Deposition device for solar cell POLY silicon

Abstract

The utility model belongs to the technical field of solar cells, and particularly relates to a solar cell POLY silicon deposition device which comprises a first fixing plate, a second fixing plate and a third fixing plate, the first fixing plate and the second fixing plate are arranged side by side, a fixing rod is fixedly connected between the first fixing plate and the second fixing plate, and the first fixing plate and the second fixing plate are arranged in parallel. The side edge of the battery piece can be located in the opening range of the clamping grooves of the first limiting piece and the second limiting piece, the battery piece can slide into the clamping grooves under the action of self weight, clamping and fixing of the battery piece are achieved, it can be guaranteed that the piece inserting process is more accurate, and meanwhile impact damage to the battery piece in the piece inserting process can be reduced; the distance between the two second limiting pieces can be gradually enlarged under the cooperation of inclined plane pushing of the adjusting plate, so that the adjustment of the distance between the battery pieces is realized, the deposition operation of the battery pieces is more convenient after the adjustment of the distance between the battery pieces, and the yield of the battery pieces can be better improved.

Description

TECHNICAL FIELD

[0001] The utility model belongs to solar cell piece technical field, specifically speaking is a kind of solar cell POLY silicon's deposition device. BACKGROUND

[0002] Tunneling oxide layer passivation contact cell adopts the method of tunneling passivation contact, and the cell structure is formed on the back surface tunneling oxide layer and doped POLY silicon layer, so that carrier transport changes from multi-dimensional to one-dimensional, better passivation effect can be realized, and recombination in metallization area is effectively reduced;

[0003] In the prior art, the deposition device of the N-type cell POLY silicon with the announcement number CN 216354253 U includes a bearing mechanism and two fixed plates, the two fixed plates are oppositely arranged, the bearing mechanism is arranged between the two fixed plates to fix and support a plurality of cell pieces between the two fixed plates;The bearing mechanism is provided with a plurality of clamping grooves for placing cell pieces, and each clamping groove has a protruding clamping tooth in the middle to place two cell pieces with a gap in the same clamping groove.The N-type cell POLY silicon deposition device can place two cell pieces with a gap in the same clamping groove, so as to effectively avoid the disadvantage of too tight cell piece fitting, and the POLY silicon plated around the front surface can be easily removed clean;Reduce the leakage, improve the partial open circuit voltage, enhance the passivation effect;And then improve the overall yield of TOPCon cell, save the cost and realize the growth of production capacity;

[0004] When the solar cell piece is passivated, the support gap between the cell pieces is fixed, and it is not easy to realize the passivation treatment of the cell pieces during operation, which affects the yield of TOPCon cell, and the gap between the clamping grooves on the quartz boat is small, so the cell pieces are easily damaged during insertion, which affects the quality of the cell pieces;Therefore, in view of the above problems, a kind of solar cell POLY silicon's deposition device is provided. INVENTION CONTENTS

[0005] In order to make up for the shortcomings of the prior art, in view of the problems existing in the prior art, the support gap between the cell pieces is fixed, and it is not easy to realize the passivation treatment of the cell pieces during operation, which affects the yield of TOPCon cell, the utility model provides a kind of solar cell POLY silicon's deposition device, realizes the adjustment of the interval between cell pieces, and the interval between cell pieces is adjusted, which is more convenient for the deposition operation of cell pieces, and the yield of cell pieces can be better improved.

[0006] The utility model discloses a solar cell POLY silicon's deposition device that adopts the technical scheme of solving its technical problem, including first fixed plate, first fixed plate and second fixed plate, first fixed plate and second fixed plate are arranged side by side, and the fixed link of first fixed plate and second fixed plate is fixed between the fixed link of first fixed plate and second fixed plate.

[0007] First limiting piece and second limiting piece, two pairs of sliding rods are respectively installed between the first fixed plate and the second fixed plate, the distance between the upper two sliding rods on the second fixed plate is greater than the distance between the lower two sliding rods, a plurality of first limiting pieces are slidably installed on the upper two sliding rods, a plurality of second limiting pieces are slidably installed on the lower two sliding rods, and a limiting link is connected between the first limiting piece and the second limiting piece which are parallel.

[0008] The clamping groove is arranged on the outer side of the first limiting piece.

[0009] Adjusting assembly, the adjusting assembly is installed on the bottom side of the first fixed plate and the second fixed plate, and the adjusting assembly adjusts the distance between the second limiting pieces.

[0010] Preferably, the first limiting piece and the second limiting piece have the same structure, the same clamping groove is arranged on the outer side of the first limiting piece and the second limiting piece, and the opening of the clamping groove is a slope cutout, which facilitates the insertion of the battery piece and ensures better guiding of the battery piece into the clamping groove.

[0011] Preferably, the adjusting assembly further comprises an adjusting shaft, one end of the adjusting shaft is rotatably installed on one side of the second fixed plate, the other end of the adjusting shaft penetrates through and is rotatably installed on the bottom of the first fixed plate, the inner sides of the first fixed plate and the second fixed plate are respectively provided with connecting plates, a connecting rod is fixedly connected between the two connecting plates, an adjusting plate is slidably installed on the connecting rod, springs are fixedly connected between two adjacent adjusting plates, and springs are fixedly connected between the most end adjusting plate and the connecting plate.

[0012] Preferably, cams are respectively sleeved on the two ends of the adjusting shaft, and the cams are located on the bottom side of the connecting plate, the circumferential surface of the cam is tangent to the bottom side of the connecting plate, and the height of the connecting plate is adjusted during the rotation of the cam.

[0013] Preferably, a sliding groove is arranged on the outer side wall of the first fixed plate, a sliding nut is slidably installed in the groove of the sliding groove, one end of the adjusting shaft is provided with a rotating plate, the rotating plate is provided with a locking screw, and one end of the locking screw is rotatably matched in the sliding nut.

[0014] Preferably, the connecting rod is provided with a limiting strip, the limiting strip matches the sliding hole of the adjusting plate, the adjusting plate is a triangular structure, the top end of the adjusting plate is located between two adjacent second limiting members, and the interval between the two adjacent second limiting members can be expanded by moving the triangular adjusting plate upward during adjustment of the second limiting members.

[0015] The utility model discloses the beneficial effect lies in:

[0016] The utility model discloses the first limiting member and second limiting member are provided with the clamping slot, and the opening of buckle is provided with the horn -like cut, when the battery piece can not accurately correspond and insert the clamping slot of quartz boat, through setting up horn -like cut, can expand the fault tolerance of battery piece insertion piece, and can be located in the clamping slot opening range of first limiting member and second limiting member on the side of battery piece, can slide to the clamping slot under the action of self -weight, realize the clamping of battery piece fixed, can guarantee insertion piece process more accurate, can reduce the impact damage of battery piece in insertion piece process simultaneously,

[0017] After the insertion piece is completed, through setting up adjusting assembly, can rotate rotary board to drive the cam of adjusting shaft two -end rotation, can realize the lifting of connecting plate, can drive the ascending of connecting rod, can realize the lifting of adjusting plate, with the lifting operation of adjusting plate, the top of adjusting plate is inserted between two adjacent second limiting members, under the push cooperation of the slope of adjusting plate, can gradually expand the interval between two second limiting members, thereby realize the adjustment of the interval between battery piece, and the interval between battery piece is more convenient for the deposition operation of battery piece after adjustment, can better improve the yield rate of battery piece. BRIEF DESCRIPTION OF DRAWINGS

[0018] In order to more clearly illustrate the technical scheme in the embodiments of the utility model or prior art, the following will briefly introduce the drawings needed to be used in the embodiment or prior art description, and obviously, the drawings in the following description are only some embodiments of the utility model, and for those skilled in the art, other drawings can also be obtained without creative labor under the premise of the drawings.

[0019] Figure 1 It is a whole three-dimensional structure schematic diagram;

[0020] Figure 2 It is a whole front view structure schematic diagram;

[0021] Figure 3 It is the section structure schematic diagram of adjusting assembly;

[0022] Figure 4 It is the first limiting member and second limiting member position relation schematic diagram;

[0023] Figure 5 Fig. 1 is a schematic view of the body structure of the first and second limit members;

[0024] Fig. 1 is a schematic view of the body structure of the first and second limit members; Fig. 1 is a schematic view of the body structure of the first and second limit members; DETAILED DESCRIPTION

[0025] The technical solutions in the embodiments of the present application will be apparently and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the present application.

[0026] Please refer to Figures 1-5 As shown in the figure, a solar cell POLY silicon deposition device includes a first fixed plate 1, the first fixed plate 1 and a second fixed plate 2, the first fixed plate 1 and the second fixed plate 2 are arranged side by side, and a fixed rod 7 is fixedly connected between the first fixed plate 1 and the second fixed plate 2;

[0027] A first limit member 4 and a second limit member 5, two pairs of sliding rods 3 are respectively installed between the first fixed plate 1 and the second fixed plate 2, the distance between the upper two sliding rods 3 on the second fixed plate 2 is greater than the distance between the lower two sliding rods 3, a plurality of first limit members 4 are slidably installed on the upper two sliding rods 3, a plurality of second limit members 5 are slidably installed on the lower two sliding rods 3, and a limit link 6 is connected between the first limit member 4 and the second limit member 5 which are parallel to each other;

[0028] A clamping groove 41, the first limit member 4 is of a ring structure, and a ring-shaped clamping groove 41 is formed on the outer side surface of the first limit member 4;

[0029] An adjusting assembly 8, the bottom side of the first fixed plate 1 and the second fixed plate 2 is provided with an adjusting assembly 8, and the adjusting assembly 8 adjusts the distance between the second limit members 5.

[0030] The first limit member 4 and the second limit member 5 are of the same structure, the same clamping groove 41 is formed on the outer side of the first limit member 4 and the second limit member 5, and the opening of the clamping groove 41 is a slope cutout;

[0031] In work, the existing battery quartz boat usually adopts the structure of single groove and double pieces. After inserting the piece, the piece is inserted into the groove through mechanical operation. The first limiting part 4 and the second limiting part 5 are provided with a clamping groove, and the opening of the buckle is provided with a horn-shaped notch. When the battery piece cannot be accurately inserted into the clamping groove of the quartz boat, the horn-shaped notch can expand the fault tolerance of the battery piece insertion. The side edge of the battery piece can be located within the clamping groove opening range of the first limiting part 4 and the second limiting part 5, and can be slid into the clamping groove 41 under the action of gravity to realize the clamping and fixing of the battery piece. It can ensure that the insertion process is more accurate, and can reduce the impact damage of the battery piece in the insertion process.

[0032] The adjusting assembly 8 further comprises an adjusting shaft 85, one end of the adjusting shaft 85 is rotatably installed on one side of the second fixed plate 2, the other end of the adjusting shaft 85 penetrates and is rotatably installed on the bottom of the first fixed plate 1, the inner sides of the first fixed plate 1 and the second fixed plate 2 are respectively provided with connecting plates 81, two connecting plates 81 are fixedly connected with a connecting rod 82, the connecting rod 82 is slidably installed with adjusting plates 84, and the two adjacent adjusting plates 84 are fixedly connected with springs 83, wherein the most end adjusting plate 84 is fixedly connected with the spring 83 between the connecting plate 81, and the bottom of the first fixed plate 1 and the second fixed plate 2 is respectively provided with a vertical sliding hole 810, the vertical sliding hole 810 is slidably provided with a vertical sliding rod 811, and the vertical sliding rod 811 is fixed on one side of the connecting plate 81.

[0033] The two ends of the adjusting shaft 85 are respectively sleeved with cams 812, and the cams 812 are located on the bottom side of the connecting plate 81, and the circumferential surface of the cam 812 is tangent to the bottom side of the connecting plate 81.

[0034] The outer side wall of the first fixed plate 1 is provided with a sliding groove 89, the sliding groove 89 is slidably installed with a sliding nut 88, one end of the adjusting shaft 85 is installed with a rotating plate 86, the rotating plate 86 is provided with a locking screw 87, and one end of the locking screw 87 is rotatably matched in the sliding nut 88.

[0035] The connecting rod 82 is provided with a limiting strip, the limiting strip penetrates the sliding hole of the adjusting plate 84, the adjusting plate 84 is a triangular structure, and the top end of the adjusting plate 84 is located between two adjacent second limiting parts 5.

[0036] In work, due to the small gap after the battery piece is inserted, the yield of TOPCon battery is affected. In order to adjust the distance between the battery pieces, after the insertion is completed, the rotating plate 86 can be rotated, the adjusting shaft 85 can be electrically adjusted to rotate, so as to drive the cams 812 at both ends of the adjusting shaft 85 to rotate, and when the cam 812 rotates, the lifting of the connecting plate 81 can be realized;

[0037] During the lifting of the cam 812, the connecting rod 82 can be lifted, and the lifting of the adjusting plate 84 can be realized. With the lifting operation of the adjusting plate 84, the top of the adjusting plate 84 is inserted between two adjacent second limit members 5, and the spacing between the two second limit members 5 can be gradually expanded, so as to realize the adjustment of the spacing between the battery pieces. After the spacing between the battery pieces is adjusted, the deposition operation of the battery pieces is more convenient, and the yield of the battery pieces can be better improved.

[0038] When the adjusting plate 84 moves upward, the spring 83 is stretched. After the deposition treatment is performed, the locking screw 87 is loosened, the sliding nut 88 can be reset to the original position along the sliding groove 89, after resetting, the connecting plate 81 smoothly descends under the cooperation of the vertical sliding rod 811, the descending of the connecting rod 82 is realized, the spring 83 is contracted and reset during the descending of the connecting rod 82, the plurality of adjusting plates 84 are gradually contracted, under the driving of the top of the adjusting plate 84, the second limit member 5 can be reset, under the connection and cooperation of the limit connecting rod 6, the synchronous movement of the first limit member 4 and the second limit member 5 can be realized, and the stability of the battery piece during adjustment is ensured.

[0039] The working principle is that after the piece is inserted, the piece of the battery piece is inserted into the clamping groove of the quartz boat during the insertion process. The clamping groove is provided in the first limit member 4 and the second limit member 5, and the trumpet-shaped notch is provided in the opening of the clamping buckle. When the battery piece cannot be accurately inserted into the clamping groove of the quartz boat during the insertion, the trumpet-shaped notch can expand the fault tolerance of the battery piece insertion. The side edge of the battery piece can be located in the opening range of the clamping groove of the first limit member 4 and the second limit member 5, and can be slid into the clamping groove 41 under the action of the self-weight, so as to realize the clamping and fixing of the battery piece, and ensure that the insertion process is more accurate, and the impact damage of the battery piece during the insertion process can be reduced.

[0040] In order to conveniently adjust the spacing between the battery pieces, after the insertion is completed, the rotating plate 86 can be rotated, the electric adjusting shaft 85 can be rotated, so as to drive the rotation of the cam 812 at both ends of the adjusting shaft 85. When the cam 812 rotates, the lifting of the connecting plate 81 can be realized.

[0041] During the lifting of the cam 812, the connecting rod 82 can be lifted, and the lifting of the adjusting plate 84 can be realized. With the lifting operation of the adjusting plate 84, the top of the adjusting plate 84 is inserted between two adjacent second limit members 5, and the spacing between the two second limit members 5 can be gradually expanded, so as to realize the adjustment of the spacing between the battery pieces. After the spacing between the battery pieces is adjusted, the deposition operation of the battery pieces is more convenient, and the yield of the battery pieces can be better improved.

[0042] When the adjusting plates 84 move upward, the springs 83 are stretched, and after the deposition process, the locking screw 87 is loosened by relaxation, which can drive the sliding nut 88 to reset to the original position along the sliding groove 89, and after resetting, the connecting plate 81 smoothly descends under the cooperation of the vertical sliding rod 811, realizing the descent of the connecting rod 82, and in the process of the descent of the connecting rod 82, the spring 83 is contracted and reset, realizing the step-by-step contraction of the multiple adjusting plates 84, which can drive the second limiting piece 5 to reset under the driving of the top of the adjusting plate 84, and under the connection and cooperation of the limiting connecting rod 6, the synchronous movement of the first limiting piece 4 and the second limiting piece 5 can be realized, ensuring the stable state of the battery piece during adjustment.

[0043] In the description of the present specification, the description referring to the terms "one embodiment", "an example", "a specific example" and the like means that the specific features, structures, materials or characteristics described in connection with the embodiment or example are contained in at least one embodiment or example of the present application. In the present specification, the illustrative description of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0044] The basic principles, main features and advantages of the present application are shown and described above. It should be understood by those skilled in the art that the present application is not limited by the above embodiments, and the above embodiments and descriptions in the specification are only to illustrate the principles of the present application. Without departing from the spirit and scope of the present application, various changes and improvements can be made to the present application, and these changes and improvements all fall within the scope of the claimed present application.

Claims

1. A deposition apparatus for polysilicon in solar cells, characterized in that: include: A first fixing plate and a second fixing plate are arranged side by side, and a fixing rod is fixedly connected between the first fixing plate and the second fixing plate. First limiting member and second limiting member, two pairs of sliding rods are respectively installed between the first fixed plate and the second fixed plate, wherein the distance between the two upper sliding rods of the second fixed plate is greater than the distance between the two lower sliding rods, multiple first limiting members are slidably installed on the two upper sliding rods, multiple second limiting members are slidably installed on the two lower sliding rods, and a limiting link is connected between the first limiting member and the second limiting member that are parallel to each other. The first limiting member is a ring structure, and a ring-shaped slot is provided on the outer side of the first limiting member. An adjustment component is installed on the bottom side of the first and second fixed plates. The adjustment component is used to adjust the distance between the second limiting members.

2. The deposition apparatus for POLY silicon in solar cells according to claim 1, characterized in that: The first limiting member and the second limiting member have the same structure. The first limiting member and the second limiting member have the same slot on their outer side, and the slot opening is a sloping cut.

3. The deposition apparatus for POLY silicon in solar cells according to claim 1, characterized in that: The adjustment assembly further includes an adjustment shaft, one end of which is rotatably mounted on one side of the second fixed plate, and the other end of which is rotatably mounted through the bottom of the first fixed plate. Connecting plates are respectively provided on the inner sides of the first and second fixed plates, and a connecting rod is fixedly connected between the two connecting plates. An adjustment plate is slidably mounted on the connecting rod, and a spring is fixedly connected between two adjacent adjustment plates. A spring is fixedly connected between the adjustment plate at the outermost end and the connecting plate. Vertical sliding holes are respectively opened at the bottom of the first and second fixed plates, and a vertical sliding rod is slidably arranged in the vertical sliding hole and fixed to one side of the connecting plate.

4. The deposition apparatus for POLY silicon in solar cells according to claim 3, characterized in that: The adjusting shaft has cams fitted at both ends, and the cams are located on the bottom side of the connecting plate, with the circumferential surface of the cams tangent to the bottom side surface of the connecting plate.

5. The deposition apparatus for POLY silicon in solar cells according to claim 4, characterized in that: A sliding groove is provided on the outer side wall of the first fixing plate, and a sliding nut is slidably installed in the groove of the sliding groove. A rotating plate is installed at one end of the adjusting shaft, and a locking screw is provided on the rotating plate, with one end of the locking screw rotating in the sliding nut.

6. The deposition apparatus for POLY silicon in solar cells according to claim 5, characterized in that: The connecting rod is provided with a limiting strip, which cooperates with the sliding hole through the adjusting plate. The adjusting plate has a triangular structure, and the top of the adjusting plate is located between two adjacent second limiting members.

Images