Telescopic protective tube for ejector pin of electrostatic chuck

Abstract

The utility model discloses an electrostatic chuck thimble telescopic protection tube, which comprises a metal shell, a thimble body, an outer tube sleeve and an inner tube sleeve, the thimble body is arranged inside the metal shell, the top end of the thimble body extends to the outside of the metal shell, and a spring piece is arranged inside the metal shell outside the thimble body. The spring piece is connected with the ejector pin body, the outer wall of the top of the ejector pin body is sleeved with the inner pipe sleeve, the inner pipe sleeve is sleeved with the outer pipe sleeve, mounting holes are formed in the outer wall of the top of the ejector pin body, and threaded holes are formed in the positions, at the mounting holes, of the outer wall of the inner pipe sleeve. And a screw is in threaded connection with the interior of the threaded hole, and one end of the screw extends into the mounting hole. The ejector pin can be protected from being collided and damaged, the service life of the ejector pin is prolonged, and the ejector pin is smooth to extend and retract and is not blocked.

Description

Technical Field

[0001] This utility model relates to the field of electrostatic chuck pin technology, specifically an electrostatic chuck pin telescopic protective tube. Background Technology

[0002] Electrostatic chucks are devices used in semiconductor manufacturing processes to fix and support wafers. They utilize electrostatic adsorption to hold ultra-clean, thin materials, such as silicon wafers, while maintaining good flatness. The working principle of electrostatic chucks is based on electrostatic adsorption. The chuck body generates adsorption force through an electrostatic field, fixing the wafer to the chuck. The pins further support and fix the wafer, ensuring its stability and accuracy during processing. Electrostatic chucks are widely used in wafer handling processes in semiconductor manufacturing, such as etching and cleaning. By precisely controlling the lifting and pressure of the pins, the stability and reliability of the wafer during processing can be ensured.

[0003] The ejector pins of electrostatic chucks are usually exposed and lack protection. They are easily damaged by impacts during the lifting and lowering process, which shortens their service life. Therefore, we propose an electrostatic chuck ejector pin telescopic protective tube. Utility Model Content

[0004] The purpose of this utility model is to provide a telescopic protective tube for electrostatic chuck pins to solve the problems mentioned in the background art.

[0005] To achieve the above objectives, this utility model provides the following technical solution: a telescopic protective tube for an electrostatic chuck pin, comprising a metal shell, a pin body, an outer sleeve, and an inner sleeve. The pin body is disposed inside the metal shell, with its top end extending to the outside of the metal shell. A spring is installed inside the metal shell on the outer side of the pin body, and the spring is connected to the pin body. The inner sleeve is fitted onto the outer wall of the top of the pin body, and the outer sleeve is fitted onto the outside of the inner sleeve. Mounting holes are provided on the outer wall of the top of the pin body, and threaded holes are provided on the outer wall of the inner sleeve at the mounting hole positions. A screw is threaded into the threaded hole, with one end of the screw extending into the mounting hole.

[0006] Preferably, a sealing gasket is fixed at the bottom end of the outer sleeve, and positioning grooves are provided on both sides inside the sealing gasket.

[0007] Preferably, an L-shaped locking block is installed inside the positioning groove via a connecting spring, and one end of the L-shaped locking block extends into a slot on the inner wall of the metal casing to facilitate the fixing of the sealing gasket.

[0008] Preferably, the inner wall of the outer sleeve is provided with a guide groove, and a guide roller is installed on the outer wall of the inner sleeve at the position of the guide groove. The guide roller and the guide groove cooperate with each other to make the inner sleeve extend and retract smoothly.

[0009] Preferably, an annular oil box is installed on the outer wall of the top of the outer sleeve, and an arc-shaped diaphragm is adhered to the top of the annular oil box to facilitate the addition of lubricating oil.

[0010] Preferably, each of the annular oil boxes has a circular hole at its top, and a pressure rod is inserted through the circular hole by a support spring. The bottom end of the pressure rod extends into the interior of the annular oil box and is connected to the arc-shaped diaphragm.

[0011] Preferably, an oil inlet is provided on the outer wall of the top of the annular oil box, and a sealing plug is tightly fitted inside the oil inlet.

[0012] Preferably, the bottom of the annular oil box is connected to the guide groove through an oil drain channel.

[0013] Compared with the prior art, the beneficial effects of this utility model are:

[0014] The inner tube sleeve is fitted over the outside of the ejector pin body. The screw inside the threaded hole is screwed into the mounting hole on the outer wall of the ejector pin body, so that the inner tube sleeve is fixed to the outside of the ejector pin body. During the lifting and lowering of the ejector pin body, the ejector pin body drives the inner tube sleeve to extend and retract inside the outer tube sleeve. The inner tube sleeve drives the guide roller to roll along the guide groove, so that the extension and retraction of the inner tube sleeve is smooth. The outer tube sleeve and the inner tube sleeve protect the ejector pin body, prevent the ejector pin body from being damaged by collision, and extend its service life.

[0015] Pull the sealing plug out of the oil inlet, inject lubricating oil into the annular oil box through the oil inlet, and then press the pressure rod to drive the arc-shaped diaphragm to bend downward. Under the pressure of the arc-shaped diaphragm, the lubricating oil in the annular oil box is squeezed into the space between the inner and outer sleeves through the oil discharge channel to lubricate the inner and outer sleeves, reduce the coefficient of friction, and improve the smoothness of the telescopic protective tube during extension and retraction. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the front cross-sectional structure of this utility model;

[0017] Figure 2 This is a schematic diagram of the main appearance structure of this utility model;

[0018] Figure 3 This is a partially enlarged structural schematic diagram of the present invention;

[0019] Figure 4 For the present utility model Figure 3 Enlarged structural diagram at point A in the middle;

[0020] Figure 5 For the present utility model Figure 3 Enlarged structural diagram at point B.

[0021] In the diagram: 1. Metal outer shell; 2. Spring component; 3. Ejector pin body; 4. Sealing gasket; 5. Outer sleeve; 6. Inner sleeve; 7. Guide groove; 8. Guide roller; 9. Mounting hole; 10. Threaded hole; 11. Screw; 12. Pressure rod; 13. Support spring; 14. Round hole; 15. Annular oil box; 16. Arc-shaped diaphragm; 17. Oil inlet; 18. Sealing plug; 19. Oil drain channel; 20. Positioning groove; 21. Connecting spring; 22. L-shaped locking block; 23. Locking groove. Detailed Implementation

[0022] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Therefore, the following detailed description of the embodiments of this utility model provided in the drawings is not intended to limit the scope of the claimed utility model, but merely to illustrate selected embodiments of the utility model. All other embodiments obtained by those skilled in the art based on the embodiments of this utility model without inventive effort are within the scope of protection of this utility model.

[0023] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present utility model. All other embodiments obtained by those skilled in the art based on the embodiments of the present utility model without creative effort are within the scope of protection of the present utility model.

[0024] Please see Figure 1-5 The present invention provides an embodiment of an electrostatic chuck pin telescopic protective tube, comprising a metal shell 1, a pin body 3, an outer tube sleeve 5, and an inner tube sleeve 6. The pin body 3 is disposed inside the metal shell 1, and the top end of the pin body 3 extends to the outside of the metal shell 1. A spring 2 is installed inside the metal shell 1 outside the pin body 3, and the spring 2 is connected to the pin body 3. The inner tube sleeve 6 is fitted on the outer wall of the top of the pin body 3, and the outer tube sleeve 5 is fitted on the outside of the inner tube sleeve 6.

[0025] Mounting holes 9 are provided on the outer wall of the top of the ejector body 3, and threaded holes 10 are provided on the outer wall of the inner tube sleeve 6 at the mounting hole 9 position. A screw 11 is connected to the threaded hole 10, and one end of the screw 11 extends into the interior of the mounting hole 9.

[0026] Specifically, the inner sleeve 6 is fitted over the outside of the ejector body 3, and the screw 11 inside the threaded hole 10 is screwed into the mounting hole 9 on the outer wall of the ejector body 3, so that the inner sleeve 6 is fixed to the outside of the ejector body 3. During the lifting and lowering of the ejector body 3, the ejector body 3 drives the inner sleeve 6 to extend and retract inside the outer sleeve 5. The inner sleeve 6 drives the guide roller 8 to roll along the guide groove 7, so that the extension and retraction of the inner sleeve 6 is smooth. The outer sleeve 5 and the inner sleeve 6 play a protective role for the ejector body 3, preventing the ejector body 3 from being damaged by collision and extending its service life.

[0027] A sealing gasket 4 is fixed at the bottom of the outer sleeve 5, and positioning grooves 20 are provided on both sides inside the sealing gasket 4.

[0028] An L-shaped locking block 22 is installed inside the positioning groove 20 via a connecting spring 21, and one end of the L-shaped locking block 22 extends into the locking groove 23 on the inner wall of the metal casing 1;

[0029] Specifically, the L-shaped locking block 22 is pushed so that it is locked into the locking groove 23 under the elastic action of the connecting spring 21, thereby fixing the sealing gasket 4 and making it easier to fix the telescopic protective tube to the metal shell 1.

[0030] The inner wall of the outer tube sleeve 5 is provided with guide grooves 7, and the outer wall of the inner tube sleeve 6 at the position of the guide grooves 7 is equipped with guide rollers 8, and the guide rollers 8 and the guide grooves 7 cooperate with each other.

[0031] An annular oil box 15 is installed on the outer wall of the top of the outer tube sleeve 5, and an arc-shaped diaphragm 16 is attached to the top of the annular oil box 15.

[0032] The top of the annular oil box 15 is provided with a round hole 14, and a pressure rod 12 is passed through the inside of the round hole 14 by a support spring 13. The bottom end of the pressure rod 12 extends into the inside of the annular oil box 15 and is connected to the arc-shaped diaphragm 16.

[0033] An oil inlet 17 is provided on the outer wall of the top of the annular oil box 15, and a sealing plug 18 is tightly fitted inside the oil inlet 17.

[0034] The bottom of the annular oil box 15 is connected to the guide groove 7 through the oil drain channel 19;

[0035] Specifically, the sealing plug 18 is pulled out from the oil inlet 17, and lubricating oil is injected into the annular oil box 15 through the oil inlet 17. Then, the pressure rod 12 is pressed to drive the arc-shaped diaphragm 16 to bend downward. Under the pressure of the arc-shaped diaphragm 16, the lubricating oil in the annular oil box 15 is squeezed into the space between the inner sleeve 6 and the outer sleeve 5 through the oil discharge channel 19 to lubricate the inner sleeve 6 and the outer sleeve 5, reduce the coefficient of friction, and improve the smoothness of the telescopic protective tube during extension and retraction.

[0036] In use, according to this embodiment: First, the spring 2 provides elastic support for the ejector body 3. The outer sleeve 5 and the inner sleeve 6 form a telescopic protective tube. Second, the L-shaped locking block 22 is pushed so that it is locked into the locking groove 23 under the elastic action of the connecting spring 21, thus fixing the sealing gasket 4. This facilitates fixing the telescopic protective tube to the metal shell 1. Then, the inner sleeve 6 is fitted over the outside of the ejector body 3, and the screw 11 inside the threaded hole 10 is screwed into the mounting hole 9 on the outer wall of the ejector body 3, so that the inner sleeve 6 is fixed to the outside of the ejector body 3. During the lifting and lowering of the ejector body 3, the ejector body 3 drives the inner sleeve 6 to extend and retract inside the outer sleeve 5. The guide roller 8 makes it roll along the guide groove 7, so that the inner tube sleeve 6 can extend and retract smoothly. The outer tube sleeve 5 and the inner tube sleeve 6 protect the ejector body 3, prevent the ejector body 3 from being damaged by collision, and extend its service life. Then, the sealing plug 18 is pulled out from the oil injection port 17, and lubricating oil is injected into the annular oil box 15 through the oil injection port 17. Then, the pressure rod 12 is pressed to drive the arc-shaped diaphragm 16 to bend downward. Under the pressure of the arc-shaped diaphragm 16, the lubricating oil in the annular oil box 15 is squeezed into the space between the inner tube sleeve 6 and the outer tube sleeve 5 through the oil discharge channel 19 to lubricate the inner tube sleeve 6 and the outer tube sleeve 5, reduce the coefficient of friction, and improve the smoothness of the extension and retraction of the telescopic protective tube.

[0037] Obviously, the embodiments described above are only some embodiments of this utility model, and not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort should fall within the protection scope of this utility model.

Claims

1. A telescopic protective tube for an electrostatic chuck pin, characterized in that, The device includes a metal shell (1), a ejector body (3), an outer sleeve (5), and an inner sleeve (6). The ejector body (3) is located inside the metal shell (1), and the top end of the ejector body (3) extends to the outside of the metal shell (1). A spring (2) is installed inside the metal shell (1) outside the ejector body (3), and the spring (2) is connected to the ejector body (3). The inner sleeve (6) is fitted on the outer wall of the top of the ejector body (3), and the outer sleeve (5) is fitted on the outside of the inner sleeve (6). Mounting holes (9) are provided on the outer wall of the top of the ejector body (3), and a threaded hole (10) is provided on the outer wall of the inner sleeve (6) at the position of the mounting hole (9). A screw (11) is threaded into the threaded hole (10), and one end of the screw (11) extends into the interior of the mounting hole (9).

2. The electrostatic chuck pin telescopic protective tube according to claim 1, characterized in that: The bottom end of the outer sleeve (5) is fixed with a sealing gasket (4), and both sides of the sealing gasket (4) are provided with positioning grooves (20).

3. The electrostatic chuck pin telescopic protective tube according to claim 2, characterized in that: The positioning groove (20) is equipped with an L-shaped locking block (22) by a connecting spring (21), and one end of the L-shaped locking block (22) extends into the locking groove (23) on the inner wall of the metal shell (1).

4. The electrostatic chuck pin telescopic protective tube according to claim 1, characterized in that: The inner wall of the outer sleeve (5) is provided with guide grooves (7), and the outer wall of the inner sleeve (6) at the position of the guide groove (7) is equipped with guide rollers (8), and the guide rollers (8) and the guide grooves (7) cooperate with each other.

5. The electrostatic chuck pin telescopic protective tube according to claim 1, characterized in that: An annular oil box (15) is installed on the outer wall of the top of the outer sleeve (5), and an arc-shaped diaphragm (16) is adhered to the top of the annular oil box (15).

6. The electrostatic chuck pin telescopic protective tube according to claim 5, characterized in that: The top of each annular oil box (15) is provided with a round hole (14), and a pressure rod (12) is inserted through the inside of the round hole (14) by a support spring (13). The bottom end of the pressure rod (12) extends into the inside of the annular oil box (15) and is connected to the arc-shaped diaphragm (16).

7. The electrostatic chuck pin telescopic protective tube according to claim 5, characterized in that: An oil inlet (17) is provided on the outer wall of the top of the annular oil box (15), and a sealing plug (18) is tightly fitted inside the oil inlet (17).

8. The electrostatic chuck pin telescopic protective tube according to claim 5, characterized in that: The bottom of the annular oil box (15) is connected to the guide groove (7) through the oil drain channel (19).

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