Light source bearing device for semiconductor equipment

Abstract

The utility model discloses a light source bearing device for semiconductor equipment, which comprises a light source fixing base, a light source channel arranged in the center of the light source fixing base, an angle adjusting lamp holder mounted on the front side of the light source fixing base, a light source mounting channel arranged in the center of the angle adjusting lamp holder, and a light source mounting channel arranged coaxially with the light source channel. A light source bulb is installed in the light source installation channel, a fastening screw hole is formed in the position, on one side of the light source installation channel, of the angle adjusting lamp holder, a fastening screw is installed in the fastening screw hole, the extrusion face of the fastening screw is arranged on the light source bulb, fixing through holes are formed in the two sides of the angle adjusting lamp holder, and fixing bolts are installed in the fixing through holes. The inner diameter of the fixing through hole is 2-3 mm larger than the outer diameter of the fixing bolt, a fixing screw hole is formed in the position, corresponding to the fixing bolt, of the light source fixing base, and one end of the fixing bolt is installed in the fixing screw hole in a locked mode.

Description

Technical Field

[0001] This utility model belongs to the field of semiconductor optical technology, and specifically relates to a light source carrier device for semiconductor equipment. Background Technology

[0002] In the semiconductor and testing fields, the stability and precise control of the light source are crucial for the measurement results of semiconductor optical measurement equipment. Halogen lamps are typically used in measurement systems to provide illumination and high-precision optical imaging. However, over time, the light source will age, leading to deviations in illuminance and incident angle, resulting in decreased imaging quality and measurement result errors. To solve this problem, the light source carrier device needs to be adjustable to meet current requirements. However, existing traditional adjustable carrier devices have problems such as complex structure and difficult operation. Utility Model Content

[0003] In view of the problems raised in the background art above, the purpose of this utility model is to provide a light source carrier device for semiconductor equipment.

[0004] To achieve the above-mentioned technical objectives, the technical solution adopted by this utility model is as follows:

[0005] A light source carrier for semiconductor equipment includes a light source mounting base. The light source mounting base has a light source channel at its center. An angle-adjustable lamp holder is mounted on the front of the light source mounting base. The angle-adjustable lamp holder has a light source mounting channel at its center. The light source channel and the light source mounting channel are coaxially arranged. A light source bulb is mounted in the light source mounting channel. The angle-adjustable lamp holder has a fastening screw hole on one side of the light source mounting channel. A fastening screw is installed in the fastening screw hole, and the pressing surface of the fastening screw is disposed on the light source bulb. The angle-adjustable lamp holder has fixing through holes on both sides. Fixing bolts are installed in the fixing through holes. The inner diameter of the fixing through hole is 2-3 mm larger than the outer diameter of the fixing bolt. The light source mounting base has fixing screw holes corresponding to the fixing bolts, and one end of the fixing bolt is locked into the fixing screw hole.

[0006] Furthermore, the light source mounting base has countersunk holes on both sides, and the angle-adjustable lamp holder has an arc-shaped clearance groove at the corresponding countersunk hole. This structural design facilitates the installation of the light source mounting base on the equipment, while the arc-shaped clearance groove prevents interference when installing bolts.

[0007] Furthermore, the outer ring of the light source mounting base is threaded, and the light source protective cover is connected to the light source mounting base via the thread. This structural design facilitates the fixed installation of the light source protective cover.

[0008] Furthermore, a cable routing groove is provided on one side of the light source mounting base. This structural design facilitates the installation and placement of the light source power cable, and provides protection for the power cable after the light source protective cover is installed.

[0009] Furthermore, the fixing bolt is fitted with a flat washer and a locking washer, which are located between the angle adjustment lamp holder and the fixing bolt. This structural design allows for the stacking of the flat washer and the locking washer, simultaneously achieving pressure dispersion and anti-loosening functions.

[0010] The beneficial effects of this utility model are as follows: By adjusting the diameter difference between the fixing through hole and the fixing bolt on the angle-adjusting lamp holder, the horizontal position of the angle-adjusting lamp holder can be adjusted. The insertion and exit of the light bulb can be adjusted by the fixing screw on the angle-adjusting lamp holder in conjunction with the light source mounting channel, thereby adjusting the spatial position of the light bulb and compensating for the incident angle deviation caused by bulb aging. This utility model has a simple structure, is easy to operate, and can meet current usage needs. Attached Figure Description

[0011] This utility model can be further illustrated by the non-limiting embodiments given in the accompanying drawings;

[0012] Figure 1 This is a front axonometric structural diagram of a light source carrier device for semiconductor equipment according to an embodiment of the present invention;

[0013] Figure 2 This is a schematic diagram of the back axial side structure of a light source carrier device for semiconductor equipment according to an embodiment of the present invention;

[0014] Figure 3 This is an exploded structural diagram of a light source carrier device for semiconductor equipment according to an embodiment of the present invention;

[0015] The symbols for the main components are explained below:

[0016] 1. Light source fixing base; 2. Light source channel; 3. Angle adjustment lamp holder; 4. Light source mounting channel; 5. Light source bulb; 6. Fastening screw hole; 7. Fixing through hole; 8. Fixing bolt; 9. Fixing screw hole; 10. Countersunk hole; 11. Arc-shaped clearance groove; 12. Thread; 13. Wiring groove; 14. Flat washer; 15. Locking washer; 16. Detailed Implementation

[0017] To enable those skilled in the art to better understand this utility model, the technical solution of this utility model will be further described below in conjunction with the accompanying drawings and embodiments.

[0018] Example 1, such as Figure 1 , Figure 2 and Figure 3As shown, a light source carrier device for semiconductor equipment includes a light source fixing base 1, a light source channel 2 at the center of the light source fixing base 1, an angle adjustment lamp holder 3 mounted on the front of the light source fixing base 1, a light source mounting channel 4 at the center of the angle adjustment lamp holder 3, the light source channel 2 and the light source mounting channel 4 being coaxially arranged, a light source bulb 5 being mounted in the light source mounting channel 4, a fastening screw hole 6 being provided on one side of the light source mounting channel 4, a fastening screw 7 being installed in the fastening screw hole 6, the pressing surface of the fastening screw 7 being disposed on the light source bulb 5, fixing through holes 8 being provided on both sides of the angle adjustment lamp holder 3, fixing bolts 9 being installed in the fixing through holes 8, the inner diameter of the fixing through holes 8 being 2-3 mm larger than the outer diameter of the fixing bolts 9, and a fixing screw hole 10 being provided on the light source fixing base 1 at the corresponding fixing bolts 9, one end of the fixing bolt 9 being locked and installed in the fixing screw hole 10.

[0019] In this embodiment, the light source fixing base 1 is fixed in the optical system of the semiconductor optical inspection equipment. The fixing bolt 9 is used to fix the angle adjustment lamp holder 3 to the light source fixing base 1 through the fixing through hole 8. At this time, the fixing bolt 9 is in a loose state to facilitate the subsequent adjustment of the spatial position of the angle adjustment lamp holder 3. Then, the light source bulb 5 is placed in the light source mounting channel 4 and inserted into the light source channel 2. When the optical system detects that the light intensity of the light source has reached a suitable value, the fastening screw 7 is tightened to press and fix the light source bulb 5, ensuring that the position of the light source bulb 5 will not move. Finally, the angle adjustment lamp holder 3 is manually adjusted to a suitable position, and then the fixing bolt 9 is tightened to correct the position of the light source.

[0020] The angle adjustment lamp holder 3 has two fixing through holes 8 on its surface. The diameter of the fixing through holes 8 is 2-3 mm larger than the diameter of the fixing bolt 9. The diameter difference allows the angle adjustment lamp holder 3 to adjust its relative position within a certain range. Placing paper of different thicknesses on the contact surface between the angle adjustment lamp holder 3 and the light source fixing base 1 can adjust the angle of the horizontal reference plane of the angle adjustment lamp holder 3.

[0021] The position of the light source bulb 5 is stabilized by the fastening screws 7 on the side of the angle adjustment lamp holder 3. The amount of light source bulb 5 in and out can be adjusted by loosening or tightening the light source bulb 5, thereby correcting the position of the light source bulb 5 in conjunction with the angle adjustment lamp holder 3. The number of fastening screws 7 is 2.

[0022] Example 2, as Figure 1 and Figure 3 As shown, this embodiment adds the following structure based on embodiment 1: countersunk holes 11 are provided on both sides of the light source fixing base 1, and the angle adjustment lamp holder 3 is provided with an arc-shaped clearance groove 12 at the corresponding countersunk hole 11.

[0023] In this embodiment, during installation, the light source fixing base 1 is fixed to the optical system of the semiconductor optical inspection equipment by bolts through the arc-shaped clearance groove 12 and the countersunk hole 11, which facilitates installation and use.

[0024] Example 3, as Figure 3 As shown, this embodiment adds the following structure to the embodiment 1: the outer ring of the light source fixing base 1 is provided with a thread 13, and the light source fixing base 1 is connected to the light source protective cover through the thread 13.

[0025] In this embodiment, during installation, the light source fixing base 1 can be locked with the light source protective cover by the thread 13, and the light source protective cover protects the light source bulb 5.

[0026] Example 4, as Figure 1 , Figure 2 and Figure 3 As shown, this embodiment adds the following structure to the embodiment 1: a wiring groove 14 is provided on one side of the light source fixing base 1.

[0027] In this embodiment, during installation, the wiring groove 14 facilitates the wiring of the light source bulb 5 during installation, and at the same time, the installation of the light source protective cover can protect the power cord of the light source.

[0028] Example 5, as Figure 3 As shown, this embodiment adds the following structure based on embodiment 1: a flat washer 15 and a locking washer 16 are fitted on the fixing bolt 9, and the flat washer 15 and the locking washer 16 are located between the angle adjustment lamp holder 3 and the fixing bolt 9.

[0029] In this embodiment, during installation, a flat washer 15 and a locking washer 16 are provided on the fixing bolt 9. When tightening, the fixing bolt 9 presses the locking washer 16 and the flat washer 15 onto the angle adjustment lamp holder 3. The flat washer 15 and the locking washer 16 simultaneously achieve pressure dispersion and anti-loosening functions, thereby improving the performance.

[0030] The above embodiments are merely illustrative of the principles and effects of this utility model and are not intended to limit the scope of this utility model. Any person skilled in the art can modify or alter the above embodiments without departing from the spirit and scope of this utility model. Therefore, all equivalent modifications or alterations made by those skilled in the art without departing from the spirit and technical concept disclosed in this utility model should still be covered by the claims of this utility model.

Claims

1. A light source carrier device for semiconductor equipment, characterized by: The utility model provides a light source fixing base (1) is provided with light source channel (2) in the center, and the front surface of light source fixing base (1) is provided with angle adjustment lamp holder (3), and the center of angle adjustment lamp holder (3) is provided with light source installation channel (4), and light source channel (2) and light source installation channel (4) are coaxial arrangement, and light source bulb (5) is installed in light source installation channel (4), and angle adjustment lamp holder (3) is provided with fastening screw hole (6) on one side of light source installation channel (4), and fastening screw (7) is installed in fastening screw hole (6), and the extrusion surface of fastening screw (7) is arranged on light source bulb (5), and angle adjustment lamp holder (3) is provided with fixed through hole (8) on both sides, and fixed bolt (9) is installed in fixed through hole (8), and the inner diameter of fixed through hole (8) is 2-3mm larger than the outer diameter of fixed bolt (9), and light source fixing base (1) is provided with fixed screw hole (10) at the fixed bolt (9), and one end of fixed bolt (9) is locked in fixed screw hole (10).

2. A light source carrier device for semiconductor equipment according to claim 1, characterized in that: The both sides of the light source fixing base (1) are provided with countersunk holes (11), and the angle adjustment lamp holder (3) is provided with arc-shaped air clearance grooves (12) at the corresponding countersunk holes (11).

3. A light source carrier device for semiconductor equipment according to claim 2, characterized in that: The outer ring of the light source fixing base (1) is provided with threads (13), and the light source protection cover is connected to the light source fixing base (1) through the threads (13).

4. The light source carrier for a semiconductor device according to claim 3, wherein: One side of the light source fixing base (1) is provided with a wiring groove (14).

5. A light source carrier device for a semiconductor device according to claim 4, wherein: The fixed bolt (9) is provided with a flat washer (15) and a locking washer (16), and the flat washer (15) and the locking washer (16) are located between the angle adjustment lamp holder (3) and the fixed bolt (9).

Images