3D detection head module

Abstract

The utility model relates to the technical field of chip detection. The 3D detection head module comprises a detection table, a detection head, a camera and a laser, the detection table is used for placing a to-be-detected chip; the detection head is mounted on the detection table, and the detection head is used for mounting the camera and the laser; the camera is rotationally mounted on the side wall of the detection head and is used for capturing an image of the detected chip; a scanning groove is formed in the side wall of the detection head, the cross section of the scanning groove is triangular, the laser is installed in the scanning groove, and the transmitting end of the laser corresponds to the detection table. The problem that the detection result error is large due to the fact that the camera cannot receive light reflected by the chip is solved.

Description

Technical Field

[0001] This utility model relates to the field of chip testing technology, and more specifically, to a 3D testing head module. Background Technology

[0002] Chips are a general term for semiconductor components. Semiconductors refer to materials with conductivity between conductors and insulators at room temperature. Semiconductors are used in integrated circuits, consumer electronics, communication systems, photovoltaic power generation, lighting, high-power power conversion, and other fields. For example, diodes are devices made using semiconductors.

[0003] Chip flatness testing refers to measuring the deviation of the macroscopic unevenness height of a specific area on the chip surface from an ideal plane. This testing is crucial for ensuring the electrical performance, reliability, and packaging quality of the chip.

[0004] The relevant technical reference is Chinese Patent No. CN221238335U, which discloses a 3D visual imaging device for chip flatness detection, including a line laser contour sensor, a PLC controller, a camera, a laser, and a display screen. During the detection process, the chip to be detected is placed on the surface of a conveyor belt, and multiple light stripes are projected onto the chip surface by the laser. The camera receives the reflected laser and calculates the 3D contour data. The chip is then imaged in 3D on the display screen for easy observation by staff.

[0005] In the above technology, the positions of the camera and laser are fixed, and the angle between them and the chip is small. During the chip detection process, the camera may not be able to receive the reflected light from the chip, resulting in a large error in the detection results. Utility Model Content

[0006] The technical problem to be solved by this invention is that the camera cannot receive the reflected light from the chip, which leads to a large error in the detection result. In view of the above-mentioned defects of the prior art, a 3D detection head module is provided.

[0007] The technical solution adopted by this utility model to solve its technical problem is:

[0008] A 3D inspection head module includes an inspection stage, an inspection head, a camera, and a laser. The inspection stage is used to place a chip to be inspected. The inspection head is mounted on the inspection stage and is used to mount the camera and laser. The camera is rotatably mounted on the side wall of the inspection head and is used to capture images of the chip being inspected. A scanning groove is formed on the side wall of the inspection head, the cross-section of the scanning groove is triangular, and the laser is installed in the scanning groove, with the laser's emitting end positioned corresponding to the inspection stage.

[0009] By adopting the above technical solution, the camera rotates on the side wall of the detection head, thereby capturing chip images from different angles, increasing the flexibility of the camera. Furthermore, by installing the laser in the scanning slot, the obstruction of the laser during the detection process can be reduced, allowing the laser emitted from all angles to be reflected back to the camera, thus improving the situation where the camera cannot receive the reflected light from the chip.

[0010] Preferably, a mounting box is rotatably connected to the detection head, the camera is located inside the mounting box, a hemispherical rotating groove is provided on the side wall of the detection head, and a spherical rotating part is provided on the side wall of the mounting box corresponding to the rotating groove, the rotating part being located inside the rotating groove.

[0011] By adopting the above technical solution, the mounting box rotates within a hemispherical rotating groove via a spherical rotating part, thereby enabling the camera to capture images from multiple angles. The design of the rotating groove and the rotating part ensures the stability and reliability of the rotation.

[0012] Preferably, an auxiliary rotating rod is rotatably connected to the side wall of the mounting box, and the end of the auxiliary rotating rod is rotatably connected to the side wall of the detection head.

[0013] By adopting the above technical solution, the auxiliary rotating rod rotates between the detection head and the mounting box, providing additional support and stability for the rotation of the mounting box.

[0014] Preferably, the detection head is connected to a lifting assembly, which is used to drive the detection head to move up and down on the detection table. The lifting assembly includes a lifting guide rail, a lifting slider, and a stabilizing block. The lifting guide rail is vertically arranged on the detection table and slides with the lifting slider. The lifting slider is driven by a drive motor. The stabilizing block has an L-shaped cross-section. One long side of the stabilizing block is connected to the side wall of the lifting slider, and the other long side of the stabilizing block is connected to the side wall of the detection head. The short side of the stabilizing block is fixedly connected to the bottom of the detection head.

[0015] By adopting the above technical solution, the lifting slider slides on the lifting guide rail, driving the detection head to move up and down. The sliding cooperation between the lifting guide rail and the lifting slider realizes the height adjustment of the detection head. The stabilizing block connects the lifting slider and the detection head, providing additional stability. The design of the stabilizing block ensures the stability of the detection head during the lifting process.

[0016] Preferably, the detection head is provided with a lateral moving component, the lateral moving component includes a stabilizing rod, the stabilizing rod is arranged laterally along the detection table, the stabilizing rod has a sliding groove along its length, the end of the detection head is fixedly connected to a sliding part that cooperates with the sliding groove, a transmission screw is rotatably connected in the sliding groove, the transmission screw passes through the sliding part and is threadedly engaged with the sliding part; the detection head is provided with a limit block, and a limit groove is formed on the inner wall of the sliding groove corresponding to the limit block.

[0017] By adopting the above technical solution, when the transmission screw rotates, it engages with the threaded part of the sliding part, causing the sliding part to slide on the stabilizer bar, which in turn drives the detection head to move, thus realizing the lateral movement of the detection head; the limit block slides in the limit groove, preventing the detection head from deviating or shaking during the movement, and ensuring the stability of the detection head.

[0018] Preferably, the end of the lifting guide rail is slidably connected to the side wall of the stabilizer bar and can slide along the length of the stabilizer bar.

[0019] By adopting the above technical solution, the lifting guide rail slides on the side wall of the stabilizing rod, realizing the lateral movement of the entire lifting assembly, increasing the flexibility of the detection head, and enabling it to adapt to the chip detection needs of different positions.

[0020] Preferably, the lifting assembly is arranged symmetrically in two sets along the axial direction of the detection head.

[0021] By adopting the above technical solution, the two sets of lifting components work simultaneously to support the lifting movement of the detection head in a balanced and stable manner, thereby improving the overall durability of the detection system.

[0022] Preferably, the testing stage is provided with a conveying component for transferring the chip; the conveying component includes a conveyor belt with a conveying position on the conveyor belt, and the bottom of the conveying position is recessed.

[0023] By adopting the above technical solution, the conveyor belt drives the chip to be transported on the conveyor position and sent into the detection area for detection. The concave bottom setting of the conveyor position can make the chip more stable during the transmission and detection process.

[0024] The beneficial effects of this utility model are as follows:

[0025] 1. This application sets up a detection head and rotates the camera on the detection head. The camera rotates on the side wall of the detection head to capture chip images at different angles, which increases the flexibility of the camera. Furthermore, by installing the laser in the scanning slot, the obstruction of the laser during the detection process can be reduced, so that the laser emitted by the laser at all angles can be reflected back to the camera, which improves the situation where the camera cannot receive the reflected light from the chip.

[0026] 2. This application sets up a mounting box and an auxiliary rotating rod. The mounting box rotates within a hemispherical rotating groove via a spherical rotating part, thereby driving the camera to capture images from multiple angles. The design of the rotating groove and the rotating part ensures the smoothness and reliability of the rotation. The auxiliary rotating rod rotates between the detection head and the mounting box, providing additional support and stability for the rotation of the mounting box. Attached Figure Description

[0027] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the present invention will be further described below in conjunction with the accompanying drawings and embodiments. The drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0028] Figure 1 This is a schematic diagram of the overall structure of the 3D detection head module according to an embodiment of this application.

[0029] Figure 2 This is a schematic diagram of the structure of the lateral movement component in an embodiment of this application.

[0030] Figure 3 This is a schematic diagram of the installation box in an embodiment of this application.

[0031] Explanation of reference numerals in the attached drawings: 1. Detection table; 2. Detection head; 21. Scanning groove; 22. Mounting box; 23. Rotating groove; 24. Rotating part; 25. Auxiliary rotating rod; 26. Sliding part; 27. Limiting block; 28. Rotating gear; 29. ​​Transmission gear; 3. Camera; 4. Laser; 5. Lifting assembly; 51. Lifting guide rail; 52. Lifting slider; 53. Stabilizing block; 6. Lateral movement assembly; 61. Stabilizing rod; 62. Sliding groove; 63. Limiting groove; 7. Conveying assembly; 71. Conveyor belt; 72. Conveying position. Detailed Implementation

[0032] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, a clear and complete description will be provided below in conjunction with the technical solutions in the embodiments of this utility model. Obviously, the described embodiments are some, but not all, of the embodiments of this utility model. Based on the embodiments of this invention, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.

[0033] The preferred embodiment of this utility model is as follows: Figure 1As shown, a 3D inspection head 2 module includes an inspection platform 1, an inspection head 2, a camera 3, and a laser 4; the inspection platform 1 is used to place the chip to be inspected; the inspection head 2 is mounted on the inspection platform 1, and the inspection head 2 is used to mount the camera 3 and the laser 4; the camera 3 is rotatably mounted on the side wall of the inspection head 2 and is used to capture the image of the chip to be inspected; a scanning groove 21 is opened on the side wall of the inspection head 2, the cross-section of the scanning groove 21 is triangular, the laser 4 is installed in the scanning groove 21, and the emitting end of the laser 4 is set corresponding to the inspection platform 1.

[0034] The camera 3 rotates on the side wall of the detection head 2 to capture chip images from different angles, increasing the flexibility of the camera 3. Furthermore, by installing the laser 4 inside the scanning slot 21, the obstruction of the laser during the detection process can be reduced, allowing the laser emitted by the laser 4 at various angles to be reflected back to the camera 3, thus improving the situation where the camera 3 cannot receive the reflected light from the chip.

[0035] A mounting box 22 is rotatably connected to the detection head 2. The camera 3 is located inside the mounting box 22. A hemispherical rotating groove 23 is formed on the side wall of the detection head 2. A spherical rotating part 24 is provided on the side wall of the mounting box 22 corresponding to the rotating groove 23, and the rotating part 24 is located inside the rotating groove 23. Rotating teeth 28 are provided on the circumference of the rotating part 4. A transmission gear 29 is rotatably connected to the rotating teeth 28 inside the mounting box 22. The transmission gear 29 is driven by a motor.

[0036] The mounting box 22 rotates within the hemispherical rotating groove 23 via the spherical rotating part 24, thereby driving the camera 3 to capture images from multiple angles. The design of the rotating groove 23 and the rotating part 24 ensures the smoothness and reliability of the rotation.

[0037] An auxiliary rotating rod 25 is rotatably connected to the side wall of the mounting box 22, and the end of the auxiliary rotating rod 25 is rotatably connected to the side wall of the detection head 2. The auxiliary rotating rod 25 rotates between the detection head 2 and the mounting box 22, providing additional support and stability for the rotation of the mounting box 22.

[0038] A lifting assembly 5 is connected to the detection head 2. The lifting assembly 5 is used to drive the detection head 2 to move up and down on the detection table 1. The lifting assembly 5 includes a lifting guide rail 51, a lifting slider 52, and a stabilizing block 53. The lifting guide rail 51 is vertically set on the detection table 1. The lifting guide rail 51 and the lifting slider 52 are slidably engaged. The lifting slider 52 is driven by a drive motor. The stabilizing block 53 has an L-shaped cross-section. One side of the long side of the stabilizing block 53 is connected to the side wall of the lifting slider 52, and the other side of the long side of the stabilizing block 53 is connected to the side wall of the detection head 2. The short side of the stabilizing block 53 is fixedly connected to the bottom of the detection head 2.

[0039] The lifting slider 52 slides on the lifting guide rail 51, driving the detection head 2 to move up and down. The sliding cooperation between the lifting guide rail 51 and the lifting slider 52 enables the height adjustment of the detection head 2. The stabilizing block 53 connects the lifting slider 52 and the detection head 2, providing additional stability. The design of the stabilizing block 53 ensures the stability of the detection head 2 during the lifting process. Two sets of lifting components 5 are symmetrically arranged along the axis of the detection head 2. The two sets of lifting components work simultaneously to support the lifting movement of the detection head 2 in a balanced and stable manner, improving the overall durability of the detection system.

[0040] The detection head 2 is provided with a transverse moving component 6, which includes a stabilizing rod 61. The stabilizing rod 61 is arranged transversely along the detection table 1. A sliding groove 62 is formed on the stabilizing rod 61 along its length. A sliding part 26 that cooperates with the sliding groove 62 is fixedly connected to the end of the detection head 2. A transmission screw is rotatably connected inside the sliding groove 62. The transmission screw passes through the sliding part 26 and is threadedly engaged with the sliding part 26. A limit block 27 is provided on the detection head 2, and a limit groove 63 is formed on the inner wall of the sliding groove 62 corresponding to the limit block 27.

[0041] When the transmission screw rotates, it engages with the threaded part 26, causing the sliding part 26 to slide on the stabilizing rod 61, which in turn drives the detection head 2 to move, thus realizing the lateral movement of the detection head 2; the limiting block 27 slides in the limiting groove 63, preventing the detection head 2 from deviating or shaking during the movement, and ensuring the stability of the detection head 2.

[0042] The end of the lifting guide rail 51 is slidably connected to the side wall of the stabilizing rod 61 and can slide along the length of the stabilizing rod 61. The sliding of the lifting guide rail 51 on the side wall of the stabilizing rod 61 enables the lateral movement of the entire lifting assembly 5, increasing the flexibility of the detection head 2 and enabling it to adapt to the chip detection needs at different positions.

[0043] The testing station 1 is equipped with a conveyor assembly 7, which is used to transfer chips. The conveyor assembly 7 includes a conveyor belt 71, on which a transfer position 72 is provided. The transfer position 72 has a recessed bottom. The conveyor belt 71 carries the chip on the transfer position 72 and sends the chip into the testing area for testing. The recessed bottom of the transfer position 72 makes the chip more stable during the transfer and testing process.

[0044] The implementation principle of a 3D inspection head module in this application embodiment is as follows: During the chip flatness inspection process, the chip is placed on the conveyor position 72, and the conveyor belt 71 transports the chip to the inspection point. The laser 4 emits laser light into the chip, and the laser light is reflected back to the camera 3 to form an effective image. During this period, the position of the inspection head 2 can be continuously adjusted by the lifting component 5 and the lateral movement component 6 to scan the chip multiple times from multiple angles and directions. At the same time, the camera 3 can be rotated by rotating the inspection box, so that the laser rays can be reflected back to the camera 3, making the inspection results more accurate.

[0045] It should be understood that those skilled in the art can make improvements or modifications based on the above description, and all such improvements and modifications should fall within the protection scope of the appended claims.

Claims

1. A 3D inspection head module, characterized in that, The device includes a testing platform, a testing head, a camera, and a laser. The testing platform is used to place the chip to be tested. The testing head is mounted on the testing platform and is used to mount the camera and laser. The camera is rotatably mounted on the side wall of the testing head and is used to capture images of the chip being tested. A scanning groove is formed on the side wall of the testing head, and the cross-section of the scanning groove is triangular. The laser is installed in the scanning groove, and the emitting end of the laser is positioned corresponding to the testing platform.

2. The 3D detection head module according to claim 1, characterized in that, The detection head is rotatably connected to a mounting box, the camera is located inside the mounting box, a hemispherical rotating groove is provided on the side wall of the detection head, and a spherical rotating part is provided on the side wall of the mounting box corresponding to the rotating groove, the rotating part being located inside the rotating groove.

3. A 3D detection head module according to claim 2, characterized in that, An auxiliary rotating rod is rotatably connected to the side wall of the mounting box, and the end of the auxiliary rotating rod is rotatably connected to the side wall of the detection head.

4. A 3D detection head module according to claim 1, characterized in that, The detection head is connected to a lifting assembly, which is used to drive the detection head to move up and down on the detection table. The lifting assembly includes a lifting guide rail, a lifting slider, and a stabilizing block. The lifting guide rail is vertically mounted on the detection table and slides with the lifting slider. The lifting slider is driven by a drive motor. The stabilizing block has an L-shaped cross-section. One long side of the stabilizing block is connected to the side wall of the lifting slider, and the other long side of the stabilizing block is connected to the side wall of the detection head. The short side of the stabilizing block is fixedly connected to the bottom of the detection head.

5. A 3D detection head module according to claim 4, characterized in that, The detection head is equipped with a lateral moving component, which includes a stabilizing rod arranged laterally along the detection platform. A sliding groove is formed on the stabilizing rod along its length. A sliding part that mates with the sliding groove is fixedly connected to the end of the detection head. A transmission screw is rotatably connected inside the sliding groove. The transmission screw passes through the sliding part and is threadedly engaged with the sliding part. A limit block is provided on the detection head, and a limit groove is formed on the inner wall of the sliding groove corresponding to the limit block.

6. A 3D detection head module according to claim 5, characterized in that, The end of the lifting guide rail is slidably connected to the side wall of the stabilizer bar and can slide along the length of the stabilizer bar.

7. A 3D detection head module according to claim 4, characterized in that, The lifting assembly is arranged symmetrically in two sets along the axis of the detection head.

8. A 3D detection head module according to claim 1, characterized in that, The testing platform is equipped with a conveying component for transferring chips; the conveying component includes a conveyor belt with a conveying position, the bottom of which is recessed.

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