Recycling device for precious metal target material machining process

By designing a recycling device for the precious metal sputtering process, the problem of waste of shavings and dust was solved, achieving efficient recycling and utilization of precious metals and reducing resource waste and environmental pollution.

CN224100111UActive Publication Date: 2026-04-10ZHONGKE YANNUO (BEIJING) TECH CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
ZHONGKE YANNUO (BEIJING) TECH CO LTD
Filing Date
2025-05-09
Publication Date
2026-04-10

AI Technical Summary

Technical Problem

The waste of precious metal sputtering targets is serious due to the depletion of debris and dust generated during the processing. In particular, the debris is discharged with the coolant and the dust is dispersed into the air, resulting in a serious waste of precious metal resources.

Method used

Design a recycling device for precious metal target material processing, including a collection pipe, a collection hood, a collection mechanism, a filtration mechanism, and an adjustment mechanism. Through components such as a negative pressure fan, a filter plate, and a servo motor, it can achieve efficient collection and filtration of metal dust and debris.

Benefits of technology

It effectively reduces the waste of precious metals, improves the utilization rate of precious metals, ensures the collection and filtration effect of dust, and reduces environmental pollution.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model is applicable to the technical field of precious metal target material processing, and provides a precious metal target material processing process recovery device which comprises a collecting pipe which is arranged on a processing equipment body and used for collecting metal dust generated in the precious metal target material processing process, a plurality of first hoses are connected to the collecting pipe, and a plurality of second hoses are connected to the collecting pipe. The first hose is connected with a collecting cover; the collecting mechanism is assembled on the processing equipment body and the collecting pipe and is used for collecting metal dust and chippings generated in the processing process of the precious metal target material; and the filtering mechanism is assembled on the processing equipment body and is used for filtering and collecting noble metal chips discharged along with the cooling liquid in the processing process of the noble metal target material. According to the recovery device in the precious metal target machining process, precious metal chippings in different forms in the precious metal target machining process can be recovered, waste of precious metal is effectively reduced, and the utilization rate of the precious metal is increased.
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Description

TECHNICAL FIELD

[0001] The utility model belongs to precious metal target material processing technical field especially relates to a recovery device of precious metal target material processing process. BACKGROUND

[0002] The precious metal target material is the sputtering target material that precious metal such as gold, silver, platinum, rhodium and alloy thereof is raw material, adopts refining, melts forging, calendering processing or powder metallurgy process and is formed, has outstanding physical and chemical characteristics, is widely used in electronic device, medical equipment, aerospace and new energy etc.

[0003] In the process of processing precious metal target material, a lot of chippings and metal dust are often produced, the chippings are discharged with cooling liquid used in processing, and the metal dust is diffused into air, because the cost of precious metal is higher, the waste is more serious. UTILITY MODEL CONTENTS

[0004] The utility model provides a recovery device of precious metal target material processing process, aims at solving the problem of serious waste of chippings produced when processing precious metal target material proposed in above -mentioned background art.

[0005] To solve above -mentioned problem, the utility model is realized in this way, a recovery device of precious metal target material processing process, include: set up on the processing equipment ontology for the metal dust produced in the processing of precious metal target material is collected collection pipe, a plurality of first flexible tube is connected on the collection pipe, the first flexible tube is connected with collection cover;Assembling on the processing equipment ontology and the collection pipe for the metal dust chippings produced in the processing of precious metal target material is collected collection mechanism;Assembling on the processing equipment ontology for the precious metal chippings with cooling liquid discharge in the processing of precious metal target material is filtered and collected filter mechanism;Assembling on the processing equipment ontology and the collection pipe for the collection direction of the collection cover is adjusted adjusting mechanism.

[0006] Preferably, the collection mechanism includes: the installation box that sets up on the processing equipment ontology and the collection filter bag that assembles in the installation box for the metal dust chippings produced in the processing of precious metal target material is collected;Negative pressure fan is installed in one side of the installation box, and the air inlet end of the negative pressure fan is communicated with the installation box;Second flexible tube is set up on the processing equipment ontology, one end of the second flexible tube is communicated with the installation box, and the other end of the second flexible tube is communicated with the collection pipe.

[0007] Preferably, the filtering mechanism comprises a filtering box assembled on the processing equipment body, the filtering box is communicated with the cooling liquid discharge pipe on the processing equipment body, a filtering plate is fixedly installed in the filtering box and used for filtering and collecting large particle precious metal scraps in the cooling liquid, a placing box is assembled on one side of the filtering box, the placing box is communicated with the filtering box, and a filter core used for filtering and collecting small precious metal scraps in the cooling liquid is arranged in the placing box.

[0008] Preferably, the adjusting mechanism comprises a first servo motor fixedly installed on the processing equipment body, a vertical shaft rotatably installed on the processing equipment body, one end of the vertical shaft is fixedly connected with an output shaft of the first servo motor, two mounting shafts rotatably installed on the processing equipment body, two ends of the collecting pipe are fixedly connected with the two mounting shafts respectively, and two first bevel gears are fixedly sleeved on the vertical shaft and one of the mounting shafts respectively, and the two first bevel gears are meshed with each other.

[0009] Preferably, the collecting pipe is provided with a moving mechanism used for driving the collecting cover to move transversely and adjusting a transverse collecting position, the moving mechanism comprises a telescopic rod fixedly installed on the collecting pipe, and a connecting rod fixedly installed on an output shaft of the telescopic rod, and the connecting rod is fixedly connected with the collecting covers.

[0010] Preferably, a placing shaft is rotatably installed on the filtering plate, a stirring frame is fixedly installed on the placing shaft, the stirring frame is used for stirring the large particle metal scraps filtered on the filtering plate, and the filtering box and the placing shaft are provided with a stirring mechanism used for driving the stirring frame to rotate and stirring the large particle metal scraps filtered on the filtering plate.

[0011] Preferably, the stirring mechanism comprises a second servo motor fixedly installed on one side of the filtering box, a rotating shaft rotatably installed on the filtering box, one end of the rotating shaft is fixedly connected with an output shaft of the second servo motor, second bevel gears are fixedly sleeved on the rotating shaft and the placing shaft respectively, and the two second bevel gears are meshed with each other.

[0012] Compared with the related art, the recycling device for precious metal target material processing process has the following beneficial effects:

[0013] Compared with the prior art, the recycling device for precious metal target material processing process can recycle different forms of precious metal scraps in the precious metal target material processing process, effectively reduces the waste of precious metals, and improves the utilization rate of precious metals. BRIEF DESCRIPTION OF DRAWINGS

[0014] Figure 1It is the main view structural schematic drawing of the recycling device of precious metal target material processing process provided by the utility model;

[0015] Figure 2 It is the main view structural schematic drawing of the recycling device of precious metal target material processing process provided by the utility model;

[0016] Figure 3 For Figure 2 It is the enlarged structural schematic drawing of A part shown in the figure;

[0017] Figure 4 For Figure 2 It is the enlarged structural schematic drawing of B part shown in the figure;

[0018] Figure 5 For Figure 2 It is the enlarged structural schematic drawing of C part shown in the figure.

[0019] Fig. 1, processing equipment body; 2, collecting pipe; 3, first hose; 4, collecting cover; 5, installation box; 6, collecting filter bag; 7, negative pressure fan; 8, second hose; 9, filter box; 10, filter plate; 11, placing box; 12, filter core; 13, first servo motor; 14, vertical shaft; 15, mounting shaft; 16, first bevel gear; 17, telescopic rod; 18, connecting rod; 19, placing shaft; 20, material stirring frame; 21, second servo motor; 22, rotating shaft; 23, second bevel gear. DETAILED DESCRIPTION

[0020] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs; the terminology used in the description of the application herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the application; the description and claims of the application as well as the above discussion of the drawings merely suggests specific

[0021] Reference to an "embodiment" in this document means that a particular feature, structure, or characteristic described in connection with the embodiment can be included in at least one embodiment of the application. The appearances of the phrase in various places in the specification are not necessarily all referring to the same embodiment, nor are they necessarily mutually exclusive of one another. As will be apparent to those of ordinary skill in the art, embodiments described herein can be combined with other embodiments.

[0022] The utility model embodiment provides a kind of recovery device of precious metal target material processing process, as shown in Figures 1-5 As shown, the recovery device of precious metal target material processing process includes: be arranged on the processing equipment ontology 1 for collecting the metal dust generated in the precious metal target material processing process and is collected tube 2, the collected tube 2 is connected with multiple first flexible tubes 3, the first flexible tube 3 is connected with collection cover 4;Assembled on the processing equipment ontology 1 and the collected tube 2 for collecting the metal dust debris generated in the precious metal target material processing process and is collected mechanism;Assembled on the processing equipment ontology 1 for filtering and collecting the precious metal debris discharged with coolant in the precious metal target material processing process and is filtering mechanism;Assembled on the processing equipment ontology 1 and the collected tube 2 for adjusting the collection orientation of the collection cover 4 and is adjusting mechanism.

[0023] In the embodiment, the side of the device is provided with a controller of model OMRON E5CC-QX2ASM-800, the whole device can be controlled by the controller, the precious metal target material can be processed by the processing equipment ontology 1, when processing, the upper transparent glass door of processing equipment ontology 1 is closed, the collection cover 4 is made into negative pressure by the controller starting collection mechanism, so that the precious metal dust debris generated when processing precious metal target material can be collected and processed, in the process of collection, the collection orientation of collection cover 4 can be adjusted by the controller starting adjusting mechanism, so that collection cover 4 can more accurately collect the metal dust generated in different positions, increase the area of metal dust collection, to improve the effect of metal dust collection, at the same time, the precious metal debris discharged with coolant in the precious metal target material processing process can be filtered and collected by the collection mechanism, the effective recovery of debris discharged with coolant is realized, different forms of precious metal debris in the precious metal target material processing process can be recycled by the whole device, effectively reduce the waste of precious metal, improve the utilization rate of precious metal.

[0024] The utility model discloses further preferable embodiment, the collecting mechanism includes: the installation box 5 of setting on the processing equipment body 1 and the assembly in the installation box 5 are used for collecting the metal dust scrap of precious metal target material processing in the process, and the collecting filter bag 6 of the metal dust scrap, install the negative pressure fan 7 of installation box 5 one side, the air inlet end of negative pressure fan 7 with installation box 5 is linked together, set up on the processing equipment body 1's second hose 8, one end of second hose 8 with installation box 5 is linked together, the other end of second hose 8 with collection pipe 2 is linked together.

[0025] In the embodiment, when using the collecting mechanism, the negative pressure fan 7 is started through the controller, a negative pressure environment is formed in the installation box 5, the stable circulation of airflow in the recycling device is ensured, the collection pipe 2 and the installation box 5 are connected through the second hose 8, the airflow containing metal dust can smoothly enter the installation box 5 from the collecting cover 4 on the collection pipe 2, and the airflow is discharged after being treated by the collecting filter bag 6, so that the normal operation of the recycling device is ensured, and the dust scrap is intercepted by the collecting filter bag 6, so that the dust scrap is separated and collected.

[0026] In the further preferable embodiment of the utility model, the filtering mechanism includes: a filter box 9 assembled on the processing equipment body 1, the filter box 9 and a cooling liquid discharge pipe on the processing equipment body 1 are in communication; a filter plate 10 fixedly installed in the filter box 9 for filtering and collecting large particle precious metal scraps in the cooling liquid; a placing box 11 assembled on one side of the filter box 9, the placing box 11 and the filter box 9 are in communication, and a filter core 12 for filtering and collecting small precious metal scraps in the cooling liquid is arranged in the placing box 11.

[0027] In the embodiment, the placing box 11 and the corresponding material pumping pump are in communication, so that the cooling liquid can smoothly enter the placing box 11 for filtering treatment, the filter box 9 and the cooling liquid discharge pipe on the processing equipment body 1 are in communication, the precious metal scraps and the cooling liquid mixture discharged with the cooling liquid during the processing process can flow into the filter box 9 through the cooling liquid discharge pipe, when the cooling liquid mixture containing large particle precious metal scraps enters the filter box 9, the filter plate 10 can intercept the large particle scraps, the primary precious metal recovery is realized, the cooling liquid after impurity removal enters the placing box 11, and the filter core 12 is used for further filtering and collecting the small precious metal scraps in the cooling liquid after being primarily filtered by the filter plate 10, so that the precious metal can be more comprehensively recovered.

[0028] The adjusting mechanism comprises: a first servo motor 13 fixedly installed on the machining equipment body 1; a vertical shaft 14 rotatably installed on the machining equipment body 1, one end of the vertical shaft 14 is fixedly connected with an output shaft of the first servo motor 13; two installation shafts 15 rotatably installed on the machining equipment body 1, and two installation shafts 15 are fixedly connected with two ends of the collecting pipe 2 respectively; two first bevel gears 16 fixedly sleeved on the vertical shaft 14 and one of the installation shafts 15, and the two first bevel gears 16 are meshed with each other.

[0029] In the embodiment, when the adjusting mechanism is used, the first servo motor 13 is started by the controller to be positive or negative from zero to ninety degrees, and the transmission relationship among the vertical shaft 14, the installation shaft 15 and the first bevel gears 16 meshed with each other can accurately control the rotation of the collecting pipe 2, so as to realize the accurate adjustment of the collection direction of the collecting cover 4, which helps the collecting cover 4 to more accurately collect the metal dust generated at different positions in the machining process and improves the collection efficiency.

[0030] In the further preferred embodiment of the utility model, the collecting pipe 2 is provided with a moving mechanism for driving the collecting cover 4 to move horizontally and adjusting the horizontal collection position, the moving mechanism comprises: a telescopic rod 17 fixedly installed on the collecting pipe 2; a connecting rod 18 fixedly installed on an output shaft of the telescopic rod 17, and the connecting rod 18 is fixedly connected with a plurality of collecting covers 4.

[0031] In the embodiment, when the metal dust is collected, the telescopic rod 17 is started to extend or retract by the controller, and the collecting cover 4 can be driven to move horizontally through the transmission of the connecting rod 18, so as to flexibly adjust the horizontal collection position of the collecting cover 4, and in the actual machining process, the generation position of the metal dust may change in the horizontal direction, and the moving mechanism can make the collecting cover 4 better adapt to the change and improve the collection effect of the metal dust.

[0032] In the further preferred embodiment of the utility model, a placing shaft 19 is rotatably installed on the filter plate 10, a stirring frame 20 is fixedly installed on the placing shaft 19, the stirring frame 20 is used for stirring the large particle metal scraps filtered on the filter plate 10, and the filter box 9 and the placing shaft 19 are provided with a stirring mechanism for driving the stirring frame 20 to rotate and stir the large particle metal scraps filtered on the filter plate 10.

[0033] In the embodiment, during the filtering process, large metal scraps are prone to accumulate on the filter plate 10, causing the filter holes of the filter plate 10 to be blocked, affecting the flow of the cooling liquid and the filtering effect, the poking rack 20 is driven to rotate by the poking mechanism, so that the large metal scraps accumulated on the filter plate 10 can be poked away in time, the filtering performance of the filter plate 10 is ensured, the cooling liquid can flow smoothly through the filter plate 10, and the filtering efficiency is improved.

[0034] In a further preferred embodiment of the utility model, the poking mechanism comprises: a second servo motor 21 fixedly installed on one side of the outer wall of the filter box 9; a rotating shaft 22 rotatably installed on the filter box 9, one end of the rotating shaft 22 is fixedly connected with the output shaft of the second servo motor 21, and a second bevel gear 23 is fixedly sleeved on the rotating shaft 22 and the placing shaft 19, and the two second bevel gears 23 are in meshing engagement.

[0035] In the embodiment, when the poking mechanism is used, the second servo motor 21 is started to provide power through the controller, and the rotating shaft 22, the second bevel gears 23 in meshing engagement and the transmission relationship of the placing shaft 19 can accurately drive the poking rack 20 to rotate, effectively poking the large metal scraps on the filter plate 10, and ensuring the stable filtering performance of the filter plate 10.

[0036] To sum up, compared with the related art, through the device, different forms of precious metal scraps in the precious metal target material processing process can be recycled, the waste of precious metals is effectively reduced, and the utilization rate of precious metals is improved.

[0037] In several embodiments provided in the application, it should be understood that the disclosed device can be implemented in other ways.

[0038] The above embodiments are only used to illustrate the technical solutions of the utility model, and not to limit the protection scope of the utility model. Obviously, the described embodiments are only some of the embodiments of the utility model, not all the embodiments. Based on these embodiments, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the utility model. Although the utility model has been described in detail with reference to the above embodiments, those skilled in the art can still combine, delete or make other adjustments to the features in the embodiments of the utility model according to the circumstances without creative labor, so as to obtain different other technical solutions which do not deviate from the concept of the utility model in essence, and these technical solutions also belong to the scope of protection of the utility model.

Claims

1. A recycling device for precious metal sputtering targets, characterized in that, include: A collection pipe is installed on the main body of the processing equipment to collect metal dust generated during the processing of precious metal targets. Multiple first hoses are connected to the collection pipe, and collection covers are connected to the first hoses. A collection mechanism assembled on the processing equipment body and the collection pipe for collecting metal dust and debris generated during the processing of precious metal targets; A filtration mechanism mounted on the main body of the processing equipment for filtering and collecting precious metal debris discharged with coolant during the processing of precious metal targets. An adjustment mechanism, mounted on the processing equipment body and the collection pipe, for adjusting the collection orientation of the collection hood.

2. The recycling device for the precious metal sputtering process as described in claim 1, characterized in that, The collection mechanism includes: The mounting box is installed on the main body of the processing equipment, and the collection filter bag is assembled in the mounting box for collecting metal dust and debris generated during the processing of precious metal targets. A negative pressure fan is installed on one side of the mounting box, and the air inlet of the negative pressure fan is connected to the mounting box; A second hose is installed on the main body of the processing equipment. One end of the second hose is connected to the mounting box, and the other end of the second hose is connected to the collection pipe.

3. The recycling device for the precious metal sputtering process as described in claim 1, characterized in that, The filtration mechanism includes: A filter box is mounted on the processing equipment body, and the filter box is connected to the coolant discharge pipe on the processing equipment body; A filter plate fixedly installed inside the filter box for filtering and collecting large particles of precious metal debris in the coolant; A placement box is mounted on one side of the filter box, and the placement box is connected to the filter box. The placement box is equipped with a filter element for filtering and collecting fine precious metal debris in the coolant.

4. The recycling device for the precious metal sputtering process as described in claim 1, characterized in that, The adjustment mechanism includes: A first servo motor is fixedly installed on the body of the processing equipment; A vertical shaft is rotatably mounted on the body of the processing equipment, and one end of the vertical shaft is fixedly connected to the output shaft of the first servo motor. Two mounting shafts are rotatably mounted on the body of the processing equipment, and the two mounting shafts are respectively fixedly connected to both ends of the collecting pipe; Two first bevel gears are respectively fixedly sleeved on the vertical shaft and one of the mounting shafts, and the two first bevel gears mesh with each other.

5. The recycling device for the precious metal sputtering process as described in claim 1, characterized in that, The collection tube is equipped with a moving mechanism for driving the collection cover to move laterally and adjusting the lateral collection position. The moving mechanism includes: A telescopic rod fixedly installed on the collection pipe; A connecting rod is fixedly installed on the output shaft of the telescopic rod, and the connecting rod is fixedly connected to a plurality of the collecting covers.

6. The recycling device for the precious metal sputtering process as described in claim 3, characterized in that, A placement shaft is rotatably mounted on the filter plate, and a material-dispensing frame is fixedly mounted on the placement shaft. The material-dispensing frame is used to dispense large metal particles filtered on the filter plate. The filter box and the placement shaft are provided with a material-dispensing mechanism for driving the material-dispensing frame to rotate and dispensing the large metal particles filtered on the filter plate.

7. The recycling device for the precious metal sputtering process as described in claim 6, characterized in that, The feeding mechanism includes: A second servo motor is fixedly installed on one side of the outer wall of the filter box; Rotate the shaft mounted on the filter box. One end of the shaft is fixedly connected to the output shaft of the second servo motor. Both the shaft and the placement shaft are fixedly fitted with second bevel gears, and the two second bevel gears mesh with each other.