Ultra-large air volume semiconductor clean workshop purification and ventilation device

Abstract

The utility model relates to the technical field of workshop purification and ventilation, and discloses an ultra-large air volume semiconductor clean workshop purification and ventilation device which comprises a plurality of particle sensors installed on a workshop wall, an exhaust port is formed in the surface of the workshop wall in a penetrating mode, and a supporting frame is fixedly connected to the side, away from the particle sensors, of the workshop wall. The side, away from the particle sensor, of the workshop wall is further connected with a supporting assembly, a sealing mechanism is connected into the supporting assembly, the output end of the sealing mechanism is connected with a shielding assembly, and the shielding assembly is located in the supporting frame. According to the ultra-large-air-volume semiconductor cleaning workshop purification ventilation device, when a part of dust adheres to the surface of a filter screen after the filter screen is used for a period of time, the exhaust port can be sealed and blocked through a shielding assembly at the moment, then the surface of the filter screen is subjected to back flushing through a back flushing structure, and lifting is conducted through a lifting mechanism; and therefore, back flushing can be carried out on each angle of the filter screen.

Description

Technical Field

[0001] This utility model relates to the field of workshop purification and ventilation technology, specifically to a purification and ventilation device for ultra-large air volume semiconductor cleanrooms. Background Technology

[0002] A semiconductor cleanroom is a special environment designed specifically for semiconductor chip manufacturing. In order to control contamination inside the cleanroom, maintain a stable environment, and ensure process yield, it is often necessary to remove dust or other particulate matter that may be present inside the cleanroom.

[0003] Current methods mostly involve creating an exhaust duct in the workshop wall, installing a filter screen and an exhaust fan inside, and setting up a particle sensor inside the workshop for monitoring. When the detected value exceeds a set threshold, the exhaust fan is activated, thus adsorbing dust inside the workshop onto the filter screen for filtration. However, this method still has the following problems in actual use:

[0004] During workshop operation, as the ventilation system continuously expels internal dust and other particulate matter, these pollutants adhere directly to the surface of the exhaust fan's filter. Over time, the filter gradually accumulates a large amount of impurities, affecting not only ventilation efficiency but also significantly reducing air purification effectiveness.

[0005] However, most ventilation devices currently lack automatic cleaning functions and require regular manual cleaning and maintenance. This not only increases operation and maintenance costs but may also affect the cleanliness of the production environment due to untimely cleaning, resulting in significant limitations in their use. Utility Model Content

[0006] To address the shortcomings of existing technologies, this utility model provides a high-volume semiconductor cleanroom purification and ventilation device that allows for regular cleaning of the filter screen.

[0007] To achieve the above objectives, this utility model provides the following technical solution: a high-volume semiconductor cleanroom purification and ventilation device, including several particle sensors installed on the cleanroom wall, an exhaust port through which the surface of the cleanroom wall is opened, a support frame is fixedly connected to the side of the cleanroom wall away from the particle sensors, a support component is also connected to the side of the cleanroom wall away from the particle sensors, a sealing mechanism is connected inside the support component, a shielding component is connected to the output end of the sealing mechanism, the shielding component is located inside the support frame, and a lifting mechanism, a back-blowing mechanism, a filter screen and an air extraction mechanism are connected to the inner wall of the support frame.

[0008] Furthermore, the support assembly includes three support blocks, one side of which is fixedly connected to the side of the workshop wall away from the particle sensor, and a sealing mechanism is connected to the three support blocks.

[0009] Furthermore, the sealing mechanism includes a movable motor, a bidirectional lead screw, and two movable blocks. The outer wall of the movable motor is fixedly connected to the side wall of one of the support blocks. The output shaft of the movable motor is fixedly connected to one end of the bidirectional lead screw. The other end of the bidirectional lead screw passes through the three support blocks and the two movable blocks. The outer wall of the bidirectional lead screw is rotatably connected to the inner walls of the three support blocks. The outer wall of the bidirectional lead screw is threadedly connected to the inner walls of the two movable blocks. The lower ends of the two movable blocks are respectively connected to the two ends of the shielding assembly.

[0010] Furthermore, the shielding assembly includes two sealing doors, the upper surfaces of the two sealing doors at opposite ends of each other are fixedly connected to the bottom surfaces of the two movable blocks, and the outer walls of the two sealing doors are slidably connected to the inner walls on both sides of the support frame.

[0011] Furthermore, the lifting mechanism includes a lifting motor, a slide rod, and a threaded rod. The outer wall of the lifting motor is fixedly connected to the upper surface of the outer wall of the support frame. The output shaft of the lifting motor is fixedly connected to the upper end of the threaded rod. The threaded rod and the slide rod are arranged in parallel. The lower ends of the threaded rod and the slide rod both penetrate the support frame. The outer wall of the threaded rod is rotatably connected to the inner wall of the support frame at the penetration point. The outer wall of the slide rod is fixedly connected to the inner wall of the support frame at the penetration point. The threaded rod and the slide rod are connected to both ends of the back-blowing structure.

[0012] Furthermore, the backflushing mechanism includes an air pump, a support plate, an air blowing pipe, a bellows hose, two lifting blocks, and several air blowing heads. The outer wall of the air pump is fixedly connected to the upper surface of the outer wall of the support frame. The output end of the air pump is fixedly connected to one end of the bellows hose, and the other end of the bellows hose extends into the interior of the support frame. The end of the bellows hose inside the support frame also extends through the support plate and is fixedly connected to the middle of the air blowing pipe. Several air blowing heads are fixedly connected to the side walls of the air blowing pipe. The upper surfaces of one end of the two lifting blocks are fixedly connected to the bottom surfaces of both ends of the support plate. The two lifting blocks are respectively sleeved and fixedly connected to the outer walls of both ends of the air blowing pipe. The ends of the two lifting blocks away from the support plate are respectively sleeved on the outside of the threaded rod and the sliding rod. The inner wall of the lifting block is threadedly connected to the outer wall of the threaded rod, and the inner wall of the lifting block is slidably connected to the outer wall of the sliding rod. The support plate, the air blowing pipe, the two lifting blocks, and several air blowing heads are all located on the side of the filter screen closest to the workshop wall.

[0013] Furthermore, the exhaust mechanism includes a cross bracket, an exhaust motor, and fan blades. The outer walls of the four ends of the cross bracket are fixedly connected to the inner walls of the support frame. The middle part of the cross bracket is fixedly connected to the outer wall of the exhaust motor. The output shaft of the exhaust motor is fixedly connected to the central shaft of the fan blades. The cross bracket, the exhaust motor, and the fan blades are all located on the side of the filter screen away from the workshop wall.

[0014] Compared with the prior art, the present invention has the following beneficial effects:

[0015] This ultra-high air volume semiconductor cleanroom purification and ventilation device has a support frame at the exhaust end of the exhaust port, and a shielding component, a back-blowing structure, and a lifting mechanism inside the support frame. When the filter screen is used for a period of time and some dust adheres to the surface of the filter screen, the exhaust port can be sealed and blocked by the shielding component. Then, the back-blowing structure back-blowing the surface of the filter screen and the lifting mechanism raising and lowering the filter screen can back-blow it from all angles. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the overall appearance of the present utility model;

[0017] Figure 2 This is a schematic diagram of the overall appearance of the present invention from another perspective;

[0018] Figure 3 This utility model is based on Figure 2 Cross-sectional schematic diagram of the middle part;

[0019] Figure 4 This is a detailed connection diagram of the lifting mechanism and back-blowing mechanism of this utility model.

[0020] In the diagram: 1. Workshop wall; 2. Particle sensor; 3. Sealed door; 4. Filter screen; 5. Support frame; 6. Air pump; 7. Support block; 8. Moving motor; 9. Two-way lead screw; 10. Lifting motor; 11. Cross bracket; 12. Exhaust motor; 13. Fan blade; 14. Slide rod; 15. Threaded rod; 16. Support plate; 17. Air blowing pipe; 18. Lifting block; 19. Moving block; 20. Air blowing head; 21. Bellows hose; 101. Exhaust port. Detailed Implementation

[0021] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present utility model. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments.

[0022] Please see Figures 1-4 The ultra-high air volume semiconductor cleanroom purification and ventilation device includes several particle sensors 2 installed on the workshop wall 1. An exhaust port 101 is opened through the surface of the workshop wall 1. A support frame 5 is fixedly connected to the side of the workshop wall 1 away from the particle sensors 2. A support component is also connected to the side of the workshop wall 1 away from the particle sensors 2. A sealing mechanism is connected inside the support component. A shielding component is connected to the output end of the sealing mechanism. The shielding component is located inside the support frame 5. A lifting mechanism, a back-blowing mechanism, a filter screen 4 and an air extraction mechanism are connected to the inner wall of the support frame 5.

[0023] like Figures 1 to 4As shown, when the ultra-large air volume semiconductor cleanroom purification and ventilation device of this utility model is in use, if several particle sensors 2 installed inside the workshop detect that the dust inside the workshop exceeds the set standard, the particle sensors 2 will transmit electrical signals to the external processor, and the external controller will start the air extraction mechanism. After the air extraction mechanism is started, it will draw air from inside the workshop through the filter screen 4 and the exhaust port 101, thereby adsorbing and adhering the dust inside the workshop to the surface of the filter screen 4, thereby achieving the purpose of air filtration inside the workshop. When the particle sensors 2 detect that the dust inside the workshop reaches the set standard, the air extraction mechanism will automatically shut off.

[0024] After the filter screen 4 has been used for a period of time, a certain amount of dust will adhere to the surface of the filter screen 4. In order to avoid the dust from affecting the filter screen 4, when it is not necessary to remove dust from the workshop, the sealing mechanism can be activated by the external controller. After the sealing mechanism is activated, it will control the shielding component to move towards the center at the same time, thereby sealing and blocking the exhaust port 101.

[0025] Then, the back-blowing mechanism and the lifting mechanism are activated by the external controller. After the back-blowing mechanism is activated, the output end will blow high-pressure gas toward the surface of the filter screen 4, which can blow off the dust adhering to the surface of the filter screen 4. Because of the obstruction of the shielding component, it will not enter the workshop. When the lifting mechanism is activated, it will move the back-blowing structure up and down, so that the entire filter screen 4 can be back-blown.

[0026] After the backflushing is completed, open the sealing plate under the support frame 5, which is fastened by bolts, so that the dust located between the shielding assembly and the filter screen 4 can be discharged.

[0027] It should be noted that the external processor, external controller and filter 4 mentioned above are all existing mature technologies, so they will not be described in detail here.

[0028] like Figures 1-4 As shown, the support assembly includes three support blocks 7, one side of each of the three support blocks 7 is fixedly connected to the side of the workshop wall 1 away from the particle sensor 2, and the sealing mechanism is connected to the three support blocks 7.

[0029] More specifically, by setting three support blocks 7, the sealing assembly can be supported and limited.

[0030] like Figures 1-4As shown, the sealing mechanism includes a movable motor 8, a bidirectional lead screw 9, and two movable blocks 19. The outer wall of the movable motor 8 is fixedly connected to the side wall of one of the support blocks 7. The output shaft of the movable motor 8 is fixedly connected to one end of the bidirectional lead screw 9. The other end of the bidirectional lead screw 9 passes through the three support blocks 7 and the two movable blocks 19. The outer wall of the bidirectional lead screw 9 is rotatably connected to the inner walls of the three support blocks 7. The outer wall of the bidirectional lead screw 9 is threadedly connected to the inner walls of the two movable blocks 19. The lower ends of the two movable blocks 19 are respectively connected to the two ends of the shielding assembly.

[0031] More specifically, when it is necessary to seal the exhaust port 101, simply turn on the moving motor 8. The output shaft of the moving motor 8 rotates the bidirectional lead screw 9, and the two moving blocks 19 connected to both ends of the bidirectional lead screw 9 can move together, thereby moving both ends of the shielding component towards the middle at the same time until the exhaust port 101 is sealed.

[0032] like Figures 1-4 As shown, the shielding assembly includes two sealing doors 3. The upper surfaces of the two sealing doors 3, which are far apart from each other, are fixedly connected to the bottom surfaces of the two movable blocks 19, and the outer walls of the two sealing doors 3 are slidably connected to the inner walls on both sides of the support frame 5.

[0033] More specifically, when the two moving blocks 19 move, the sealing door 3 connected to the moving blocks 19 can move together toward the center and block the exhaust port 101 during the movement.

[0034] like Figures 1-4 As shown, the lifting mechanism includes a lifting motor 10, a slide rod 14, and a threaded rod 15. The outer wall of the lifting motor 10 is fixedly connected to the upper surface of the outer wall of the support frame 5. The output shaft of the lifting motor 10 is fixedly connected to the upper end of the threaded rod 15. The threaded rod 15 and the slide rod 14 are arranged in parallel. The lower ends of the threaded rod 15 and the slide rod 14 both penetrate the support frame 5. The outer wall of the threaded rod 15 is rotatably connected to the inner wall of the penetration point of the support frame 5. The outer wall of the slide rod 14 is fixedly connected to the inner wall of the penetration point of the support frame 5. The threaded rod 15 and the slide rod 14 are connected to the two ends of the back-blowing structure.

[0035] More specifically, when it is necessary to control the lifting and lowering of the back-blowing mechanism, simply start the lifting motor 10. The output shaft of the lifting motor 10 will rotate the threaded rod 15. Then, the threaded rod 15, in conjunction with the slide rod 14, will lift and lower the back-blowing mechanism located between the threaded rod 15 and the slide rod 14 inside the support frame 5.

[0036] like Figures 1-4As shown, the back-blowing mechanism includes an air pump 6, a support plate 16, an air blowing pipe 17, a bellows hose 21, two lifting blocks 18, and several air blowing heads 20. The outer wall of the air pump 6 is fixedly connected to the upper surface of the outer wall of the support frame 5. The output end of the air pump 6 is fixedly connected to one end of the bellows hose 21, and the other end of the bellows hose 21 extends into the interior of the support frame 5. The end of the bellows hose 21 inside the support frame 5 also extends through the support plate 16 and is fixedly connected to the middle of the air blowing pipe 17. Several air blowing heads 20 are fixedly connected to the side walls of the air blowing pipe 17. The two lifting blocks 18... The upper surface of one end of the lifting block 18 is fixedly connected to the bottom surface of both ends of the support plate 16. The two lifting blocks 18 are respectively sleeved and fixedly connected to the outer walls of both ends of the air blowing pipe 17. The ends of the two lifting blocks 18 away from the support plate 16 are respectively sleeved on the outside of the threaded rod 15 and the slide rod 14. The inner wall of the lifting block 18 is threadedly connected to the outer wall of the threaded rod 15. The inner wall of the lifting block 18 is slidably connected to the outer wall of the slide rod 14. The support plate 16, the air blowing pipe 17, the two lifting blocks 18 and several air blowing heads 20 are all located on the side of the filter screen 4 close to the workshop wall 1.

[0037] More specifically, when the threaded rod 15 rotates, the two lifting blocks 18 connected between the threaded rod 15 and the slide rod 14 can lift the support plate 16, the air pipe 17, the bellows hose 21 and several air blowing heads 20 together.

[0038] In addition, when it is necessary to backflush the surface of the filter screen 4, simply turn on the air pump 6. The air output by the air pump 6 can be delivered to the inside of the bellows hose 21 through the output end, and then enter the inside of the air blowing pipe 17 through the bellows hose 21, and then enter several air blowing heads 20 from the air blowing pipe 17, so that the surface of the filter screen 4 can be backflushed.

[0039] like Figures 1-4 As shown, the exhaust mechanism includes a cross bracket 11, an exhaust motor 12, and a fan blade 13. The outer walls of the four ends of the cross bracket 11 are fixedly connected to the inner walls of the support frame 5. The middle part of the cross bracket 11 is fixedly connected to the outer wall of the exhaust motor 12. The output shaft of the exhaust motor 12 is fixedly connected to the central shaft of the fan blade 13. The cross bracket 11, the exhaust motor 12, and the fan blade 13 are all located on the side of the filter screen 4 away from the workshop wall 1.

[0040] More specifically, when it is necessary to extract air from inside the workshop, simply turn on the powerful exhaust motor 12 through the external controller. After the exhaust motor 12 is started, its output shaft can rotate the fan blades 13, thereby drawing air from inside the workshop through the negative pressure suction of the rotating fan blades 13 and sticking the dust inside the air onto the filter screen 4.

[0041] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A high-volume semiconductor cleanroom purification and ventilation device, comprising several particle sensors (2) installed on the workshop wall (1), wherein an exhaust port (101) is provided through the surface of the workshop wall (1), characterized in that: A support frame (5) is fixedly connected to the side of the workshop wall (1) away from the particle sensor (2). A support component is also connected to the side of the workshop wall (1) away from the particle sensor (2). A sealing mechanism is connected inside the support component. A shielding component is connected to the output end of the sealing mechanism. The shielding component is located inside the support frame (5). A lifting mechanism, a back-blowing mechanism, a filter screen (4), and an air extraction mechanism are connected to the inner wall of the support frame (5).

2. The ultra-high air volume semiconductor cleanroom purification and ventilation device according to claim 1, characterized in that: The support assembly includes three support blocks (7), one side of each of the three support blocks (7) is fixedly connected to the side of the workshop wall (1) away from the particle sensor (2), and the sealing mechanism is connected to the three support blocks (7).

3. The ultra-high air volume semiconductor cleanroom purification and ventilation device according to claim 2, characterized in that: The sealing mechanism includes a moving motor (8), a bidirectional lead screw (9), and two moving blocks (19). The outer wall of the moving motor (8) is fixedly connected to the side wall of one of the support blocks (7). The output shaft of the moving motor (8) is fixedly connected to one end of the bidirectional lead screw (9). The other end of the bidirectional lead screw (9) passes through the three support blocks (7) and the two moving blocks (19). The outer wall of the bidirectional lead screw (9) is rotatably connected to the inner wall of the three support blocks (7). The outer wall of the bidirectional lead screw (9) is threadedly connected to the inner wall of the two moving blocks (19). The lower ends of the two moving blocks (19) are respectively connected to the two ends of the shielding assembly.

4. The ultra-high air volume semiconductor cleanroom purification and ventilation device according to claim 3, characterized in that: The shielding assembly includes two sealing doors (3), the upper surfaces of the two sealing doors (3) at opposite ends are fixedly connected to the bottom surfaces of the two moving blocks (19), and the outer walls of the two sealing doors (3) are slidably connected to the inner walls on both sides of the support frame (5).

5. The ultra-high air volume semiconductor cleanroom purification and ventilation device according to claim 1, characterized in that: The lifting mechanism includes a lifting motor (10), a slide rod (14), and a threaded rod (15). The outer wall of the lifting motor (10) is fixedly connected to the upper surface of the outer wall of the support frame (5). The output shaft of the lifting motor (10) is fixedly connected to the upper end of the threaded rod (15). The threaded rod (15) and the slide rod (14) are arranged in parallel. The lower ends of the threaded rod (15) and the slide rod (14) both penetrate the support frame (5). The outer wall of the threaded rod (15) is rotatably connected to the inner wall of the penetration point of the support frame (5). The outer wall of the slide rod (14) is fixedly connected to the inner wall of the penetration point of the support frame (5). The threaded rod (15) and the slide rod (14) are connected to the two ends of the back-blowing structure.

6. The ultra-high air volume semiconductor cleanroom purification and ventilation device according to claim 5, characterized in that: The back-blowing mechanism includes an air pump (6), a support plate (16), an air blowing pipe (17), a bellows hose (21), two lifting blocks (18), and several air blowing heads (20). The outer wall of the air pump (6) is fixedly connected to the upper surface of the outer wall of the support frame (5). The output end of the air pump (6) is fixedly connected to one end of the bellows hose (21). The other end of the bellows hose (21) extends into the interior of the support frame (5). The end of the bellows hose (21) inside the support frame (5) also extends through the support plate (16) and is fixedly connected to the middle of the air blowing pipe (17). Several air blowing heads (20) are fixedly connected to the side wall of the air blowing pipe (17). The two lifting blocks (18) are fixedly connected to the side wall of the air blowing pipe (17). The upper surface of one end of the lifting block (18) is fixedly connected to the bottom surface of both ends of the support plate (16). The two lifting blocks (18) are respectively sleeved and fixedly connected to the outer walls of both ends of the air blowing pipe (17). The ends of the two lifting blocks (18) away from the support plate (16) are respectively sleeved on the outside of the threaded rod (15) and the sliding rod (14). The inner wall of the lifting block (18) is threadedly connected to the outer wall of the threaded rod (15). The inner wall of the lifting block (18) is slidably connected to the outer wall of the sliding rod (14). The support plate (16), the air blowing pipe (17), the two lifting blocks (18) and several air blowing heads (20) are all located on the side of the filter screen (4) close to the workshop wall (1).

7. The ultra-high air volume semiconductor cleanroom purification and ventilation device according to claim 1, characterized in that: The exhaust mechanism includes a cross bracket (11), an exhaust motor (12), and a fan blade (13). The outer walls of the four ends of the cross bracket (11) are fixedly connected to the inner wall of the support frame (5). The middle part of the cross bracket (11) is fixedly connected to the outer wall of the exhaust motor (12). The output shaft of the exhaust motor (12) is fixedly connected to the central shaft of the fan blade (13). The cross bracket (11), the exhaust motor (12), and the fan blade (13) are all located on the side of the filter screen (4) away from the workshop wall (1).

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