Rapid cooling equipment for vacuum coating

Abstract

The utility model discloses rapid cooling equipment for vacuum coating, which relates to the technical field of vacuum coating and comprises an outer shell, a coating chamber and a cooling component, a control chamber is mounted in the middle of the inside of the outer shell, and the cooling component is arranged on the outer side of the control chamber. The cooling assembly comprises an upper water tank, a cold water runner, a lower water tank, cooling fins, a circulating water pump and a water supply pipe, the upper water tank is located above the outer side of the control chamber, and the lower side of the upper water tank is connected with the cold water runner. According to the rapid cooling equipment for vacuum coating, the cold water flow channel is attached to the outer side face of the coating chamber so that heat of the coating chamber can be rapidly taken away, heat conduction needle fins at the bottom of the coating chamber penetrate into the lower water tank so that heat can be further conducted, and the cooling effect can be improved; therefore, airflow blows through the ventilation openings of the lower water tank and the upper water tank from bottom to top and passes through the gaps between the adjacent cold water flow channels, air cooling heat dissipation can be conducted on the outer side of the coating chamber, and the cooling efficiency of the coating chamber is improved.

Description

Technical Field

[0001] This utility model relates to the field of vacuum coating technology, specifically to a rapid cooling device for vacuum coating. Background Technology

[0002] Vacuum coating is a technology that uses physical methods to produce thin film materials. In a vacuum chamber, the atoms of the material are separated from the heating source and deposited onto the surface of the object to be coated. During the coating process, a large amount of heat is generated inside the vacuum coating machine due to evaporation or sputtering. If the temperature is too high, it will cause equipment damage or a decrease in coating quality. Therefore, cooling equipment is required.

[0003] Some vacuum coating machines typically use natural cooling for heat dissipation. If the cooling is not timely, the vacuum coating machine is easily damaged due to excessive temperature. A single air-cooled or water-cooled structure has a relatively slow heat dissipation efficiency. Utility Model Content

[0004] The purpose of this invention is to provide a rapid cooling device for vacuum coating, so as to solve the problems mentioned in the background art.

[0005] To achieve the above objectives, this utility model provides the following technical solution: a rapid cooling device for vacuum coating, comprising an outer shell, a coating chamber, and a cooling assembly. A control chamber is installed in the middle of the interior of the outer shell, and a cooling assembly is arranged on the outside of the control chamber. The cooling assembly includes an upper water tank, a cold water channel, a lower water tank, heat dissipation fins, a circulating water pump, and a water delivery pipe. The upper water tank is located above and outside the control chamber, and a cold water channel is connected to the lower side of the upper water tank. The lower side of the cold water channel is connected to the lower water tank, and a circulating water pump is installed in the middle of the rear side of the lower water tank. A water delivery pipe is connected to the upper side of the circulating water pump, and the water delivery pipe communicates with the interior of the upper water tank. Heat-conducting needle ribs are fixed at equal intervals at the bottom of the coating chamber, and the heat-conducting needle ribs penetrate the upper wall of the lower water tank.

[0006] Furthermore, a control room is installed on the upper side of the coating chamber, and a sealed door is installed on the front side of the coating chamber via a hinge.

[0007] Furthermore, the cooling assembly also includes ventilation openings, and ventilation openings are provided inside both the upper and lower water tanks.

[0008] Furthermore, the cooling assembly also includes heat dissipation fins, which are fixed to the outside of the lower water tank and penetrate the outer wall of the outer casing.

[0009] Furthermore, the lower water tank is located below the control room, and a heat-conducting plate is fixed to the bottom of the lower water tank.

[0010] Furthermore, an air-cooled chamber is installed on the lower side of the heat-conducting plate, and the front and rear sides of the air-cooled chamber have a hollow structure.

[0011] Furthermore, a first fan and a second fan are respectively installed in the middle and on both sides of the interior of the air-cooled chamber, with the first fan located on the lower side of the heat-conducting plate and the second fan located on the lower sides of the lower water tank.

[0012] Furthermore, vents are installed on the upper sides of both the left and right sides of the outer casing, and the vents are located on the upper side of the upper water tank.

[0013] This invention provides a rapid cooling device for vacuum coating, which has the following advantages:

[0014] This invention is equipped with a cooling component. The coolant inside the upper water tank can flow downward through several equally spaced cold water channels. The cold water channels are in contact with the outer surface of the coating chamber and can quickly remove the heat from the coating chamber. This cooled liquid can then flow to the lower water tank. Through a circulating water pump and water delivery pipe, the coolant in the lower water tank can be sent to the upper water tank for recycling, thereby continuously cooling the coating chamber and enabling rapid cooling. The heat-conducting pins at the bottom of the coating chamber penetrate into the lower water tank to further conduct heat and improve the cooling effect.

[0015] This utility model is equipped with an air-cooled chamber. The heat dissipation fins facilitate heat conduction and dissipation of the lower water tank. The heat conduction plate at the bottom of the lower water tank facilitates heat conduction and cooling of the lower water tank. The air-cooled chamber has a hollow structure to facilitate ventilation. The first fan blows air to remove the heat from the heat conduction plate, thereby cooling the lower water tank and facilitating the circulation of the cooling components. The second fan blows air upwards, so that the airflow blows from bottom to top through the ventilation openings of the lower and upper water tanks, and passes through the gaps between adjacent cold water channels, thereby facilitating air cooling and dissipating heat on the outside of the coating chamber and improving its cooling efficiency. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the external structure of a rapid cooling device for vacuum coating according to the present invention;

[0017] Figure 2 This is a schematic diagram of the internal structure of a rapid cooling device for vacuum coating according to the present invention;

[0018] Figure 3 This is a half-sectional structural diagram of a rapid cooling device for vacuum coating according to the present invention;

[0019] Figure 4 This is a schematic diagram of the cooling component structure of a rapid cooling device for vacuum coating according to this utility model.

[0020] In the diagram: 1. Outer shell; 2. Coating chamber; 3. Control chamber; 4. Cooling components; 401. Upper water tank; 402. Cold water flow channel; 403. Lower water tank; 404. Heat dissipation fins; 405. Vent; 406. Circulating water pump; 407. Water supply pipe; 5. Heat conduction pin ribs; 6. Heat conduction plate; 7. Exhaust nozzle; 8. Air-cooled chamber; 9. First fan; 10. Second fan. Detailed Implementation

[0021] The embodiments of this utility model will be described in further detail below with reference to the accompanying drawings and examples. The following examples are for illustrative purposes only and should not be construed as limiting the scope of this utility model.

[0022] like Figures 2-4 As shown, a rapid cooling device for vacuum coating includes a housing 1, a coating chamber 2, and a cooling assembly 4. A control chamber 3 is installed in the middle of the interior of the housing 1, and the cooling assembly 4 is located on the outside of the control chamber 3. The cooling assembly 4 includes an upper water tank 401, a cold water channel 402, a lower water tank 403, heat dissipation fins 404, a circulating water pump 406, and a water delivery pipe 407. The upper water tank 401 is located above and outside the control chamber 3, and the lower side of the upper water tank 401 is connected to the cold water channel 402. The lower side of the cold water channel 402 is connected to the lower water tank 403, and the circulating water pump 406 is installed in the middle of the rear side of the lower water tank 403. The upper side of the circulating water pump 406 is connected to the water delivery pipe 407, and the water delivery pipe 407 communicates with the interior of the upper water tank 401. Heat-conducting needle ribs 5 are fixed at equal intervals at the bottom of the coating chamber 2, and the heat-conducting needle ribs 5 penetrate the upper wall of the lower water tank 403. The cooling assembly 4 also includes a... Vent 405, upper water tank 401, and lower water tank 403 are all provided with ventilation openings 405. The cooling assembly 4 also includes heat dissipation fins 404. Heat dissipation fins 404 are fixed on the outside of the lower water tank 403 and penetrate the outer wall of the outer casing 1. The coolant inside the upper water tank 401 can flow downward through several equally distributed cold water channels 402. The cold water channels 402 are attached to the outer side of the coating chamber 2 and can quickly remove the heat from the coating chamber 2. Then, this part of the coolant can flow to the lower water tank 403. The coolant in the lower water tank 403 can be sent to the upper water tank 401 for circulation by the circulating water pump 406 and the water supply pipe 407, thereby continuously cooling the coating chamber 2 and making the coating chamber 2 cool down quickly. The heat conduction pin ribs 5 at the bottom of the coating chamber 2 penetrate into the lower water tank 403 to further conduct heat and improve the cooling effect.

[0023] like Figures 1-3As shown, a control chamber 3 is installed on the upper side of the coating chamber 2, and a sealed door is installed on the front side of the coating chamber 2 via a hinge. The lower water tank 403 is located below the control chamber 3, and a heat-conducting plate 6 is fixed to the bottom of the lower water tank 403. An air-cooling chamber 8 is installed below the heat-conducting plate 6, and the front and rear sides of the air-cooling chamber 8 have a hollow structure. A first fan 9 and a second fan 10 are respectively installed in the middle and on both sides of the interior of the air-cooling chamber 8. The first fan 9 is located below the heat-conducting plate 6, and the second fan 10 is located on both lower sides of the lower water tank 403. Exhaust nozzles 7 are installed on the upper sides of both sides of the outer casing 1, and the exhaust nozzles 7 are located above the upper water tank 401. The coating chamber 2 is used for vacuum coating. The heat dissipation fins 404 facilitate heat conduction and dissipation of the lower water tank 403. The heat conduction plate 6 at the bottom of the lower water tank 403 facilitates heat conduction and cooling of the lower water tank 403. The air-cooled chamber 8 has a hollow structure to facilitate ventilation. The first fan 9 blows air to remove the heat from the heat conduction plate 6, thereby cooling the lower water tank 403 and facilitating the circulation of the cooling components 4. The second fan 10 blows air upwards, so that the airflow blows from bottom to top through the ventilation openings 405 of the lower water tank 403 and the upper water tank 401, and passes through the gap between the adjacent cold water channels 402, thereby facilitating air cooling of the outside of the coating chamber 2 and improving its cooling efficiency. The exhaust nozzle 7 is designed to facilitate exhaust and pressure relief.

[0024] In summary, as Figures 1-4 As shown, this rapid cooling device for vacuum coating operates as follows: First, the coating chamber 2 is used for vacuum coating. During operation, the coolant inside the upper water tank 401 flows downwards through several equally spaced cold water channels 402. These channels, adhering to the outer surface of the coating chamber 2, quickly remove heat. This cooled coolant then flows to the lower water tank 403. A circulating water pump 406 and a water supply pipe 407 then transfer the coolant from the lower water tank 403 back to the upper water tank 401 for recirculation, continuously cooling the coating chamber 2 and enabling rapid cooling. The heat-conducting ribs 5 at the bottom of the coating chamber 2 extend into the lower water tank 403, further enhancing heat conduction and improving cooling efficiency. The cooling effect is achieved by the second fan 10 blowing air upwards, allowing the airflow to pass from bottom to top through the ventilation openings 405 of the lower water tank 403 and the upper water tank 401, and through the gap between the adjacent cold water channels 402. This provides air cooling to the outside of the coating chamber 2, improving its cooling efficiency. At the same time, the heat dissipation fins 404 can conduct heat to the lower water tank 403, and the heat conduction plate 6 at the bottom of the lower water tank 403 can conduct heat to cool it down. The air-cooled chamber 8 has a hollow structure for easy ventilation, and the air blown by the first fan 9 can remove the heat from the heat conduction plate 6, thereby cooling the lower water tank 403 and facilitating the recycling of the cooling components 4. This completes the process of using the rapid cooling equipment for vacuum coating.

[0025] The embodiments of this utility model are given for illustrative and descriptive purposes only, and are not intended to be exhaustive or to limit the utility model to the forms disclosed. Many modifications and variations will be apparent to those skilled in the art. The embodiments were chosen and described in order to better illustrate the principles and practical applications of this utility model, and to enable those skilled in the art to understand this utility model and design various embodiments with various modifications suitable for a particular purpose.

Claims

1. A rapid cooling device for vacuum coating, comprising a housing (1), a coating chamber (2), and a cooling assembly (4), characterized in that, A control room (3) is installed in the middle of the interior of the outer casing (1), and a cooling assembly (4) is provided on the outside of the control room (3). The cooling assembly (4) includes an upper water tank (401), a cold water channel (402), a lower water tank (403), heat dissipation fins (404), a circulating water pump (406), and a water supply pipe (407). The upper water tank (401) is located above the outside of the control room (3), and the lower side of the upper water tank (401) is connected to the cold water channel (407). 402), the lower side of the cold water channel (402) is connected to a lower water tank (403), and a circulating water pump (406) is installed in the middle of the rear side of the lower water tank (403). The upper side of the circulating water pump (406) is connected to a water supply pipe (407), and the water supply pipe (407) is connected to the interior of the upper water tank (401). The bottom of the coating chamber (2) is fixed with heat-conducting needle ribs (5) at equal intervals, and the heat-conducting needle ribs (5) penetrate the upper wall of the lower water tank (403).

2. The rapid cooling device for vacuum coating according to claim 1, characterized in that, A control room (3) is installed on the upper side of the coating chamber (2), and a sealed door is installed on the front side of the coating chamber (2) by means of a hinge.

3. The rapid cooling device for vacuum coating according to claim 1, characterized in that, The cooling assembly (4) also includes a vent (405), and the upper water tank (401) and the lower water tank (403) are both provided with vents (405).

4. The rapid cooling device for vacuum coating according to claim 1, characterized in that, The cooling assembly (4) also includes heat dissipation fins (404), and the heat dissipation fins (404) are fixed on the outside of the lower water tank (403), and the heat dissipation fins (404) penetrate the outer wall of the outer shell (1).

5. The rapid cooling device for vacuum coating according to claim 1, characterized in that, The lower water tank (403) is located on the lower side of the control room (3), and a heat-conducting plate (6) is fixed at the bottom of the lower water tank (403).

6. The rapid cooling device for vacuum coating according to claim 5, characterized in that, The heat-conducting plate (6) has an air-cooled chamber (8) installed on its lower side, and the front and rear sides of the air-cooled chamber (8) have a hollow structure.

7. The rapid cooling device for vacuum coating according to claim 6, characterized in that, The air-cooled chamber (8) is equipped with a first fan (9) and a second fan (10) in the middle and on both sides, respectively. The first fan (9) is located on the lower side of the heat-conducting plate (6), and the second fan (10) is located on the lower side of both sides of the lower water tank (403).

8. The rapid cooling device for vacuum coating according to claim 1, characterized in that, The outer shell (1) is equipped with exhaust nozzles (7) on the upper sides of both the left and right sides, and the exhaust nozzles (7) are located on the upper side of the upper water tank (401).

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