Drainage tank and wafer thinning machine

Abstract

The utility model provides a drainage box and a wafer thinning machine, and relates to the technical field of thinning machines. The lower water tank is arranged on the machine table, and a first opening is formed in the side, away from the machine table, of the lower water tank; the upper mechanism comprises a rear water tank and a front water tank, the rear water tank and the front water tank are sequentially and detachably connected to the side, away from the machine table, of the lower water tank in the H direction, and the front water tank is detachably connected with the rear water tank. The lower water tank, the rear water tank and the front water tank are communicated with one another, and an openable door body is arranged on the upper end face of the front water tank. According to the drainage box and the wafer thinning machine, the disassembly and assembly workload during maintenance of parts on a machine table can be reduced, the maintenance convenience is improved, and thus the maintenance efficiency is improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to thinning machine technical field especially relates to a drainage tank and wafer thinning machine. BACKGROUND

[0002] Thinning machine is the common equipment of thinning processing to wafer, and the cooling water will be used to cool the product and the grinding tool during the working process of the thinning machine, so the drainage tank for discharging the cooling liquid is installed on the thinning machine correspondingly.

[0003] The existing drainage tank is installed on the machine table, and if the machine table parts such as the main shaft and the air bearing need to be repaired and replaced during the later working process of the thinning machine, the water tank, the frame, the door sheet metal and other parts need to be removed first, the dismounting work is heavy, the dismounting process is troublesome, and the maintenance efficiency of the machine table is low. UTILITY MODEL CONTENTS

[0004] The utility model discloses a kind of drainage tank and wafer thinning machine, the drainage tank and wafer thinning machine can reduce the dismounting work quantity when machine table part is maintained, improve maintenance convenience, to improve maintenance efficiency.

[0005] To achieve this purpose, the utility model adopts the following technical scheme:

[0006] Drainage tank is set on machine table, comprising:

[0007] Lower water tank is set on the machine table, and the side, away from the machine table, of the lower water tank is provided with a first opening;

[0008] Upper mechanism includes rear water tank and front water tank, the rear water tank and the front water tank are sequentially detachably connected to the side, away from the machine table, of the lower water tank along H direction, and the front water tank is detachably connected with the rear water tank.

[0009] The lower water tank, the rear water tank and the front water tank are all communicated with each other, and the upper end face of the front water tank is provided with a door body that can be opened and closed.

[0010] As a further technical scheme, the upper mechanism further includes at least one opening and closing connecting piece, and the side, close to the rear water tank, of the door body is rotatably connected to the upper end face through the opening and closing connecting piece.

[0011] As a further technical scheme, the upper mechanism further includes an auxiliary compression assembly, which is arranged on the upper end face corresponding to the door body and is arranged in a staggered manner with the opening and closing connecting piece.

[0012] The auxiliary compression assembly includes an auxiliary base, a door body compression rod and a U-shaped compression piece, and the bottom of the U-shaped compression piece is rotatably provided with an auxiliary compression rod.

[0013] The auxiliary base is fixedly arranged on the upper end surface, the door body pressing rod is rotationally connected to one side of the auxiliary base away from the upper end surface, and the end of the U-shaped pressing piece is rotationally connected to the auxiliary base.

[0014] As a further technical solution, the auxiliary pressing assembly further comprises a fastening screw, the fastening screw is threadedly connected to one end of the door body pressing rod away from the auxiliary base, and the axis of the fastening screw is arranged perpendicularly to the upper end surface.

[0015] As a further technical solution, the upper mechanism further comprises a detection assembly and a prompt element, the detection assembly is arranged on the front water tank corresponding to the door body, and the detection assembly is used for sensing the opening and closing state of the door body and is communicatively connected to the prompt element.

[0016] As a further technical solution, the upper end surface is inclined towards the front water tank along the H direction.

[0017] And / or, the door body is arranged as a transparent door plate.

[0018] As a further technical solution, the upper mechanism further comprises a plurality of sealing rings, and the rear water tank is provided with a plurality of air exhaust through holes allowing the air tank exhaust pipe to pass through on the outer wall thereof away from the front water tank.

[0019] The plurality of sealing rings are arranged on the outer wall of the rear water tank away from the front water tank in one-to-one correspondence with the plurality of air exhaust through holes.

[0020] As a further technical solution, the inner side of the bottom wall of the lower water tank is arranged as an inclined surface, the lower water tank is provided with a drain pipe communicating with the inside of the lower water tank on the bottom wall thereof, and the communication port of the drain pipe is arranged at the lowest position of the inner side of the bottom wall of the lower water tank.

[0021] As a further technical solution, the two side walls of the lower water tank arranged opposite to each other along the F direction are both provided with a water tank connecting plate capable of being connected to the machine table.

[0022] The wafer thinning machine comprises a machine table and a drain tank, and the bottom wall of a lower water tank in the drain tank is connected to the machine table.

[0023] Compared with the prior art, the drain tank and the wafer thinning machine provided by the present application have the following technical advantages:

[0024] The upper end face of the front water tank is provided with an openable door body, the front water tank and the rear water tank are detachably connected to the side of the lower water tank away from the machine table, and the front water tank is detachably connected to the rear water tank; therefore, when the parts on the machine table need to be disassembled, replaced and maintained, the door body is opened, or the front water tank is directly disassembled from the rear water tank and the lower water tank, so that the machine table can be disassembled, replaced and maintained. The entire disassembly, replacement and maintenance process does not need to disassemble the entire drainage tank from the machine table, only needs to open the door body or disassemble the front water tank, thereby reducing the disassembly workload when the parts on the machine table are maintained, improving the convenience during disassembly and maintenance, and improving the disassembly and maintenance efficiency. BRIEF DESCRIPTION OF DRAWINGS

[0025] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings needed in the description of the embodiments of the present application will be briefly introduced. Obviously, the drawings in the following description are only some embodiments of the present application, and other drawings can be obtained by those skilled in the art without creative labor on the basis of the contents of the embodiments of the present application and the drawings.

[0026] Figure 1 is a front view of the drainage tank provided by the embodiments of the present application;

[0027] Figure 2 is Figure 1 is an enlarged view of part A in FIG.

[0028] Figure 3 is a side view of the drainage tank provided by the embodiments of the present application;

[0029] Figure 4 is a structural schematic view of the drainage tank provided by the embodiments of the present application;

[0030] Figure 5 is Figure 4 is an enlarged view of part B in FIG.

[0031] Figure 6 is a partial structural sectional view of the drainage tank provided by the embodiments of the present application.

[0032] In the drawings:

[0033] 100, lower water tank; 110, drainage pipe; 120, water tank connecting plate;

[0034] 200, upper mechanism; 210, rear water tank; 220, front water tank; 221, upper end face; 222, door body; 2221, opening and closing handle; 230, opening and closing connecting piece; 240, pressing assembly; 241, auxiliary base; 242, door body pressing rod; 243, U-shaped pressing piece; 2431, auxiliary pressing rod; 2432, auxiliary handle; 244, fastening screw; 245, fastening nut; 250, detection assembly; 251, detection plate; 252, inductor; 253, reset piece; 254, reset auxiliary rod. DETAILED DESCRIPTION

[0035] Before any embodiments of the application are explained in detail, it is to be understood that the application is not limited in its application to the details of construction and the arrangement of components set forth in the following description or illustrated in the above-described drawings.

[0036] In this application, the terms "including", "containing", "having" or any other similar words are intended to cover a non-exclusive inclusion, so that a process, method, article or device including a series of elements does not only include those elements, but also includes other elements not explicitly listed, or further includes elements inherent to such a process, method, article or device. Without more limitations, the element defined by the phrase "including a" does not exclude the presence of other identical elements in the process, method, article or device including the element.

[0037] In this application, the term "and / or", is a description of the association relationship between the associated objects, which means that there can be three kinds of relationships. For example, A and / or B, can represent the following three cases: A exists alone, A and B exist together, B exists alone. In addition, the character " / " in this application generally represents a "and / or" relationship between the front and rear associated objects.

[0038] In this application, the terms "connection", "combination", "coupling", "installation" can be direct connection, combination, coupling or installation, or indirect connection, combination, coupling or installation. Among them, for example, direct connection refers to the connection of two parts or components without the need for an intermediate part, and indirect connection refers to the connection of two parts or components with at least one intermediate part. In addition, "connection" and "coupling" are not limited to physical or mechanical connection or coupling, and can include electrical connection or coupling.

[0039] In this application, those of ordinary skill in the art will understand that the relative terms used in connection with a quantity or a condition (for example, "about", "approximately", "substantially", etc.) include the stated value and have the meaning indicated by the context. For example, the relative terms at least include the degree of error associated with the measurement of a particular value, the tolerance caused by manufacturing, assembly, use, etc. associated with a particular value. Such terms should also be considered to disclose the range defined by the absolute values of the two endpoints. The relative terms can refer to the addition or subtraction of a certain percentage (for example, 1%, 5%, 10% or more) of the indicated value. The numerical value without the relative term should also be disclosed as a specific value with a tolerance. In addition, "substantially" when expressing the relative angular positional relationship (for example, substantially parallel, substantially perpendicular), can refer to the addition or subtraction of a certain degree (for example, 1 degree, 5 degrees, 10 degrees or more) based on the indicated angle.

[0040] In this application, those of ordinary skill in the art will understand that the function performed by a component can be performed by one component, multiple components, one part, or multiple parts. Similarly, the function performed by a part can also be performed by one part, a component, or a combination of multiple parts.

[0041] In this application, the terms "upper", "lower", "left", "right", "front", "back" and the like are described in the orientation and positional relationship shown in the drawings, and should not be understood as limiting the embodiments of the present application. In addition, it is also understood in the context that when referring to one element connected to another element "on" or "under", it can not only be directly connected to another element "on" or "under", but also indirectly connected to another element "on" or "under" through an intermediate element. It should also be understood that the terms "upper", "lower", "left", "right", "front", "back" and the like not only represent the positive direction, but also can be understood as the side direction. For example, the lower side can include the directly below, the left below, the right below, the front below and the back below, etc.

[0042] In combination Figures 1 to 6 As shown, the drainage tank provided by the embodiment can reduce the disassembly workload when repairing the parts on the machine table, improve the convenience of repair, and thus improve the repair efficiency. Specifically, the drainage tank includes a lower tank 100 and an upper mechanism 200: the lower tank 100 is arranged on the machine table, and the side of the lower tank 100 away from the machine table is provided with a first opening; the upper mechanism 200 includes a rear tank 210 and a front tank 220, the rear tank 210 and the front tank 220 are sequentially detachably connected to the side of the lower tank 100 away from the machine table along the H direction, and the front tank 220 is detachably connected with the rear tank 210; the lower tank 100, the rear tank 210 and the front tank 220 are all in communication with each other, and the upper end surface 221 of the front tank 220 is provided with an openable and closable door body 222.

[0043] The front water tank 220 and the rear water tank 210 are detachably connected to the side, away from the machine table, of the lower water tank 100, and the front water tank 220 is detachably connected to the rear water tank 210. Therefore, when the parts on the machine table need to be disassembled, replaced and repaired, the door body 222 is opened, or the front water tank 220 is directly disassembled from the rear water tank 210 and the lower water tank 100, so that the machine table can be disassembled, replaced and repaired. The entire disassembly, replacement and repair process does not need to disassemble the entire drainage tank from the machine table, but only needs to open the door body 222 or disassemble the front water tank 220, thereby reducing the disassembly workload when the parts on the machine table are repaired, improving the convenience during disassembly, replacement and repair, and improving the disassembly, replacement and repair efficiency. When the rear water tank 210 and the front water tank 220 are detachably connected to the side, away from the machine table, of the lower water tank 100, the lower water tank 100 is in communication with the rear water tank 210 and the front water tank 220 through the first opening.

[0044] In addition, in the embodiment, in order to improve the convenience when the door body 222 is opened and closed, the door body 222 is provided with an opening and closing handle 2221. The specific form of the number of opening and closing handles 2221 is adaptively set according to actual needs, referring to the prior art, which is not limited here.

[0045] In the embodiment, the front water tank 220 and the rear water tank 210 are detachably connected to the side, away from the machine table, of the lower water tank 100 by means of threaded connectors, and the front water tank 220 is detachably connected to the rear water tank 210 by means of threaded connectors. Specifically, the side of the front water tank 220 close to the rear water tank 210 is provided with a first skirt, the side of the front water tank 220 close to the lower water tank 100 is provided with a second skirt, the side of the rear water tank 210 close to the front water tank 220 is provided with a third skirt, the side of the rear water tank 210 close to the lower water tank 100 is provided with a fourth skirt, and the side of the lower water tank 100 away from the machine table is provided with a fifth skirt; the first skirt is detachably connected to the third skirt by means of a plurality of threaded connectors, the second skirt and the fourth skirt are both detachably connected to the fifth skirt by means of a plurality of threaded connectors, and in order to improve the sealing performance of the drainage tank, elastic sealing elements (not shown in the figure) are arranged between the first skirt and the third skirt, and between the second skirt and the fourth skirt and the fifth skirt. The threaded connectors are set according to the prior art, which will not be repeated here.

[0046] For example, one door body 222 is arranged on the upper end surface 221. Specifically, the upper mechanism 200 further comprises at least one opening and closing connector 230, and the side of the door body 222 close to the rear water tank 210 is rotatably connected to the upper end surface 221 by means of the opening and closing connector 230.

[0047] In the embodiment, the upper end surface 221 is provided with a maintenance opening (not shown in the figure), and the opening and closing connector 230 is provided with two, which are arranged on the upper end surface 221 corresponding to the maintenance opening and along the direction in which the door body 222 is opened and closed.Figure 1 The two opening and closing connectors 230 are arranged at intervals in the F direction and are connected to the door body 222 on the side close to the rear water tank 210, so that the door body 222 can be arranged on the upper end surface 221 in an open or closed manner. In this way, when the parts on the machine table need to be disassembled, replaced and repaired, the door body 222 is turned open in the direction close to the rear water tank 210, which facilitates the disassembly, replacement and repair of the parts on the machine table, avoids interference of the door body 222 with the view of the repairer, ensures the disassembly and repair effect, and improves the disassembly and repair efficiency. At the same time, the door body 222 is connected to the upper end surface 221 through the two opening and closing connectors 230, so as to improve the connection strength and stability of the door body 222 connected to the front water tank 220. After the disassembly and repair are completed, the door body 222 is turned closed in the direction away from the rear water tank 210, so that the door body 222 is arranged on the upper end surface 221 and covers the repair opening, so as to ensure the subsequent use effect of the drain tank. The opening and closing connector 230 can be a hinge or a hinge according to actual needs, which is not limited here as long as the door body 222 can be connected to the upper end surface 221 in an open or closed manner through the opening and closing connector 230.

[0048] In some other embodiments, the number of opening and closing connectors 230 can be adaptively set to one, three, five, etc. according to actual needs, which will not be described here. Alternatively, two door bodies 222 are arranged on the upper end surface 221, and two sets of opening and closing connection groups are correspondingly arranged. Each set of opening and closing connection group includes at least one opening and closing connector 230. The two sets of opening and closing connection groups are arranged on the upper end surface 221 in one-to-one correspondence with the two side walls of the front water tank 220 in the F direction, and the two sets of opening and closing connection groups are connected to the two door bodies 222 in one-to-one correspondence. Therefore, when the parts on the machine table need to be disassembled, replaced and repaired, the two door bodies 222 are rotated open in directions away from each other, so that the repair opening is exposed to facilitate the disassembly, replacement and repair of the parts. When the disassembly, replacement and repair are completed, the two door bodies 222 are rotated closed in directions away from each other to cover the repair opening, thereby ensuring the subsequent use effect of the drain tank.

[0049] Preferably, the upper mechanism 200 further comprises an auxiliary pressing assembly 240, which is arranged on the upper end surface 221 in correspondence with the door body 222 and is arranged in a staggered manner with the opening and closing connector 230. The auxiliary pressing assembly 240 comprises an auxiliary base 241, a door body pressing rod 242 and a U-shaped pressing piece 243, the bottom of the U-shaped pressing piece 243 is rotatably provided with an auxiliary pressing rod 2431. The auxiliary base 241 is fixedly arranged on the upper end surface 221, the door body pressing rod 242 is rotatably connected to the side of the auxiliary base 241 away from the upper end surface 221, and the end of the U-shaped pressing piece 243 is rotatably connected to the auxiliary base 241. Rotating the U-shaped pressing piece 243 in a direction away from the upper end surface 221 can press the auxiliary pressing rod 2431 against the door body pressing rod 242, so that the door body pressing rod 242 is tightly pressed against the door body 222.

[0050] In combination Figures 1 to 5 As shown in the drawings, in this embodiment, the auxiliary pressing assembly 240 is provided with two groups, and the two groups of auxiliary pressing assemblies 240 are respectively arranged on the two sides of the door body 222 along the F direction. After the door body 222 is arranged on the upper end face 221 after disassembly and maintenance, the two groups of auxiliary pressing assemblies cooperate with each other to tightly abut the door body 222 and the upper end face 221, so that the door body 222 is prevented from being opened by itself during the use of the drain tank, thereby avoiding the situation that the use effect of the drain tank is affected. In some other embodiments, in order to reduce the production cost of the drain tank, only one group of auxiliary pressing assemblies 240 can be arranged, and the auxiliary pressing assembly 240 is arranged in a staggered manner with the opening and closing connecting piece 230; or, in order to further improve the abutting effect of the door body 222 and the upper end face 221, a plurality of groups of auxiliary pressing assemblies 240 can be arranged on one side of the door body 222.

[0051] With one of the auxiliary compression assemblies 240 as an example, the structure and compression principle of the auxiliary compression assembly 240 are described. Specifically, in the F direction, the cross-sectional shape of the auxiliary base 241 is in the shape of “⊥”, the horizontal plate in the auxiliary base 241 is fixedly connected to the upper end face 221, the vertical plate extends in a direction perpendicular to the upper end face 221, the first end of the door compression rod 242 is rotatably connected to one end of the vertical plate away from the horizontal plate, the open end of the U-shaped compression piece 243 is rotatably connected to the middle part of the vertical plate, and the first end of the auxiliary compression rod 2431 is rotatably connected to the inner side of the bottom of the U-shaped compression piece 243. When the bottom of the U-shaped compression piece 243 is directly above the vertical plate, the second end of the auxiliary compression rod 2431 compresses the door compression rod 242, so that the door compression rod 242 abuts against the door body 222; the outer side of the bottom of the U-shaped compression piece 243 is fixedly provided with an auxiliary handle 2432. When the door body 222 needs to be tightly abutted against the upper end face 221 after disassembly and maintenance, the door compression rod 242 is rotated so that the second end of the door compression rod 242 is above the door body 222; then the auxiliary handle 2432 is rotated towards the door body 222, and in the process of rotating the auxiliary handle 2432, the second end of the auxiliary compression rod 2431 is in contact with the door compression rod 242; the auxiliary handle 2432 is continuously rotated towards the door body 222 until the bottom of the U-shaped compression piece 243 is above the door compression rod 242, at which time the second end of the auxiliary compression rod 2431 compresses the door compression rod 242, so that the door compression rod 242 is tightly abutted against the door body 222, thereby avoiding the door body 222 from being opened by itself. When the door body 222 needs to be opened for disassembly and maintenance of the parts on the machine table, the auxiliary handle 2432 is rotated away from the door body 222 to drive the U-shaped compression piece 243 and the auxiliary compression rod 2431 to rotate away from the door body 222 until the compression of the auxiliary compression rod 2431 on the door compression rod 242 is released, then the door compression rod 242 is rotated away from the door body 222 so that the second end of the door compression rod 242 is withdrawn from above the door body 222, at which time the door body 222 is flipped open towards the rear water tank 210, and the disassembly and maintenance can be performed.

[0052] Preferably, the auxiliary compression assembly 240 further comprises a fastening screw 244, the fastening screw 244 is threadedly connected to one end of the door compression rod 242 away from the auxiliary base 241, and the axis of the fastening screw 244 is perpendicular to the upper end face 221.

[0053] In combination Figure 2 and Figure 5As shown, the second end of the door body pressing rod 242 is provided with a threaded hole penetrating the door body pressing rod 242 along a direction perpendicular to the upper end face 221, and the fastening screw rod 244 is threadedly connected to the second end of the door body pressing rod 242 through the threaded hole; when the second end of the auxiliary pressing rod 2431 presses the door body pressing rod 242, the fastening screw rod 244 is tightened to abut against the door body 222, so as to further increase the abutting force between the door body 222 and the upper end face 221, thereby further ensuring the closing effect of the door body 222. Alternatively, the second end of the door body pressing rod 242 is provided with a connecting through hole penetrating the door body pressing rod 242 along a direction perpendicular to the upper end face 221, and the middle part of the fastening screw rod 244 is provided with two fastening nuts 245; when the fastening screw rod 244 penetrates the connecting through hole, the two fastening nuts 245 are located on the two sides of the door body pressing rod 242 along a direction perpendicular to the upper end face 221; when the second end of the auxiliary pressing rod 2431 presses the door body pressing rod 242, the two fastening nuts 245 can be simultaneously tightened to abut the fastening screw rod 244 against the door body 222, so as to further increase the abutting force between the door body 222 and the upper end face 221. Alternatively, the second end of the door body pressing rod 242 is provided with a threaded hole, and the middle part of the fastening screw rod 244 is further provided with two fastening nuts 245; the fastening screw rod 244 is threadedly connected to the door body pressing rod 242 through the threaded hole, and the two fastening nuts 245 are located on the two sides of the door body pressing rod 242; in this way, the abutting force between the door body 222 and the upper end face 221 is further increased, and the connection strength and stability between the fastening screw rod 244 and the door body pressing rod 242 are improved.

[0054] Preferably, the upper mechanism 200 further comprises a detection assembly 250 and a prompt element, the detection assembly 250 is arranged in the front water tank 220 corresponding to the door body 222, and the detection assembly 250 is used for sensing the opening and closing state of the door body 222 and is in communication connection with the prompt element.

[0055] After disassembly and repair are completed, in order to ensure that the door body 222 is completely closed to ensure the subsequent use effect of the drain tank, the detection assembly 250 and the prompt element are arranged corresponding to the door body 222; the detection assembly 250 can detect the closing state of the door body 222, and the prompt element can issue a prompt according to the detection result of the detection assembly 250.

[0056] In the embodiment, the detection assembly 250 is arranged in the front water tank 220 opposite to the rotating connecting element, specifically, the detection assembly 250 is arranged in the front water tank 220 corresponding to the door body 222, and the detection assembly 250 is arranged in the front water tank 220 corresponding to the door body 222. Figure 6As shown, the detection assembly 250 comprises a detection plate 251, a sensor 252, a reset member 253 and a reset auxiliary rod 254, the reset member 253 is arranged as a compression spring; the first end of the reset auxiliary rod 254 is fixedly connected to the inner side of the upper end face 221, the second end of the reset auxiliary rod 254 extends in a direction perpendicular to the upper end face 221, and the second end of the reset auxiliary rod 254 is provided with a limiting flange; the upper end face 221 is provided with a contact opening corresponding to the maintenance opening, the detection plate 251 comprises a contact part and a detection part, the first end of the contact part is fixedly connected to the first end of the detection part, the second end of the contact part extends in a direction perpendicular to the first end of the detection part, and the second end of the contact part can extend out of the upper end face 221 through the contact opening, the first end of the detection part is sleeved on the reset auxiliary rod 254 through a mounting hole (not shown in the figure), and the second end of the detection part extends out of the front plate through an auxiliary hole (not shown in the figure) in the front plate of the front water tank 220; the compression spring is sleeved on the reset auxiliary rod 254, and the two ends of the compression spring respectively abut against the limiting flange and the first end of the detection part, and the sensor 252 is arranged on the front plate corresponding to the auxiliary hole and is in communication connection with the prompt member. When the door body 222 is completely closed, the door body 222 abuts against the contact part extending out of the upper end face 221 to push the contact part to move away from the upper end face 221, and drives the detection part to move away from the upper end face 221, so that the second end of the detection part contacts the sensor 252, at this time the sensor 252 sends a closing signal to the prompt member, the prompt member sends a first prompt effect to indicate that the door body 222 is completely closed; at this time the compression spring is compressed. When the door body 222 is opened or not completely closed, the compression spring is no longer compressed or the compression force is weakened, at this time the compression spring starts to rebound automatically and pushes the detection plate 251 to move towards the upper end face 221, so that the second end of the detection part is separated from the sensor 252, the sensor 252 sends an opening signal to the prompt member, and the prompt member sends a second prompt effect to indicate that the door body 222 is opened or not completely closed. In addition, the detection assembly 250 further comprises a protective shell, the protective shell covers the sensor 252 to avoid damage to the sensor 252 by external parts, thereby prolonging the service life of the sensor 252 and the detection assembly 250.

[0057] In some other embodiments, the detection assembly 250 can not be provided, and a pressure sensor and / or a distance sensor can be directly provided on the upper end surface 221. Specifically, the pressure sensor and the distance sensor are provided on one side of the maintenance opening and are both in communication connection with the prompt member; the pressure sensor is provided with a set pressure, the distance sensor is provided with a set distance, and the door body 222 can be covered on the pressure sensor and the distance sensor after being closed; during use of the drainage tank, if the pressure sensor detects that the pressure of the door body 222 on the pressure sensor reaches the set pressure, and the distance sensor detects that the distance between the door body 222 and the distance sensor reaches the set distance, it is indicated that the door body 222 is completely closed, otherwise it is indicated that the door body 222 is opened or not completely closed.

[0058] The first prompt effect and the second prompt effect of the prompt member can be different color light prompts or different sound prompts, which are not limited here.

[0059] Preferably, along the H direction, the upper end surface 221 is inclined to the direction close to the lower tank 100. In this way, the door body 222 is also inclined to the direction close to the lower tank 100 along the H direction. During disassembly and maintenance, after the door body 222 is flipped open to the direction close to the lower tank 100, the operator can perform maintenance or observe the internal condition of the drainage tank through the maintenance opening without bending over, and the difficulty of disassembling and maintaining the parts through the maintenance opening is reduced, so as to further improve the efficiency of disassembly and maintenance. In the present embodiment, the inclination angle of the upper end surface 221 is 25°, and in some other embodiments, the inclination angle of the upper end surface 221 is not limited to this, and can be adaptively set according to actual conditions.

[0060] In order to further improve the convenience of observing the internal condition of the tank, the door body 222 can be directly provided as a transparent door plate, or a transparent window can be provided on the door body 222. In this way, the observation process can be performed without opening the door body 222, so as to further improve the convenience. The material of the transparent door plate and the transparent window can be glass, polyvinyl chloride, polycarbonate, aluminum oxide ceramic, acrylic, etc. according to actual needs, which are not limited here.

[0061] Preferably, the upper mechanism 200 further comprises a plurality of sealing rings (not shown in the figure), and the outer wall of the rear tank 210 away from the front tank 220 is provided with a plurality of air exhaust through holes (not shown in the figure) allowing the water tank air exhaust pipe to pass through at intervals; the plurality of sealing rings are provided on the outer wall of the rear tank 210 away from the front tank 220 one by one corresponding to the plurality of air exhaust through holes.

[0062] Specifically, in the embodiment, the rear water tank 210 is spaced apart from the outer wall of the front water tank 220 and provided with two air extraction holes, the two air extraction holes are spaced apart along the F direction, and the two air extraction holes are symmetrically arranged about the midline of the rear water tank 210 in the F direction. Two sealing rings are arranged on the outer wall of the rear water tank 210 away from the front water tank 220 in a one-to-one correspondence with the two air extraction holes. Both of the two sealing rings are arranged as elastic members, and the inner diameters of the two sealing rings are smaller than the diameters of the air extraction holes. When the two water tank air extraction pipes are inserted into the two air extraction holes in a one-to-one correspondence, on the one hand, the sealing ring limits the relative position of the water tank air extraction pipe and the corresponding air extraction hole, so as to prevent the water tank air extraction pipe from being automatically separated from the corresponding air extraction hole, thereby ensuring the exhaust effect of the water tank air extraction pipe on the water vapor generated during the processing of the drain tank. On the other hand, the sealing ring seals the gap between the water tank air extraction pipe and the corresponding air extraction hole, so as to prevent the water vapor generated during the processing of the drain tank from being discharged from the gap between the water tank air extraction pipe and the corresponding air extraction hole, thereby improving the sealing performance and use safety of the drain tank. In addition, since the two air extraction holes are symmetrically arranged about the midline of the rear water tank 210 in the F direction, the exhaust effects of the two sides of the drain tank can be ensured to be the same, so as to further ensure the use effect of the drain tank.

[0063] In some other embodiments, the number of air extraction holes arranged on the outer wall of the rear water tank 210 away from the front water tank 220 is not limited to two, and the number and position of the air extraction holes can be adjusted adaptively according to actual needs.

[0064] Preferably, the inner side of the bottom wall of the lower water tank 100 is arranged as an inclined surface, the bottom wall of the lower water tank 100 is provided with a drain pipe 110 communicating with the inside of the lower water tank 100, and the communication port of the drain pipe 110 is arranged at the lowest point of the inner side of the bottom wall of the lower water tank 100.

[0065] In this way, since the inner side of the bottom wall of the lower water tank 100 is directly arranged as an inclined surface, the cooling water during the operation of the drain tank can be quickly discharged from the drain tank through the drain pipe 110. Since the drain tank can be directly installed on the machine table, during the installation process, it is not necessary to adjust the inclination angle between the water tank and the horizontal plane again, thereby simplifying the installation steps, reducing the installation workload, and improving the installation efficiency of the water tank. At the same time, during the installation process of the drain tank, it is not necessary to additionally raise the lower water tank 100 locally in order to incline the bottom wall of the lower water tank 100, thereby improving the connection strength and stability of the lower water tank 100.

[0066] The inclination of the inclined surface can be set according to actual needs, for example, the inclined surface is inclined towards the direction of approaching or moving away from the machine along the H direction or the F direction; or the middle part of the inner side of the bottom wall of the lower water tank 100 is recessed towards the direction of approaching the machine; or the middle part of the inner side of the bottom wall of the lower water tank 100 is protruded towards the direction of moving away from the machine. In the embodiment, along the H direction, the inclined surface is inclined towards the direction of moving away from the machine, and the drain pipe 110 is arranged on the side away from the front water tank 220, which ensures the drainage effect of the drain pipe 110 and avoids the interference between the drain pipe 110 and the operator during the disassembly and maintenance of the parts of the machine.

[0067] Preferably, the two side walls arranged opposite to each other on the lower water tank 100 are both provided with a water tank connecting plate 120 capable of being connected to the machine.

[0068] In combination Figure 1 and Figure 4 As shown in the figures, the lower water tank 100 is installed on the machine by means of the two water tank connecting plates 120, which on the one hand reduces the installation difficulty of the drain tank and improves the connection strength and stability of the lower water tank 100 and the machine; on the other hand, the drain tank can be suspended on the machine, thereby avoiding the bending of the drain pipe 110 caused by the contact between the drain pipe 110 and the machine, so as to further improve the drainage effect of the cooling water. The connection mode of the water tank connecting plate 120 to the machine refers to the prior art, which is not limited here.

[0069] The wafer thinning machine comprises a machine and a drain tank, and the bottom wall of the lower water tank 100 in the drain tank is connected to the machine.

[0070] Since the upper end surface 221 of the front water tank 220 in the drain tank is provided with an openable and closable door body 222, the front water tank 220 and the rear water tank 210 can be detachably connected to the side of the lower water tank 100 away from the machine, and the front water tank 220 can be detachably connected to the rear water tank 210; therefore, when the parts on the machine need to be disassembled and replaced for maintenance, the door body 222 is opened, or the front water tank 220 is directly disassembled from the rear water tank 210 and the lower water tank 100, and the machine can be disassembled and replaced for maintenance. The entire disassembly and replacement process does not need to disassemble the entire drain tank from the machine, but only needs to open the door body 222 or disassemble the front water tank 220, thereby reducing the disassembly workload when the parts on the machine are maintained, improving the convenience during disassembly and replacement, and improving the disassembly and replacement efficiency. Since the sealing ring is arranged corresponding to the air suction through hole, the drainage effect of water vapor can be improved, and the sealing property and use safety of the drain tank can be ensured. Since the inner side of the bottom wall of the lower water tank 100 is directly arranged as an inclined surface, the drainage effect of the cooling water in the drain tank is ensured, and the inclination angle between the water tank and the horizontal plane does not need to be adjusted again, thereby simplifying the installation steps, reducing the installation workload, improving the installation efficiency of the water tank, and improving the connection strength and stability of the lower water tank 100 after being installed on the machine.

[0071] Obviously, the above embodiments of the present application are merely examples for clearly illustrating the present application, and are not intended to limit the embodiments of the present application. For those skilled in the art, various obvious changes, re-adjustments and substitutions can be made without departing from the protection scope of the present application. Here, it is not necessary and impossible to exhaust all the embodiments. Any modification, equivalent substitution and improvement made within the spirit and principle of the present application shall be included in the protection scope of the present application claims.

Claims

1. A drain tank disposed on a machine, characterized in that, The utility model relates to a water tank device for a machine table, comprising: a lower water tank (100) arranged on the machine table, the lower water tank (100) being provided with a first opening on the side away from the machine table; an upper mechanism (200) comprising a rear water tank (210) and a front water tank (220), the rear water tank (210) and the front water tank (220) being detachably connected in sequence along the H direction to the side of the lower water tank (100) away from the machine table, and the front water tank (220) being detachably connected to the rear water tank (210); the lower water tank (100), the rear water tank (210) and the front water tank (220) being in communication with each other, and the upper end surface (221) of the front water tank (220) being provided with a door body (222) that can be opened and closed.

2. The drain tank of claim 1, wherein, The upper mechanism (200) further comprises at least one opening and closing connecting piece (230), and the side of the door body (222) close to the rear water tank (210) is rotatably connected to the upper end surface (221) through the opening and closing connecting piece (230).

3. The drain tank of claim 2, wherein, The upper mechanism (200) further comprises an auxiliary compression assembly (240), which is arranged on the upper end surface (221) corresponding to the door body (222) and is arranged in a staggered manner with the opening and closing connecting piece (230); The auxiliary compression assembly (240) comprises an auxiliary base (241), a door body compression rod (242) and a U-shaped compression piece (243), and the bottom of the U-shaped compression piece (243) is rotatably provided with an auxiliary compression rod (2431); The auxiliary base (241) is fixedly arranged on the upper end surface (221), the door body compression rod (242) is rotatably connected to the side of the auxiliary base (241) away from the upper end surface (221), and the end of the U-shaped compression piece (243) is rotatably connected to the auxiliary base (241). Rotating the U-shaped compression piece (243) away from the upper end surface (221) can make the auxiliary compression rod (2431) compress the door body compression rod (242), so that the door body compression rod (242) is tightly pressed against the door body (222).

4. The drain tank of claim 3, wherein, The auxiliary compression assembly (240) further comprises a fastening screw (244), which is threadedly connected to one end of the door body compression rod (242) away from the auxiliary base (241), and the axis of the fastening screw (244) is arranged perpendicularly to the upper end surface (221).

5. The drain tank of claim 1, wherein, The upper mechanism (200) further comprises a detection assembly (250) and a prompt element, the detection assembly (250) being arranged on the front water tank (220) corresponding to the door body (222), the detection assembly (250) being used for sensing the opening and closing state of the door body (222) and being communicatively connected to the prompt element.

6. The drain tank of claim 1, wherein, In the H direction, the upper end surface (221) is inclined towards the lower water tank (100); And / or, the door body (222) is provided as a transparent door plate.

7. The drain tank of claim 1, wherein, The upper mechanism (200) further comprises a plurality of sealing rings, and the rear water tank (210) is provided with a plurality of air extraction through holes corresponding to the sealing rings, allowing the water tank air extraction pipe to pass through. The plurality of sealing rings are provided on the outer wall of the rear water tank (210) away from the front water tank (220) in one-to-one correspondence with the plurality of air extraction through holes.

8. The drain pan of claim 1, wherein, The inner side of the bottom wall of the lower water tank (100) is provided as an inclined surface, and the lower water tank (100) is provided with a drain pipe (110) communicating with the inside of the lower water tank (100), and the communication port of the drain pipe (110) is arranged at the lowest point of the inner side of the bottom wall of the lower water tank (100).

9. The drain tank of claim 8, wherein, The two side walls of the lower water tank (100) arranged opposite to each other along the F direction are both provided with a water tank connecting plate (120) capable of being connected to the machine table.

10. A wafer thinning machine characterized by, The machine table and the drain tank of any one of claims 1-9 are included, and the bottom wall of the lower water tank (100) of the drain tank is connected to the machine table.

Images