposure unit is provided on one support member and at least one second exposure unit is provided on the other support member.

[0013] As a preferred embodiment of the exposure apparatus, the exposure apparatus further includes a first driving unit, the first driving unit including a first slide rail and a first slider slidably disposed on the first slide rail, the first slide rail extending along the first direction and disposed on the workpiece stage, the bearing module being disposed on the first slider; the support member includes a mounting beam extending along a second direction and support beams disposed on both sides of the mounting beam, the support beams being connected to the workpiece stage and located on both sides of the first slide rail, and the exposure head being slidably disposed on the mounting beam.

[0014] As a preferred embodiment of the exposure device, the exposure head is slidably disposed on the support member along a third direction, and the third direction is perpendicular to the plane containing the first direction and the second direction.

[0015] As a preferred embodiment of the exposure device, the exposure device includes a second driving unit and a third driving unit. The second driving unit includes a second slide rail and a second slider slidably disposed on the second slide rail. The second slide rail extends along the second direction and is disposed on the support member. The third driving unit includes a third slide rail and a third slider slidably disposed on the third slide rail. The third slide rail extends along the third direction and is disposed on the second slider. The exposure head is disposed on the third slider.

[0016] As a preferred embodiment of the exposure device, the second slider is L-shaped, and the support member is provided with the second slide rail on both the side and top surfaces along the second direction.

[0017] As a preferred embodiment of the exposure apparatus, the multiple exposure heads have different exposure accuracies.

[0018] As a preferred embodiment of the exposure device, when there are two or more support members, the exposure accuracy of the exposure head on the same support member is the same, while the exposure accuracy of the exposure head on different support members is different.

[0019] As a preferred embodiment of the exposure apparatus, the carrier module is configured to drive the part to be exposed to rotate relative to the horizontal plane of the workpiece stage edge.

[0020] As a preferred embodiment of the exposure apparatus, the carrier module includes a plurality of functional nozzles arranged in an array. The functional nozzles can provide negative pressure to adsorb the part to be exposed, or provide positive pressure to make the part to be exposed float to correct the part to be exposed.

[0021] The exposure equipment includes the exposure device and loading / unloading device described in any of the above embodiments. The loading / unloading device can pick up and place the part to be exposed from three sides of the support module away from the exposure module. The loading / unloading device is configured as a robot, a CV conveyor line, or a transport shaft.

[0022] The beneficial effects of this utility model are as follows:

[0023] This invention integrates a support module and an exposure module by setting a workpiece stage. The support module carries the part to be exposed and allows it to move along a first direction, facilitating subsequent exposure by the exposure module. The exposure module includes a first exposure unit and a second exposure unit mounted on a support member. The first exposure unit has one exposure head for edge exposure, while the second exposure unit has at least two exposure heads. When both exposure heads are working simultaneously, they can be used for overall exposure; when only one exposure head is working, it can be used for edge exposure. Since the relative positions of the at least two exposure heads are fixed, alignment can be achieved with only one alignment, ensuring alignment accuracy during overall exposure. Furthermore, the exposure heads slide along a second direction on the support member, allowing them to quickly reach the exposure position and improving exposure efficiency during edge exposure. Additionally, the number of support members, the number of exposure heads in the first and second exposure units, and their correspondence with the support members can be customized by those skilled in the art according to the needs of the actual exposed pattern, expanding the applicability of the exposure device. In summary, the exposure device enables both overall and edge exposure to be achieved in a single unit, balancing the accuracy of overall exposure with the efficiency of edge exposure. Secondly, for parts requiring both edge and full-area exposure, there is no need to transfer the parts between multiple devices, improving exposure efficiency. Finally, the device has a more compact structure; compared to requiring two separate devices for edge and full-area exposure, this device integrates edge and full-area exposure into one unit, resulting in lower cost, smaller footprint, and wider applicability. Attached Figure Description

[0024] To more clearly illustrate the technical solutions in the embodiments of this utility model, the drawings used in the description of the embodiments of this utility model will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on the content of the embodiments of this utility model and these drawings without creative effort.

[0025] Figure 1 It is a schematic diagram of the first exposure device provided by the specific embodiment of the present utility model;

[0026] Figure 2 It is a schematic diagram of the second exposure device provided by the specific embodiment of the present utility model;

[0027] Figure 3 It is a schematic diagram of the third exposure device provided by the specific embodiment of the present utility model;

[0028] Figure 4 It is a schematic diagram of the fourth exposure device provided by the specific embodiment of the present utility model;

[0029] Figure 5 It is a schematic diagram of the fifth exposure device provided by the specific embodiment of the present utility model;

[0030] Figure 6 It is a schematic diagram of the first exposure unit of the exposure device provided by the specific embodiment of the present utility model;

[0031] Figure 7 It is a schematic diagram of the second exposure unit of the exposure device provided by the specific embodiment of the present utility model;

[0032] Figure 8 It is a schematic diagram of the carrier module of the exposure device provided by the specific embodiment of the present utility model;

[0033] Figure 9 It is a top view of the fourth exposure device provided by the specific embodiment of the present utility model;

[0034] Figure 10 It is a flowchart of performing low-precision full-surface exposure using the fourth exposure device in the specific embodiment of the present utility model;

[0035] Figure 11 It is a flowchart of performing "field" - shaped rapid exposure using the fourth exposure device in the specific embodiment of the present utility model;

[0036] Figure 12 It is a flowchart of performing high-precision full-surface exposure using the fourth exposure device in the specific embodiment of the present utility model.

[0037] In the figure:

[0038] 1. Part to be exposed;

[0039] 100. Workpiece stage;

[0040] 200. Bearing module; 210. First bearing platform; 220. Second bearing platform; 221. Air-bearing foot; 222. Functional nozzle; 230. Rotating shaft; 240. Straightening mechanism; 250. Feeding roller;

[0041] 300. Exposure module; 301. Exposure head; 302. Alignment identification component; 303. Mounting plate; 310. First exposure unit; 320. Second exposure unit; 330. Support component; 331. Mounting beam; 332. Support beam;

[0042] 410. First drive unit; 421. Second slide rail; 422. Second slider; 430. Third drive unit; 431. Third slide rail; 432. Third slider;

[0043] 510, base; 520, shock absorption module. Detailed Implementation

[0044] The embodiments of this utility model are described in detail below. Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and intended to explain this utility model, and should not be construed as limiting this utility model.

[0045] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance. The terms "first position" and "second position" refer to two different positions.

[0046] Unless otherwise expressly specified and limited, the terms "installation," "connection," "linking," and "fixing" should be interpreted broadly. For example, they can refer to fixed connections or detachable connections; mechanical connections or electrical connections; direct connections or indirect connections through an intermediate medium; and connections within two components or interactions between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0047] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0048] The technical solution of this utility model will be further described below with reference to the accompanying drawings and specific embodiments.

[0049] like Figures 1-12 As shown, this embodiment provides an exposure apparatus, which includes a workpiece stage 100, a support module 200, and an exposure module 300. The support module 200 is used to support the part 1 to be exposed and is slidably disposed on the workpiece stage 100 along a first direction. The exposure module 300 includes at least one first exposure unit 310 and at least one second exposure unit 320. The first exposure unit 310 includes one exposure head 301, and the second exposure unit 320 includes at least two relatively fixed exposure heads 301. The exposure module 300 also includes at least one support member 330 disposed on the workpiece stage 100. At least one first exposure unit 310 and / or at least one second exposure unit 320 are slidably disposed on the support member 330 along a second direction, which is at an angle to the first direction. The part 1 to be exposed is a part that needs to undergo an exposure operation, such as a printed circuit board (PCB), a flat panel display (FPD) in the new display field, or a mask.

[0050] The workpiece stage 100 integrates the support module 200 and the exposure module 300. The support module 200 supports the part 1 to be exposed and allows it to move along a first direction, facilitating subsequent exposure by the exposure module 300. The exposure module 300 includes a first exposure unit 310 and a second exposure unit 320 mounted on a support member 330. The first exposure unit 310 has an exposure head 301 for edge exposure. The second exposure unit 320 has at least two exposure heads 301. When both exposure heads 301 work simultaneously, they can be used for overall exposure; when one exposure head 301 works, it can be used for edge exposure. Since the relative positions of the at least two exposure heads 301 are fixed, alignment can be achieved with only one alignment, thus ensuring alignment accuracy during overall exposure. Furthermore, the exposure heads 301 slide along a second direction on the support member 330, allowing them to quickly reach the exposure position and improving exposure efficiency during edge exposure. Furthermore, the number of support members 330, the number of exposure heads 301 in the first exposure unit 310 and the second exposure unit 320, and their correspondence with the support members 330 can be set by those skilled in the art according to the actual needs of the exposure pattern, thus expanding the applicability of the exposure device. In summary, the exposure device enables the same device to achieve both overall exposure and edge exposure, while also balancing the accuracy of overall exposure and the efficiency of edge exposure. Secondly, for the part 1 to be exposed that requires both edge exposure and full-area exposure, there is no need to transfer the part 1 to be exposed between multiple devices, improving exposure efficiency. Finally, the device has a more compact structure. Compared to requiring two devices to achieve edge exposure and full-area exposure separately, this device integrates edge exposure and full-area exposure into one device, resulting in lower cost, smaller footprint, and wider applicability.

[0051] Optionally, one support member 330 may be provided, with at least one first exposure unit 310 and at least one second exposure unit 320 disposed on the support member 330; or two support members 330 may be provided, with at least one first exposure unit 310 disposed on one support member 330 and at least one second exposure unit 320 disposed on the other support member 330. It is worth noting that the support members 330 are not limited to one or two, but may also include three, four or more. By increasing the number of support members 330, the number of exposure heads 301 can be increased accordingly, allowing more exposure heads 301 to be simultaneously exposed at different positions, thereby increasing the exposure speed.

[0052] For example, such as Figure 1As shown, a support member 330 includes one or more first exposure units 310 and one or more second exposure units 320. Specifically, the support member 330 is provided with one first exposure unit 310 and one second exposure unit 320, and the second exposure unit 320 is provided with five exposure heads 301; as Figure 2 As shown, one support member 330 includes one or more first exposure units 310; another support member 330 includes one or more second exposure units 320. Specifically, there are two support members 330, one of which has one second exposure unit 320, and the other has three first exposure units 310. Figure 3 As shown, one support member 330 includes one or more first exposure units 310 and one or more second exposure units 320; another support member 330 includes one or more second exposure units 320, specifically, there are two support members 330, one support member 330 has one second exposure unit 320, and a first exposure unit 310 is provided on both sides of the second exposure unit 320, and the other support member 330 has one second exposure unit 320; as shown Figure 4 As shown, one support member 330 includes one or more first exposure units 310 and one or more second exposure units 320; another support member 330 includes one or more first exposure units 310, specifically, two support members 330 are provided, one support member 330 is provided with one second exposure unit 320, and a first exposure unit 310 is provided on both sides of the second exposure unit 320, and the other support member 330 is provided with two first exposure units 310; as shown Figure 5 As shown, one support member 330 includes one or more first exposure units 310 and one or more second exposure units 320; another support member 330 includes one or more first exposure units 310 and one or more second exposure units 320. Specifically, there are two support members 330, each of which has a second exposure unit 320, and each of the two support members 330 has a first exposure unit 310 on both sides.

[0053] It is worth noting that when two support members 330 are provided, the exposure head 301 is located on opposite sides of the two support members 330, making the positions of the multiple exposure heads 301 closer together and improving the exposure accuracy during moving exposure. In other embodiments, when two support members 330 are provided, the exposure head 301 is located on the same side of the two support members 330. Those skilled in the art can set it according to actual needs, and no specific limitation is made here.

[0054] Specifically, to enable the movement of the part 1 to be exposed in the first direction, the exposure apparatus further includes a first drive unit 410. The first drive unit 410 includes a first slide rail and a first slider slidably disposed on the first slide rail. The first slide rail extends along the first direction and is disposed on the workpiece stage 100. The support module 200 is disposed on the first slider. The support member 330 includes a mounting beam 331 extending along the second direction and support beams 332 disposed on both sides of the mounting beam 331. The exposure head 301 is slidably disposed on the mounting beam 331. The support beams 332 are connected to the workpiece stage 100 and are located on both sides of the first slide rail. That is, the support member 330 is configured in a gantry shape, and the gantry-shaped support member 330 is fixedly disposed on the workpiece stage 100 and spans the first slide rail.

[0055] Preferably, such as Figure 6 and Figure 7 As shown, the exposure head 301 is slidably mounted on the support member 330 along a third direction, which is perpendicular to the plane containing the first and second directions. For example, the first, second, and third directions are mutually perpendicular. That is, the exposure head 301 is slidably mounted on the mounting beam 331 in a vertical direction, facilitating adjustment of the depth of focus and adapting to products of different thicknesses to meet varying exposure effects and requirements.

[0056] In this embodiment, the exposure apparatus includes a second driving unit for moving the exposure unit along a second direction and a third driving unit 430 for moving the exposure head 301 along a third direction. The second driving unit includes a second slide rail 421 and a second slider 422 slidably disposed on the second slide rail 421. The second slide rail 421 extends along the second direction and is disposed on the mounting beam 331 of the support member 330. The third driving unit 430 includes a third slide rail 431 and a third slider 432 slidably disposed on the third slide rail 431. The third slide rail 431 extends along a third direction and is disposed on the second slider 422. The exposure head 301 is disposed on the third slider 432. It can be understood that each driving unit is provided with a driving component for driving the slider to move along the corresponding slide rail.

[0057] Preferably, the second slider 422 is L-shaped, and the support member 330 is provided with second slide rails 421 on both the side and top surfaces along the second direction. The two sides of the L-shaped second slider 422 respectively cooperate with the second slide rails 421 on the side and top surfaces. By setting the second slider 422 to be L-shaped and providing second slide rails 421 on the top surface of the support member 330 along the second direction to support the exposure head 301, the weight of the exposure head 301 is prevented from causing discomfort in the cooperation between the second slider 422 and the second slide rails 421 on the side, thus improving the reliability and stability of the exposure unit moving along the second direction.

[0058] Optionally, the multiple exposure heads 301 may have different exposure accuracies to adapt to different exposure needs. Those skilled in the art can select and set these accuracies according to the actual exposure scenario, without specific limitations. It is worth noting that when there are two or more support members 330, the exposure heads 301 on the same support member 330 have the same exposure accuracies, while the exposure heads 301 on different support members 330 have different exposure accuracies. This arrangement allows for simultaneous exposure of patterns with different exposure accuracies during area exposure, through the second exposure units 320 with different exposure accuracies on different support members 330.

[0059] For example, at least two exposure heads 301 of the second exposure unit 320 are mounted to the third slider 432 via a mounting plate 303 to fix their relative positions. Additionally, alignment identification elements 302 are provided on both the first exposure unit 310 and the second exposure unit 320 to perform alignment operations on the exposure units. One alignment identification element 302 is provided at each end of the second exposure unit 320. For example, the alignment identification element 302 can be a positioning camera, achieving alignment identification through image capture.

[0060] In this embodiment, as Figure 8 As shown, the carrier module 200 is configured to drive the part to be exposed 1 to rotate relative to the workpiece stage 100 along the horizontal plane, so as to rotate the part to be exposed 1 to a position that cooperates with the exposure unit to achieve exposure of a preset shape.

[0061] Specifically, the carrier module 200 includes a first carrier platform 210, which is disposed on the first slider. The carrier module 200 also includes a second carrier platform 220 and a rotating shaft 230 connected to the second carrier platform 220. The second carrier platform 220 is used to carry the part 1 to be exposed, and rotation is used to drive the second carrier platform 220 to rotate, with a rotation angle of 0-100°. Preferably, an air-bearing foot 221 is provided below the second carrier platform 220, and the lower end of the air-bearing foot 221 is slidably supported on the upper surface of the first carrier platform 210 to prevent the second carrier platform 220 from sagging.

[0062] Furthermore, the support module 200 includes multiple functional nozzles 222 arranged in an array. The functional nozzles 222 are mounted on the second support stage 220. The functional nozzles 222 can provide negative pressure to adsorb the part 1 to be exposed, or provide positive pressure to float the part 1 to be exposed, thereby correcting its position. That is, the support module 200 supports the part 1 to be exposed through adsorption, providing more stable support and enabling not only rotation of the part 1 but also its alignment. Correspondingly, alignment mechanisms 240 are provided on both adjacent sides of the second support stage 220. When the functional nozzles 222 blow air to float the part 1 to be exposed, the alignment mechanisms 240 can cooperate to correct the position of the part 1 to be exposed, ensuring the accuracy of the subsequent exposure position. Preferably, the alignment mechanism 240 further includes a transverse alignment block and a longitudinal alignment block, respectively used to straighten the adjacent sides of the part 1 to be exposed.

[0063] In this embodiment, the carrier module 200 further includes a plurality of feeding rollers 250, which are slidably disposed on the second carrier platform 220 in a vertical direction. When feeding is required and the functional nozzle 222 stops negative pressure adsorption of the part 1 to be exposed, the feeding rollers 250 rise to lift the part 1 to be exposed, and transport the exposed part away from the functional nozzle 222 by rotation.

[0064] Preferably, the exposure apparatus further includes a base 510 and a vibration damping module 520, with the workpiece stage 100 mounted on the base 510 via the vibration damping module 520. By providing the vibration damping module 520, the vertical stability of the workpiece stage 100 is improved, thereby enhancing the vertical stability of the part 1 to be exposed and the exposure module mounted on the workpiece stage 100, and thus effectively improving the exposure accuracy.

[0065] This embodiment also discloses an exposure device, including an exposure unit and a loading / unloading unit as described in any of the above embodiments. The loading / unloading unit can pick up and place the parts to be exposed 1 from three sides of the support module 200 away from the exposure module 300, improving the flexibility of site arrangement for end customers. The loading / unloading unit is configured as a robot, a CV conveyor line, or a transport shaft, providing greater flexibility in loading / unloading methods. Specifically, the loading / unloading unit loads and unloads on the same side of the workpiece table, such as using a robot to load and unload from the left side of the workpiece table; or, the loading / unloading unit loads and unloads on different sides of the workpiece table, such as using a robot to load from the left side of the workpiece table 100 and a transport shaft to unload from the right side of the workpiece table 100. The exposure device is also equipped with a control system. The exposure head 301 of the exposure unit, each power drive component, and the loading / unloading unit are all communicatively connected to the control system, facilitating automated exposure.

[0066] Adopting such Figure 4 and Figure 9When the exposure device of the exposure apparatus shown performs low-precision full-surface exposure (here, the low-precision full-surface exposure refers to low exposure precision, which is determined by the hardware of the exposure head 301), exemplarily, the precision of the exposure heads 301 of the support members 330 on the left side is the same and is less than the precision of the exposure heads 301 of the support members 330 on the right side. Therefore, in this working mode, only the second exposure unit 320 of the support member 330 on the left side works. At this time, the two first exposure units 310 of the support member 330 on the left side and the two first exposure units 310 of the support member 330 on the right side are respectively located at the extreme positions at both ends of the corresponding second slide rail 421 to avoid affecting the exposure.

[0067] The specific steps are as follows: As shown in a of Figure 10 , load the part 1 to be exposed, place the part 1 to be exposed on the second carrier table 220 of the carrier module 200. The functional nozzle 222 turns on the reverse blowing function to make the part 1 to be exposed float slightly. Then, the shaping mechanism 240 operates, and the horizontal shaping block and the vertical shaping block perform shaping operations in sequence. After the shaping operation is completed, the functional nozzle 222 starts vacuum adsorption, and the part 1 to be exposed of the product is completed; As shown in b of Figure 10 , rotate the rotating shaft 230 to rotate the second carrier table 220 by 90° to keep the direction of the part 1 to be exposed consistent with the processing scanning direction of the exposure apparatus. If the loading direction of the part 1 to be exposed is consistent with the processing scanning direction, this step can be omitted; Under the cooperation of the first driving unit 410 and the second driving unit, two sets of positioning cameras on the working second exposure unit 320 start to capture the markers on the part 1 to be exposed for fine positioning operation. Then, the third driving unit performs focus depth adjustment to ensure that the working second exposure unit 320 is at the best working focus depth. The second driving unit drives the second exposure unit 320, and the first driving unit 410 drives the part 1 to be exposed to move to the starting processing position to prepare for processing; As shown in c of Figure 10 , the first driving unit 410 performs scanning operation, and the second driving unit performs stepping operation to complete the full-surface exposure operation of the part 1 to be exposed; As shown in d of Figure 10 , the functional nozzle 222 stops vacuum adsorption, the blanking roller 250 rises, the upper surface of the blanking roller 250 is higher than the upper surface of the functional nozzle 222, and the blanking roller 250 rotates to drive the exposed part to move away from the functional nozzle 222 to complete the blanking work.

[0068] When using the exposure apparatus of the exposure device shown in Figure 4 and Figure 9 to perform "cross" - shaped rapid exposure work, one exposure head 301 in the second exposure unit 320 of the left support member 330 and the two first exposure units 310 of the left support member 330 all participate in the processing, and the two first exposure units 310 of the right support member 330 do not participate in the processing.

[0069] The specific steps are as follows: As shown in a of Figure 11 , load the part 1 to be exposed. Place the part 1 to be exposed on the second carrier table 220. The functional nozzle 222 turns on the reverse blowing function to make the part 1 to be exposed float slightly. Then, the shaping mechanism performs operations. The horizontal shaping block and the vertical shaping block perform shaping operations in sequence. After the shaping operation is completed, the functional nozzle 222 turns on the vacuum adsorption, and the product part 1 to be exposed is completed; As shown in Figure 11 , under the cooperation of the first driving unit 410 and the second driving unit, the positioning cameras of the first exposure units 310 in operation respectively capture the markers on the left and right edges of the part 1 to be exposed for fine positioning operations. Then, the third driving unit performs focus depth adjustment to ensure that one exposure head 301 in the second exposure unit 320 of the left support member 330 and the two first exposure units 310 of the left support member 330 are all at the optimal working focus depth. The first driving unit 410 carries the part 1 to be exposed, and the corresponding driving members of the second driving unit carry the second exposure unit 320 of the left support member 330 to move, so that the exposure head 301 in operation in the second exposure unit 320 is located at the starting processing position of the middle vertical line of the "field" shape in the middle of the part 1 to be exposed. The corresponding driving members of the second driving unit carry the two first exposure units 310 of the left support member 330 to move to the starting processing positions of the left and right edges of the part 1 to be exposed respectively, and are ready for processing; As shown in Figure 11 , as shown in c, the first driving unit 410 performs a scanning operation, and the second driving unit remains stationary to complete the exposure operation of the left, middle, and right three vertical lines of the "field" shape of the part 1 to be exposed; As shown in Figure 11 , as shown in d, the rotating shaft 230 rotates the second carrier table 220 and the part 1 to be exposed by 90°; As shown in Figure 11 , as shown in e, the first driving unit 410 remains stationary. The corresponding driving members of the second driving unit carry the second exposure unit 320 of the left support member 330 to move to the starting processing position of the middle horizontal line of the "field" shape in the middle of the part 1 to be exposed. The driving members of the second driving unit respectively carry the two first exposure units 310 of the left support member 330 to move to the starting processing positions of the front and rear edges of the part 1 to be exposed respectively, and are ready for processing; The first driving unit 410 performs a scanning operation, and the second driving unit remains stationary to complete the exposure operation of the front and rear edges of the part 1 to be exposed and complete the exposure operation of the upper, middle, and lower three horizontal lines of the "field" shape of the part 1 to be exposed; The functional nozzle 222 stops the vacuum adsorption, the blanking roller 250 rises, the upper surface of the blanking roller 250 is higher than the upper surface of the functional nozzle 222, and the blanking roller 250 rotates to drive the exposed part to move away from the functional nozzle 222 to complete the blanking work.

[0070] Adopt as shown in Figure 4 and Figure 9When the exposure device shown performs high-precision full-area exposure (high-precision full-area exposure here refers to high exposure accuracy, which is determined by the hardware of the exposure lens), the two first exposure units 310 located on the right support 330 participate in the processing, while the exposure heads 301 located on the left support 330 do not participate in the processing.

[0071] The specific steps are as follows: Figure 12 As shown in Figure a, the part to be exposed 1 is loaded and placed on the second support platform 220. The functional nozzle 222 activates the reverse air blowing function, causing the part to be exposed 1 to float slightly. Then, the straightening mechanism 240 performs its operation, with the horizontal straightening block and the vertical straightening block performing straightening operations in sequence. After the straightening operation is completed, the functional nozzle 222 activates vacuum adsorption, and the part to be exposed 1 is finished. Figure 12 As shown in Figure b, the rotating shaft 230 rotates the second support platform 220 by 90°, aligning the orientation of the part to be exposed 1 with the processing scanning direction of the exposure equipment. If the feeding direction of the part to be exposed 1 is consistent with the processing scanning direction, this step is omitted. With the cooperation of the first drive unit 410 and the second drive unit, the positioning camera of the working first exposure unit 310 begins to capture the marker on the part to be exposed 1 for precise positioning. Then, the third drive unit 430 adjusts the depth of focus to ensure that the two first exposure units 310 of the right support 330 are at the optimal working depth of focus. The corresponding drive units of the second drive unit carry the two first exposure units 310 of the right support 330, and the first drive unit 410 carries the part to be exposed 1, moving them to the starting processing position, ready for processing. Figure 12 As shown in Figure c, the first drive unit 410 performs a scanning operation, and the second drive unit performs a stepping operation to complete the full-surface exposure of the part 1 to be exposed; as shown in Figure c. Figure 12 As shown in Figure d, the functional nozzle 222 stops vacuum adsorption, the feeding roller 250 rises, the upper surface of the feeding roller 250 is higher than the upper surface of the functional nozzle 222, the feeding roller 250 rotates and drives the exposed parts to move away from the functional nozzle 222, completing the feeding operation.

[0072] The above description is only a preferred embodiment of this utility model. For those skilled in the art, there will be changes in the specific implementation method and application scope based on the idea of ​​this utility model. The content of this specification should not be construed as a limitation of this utility model.

Claims

1. An exposure apparatus characterized by comprising: The utility model relates to an exposure device, including: Workpiece table (100); Carrying module (200) for carrying the part (1) to be exposed, the carrying module (200) is along the first direction slidingly arranged in the workpiece table (100); Exposure module (300) including at least one first exposure unit (310) and at least one second exposure unit (320), the first exposure unit (310) includes an exposure head (301), the second exposure unit (320) includes at least two exposure heads (301) of opposite fixed, the exposure module (300) further includes at least one support (330) arranged in the workpiece table (100), at least one first exposure unit (310) and / or at least one second exposure unit (320) are slidably arranged on the support (330) along the second direction, and the second direction is arranged at an angle with the first direction.

2. The exposure apparatus according to claim 1, wherein The support (330) is provided with two, and the exposure head (301) is arranged on opposite sides of the two supports (330).

3. The exposure apparatus according to claim 1, wherein The support (330) is provided with one, and at least one first exposure unit (310) and at least one second exposure unit (320) are arranged on one support (330); or the support (330) is provided with two, and at least one first exposure unit (310) is arranged on one of the supports (330), and at least one second exposure unit (320) is arranged on the other support (330).

4. The exposure apparatus according to claim 1, wherein The exposure device further includes a first driving unit (410), the first driving unit (410) includes a first sliding rail and a first sliding block slidably arranged on the first sliding rail, the first sliding rail extends along the first direction and is arranged on the workpiece table (100), and the carrying module (200) is arranged on the first sliding block; the support (330) includes a mounting beam (331) extending along the second direction and a support beam (332) arranged on both sides of the mounting beam (331), the support beam (332) is connected with the workpiece table (100) and located on both sides of the first sliding rail, and the exposure head (301) is slidably arranged on the mounting beam (331).

5. The exposure apparatus according to one of claims 1, wherein The exposure head (301) is slidably arranged on the support (330) along a third direction, and the third direction is arranged vertically to the planes where the first direction and the second direction are located.

6. The exposure apparatus according to claim 5, wherein The exposure device includes a second driving unit and a third driving unit (430), the second driving unit includes a second sliding rail (421) and a second sliding block (422) slidably arranged on the second sliding rail (421), the second sliding rail (421) extends along the second direction and is arranged on the support (330), the third driving unit (430) includes a third sliding rail (431) and a third sliding block (432) slidably arranged on the third sliding rail (431), the third sliding rail (431) extends along the third direction and is arranged on the second sliding block (422), and the exposure head (301) is arranged on the third sliding block (432).

7. The exposure apparatus according to claim 6, wherein The second slider (422) is arranged in an L shape, and the second sliding rail (421) is arranged on the side and top of the support (330) along the second direction.

8. The exposure apparatus according to claim 1, wherein The exposure heads (301) have different exposure accuracies.

9. The exposure apparatus according to one of claims 1, wherein When the support (330) is provided with two or more supports, the exposure heads (301) on the same support (330) have the same exposure accuracy, and the exposure heads (301) on different supports (330) have different exposure accuracies.

10. The exposure apparatus according to any one of claims 1 to 9, wherein The bearing module (200) is configured to drive the part to be exposed (1) to rotate relative to the workpiece table (100) along a horizontal plane.

11. The exposure apparatus according to any one of claims 1 to 9, wherein The bearing module (200) comprises a plurality of functional nozzles (222) arranged in an array, and the functional nozzles (222) can provide negative pressure to adsorb the part to be exposed (1), or provide positive pressure to make the part to be exposed (1) float to correct the part to be exposed (1).

12. An exposure apparatus characterized by comprising: The exposure device and the loading and unloading device of any one of claims 1-11 are provided, the loading and unloading device can take and place the part to be exposed (1) to the bearing module (200) from three sides of the bearing module (200) away from the exposure module (300); and the loading and unloading device is provided as a mechanical hand, a CV conveying line or a carrying shaft.

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