Welding tool for semiconductor cooling block type circular ring accessory

Abstract

The utility model discloses a welding tool for a semiconductor cooling block type circular ring accessory. Comprising a connecting disc, a positioning piece detachably arranged on the connecting disc, a pressing cylinder detachably arranged on the side, away from the positioning piece, of an accessory, a pressing block detachably arranged on the side, away from the pressing cylinder, of the pressing cylinder, and a locking piece detachably arranged on the side, away from the pressing cylinder, of the pressing block. The positioning piece comprises a positioning disc detachably arranged on the connecting disc, a positioning shaft is fixedly arranged on the side, opposite to the accessory, of the surface of the positioning disc, the positioning shaft penetrates through the accessory, a pressing cylinder, a pressing block and a locking piece, and the locking piece is detachably connected with the upper end of the positioning shaft. The welding tool is high in welding precision and small in welding deformation.

Description

TECHNICAL FIELD

[0001] The utility model relates to welding frock technical field, concretely relates to a kind of welding frock of semiconductor cooling block class ring fitting. BACKGROUND

[0002] In the wafer processing of semiconductor, specific cooling system and technology are used to reduce and control wafer temperature, to ensure the stability of process and the optimization of product quality. To ensure the optimization of cooling effect, designing some unique cooling system is the most common method, but the manufacturing difficulty of equipment components is caused.

[0003] Semiconductor cooling block class ring fitting includes base with ring, boss welded on upside of ring, boss and ring form weld, such fitting has high requirement for clamping, clamping difficulty is big, and deformation is big, and the difficulty of controlling the dimensional accuracy of parts is big. Existing technology often uses clamping jaw to clamp, but coaxiality cannot be maintained during rotary welding, welding runout problem is serious, leading to poor welding precision and serious welding deformation. Therefore, a new technical scheme is needed to solve at least one of the above technical problems. SUMMARY

[0004] The utility model aims at providing a kind of welding frock of semiconductor cooling block class ring fitting, and assembly is simple, welding precision is high, and welding deformation is small.

[0005] In order to realize the above technical purpose, reach the above technical requirement, the technical scheme that the utility model adopts is: a kind of welding frock of semiconductor cooling block class ring fitting, it is characterized in that, including connecting disc, the positioning piece that can be detachably set in the connecting disc, the compression cylinder that can be detachably set in the side of fitting away from the positioning piece, the compression block that can be detachably set in the side of compression cylinder away from the compression cylinder, the locking piece that can be detachably set in the side of compression block away from the compression cylinder, the positioning piece includes the positioning disc that can be detachably set in the connecting disc, the positioning disc is fixedly provided with positioning shaft on the side facing the fitting, the positioning shaft passes through the fitting, compression cylinder, compression block and locking piece, the locking piece is detachably connected with the upper end of positioning shaft.

[0006] As preferred technical scheme, the connecting disc center is provided with counterbore, and the positioning disc is located in the counterbore.

[0007] As preferred technical scheme, the positioning shaft is stepped shaft structure.

[0008] As preferred technical scheme, the locking piece is nut, the nut is hexagonal or quadrilateral, the upper end of positioning shaft is provided with thread, and the nut is screw-connected with the upper end of positioning shaft.

[0009] Preferably, the pressing block is in the shape of a disc or a square, and a circular hole is arranged in the center of the pressing block and penetrates the pressing block in the axial direction.

[0010] Preferably, the thickness of the pressing block is in the range of 10mm-20mm.

[0011] The present application has the following advantages:

[0012] 1) The connecting disc is installed on a welding work platform, the positioning shaft penetrates the fittings to position the fittings coaxially, after the nuts are tightened, the pressing cylinder presses the fittings, and the pressing block presses the pressing cylinder, so that the fittings have small jumping during the welding process, are firmly clamped, the coaxiality is ensured, the assembly is simple, the welding precision is high, and the welding deformation is small.

[0013] 2) The counterbore limits the positioning disc, and the coaxiality is further ensured.

[0014] 3) The stepped shaft cooperates with the stepped hole on the base to limit the base;

[0015] 4) The nuts are convenient to install and disassemble. BRIEF DESCRIPTION OF DRAWINGS

[0016] Figure 1 is a structural diagram of a welding tool provided by an embodiment of the present application;

[0017] In Figure 1 , 1, connecting disc; 101, counterbore; 2, positioning disc; 3, positioning shaft; 4, pressing cylinder; 5, pressing block; 6, locking piece; 7, base; 8, circular ring; 9, boss; 10, round edge. DETAILED DESCRIPTION

[0018] The present application will be further described below with reference to the drawings.

[0019] In the drawings of the embodiments of the present application, the same or similar reference numerals correspond to the same or similar components; in the description of the present application, it should be understood that, if the terms "head", "tail", "top", "bottom", "left", "right", "front", "back", "inner", "outer" and the like indicate the orientation or positional relationship shown in the drawings, and are only used for the convenience of describing the present application, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, therefore, the terms describing the positional relationship in the drawings are used only for exemplary description, and cannot be understood as a limitation on the present patent, for those skilled in the art, the specific meanings of the above terms can be understood according to the specific circumstances.

[0020] Please refer to Figure 1The utility model discloses a kind of welding toolings of semiconductor cooling block class ring 8 accessories, including connecting disc 1, detachably set in the locating piece of the connecting disc 1, the compression cylinder 4 of separable setting on the side of accessory away from the locating piece, the compression block 5 of separable setting on the side of compression cylinder away from the compression cylinder 4, the locking piece 6 of separable setting on the side of compression block 5 away from the compression cylinder 4, the locating piece includes the locating disc 2 of detachably setting in the connecting disc 1, locating disc 2 is fixedly provided with locating shaft 3 on the side of accessory, and locating shaft 3 passes through the accessory, compression cylinder 4, compression block 5 and locking piece 6, locking piece 6 is detachably connected on the upper end of locating shaft 3, connecting disc 1, locating shaft 3, accessory, compression cylinder 4 and compression block 5 are coaxially arranged, connecting disc 1 is mounted to welding work platform, and rotary welding is carried out, locating shaft 3 passes through accessory and carries out coaxial positioning to accessory, after tightening nut, compression cylinder 4 compresses accessory, and compression block 5 compresses compression cylinder 4, so that accessory is small in jumping during welding process, clamping is firm, while guaranteeing coaxial degree, assembly is simple, welding precision is high, and welding deformation is small.

[0021] As Figure 1 Shown, the connecting disc 1 center is provided with counterbore 101, and the locating disc 2 is located in the counterbore 101, and the counterbore 101 positions the locating disc 2, to further improve coaxiality, and the connecting disc 1 is provided with a plurality of threaded holes, and is mounted to the welding work platform by bolt.

[0022] As Figure 1 Shown, the locating shaft 3 is stepped shaft structure, and the semiconductor cooling block class ring 8 accessory includes base 7 with ring 8, boss 9 welded on the upper side of ring 8, and round edge 10 is arranged on the lower side of boss 9, and the center of base 7 is provided with stepped hole, and the stepped shaft is matched with the stepped hole to guarantee coaxiality, and the compression cylinder 4 is hollow structure, and the compression cylinder 4 can avoid boss 9 and compress round edge 10.

[0023] As Figure 1 Shown, the locking piece 6 is nut, the nut is hexagonal or quadrilateral, the upper end of the locating shaft 3 is provided with screw thread, and the nut is screw-connected with the upper end of the locating shaft 3, so that installation and dismounting are convenient.

[0024] As Figure 1 Shown, the shape of the compression block 5 is disc-shaped or square, the center of the compression block 5 is provided with a circular hole penetrating in axial direction, further, the thickness of the compression block 5 is in the range of 10mm-20mm, and the thickness less than 10mm affects compression effect, and the thickness greater than 20mm needs to lengthen the locating shaft 3, and the overall cost is high.

[0025] As Figure 1As shown, a preferred embodiment of the utility model provides a kind of specific assembly steps of semiconductor cooling block class ring 8 accessory welding tool as follows:

[0026] Step 1, assemble positioning disc 2 with connecting disc 1;

[0027] Step 2, assemble accessory with positioning shaft 3;

[0028] Step 3, assemble pressing cylinder 4;

[0029] Step 4, assemble pressing block 5;

[0030] Step 5, assemble nut and tighten nut.

[0031] After assembly, connecting disc 1 is installed to welding work platform, then the round edge 10 of boss 9 and ring 8 are welded, and the round runout tolerance at weld is less than or equal to 0.1mm, so that welding deformation is small, and welding precision is high.

[0032] The above embodiments are merely described for clearly illustrating the utility model, and are not limited to the implementation mode, and for the person skilled in the art, other different forms of changes or variations can be made on the basis of the above description, which need not and cannot be exhausted for all implementation modes, and the obvious changes or variations derived therefrom are still within the protection scope of the utility model.

Claims

1. A welding fixture for a semiconductor cold slug toroid fitting, characterized by, The utility model discloses a connecting disc, detachable positioning piece arranged on the connecting disc, compression cylinder detachably arranged on the side of the accessory away from the positioning piece, compression block detachably arranged on the side of the compression cylinder away from the compression cylinder, locking piece detachably arranged on the side of the compression block away from the compression cylinder, the positioning piece includes the positioning disc detachable arranged on the connecting disc, and the positioning disc is fixedly provided with the positioning shaft on the side facing the accessory, and the positioning shaft passes through the accessory, compression cylinder, compression block and locking piece, and the locking piece is detachably connected with the upper end of the positioning shaft.

2. The welding tool for a semiconductor cooling block ring-shaped joint according to claim 1, wherein The connecting disc is provided with a counterbore in the center, and the positioning disc is located in the counterbore.

3. The welding tool for a semiconductor cold slug ring-shaped ring assembly according to claim 1, wherein The positioning shaft is a stepped shaft structure.

4. The welding tool for a semiconductor cold slug ring-shaped ring assembly according to claim 1, wherein The locking piece is a nut, the nut is hexagonal or quadrangular, the upper end of the positioning shaft is provided with a thread, and the nut is threadedly connected with the upper end of the positioning shaft.

5. The welding fixture for a semiconductor cold slug toroid fitting according to claim 1, wherein The compression block is disc-shaped or square-shaped, and the center of the compression block is provided with a circular hole penetrating through the compression block in the axial direction.

6. The welding fixture for a semiconductor cold slug toroid fitting according to claim 1, wherein The thickness of the compression block is in the range of 10mm-20mm.

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