Scraper for wafer scraping

Abstract

The utility model discloses a scraping knife for a wafer scraping blade, which belongs to the technical field of wafer scraping blades and comprises a knife rest and a scraping knife mounted on the knife rest, the scraping knife is of a hollow structure and is provided with a blade end and a connecting end, and the connecting end is connected with external negative pressure equipment; the scraper adopts a scraping and negative pressure suction mode, defective products can be cleaned while being scraped, subsequent cleaning procedures are reduced, and compared with an existing manual scraping mode, the production efficiency is greatly improved.

Description

Technical Field

[0001] This utility model relates to the field of wafer scraping technology, specifically to a wafer scraper. Background Technology

[0002] After the wafer dicing process, there are some defective products on the edge of the wafer. After the defective products are sorted out by the sorting machine, they need to be scraped off with a scraper. Currently, most of the time, manual or equipment is used to scrape them off directly. Although this can separate the good products from the defective products, a large amount of defective product fragments are still left in place, which requires further cleaning and affects the processing efficiency. Summary of the Invention

[0003] To address the aforementioned technical shortcomings, the purpose of this utility model is to provide a wafer scraper that can separate high-quality and defective products while removing most of the defective products, thereby reducing cleaning steps and improving processing efficiency.

[0004] To solve the above-mentioned technical problems, the present invention adopts the following technical solution: The present invention provides a wafer scraper, including a tool holder and a scraper mounted on the tool holder. The scraper has a hollow structure, with a cutting edge and a connecting end, the connecting end being connected to an external negative pressure device.

[0005] Preferably, the cutting edge has a contact surface parallel to the wafer.

[0006] Preferably, the scraper has a cylindrical structure.

[0007] Preferably, the blade of the scraper has two pointed cutting edges.

[0008] Preferably, the cutting edge has a visual observation window, and both tip cutting edges are located within the projection area of ​​the visual observation window.

[0009] Preferably, the tool holder comprises:

[0010] The connecting arm connects to the drive mechanism of the scraper; and

[0011] Connector, which connects to the connecting arm;

[0012] The scraper is connected to the connector via a connecting bracket.

[0013] Preferably, the connector has an annular groove, and the connecting frame has an annular structure that mates with the annular groove.

[0014] Preferably, the connector is provided with a locking member for fixing the annular structure in the annular groove. The locking member has a screw portion, and the portion of the connector located in the annular groove has a threaded hole that mates with the screw portion.

[0015] Preferably, the connecting arm has an arc-shaped groove, and the connector has an arc-shaped block that mates with the arc-shaped groove. The arc length of the arc-shaped groove is 2 to 4 times the arc length of the arc-shaped block.

[0016] Preferably, a fastener is installed on the connecting arm. The fastener is a fastening screw that penetrates the connecting member. The connecting arm has a threaded hole that mates with the fastening screw. A fastening plate is fixedly installed on the fastening screw and can abut against the connecting member.

[0017] The beneficial effects of this utility model are as follows:

[0018] The scraper of this utility model adopts a scraping + negative pressure suction method, which can scrape off defective products while cleaning them, reducing subsequent cleaning processes and greatly improving production efficiency compared with the existing manual scraping method. Attached Figure Description

[0019] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0020] Figure 1 This is a structural diagram of a scraper from one perspective.

[0021] Figure 2 This is a side view of the scraper structure.

[0022] Figure 3 This is a top view of the scraper structure.

[0023] Figure 4 This is a schematic diagram of the blade tip of a scraper.

[0024] Figure 5 This is a schematic diagram of the tool holder in Example 2.

[0025] Figure 6 This is a cross-sectional view of the tool holder in Embodiment 3.

[0026] Figure 7 This is a schematic diagram of the tool holder in Example 3.

[0027] Explanation of reference numerals in the attached figures:

[0028] 1-Scraper, 2-Blade tip, 3-Connecting end, 4-Tip blade, 5-Contact surface, 6-Visual observation window, 7-Connecting arm, 8-Connector, 81-Annular groove, 9-Connecting frame, 91-Annular structure, 10-Locking element, 11-Arc groove, 12-Arc block, 13-Fastening screw, 14-Fastening plate, 15-Filling block. Detailed Implementation

[0029] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0030] Example 1:

[0031] like Figures 1 to 4 As shown, this utility model provides a wafer scraper 1, which includes a scraper 1 mounted on a tool holder. The tool holder is connected to the drive mechanism of a wafer scraper. The wafer scraper is existing technology and will not be described in detail here.

[0032] The scraper 1 in this embodiment has a hollow structure, with a blade end 2 and a connecting end 3. The blade end 2 has two pointed blades 4. In the scraping direction, one pointed blade 4 protrudes from the other pointed blade 4 so that the defective product can enter between the two pointed blades 4. The connecting end 3 is connected to an external negative pressure device, so that most of the defective product can be sucked into the scraper 1 during the scraping process, which achieves a certain cleaning effect.

[0033] In this embodiment, the scraper 1 adopts a cylindrical structure, and its blade tip 2 has a contact surface 5 parallel to the wafer. Since the wafer scraper adopts a vision guidance scheme, positioning the blade tip 2 can greatly improve the scraping effect, especially when defective products and good products are adjacent. Based on this, the blade tip 2 in this embodiment has a vision observation window 6, and the two tip blades 4 are located in the projection area of ​​the vision observation window 6, so as not to affect the vision camera's observation of the blade tip 2, thus making the scraping of defective products more accurate.

[0034] In some other embodiments, a filling block 15 is provided at the blade tip 2 to reduce the size of the opening of the blade tip 2, so that the size of the opening of the blade tip 2 is smaller than the area of ​​the connecting end 3, thereby increasing the suction force. The corresponding visual observation window 6 is equipped with glass to prevent the suction force from being wasted, so that most of the scraped-off defective products are sucked into the scraper 1.

[0035] Example 2

[0036] like Figures 1 to 5As shown, this utility model provides a wafer scraper 1, which, based on embodiment one, also includes a blade holder. The blade holder includes a connecting arm 7 and a connecting member 8. The connecting arm 7 is connected to the drive mechanism of the scraper, and the scraper 1 is connected to the connecting member 8 through a connecting frame 9. The connecting member 8 is connected to the connecting arm 7.

[0037] To allow for adjustment of the angle of the scraper 1, a groove 81 is provided on the connector 8, and the connecting bracket 9 has a ring structure 91 that mates with the groove 81.

[0038] In addition, the connector 8 is provided with a locking member 10 for fixing the annular structure 91 in the annular groove 81. The locking member 10 has a screw portion, and the portion of the connector 8 located in the annular groove 81 is provided with a threaded hole that mates with the screw portion.

[0039] The connecting frame 9 can be fixed by tightening the locking part 10, preventing the scraper 1 from shifting position during the scraping process. After loosening the locking part 10, the position of the scraper 1 can be adjusted as needed, thereby improving the versatility of adjustment requirements.

[0040] Example 3

[0041] like Figures 1 to 7 As shown, this embodiment proposes a wafer scraper 1. Based on embodiment two, the connecting arm 7 of the blade holder is provided with an arc groove 11, and the connecting member 8 has an arc block 12 that cooperates with the arc groove 11. The arc length of the arc groove 11 is 2 to 4 times the arc length of the arc block 12.

[0042] Fasteners are installed on the connecting arm 7. The fasteners are fastening screws 13 that pass through the connecting member 8. The connecting arm 7 has threaded holes that mate with the fastening screws 13. A fastening plate 14 is fixedly installed on the fastening screws 13. The fastening plate 14 can abut against the connecting member 8. The center of the arc groove 11 and the arc block 12 is located on the axis of the fastening screws 13.

[0043] The connector 8 can be fixed by tightening the fastening screw 13, and its position can be adjusted by loosening it to meet various adjustment needs.

[0044] Obviously, those skilled in the art can make various modifications and variations to this utility model without departing from its spirit and scope. Therefore, if these modifications and variations fall within the scope of the claims of this utility model and their equivalents, this utility model also intends to include these modifications and variations.

Claims

1. A wafer scraper, characterized in that, It includes a blade holder and a scraper mounted on the blade holder. The scraper has a hollow structure and has a cutting end and a connecting end, the connecting end of which is connected to an external negative pressure device.

2. The wafer scraper as described in claim 1, characterized in that, The cutting edge has a contact surface parallel to the wafer.

3. The wafer scraper as described in claim 1, characterized in that, The scraper has a cylindrical structure.

4. The wafer scraper as described in claim 1, characterized in that, The scraper has two pointed cutting edges.

5. The wafer scraper as described in claim 4, characterized in that, The cutting edge has a visual observation window, and both tip cutting edges are located within the projection area of ​​the visual observation window.

6. The wafer scraper as described in claim 1, characterized in that, The tool holder includes: The connecting arm connects to the drive mechanism of the scraper; and Connector, which connects to the connecting arm; The scraper is connected to the connector via a connecting bracket.

7. The wafer scraper as described in claim 6, characterized in that, The connector has an annular groove, and the connecting frame has an annular structure that mates with the annular groove.

8. The wafer scraper as described in claim 7, characterized in that, The connector is provided with a locking member for fixing the annular structure in the annular groove. The locking member has a screw portion, and the portion of the connector located in the annular groove has a threaded hole that mates with the screw portion.

9. The wafer scraper as described in claim 6, characterized in that, The connecting arm has an arc-shaped groove, and the connector has an arc-shaped block that mates with the arc-shaped groove. The arc length of the arc-shaped groove is 2 to 4 times the arc length of the arc-shaped block.

10. The wafer scraper as described in claim 9, characterized in that, The connecting arm is equipped with a fastener, which is a fastening screw that penetrates the connecting member. The connecting arm has a threaded hole that mates with the fastening screw. A fastening plate is fixedly installed on the fastening screw and can abut against the connecting member.

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