Cold hydrogenation sampling system and polycrystalline silicon production system
By introducing a crude hydrogenated liquid buffer tank into the polysilicon production system for distillation and purification, the problem of waste of liquid cold hydrogenated products after circulation and replacement is solved, and resource recycling and production efficiency are improved.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-04-02
- Publication Date
- 2026-04-07
AI Technical Summary
In the polysilicon production process, the direct discharge of liquid cold hydrogenated products after recycling leads to waste, reduced purity, and increased pollution.
By introducing a crude hydrogenation liquid buffer tank into the sampling system, the replaced liquid cold hydrogenation product is directly discharged into the crude hydrogenation liquid buffer tank for distillation and purification, thus achieving recycling.
This avoids the waste of liquid cold hydrogenation products, reduces the load on the slurry process, and improves production efficiency and product purity.
Smart Images
Figure CN224095433U_ABST
Abstract
Description
Technical Field
[0001] This application relates to polysilicon production technology, and more particularly to a cold hydrogenation sampling system and a polysilicon production system. Background Technology
[0002] The cold hydrogenation process is a key step in polysilicon production. The main reaction is: Si + 2H₂ + 3SiCl₄ → 4SiHCl₃. This reaction typically takes place in a fluidized bed reactor, where silicon powder is surrounded by a gaseous mixture of hydrogen and silicon tetrachloride, reacting under high temperature and pressure to produce a gaseous cold hydrogenated product. The gaseous cold hydrogenated product is then dusted, washed, and cooled to become a liquid cold hydrogenated product, which is then stored in an intermediate hydrogenated liquid storage tank. The lower-purity liquid cold hydrogenated product is stored in a crude hydrogenated liquid buffer tank for further distillation and purification.
[0003] To test the purity of liquid cold hydrogenation products, a sampler is required to take samples from the intermediate storage tank of hydrogenation liquid. Before sampling, the sampling pipeline and sampler are circulated and replaced. The accuracy of the purity of the measured liquid cold hydrogenation products is ensured through circulation and replacement. The replaced liquid cold hydrogenation products are treated as waste liquid and discharged into the waste liquid storage tank.
[0004] Since the circulation and replacement process consumes a large amount of liquid cold hydrogenation products, and the purity and pollution level of the liquid cold hydrogenation products after circulation and replacement are reduced, directly discharging the replaced liquid cold hydrogenation products into the waste tank would be wasteful. Utility Model Content
[0005] This application provides a cold hydrogenation sampling system and a polysilicon production system to solve the problem of wasting liquid cold hydrogenation products.
[0006] On one hand, this application provides a cold hydrogenation sampling system, comprising:
[0007] An intermediate storage tank for hydrogenated liquid, the intermediate storage tank for hydrogenated liquid being suitable for storing liquid cold hydrogenated products;
[0008] A sampler, the sampler being adapted to communicate with the intermediate storage tank of the hydrogenated liquid;
[0009] A crude hydrogenated liquid buffer tank is provided, which is adapted to be connected to the sampler; the crude hydrogenated liquid buffer tank is used to store the displacement liquid cold hydrogenated product that needs to be purified by distillation.
[0010] The cold hydrogenation sampling system provided in this application also includes:
[0011] A first pipeline, the two ends of which are respectively adapted to be connected to the sampler and the crude hydrogenated liquid buffer tank;
[0012] A first valve is disposed on the first pipeline; the first valve is adapted to control the on / off state of the first pipeline.
[0013] The cold hydrogenation sampling system provided in this application also includes:
[0014] A second valve is disposed on the first pipeline; the second valve is adapted to control the opening and closing of the first pipeline.
[0015] The cold hydrogenation sampling system provided in this application also includes:
[0016] A pressure measuring component, the pressure measuring component being adapted to be connected to the first pipeline; the pressure measuring component being adapted to detect the pressure inside the crude hydrogenated liquid buffer tank.
[0017] The cold hydrogenation sampling system provided in this application includes a pressure measurement component comprising:
[0018] Pressure gauge, the pressure gauge being adapted to detect the pressure inside the crude hydrogenated liquid buffer tank;
[0019] The second pipeline has a first end adapted to be connected to the pressure gauge and a second end adapted to be connected to the crude hydrogenated liquid buffer tank.
[0020] The cold hydrogenation sampling system provided in this application includes a pressure measurement component comprising:
[0021] A third valve is disposed on the second pipeline; the third valve is adapted to control the on / off state of the second pipeline.
[0022] The cold hydrogenation sampling system provided in this application also includes:
[0023] The fourth valve is installed on the second pipeline; the fourth valve is located between the third valve and the crude hydrogenation liquid buffer tank.
[0024] The end of the first pipeline away from the sampler is connected to the second pipeline, and the connection between the first pipeline and the second pipeline is located between the third valve and the fourth valve.
[0025] The cold hydrogenation sampling system provided in this application also includes:
[0026] A waste liquid tank is adapted to be connected to the sampler; the waste liquid tank is adapted to store the liquid cold hydrogenation product waste liquid generated by the sampler.
[0027] The cold hydrogenation sampling system provided in this application also includes:
[0028] The third pipeline has two ends adapted to be connected to the waste liquid tank and the sampler, respectively.
[0029] A fifth valve is disposed on the third pipeline; the fifth valve is adapted to control the on / off state of the third pipeline.
[0030] On the other hand, this application provides a polysilicon production system, including the cold hydrogenation sampling system described in any one of the above-mentioned methods.
[0031] This application provides a cold hydrogenation sampling system and a polysilicon production system, including an intermediate hydrogenation liquid storage tank, a sampler, and a crude hydrogenation liquid buffer tank. Before sampling, the sampling pipeline and the sampler are circulated and replaced. The replaced liquid cold hydrogenation product is directly discharged to the crude hydrogenation liquid buffer tank. The liquid cold hydrogenation product discharged into the crude hydrogenation liquid buffer tank is further purified by distillation, realizing the recycling of the replaced liquid cold hydrogenation product and thus avoiding the problem of waste. Attached Figure Description
[0032] The accompanying drawings, which are incorporated in and form part of this specification, illustrate embodiments consistent with this application and, together with the description, serve to explain the principles of this application.
[0033] Figure 1 A schematic diagram of the overall cold hydrogenation sampling system provided by this utility model.
[0034] Explanation of reference numerals in the attached figures:
[0035] 10. Intermediate storage tank for hydrogenated liquid; 20. Sampler; 30. Waste liquid tank; 40. First pipeline; 41. First valve; 42. Second valve; 50. Pressure measuring assembly; 51. Second pipeline; 52. Pressure gauge; 53. Third valve; 60. Third pipeline; 70. Crude hydrogenated liquid buffer tank; 71. Fourth valve; 80. Fifth valve.
[0036] The accompanying drawings illustrate specific embodiments of this application, which will be described in more detail below. These drawings and descriptions are not intended to limit the scope of the concept in any way, but rather to illustrate the concept of this application to those skilled in the art through reference to particular embodiments. Detailed Implementation
[0037] Exemplary embodiments will now be described in detail, examples of which are illustrated in the accompanying drawings. When the following description relates to the drawings, unless otherwise indicated, the same numbers in different drawings denote the same or similar elements. The embodiments described in the following exemplary embodiments do not represent all embodiments consistent with this application. Rather, they are merely examples of apparatuses and methods consistent with some aspects of this application as detailed in the appended claims.
[0038] First, let me explain the terms used in this application:
[0039] Circulation replacement: This refers to the cleaning and replacement process in chemical plants. Specifically, it involves removing the original process media, equipment residues, scale, impurities, etc., and then selecting a new process media to prepare for the next production run. Its operating principle is as follows: First, physical or chemical cleaning methods are used to remove dirt and stains from the inside and surface of the equipment. Then, based on the cleaning, a replacement method is used to replace the cleaned internal environment of the equipment, pipelines, storage tanks, etc., with the new process media. This method ensures the cleanliness and quality of the equipment and process media, guarantees the stability of the production process, and improves plant production efficiency and product quality.
[0040] Polycrystalline silicon cold hydrogenation process: The polycrystalline silicon cold hydrogenation process is a key step in polycrystalline silicon production. The main reaction formula for cold hydrogenation is: Si + 2H₂ + 3SiCl₄ → 4SiHCl₃. This reaction is usually carried out in a fluidized bed reactor, where silicon powder is surrounded by a gaseous mixture of hydrogen and silicon tetrachloride, and reacts under high temperature and certain pressure to generate gaseous cold hydrogenation products. The gaseous cold hydrogenation products after the reaction are dusted, washed, and cooled to become liquid cold hydrogenation products, which are then sent to the intermediate hydrogenation liquid storage tank 10 for storage. The liquid cold hydrogenation products with lower purity are stored in the crude hydrogenation liquid buffer tank 70, and will be further purified by distillation.
[0041] The liquid cold hydrogenation product is sampled in the intermediate storage tank 10 of the hydrogenation liquid. Before sampling, the sampling pipeline and sampler 20 are circulated and replaced to ensure the accuracy of the measurement. The replaced liquid cold hydrogenation product needs to be discharged to the waste liquid tank 30 for storing waste liquid. The waste liquid tank 30 can not only store the replaced liquid cold hydrogenation product, but also collect and store various waste liquids generated in the entire polycrystalline silicon cold hydrogenation process.
[0042] Since the circulation and replacement process consumes a large amount of liquid cold hydrogenation products, and the liquid cold hydrogenation products after circulation and replacement only have reduced purity and are not contaminated, directly discharging the replaced liquid cold hydrogenation products into the waste liquid tank 30 would be a waste of liquid cold hydrogenation products.
[0043] To address the aforementioned technical issues, this application provides a cold hydrogenation sampling system. By directly discharging the replaced liquid cold hydrogenation product into a crude hydrogenation liquid buffer tank 70, the liquid cold hydrogenation product discharged into the crude hydrogenation liquid buffer tank 70 is further purified by distillation, thereby achieving the recycling of the replaced liquid cold hydrogenation product and avoiding waste.
[0044] The technical solution of this application and how the technical solution of this application solves the above-mentioned technical problems are described in detail below with specific embodiments. These specific embodiments can be combined with each other, and the same or similar concepts or processes may not be described again in some embodiments. The embodiments of this application will now be described with reference to the accompanying drawings.
[0045] like Figure 1 As shown, this embodiment provides a cold hydrogenation sampling system, including a hydrogenation liquid intermediate storage tank 10, a sampler 20, and a crude hydrogenation liquid buffer tank 70; wherein the hydrogenation liquid intermediate storage tank 10 is suitable for storing liquid cold hydrogenation products; wherein the sampler 20 is suitable for communicating with the hydrogenation liquid intermediate storage tank 10; wherein the crude hydrogenation liquid buffer tank 70 is suitable for communicating with the sampler 20; and the crude hydrogenation liquid buffer tank 70 is suitable for storing the replaced liquid cold hydrogenation products.
[0046] Specifically, the liquid cold hydrogenation product is stored in the intermediate hydrogenation liquid storage tank 10 along the pipeline. When it is necessary to sample the liquid cold hydrogenation product, the connecting pipeline and the sampler 20 need to be circulated and replaced before sampling. In order to ensure the accuracy of the measurement, the replaced liquid cold hydrogenation product is discharged into the crude hydrogenation liquid buffer tank 70 through the pipeline and then subjected to subsequent distillation and purification. By adding a pipeline between the sampler 20 and the crude hydrogenation liquid buffer tank 70, the liquid cold hydrogenation product discharged into the crude hydrogenation liquid buffer tank 70 is further distilled and purified, thus realizing the recycling of the replaced liquid cold hydrogenation product and avoiding the problem of waste.
[0047] It should be noted that the liquid cold hydrogenation product after circulation and replacement of the pipeline and sampler 20 only has a lower concentration compared to the liquid cold hydrogenation product in the intermediate hydrogenation liquid storage tank 10. At this time, the replaced liquid cold hydrogenation product is discharged into the waste liquid tank 30 and then subjected to the slurry process. The slurry process separates the polycrystalline silicon in the waste liquid tank 30 from other impurities and by-products. Therefore, discharging the replaced liquid cold hydrogenation product into the waste liquid tank 30 and then performing the slurry process will increase the load on the slurry process. Therefore, discharging the replaced liquid cold hydrogenation product into the crude hydrogenation liquid buffer tank 70, which already has a lower concentration, can effectively reduce the load on the slurry process.
[0048] Furthermore, the cold hydrogenation sampling system provided in this application embodiment also includes a first pipeline 40 and a first valve 41, wherein the two ends of the first pipeline 40 are respectively adapted to be connected to the sampler 20 and the crude hydrogenation liquid buffer tank 70. The first valve 41 is disposed on the first pipeline 40; the first valve 41 is adapted to control the opening and closing of the first pipeline 40.
[0049] Specifically, when sampling is required, the first valve 41 is opened, and the replaced liquid cold hydrogenation product is connected to the crude hydrogenation liquid buffer tank 70 through the first pipeline 40. When sampling is not required, the first valve 41 is closed, and the replaced liquid cold hydrogenation product cannot be discharged to the crude hydrogenation liquid buffer tank 70 through the first pipeline 40.
[0050] Furthermore, the cold hydrogenation sampling system provided in this application embodiment also includes a second valve 42, which is disposed on the first pipeline 40 and also controls the opening and closing of the first pipeline 40.
[0051] It should be noted that by setting up multiple valves, if one valve malfunctions, other valves can be shut off promptly to prevent media leakage and ensure the safe operation of the system. Furthermore, in some cases, a valve may fail to close tightly due to insufficient manufacturing precision, wear from frequent use, or misoperation. In such situations, the presence of another valve serves as a backup measure to ensure normal system operation. By setting up the first valve 41 and the second valve 42, the piping system can be divided into multiple independent zones. When a fault occurs in a certain zone, the relevant valves can be quickly shut off, isolating the fault within a limited area and preventing its spread to the entire system.
[0052] Specifically, valve 41 and valve 42 are common shut-off valves, which function as both open and close valves. They are commonly installed at the inlet and outlet of cold and heat sources, at the inlet and outlet of equipment, and on pipeline branches (including risers). They can also be used as drain valves and vent valves. Common shut-off valves include gate valves, globe valves, ball valves, and butterfly valves.
[0053] Furthermore, the cold hydrogenation sampling system provided in this application embodiment also includes a pressure measuring component 50, which is adapted to be connected to the crude hydrogenation liquid buffer tank 70; the pressure measuring component 50 is adapted to detect the pressure inside the crude hydrogenation liquid buffer tank 70.
[0054] Specifically, by inspecting the crude hydrogenation liquid buffer tank 70 using the pressure monitoring component 50, overpressure accidents caused by excessive pressure can be detected and prevented in a timely manner. This helps protect the tank and its connected equipment from damage, prevents potential safety issues, and, in many production processes, the pressure inside the tank is one of the key process parameters.
[0055] It should be noted that by measuring and controlling the pressure within the crude hydrogenation liquid buffer tank 70, the stability of the production process and product quality can be ensured. Pressure fluctuations within the tank can cause additional wear and tear on the equipment. By measuring and controlling the pressure, equipment wear can be reduced, extending its service life.
[0056] Furthermore, the cold hydrogenation sampling system provided in this application embodiment includes a pressure measuring range comprising a pressure gauge 52 and a second pipeline 51. The pressure gauge 52 is adapted to detect the pressure inside the crude hydrogenation liquid buffer tank 70. The first end of the second pipeline 51 is adapted to be connected to the pressure gauge 52, and the second end of the second pipeline 51 is adapted to be connected to the crude hydrogenation liquid buffer tank 70.
[0057] Specifically, when it is necessary to detect the pressure inside the crude hydrogenated liquid buffer tank 70, the first valve 41 and the second valve 42 are closed. At this time, the crude hydrogenated liquid buffer tank 70 is only connected to the pressure gauge 52 through the second pipeline 51. The pressure gauge 52 is a common electronic airbag pressure gauge. The electronic airbag pressure gauge senses the pressure change inside the airbag through an electronic sensor and converts it into an electrical signal for display.
[0058] Furthermore, in the cold hydrogenation sampling system provided in this application embodiment, the pressure measuring component 50 includes a third valve 53, which is disposed on the second pipeline 51; the third valve 53 is adapted to control the on / off state of the second pipeline 51.
[0059] It should be noted that the third valve, 53, is a common shut-off valve, which serves both opening and closing functions. It is typically installed at the inlet and outlet of cold and heat sources, equipment inlet and outlet, and on pipeline branches (including risers). It can also be used as a drain valve and vent valve. Common shut-off valves include gate valves, globe valves, ball valves, and butterfly valves.
[0060] Specifically, during sampling, the third valve 53 is closed. When it is necessary to test the pressure inside the crude hydrogenated liquid buffer tank 70, the third valve 53 and the second valve 42 are opened, while the first valve 41 is closed. At this time, the crude hydrogenated liquid buffer tank 70 is only connected to the pressure gauge 52.
[0061] Furthermore, the cold hydrogenation sampling system provided in this embodiment also includes a fourth valve 71, which is disposed on the first pipeline 40; the fourth valve 71 is disposed between the third valve 53 and the crude hydrogenation liquid buffer tank 70. It should be noted that the multiple valves can divide the pipeline into multiple sections, enabling segmented control. This allows for the flexible adjustment of the flow rate and pressure of the medium by opening or closing the valves in a specific section as needed.
[0062] In this embodiment, the end of the first pipeline 40 away from the sampler 20 is connected to the second pipeline 51, and the connection between the first pipeline 40 and the second pipeline 51 is located between the third valve 53 and the fourth valve 71.
[0063] Specifically, during sampling, the third valve 53 is closed, while the first valve 41, the second valve 42, and the fourth valve 71 are open. When it is necessary to test the pressure inside the crude hydrogenated liquid buffer tank 70, the third valve 53 and the fourth valve 71 are opened, and the first valve 41 and the second valve 42 are both closed. One of the first valve 41 and the second valve 42 is selected as a backup valve to prevent a valve from failing to close properly due to insufficient manufacturing precision, wear caused by frequent use, or misoperation.
[0064] It should be noted that connecting the first pipeline 40 to the second pipeline 51 also allows the pressure gauge 52 to be connected to the intermediate hydrogenated liquid storage tank 10. With the fourth valve 71 closed and the first, second, and third valves opened, the pressure gauge 52 can then measure the pressure inside the intermediate hydrogenated liquid storage tank 10. Connecting the pressure gauge 52 to the intermediate hydrogenated liquid storage tank 10 via the existing first pipeline 40 eliminates the need for additional piping, thus saving on piping costs.
[0065] Furthermore, the cold hydrogenation sampling system provided in this application embodiment also includes a waste liquid tank 30, which is adapted to be connected to the sampler 20; the waste liquid tank 30 is adapted to store the waste liquid generated by the sampler 20.
[0066] It should be noted that the waste liquid tank 30 is a device installed in underground space for storing liquid substances. It is mainly used to collect, store, and treat various liquids, such as wastewater and waste liquids, to prevent these liquids from being directly discharged into the environment and causing pollution.
[0067] It should be noted that, in order to further improve the overall recycling effect of the process, the waste liquid in the waste liquid tank 30 is further recycled. Generally, the waste liquid goes through a slurry process, which separates the polysilicon in the waste liquid tank 30 from other impurities and by-products for subsequent processing and utilization.
[0068] Furthermore, the cold hydrogenation sampling system provided in this application embodiment also includes a third pipeline 60 and a fifth valve 80. The two ends of the third pipeline 60 are respectively adapted to be connected to the waste liquid tank 30 and the sampler 20, and the fifth valve is installed on the third pipeline 60. The fifth valve 80 is adapted to control the opening and closing of the third pipeline 60.
[0069] Specifically, when the crude hydrogenation liquid buffer tank 70 malfunctions, the first valve 41 and the second valve 42 are closed, and the fifth valve 80 is opened. At this time, the replaced liquid cold hydrogenation product is directly discharged into the waste liquid tank 30.
[0070] It should be noted that the fifth valve, 80, is a common shut-off valve, which serves both opening and closing functions. It is typically installed at the inlet and outlet of cold and heat sources, equipment inlet and outlet, and on pipeline branches (including risers). It can also be used as a drain valve and vent valve. Common shut-off valves include gate valves, globe valves, ball valves, and butterfly valves.
[0071] In practical implementation, when it is necessary to detect the pressure inside the crude hydrogenation liquid buffer tank 70 using pressure gauge 52, the third valve 53 and the second valve 42, which are installed on the second pipeline 51, are opened, while the first valve 41, the fourth valve 71, and the fifth valve 80 are closed. At this time, pressure gauge 52 is connected to the crude hydrogenation liquid buffer tank 70. When it is not necessary to use pressure gauge 52 to measure the pressure inside the crude hydrogenation liquid buffer tank 70, the first valve 41, the second valve 42, and the fourth valve 71 are opened, while the third valve 53 and the fifth valve 80 are closed. At this time, the purged liquid cold hydrogenation product flows into the crude hydrogenation liquid buffer tank 70 through the first pipeline 40. When the crude hydrogenation liquid buffer tank 70 malfunctions, the first valve 41, the second valve 42, the third valve 53, and the fourth valve 71 are closed, and the fifth valve 80 is opened. At this time, the purged liquid cold hydrogenation product is directly discharged into the waste liquid tank 30.
[0072] On the other hand, the polysilicon production system provided in this application includes the above-mentioned cold hydrogenation sampling system.
[0073] Other embodiments of this application will readily occur to those skilled in the art upon consideration of the specification and practice of the utility models disclosed herein. This application is intended to cover any variations, uses, or adaptations of this application that follow the general principles of this application and include common knowledge or customary techniques in the art not disclosed herein. The specification and examples are to be considered exemplary only, and the true scope and spirit of this application are indicated by the following claims.
[0074] It should be understood that this application is not limited to the precise structure described above and shown in the accompanying drawings, and various modifications and changes can be made without departing from its scope. The scope of this application is limited only by the appended claims.
Claims
1. A cold hydrogenation sampling system, characterized in that, include: Hydrogenated liquid intermediate storage tank (10), said hydrogenated liquid intermediate storage tank (10) is suitable for storing liquid cold hydrogenated products; A sampler (20) adapted to communicate with the intermediate storage tank (10) of the hydrogenated liquid; A crude hydrogenated liquid buffer tank (70) is adapted to be connected to the sampler (20) and is used to store liquid cold hydrogenated products that need to be purified by distillation.
2. The cold hydrogenation sampling system according to claim 1, characterized in that, Also includes: The first pipeline (40) has two ends adapted to be connected to the sampler (20) and the crude hydrogenated liquid buffer tank (70), respectively; A first valve (41) is provided on the first pipeline (40); the first valve (41) is adapted to control the opening and closing of the first pipeline (40).
3. The cold hydrogenation sampling system according to claim 2, characterized in that, Also includes: A second valve (42) is provided on the first pipeline (40); the second valve (42) is adapted to control the opening and closing of the first pipeline (40).
4. The cold hydrogenation sampling system according to claim 2 or 3, characterized in that, Also includes: A pressure measuring component (50) is adapted to be connected to the crude hydrogenated liquid buffer tank (70); the pressure measuring component (50) is adapted to detect the pressure inside the crude hydrogenated liquid buffer tank (70).
5. The cold hydrogenation sampling system according to claim 4, characterized in that, The pressure measuring component (50) includes: Pressure gauge (52), the pressure gauge (52) being adapted to detect the pressure inside the crude hydrogenated liquid buffer tank (70); The second pipeline (51) has a first end adapted to be connected to the pressure gauge (52) and a second end adapted to be connected to the crude hydrogenated liquid buffer tank (70).
6. The cold hydrogenation sampling system according to claim 5, characterized in that, The pressure measuring component (50) includes: A third valve (53) is provided on the second pipeline (51); the third valve (53) is adapted to control the opening and closing of the second pipeline (51).
7. The cold hydrogenation sampling system according to claim 6, characterized in that, Also includes: A fourth valve (71) is provided on the second pipeline (51); the fourth valve (71) is provided between the third valve (53) and the crude hydrogenated liquid buffer tank (70); The end of the first pipeline (40) away from the sampler (20) is connected to the second pipeline (51), and the connection between the first pipeline (40) and the second pipeline (51) is located between the third valve (53) and the fourth valve (71).
8. The cold hydrogenation sampling system according to claim 1, characterized in that, Also includes: Waste liquid tank (30) is adapted to be connected to the sampler (20); the waste liquid tank (30) is adapted to store liquid cold hydrogenation products flowing through the sampler (20).
9. The cold hydrogenation sampling system according to claim 8, characterized in that, Also includes: The third pipeline (60) has two ends adapted to be connected to the waste liquid tank (30) and the sampler (20), respectively; A fifth valve (80) is provided on the third pipeline (60); the fifth valve (80) is adapted to control the opening and closing of the third pipeline (60).
10. A polycrystalline silicon production system, characterized in that, The cold hydrogenation sampling system includes any one of claims 1-9.