Device for checking subfissure of crystal bar

Abstract

The utility model discloses a device for crystal bar subfissure inspection, the device comprises a subfissure gripper module and a subfissure detection bench module, the subfissure gripper module is used for gripping a crystal bar to be detected, and the subfissure detection bench module is used for crystal bar subfissure detection; the hidden crack gripper module comprises a hidden crack gripper; the hidden crack gripper comprises a clamping module and a rotating module, the clamping module comprises a connecting plate, a movable claw, a fixed claw and a clamping motor, the detection table module comprises a rack and a detection module, the detection module is arranged on the rack and comprises a camera light source and a camera frame, and the camera light source and the camera frame are symmetrically arranged on the two sides of the rack; and the subfissure gripper clamps the crystal bar and places the crystal bar between the camera light source and the camera frame for subfissure detection. According to the utility model, the clamping module and the rotating module are arranged on the subfissure gripper module, so that the subfissure gripper not only realizes the gripping and transportation of the crystal bar, but also is convenient for the camera to scan each surface of the crystal bar, and the subfissure inspection efficiency of the crystal bar is improved.

Description

Technical Field

[0001] This utility model belongs to the field of semiconductor technology, specifically relating to a device for inspecting microcracks in crystal rods. Background Technology

[0002] After repeated use, microcracks may appear on the surface and inside of the crystal rods. Microcracks need to be inspected for on the crystal rods. The original technology used a manual method of using a flashlight for illumination, which was time-consuming, labor-intensive, and risky due to human error. Once misjudged, it would result in the loss of the crystal rods or affect subsequent processes. Utility Model Content

[0003] The purpose of this invention is to overcome the shortcomings of the prior art and provide a device for inspecting microcracks in crystal rods. This invention improves the efficiency of microcrack inspection by setting a clamping module and a rotating module on the microcrack gripper module, so that the microcrack gripper can not only grasp and transport crystal rods, but also facilitate the camera to scan various surfaces of the crystal rods.

[0004] To achieve the aforementioned objectives of this utility model, the technical solution provided by this utility model patent is as follows:

[0005] An apparatus for inspecting microcracks in crystal rods includes a microcrack gripper module and a microcrack detection stage module. The microcrack gripper module is used to grip the crystal rod to be inspected, and the microcrack detection stage module is used to detect microcracks in the crystal rod. The microcrack gripper module includes a microcrack gripper.

[0006] The hidden crack gripper includes a clamping module and a rotating module. The clamping module includes a connecting plate, a movable claw, a fixed claw, and a clamping motor. The clamping motor is located on one side of the connecting plate, and the fixed claw is located at the lower end of the other side of the connecting plate. The movable claw is located at the lower end of the connecting plate on the side of the clamping motor. The upper sides of the movable claw are slidably connected to the connecting plate, and the clamping motor drives the movable claw to slide on the connecting plate. The rotating module includes a rotating motor, a bearing fixing frame, and a rotary support. The bearing fixing frame is installed at the lower end of the movable claw. The rotating motor is installed on the outer side of the movable claw, and a clamping pad is installed on the inner side of the movable claw. The rotating motor drives the clamping pad to rotate. The rotary support is installed at the lower end of the fixed claw, and the clamping pad is installed on the rotary support.

[0007] The detection station module includes a frame and a detection module. The detection module is mounted on the frame and includes a camera light source and a camera frame. The camera light source and the camera frame are symmetrically arranged on both sides of the frame. The microcrack gripper holds the crystal rod and places it between the camera light source and the camera frame to detect microcracks.

[0008] Furthermore, the connecting plate is generally rectangular, with a flange adapter plate at the center of the upper end, and linear guide rails on both sides of the lower end face of the connecting plate. The linear guide rails are arranged in parallel, and guide rail sliders are respectively provided on the linear guide rails. The guide rail sliders slide on the linear guide rails, and the two ends of the movable claw are respectively connected to the guide rail sliders on the linear guide rails. A cable chain groove is provided at the front end of the connecting plate, and a cable chain is provided in the cable chain groove. A cable chain bracket is also provided on the connecting plate, and the cable chain bracket is wrapped around the outside of the cable chain groove.

[0009] Furthermore, the movable claw includes a main body and a sliding plate. The upper end of the main body is connected and fixed to the sliding plate, and a bearing fixing frame is provided at the lower end of the main body. A bearing is provided inside the bearing fixing frame, and a speed reducer is provided between the rotary motor and the bearing fixing frame.

[0010] Furthermore, the upper end of the movable claw is fixedly connected to the guide rail slider via a sliding plate, and a lead screw seat is provided on the inner side of the upper end of the fixed claw. A lead screw is provided between the clamping motor and the lead screw seat. The lead screw is movably connected to the middle of the sliding plate. The clamping motor is connected to the lead screw via a coupling. The clamping motor drives the lead screw to rotate, and the lead screw drives the sliding plate to move in the length direction of the lead screw.

[0011] Furthermore, the upper end of the fixed claw is fixedly connected to one side of the lower end face of the connecting plate. The fixed claw and the movable claw are symmetrically arranged on both sides of the connecting plate. A rotary support is provided on the inner side of the lower end of the fixed claw. A clamping pad is provided in the middle of the rotary support. The clamping pad rotates around the rotary support. Three-axis lifting cylinders are symmetrically arranged on the inner sides of the upper ends of the fixed claw and the movable claw. A brush is provided between the upper ends of the fixed claw and the movable claw. The three-axis lifting cylinder is connected to both ends of the brush through a connecting block. A guide groove is provided in the middle of the upper end of the fixed claw. The three-axis lifting cylinder on the fixed claw adjusts the brush to move up and down in the guide groove through the connecting block. A positioning groove is provided at the lower end of the fixed claw and the movable claw.

[0012] Furthermore, the upper end of the brush is provided with a brush top bar and a brush clamping plate. The three-axis lifting cylinder is clamped on the brush top bar through a connecting block. The main body of the movable claw is provided with a through hole in the middle. When the movable claw moves on the lead screw, the brush passes through the through hole in the main body of the movable claw.

[0013] Furthermore, the frame is a frame structure with adjustable feet at the four corners of the bottom. A first mounting plate and a second mounting plate are respectively mounted on the upper sides of the frame. A camera light source is located in the center of one side of the first mounting plate. A first laser displacement sensor is mounted on the first mounting plate on the side of the camera light source. A second laser displacement sensor is also mounted between the second mounting plate and the first mounting plate. The first and second laser displacement sensors are symmetrically arranged. A light-shielding brush is located on the side of the first mounting plate near the second mounting plate. A three-axis lifting cylinder is located at the lower end of the light-shielding brush. The side of the three-axis lifting cylinder is connected and fixed to the side of the first mounting plate. The top of the three-axis lifting cylinder is connected to the light-shielding brush via a fixing plate. The three-axis lifting cylinder drives the light-shielding brush to move vertically.

[0014] Furthermore, a linear module is provided on the first mounting plate, and the camera light source slides on the linear guide rail. A linear module is symmetrically provided on the second mounting plate. A vision mounting base is installed on the linear module of the second mounting plate, a camera frame is installed on the vision mounting base, and a scanning camera is installed inside the camera frame. The scanning direction of the scanning camera is towards the direction of the camera light source.

[0015] Furthermore, support frames are installed at both ends of one side of the first mounting plate, and positioning fixture strips are installed on the support frames. The positioning fixture strips are installed between the camera light source and the light-shielding brush.

[0016] Based on the above technical solution, the device for inspecting microcracks in crystal rods, as described in this utility model patent, has achieved the following technical advantages through practical application:

[0017] 1. The present invention provides a device for inspecting microcracks in crystal rods. By setting a clamping module and a rotating module on the microcrack gripper module, the microcrack gripper not only realizes the gripping and transportation of crystal rods, but also facilitates the scanning of various surfaces of the crystal rods by the camera, thereby improving the efficiency of microcrack inspection of crystal rods. Attached Figure Description

[0018] Figure 1 This is a structural diagram of the microcrack gripper module in a device for inspecting microcracks in crystal rods according to this utility model.

[0019] Figure 2 This is a front view of the microcrack gripper in a device for inspecting microcracks in crystal rods according to this utility model.

[0020] Figure 3 This is a perspective view of the microcrack detection stage module in a device for inspecting microcracks in crystal rods according to this utility model. Detailed Implementation

[0021] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model is described below with reference to specific examples shown in the accompanying drawings. However, it should be understood that these descriptions are merely exemplary and not intended to limit the scope of the present utility model. Furthermore, descriptions of well-known structures and technologies are omitted in the following description to avoid unnecessarily obscuring the concept of the present utility model.

[0022] like Figure 1-3 The present invention relates to a device for inspecting microcracks in crystal rods. The device includes a microcrack gripper module and a microcrack detection stage module. The microcrack gripper module is used to grip the crystal rod to be inspected, and the microcrack detection stage module is used to detect microcracks in the crystal rod. The microcrack gripper module includes a microcrack gripper.

[0023] The hidden crack gripper includes a clamping module and a rotating module. The clamping module includes a connecting plate, a movable claw 5, a fixed claw 11, and a clamping motor 1. The clamping motor 1 is provided on one side of the connecting plate, and the fixed claw 11 is provided at the lower end of the other side of the connecting plate. The movable claw 5 is provided at the lower end of the connecting plate on one side of the clamping motor 1. The upper two sides of the movable claw 5 are slidably connected to the connecting plate. The clamping motor 1 drives the movable claw 5 to slide on the connecting plate. The rotating module includes a rotating motor 2, a bearing fixing frame 4, and a rotary support 10. The bearing fixing frame 4 is installed at the lower end of the movable claw 5. The rotating motor 2 is installed on the outer side of the movable claw 5, and a clamping pad 6 is installed on the inner side of the movable claw 5. The rotating motor 2 drives the clamping pad 6 to rotate. The rotary support 10 is installed at the lower end of the fixed claw 11, and the clamping pad 6 is installed on the rotary support 10.

[0024] By setting up a clamping module and a rotating module on the microcrack gripper module, the microcrack gripper can not only grasp and transport crystal rods, but also facilitate the camera to scan various surfaces of the crystal rods, thereby improving the efficiency of microcrack inspection of crystal rods.

[0025] The detection station module includes a frame 31 and a detection module. The detection module is mounted on the frame 31. The detection module includes a camera light source 35 and a camera frame 38. The camera light source 35 and the camera frame 38 are symmetrically arranged on both sides of the frame 31. The microcrack gripper holds the crystal rod and places it between the camera light source 35 and the camera frame 38 for microcrack detection.

[0026] Furthermore, the connecting plate is generally rectangular, with a flange adapter plate 17 located at the center of the upper end of the connecting plate. Linear guide rails 16 are respectively provided on both sides of the lower end face of the connecting plate, and the linear guide rails 16 are arranged in parallel. Guide rail sliders are respectively provided on the linear guide rails 16, and the guide rail sliders slide on the linear guide rails 16. The two ends of the movable claw 5 are respectively connected to the guide rail sliders on the linear guide rails 16. A cable chain groove 19 is provided at the front end of the connecting plate, and a cable chain 21 is provided in the cable chain groove 19. A cable chain bracket 20 is also provided on the connecting plate, and the cable chain bracket 20 is wrapped around the outside of the cable chain groove 19.

[0027] Furthermore, the movable claw 5 includes a main body and a sliding plate. The upper end of the main body is connected and fixed to the sliding plate, and the lower end of the main body is provided with a bearing fixing frame 4. A bearing is provided inside the bearing fixing frame 4, and a reducer 3 is provided between the rotary motor 2 and the bearing fixing frame 4.

[0028] Furthermore, the upper end of the movable claw 5 is fixedly connected to the guide rail slider via a sliding plate, and a lead screw seat 14 is provided on the inner side of the upper end of the fixed claw 11. A lead screw 18 is provided between the clamping motor 1 and the lead screw seat 14. The lead screw 18 is movably connected to the middle of the sliding plate. The clamping motor 1 is connected to the lead screw 18 via a coupling 22. The clamping motor 1 drives the lead screw 18 to rotate, and the lead screw 18 drives the sliding plate to move in the length direction of the lead screw 18.

[0029] Furthermore, the upper end of the fixed claw 11 is fixedly connected to one side of the lower end face of the connecting plate. The fixed claw 11 and the movable claw 5 are symmetrically arranged on both sides of the connecting plate. A rotary support 10 is provided on the inner side of the lower end of the fixed claw 11. A clamping pad 6 is provided in the middle of the rotary support 10. The clamping pad 6 rotates around the rotary support 10. Three-axis lifting cylinders 12 are symmetrically arranged on the inner sides of the upper ends of the fixed claw 11 and the movable claw 5. A light-shielding brush 7 is provided between the upper ends of the fixed claw 11 and the movable claw 5. The three-axis lifting cylinder 12 is connected to both ends of the light-shielding brush 7 through the connecting block 13. A guide groove is provided in the middle of the upper end of the fixed claw 11. The three-axis lifting cylinder 12 on the fixed claw 11 adjusts the light-shielding brush 7 to move up and down in the guide groove through the connecting block 13. A positioning groove is provided at the lower end of the fixed claw 11 and the movable claw 5.

[0030] Furthermore, the upper end of the light-shielding brush 7 is provided with a brush top strip 9 and a brush clamping plate 8. The three-axis lifting cylinder 12 is clamped on the brush top strip 9 through the connecting block 13. The main body of the movable claw 5 is provided with a through hole. When the movable claw 5 moves on the lead screw 18, the light-shielding brush 7 passes through the through hole of the main body of the movable claw 5.

[0031] Furthermore, the frame 31 is a frame structure. Adjustable feet are provided at the four corners of the bottom of the frame 31. A first mounting plate 32 and a second mounting plate 41 are respectively provided on the upper two sides of the frame 31. A camera light source 35 is provided in the middle of one side of the first mounting plate 32. A first laser displacement sensor 34 is provided on the first mounting plate 32 on the side of the camera light source 35. A second laser displacement sensor 42 is also provided between the second mounting plate 41 and the first mounting plate 32. The first laser displacement sensor 34 and the second laser displacement sensor 42 are symmetrically arranged. A light-shielding brush 7 is provided on the side of the first mounting plate 32 near the second mounting plate 41. A lifting three-axis lifting cylinder 12 is provided at the lower end of the light-shielding brush 7. The side of the lifting three-axis lifting cylinder 12 is connected and fixed to the side of the first mounting plate 32. The top of the lifting three-axis lifting cylinder 12 is connected to the light-shielding brush 7 through a fixing plate. The lifting three-axis lifting cylinder 12 drives the light-shielding brush 7 to move in the vertical direction.

[0032] Furthermore, a linear module 33 is provided on the first mounting plate 32, and the camera light source 35 slides on the linear guide rail. A linear module 33 is symmetrically provided on the second mounting plate 41. A vision mounting base 39 is installed on the linear module 33 of the second mounting plate 41. A camera frame 38 is installed on the vision mounting base 39. A scanning camera is installed inside the camera frame 38, and the scanning direction of the scanning camera is towards the camera light source 35.

[0033] Furthermore, support frames 40 are installed at both ends of one side of the first mounting plate 32, and positioning fixture strips 37 are installed on the support frames 40. The positioning fixture strips 37 are installed between the camera light source 35 and the light-shielding brush 7.

[0034] A specific operating procedure for a device used for inspecting microcracks in crystal rods: A robot grips and transports the crystal rod. The robot is fixedly connected to the microcrack gripper via a flange adapter plate 17 on the connecting plate. The robot then grips the crystal rod via the microcrack gripper. During the gripping process, the clamping motor 1 drives the movable claw 5 to move in the direction of the lead screw 18, so that the movable claw 5 and the clamping pad 6 on the fixed claw 11 clamp the crystal rod on both sides and secure it. The lifting three-axis lifting cylinder 12 controls the movement of the light-shielding brush 7, so that the light-shielding brush 7 is positioned above the clamped crystal rod, blocking the top of the crystal rod. After the crystal rod is clamped and fixed, the robot grips and transports the crystal rod to the top of the microcrack inspection table; the positioning grooves below the fixed claw 11 and the movable claw 5 are aligned with... The positioning fixture 37 on the inspection table is connected. After the laser displacement sensor detects the size of the crystal rod, it sends a feedback signal to the camera frame 38 module and the light source module. The distance between the camera light source 35 and the camera frame 38 and the crystal rod is adjusted. After the appropriate distance is reached, the lifting three-axis lifting cylinder 12 on the inspection table drives the light-shielding brush 7 to move, so that the light-shielding brush 7 on the inspection table moves to the lower end of the crystal rod and blocks the lower end of the crystal rod. The robot drives the crystal rod to move along the positioning fixture 37, so that the camera in the camera frame 38 completes the scanning of the crystal rod facing the camera. After the scanning of the crystal rod facing the camera is completed, the rotary motor 2 drives the crystal rod to rotate to the unscanned surface for re-scanning until all surfaces of the crystal rod are scanned, thus completing the inspection of the crystal rod for microcracks.

[0035] Finally, it should be noted that the above embodiments are only used to illustrate the technical solution of this utility model and not to limit it; although the utility model has been described in detail with reference to preferred embodiments, those skilled in the art should understand that modifications can still be made to the specific implementation of the utility model or equivalent substitutions can be made to some technical features without departing from the spirit of the technical solution of this utility model, and all such modifications and substitutions should be covered within the scope of the technical solution claimed by this utility model.

Claims

1. An apparatus for inspecting microcracks in crystal rods, characterized in that, The device includes a microcrack gripper module and a microcrack detection stage module. The microcrack gripper module is used to grip the crystal rod to be inspected, and the microcrack detection stage module is used to detect microcracks in the crystal rod. The microcrack gripper module includes a microcrack gripper. The hidden crack gripper includes a clamping module and a rotating module. The clamping module includes a connecting plate, a movable claw, a fixed claw, and a clamping motor. The clamping motor is located on one side of the connecting plate, and the fixed claw is located at the lower end of the other side of the connecting plate. The movable claw is located at the lower end of the connecting plate on the side of the clamping motor. The upper sides of the movable claw are slidably connected to the connecting plate, and the clamping motor drives the movable claw to slide on the connecting plate. The rotating module includes a rotating motor, a bearing fixing frame, and a rotary support. The bearing fixing frame is installed at the lower end of the movable claw. The rotating motor is installed on the outer side of the movable claw, and a clamping pad is installed on the inner side of the movable claw. The rotating motor drives the clamping pad to rotate. The rotary support is installed at the lower end of the fixed claw, and the clamping pad is installed on the rotary support. The detection station module includes a frame and a detection module. The detection module is installed on the frame. The detection module includes a camera light source and a camera frame. The camera light source and the camera frame are symmetrically arranged on both sides of the frame. The microcrack gripper holds the crystal rod and places it between the camera light source and the camera frame to detect microcracks. The upper end of the fixed claw is fixedly connected to one side of the lower end face of the connecting plate. The fixed claw and the movable claw are symmetrically arranged on both sides of the connecting plate. A rotary support is provided on the inner side of the lower end of the fixed claw. A clamping pad is provided in the middle of the rotary support and rotates around the rotary support. Three-axis lifting cylinders are symmetrically arranged on the inner sides of the upper ends of the fixed claw and the movable claw. A light-shielding brush is provided between the upper ends of the fixed claw and the movable claw. The three-axis lifting cylinder is connected to both ends of the light-shielding brush through a connecting block. A guide groove is provided in the middle of the upper end of the fixed claw. The three-axis lifting cylinder on the fixed claw adjusts the light-shielding brush to move up and down in the guide groove through the connecting block. A positioning groove is provided at the lower end of the fixed claw and the movable claw. The upper end of the light-shielding brush is provided with a brush top strip and a brush clamping plate. The three-axis lifting cylinder is clamped on the brush top strip through a connecting block. The middle part of the movable claw body is provided with a through hole. When the movable claw moves on the lead screw, the light-shielding brush passes through the through hole of the movable claw body.

2. The apparatus for inspecting microcracks in crystal rods according to claim 1, characterized in that, The connecting plate is generally rectangular. A flange adapter is provided in the middle of the upper part of the connecting plate. Linear guide rails are provided on both sides of the lower end face of the connecting plate. The linear guide rails are arranged in parallel and each has a guide rail slider. The guide rail slider slides on the linear guide rail. The two ends of the movable claw are connected to the guide rail sliders on the linear guide rails. A cable chain groove is provided at the front end of the connecting plate, and a cable chain is provided in the cable chain groove. A cable chain bracket is also provided on the connecting plate, which wraps around the outside of the cable chain groove.

3. The apparatus for inspecting microcracks in crystal rods according to claim 2, characterized in that, The movable claw includes a main body and a sliding plate. The upper end of the main body is connected and fixed to the sliding plate. A bearing fixing frame is provided at the lower end of the main body. A bearing is provided inside the bearing fixing frame. A speed reducer is provided between the rotary motor and the bearing fixing frame.

4. The apparatus for inspecting microcracks in crystal rods according to claim 3, characterized in that, The upper end of the movable claw is fixedly connected to the guide rail slider via a sliding plate. A lead screw seat is provided on the inner side of the upper end of the fixed claw. A lead screw is provided between the clamping motor and the lead screw seat. The lead screw is movably connected to the middle of the sliding plate. The clamping motor is connected to the lead screw via a coupling. The clamping motor drives the lead screw to rotate, and the lead screw drives the sliding plate to move in the length direction of the lead screw.

5. The apparatus for inspecting microcracks in crystal rods according to claim 1, characterized in that, The frame is a frame structure with adjustable feet at the four corners of the bottom. A first mounting plate and a second mounting plate are respectively mounted on the upper sides of the frame. A camera light source is located in the center of one side of the first mounting plate. A first laser displacement sensor is mounted on the first mounting plate on the side of the camera light source. A second laser displacement sensor is also mounted between the second mounting plate and the first mounting plate. The first and second laser displacement sensors are symmetrically arranged. A light-shielding brush is located on the side of the first mounting plate near the second mounting plate. A three-axis lifting cylinder is located at the lower end of the light-shielding brush. The side of the three-axis lifting cylinder is connected and fixed to the side of the first mounting plate. The top of the three-axis lifting cylinder is connected to the light-shielding brush through a fixing plate. The three-axis lifting cylinder drives the light-shielding brush to move vertically.

6. The apparatus for inspecting microcracks in crystal rods according to claim 5, characterized in that, The first mounting plate is provided with a linear module, and the camera light source slides on the linear guide rail. The second mounting plate is symmetrically provided with linear modules. A vision mounting base is installed on the linear module of the second mounting plate, a camera frame is installed on the vision mounting base, and a scanning camera is installed in the camera frame. The scanning direction of the scanning camera is towards the direction of the camera light source.

7. The apparatus for inspecting microcracks in crystal rods according to claim 5, characterized in that, The first mounting plate has support frames installed at both ends on one side, and positioning fixture strips are installed on the support frames. The positioning fixture strips are installed between the camera light source and the light-blocking brush.

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