Glue uniformizing machine capable of pre-annealing

Abstract

A glue uniformizing machine capable of pre-annealing relates to the technical field of film preparation and comprises a box body, a glue uniformizing shell, a chuck and a driving device, the glue uniformizing shell is mounted at the top in the box body, and a top opening is used for clamping and taking out a glue uniformizing substrate; the chuck is driven by a driving device to rotate; the driving device adopts a combined structure of a telescopic cylinder, a guide rod and a motor and can lift the chuck; a cover body with an infrared heating lamp is arranged at the top of the glue uniformizing shell and is used for pre-annealing treatment, so that the film quality is improved; a glue storage barrel and a telescopic device are further arranged, and automatic glue dripping operation is achieved; the cover body is driven by the telescopic cylinder to lift, so that the substrate is convenient to replace; the box body is provided with an access hole, a drain outlet and a collecting cup, so that maintenance and cleaning are facilitated; the infrared heating lamp adopts a concentric annular structure, so that uniform heating is realized, and the pre-annealing performance is improved; according to the overall design, the glue uniformizing and pre-annealing processes are optimized, and the film manufacturing efficiency and quality are improved.

Description

Technical Field

[0001] This utility model relates to the field of thin film preparation technology, and in particular to a spin coater capable of pre-annealing. Background Technology

[0002] A spin coater is a device that uses centrifugal force to uniformly coat a substrate with adhesive. Its basic working principle is to rotate the substrate at high speed, causing the adhesive droplets on the substrate to be evenly distributed under centrifugal force, forming a film of the desired thickness. The viscosity of the adhesive, the spin coater's rotation speed, and the rotation time all contribute to determining the film's thickness and uniformity. Existing spin coaters typically only have the function of uniformly distributing the adhesive and lack the ability to pre-anneal the film. This necessitates additional equipment for film performance optimization, increasing production costs and process complexity, and is particularly inefficient when layer-by-layer film deposition is required. These shortcomings are problems that urgently need to be addressed by those skilled in the art. Utility Model Content

[0003] In order to overcome the shortcomings of the prior art, this utility model discloses a spin coater capable of pre-annealing.

[0004] To achieve the above-mentioned objectives, the present invention adopts the following technical solution:

[0005] A spin coater capable of pre-annealing includes:

[0006] The enclosure serves as the foundation;

[0007] A homogenizing shell is provided on the box body; the top of the homogenizing shell is provided with an opening;

[0008] A chuck, located inside the cavity of the spin coater housing, is used to clamp the spin coater substrate.

[0009] The drive unit is installed inside the housing. Its output shaft moves through the glue-coating housing and is fastened to the chuck to drive the chuck to rotate.

[0010] The cover is placed over the opening at the top of the uniform adhesive shell;

[0011] An infrared heating lamp, installed inside the cover, is used for pre-annealing the film by heating.

[0012] Preferably, the driving device includes:

[0013] The support frame is securely connected to the housing.

[0014] Mounting plate, located above the support frame;

[0015] Two guide rods are respectively installed at both ends of the mounting plate, and the other end of the guide rods movably passes through the support frame;

[0016] The first telescopic cylinder, mounted on the support frame, is used to drive the mounting plate to rise and fall;

[0017] The motor is mounted on the mounting plate, and the output shaft of the motor is coaxially and securely connected to the chuck.

[0018] Preferably, the top of the box is provided with a workbench, and a second telescopic cylinder for driving the lid to rise and fall is installed on one side of the workbench. The telescopic rod of the second telescopic cylinder is fastened to the lid through a connecting arm.

[0019] Preferably, the top of the cover is provided with a through hole, and a glue storage tank is provided at the position of the through hole. The glue storage tank is connected to the top of the cover for lifting and lowering through a telescopic device. The bottom of the glue storage tank is connected to a glue dispensing nozzle through a solenoid valve.

[0020] Preferably, the housing has an inspection port.

[0021] Preferably, a drain outlet is provided on one side of the bottom of the gelling shell, and a collection cup is detachably connected to the bottom of the drain outlet.

[0022] Preferably, the infrared heating lamp has a ring structure, and the cover contains multiple infrared heating lamps of different diameters, which are arranged concentrically.

[0023] Preferably, the bottom of the box is provided with multiple support legs.

[0024] By adopting the technical solution described above, this utility model has the following beneficial effects:

[0025] This invention features a simple structure. A cover is positioned at the top opening of the spin coat housing, and an infrared heating lamp is installed inside the cover. After the adhesive is evenly distributed on the spin coat substrate, the infrared heating lamp is activated to pre-anneal the film. This integrated function not only optimizes the film forming quality but also reduces reliance on additional equipment and lowers production costs.

[0026] This invention further employs a liftable drive device. When clamping the plating substrate, the first telescopic cylinder drives the mounting plate to move upward, causing the chuck to extend out of the plating housing. This design significantly improves the convenience of clamping operations, allowing operators to quickly clamp the plating substrate without having to reach inside the plating housing, thus increasing work efficiency and reducing operational risks.

[0027] This invention further incorporates an inspection port, a drain outlet, and a collection cup in the housing for easy maintenance and cleaning. The infrared heating lamps utilize a concentric ring structure to achieve uniform heating and improve pre-annealing performance. Attached Figure Description

[0028] Figure 1 This is a schematic diagram of the structure of this utility model;

[0029] Figure 2 This is a three-dimensional structural diagram of the present invention;

[0030] Figure 3 This is a schematic diagram of the drive device.

[0031] Figure 4 A schematic diagram showing the chuck extending from the glue-coating housing;

[0032] Figure 5 This is a bottom view of the cover.

[0033] In the diagram: 1. Box body; 2. Spread glue shell; 3. Chuck; 4. Drive device; 4-1. Support frame; 4-2. Mounting plate; 4-3. Guide rod; 4-4. First telescopic cylinder; 4-5. Motor; 5. Cover; 6. Infrared heating lamp; 7. Worktable; 8. Second telescopic cylinder; 9. Connecting arm; 10. Glue storage tank; 11. Telescopic device; 12. Inspection port; 13. Collection cup; 14. Support leg. Detailed Implementation

[0034] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. All other embodiments obtained by those skilled in the art based on the embodiments of the present utility model without creative effort are within the scope of protection of the present utility model.

[0035] In the description of this utility model, it should be noted that the terms "upper" and "lower" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship in which the utility model product is usually placed during use. They are only used to facilitate the description of this utility model and to simplify the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0036] In this application, unless otherwise expressly specified and limited, the terms "installation," "connection," "joining," "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0037] Example 1:

[0038] Combined with appendix Figures 1-5A pre-annealing spin coater includes a housing 1, a spin coat shell 2, a chuck 3, and a drive unit 4. The housing 1 serves as the basic structure of the entire device, with the spin coat shell 2 securely mounted to its top. The top of the spin coat shell 2 has an opening, and the chuck 3 is housed within its internal cavity for clamping the spin coat substrate. Specifically, the operator can clamp the spin coat substrate onto the chuck 3 through the opening at the top of the spin coat shell 2, and remove the spin coat substrate through the same opening after film formation.

[0039] The chuck 3 is a mature, existing product, and users can choose the appropriate model to purchase based on their actual needs. A drive unit 4 is also installed inside the housing 1, which drives the chuck 3 to rotate. The output shaft of the drive unit 4 moves through the spin coater housing 2 and is securely connected to the chuck 3. During the film preparation process, the drive unit 4 rotates the spin coater substrate with the droplets of adhesive by rotating the chuck 3, thereby achieving uniform distribution of the adhesive and forming a thin film.

[0040] It should be noted that the drive device 4 can be in the form of a drive motor, that is, the drive motor is installed at the bottom of the spin coating housing 2 and directly drives the chuck 3 to rotate. However, this design has certain limitations: since the chuck 3 is located inside the spin coating housing 2, the operation of clamping the spin coating substrate is limited by space, resulting in inconvenience. Therefore, this embodiment prefers another type of drive device 4 to optimize the clamping process.

[0041] Specifically, the drive device 4 includes a support frame 4-1, a mounting plate 4-2, guide rods 4-3, and a first telescopic cylinder 4-4. The support frame 4-1 is securely connected to the housing 1, and the mounting plate 4-2 is mounted on top of it. The mounting plate 4-2 is connected to the support frame 4-1 by two guide rods 4-3, which are respectively installed at both ends of the mounting plate 4-2, with the other end movably passing through the support frame 4-1. In addition, the first telescopic cylinder 4-4 is also installed between the mounting plate 4-2 and the support frame 4-1, driving the mounting plate 4-2 to move up and down. A motor 4-5 is also fixedly mounted on the mounting plate 4-2, and the output shaft of the motor 4-5 is coaxially and securely connected to the chuck 3.

[0042] When clamping the plating substrate, the first telescopic cylinder 4-4 drives the mounting plate 4-2 to move upward, and the output shaft of the motor 4-5 drives the chuck 3 to move upward synchronously until the chuck 3 is fully extended out of the plating housing 2. At this time, the operator can quickly complete the clamping of the plating substrate. After clamping is completed, the first telescopic cylinder 4-4 is reset, and the mounting plate 4-2 drives the chuck 3 to move downward, finally causing the chuck 3 to fall into the plating housing 2.

[0043] It should be noted that during the rotation of the spin coater substrate, excess adhesive may be splashed into the spin coater housing 2. When the chuck 3 extends out of the spin coater housing 2, the inner wall of the spin coater housing 2 can be cleaned, thereby preventing adhesive residue from affecting subsequent operations.

[0044] To achieve the pre-annealing function, a cover 5 is provided over the top opening of the homogenizing shell 2. An infrared heating lamp 6 is installed inside the cover 5, as shown in the attached diagram. Figure 5 As shown, after the adhesive on the spin coater substrate is evenly distributed by rotation, the infrared heating lamp 6 can be turned on to heat the film on the spin coater substrate, thereby achieving pre-annealing treatment. This design effectively improves the molding quality and performance of the film.

[0045] Example 2:

[0046] Combined with appendix Figures 1 to 4 This embodiment discloses a pre-annealing spin coater, which differs from Embodiment 1 in that: based on Embodiment 1, a worktable 7 is added to the top of the housing 1, and a second telescopic cylinder 8 is installed on one side of the worktable 7. This second telescopic cylinder 8 is specifically used to drive the cover 5 to achieve lifting and lowering. Specifically, the telescopic rod of the second telescopic cylinder 8 is fastened to the cover 5 through a connecting arm 9, thereby ensuring that the cover 5 can stably rise and fall with the telescopic movement of the second telescopic cylinder 8. When the cover 5 rises and opens, it will deflect around the axis of the second telescopic cylinder 8. This design allows the opening at the top of the spin coater housing 2 to be fully exposed, thereby greatly facilitating the replacement of the spin coater substrate.

[0047] Furthermore, the top of the cover 5 is designed with a through hole, and a glue storage tank 10 is set at the corresponding position of the through hole. The glue storage tank 10 is connected to the top of the cover 5 for lifting via a telescopic device 11. The telescopic device 11 can be a telescopic cylinder or a lifting slide, and its core function is to move the glue storage tank 10 downwards when a glue dispensing operation is required, until the dispensing nozzle accurately enters the interior of the spin coater housing 2. The bottom of the glue storage tank 10 is connected to the dispensing nozzle via a solenoid valve. When the solenoid valve is open, the glue will drip from the glue storage tank 10 along the dispensing nozzle onto the surface of the spin coater substrate; when the solenoid valve is closed, the telescopic device 11 can be controlled to move the glue storage tank 10 upwards, thereby removing the dispensing nozzle from the spin coater housing 2. This design effectively avoids the risk of the dispensing nozzle being damaged by high temperature during the pre-annealing operation of the film on the spin coater substrate.

[0048] After the pre-annealing treatment of one film layer on the spin coater substrate is completed, the operator can control the telescopic device 11 to move the glue storage tank 10 downwards to produce the next film layer. By depositing layer by layer until the required film thickness is achieved, this layered operation mode not only improves the precision of film production but also significantly enhances the overall work efficiency.

[0049] Example 3:

[0050] Combined with appendix Figure 2 and 4 This embodiment discloses a pre-annealing spin coater. Based on Embodiment 1 or 2, the housing 1 is specially designed with an inspection port 12. The main function of this inspection port 12 is to facilitate the operator to inspect and maintain the drive device 4, thereby ensuring the long-term stable operation of the equipment.

[0051] Furthermore, a drain port is provided on one side of the bottom of the homogenizing housing 2, and a collection cup 13 is detachably connected to the bottom at the corresponding position of the drain port. The function of the collection cup 13 is to collect excess adhesive that is thrown into the homogenizing housing 2 during the homogenizing process. To ensure the cleanliness and normal operation of the equipment, the operator needs to periodically remove the collection cup 13 through the inspection port 12 for cleaning.

[0052] In addition, the bottom of the housing 1 is designed with multiple support legs 14. The main function of these support legs 14 is to provide stable support for the housing 1, ensuring that the equipment remains stable during operation, thereby improving the accuracy and quality of film production.

[0053] Example 4:

[0054] Combined with appendix Figure 5 This embodiment discloses a spin coater capable of pre-annealing. Based on any of the embodiments in embodiments one to three, the structure of the infrared heating lamp 6 is optimized. Specifically, the infrared heating lamp 6 adopts a ring structure, and multiple infrared heating lamps 6 with different diameters are arranged inside the cover 5. These infrared heating lamps 6 are arranged concentrically, thereby enabling more uniform heating of the film on the spin coater substrate. This design effectively improves the performance of pre-annealing, ensuring that the film obtains ideal physical and chemical properties during the fabrication process, while also improving the overall equipment efficiency and film fabrication quality.

[0055] The parts of this utility model not described in detail are prior art. It is obvious to those skilled in the art that this utility model is not limited to the details of the above exemplary embodiments, and that this utility model can be implemented in other specific forms without departing from the spirit or basic characteristics of this utility model. Therefore, the embodiments should be regarded as exemplary and non-limiting in all respects, and are intended to include all changes that fall within the meaning and scope of equivalents within this utility model.

Claims

1. A pre-bake capable film applicator characterized by, It includes: The box (1) as the foundation; The uniform glue shell (2) is provided in the box (1); the top of the uniform glue shell (2) is provided with an opening; Chuck (3), provided in the cavity of the uniform glue shell (2), used for clamping uniform glue substrate; Driving device (4), installed in the box (1), its output shaft is movably penetrated through the uniform glue shell (2), and is tightly connected with the chuck (3), used for driving the chuck (3) to rotate; Cover (5), cover is provided in the top opening of the uniform glue shell (2); Infrared heating lamp (6), installed in the cover (5), used for heating the film preannealing.

2. The pre-heatable film developer according to claim 1, characterized in that The driving device (4) includes: Support frame (4-1), tightly connected with the box (1); Mounting plate (4-2), provided above the support frame (4-1); Two guide rods (4-3) are respectively installed at both ends of the mounting plate (4-2), the other end of the guide rod (4-3) is movably penetrated through the support frame (4-1); First telescopic cylinder (4-4), installed on the support frame (4-1), used for driving the mounting plate (4-2) to lift; Motor (4-5), installed on the mounting plate (4-2), the output shaft of the motor (4-5) is coaxially tightly connected with the chuck (3).

3. The pre-heatable film enhancer of claim 1, wherein: The top of the box (1) is provided with a workbench (7), one side of the workbench (7) is provided with a second telescopic cylinder (8) for driving the cover (5) to lift, the telescopic rod of the second telescopic cylinder (8) is tightly connected with the cover (5) through the connecting arm (9).

4. The pre-heatable film developer according to claim 3, characterized in that: The top of the cover (5) is provided with a through hole, a glue storage barrel (10) is provided at the position corresponding to the through hole, the glue storage barrel (10) is connected with the top of the cover (5) through the telescopic device (11); the bottom of the glue storage barrel (10) is communicated with the glue dropping nozzle through the electromagnetic valve.

5. The pre-heatable film drawer of claim 1, wherein: The box (1) is provided with an inspection port (12).

6. The pre-heatable film drawer of claim 1 or 5, characterized in that The bottom of the uniform glue shell (2) is provided with a sewage outlet, and the bottom of the sewage outlet is detachably connected with a collecting cup (13).

7. The pre-annihilatable film drawer of claim 1, wherein: The infrared heating lamp (6) is in ring structure, and the cover (5) is provided with a plurality of infrared heating lamps (6) with different diameters, and the plurality of infrared heating lamps (6) are arranged concentrically.

8. The pre-annihilatable film developer of claim 1, wherein: The bottom of the box (1) is provided with a plurality of supporting legs (14).

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