Air supply device and furnace body equipment

Abstract

The utility model relates to the technical field of semiconductor manufacturing, and provides an air supply device and furnace body equipment. The air supply assembly is internally provided with an air supply flow channel, and the air supply flow channel is provided with an air inlet end; the air supply assembly is provided with a plurality of air holes communicating with the air supply flow channel, and the air holes are arranged at equal intervals in the first direction. The air holes are at least divided into a first air hole group and a second air hole group; in the first air hole group, the hole diameter of the air holes close to the air inlet end is smaller than that of at least one part of the air holes far away from the air inlet end; and in the second air hole group, the hole diameter of the air holes close to the air inlet end is smaller than that of at least one part of the air holes far away from the air inlet end. The air supply device is favorable for improving the phenomenon of abnormal stress distribution.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of semiconductor manufacturing, especially relates to a gas feeding device and furnace body equipment. BACKGROUND

[0002] In semiconductor manufacturing, furnace body is a commonly used process equipment, for example, in the doping process or oxidation process, furnace body will be used.

[0003] The process gas needs to be introduced into the furnace body through the gas feeding device, for example, oxygen or doping gas is introduced into the furnace body through the gas feeding device to react with the substrate in the furnace body.

[0004] The uniformity of the gas distribution in the furnace body will affect the process quality and the normal use of the furnace body.

[0005] For example, taking the low-stress silicon nitride (rich silicon nitride) thin film deposition process as an example, the silicon nitride thin film has the advantages of good insulation performance, high strength, high elastic modulus, high temperature resistance, corrosion resistance, good stability, easy to make, and compatible with silicon process, etc., so it is widely used in semiconductor devices. The thickness and stress of the silicon nitride thin film determine the performance of the device. Generally, the more uniform the thickness of the silicon nitride thin film, the more uniform the stress distribution, and the better the performance of the device. The thickness of the silicon nitride thin film is mainly adjusted by the process temperature and time, and the stress of the silicon nitride thin film is mainly affected by the gas flow and flow rate.

[0006] The gas feeding ratio of dichlorosilane (DCS) and ammonia (NH3) is precisely controlled to meet the stringent requirements of the device on the film stress. There is a significant technical bottleneck in the current process: due to the structural defects of the gas feeding device (injector), the substrates corresponding to different positions of the boat in the furnace body show obvious V-shaped stress distribution characteristics. Failure analysis shows that this abnormal stress distribution is directly related to the uneven distribution of the reaction gas flow introduced by the gas feeding device.

[0007] To alleviate this process defect, the current scheme uses a feed forward control system (Feed forward) for process compensation, but this measure causes two technical pain points: (1) The substrate arrangement strategy (Auto run) in the automatic production process needs to be adjusted frequently, which significantly increases the process debugging workload; (2) A large amount of manpower is required for real-time monitoring and calibration of system maintenance, which seriously restricts production efficiency and process stability.

[0008] Therefore, the utility model provides a gas feeding device and furnace body to improve the above-mentioned abnormal stress distribution phenomenon. UTILITY MODEL CONTENTS

[0009] The utility model discloses a purpose at providing a kind of air supply device and furnace body equipment, which helps to improve the phenomenon of abnormal stress distribution.

[0010] The utility model provides a kind of air supply device, comprising:

[0011] The air supply assembly has an air supply flow channel, and the air supply flow channel has an air inlet end.

[0012] The air supply assembly is provided with a plurality of air holes in communication with the air supply flow channel, and each of the air holes is divided into at least a first air hole group and a second air hole group.

[0013] Each air hole in the first air hole group is arranged equidistantly along a first direction, and each air hole in the second air hole group is arranged equidistantly along the first direction.

[0014] In the first air hole group, the hole diameter of the air hole near the air inlet end is smaller than that of at least one air hole away from the air inlet end along the direction of the air supply flow channel; in the second air hole group, the hole diameter of the air hole near the air inlet end is smaller than that of at least one air hole away from the air inlet end along the direction of the air supply flow channel.

[0015] Optionally, each air hole is divided into the first air hole group and the second air hole group by a separation reference surface; the air holes on one side of the separation reference surface serve as the first air hole group, and the air holes on the other side of the separation reference surface serve as the second air hole group.

[0016] In the first air hole group and the second air hole group, each air hole is configured such that the distance of each air hole to the air inlet end gradually increases from the direction close to the separation reference surface to the direction away from the separation reference surface along the first direction.

[0017] Optionally, in the first air hole group, each air hole is divided into a plurality of sub-air hole groups from far to near the air inlet end along the direction of the air supply flow channel; the hole diameters of the air holes in each sub-air hole group are equal; and the hole diameters of the air holes in each sub-air hole group in the first air hole group gradually decrease from far to near.

[0018] And / or, in the second air hole group, each air hole is divided into a plurality of sub-air hole groups from far to near the air inlet end along the direction of the air supply flow channel; the hole diameters of the air holes in each sub-air hole group are equal; and the hole diameters of the air holes in each sub-air hole group in the second air hole group gradually decrease from far to near.

[0019] Optionally, each of the air holes in the first air hole group is arranged in a row along a first direction, each of the air holes in the second air hole group is arranged in a row along the first direction, and the first air hole group and the second air hole group have a set distance along a direction perpendicular to the first direction.

[0020] Optionally, the air feeding assembly comprises a first air feeding member and a second air feeding member.

[0021] The first air hole group is in communication with the first air feeding channel, and the second air hole group is in communication with the second air feeding channel.

[0022] Optionally, the air feeding assembly comprises a first air feeding member and a second air feeding member.

[0023] The first air feeding channel and the first air hole group are arranged on the first air feeding member, and the second air feeding channel and the second air hole group are arranged on the second air feeding member.

[0024] Optionally, the air feeding assembly comprises a first air feeding member and a second air feeding member.

[0025] In the first air hole group, the aperture of an air hole close to the first air feeding end is smaller than the aperture of at least one air hole away from the first air feeding end along the direction of the first air feeding channel.

[0026] In the second air hole group, the aperture of an air hole close to the second air feeding end is smaller than the aperture of at least one air hole away from the second air feeding end along the direction of the second air feeding channel.

[0027] Optionally, the first air feeding channel extends along the first direction.

[0028] The second air feeding channel comprises an air feeding section and an air feeding section connected with each other, the air feeding section extends along the first direction, the air feeding section is arranged at an angle with the air feeding section, and the second air hole group is in communication with the air feeding section.

[0029] Optionally, the second air feeding member comprises an air feeding tube body and an air feeding tube body connected with each other, and the air feeding tube body and the air feeding tube body are arranged at an angle.

[0030] When the second air feeding channel comprises an air feeding section and an air feeding section connected with each other, the lumen of the air feeding tube body serves as the air feeding section, the lumen of the air feeding tube body serves as the air feeding section, and the second air hole group is arranged on the air feeding tube body.

[0031] Optionally, the second air feeding member further comprises a first mounting member, and the first mounting member is connected to the connection between the air feeding section and the air feeding section.

[0032] And / or, the second air feeding member further comprises a second mounting member, which is connected to the air inlet section at a side away from the connection;

[0033] And / or, the air inlet pipe body and the air feeding pipe body are 180°;

[0034] And / or, when the air inlet end comprises a first air inlet end and a second air inlet end, an end of the air inlet section away from the connection serves as the second air inlet end.

[0035] Optionally, the first air feeding member comprises a pipe body and a plug, the plug being sealed to an end of the pipe body;

[0036] The lumen of the pipe body and the inner cavity of the plug serve as the first air inlet flow channel; and / or, an end of the pipe body away from the plug serves as the first air inlet end; and / or, a part of the air holes in the first air hole group are arranged on the pipe body, and a part of the air holes are arranged on the plug.

[0037] The utility model also provides a furnace body equipment, the furnace body equipment includes above-mentioned air feeding device.

[0038] Summarized above, air feeding device includes air feeding component, air feeding component has air feeding flow channel in, air feeding flow channel has air inlet end;

[0039] A plurality of air holes are arranged on the air feeding component and communicated with the air feeding flow channel, and each air hole is divided into at least a first air hole group and a second air hole group;

[0040] Each air hole in the first air hole group is arranged equidistantly along a first direction, and each air hole in the second air hole group is arranged equidistantly along the first direction;

[0041] In the first air hole group, the aperture of the air hole close to the air inlet end is smaller than the aperture of at least a part of the air hole away from the air inlet end along the direction of the air feeding flow channel; in the second air hole group, the aperture of the air hole close to the air inlet end is smaller than the aperture of at least a part of the air hole away from the air inlet end along the direction of the air feeding flow channel.

[0042] In this way, in the utility model, by equidistantly arranging each aperture and differentiating the aperture, the resistance of each air hole can be adjusted, and then the gas flow and flow rate of each air hole can be adjusted. In the utility model, by adjusting the aperture size of the air hole on the air feeding device and by reasonably arranging each aperture, the gas flow rate and total amount of each air hole or each part of the air hole can be substantially balanced, so that the gas flow and flow rate distribution of each position in the process cavity is balanced, and then the stress distribution of the film deposition on the substrate is improved, the stress curve is relatively smooth, and the performance of the film deposition is improved.

[0043] The configuration mode can realize optimization of the gas flow distribution by only reasonably arranging the hole diameters of the gas holes, frequent adjustment of process parameters is not needed in the production process, the process debugging workload is reduced, a large amount of manpower is not needed to be invested for real-time monitoring and calibration in system maintenance, the production efficiency is improved, and the process stability is improved.

[0044] In the utility model, the gas holes are arranged at equal intervals, and the gas flow and the flow rate are adjusted by the difference in the hole diameters. The setting mode is helpful to realize the standardized design of the air feeding device, and is also convenient for adjusting the hole diameters of the gas holes based on actual requirements, for example, by reaming through secondary processing, or by adding nozzles or other annular components in the gas holes to realize secondary hole reduction, which is helpful to adjust the hole diameters of the gas holes based on actual requirements, so that the use is more flexible, and the application range is improved. BRIEF DESCRIPTION OF DRAWINGS

[0045] Figure 1 Structure diagram of the air feeding device of an embodiment of the utility model Figure 1 ;

[0046] Figure 2 Structure diagram of the air feeding device of an embodiment of the utility model Figure 2 ;

[0047] Figure 3 Structure diagram of the air feeding flow channel of an embodiment of the utility model

[0048] Figure 4 Stress curve diagram of an embodiment of the utility model.

[0049] In the drawings:

[0050] 10-air feeding assembly; 11-first air feeding member; 111-tube body; 112-plug; 12-second air feeding member; 121-air inlet tube body; 122-air feeding tube body; 123-first mounting member; 124-second mounting member;

[0051] 20-air feeding flow channel;

[0052] 21-first air inlet flow channel;

[0053] 22-second air inlet flow channel; 221-air inlet section; 222-air feeding section;

[0054] 30-air inlet end; 31-first air inlet end; 32-second air inlet end;

[0055] 40-gas hole;

[0056] 50-first gas hole group;

[0057] 60 - second gas hole group;

[0058] a - first direction;

[0059] b - separation reference surface. DETAILED DESCRIPTION

[0060] The gas supply device provided by the present application will be further described in detail below in combination with the drawings and specific embodiments. The advantages and features of the present application will be more apparent according to the following description. It should be noted that the drawings are all in a very simplified form and all use non-precise proportions, only for the purpose of facilitating and clearly assisting the description of the embodiments of the present application.

[0061] As used in the present application, the singular forms "a", "an" and "the" include plural referents unless the context clearly dictates otherwise. The term "or" is generally employed in its sense including "and / or" unless the content clearly dictates otherwise. The term "at least two" or "a plurality of" is generally employed in its sense including "two or more" unless the content clearly dictates otherwise. In addition, the terms "first", "second", "third", etc. are used only for descriptive purposes and should not be construed as indicating or implying relative importance or an indicated number of technical features. Thus, the features defined with "first", "second", "third" can explicitly or implicitly include one or at least two of the features. In addition, as used in the present application, "mounting", "connection", "connection", "setting" of one element to another element should be interpreted broadly, and generally only indicates that there is a connection, coupling, cooperation or transmission relationship between the two elements, and the two elements can be directly or indirectly connected, coupled, cooperated or transmitted through intermediate elements, and cannot be understood as indicating or implying the spatial position relationship between the two elements, i.e. one element can be in any direction inside, outside, above, below or one side of another element, unless the content is otherwise clearly indicated. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances. In addition, directional terms such as above, below, up, down, upward, downward, left, right, etc. are used with respect to the exemplary embodiments as they are shown in the drawings, upward or upward direction is towards the top of the corresponding drawing, and downward or downward direction is towards the bottom of the corresponding drawing.

[0062] A gas supply device is provided in the present embodiment, comprising: a gas supply assembly 10;

[0063] The gas supply assembly 10 has a gas supply flow channel 20 therein, and the gas supply flow channel 20 has a gas inlet end 30 for externally connecting a gas supply device for supplying gas into the gas supply flow channel 20;

[0064] The air feeding assembly 10 is provided with a plurality of air holes 40 in communication with the air feeding channel 20.

[0065] Reference Figure 1 As shown in the drawings, in the embodiment, each of the air holes 40 is divided into a first air hole group 50 and a second air hole group 60, the air holes 40 in the first air hole group 50 are arranged equidistantly along a first direction a, and the air holes 40 in the second air hole group 60 are arranged equidistantly along the first direction a; each of the air holes 40 is used to guide the gas in the air feeding channel 20 into the process cavity, and the equidistant arrangement of the air holes 40 in the first air hole group 50 and the second air hole group 60 facilitates the standardized manufacturing of the air feeding assembly 10 and simplifies the manufacturing process of the holes. Preferably, the arrangement distances of the air holes 40 in the first air hole group 50 and the second air hole group 60 are equal (both are set distances), and the distance between the first air hole group 50 and the second air hole group 60 along the first direction a is also a set distance, at this time, all the air holes 40 are arranged equidistantly along the first direction a. In other alternative embodiments, the arrangement distances of the air holes in the first air hole group 50 and the second air hole group 60 can be unequal, and in addition, the distance between the first air hole group 50 and the second air hole group 60 along the first direction a can also be adaptively set based on actual needs.

[0066] Please continue to refer to Figure 1 and Figure 2 As shown in the drawings, in the first air hole group 50, along the direction of the air feeding channel 20, the hole diameter of the air hole 40 close to the air inlet end 30 is smaller than that of at least a part of the air hole 40 away from the air inlet end 30.

[0067] In the second air hole group 60, along the direction of the air feeding channel 20, the hole diameter of the air hole 40 close to the air inlet end 30 is smaller than that of at least a part of the air hole 40 away from the air inlet end 30.

[0068] In this way, in the utility model, by equidistantly arranging the hole diameters and differentiating the hole diameters, the resistance of each air hole 40 can be adjusted, and then the gas flow and flow rate of each air hole 40 can be adjusted. In the utility model, by adjusting the hole diameters of the air holes 40 on the air feeding device and by reasonably arranging the hole diameters of the air holes 40, the gas flow rate and total amount of each air hole 40 or each part of the air holes 40 can be ensured to be roughly balanced, so that the gas flow and flow rate distribution of each position in the process cavity is balanced, and then the stress distribution of the film deposition on the substrate is improved, the stress curve is relatively smooth, and the performance of the film deposition is improved.

[0069] The configuration mode can realize optimization of the gas flow distribution by only reasonably arranging the hole diameters of the air holes 40, frequent adjustment of process parameters is not needed in the production process, which helps to reduce the workload of process debugging, and a large amount of manpower is not needed to be invested for real-time monitoring and calibration in system maintenance, which helps to improve the production efficiency and process stability.

[0070] In the utility model, the air holes are arranged at equal intervals, and the gas flow and the flow rate are adjusted by the difference in the hole diameters. The arrangement mode helps to realize the standardized design of the air feeding device, and is also convenient for adjusting the hole diameters of the air holes based on actual requirements, for example, by reaming through secondary processing, or by adding nozzles or other annular components in the air holes to realize secondary hole reduction, which helps to adjust the hole diameters of the air holes based on actual requirements, so that the use is more flexible, and the application range is improved.

[0071] In combination with Figure 1 In the embodiment, the air holes 40 are divided into two groups, namely a first air hole group 50 and a second air hole group 60. The number of air holes in the first air hole group 50 and the second air hole group 60 is equal. The air holes in the first air hole group 50 are arranged along the first direction a, the air holes in the second air hole group 60 are arranged along the first direction a, and the first air hole group 50 and the second air hole group 60 have a certain offset relationship along the left-right direction perpendicular to the first direction a (the left-right direction in the drawings). Figure 1 And Figure 2 The first air hole group 50 and the second air hole group 60 are not in a direct relationship in the first direction a, and have a set distance along the direction perpendicular to the first direction a. The arrangement mode is convenient for setting the air feeding assembly 10 into a split structure (the air feeding assembly 10 includes a first air feeding part 11 and a second air feeding part 12, and the specific structure is described below), and is convenient for adjusting the distance between the first air hole group 50 and the second air hole group 60 along the direction perpendicular to the first direction a, so that the use is more flexible.

[0072] In other alternative embodiments, the air holes 40 can also be divided into three groups, four groups or more groups. In each group of air holes, the hole diameter of the air hole 40 close to the air inlet end 30 is smaller than the hole diameter of at least part of the air hole 40 away from the air inlet end 30.

[0073] In other alternative embodiments, each group of air holes can be arranged in a direct relationship along the first direction a, that is, all the air holes are arranged in a column. The arrangement mode of each group of air holes can be adjusted based on actual use requirements and in combination with the actual structure of the air feeding assembly 10.

[0074] Furthermore, in the first vent group 50 and the second vent group 60, each vent 40 is configured such that, along the first direction a from near the separating reference surface b to away from the separating reference surface b, the distance of each vent 40 from the air inlet end 30 gradually increases.

[0075] Please continue to refer to this. Figure 2 As shown, in the first air hole group 50, along the direction of the air supply channel 20, each air hole is divided into three sub-air hole groups according to the direction from far to near the air inlet end 30; the diameter of the air holes 40 in each sub-air hole group is equal; from the direction from far to near the air inlet end 30, the diameter of the air holes in each sub-air hole group in the first air hole group 50 decreases sequentially.

[0076] Similarly, in the second air hole group 60, along the direction of the air supply channel 20, each air hole is divided into three sub-air hole groups according to the direction from far to near the air inlet end 30; the diameter of the air holes 40 in each sub-air hole group is equal; from the direction from far to near the air inlet end 30, the diameter of the air holes in each sub-air hole group in the second air hole group 60 decreases sequentially.

[0077] Specifically, in combination Figure 2 As shown, the first pore group 50 includes 11 pores, which are arranged along the first direction a. Figure 1 and Figure 2 In the first direction 'a', the vertical direction corresponds to the up and down directions. Figure 2 From bottom to top, the first group of vents 50 contains vents A1, A2, A3, A4, A5, A6, A7, A8, A9, A10, and A11. Vents A1, A2, and A3 form a sub-group of vents, with all three vents having the same diameter. This sub-group is closest to the inlet end 30, therefore its vent diameter is the smallest. Vents A4, A5, A6, A7, and A8 form another sub-group of vents, with all five vents having the same diameter. This sub-group is located at the center of the distance from the inlet end 30, therefore its vent diameter is also centered. Among them, pores A9, A10 and A11 form another sub-pore group. The three pores in this sub-pore group have the same diameter. This sub-pore group is the farthest from the air inlet end 30, so the diameter of the pores is the largest.

[0078] Similarly, combining Figure 2 As shown, the second pore group 60 includes 11 pores. Figure 2From top to bottom, the gas holes in the first gas hole group 50 are respectively gas hole B1, gas hole B2, gas hole B3, gas hole B4, gas hole B5, gas hole B6, gas hole B7, gas hole B8, gas hole B9, gas hole B10 and gas hole B11. Among them, gas hole B1, gas hole B2 and gas hole B3 form a sub-gas hole group, the three gas holes in the sub-gas hole group have the same diameter, the sub-gas hole group is closest to the gas inlet end 30, so the diameter of the gas hole is the smallest. Among them, gas hole B4, gas hole B5, gas hole B6, gas hole B7 and gas hole B8 form another sub-gas hole group, the five gas holes in the sub-gas hole group have the same diameter, the sub-gas hole group is in the middle distance from the gas inlet end 30, so the diameter of the gas hole is also in the middle. Among them, gas hole B9, gas hole B10 and gas hole B11 form another sub-gas hole group, the three gas holes in the sub-gas hole group have the same diameter, the sub-gas hole group is farthest from the gas inlet end 30, so the diameter of the gas hole is the largest.

[0079] The above-mentioned six sub-gas hole groups have six sub-gas hole groups in actual gas conveying process, each sub-gas hole group corresponds to a region in the process chamber. Therefore, the process chamber is divided into six regions in the first direction a, and by setting the diameter of each sub-gas hole group, the gas flow and flow rate in the six regions in the process chamber can be substantially balanced to improve the thin film deposition effect.

[0080] In other alternative embodiments, the number of sub-gas hole groups divided in the first gas hole group 50 and the second gas hole group 60 can be adjusted based on actual use requirements, for example, the first gas hole group 50 and the second gas hole group 60 each contain two, four or more sub-gas hole groups.

[0081] In this embodiment, a total of 22 gas holes are provided, and the number of gas holes in each group is the same, which is 11. Each gas hole is equidistantly arranged along the first direction a, that is, the hole distance of adjacent gas holes along the first direction a is a set distance (the hole distance of gas hole A1 and gas hole B1 along the first direction a is also a set distance). In other alternative embodiments, the total number of gas holes and the number of gas holes in each group in the first gas hole group 50 and the second gas hole group 60 can be set based on actual use requirements, for example, the number of gas holes in each group of the first gas hole group 50 and the second gas hole group 60 can be set differently.

[0082] In this embodiment, the number of sub-gas hole groups contained in the first gas hole group 50 and the second gas hole group 60 is the same (both three). In other alternative embodiments, the number of sub-gas hole groups contained in the first gas hole group 50 and the second gas hole group 60 can be set differently, and the specific setting method can be set based on use requirements. In addition, the number of gas holes contained in each sub-gas hole group can also be set based on actual use requirements, and the number of gas holes contained in each sub-gas hole group is at least one.

[0083] In this embodiment, the hole diameters of the air holes A1, A2, A3 and the air holes B1, B2, and B3 are the same. The hole diameters of the air holes A4, A5, A6, A7, A8 and the air holes B4, B5, B6, B7, and B8 are the same. The hole diameters of the air holes A9, A10, A11 and the air holes B9, B10, and B11 are the same. In other alternative embodiments, the above-mentioned hole diameter relationships can be adjusted based on actual needs.

[0084] Please continue to refer to Figure 1 and Figure 2 In this embodiment, each of the air holes 40 is divided into the first air hole group 50 and the second air hole group 60 by the separation reference surface b; the air holes on one side (the upper side in Figure 1 and Figure 2 ) of the separation reference surface b serve as the first air hole group 50, and the air holes on the other side (the lower side in Figure 1 and Figure 2 ) of the separation reference surface b serve as the second air hole group 60.

[0085] The above grouping manner makes each air hole in the first air hole group 50 arranged adjacent along the first direction a, and similarly, each air hole in the second air hole group 60 arranged adjacent along the first direction a. This arrangement manner facilitates processing and facilitates the structural design of the air supply assembly 10. In other alternative embodiments, each air hole in the first air hole group 50 can not be completely arranged adjacent along the first direction a, and similarly, each air hole in the second air hole group 60 can not be completely arranged adjacent along the first direction a, i.e., some air holes in the first air hole group 50 and the second air hole group 60 are staggered along the first direction a.

[0086] Please continue to refer to Figure 2 and Figure 3 In this embodiment, the air supply flow channel 20 includes a first air inlet flow channel 21 and a second air inlet flow channel 22;

[0087] The first air hole group 50 is in communication with the first air inlet flow channel 21, and the second air hole group 60 is in communication with the second air inlet flow channel 22.

[0088] In combination with Figure 2 , the air supply assembly 10 includes a first air supply member 11 and a second air supply member 12;

[0089] The first air inlet flow channel 21 and the first air hole group 50 are arranged on the first air supply member 11, and the second air inlet flow channel 22 and the second air hole group 60 are arranged on the second air supply member 12.

[0090] In the above structure, the air feeding assembly 10 is provided in a split structure of the first air feeding member 11 and the second air feeding member 12, and the first air inlet channel 21 and the second air inlet channel 22 are two independent channels respectively arranged on the first air feeding member 11 and the second air feeding member 12.

[0091] The air inlet end 30 includes a first air inlet end 31 and a second air inlet end 32, one end of the first air inlet channel 21 serving as the first air inlet end 31, and one end of the second air inlet channel 22 serving as the second air inlet end 32.

[0092] The above setting mode can adjust the distance of the first air hole group 50 and the second air hole group 60 along the direction perpendicular to the first direction a through the relative position relationship of the first air feeding member 11 and the second air feeding member 12, so that the use of the air feeding device is more flexible.

[0093] In other alternative embodiments, the air feeding assembly 10 can be provided in a one-piece structure, and two air inlet channels are formed inside.

[0094] In other alternative embodiments, the first air inlet channel 21 and the second air inlet channel 22 can be connected to each other, for example, connected through a main air feeding channel and in a T-shaped pipe structure.

[0095] In the present embodiment, the first air inlet end 31 and the second air inlet end 32 can be connected to external air supply equipment respectively, so that the first air inlet end 31 supplies air to the first air inlet channel 21 alone, and the second air inlet end 32 supplies air to the second air inlet channel 22 alone.

[0096] At this time, in the first air hole group 50, the hole diameter of the air hole 40 close to the first air inlet end 31 is smaller than that of at least a part of the air hole 40 away from the first air inlet end 31 along the direction of the first air inlet channel 21;

[0097] In the present embodiment, air hole A1, air hole A2 and air hole A3 are a sub-air hole group, which is closest to the first air inlet end 31, so the diameter of the air hole is the smallest. Air hole A4, air hole A5, air hole A6, air hole A7 and air hole A8 are another sub-air hole group, which is in the middle distance from the first air inlet end 31, so the diameter of the air hole is also in the middle. Air hole A9, air hole A10 and air hole A11 are another sub-air hole group, which is farthest from the first air inlet end 31, so the diameter of the air hole is the largest.

[0098] Similarly, in the second air hole group 60, the hole diameter of the air hole 40 close to the second air inlet end 32 is smaller than that of at least a part of the air hole 40 away from the second air inlet end 32 along the direction of the second air inlet channel 22.

[0099] In the embodiment, the air holes B1, B2 and B3 are a sub-air hole group closest to the second air inlet end 32, and thus have the smallest diameter. The air holes B4, B5, B6, B7 and B8 are another sub-air hole group, and thus have a middle distance from the second air inlet end 32 and a middle diameter. The air holes B9, B10 and B11 are another sub-air hole group farthest from the second air inlet end 32, and thus have the largest diameter.

[0100] Please continue to refer to Figures 1 to 3 In the embodiment, the first air feeding member 11 is a straight pipe structure extending along the first direction a. Specifically, the first air feeding member 11 includes a pipe body 111 and a plug 112. The plug 112 is sealed to one end of the pipe body 111 (the upper end of the pipe body 111 in Figure 1 and Figure 2 the embodiment), and thus the other end of the pipe body 111 (the lower end of the pipe body 111 in Figure 1 and Figure 2 the embodiment) away from the plug 112 is the first air inlet end 31. Figure 1 Figure 2

[0101] In the embodiment, the plug 112 is a cylindrical structure, which is hollow. One end of the plug 112 is open. When the plug 112 is sealed to the upper end of the pipe body 111, the open end of the plug 112 is sleeved on the upper end of the pipe body 111. The inner cavity of the plug 112 is in communication with the pipe cavity of the pipe body 111. The pipe cavity of the pipe body 111 and the inner cavity of the plug 112 are the first air flow channel 21. Thus, the first air flow channel 21 extends along the first direction a.

[0102] Further, some of the air holes 40 in the first air hole group 50 are formed in the pipe body 111, and some of the air holes 40 are formed in the plug 112.

[0103] Please continue to refer to Figure 1 and Figure 2 In the embodiment, the air hole A11 in the first air hole group 50 is formed in the plug 112, and the remaining air holes are formed in the pipe body 111. This arrangement facilitates adjustment of the size of the air hole A11 by replacing the plug 112, and thus flexible adjustment of the air flow distribution.

[0104] In addition, the reasonable structure of the plug 112 also facilitates the fixed installation of the upper end of the first air feeding member 11.

[0105] In other alternative embodiments, the number of air holes formed in the plug 112 can be adjusted based on actual use requirements.

[0106] ​​In this embodiment, the first air supply component 11 is a circular tube of equal diameter. In other alternative embodiments, the first air supply component 11 can be configured as a tube structure of other shapes, or the first air supply component 11 can be a block or other irregular structure, and the first air inlet channel 21 can be formed on the first air supply component 11 by secondary machining or casting.

[0107] Please continue to refer to this. Figure 1 and Figure 2 As shown, the second air supply component 12 includes an air inlet pipe 121 and an air supply pipe 122 connected together. The air inlet pipe 121 and the air supply pipe 122 are arranged at an angle, specifically, the air inlet pipe 121 and the air supply pipe 122 form an angle of 180°, that is, the air supply pipe 122 is bent 180 degrees relative to the air inlet pipe 121.

[0108] in Figure 1 and Figure 2 In the middle, the lower end of the air intake pipe body 121 serves as the second air intake end 32, and the upper end of the air intake pipe body 121 is connected to the upper end of the air delivery pipe body 122. The connection between the two can be integrally formed or connected by an elbow.

[0109] Similarly, combining Figure 3 As shown, the second air intake channel 22 includes an intake section 221 and an air delivery section 222 connected to each other. The cavity of the intake pipe body 121 serves as the intake section 221, and the cavity of the air delivery pipe body 122 serves as the air delivery section 222. Since the intake pipe body 121 and the air delivery pipe body 122 form a 180° angle, the intake section 221 and the air delivery section 222 also form a 180° angle. When the gas flows from the intake section 221 to the air delivery section 222, it will turn 180°.

[0110] The second air hole group 60 is disposed on the air delivery pipe body 122, and the second air hole group 60 is connected to the air delivery section 222.

[0111] The aforementioned structure of the second air delivery component 12 allows gas to enter the intake section 221 through the lower end (second intake end 32) of the intake pipe body 121 and flow upwards, then flow downwards through the air delivery section 222 of the air delivery pipe body 122. Each air hole in the second air hole group 60 is disposed along the first direction a in the air delivery pipe body 122. Therefore, Figure 1 and Figure 2 In the second air vent group 60, the air vents closer to the bottom are farther away from the second air inlet end 32.

[0112] The above arrangement ensures that among all the vents 40, those closer to the separating reference surface b are closer to the air inlet and have smaller diameters. This results in an overall vent diameter distribution that is roughly symmetrical about the separating reference surface b, which helps to further ensure the uniform distribution of the introduced gas in the process chamber.

[0113] In the embodiment, the second air feeding member 12 is an equal-diameter circular tube. In other alternative embodiments, the second air feeding member 12 can be provided as a tube structure of other shapes, or the second air feeding member 12 can be a block or other irregular shape, and the second air inlet channel 22 can be formed on the second air feeding member 12 by secondary machining or casting.

[0114] In the embodiment, the air inlet tube 121 and the air feeding tube 122 are at an angle of 180°, and the air inlet tube 121 and the air feeding tube 122 are close to each other in a direction perpendicular to the first direction a, so that the second air feeding member 12 has an elongated structure as a whole. When the second air feeding member 12 is installed in the process cavity of the furnace body, the first direction a is parallel to the axial direction of the process cavity of the furnace body, and since the second air feeding member 12 has an elongated structure as a whole along the first direction a, the radial space occupied by the second air feeding member 12 in the process cavity of the furnace body can be reduced. In other alternative embodiments, the air inlet tube 121 and the air feeding tube 122 can be at any other angle, and the specific angle can be adjusted based on the actual assembly structure in the furnace body.

[0115] In the embodiment, the first air inlet end 31 and the second air inlet end 32 are respectively connected to different gas supply devices, so as to facilitate separate adjustment of the gas supplied into the first air inlet channel 21 and the second air inlet channel 22. In other alternative embodiments, the first air inlet end 31 and the second air inlet end 32 can be connected to one port of a gas supply device, i.e., the first air inlet end 31 and the second air inlet end 32 are in communication with each other, and in this case, the first air inlet end 31 and the second air inlet end 32 can be regarded as one air inlet end.

[0116] In the embodiment, the first air inlet end 31 and the second air inlet end 32 are located at the same position along the first direction a, so as to facilitate connection with the gas supply device and facilitate centralized penetration out of the furnace body. In other alternative embodiments, the positions of the first air inlet end 31 and the second air inlet end 32 can be adaptively adjusted based on the actual furnace body structure. For example, the first air inlet end 31 remains unchanged, and the second air inlet end 32 is arranged at the upper end of the air inlet tube 121, and in this case, the second air feeding member 12 can also be configured as a straight tube structure (only the air inlet tube 121 can be retained without the need to arrange the air feeding tube 122, and in this case, the second gas hole group 60 can be directly arranged on the air inlet tube 121).

[0117] In the embodiment, the first gas hole group 50 and the second gas hole group 60 are preferably located on the same side.

[0118] Further, please continue to refer to Figure 1 and Figure 2As shown, the second air feeding member 12 further comprises a first mounting member 123, which is connected to the joint between the air inlet section 221 and the air feeding section 222. The first mounting member 123 is in a straight bar structure, which is coaxially arranged with the air inlet pipe body 121. The first mounting member 123 is used to mount and position the upper end position of the second air feeding member 12 in the process cavity of the furnace body, for example, the fixing of the first mounting member 123 can be achieved by buckling or other connection methods.

[0119] The second air feeding member 12 further comprises a second mounting member 124, which is connected to the side of the air inlet section 221 away from the joint. Specifically, the second mounting member 124 is connected to the side of the air inlet section 221 near the lower end position. The second mounting member 124 is in a tubular structure and extends along the first direction a. The lower end of the second mounting member 124 is approximately flush with the lower end (second air inlet end 32) of the air inlet pipe body 121. The second mounting member 124 also facilitates the mounting and positioning of the lower end position of the second air feeding member 12 in the process cavity of the furnace body, for example, the fixing of the second mounting member 124 can be achieved by buckling or other connection methods.

[0120] In other alternative embodiments, the positions of the first mounting member 123 and the second mounting member 124 can be adjusted based on actual use requirements, and the specific shapes of the first mounting member 123 and the second mounting member 124 can be adjusted based on actual assembly requirements, for example, the first mounting member 123 and the second mounting member 124 can be provided in a flat plate structure or a block structure.

[0121] In this embodiment, the first air feeding member 11 and the second air feeding member 12 can be positioned relative to each other by a clamping block structure, for example, the first air feeding member 11 and the second air feeding member 12 are clamped in two grooves on the clamping block, thereby achieving positioning of the first air feeding member 11 and the second air feeding member 12 along the direction perpendicular to the first direction a.

[0122] In combination Figure 4 As shown, the application of the air feeding device in this embodiment to the furnace body equipment improves the corresponding stress curve diagram.

[0123] The blue line is the stress curve diagram of the completed coating process after air feeding by the existing air feeding device. The orange line is the stress curve diagram of the completed coating process after air feeding by the air feeding device in this embodiment.

[0124] The abscissa corresponds to the position along the first direction a in the process cavity, and the ordinate is the stress parameter of the substrate after coating at the corresponding position.

[0125] From Figure 4It can be known that in the existing process, the stress parameter of the substrate plated film near the middle part of the process cavity changes greatly, which leads to poor stress consistency of the same batch of products. After the process is performed by the gas feeding device in the embodiment, the peak value of the stress parameter of the substrate plated film near the middle part of the process cavity is smaller, which can be reduced by about 40%, so as to make the overall stress distribution more smooth, and further improve the stress consistency of the same batch of products.

[0126] In addition, the embodiment also provides a furnace body device, which comprises the above-mentioned gas feeding device. The furnace body device further comprises a process furnace having a process cavity, and the gas feeding device is arranged in the process cavity, and the gas inlet end of the gas feeding device is used to be connected with the gas supply device.

[0127] The furnace body device is, for example, a vertical diffusion furnace, a horizontal diffusion furnace or other furnace tube device. The furnace body device is used for, for example, thermal growth of oxide, thermal annealing of the surface of the substrate after ion implantation, reflow of glass body, formation of silicide film and various deposition films such as doped or undoped polysilicon, silicon oxide and silicon dioxide, and the like, which will not be described one by one here.

[0128] The various embodiments in the specification are described in a progressive manner, and each embodiment focuses on the difference from other embodiments, and the same or similar parts between the various embodiments can be referred to each other.

[0129] The above description is only the description of the preferred embodiments of the utility model, and does not limit the scope of the utility model in any way. Any change or modification made by the person skilled in the art according to the above disclosure is within the protection scope of the claims.

Claims

1. An air supply device, characterized in that, include: Air supply components; The air supply assembly has an air supply channel, and the air supply channel has an air inlet end; The air delivery component is provided with a plurality of air holes communicating with the air delivery channel, and each air hole is at least divided into a first air hole group and a second air hole group. In the first pore group, each pore is arranged at equal intervals along a first direction; in the second pore group, each pore is arranged at equal intervals along a first direction. In the first group of air holes, along the direction of the air delivery channel, the diameter of the air hole near the air inlet is smaller than the diameter of at least a portion of the air hole away from the air inlet; in the second group of air holes, along the direction of the air delivery channel, the diameter of the air hole near the air inlet is smaller than the diameter of at least a portion of the air hole away from the air inlet.

2. The air supply device as described in claim 1, characterized in that, Each of the pores is divided into a first pore group and a second pore group by a separating reference surface; the pores located on one side of the separating reference surface are the first pore group, and the pores located on the other side of the separating reference surface are the second pore group. In the first vent group and the second vent group, each vent is configured such that, along the first direction from the direction close to the separating reference surface to the direction far from the separating reference surface, the distance of each vent from the air inlet end gradually increases.

3. The air supply device as described in claim 1, characterized in that, In the first group of air vents, along the direction of the air delivery channel, each air vent is divided into several sub-groups of air vents according to the direction from far to near the air inlet end; the diameter of the air vents in each sub-group of air vents is equal; from the direction from far to near, the diameter of the air vents in each sub-group of air vents in the first group of air vents decreases sequentially. And / or, in the second group of vents, along the direction of the airflow channel, each vent is divided into several sub-vent groups according to the direction from far to near the air inlet end; the vent diameters of the vents in each sub-vent group are equal; and from the direction from far to near, the vent diameters of the vents in each sub-vent group of the second group of vents decrease sequentially.

4. The air supply device as described in claim 1, characterized in that, The pores in the first pore group are arranged in a row along the first direction, and the pores in the second pore group are arranged in a row along the first direction. The first pore group and the second pore group are separated by a predetermined distance along a direction perpendicular to the first direction.

5. The air supply device as described in claim 1, characterized in that, The air supply channel includes a first air inlet channel and a second air inlet channel; The first air hole group is connected to the first air intake channel, and the second air hole group is connected to the second air intake channel.

6. The air supply device as described in claim 5, characterized in that, The air supply assembly includes a first air supply component and a second air supply component; The first air inlet channel and the first air hole group are disposed on the first air delivery component, and the second air inlet channel and the second air hole group are disposed on the second air delivery component.

7. The air supply device as described in claim 6, characterized in that, The air intake end includes a first air intake end and a second air intake end, with one end of the first air intake channel serving as the first air intake end and one end of the second air intake channel serving as the second air intake end; In the first group of air holes, along the direction of the first air intake channel, the diameter of the air holes near the first air intake end is smaller than the diameter of at least a portion of the air holes far from the first air intake end. In the second group of air holes, along the direction of the second air intake channel, the diameter of the air holes near the second air intake end is smaller than the diameter of at least a portion of the air holes far from the second air intake end.

8. The air supply device as described in claim 7, characterized in that, The first air intake channel extends along the first direction; The second air intake channel includes an air intake section and an air delivery section connected to each other. The air delivery section extends along the first direction and is set at an angle to the air intake section. The second air hole group is connected to the air delivery section.

9. The air supply device according to any one of claims 6 to 8, characterized in that, The second air supply component includes an air inlet pipe and an air supply pipe connected together, wherein the air inlet pipe and the air supply pipe are arranged at an angle. When the second air intake channel includes an air intake section and an air delivery section connected to each other, the cavity of the air intake pipe body serves as the air intake section, the cavity of the air delivery pipe body serves as the air delivery section, and the second air hole group is disposed in the air delivery pipe body.

10. The air supply device as described in claim 9, characterized in that, The second air supply component further includes a first mounting component, which is connected to the connection between the air intake section and the air supply section; And / or, the second air supply component further includes a second mounting component connected to the side of the air intake section away from the connection point; And / or, the intake pipe and the delivery pipe are at 180°; And / or, when the air intake end includes a first air intake end and a second air intake end, the end of the air intake section away from the connection point serves as the second air intake end.

11. The air supply device as described in claim 7 or 8, characterized in that, The first air supply component includes a pipe body and a plug, wherein the plug is sealed at one end of the pipe body; The lumen of the tube body and the inner cavity of the plug serve as the first air intake channel; and / or, the end of the tube body away from the plug serves as the first air intake end; and / or, a portion of the air holes in the first air hole group are opened in the tube body, and a portion of the air holes are opened in the plug.

12. A furnace body device, characterized in that, The furnace body equipment includes the gas supply device as described in any one of claims 1 to 11.

Images