Heater and single crystal furnace

Abstract

The utility model discloses a heater and a single crystal furnace, the heater comprises at least two heating elements, the at least two heating elements are connected end to end to form a cylindrical structure, the axial direction of the cylindrical structure is a first direction, and the circumferential direction of the cylindrical structure is a second direction; the heating part comprises at least one heating part, each heating part comprises a plurality of transverse heating strips extending in the second direction and a plurality of longitudinal heating strips extending in the first direction, and the transverse heating strips and the longitudinal heating strips are connected in series end to end to form a concentric-square-shaped roundabout connecting structure. Therefore, when the heating element is electrified to work, current can flow among the plurality of transverse heating strips and the plurality of longitudinal heating strips in the heating part in a circuitous manner, so that the heating values at different positions in the heating part are relatively balanced, the overall heat distribution uniformity of the heating element is improved, and the heating effect of the heater is improved.

Description

Technical Field

[0001] This application belongs to the field of heater manufacturing technology, specifically relating to a heater and a single crystal furnace. Background Technology

[0002] The Czochralski method is the primary process for single crystal fabrication. This process takes place within a single crystal furnace. During the pulling of the single crystal silicon rod, the heater plays a crucial role in providing the temperature gradient required for crystal growth. Existing heaters typically employ a cylindrical structure formed by connecting heating elements and foot plates. However, this existing heater structure suffers from uneven heat distribution. Utility Model Content

[0003] This application aims to provide a heater and a single crystal furnace that can solve the problem of uneven heat generation in existing heater structures.

[0004] To solve the above-mentioned technical problems, this application is implemented as follows:

[0005] In a first aspect, embodiments of this application propose a heater, comprising: at least two heating elements, wherein the at least two heating elements are connected end-to-end to form a cylindrical structure, wherein the axial direction of the cylindrical structure is a first direction and the circumferential direction of the cylindrical structure is a second direction; each heating element includes at least one heating portion, wherein the heating portion includes a plurality of transverse heating strips extending along the second direction and a plurality of longitudinal heating strips extending along the first direction, wherein the plurality of transverse heating strips and the plurality of longitudinal heating strips are connected end-to-end to form a U-shaped meandering connection structure.

[0006] Optionally, the heating element includes N transverse heating strips arranged at intervals along the first direction, where N is a natural number greater than or equal to 5; wherein the first transverse heating strip is connected in series with the (N-1)th transverse heating strip, the second transverse heating strip is connected in series with the Nth transverse heating strip, and the remaining transverse heating strips are connected in series between the second transverse heating strip and the (N-1)th transverse heating strip.

[0007] The horizontal heating strips are connected to each other to form a U-shaped, meandering connection structure; every two horizontal heating strips are connected in series by a vertical heating strip.

[0008] Optionally, in the same heating element, the length of the transverse heating strip along the second direction is greater than the length of the longitudinal heating strip along the first direction.

[0009] Optionally, the length of the transverse heating strip along the second direction is 2-5 times the length of the longitudinal heating strip along the first direction.

[0010] Optionally, the length of the heating element along the second direction is greater than the length of the heating element along the first direction.

[0011] Optionally, the cross-sectional areas of the plurality of transverse heating strips in the heating element are all equal;

[0012] And / or, the cross-sectional area of ​​the longitudinal heating strip in the heating element is greater than or equal to the cross-sectional area of ​​the transverse heating strip.

[0013] Optionally, the heater further includes at least two electrode elements, which are evenly spaced around the cylindrical structure in the circumference. At least one heating element is provided between two adjacent electrode elements, and the electrode elements are electrically connected to the heating part of the heating element.

[0014] Optionally, the heating element has two opposite ends along the first direction, and at least two of the electrode elements are respectively connected to the same end of the corresponding heating element.

[0015] Optionally, the heater further includes a connecting plate, and the heating element includes at least two heating parts, which are connected in series end to end, and adjacent heating parts are electrically connected through the connecting plate; each heating part has a connecting part at both ends along the second direction, and one end of the connecting plate is at least partially overlapped with the connecting part of one of the heating parts, and the other end of the connecting plate is at least partially overlapped with the connecting part of the other heating part.

[0016] Secondly, embodiments of this application provide a single crystal furnace, including the heater described in the first aspect.

[0017] The technical solution of this application, compared with the prior art, includes at least the following beneficial effects:

[0018] 1. The heater in this application comprises at least two heating elements connected end-to-end to form a cylindrical structure. Each heating element includes at least one heating section, which includes multiple transverse heating strips and multiple longitudinal heating strips, connected end-to-end in a U-shaped, meandering connection structure. This allows the current to flow meanderingly between the multiple transverse and longitudinal heating strips in the heating section when the heating element is energized, resulting in a relatively even distribution of heat at different locations within the heating section. This improves the overall heat distribution uniformity of the heating element, enhances the heating effect of the heater, further improves the quality of the crystal rod, and mitigates concentric circle defects in the crystal rod.

[0019] 2. In the heating element of this application, the transverse heating strip plays a dominant role in heating, which makes it easy to adjust the heat output of the heater along the axial direction by adjusting the size of the transverse heating strip, and can improve the uniformity of heat distribution along the axial direction of the heater.

[0020] 3. By making the cross-sectional area of ​​the longitudinal heating strip in the heating element greater than or equal to the cross-sectional area of ​​the transverse heating strip, the heater thus prepared has a stable structure and a long heating life. Additional aspects and advantages of this application will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of this application. Attached Figure Description

[0021] The above and / or additional aspects and advantages of this application will become apparent and readily understood from the description of the embodiments taken in conjunction with the following drawings, in which:

[0022] Figure 1 This is a schematic diagram of a heater according to an embodiment of this application;

[0023] Figure 2 This is a front view of a heater according to an embodiment of this application;

[0024] Figure 3 This is a top view of the heater according to an embodiment of this application;

[0025] Figure 4 This is a schematic diagram of a first structure of a heating element according to an embodiment of this application;

[0026] Figure 5 This is a schematic diagram of a second structure of the heating element according to an embodiment of this application;

[0027] Figure 6 This is a schematic diagram of the structure of the electrode element according to an embodiment of this application;

[0028] Figure 7 This is a schematic diagram of the structure of the connecting plate according to an embodiment of this application;

[0029] Figure 8 This is a structural schematic diagram of a fastener according to an embodiment of this application;

[0030] Figure 9 This is a schematic diagram of a third structure of the heating element according to an embodiment of this application;

[0031] Figure 10 This is a schematic diagram of a fourth structure of the heating element according to an embodiment of this application;

[0032] Figure 11 This is a schematic diagram of the fifth structure of the heating element according to an embodiment of this application.

[0033] Figure label:

[0034] 10: Heating element; 10a: Heating part; 11: Transverse heating strip; 12: Longitudinal heating strip; 13: Connecting part; 20: Electrode; 30: Connecting plate; 40: Fastener; X: First direction; Y: Second direction. Detailed Implementation

[0035] The embodiments of this application will now be described in detail. Examples of these embodiments are illustrated in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this application, and should not be construed as limiting this application. All other embodiments obtained by those skilled in the art based on the embodiments of this application without inventive effort are within the scope of protection of this application.

[0036] The terms "first" and "second" in the specification and claims of this application may explicitly or implicitly include one or more of the features. In the description of this application, unless otherwise stated, "multiple" means two or more. Furthermore, "and / or" in the specification and claims indicates at least one of the connected objects, and the character " / " generally indicates that the preceding and following objects are in an "or" relationship.

[0037] In the description of this application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., indicating the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application.

[0038] In the description of this application, it should be noted that, unless otherwise expressly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection between two components. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0039] The heater and single crystal furnace provided in this application will be described in detail below with reference to the accompanying drawings, through specific embodiments and application scenarios.

[0040] like Figures 1 to 5As shown, a heater according to some embodiments of this application includes: at least two heating elements 10, the at least two heating elements 10 being connected end to end to form a cylindrical structure, the axial direction of the cylindrical structure being a first direction X, and the circumferential direction of the cylindrical structure being a second direction Y; the heating element 10 includes at least one heating part 10a, the heating part 10a including a plurality of transverse heating strips 11 extending along the second direction Y and a plurality of longitudinal heating strips 12 extending along the first direction X, the plurality of transverse heating strips 11 and the plurality of longitudinal heating strips 12 being connected end to end to form a U-shaped meandering connection structure.

[0041] In this embodiment, a heater with a cylindrical structure formed by connecting at least two heating elements 10 end-to-end is described. Each heating element 10 includes at least one heating section 10a, and each heating section 10a includes multiple transverse heating strips 11 and multiple longitudinal heating strips 12, which are connected end-to-end in a U-shaped, meandering connection structure. Thus, when the heating element 10 is energized, the current can flow meanderingly among the multiple transverse heating strips 11 and multiple longitudinal heating strips 12 in the heating section 10a, resulting in a relatively even distribution of heat at different locations within the heating section 10a. This improves the overall heat distribution uniformity of the heating element 10 and enhances the heating effect of the heater.

[0042] Specifically, the heater in this application has a cylindrical structure, comprising at least two heating elements 10 connected end-to-end to form a cylindrical structure. Each heating element 10 includes at least one heating section 10a, and each heating section 10a includes multiple transverse heating strips 11 and multiple longitudinal heating strips 12. The transverse heating strips 11 extend along a second direction Y, and the multiple transverse heating strips 11 are spaced apart along a first direction X; the longitudinal heating strips 12 extend along the first direction X, and the multiple longitudinal heating strips 12 are spaced apart along the second direction Y. Specifically, the longitudinal heating strips 12 are elongated, and the transverse heating strips 11 are arc-shaped. Furthermore, the multiple transverse heating strips 11 and the multiple longitudinal heating strips 12 are connected in series to form the heating section 10a, and the multiple transverse heating strips 11 and the multiple longitudinal heating strips 12 are connected to form a U-shaped, meandering connection structure.

[0043] For example, such as Figure 1 As shown, the heating element 10 includes two heating sections 10a connected end-to-end, and each heating section 10a has a U-shaped meandering connection structure. The U-shaped meandering connection structures formed in different heating sections 10a can be the same or different. Of course, the number of heating sections 10a in the heating element 10, and the U-shaped meandering connection structures formed in each heating section 10a, can be flexibly set according to actual conditions and are not limited here.

[0044] It should be noted that the "circuitous connection" refers to the fact that the multiple horizontal heating strips 11 are not connected in a sequential manner. For example... Figure 4 As shown, along the axial direction of the cylindrical structure, that is, along the first direction X, the two outermost transverse heating strips 11 among the plurality of transverse heating strips 11 are designated as end-side heating strips. Then, one of the end-side heating strips is connected to the transverse heating strip 11 adjacent to the other end heating strip through a longitudinal heating strip 12. In this way, the two end-side heating strips and the two longitudinal heating strips 12 form an outer ring structure. The remaining transverse heating strips 11 and longitudinal heating strips 12 are located within the outer ring structure and are connected in series with each other, ultimately forming a U-shaped meandering connection structure.

[0045] Understandably, according to the resistance law formula: R = ρL / S, where ρ is the resistivity of the material of the heating strip (including the transverse heating strip 11 and the longitudinal heating strip 12) forming the heating part 10a, L is the length of the heating strip (including the transverse heating strip 11 and the longitudinal heating strip 12), S is the cross-sectional area of ​​the heating strip, and R is the resistance value. Based on the above formula, the heat generated by the heating part 10a, as a resistive element, is positively correlated with its resistance value, and the resistance of the heating part 10a is positively correlated with the length of the heating strip (including the transverse heating strip 11 and the longitudinal heating strip 12) forming the heating part 10a.

[0046] Furthermore, such as Figure 4 As shown, after the current enters the heating element 10a from the bottom horizontal heating bar A1, it first flows upward to the horizontal heating bar A4, then flows downward again to the horizontal heating bar A2 after a circuitous flow, and then flows from A2 to the top horizontal heating bar A5. This ensures... Figure 4 The heat generation of the corresponding part in region C is relatively balanced with that of the corresponding part in region D, which helps to improve the heat uniformity of different positions of the heating element 10a, thereby improving the heating effect of the heater.

[0047] Optionally, such as Figures 4-5 as well as Figures 9-11 As shown, the heating element 10a includes N transverse heating bars 11 arranged sequentially at intervals along the first direction X, where N is a natural number greater than or equal to 5; wherein, the first transverse heating bar 11 is connected in series with the (N-1)th transverse heating bar 11, the second transverse heating bar 11 is connected in series with the Nth transverse heating bar 11, and the remaining transverse heating bars 11 are connected in series between the second transverse heating bar 11 and the (N-1)th transverse heating bar 11 to form a U-shaped meandering connection structure; every two transverse heating bars 11 are connected in series by a longitudinal heating bar 12.

[0048] Specifically, N transverse heating strips 11 are arranged sequentially at intervals along the first direction X in the heating part 10a. A longitudinal heating strip 12 connects the first transverse heating strip 11 to the (N-1)th transverse heating strip 11, and another longitudinal heating strip 12 connects the Nth transverse heating strip 11 to the second transverse heating strip 11, forming a U-shaped outer ring structure. The remaining transverse heating strips 11 are then connected in series between the second transverse heating strip 11 and the (N-1)th transverse heating strip 11 using the longitudinal heating strip 12. Thus, the N transverse heating strips 11 and N-1 longitudinal heating strips 12 constitute a U-shaped, meandering connection structure for the heating part 10a. This allows the current to flow meanderingly within the heating part 10a after it is energized, thereby improving the uniformity of heat generation at different locations within the heating part 10a.

[0049] For example, with Figure 4 Taking the heating element 10a as an example, the heating element 10a includes five horizontal heating bars 11 and four vertical heating bars 12. The five horizontal heating bars 11 are arranged sequentially from bottom to top as A1-A5, and the four vertical heating bars 12 are arranged sequentially from left to right as B1-B4. Furthermore, A1 is connected in series with A4 through B1, A2 is connected in series with A5 through B4, A3 is connected in series with A2 through B2, and A3 is connected in series with A4 through B3. In this way, the five horizontal heating bars 11 and the four vertical heating bars 12 are interconnected and connected in a meandering manner to form a U-shaped structure.

[0050] In some embodiments, N can be set to an odd number greater than or equal to 5. This ensures that N horizontal heating strips 11 and N-1 vertical heating strips 12 can be connected in series to form a U-shaped meandering connection structure. It also ensures that the beginning and end ends of the heating part 10a are located on both sides of the heating part 10a along the second direction Y, thereby facilitating the end-to-end connection between multiple heating parts 10a.

[0051] For example, such as Figure 9 and Figure 10 As shown, Figure 9 and Figure 10 Two heating element structures 10a, each consisting of seven transverse heating bars 11 and six longitudinal heating bars 12, are shown. (Example) Figure 11 As shown, Figure 11 A heating element 10a structure consisting of nine transverse heating bars 11 and eight longitudinal heating bars 12 is shown. Of course, the heating element 10a can also be configured with other structures, which can be flexibly set according to actual needs, and will not be listed here.

[0052] Optionally, such as Figure 4 and Figure 5As shown, in the same heating element 10a, the length of the transverse heating strip 11 along the second direction Y is greater than the length of the longitudinal heating strip 12 along the first direction X.

[0053] In this embodiment, by setting the length of the transverse heating strip 11 in the heating part 10a to be greater than the length of the longitudinal heating strip 12, that is, the transverse heating strip 11 plays a dominant role in heating in the heating part 10a. This makes it easy to adjust the heat output of the heater along the first direction X by adjusting the size of the transverse heating strip 11, and can improve the uniformity of heat distribution of the heater along the first direction X. Thus, when the heater is used in the hot field of a single crystal furnace, it can effectively suppress heat convection, thereby improving the crystal pulling quality of the single crystal furnace.

[0054] In addition, the heater has a cylindrical structure and is formed by connecting at least two heating elements 10 end to end. Each heating element includes at least one heating part 10a. By making the extension direction of the transverse heating strip 11 that plays the dominant heating role in each heating part 10a consistent with the circumference of the cylindrical structure, it is easy to improve the concentricity of different heating parts 10a in the heater, thereby improving the heating effect of the heater.

[0055] Optionally, such as Figure 4 and Figure 5 As shown, the length of the transverse heating strip 11 along the second direction Y is 2-5 times the length of the longitudinal heating strip 12 along the first direction X.

[0056] In this embodiment, by setting the length of the transverse heating strip 11 along the second direction Y to be 2-5 times the length of the longitudinal heating strip 12 along the first direction X, it is ensured that the transverse heating strip 11 plays a dominant heating role in the heating part 10a, and at the same time, it is ensured that the longitudinal heating strip 12 can effectively connect the two transverse heating strips 11.

[0057] Specifically, the length of the transverse heating strip 11 can be set to 2, 2.5, 3, 3.5, 4, 4.5, or 5 times the length of the longitudinal heating strip 12. The specific lengths of the transverse heating strip 11 and the longitudinal heating strip 12 can be flexibly set according to the usage requirements of the heater, and are not limited here.

[0058] Among them, such as Figure 4 As shown, the longitudinal heating strip B1 is the part to the left of the figure with the dotted line as the boundary, and the transverse heating strip A4 is the part between the two dotted lines on the left and right sides of the figure. The structures of the remaining longitudinal heating strip 12 and transverse heating strip 11 are similar.

[0059] Optionally, such as Figure 4 and Figure 5 As shown, the length of the heating element 10a along the second direction Y is greater than the length of the heating element 10a along the first direction X.

[0060] In this embodiment, by setting the length of the heating element 10a along the second direction Y to be greater than the length of the heating element 10a along the first direction X, that is, the heating element 10a is generally in an arc-shaped strip structure, it is convenient for a heater to be formed by multiple heating elements 10a surrounding and connecting to form a cylindrical structure. It is also convenient for the length of the transverse heating strip 11 in the heating element 10a to be greater than the length of the longitudinal heating strip 12.

[0061] Optionally, such as Figure 4 and Figure 5 As shown, the cross-sectional areas of the plurality of transverse heating strips 11 in the heating element 10a are all equal. In this application, by setting the cross-sectional areas of the plurality of transverse heating strips 11 in the same heating element 10a to be all equal, the heating uniformity of the heating element 10a at different positions along the first direction X is improved.

[0062] It is understandable that the cross-sectional area of ​​the transverse heating strip 11 refers to the cross-sectional area obtained by making a cross-section perpendicular to the Y direction.

[0063] Optionally, such as Figure 4 As shown, the cross-sectional area of ​​the longitudinal heating strip 12 in the heating section 10a is greater than or equal to the cross-sectional area of ​​the transverse heating strip 11.

[0064] It is understood that in the heating section 10a of this application, the transverse heating strip 11 plays the main role in heating, while the longitudinal heating strip 12 mainly serves as a series connection between the transverse heating strips 11. Therefore, by setting the cross-sectional area of ​​the longitudinal heating strip 12 to be greater than or equal to the cross-sectional area of ​​the transverse heating strip 11, the structural strength of the longitudinal heating strip 12 is improved, so as to ensure the connection between the two transverse heating strips 11 by the longitudinal heating strip 12, thereby improving the overall structural strength of the heating section 10a, which can increase the stability and heating life of the heater.

[0065] It is understandable that the cross-sectional area of ​​the longitudinal heating strip 12 refers to the cross-sectional area obtained by making a cross-section perpendicular to the X direction.

[0066] Optionally, such as Figure 1 and Figure 6 As shown, the heater also includes electrode elements 20, at least two electrode elements 20 are arranged evenly around the circumference of the cylindrical structure, and at least one heating element 10 is provided between two adjacent electrode elements 20. The electrode elements 20 are electrically connected to the heating part 10a in the heating element 10.

[0067] In this embodiment, by providing electrode components 20, the electrode components 20 can serve as electrical connection components and support components for the heater. The height and thickness of the electrode components 20 can be flexibly adjusted according to the usage requirements of the heater, so that the heater can better meet the usage requirements. At the same time, by arranging at least two electrode components 20 evenly spaced around the circumference of the cylindrical structure, and providing at least one heating element 10 between each pair of adjacent electrode components 20, the electrode components 20 are electrically connected to the heating part 10a in the heating element 10, so that at least two electrode components 20 can be connected to the positive and negative terminals of the power supply, thereby supplying power to the heating element 10 through the electrode components 20.

[0068] In some embodiments, such as Figure 1 As shown, the heater includes two heating elements 10 and two electrode elements 20. The two heating elements 10 are connected end to end to form a cylindrical structure. Each heating element 10 includes two heating sections 10a connected in series. The two electrode elements 20 are respectively connected to the two ends of the two heating elements 10. The two heating elements 10 are connected in parallel. This ensures that the current flows the same or similar distance in each heating element 10, so that the heat generated by each heating element 10 is the same or similar, thereby improving the heating uniformity of different parts of the heater.

[0069] In other embodiments, the heater includes three heating elements 10 and three electrode elements 20. Referring to the arrangement of the above embodiments, the three electrode elements 20 are evenly spaced around the circumference of the cylindrical structure. That is, the distance between any two adjacent electrode elements 20 is equal along the circumference of the cylindrical structure. Furthermore, each heating element 10 may include two heating sections 10a connected in series. The two ends of the heating element 10 are respectively connected to the electrode elements 20, and adjacent heating elements 10 are connected in parallel.

[0070] In addition, the heater can be configured to include four heating elements 10 and four electrode elements 20, etc. Each heating element 10 includes at least one heating section 10a, and the number of heating sections 10a in different heating elements 10 can be set to be the same. Of course, the number of heating elements 10 and electrode elements 20 in the heater can be flexibly set according to actual needs. The specific connection structure can be referred to the above content and will not be repeated here.

[0071] Optionally, such as Figure 1 As shown, the heating element 10a has two opposite ends along the first direction X, and at least two electrode elements 20 are respectively connected to the same end of the corresponding heating element 10a.

[0072] In this embodiment, by connecting at least two electrode elements 20 to the same end of the corresponding heating element 10a, it is ensured that the current flowing from the electrode element 20 to the corresponding heating element 10a travels the same or similar distance, thereby ensuring that the heat generated by each heating element 10a is the same or similar, thus improving the heat uniformity of different parts in the heating element 10.

[0073] Specifically, such as Figure 1 As shown, both electrode elements 20 are disposed below the cylindrical structure formed by at least two heating elements 10. The heating part 10a has a relative upper end and a lower end along the first direction X, so that each electrode element 20 is connected to the lower end of the corresponding heating part 10a. Furthermore, the electrode element 20 can be connected to the end of the lowermost transverse heating strip 11 in the heating part 10a.

[0074] Similarly, two electrode components 20 can also be simultaneously disposed above the cylindrical structure, and each electrode component 20 is connected to the upper end of the corresponding heating part 10a. Furthermore, the electrode component 20 can be connected to the end of the uppermost horizontal heating strip 11 in the heating part 10a.

[0075] It is understood that the heater in this application can be used in a single crystal furnace, with the lower end of the heater corresponding to the bottom of the single crystal furnace. That is, in the heater, the electrode 20 can be provided on the side of the cylindrical structure facing the bottom of the single crystal furnace, thereby facilitating the layout and use of the heater in the single crystal furnace.

[0076] Optionally, such as Figure 1 and Figure 7 As shown, the heater also includes a connecting plate 30, and the heating element 10 includes at least two heating sections 10a, which are connected in series end to end, and adjacent heating sections 10a are electrically connected through the connecting plate 30; Figure 4 As shown, the heating element 10a has connecting parts 13 at both ends along the second direction Y. One end of the connecting plate 30 is at least partially connected to the connecting part 13 of one of the heating elements 10a, and the other end of the connecting plate 30 is at least partially connected to the connecting part 13 of the other heating element 10a.

[0077] In this embodiment, two adjacent heating elements 10a are electrically connected by a connecting plate 30, and one end of the connecting plate 30 overlaps with the connecting portion 13 of one of the heating elements 10a, and the other end of the connecting plate 30 overlaps with the connecting portion 13 of the other heating element 10a. This can improve the connection strength between the two heating elements 10a, making the overall structure of the heater more robust and its performance more reliable.

[0078] In some embodiments, such as Figure 8As shown, the heater also includes fasteners 40, such as bolts or screws. The connecting plate 30 has opposing first and second ends. The first end of the connecting plate 30 at least partially overlaps with the connecting portion 13 of one of the heating elements 10a and is detachably connected via the fastener 40. The second end of the connecting plate 30 at least partially overlaps with the connecting portion 13 of the other heating element 10a and is detachably connected via the fastener 40. This facilitates the assembly and disassembly of the connecting plate 30 and the heating element 10a, and makes maintenance and replacement of the heating element 10 easier. Furthermore, the sides of the first and second ends of the connecting plate 30 facing away from the heating element 10a can be chamfered. This facilitates quick identification during installation and makes installation and use easier, while also reducing the height difference between the connecting plate 30 and the corresponding heating element 10a, preventing interference between the connecting plate 30 and other components during heater use.

[0079] It should be noted that the connection structure between the two heating elements 10a can also employ other detachable connection methods, such as stop joints, mortise and tenon joints, snap-fit ​​joints, and plug-in joints. Furthermore, after connecting the two heating elements 10a, graphite adhesive can be applied to the connection point to increase its strength and improve its conductivity. Of course, the specific connection structure between the two heating elements 10a can be flexibly configured according to actual needs and is not limited here.

[0080] In some embodiments, the plurality of heating elements 10a in the heating element 10 can be integrally molded. This can improve the overall structural stability of the heating element 10 and reduce deformation of the heating element 10 during use.

[0081] In other embodiments, the multiple heating elements 10a in the heating element 10 may also adopt a split structure, and the heating element 10 is formed by splicing multiple heating elements 10a. This makes it easy to flexibly replace the local structure in the heating element 10 as needed.

[0082] Furthermore, the multiple transverse heating bars 11 and multiple longitudinal heating bars 12 in the same heating element 10a can be an integral structure or a separate structure. Those skilled in the art can flexibly set them according to actual application needs, and no limitation is made here.

[0083] Optionally, embodiments of this application also provide a single crystal furnace, including the heater described in the above embodiments.

[0084] In this embodiment, a heater with a cylindrical structure formed by connecting at least two heating elements 10 end-to-end is described. Each heating element 10 includes at least one heating section 10a, and each heating section 10a includes multiple transverse heating strips 11 and multiple longitudinal heating strips 12, which are connected end-to-end in a U-shaped, meandering connection structure. Thus, when the heating element 10 is energized, the current can flow meanderingly among the multiple transverse heating strips 11 and multiple longitudinal heating strips 12 in the heating section 10a, resulting in a relatively even distribution of heat at different locations within the heating section 10a. This improves the overall heat distribution uniformity of the heating element 10 and enhances the heating effect of the heater.

[0085] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "illustrative embodiment," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of this application. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0086] Although embodiments of this application have been shown and described, those skilled in the art will understand that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of this application, the scope of which is defined by the claims and their equivalents.

Claims

1. A heater, characterized in that, include: At least two heating elements are connected end to end to form a cylindrical structure, wherein the axial direction of the cylindrical structure is a first direction and the circumferential direction of the cylindrical structure is a second direction; The heating element includes at least one heating part, which includes multiple transverse heating strips extending along the second direction and multiple longitudinal heating strips extending along the first direction. The multiple transverse heating strips and the multiple longitudinal heating strips are connected end to end to form a U-shaped meandering connection structure. The heating element includes N transverse heating strips arranged at intervals along the first direction, where N is a natural number greater than or equal to 5. The first horizontal heating strip is connected in series with the (N-1)th horizontal heating strip, the second horizontal heating strip is connected in series with the Nth horizontal heating strip, and the remaining horizontal heating strips are connected in series between the second horizontal heating strip and the (N-1)th horizontal heating strip to form the U-shaped meandering connection structure; every two horizontal heating strips are connected in series through a vertical heating strip.

2. The heater according to claim 1, characterized in that, In the same heating element, the length of the transverse heating strip along the second direction is greater than the length of the longitudinal heating strip along the first direction.

3. The heater according to claim 2, characterized in that, The length of the transverse heating strip along the second direction is 2-5 times the length of the longitudinal heating strip along the first direction.

4. The heater according to claim 2, characterized in that, The length of the heating element along the second direction is greater than the length of the heating element along the first direction.

5. The heater according to claim 1, characterized in that, The cross-sectional areas of the plurality of transverse heating strips in the heating element are all equal; And / or, the cross-sectional area of ​​the longitudinal heating strip in the heating element is greater than or equal to the cross-sectional area of ​​the transverse heating strip.

6. The heater according to claim 1, characterized in that, The heater further includes at least two electrode elements, which are arranged at uniform intervals around the circumference of the cylindrical structure. At least one heating element is provided between two adjacent electrode elements, and the electrode elements are electrically connected to the heating part of the heating element.

7. The heater according to claim 6, characterized in that, The heating element has two opposite ends along the first direction, and at least two of the electrodes are respectively connected to the same end of the corresponding heating element.

8. The heater according to claim 1, characterized in that, The heater further includes multiple connecting plates, and the heating element includes at least two heating parts, which are connected in series end to end, and adjacent heating parts are electrically connected through the connecting plates; each heating part has a connecting part at both ends along the second direction, and one end of the connecting plate is at least partially overlapped with the connecting part of one of the heating parts, and the other end of the connecting plate is at least partially overlapped with the connecting part of the other heating part.

9. A single crystal furnace, characterized in that, Includes the heater as described in any one of claims 1-8.

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