Working water table with exhaust system
By installing an exhaust system and a baffle plate on the work water platform, the problems of insufficient cleanliness of the operating area and leakage of chemical volatiles in the existing technology are solved, and a high-cleanliness and safe operating environment is achieved.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-04-03
- Publication Date
- 2026-04-03
AI Technical Summary
Existing work water stations with exhaust systems cannot simultaneously guarantee a high level of cleanliness in the operating area and prevent the spillage of volatile chemicals, thus affecting operators and the environment.
The exhaust system is located below the operating platform. High-cleanliness laminar flow air blown out by the air supply system passes through the operating platform and enters the exhaust system. The air is then discharged into the exhaust system through the exhaust vent. Combined with the design of the baffle and protective plate, it prevents the spillage of chemical volatiles and maintains the cleanliness of the operating area.
It achieves a high level of cleanliness in the operating area, prevents the spillage of volatile chemicals, and ensures the safety of operators and the protection of the environment.
Smart Images
Figure CN224072889U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of semiconductor technology, and more specifically to a working water platform with an exhaust system. Background Technology
[0002] In the semiconductor industry or chemical analysis, some tasks require a very high level of cleanliness and are performed in a pollution-free environment, while also using volatile chemicals and high-purity water. If a large cleanroom is unavailable, a localized operating environment that simultaneously achieves high cleanliness and prevents chemical spills is needed.
[0003] A high-cleanliness environment can be achieved by adding FFU filters. To prevent the volatilized chemicals from affecting operators and the surrounding environment, an exhaust system is also required. The working principle of existing clean water workbenches with exhaust systems is as follows: Figure 1 As shown, an FFU filter is installed above the water platform, and the filtered, high-cleanliness laminar flow air is blown out from above. The exhaust vent is generally located in the lower-middle part of the rear of the unit, and volatile chemicals are discharged from the exhaust vent.
[0004] However, the introduction of an exhaust system disrupts the laminar airflow below the FFU filter, compromising the cleanliness of the work area. To maintain high cleanliness, the laminar airflow from the FFU needs to be increased. This causes the laminar air to overflow near the operator's end of the water station, along with volatile chemical substances, polluting the external environment and potentially harming personnel. Conversely, preventing air from overflowing with the FFU's laminar airflow requires increasing the exhaust volume, which allows unclean air to enter the clean water station, compromising the cleanliness of the work area.
[0005] In addition, such as Figure 1 As shown, the clean laminar airflow blown out by the FFU (Fan Filter Unit) flows downwards to near the height of the exhaust duct, but before reaching the operating area, it flows towards the exhaust outlet, resulting in the operating area failing to meet cleanliness requirements. Therefore, providing a work water station that can guarantee the cleanliness of the operating platform is a problem that urgently needs to be solved by those skilled in the art. Utility Model Content
[0006] In view of this, the present invention provides a work water station with an exhaust system, ensuring a high level of cleanliness in the work area and preventing the spillage of volatile chemicals. To achieve the above objectives, the present invention adopts the following technical solution:
[0007] This utility model provides a work water platform with an exhaust system, comprising:
[0008] The enclosure includes an operating platform with several through holes. An air supply system is located above the operating platform, blowing out high-cleanliness laminar flow air. An exhaust vent is located on the side wall of the enclosure, below the operating platform. An exhaust system is located at the exhaust vent, with the end of the exhaust system furthest from the enclosure connected to an external waste gas treatment device.
[0009] Furthermore, the exhaust system includes an air collection box and an exhaust pipe. The air collection box is located at the exhaust port. The end of the air collection box away from the box body is connected to the exhaust pipe, and the end of the exhaust pipe away from the exhaust port is connected to an external waste gas treatment device.
[0010] Furthermore, a drain outlet is provided at the bottom of the side wall of the box, and a guide plate is provided below the operating platform. One end of the guide plate is connected to the inner side wall of the box, and the other end of the guide plate extends toward the drain outlet. The guide plate is sloped to guide wastewater to the drain outlet.
[0011] Furthermore, a protective plate is provided at the upper end of the operating platform near the exhaust vent.
[0012] Furthermore, the air supply system is an FFU (Fan Filter Unit).
[0013] Furthermore, the coverage area of the FFU fan filter unit is larger than the area of the operating platform.
[0014] As can be seen from the above technical solution, compared with the prior art, this utility model discloses a working water platform with an exhaust system. The exhaust system is set below the operating platform, so that the high-cleanliness laminar flow air discharged from the air supply system passes through the operating platform and is discharged into the exhaust system through the exhaust port. During this process, the chemical volatiles in the operating platform are also blown into the exhaust system, ensuring the high cleanliness of the operating platform while preventing the chemical volatiles from overflowing into the air, thus ensuring the safety of the operators. Attached Figure Description
[0015] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on the provided drawings without creative effort.
[0016] Figure 1 A structural schematic diagram of a working water platform with an exhaust system provided for existing technology;
[0017] Figure 2 A schematic diagram of the working water platform with an exhaust system provided by this utility model;
[0018] Figure 3 A schematic diagram of the operating platform provided by this utility model.
[0019] In the diagram: 1. Air supply system; 2. Air collection box; 3. Operating area; 4. Drain outlet; 5. Deflector plate; 6. Protective plate; 7. Operating platform. Detailed Implementation
[0020] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.
[0021] See Figure 2-3 This utility model discloses a work water platform with an exhaust system, comprising:
[0022] The enclosure has an operating platform 7 with several through holes. An air supply system 1 is installed above the operating platform 7, which blows out high-cleanliness laminar flow air. An exhaust port is installed on the side wall of the enclosure, located below the operating platform 7. An exhaust system is installed at the exhaust port, and the end of the exhaust system away from the enclosure is connected to an external waste gas treatment device.
[0023] During use, the high-cleanliness laminar flow air is blown out by the air supply system 1 and, under the action of the exhaust system, passes through the through holes of the operating platform 7 and enters the external waste gas treatment device through the exhaust port. During this process, the high-cleanliness laminar flow air maintains the high cleanliness of the operating platform 7 and the area above it. At the same time, when the high-cleanliness laminar flow air passes through the through holes on the operating platform 7, it carries away the chemical volatiles inside the operating platform 7, causing the chemical volatiles to flow downwards, thus ensuring the safety of the operators.
[0024] In some embodiments, the exhaust system includes an air collection box 2 and an exhaust pipe. The air collection box 2 is located at the exhaust port. The end of the air collection box 2 away from the box body is connected to the exhaust pipe, and the end of the exhaust pipe away from the exhaust port is connected to an external waste gas treatment device.
[0025] The volatile chemicals and high-cleanliness laminar flow air in the operating platform 7 pass through the through holes on the operating platform 7 under the action of the air collection box 2, flow through the exhaust port and enter the exhaust pipe, and are finally transported into the waste gas treatment device to complete the treatment of the volatile chemicals and prevent the spillage of volatile chemicals from harming the health of the operators.
[0026] In some embodiments, a drain outlet 4 is provided at the bottom of the side wall of the box, and a guide plate 5 is provided below the operating platform 7. One end of the guide plate 5 is connected to the inner side wall of the box, and the other end of the guide plate 5 extends toward the drain outlet 4. The guide plate 5 is provided with a slope, and the wastewater is guided to the drain outlet 4 through the guide plate 5.
[0027] Wastewater generated during operation flows downward through the through holes on the operating platform 7. The guide plate 5 allows the wastewater to be directly transported to the drain outlet 4. At the same time, it prevents the wastewater from dripping onto the bottom of the inner wall of the box and splashing water mist, thereby preventing the air collection box 2 from sucking in water mist and thus avoiding water mist from entering the exhaust pipe, ensuring the dryness of the exhaust pipe.
[0028] In some embodiments, a protective plate 6 is provided at the upper end of the operating platform 7 near the exhaust port.
[0029] The operating area 3 is located within the operating platform 7 on the side of the protective plate 6 away from the exhaust vent.
[0030] The protective plate 6 prevents unclean air from entering the operating area 3, ensuring the cleanliness of the operating area 3.
[0031] In some embodiments, the air supply system 1 is an FFU (Fan Filter Unit).
[0032] In some embodiments, the coverage area of the FFU fan filter unit is larger than the area of the operating platform 7.
[0033] High-cleanliness laminar flow air is delivered to the operating platform 7 through the FFU fan filter unit to ensure the cleanliness of the operating area 3.
[0034] The various embodiments in this specification are described in a progressive manner, with each embodiment focusing on its differences from other embodiments. Similar or identical parts between embodiments can be referred to interchangeably. For the apparatus disclosed in the embodiments, since they correspond to the methods disclosed in the embodiments, the description is relatively simple; relevant parts can be referred to the method section.
[0035] The above description of the disclosed embodiments enables those skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention is not to be limited to the embodiments shown herein, but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.
Claims
1. A work water table with an air exhaust system, characterized in that The utility model relates to a high-cleanliness air supply and exhaust system for a clean room, comprising: a box body provided with an operation platform, the operation platform is provided with a plurality of through holes, the operation platform is provided with a air supply system above, the air supply system blows out high-cleanliness laminar flow, the side wall of the box body is provided with an exhaust port, the exhaust port is arranged below the operation platform, the exhaust port is provided with an exhaust system, the exhaust system is connected with external exhaust treatment device away from the one end of the box body.
2. The work water table with an air exhaust system according to claim 1, characterized in that, The exhaust system comprises a wind collecting box and an exhaust pipe, the wind collecting box is arranged at the exhaust port, the one end of the wind collecting box away from the box body is connected with the exhaust pipe, the one end of the exhaust pipe away from the exhaust port is connected with external exhaust treatment device.
3. The work water table with an air exhaust system according to claim 1, characterized in that, The bottom end of the side wall of the box body is provided with a drainage port, the lower side of the operation platform is provided with a flow guide plate, one end of the flow guide plate is connected to the inner side wall of the box body, the other end of the flow guide plate extends to the drainage port, the flow guide plate is provided with a slope, and the flow guide plate guides wastewater to the drainage port.
4. The work water table with an air exhaust system according to claim 1, characterized in that, The upper end of the operation platform is provided with a protection plate near the one end of the exhaust port.
5. The work water table with an air exhaust system according to claim 1, characterized in that, The air supply system is a FFU fan filter unit.
6. The work water table with an air exhaust system according to claim 5, characterized in that, The covering area of the FFU fan filter unit is larger than the area of the operation platform.