Cooling structure and chemical vapor deposition equipment

Abstract

The utility model belongs to the technical field of semiconductor processing, and discloses a cooling structure and chemical vapor deposition equipment, the cooling structure is used for cooling a magnetic fluid sealing assembly, the magnetic fluid sealing assembly comprises a rotating motor, and an inner shaft sleeve, an outer shaft sleeve and a base shaft sleeve which are sequentially arranged from inside to outside from the axis; a first magnetofluid structure is arranged between the inner shaft sleeve and the outer shaft sleeve, a second magnetofluid structure is arranged between the outer shaft sleeve and the base shaft sleeve, the rotating motor drives the outer shaft sleeve to rotate, and one end of the base shaft sleeve is hermetically connected with a sealed part; the cooling structure comprises a plurality of first water cooling flow channels formed in the inner shaft sleeve, the multiple first water cooling flow channels communicate with an external water cooling system, the multiple first water cooling flow channels communicate with one another, and the first water cooling flow channels are used for cooling the first magnetic fluid structure. The cooling structure provides better cooling performance for the first magnetic fluid structure on the inner side of the double-shaft type magnetic fluid sealing assembly, the evaporation risk of internal magnetic liquid is reduced, and the process reliability of chemical vapor deposition equipment is guaranteed.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor processing technology, and in particular to cooling structures and chemical vapor deposition equipment. Background Technology

[0002] Magnetorheological fluid (MFD) sealing devices utilize a permanent magnet to generate a magnetic field within the sealing gap. This magnetic field firmly fixes the MFD within the gap to resist the pressure difference on both sides, thus achieving a sealing effect. They offer advantages such as high sealing performance, low friction loss, and the ability to withstand varying temperature and pressure conditions, making them suitable for various precision machining fields, including semiconductor processing equipment. In chemical vapor deposition (CVD) equipment, the reaction chamber provides a high-temperature, high-pressure environment, causing a chemical reaction on the wafer surface to form a thin film. The MFD sealing device ensures the sealing performance of the reaction chamber. However, because the MFD sealing device operates under high temperatures for extended periods, its complex internal structure, coupled with an inadequate heat dissipation design, can easily lead to MFD evaporation, affecting sealing performance. The sealing performance of the MFD sealing device significantly impacts the process environment of the reaction chamber; insufficient sealing of the reaction chamber can affect the quality of the film layer on the wafer surface. Utility Model Content

[0003] One objective of this invention is to provide a cooling structure that can solve the problem that the inner magnetic fluid structure of the existing biaxial magnetic fluid sealing assembly is difficult to dissipate heat and cool down, and is prone to evaporation of the inner magnetic fluid, thereby affecting the sealing performance.

[0004] To achieve this objective, the present invention adopts the following technical solution:

[0005] A cooling structure is provided for use in a magnetohydrodynamic (MHD) sealing assembly. The MHD sealing assembly includes a rotary motor and an inner bushing, an outer bushing, and a base bushing arranged sequentially from the center of the shaft to the outside. A first MHD structure is provided between the inner bushing and the outer bushing, and a second MHD structure is provided between the outer bushing and the base bushing. The inner bushing has a through-hole cavity at both ends. The rotary motor drives the outer bushing to rotate. One end of the base bushing is connected to the sealed component. The cooling structure includes multiple first water-cooling channels formed inside the inner bushing. The multiple first water-cooling channels are all connected to an external water-cooling system and are interconnected. The first water-cooling channels are used to cool the first MHD structure.

[0006] In one embodiment, the first water-cooling channel extends circumferentially around the inner bushing, and multiple first water-cooling channels are sequentially arranged along the axial direction of the inner bushing; and / or,

[0007] The cooling structure further includes a first water-cooling cavity formed inside the inner bushing. The first water-cooling cavity surrounds the periphery of the inner bushing and extends along the axial direction of the inner bushing to form an annular cavity. The first water-cooling cavity has a first water inlet and a first water outlet that connect to an external water-cooling system to form a circulating cooling channel. The first water-cooling cavity connects to multiple first water-cooling channels.

[0008] In one embodiment, the first water-cooling cavity is disposed below the plurality of first water-cooling channels, an inlet channel is provided between the bottom first water-cooling channel and the first water-cooling cavity, and an outlet channel is provided between the top first water-cooling channel and the first water-cooling cavity, and the coolant in the first water-cooling cavity flows sequentially from bottom to top through the plurality of first water-cooling channels.

[0009] In one embodiment, the cooling structure further includes a water-cooling groove formed on the outer side of the inner bushing, and the first magnetohydrodynamic structure blocks the opening of the water-cooling groove; the water-cooling groove is provided with a plurality of water-proof layers spaced apart along the axial direction of the inner bushing, the water-proof layers extend along the circumference of the inner bushing, and the first water-cooling flow channel is formed between adjacent water-proof layers; the water-proof layers are provided with guide holes to connect two adjacent first water-cooling flow channels, and the two guide holes corresponding to two adjacent water-proof layers are staggered along the circumference of the inner bushing.

[0010] In one embodiment, the water inlet channel is formed in the bottom waterproof layer, and the cooling structure further includes a water guide pipe that forms the water outlet channel. The water guide pipe passes through multiple waterproof layers in sequence, with one end connected to the first water-cooling channel at the top and the other end connected to the first water-cooling cavity.

[0011] In one embodiment, the water guide pipe extends from top to bottom from the top waterproof layer in a direction perpendicular to the waterproof layer, and passes through the flow guide holes of adjacent waterproof layers; and / or,

[0012] The central angle between the two corresponding flow guide holes on two adjacent waterproof layers is 180°.

[0013] In one embodiment, the cooling structure further includes a plurality of second water-cooling channels formed within the base bushing. The second water-cooling channels extend circumferentially around the inner bushing, and the plurality of second water-cooling channels are arranged sequentially along the axial direction of the inner bushing. The second water-cooling channels are used to cool the second magnetic fluid structure, and adjacent second water-cooling channels are interconnected.

[0014] In one embodiment, the coolant flows sequentially from bottom to top through a plurality of second water-cooling channels.

[0015] In one embodiment, each of the second water-cooled channels has a second inlet and a second outlet, the second inlet of the bottom second water-cooled channel and the second outlet of the top second water-cooled channel are used to connect to an external water-cooling system; along the flow direction of the coolant, the second outlet of the second water-cooled channel is connected to the second inlet of the adjacent second water-cooled channel above it.

[0016] Another objective of this invention is to provide a chemical vapor deposition (CVD) device with a cooling structure that can solve the problems of poor heat dissipation and cooling of the inner layer magnetic fluid structure in existing biaxial magnetic fluid sealing assemblies, and the easy formation of inner layer magnetic fluid evaporation, thereby improving the process reliability of the CVD device.

[0017] To achieve this objective, the present invention employs the following technical solution in another aspect:

[0018] A chemical vapor deposition apparatus is provided, including a magnetohydrodynamic (MHD) sealing assembly and a cooling structure as described in any of the preceding embodiments, the cooling structure being used to cool the MHD sealing assembly. The chemical vapor deposition apparatus further includes a cavity assembly having a reaction chamber, the MHD sealing assembly being hermetically connected to the cavity assembly.

[0019] The beneficial effects of this utility model are:

[0020] The cooling structure provided by this utility model is applied to a magnetic fluid sealing assembly. The magnetic fluid sealing assembly includes a rotary motor and an inner bushing, an outer bushing, and a base bushing arranged sequentially from the center to the outside. A first magnetic fluid structure is provided between the inner bushing and the outer bushing, and a second magnetic fluid structure is provided between the outer bushing and the base bushing. The inner bushing has a through-hole cavity at both ends. The rotary motor drives the outer bushing to rotate, and one end of the base bushing is sealed to the sealed component, so that the through-hole connects to the reaction chamber of the sealed component. The sealed component includes, but is not limited to, the cavity assembly of a chemical vapor deposition device. The rotary motor drives the outer bushing to rotate, and the rotation of the outer bushing causes the magnetic force to firmly fix the magnetic fluid in the first and second magnetic fluid structures, forming a sealing ring layer to seal the reaction chamber of the sealed component. The cooling structure includes multiple first water-cooling channels, which are opened inside the inner bushing. The multiple first water-cooling channels are all connected to an external water-cooling system and are interconnected. The first water-cooling channels are used to cool the first magnetic fluid structures. The coolant provided by the external water cooling system flows in an orderly manner within multiple first water cooling channels, reducing the risk of coolant turbulence. The coolant has better fluidity, which can provide better cooling performance for the first magnetofluid structure, reduce the risk of internal magnetic fluid evaporation in the first magnetofluid structure, and ensure the sealing performance of the cooling structure.

[0021] The chemical vapor deposition equipment provided by this utility model has a magnetic fluid sealing assembly with a double-layer magnetic fluid structure. The magnetic fluid sealing assembly is cooled and de-temperatured through the above-mentioned cooling structure, which reduces the risk of turbulence in the coolant in the inner bushing, improves the fluidity of the coolant, provides better cooling performance for the inner first magnetic fluid structure, and ensures the process reliability of the chemical vapor deposition equipment. Attached Figure Description

[0022] Figure 1 This is a cross-sectional view of the magnetic fluid sealing assembly with a cooling structure provided in an embodiment of this utility model;

[0023] Figure 2 This is a partial structural cross-sectional view of the magnetohydrodynamic sealing assembly provided in this embodiment of the utility model;

[0024] Figure 3 This is a structural cross-sectional view of the inner bushing provided in this embodiment of the utility model;

[0025] Figure 4 This is a partial structural schematic diagram of the inner bushing provided in an embodiment of the present invention from one viewpoint;

[0026] Figure 5 This is a partial structural schematic diagram of the inner bushing provided in an embodiment of the present invention from another perspective;

[0027] Figure 6 This is a structural cross-sectional view of the base bushing provided in this embodiment of the utility model;

[0028] Figure 7 This is a schematic diagram of the structure of the first magnetic pole ring being fitted into the inner bushing according to an embodiment of the present invention.

[0029] In the picture:

[0030] 1. Rotary motor; 2. Inner bushing; 21. Connecting cavity; 22. First water-cooling channel; 23. First water-cooling cavity; 231. First water inlet; 232. First water outlet; 24. Water inlet channel; 25. Water outlet channel; 26. Water-proof layer; 261. Guide hole; 27. Water guide pipe; 3. Outer bushing; 4. Base bushing; 41. Second water-cooling channel; 411. Second water inlet; 412. Second water outlet; 413. Second water inlet a; 414. Second water outlet a; 5. First magnetofluid structure; 51. First magnetic pole ring; 6. Second magnetofluid structure. Detailed Implementation

[0031] The technical solution of this utility model will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model.

[0032] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this utility model and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance. The terms "first position" and "second position" refer to two different positions. Moreover, "above," "on top of," and "over" the first feature in relation to the second feature includes the first feature directly above and diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "under," and "below" the first feature in relation to the second feature includes the first feature directly below and diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0033] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0034] The embodiments of this utility model are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this utility model, and should not be construed as limiting this utility model.

[0035] Magnetofluidic sealing devices utilize the magnetic force generated by a permanent magnet within a sealing gap. This magnetic force firmly fixes the magnetofluid within the gap to resist the pressure difference on both sides, thus achieving a sealing effect. They offer advantages such as high sealing performance, low friction loss, and the ability to withstand varying temperature and pressure conditions, making them suitable for various precision machining fields, including semiconductor processing equipment. To meet the stringent process environment requirements of chemical vapor deposition equipment, the applicant has designed a biaxial magnetofluidic seal through extensive research. This biaxial seal features two coaxial, inner and outer magnetofluidic structures to seal the reaction chamber. However, in this biaxial seal, the inner magnetofluidic structure is located internally and close to the reaction chamber, making heat dissipation difficult and prone to evaporation of the inner magnetofluid, thereby affecting sealing performance.

[0036] To solve the above problems, such as Figures 1 to 7 As shown, this embodiment first provides a cooling structure applied to a magnetic fluid sealing assembly. The magnetic fluid sealing assembly includes a rotary motor 1 and an inner bushing 2, an outer bushing 3, and a base bushing 4 arranged sequentially from the center outwards. A first magnetic fluid structure 5 is provided between the inner bushing 2 and the outer bushing 3, and a second magnetic fluid structure 6 is provided between the outer bushing 3 and the base bushing 4. The inner bushing 2 has a through-hole cavity 21. The rotary motor 1 drives the outer bushing 3 to rotate. One end of the base bushing 4 is sealed to the sealed component, so that the through-hole 21 connects to the reaction chamber of the sealed component. The sealed component includes, but is not limited to, the cavity assembly of a chemical vapor deposition apparatus. The rotary motor 1 drives the outer bushing 3 to rotate, and the rotation of the outer bushing 3 causes the magnetic field force to firmly fix the magnetic fluid in the first magnetic fluid structure 5 and the second magnetic fluid structure 6, forming a sealing ring layer to seal the reaction chamber of the sealed component.

[0037] The cooling structure includes multiple first water-cooled channels 22, all of which are located inside the inner bushing 2 and connected to an external water-cooling system. These channels are interconnected and used to cool the first magnetic fluid structure 5. The coolant supplied by the external water-cooling system flows orderly within each of the multiple channels 22, reducing the risk of turbulence and improving coolant flow. This provides excellent cooling performance for the first magnetic fluid structure 5, reduces the risk of internal magnetic fluid evaporation, and ensures the sealing performance of the magnetic fluid sealing assembly.

[0038] Specifically, the first water-cooling channel 22 extends circumferentially around the inner bushing 2 to form an annular channel, cooling the first magnetic fluid structure 5 in the entire circumferential direction. Multiple first water-cooling channels 22 are arranged sequentially along the axial direction of the inner bushing 2, which can reduce the temperature inside the connecting cavity 21 while cooling the first magnetic fluid structure 5.

[0039] The inner bushing 2 also has a first water-cooling cavity 23 inside. The first water-cooling cavity 23 surrounds the periphery of the inner bushing 2 and extends along the axial direction of the inner bushing 2 to form an annular cavity, which can hold more coolant and has higher cooling efficiency. The first water-cooling cavity 23 has a first inlet 231 and a first outlet 232 that connect to the external water-cooling system to form a circulating cooling channel. The first water-cooling cavity 23 connects to multiple first water-cooling channels 22. The multiple first water-cooling channels 22 are connected to the external water-cooling system through the first water-cooling cavity 23, and the multiple first water-cooling channels 22 do not need to be individually connected to the external water-cooling system, simplifying the structure.

[0040] The first water-cooling cavity 23 is located below the multiple first water-cooling channels 22. The first water inlet 231 and the first water outlet 232 of the first water-cooling cavity 23 can be located at the bottom of the inner bushing 2 for easy connection to an external water-cooling system.

[0041] To achieve communication between the first water-cooled cavity 23 and the first water-cooled flow channel 22, a water inlet channel 24 is provided between the bottom first water-cooled flow channel 22 and the first water-cooled cavity 23, and a water outlet channel 25 is provided between the top first water-cooled flow channel 22 and the first water-cooled cavity 23. The coolant in the first water-cooled cavity 23 flows sequentially from bottom to top through multiple first water-cooled flow channels 22. Since the coolant flows from bottom to top, the temperature of the coolant in the lower first water-cooled flow channel 22 is lower than the temperature of the coolant in the upper first water-cooled flow channel 22. Because the density of high-temperature water is lower than that of low-temperature water, reverse flow of the upper coolant is prevented, ensuring the stability of the air-liquid flow process and further reducing turbulence.

[0042] To form the first water-cooled flow channel 22, a water-cooled groove is formed on the outer side of the inner bushing 2, and the opening of the water-cooled groove is sealed by the first magnetohydrodynamic structure 5. Multiple water-insulating layers 26 are spaced apart along the axial direction of the inner bushing 2 within the water-cooled groove. The water-insulating layers 26 extend circumferentially along the inner bushing 2, and the first water-cooled flow channel 22 is formed between adjacent water-insulating layers 26. Guide holes 261 are formed on the water-insulating layers 26 to connect two adjacent first water-cooled flow channels 22. Two corresponding guide holes 261 on two adjacent water-insulating layers 26 are staggered along the circumferential direction of the inner bushing 2, ensuring that the coolant flows sequentially from bottom to top through the multiple first water-cooled flow channels 22.

[0043] In one embodiment, the first magnetofluid structure 5 includes a first magnetic pole ring 51, which has a sealed magnetofluid channel filled with a magnetic fluid. The first magnetic pole ring 51 is fitted onto the inner bushing 2 and seals the opening of the water-cooling tank. The water-cooling channel cools the first magnetic pole ring 51. The coolant directly cools the first magnetic pole ring 51, resulting in high cooling efficiency. Furthermore, the way the first magnetic pole ring 51 seals the opening of the water-cooling tank not only seals the first water-cooling channel 22 but also reduces the axial dimension of the magnetofluid sealing assembly. Moreover, the method of forming the first water-cooling channel 22 by machining a water-proof layer 26 into the opening of the water-cooling tank is also relatively simple.

[0044] The water inlet channel 24 is located in the bottom water-resistant layer 26. The cooling structure also includes a water guide pipe 27, which forms a water outlet channel 25. The water guide pipe 27 passes through multiple water-resistant layers 26 in sequence, with one end connected to the top first water-cooling channel 22 and the other end connected to the first water-cooling cavity 23. The coolant provided by the external water-cooling system enters the first water-cooling cavity 23 through the first water inlet 231. The coolant in the first water-cooling cavity 23 enters the bottom first water-cooling channel 22 through the water inlet channel 24. The coolant flows through multiple guide holes 261 in sequence, flowing from bottom to top within the multiple first water-cooling channels 22.

[0045] The water guide pipe 27 extends from top to bottom from the top waterproof layer 26 in a direction perpendicular to the waterproof layer 26, and passes through the guide holes 261 of adjacent waterproof layers 26. The central angle between the two corresponding guide holes 261 on two adjacent waterproof layers 26 is 180°. For example, as... Figure 4 and Figure 5 As shown, the inner bushing 2 forms three first water-cooling channels 22 through three water-insulating layers 26. The bottom water-insulating layer 26 is connected to the lower first water-cooling cavity 23 via a water inlet channel 24. The bottom first water-cooling channel 22 is formed between the bottom water-insulating layer 26 and the adjacent water-insulating layer 26. Coolant entering through the water inlet channel 24 flows to the other side within the bottom first water-cooling channel 22, and then flows upward through the guide hole 261 on the other side, entering the middle first water-cooling channel 22. Coolant flows to the other side within the middle first water-cooling channel 22, and then flows upward through the guide hole 261 on the other side, entering the upper first water-cooling channel 22, and finally circulates into the first water-cooling cavity 23 via the water pipe 27. For adjacent first water-cooling channels 22, the flow direction of the coolant within them is opposite. Figure 4 and Figure 5 The middle arrow indicates the direction of coolant flow.

[0046] To cool the second magnetofluid structure 6, multiple second water-cooling channels 41 are formed within the base bushing 4. These channels extend circumferentially around the inner bushing 2 and are sequentially arranged along the axial direction of the inner bushing 2. The second water-cooling channels 41 are used to cool the second magnetofluid structure 6, and adjacent channels 41 are interconnected. Similarly, the coolant flows sequentially from bottom to top through the multiple second water-cooling channels 41 to reduce the risk of turbulence within the channels.

[0047] Each second water-cooled channel 41 has a second inlet 411 and a second outlet 412. The second inlet 411 of the bottom second water-cooled channel 41 and the second outlet 412 of the top second water-cooled channel 41 are used to connect to an external water-cooling system to form a circulating coolant. Along the flow direction of the coolant, the second outlet 412 of the second water-cooled channel 41 connects to the second inlet 411 of the adjacent second water-cooled channel 41 above it. For example, as shown... Figure 6 As shown, two second water-cooling channels 41 are provided inside the base bushing 4. The second inlet 411 of the lower second water-cooling channel 41 is connected to the external water-cooling system. The coolant provided by the external water-cooling system enters the second water-cooling channel 41 through the second inlet 411, flows in the second water-cooling channel 41, and enters the second inlet a413 of the upper second water-cooling channel 41 through the second outlet a414. Finally, it circulates back to the external water-cooling system from the second outlet 412 of the upper second water-cooling channel 41.

[0048] The second inlet 411 and the second outlet 412 are both located on the side wall of the base bushing 4.

[0049] This utility model embodiment further provides a chemical vapor deposition (CVD) apparatus, which includes a magnetohydrodynamic (MHD) sealing assembly. The MHD sealing assembly is cooled using the aforementioned cooling structure. The CVD apparatus also includes a cavity assembly with a reaction chamber, and the MHD sealing assembly is sealed to the cavity assembly. The MHD sealing assembly forms a double-layer MHD sealing structure through a rotating outer bushing 3, a first MHD structure 5 disposed between the inner bushing 2 and the outer bushing 3, and a second MHD structure 6 disposed between the outer bushing 3 and the base bushing 4, thereby improving the sealing performance of the cavity assembly. Furthermore, the inner bushing 2 has multiple first water-cooling channels 22 connected to an external water-cooling system, and these multiple first water-cooling channels 22 are interconnected. The first water-cooling channels 22 are used to cool the first MHD structure 5. The coolant provided by the external water cooling system flows independently within the multiple first water cooling channels 22, reducing the risk of coolant turbulence. The coolant has better fluidity, which can provide better cooling performance for the first magnetofluid structure 5, reduce the risk of internal magnetic fluid evaporation in the first magnetofluid structure 5, and ensure the process reliability of the chemical vapor deposition equipment.

[0050] Obviously, the above embodiments of this utility model are merely examples for clearly illustrating the present utility model, and are not intended to limit the implementation of the present utility model. Those skilled in the art can make various obvious changes, readjustments, and substitutions without departing from the protection scope of this utility model. It is neither necessary nor possible to exhaustively describe all embodiments here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this utility model should be included within the protection scope of the claims of this utility model.

Claims

1. A cooling structure applied to a magnetic fluid seal assembly, the magnetic fluid seal assembly comprising a rotating motor (1) and an inner shaft sleeve (2), an outer shaft sleeve (3) and a base shaft sleeve (4) arranged from inside to outside in sequence from the shaft center, a first magnetic fluid structure (5) being arranged between the inner shaft sleeve (2) and the outer shaft sleeve (3), a second magnetic fluid structure (6) being arranged between the outer shaft sleeve (3) and the base shaft sleeve (4), the inner shaft sleeve (2) having a communication cavity (21) penetrating through both ends, the rotating motor (1) driving the outer shaft sleeve (3) to rotate, one end of the base shaft sleeve (4) being connected to a seal, characterized in that, The cooling structure comprises a plurality of first water cooling flow channels (22) formed in the inner sleeve (2), the plurality of first water cooling flow channels (22) are communicated with an external water cooling system, and the plurality of first water cooling flow channels (22) are communicated with each other, and the first water cooling flow channels (22) are used for cooling the first magnetic fluid structure (5).

2. The cooling structure according to claim 1, characterized by The first water cooling flow channels (22) extend around the circumference of the inner sleeve (2), and the plurality of first water cooling flow channels (22) are arranged in sequence along the axial direction of the inner sleeve (2); and / or, The cooling structure further comprises a first water cooling cavity (23) formed in the inner sleeve (2), the first water cooling cavity (23) surrounds the circumferential side of the inner sleeve (2) and extends along the axial direction of the inner sleeve (2) to form an annular cavity, the first water cooling cavity (23) has a first water inlet (231) and a first water outlet (232) communicated with an external water cooling system to form a circulating cooling flow channel, and the first water cooling cavity (23) is communicated with the plurality of first water cooling flow channels (22).

3. The cooling structure according to claim 2, characterized by The first water cooling cavity (23) is arranged below the plurality of first water cooling flow channels (22), the first water cooling flow channels (22) at the bottom are arranged with water inlet channels (24), the first water cooling flow channels (22) at the top are arranged with water outlet channels (25), and the cooling liquid in the first water cooling cavity (23) flows through the plurality of first water cooling flow channels (22) in sequence from bottom to top.

4. The cooling structure according to claim 3, characterized by The cooling structure further comprises a water cooling groove formed on the outer side of the inner sleeve (2), and the first magnetic fluid structure (5) blocks the opening of the water cooling groove; a plurality of water isolation layers (26) are arranged in the water cooling groove and are spaced apart along the axial direction of the inner sleeve (2), the water isolation layers (26) extend along the circumferential direction of the inner sleeve (2), the first water cooling flow channels (22) are formed between adjacent water isolation layers (26), the water isolation layers (26) are arranged with flow guide holes (261) to communicate two adjacent first water cooling flow channels (22), and the two flow guide holes (261) corresponding to the adjacent two water isolation layers (26) are staggered along the circumferential direction of the inner sleeve (2).

5. The cooling structure according to claim 4, characterized by The water inlet channels (24) are formed in the bottom water isolation layers (26), the cooling structure further comprises a water guide pipe (27), the water guide pipe (27) forms the water outlet channels (25), and the water guide pipe (27) is arranged in sequence in the plurality of water isolation layers (26) and is communicated with the first water cooling flow channels (22) at the top at one end and with the first water cooling cavity (23) at the other end.

6. The cooling structure according to claim 5, characterized by The water guide pipe (27) extends from top to bottom along a direction perpendicular to the water isolation layers (26) of the top water isolation layer (26) and passes through the flow guide holes (261) of the adjacent water isolation layers (26); and / or, The central angle between the two flow guide holes (261) corresponding to the adjacent two water isolation layers (26) is 180°.

7. The cooling structure according to claim 1, characterized by The cooling structure further comprises a plurality of second water cooling channels (41) formed in the base sleeve (4), the second water cooling channels (41) extend along the circumference of the inner sleeve (2), and the plurality of second water cooling channels (41) are arranged along the axial direction of the inner sleeve (2) in sequence, the second water cooling channels (41) are used for cooling the second magnetic fluid structure (6), and adjacent second water cooling channels (41) are connected to each other.

8. The cooling structure according to claim 7, characterized by The cooling liquid flows through the plurality of second water cooling channels (41) in sequence from bottom to top.

9. The cooling structure according to claim 8, characterized by Each of the second water cooling channels (41) has a second water inlet (411) and a second water outlet (412), the second water inlet (411) of the second water cooling channel (41) at the bottom and the second water outlet (412) of the second water cooling channel (41) at the top are used for connecting an external water cooling system; along the flow direction of the cooling liquid, the second water outlet (412) of the second water cooling channel (41) is connected to the second water inlet (411) of the adjacent second water cooling channel (41) above.

10. A chemical vapor deposition apparatus characterized by comprising: The chemical vapor deposition device comprises a magnetic fluid sealing assembly and a cooling structure as claimed in any one of claims 1-9, the cooling structure is used for cooling the magnetic fluid sealing assembly, and the chemical vapor deposition device further comprises a cavity assembly provided with a reaction cavity, and the magnetic fluid sealing assembly is sealingly connected to the cavity assembly. The cooling structure further comprises a plurality of second water cooling channels (41) formed in the base sleeve (4), the second water cooling channels (41) extend along the circumference of the inner sleeve (2), and the plurality of second water cooling channels (41) are arranged along the axial direction of the inner sleeve (2) in sequence, the second water cooling channels (41) are used for cooling the second magnetic fluid structure (6), and adjacent second water cooling channels (41) are connected to each other. The cooling liquid flows through the plurality of second water cooling channels (41) in sequence from bottom to top. Each of the second water cooling channels (41) has a second water inlet (411) and a second water outlet (412), the second water inlet (411) of the second water cooling channel (41) at the bottom and the second water outlet (412) of the second water cooling channel (41) at the top are used for connecting an external water cooling system; along the flow direction of the cooling liquid, the second water outlet (412) of the second water cooling channel (41) is connected to the second water inlet (411) of the adjacent second water cooling channel (41) above. The chemical vapor deposition device comprises a magnetic fluid sealing assembly and a cooling structure as claimed in any one of claims 1-9, the cooling structure is used for cooling the magnetic fluid sealing assembly, and the chemical vapor deposition device further comprises a cavity assembly provided with a reaction cavity, and the magnetic fluid sealing assembly is sealingly connected to the cavity assembly.

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