Electrostatic chuck edge protection mechanism

Abstract

The utility model relates to the technical field of electrostatic chucks, and provides an electrostatic chuck edge protection mechanism which comprises an upper plate and a bottom plate, the bottom of the upper plate is detachably connected with a protection cover, and the protection cover surrounds the outer wall of the bottom plate; a plurality of inserting blocks are arranged on the top of the protective cover in the circumferential direction, clamping grooves are formed in the inserting blocks, a plurality of clamping rods matched with the clamping grooves are arranged on the upper plate in the circumferential direction, and the clamping rods are inserted into the clamping grooves by rotating the protective cover. According to the utility model, the defects in the prior art are overcome, the design is reasonable, the structure is compact, the mounting and dismounting processes are obviously simplified through the matching of the clamping groove and the clamping rod and a rotary mounting mode, the subsequent maintenance is facilitated, and the working efficiency is improved. And through double sealing guarantee of the first sealing ring and the second sealing ring, the cleanliness of the internal environment of the electrostatic chuck is ensured, pollutants are effectively prevented from invading, and the sealing performance is improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to electrostatic chuck technical field, concretely relates to a kind of electrostatic chuck edge protection mechanism. BACKGROUND

[0002] In semiconductor manufacturing industry, electrostatic chuck as key component, plays the important role of adsorption and fixed silicon wafer, is crucial to realize precision machining, however, in complex and severe production environment, electrostatic chuck is exposed to the erosion of chemical gas and plasma for a long time, which easily leads to its internal structure to be contaminated, and then affect its adsorption efficiency and service life, traditional electrostatic chuck design usually uses aluminum base, is tightly combined with ceramic surface by means of adhesive or screw, this structure is stable, but when facing maintenance demand, its disassembly complexity is high, greatly increase maintenance difficulty and cost, for this purpose, we propose a kind of electrostatic chuck edge protection mechanism. SUMMARY

[0003] (One) technical problem solved

[0004] In view of the deficiencies of prior art, the utility model provides a kind of electrostatic chuck edge protection mechanism to solve the above problems existing in prior art.

[0005] (Two) technical scheme

[0006] To achieve the above object, the utility model is realized by the following technical scheme: a kind of electrostatic chuck edge protection mechanism, including upper plate and bottom plate, the bottom of the upper plate is detachably connected with protective cover, the outer wall of the bottom plate is surrounded by the protective cover;

[0007] The top of the protective cover is provided with a plurality of insertion blocks in circumference, the insertion block is provided with a clamping groove, the upper plate is provided with a plurality of clamping rods matched with the clamping groove in circumference, so that the clamping rod is inserted into the clamping groove by the mode of rotating protective cover.

[0008] Further, a plurality of insertion slots are opened in the circumference of the upper plate, the clamping rod is fixed on one side of the insertion slot, and the end of the clamping rod and the other side wall of the insertion slot leave a gap for the insertion of the insertion block.

[0009] Further, the top of the end of the clamping rod is provided with an oblique cutting angle, the top of the clamping rod is provided with a groove, and the top of the two sides of the groove is rounded.

[0010] Further, the protective cover is provided with a first step and a second step, the first step is provided with a first sealing ring to surround the outer wall of the bottom plate, the second step is provided with a second sealing ring, the axis of the second sealing ring is in line with the axis of the upper plate, and the top of the second sealing ring abuts against the bottom of the upper plate.

[0011] Further, the bottom of the bottom plate is provided with an annular groove accommodating the first sealing ring, so as to increase the contact area between the first sealing ring and the bottom plate.

[0012] (III) Beneficial Effects

[0013] The utility model discloses an electrostatic chuck edge protection mechanism. It has the following advantages

[0014] Beneficial Effects:

[0015] 1. By the cooperation of the clamping groove and the clamping rod and the rotary installation mode, the installation and disassembly process is significantly simplified, subsequent maintenance is facilitated, and work efficiency is improved.

[0016] 2. The double sealing protection of the first sealing ring and the second sealing ring ensures the cleanliness of the internal environment of the electrostatic chuck, effectively prevents the invasion of pollutants, and improves the sealing performance. BRIEF DESCRIPTION OF DRAWINGS

[0017] Figure 1 It is a whole three-dimensional schematic view of the electrostatic chuck structure of the utility model;

[0018] Figure 2 It is a three-dimensional schematic view of the bottom plate structure of the utility model;

[0019] Figure 3 It is an exploded three-dimensional schematic view of the electrostatic chuck structure of the utility model;

[0020] Figure 4 It is a cross-sectional three-dimensional schematic view of the electrostatic chuck structure of the utility model;

[0021] Figure 5 It is a cross-sectional three-dimensional schematic view of the protective cover structure of the utility model;

[0022] Figure 6 It is a three-dimensional schematic view of the clamping rod structure of the utility model.

[0023] In the figure: 11, upper plate; 12, bottom plate; 13, insertion slot; 14, clamping rod; 15, bevel; 16, groove; 2, protective cover; 21, first step; 22, second step; 23, insertion block; 24, clamping groove; 3, first sealing ring; 4, second sealing ring. DETAILED DESCRIPTION

[0024] In order to make the purpose, technical scheme and advantages of the embodiments of the utility model clearer, the technical scheme in the embodiments of the utility model will be clearly and completely described in the following with reference to the drawings in the embodiments of the utility model. Obviously, the described embodiments are part of the embodiments of the utility model, rather than all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the utility model.

[0025] Referring to the drawings Figures 1-6 A kind of electrostatic chuck edge protection mechanism, including upper plate 11 and bottom plate 12, space for installing various components is left between upper plate 11 and bottom plate 12, the bottom of upper plate 11 is detachably connected with protective cover 2, the top of protective cover 2 is sealedly connected with the bottom of upper plate 11, protective cover 2 is sealedly connected with the outer wall of bottom plate 12 surrounding, effectively prevent external pollutants from entering the interior of electrostatic chuck, to increase the service life of electrostatic chuck;

[0026] The top of protective cover 2 is circumferentially provided with a plurality of insertion blocks 23, the insertion block 23 is provided with a clamping groove 24, the upper plate 11 is circumferentially provided with a plurality of clamping rods 14 matched with the clamping groove 24, during installation, the clamping groove 24 is matched with the clamping rod 14, then the clamping rod 14 is inserted into the clamping groove 24 by rotating the protective cover 2, so that the protective cover 2 is quickly connected with the upper plate 11 and the bottom plate 12, and the clamping rod 14 is pulled out of the clamping groove 24 by reversing the protective cover 2 during disassembly, which greatly simplifies the installation and disassembly process, and facilitates subsequent quick maintenance of the electrostatic chuck.

[0027] In the embodiment, in order to further optimize the installation, a plurality of insertion slots 13 are circumferentially provided in the upper plate 11, the clamping rod 14 is fixed to one side of the insertion slot 13, and a gap is left between the end of the clamping rod 14 and the other side wall of the insertion slot 13 for the insertion of the insertion block 23, during installation, the insertion block 23 is inserted into the insertion slot 13, and then rotated towards the clamping rod 14, so that the clamping rod 14 is inserted into the clamping groove 24, achieving quick fixation.

[0028] In the embodiment, the top of the end of the clamping rod 14 is provided with a bevel 15, which helps the clamping rod 14 to be inserted into the clamping groove 24, so as to reduce the resistance during installation, the top of the clamping rod 14 is provided with a groove 16, which facilitates the bottom of the groove 16 to be clamped to the top wall of the clamping groove 24, so as to improve the stability of the connection between the clamping rod 14 and the clamping groove 24, and improve the stability of the connection between the protective cover 2 and the upper plate 11 and the bottom plate 12, the top of the two sides of the groove 16 is rounded, so as to facilitate quick disassembly by strongly twisting the protective cover 2.

[0029] In the embodiment, the protective cover 2 is provided with a first step 21 and a second step 22, the first step 21 is provided with the first sealing ring 3 to surround the outer wall of the bottom plate 12, effectively preventing the external pollutants from entering the electrostatic chuck through the gap between the protective cover 2 and the bottom plate 12, the second step 22 is provided with the second sealing ring 4, the axis of the second sealing ring 4 is in line with the axis of the upper plate 11, and the top of the second sealing ring 4 abuts against the bottom of the upper plate 11, effectively preventing the external pollutants from entering the electrostatic chuck through the gap between the protective cover 2 and the upper plate 11, and ensuring the cleanliness of the internal environment of the electrostatic chuck.

[0030] In the embodiment, the bottom of the bottom plate 12 is provided with a ring groove accommodating the first sealing ring 3, so as to increase the contact area between the first sealing ring 3 and the bottom plate 12, and further improve the sealing performance between the protective cover 2 and the bottom plate 12, so as to prevent the external pollutants from entering.

[0031] It should be noted that the relative terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between the entities or operations. Moreover, the term "comprise", "include" or any other variant thereof is intended to cover non-exclusive inclusion, so that the process, method, article or equipment including a series of elements not only includes those elements, but also includes other elements not explicitly listed or inherent to such process, method, article or equipment. Without more limitations, the element defined by the statement "comprising a" does not exclude the presence of other identical elements in the process, method, article or equipment including the element.

[0032] The above embodiments are only used to illustrate the technical solutions of the present application, but not to limit it; although the present application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that the technical solutions recorded in the foregoing embodiments can be modified, or some technical features can be replaced by equivalent ones; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the spirit and scope of the technical solutions of the embodiments of the present application.

Claims

1. An electrostatic chuck edge protection mechanism, comprising an upper plate (11) and a bottom plate (12), characterized in that: The bottom of the upper plate (11) is detachably connected to a protective cover (2), which surrounds the outer wall of the bottom plate (12). The top circumferential of the protective cover (2) is provided with several insert blocks (23), and the insert blocks (23) are provided with slots (24). The upper plate (11) is provided with several locking rods (14) that cooperate with the slots (24) so ​​that the locking rods (14) can be inserted into the slots (24) by rotating the protective cover (2).

2. The electrostatic chuck edge protection mechanism as described in claim 1, characterized in that: The upper plate (11) has several slots (13) in the inner circumferential direction. The locking rod (14) is fixed in one side of the slot (13), and a gap is left between the end of the locking rod (14) and the other side wall of the slot (13) for the insertion of the plug (23).

3. The electrostatic chuck edge protection mechanism as described in claim 2, characterized in that: The top of the end of the clamp (14) is provided with a chamfer (15), and the top of the clamp (14) is provided with a groove (16), and the top of both sides of the groove (16) is rounded.

4. An electrostatic chuck edge protection mechanism as described in any one of claims 1-3, characterized in that: The protective cover (2) is provided with a first step (21) and a second step (22). The first step (21) is provided with a first sealing ring (3) to surround the outer wall of the bottom plate (12). The second step (22) is provided with a second sealing ring (4). The axis of the second sealing ring (4) is co-lined with the axis of the upper plate (11), and its top abuts against the bottom of the upper plate (11).

5. The electrostatic chuck edge protection mechanism as described in claim 4, characterized in that: The bottom of the base plate (12) is provided with an annular groove to accommodate the first sealing ring (3) in order to increase the contact area between the first sealing ring (3) and the base plate (12).

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