Extremely high temperature resistant magnetofluid sealing structure

By introducing a shaft cooling structure and a multi-layer heat dissipation design into the magnetohydrodynamic sealing structure, the problem of sealing failure under high temperature conditions is solved, achieving stable operation and reliability at extremely high temperatures, and enhancing the safety and lifespan of the magnetohydrodynamic seal.

CN224107673UActive Publication Date: 2026-04-10SHANGHAI YICAN VACUUM TECH CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2025-03-17
Publication Date
2026-04-10

AI Technical Summary

Technical Problem

Existing magnetohydrodynamic sealing technology is prone to seal failure in high-temperature environments due to contact between the magnetic shaft or magnetic sleeve and the sealing component. In particular, when the coaxiality of the rotating shaft and the sealing component is not aligned, eccentric contact is more likely to occur. Furthermore, high-temperature environments have diverse requirements for the performance of magnetohydrodynamic fluids, and existing technologies are difficult to meet the sealing requirements of extremely high temperatures.

Method used

A high-temperature resistant magnetohydrodynamic sealing structure was designed, which uses a shaft cooling structure for water cooling and sets up a multi-layer heat dissipation and heat barrier structure on the shaft and housing. Combined with a labyrinth dustproof structure, it increases the bearing's high-temperature no-load operation capability, and a detection hole is set on the threaded cover plate to monitor the reliability of the magnetohydrodynamic fluid.

Benefits of technology

Stable operation of the magnetohydrodynamic seal was achieved in extremely high temperature environments, which increased safety and reliability, prevented dust intrusion, reduced the temperature of the magnetohydrodynamic fluid, extended the life of the magnetohydrodynamic fluid, and improved the sealing performance.

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Abstract

The utility model discloses a high temperature resistant magnetofluid sealing structure which comprises a sealing structure and a shaft cooling structure, a sealing structure body comprises a shell, and the shell is formed by welding an inner cylinder, an outer cylinder and two bosses. A shaft, a magnetic conduction shaft sleeve, a screw cover plate, a threaded cover plate, a second magnetic isolation ring, a first magnetic isolation ring, a separation pipe, a dust cover, a heat insulation plate, a magnetic pole, a magnet, a front bearing, a rear bearing, heat dissipation teeth and a shaft clamp are arranged in the shell, the coaxiality of the shaft and a sealing assembly is guaranteed during installation, leakage caused by eccentricity is avoided, magnetic grease is injected, and the sealing effect is improved. The magnetic liquid is firmly adsorbed between the inner hole of the magnetic pole and the gap of the shaft to achieve sealing; and meanwhile, the requirements of extremely-high-temperature vacuum equipment are met, and better requirements and more choices are provided for the vacuum equipment under the condition that the vacuum environment effect is not influenced.
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Description

TECHNICAL FIELD

[0001] The utility model relates to magnetic fluid sealing technical field especially relates to a kind of extremely high temperature-resistant magnetic fluid sealing structure. BACKGROUND

[0002] In recent years, domestic and foreign vacuum equipment develops rapidly.In many rotary dynamic sealing devices, magnetic fluid sealing has been widely used, for example, in single crystal silicon furnace, vacuum brazing furnace, vacuum smelting furnace, chemical vapor deposition, ion plating, liquid crystal regeneration and other vacuum equipment sealing, as well as high temperature and high pressure equipment and high environmental requirements equipment sealing, so as to improve product quality and obtain good economic benefits.

[0003] Magnetic fluid sealing technology is developed on the basis of magnetic fluid, which can fill the entire gap when magnetic fluid is injected into the gap of magnetic field, forming a kind of "liquid O-shaped sealing ring".The function of magnetic fluid sealing device is to transmit rotary motion to the sealed container, which is commonly used for vacuum sealing.

[0004] At present, in the process of applying magnetic fluid technology, the contact between the outer surface of the magnetic conducting shaft or sleeve and the inner surface of the sealing assembly causes sealing failure, which is more likely to occur in the structure without bearing in the magnetic fluid sealing element;This is generally due to the fact that the coaxiality of the rotating shaft and the sealing assembly is not found during the installation of the magnetic fluid sealing element, which causes eccentricity and contact;These are solved after installing bearings with certain precision;Due to the rapid development of equipment, there are more and more demands for the internal performance of magnetic fluid, and the vacuum environment requirements tend to be diversified, among which the environment temperature is high, and even the temperature at the sealing place can be as high as 500-600°C.To solve such problems, we consider adding shaft cooling structure, and design an extremely high temperature-resistant magnetic fluid sealing structure to solve the above problems. UTILITY MODEL CONTENTS

[0005] The utility model aims at solving the shortcomings in the prior art and provides an extremely high temperature-resistant magnetic fluid sealing structure.

[0006] In order to achieve the above purpose, the utility model adopts the following technical scheme:

[0007] An extremely high temperature-resistant magnetic fluid sealing structure, comprising a shaft, a sealing structure and a shaft cooling structure, the sealing structure comprises a shell, the shell is welded by an inner cylinder, an outer cylinder and two bosses, the inside of the shell is provided with a shaft, a magnetic conducting sleeve, a screw cover plate, a threaded cover plate, a second magnetic shield ring, a first magnetic shield ring, a partition pipe, a dust cover, a heat insulation plate, a magnetic pole, a magnet, a front bearing, a rear bearing and a heat dissipation tooth;

[0008] The outer ring of the front bearing is provided with a dust cover, a heat dissipation tooth, a dust-proof groove ring, a heat insulation plate and a shaft clamp, and the other side of the outer ring of the front bearing is sequentially sleeved with a first magnetic separation ring, a magnetic pole, a magnet, a second magnetic separation ring, a rear bearing, a threaded cover plate and a screw cover plate.

[0009] The shaft cooling structure comprises a shaft cooling shell, and the inside of the shaft cooling shell is sequentially provided with a shaft, a shunt pipe, a rear cover plate, a shaft clamp, a shaft cooling rear bearing, a second separation ring, a rear water seal, a rear flooding seal, a front flooding seal, a first separation ring, a front water seal, a shaft cooling part front bearing and a front cover plate.

[0010] Preferably, the shell further comprises a water channel, a knife flange, a first flange screw hole, a second flange screw hole, a first upper water inlet and a first lower water outlet, the shell is a double-end flange, the end of the sealing shell is connected with a vacuum equipment through the knife flange, the magnetic fluid is vertically installed, and the first upper water cooling inlet and the first lower water cooling inlet are respectively located at the upper and lower positions.

[0011] Preferably, the shaft is made of non-magnetic stainless steel material and is welded by an equipment connecting shaft end, an inner pipe, a water isolation plate, an outer pipe and a power connecting shaft end, the equipment connecting shaft end is a sealing structure and is provided with a first external thread for connecting a vacuum equipment, the power connecting shaft end is a shaft cooling structure and is provided with a second external thread and a shaft sealing groove, a through hole is arranged in the middle of the shaft, a magnetic conducting sleeve is sleeved on the outer side of the shaft at the sealing structure, and the magnetic conducting sleeve is made of magnetic conducting material.

[0012] Preferably, the magnet is one of a button-shaped structure and a ring-shaped structure.

[0013] Preferably, the outer side of the magnetic pole is provided with a magnetic pole sealing groove.

[0014] Preferably, the dust cover and the heat insulation plate are both fixed on the shaft by the shaft clamp, and the heat dissipation tooth is arranged on the shaft between the dust cover and the heat insulation plate.

[0015] Preferably, the screw cover plate and the threaded cover plate are both provided with a sealing groove and a sealing plug screw.

[0016] Preferably, the front flooding seal and the rear flooding seal are sleeved in front of and behind the second lower water inlet and the second upper water inlet, the back parts of the front flooding seal and the rear flooding seal are pressed by the first separation ring and the second separation ring respectively, the outer sides of the first separation ring and the second separation ring are provided with sealing grooves, and the inner sides of the first separation ring and the second separation ring are provided with the front water seal and the rear water seal.

[0017] Preferably, the outer side of the shaft is provided with a shunt pipe, the shunt pipe is provided with a flow guide hole, the inner side of the shunt pipe is provided with a second key groove, and a sealing groove is arranged between the shunt pipe and the shaft; the outer side of the shunt pipe and the shaft cooling shell are provided with a sealing groove, and the shaft cooling front bearing and the shaft cooling rear bearing are arranged between the sealing grooves, the inner ring of the shaft cooling front bearing on one side is provided with a stepped positioning, the inner ring of the shaft cooling rear bearing on one side is provided with a shaft clamping limiting, the shaft cooling front bearing and the shaft cooling rear bearing are respectively provided with a front cover plate and a rear cover plate, the flange of the shaft cooling shell is provided with a hole, a flange counterbore and a water discharge groove, the flange counterbore cooperates with a screw positioning to connect the sealing structure and the shaft cooling structure.

[0018] Preferably, the outer rings of the front bearing and the middle bearing are separated by a partition pipe.

[0019] Compared with the prior art, the utility model has the beneficial effects that:

[0020] 1. On the basis of the original heat-resistant magnetic fluid, the shaft cooling structure is matched, the water cooling in the shaft is realized, the effective cooling is realized in the extremely high temperature vacuum environment, and the multilayer heat dissipation, heat blocking and water flow heat dissipation structures are arranged on the shaft and the shell, and the vacuum temperature insulation and bearing high temperature no-load operation concepts are used, so that stable operation can be realized at the extremely high temperature, and certain axial load can be borne. The water drop overflow protection measures are also increased in safety.

[0021] 2. The detection hole is increased on the threaded cover plate, the magnetic fluid can be monitored, and the reliability of the magnetic fluid sealing is increased.

[0022] 3. The labyrinth dustproof structure is increased on the side of the vacuum equipment, dust particles are effectively isolated, and the invasion of the dust particles into the magnetic fluid inside is prevented, so that the magnetic fluid sealing is more stable. BRIEF DESCRIPTION OF DRAWINGS

[0023] Figure 1 A structure diagram of the extremely high temperature-resistant magnetic fluid sealing structure is provided for the utility model;

[0024] Figure 2 A detail drawing of the shaft cooling structure body;

[0025] Figure 3 An enlarged view of the position of the magnetic pole and the magnetic shielding ring of the magnetic fluid sealing structure;

[0026] Figure 4 An enlarged view of the sealing and detection structure provided for the threaded cover plate and the screw cover plate;

[0027] Figure 5 A shaft cooling waterway sectional view, an inlet section M-M and an outlet section N-N.

[0028] In the figure: 101, shaft; 101-1, equipment shaft end; 101-2, inner tube; 101-3, bulkhead; 101-4, outer tube; 101-5, power shaft end; 102, screw cover plate; 103, threaded cover plate; 104, second magnetic isolation ring; 105, shell; 105-1, inner cylinder; 105-2, outer cylinder; 105-3, boss; 106, first magnetic isolation ring; 107, isolation tube; 108, dust cover; 109, heat insulation plate; 110, magnetic pole; 111, magnetic conducting shaft sleeve

[0029] 201, rear cover plate; 202, second isolation ring; 203, shaft cooling shell; 204, shunt pipe; 205, first isolation ring; 206, front cover plate;

[0030] 1, through hole; 2, first external thread; 3, first shaft clamp; 4, heat dissipation tooth; 5, dust groove ring; 6, knife flange; 7, first flange screw hole; 8, second shaft clamp; 9, water channel; 10, front bearing; 13. first upper water inlet; 14. rear bearing; 15, second flange screw hole; 16, second external thread; 17, shaft sealing groove; 18, first key groove; 19, let hole; 21, first lower water inlet; 22, magnetic pole sealing groove; 23, magnet; 24, shaft sleeve sealing groove; 25, magnetic liquid groove; 27, rear sealing groove; 28, middle sealing groove; 29, second lower water inlet; 30, front sealing groove; 31, second key groove; 32, shaft cooling front bearing; 33, water discharge groove; 34, flange counterbore; 35, first isolation ring sealing groove; 36, front water seal; 37, front back-up seal; 38, second upper water inlet; 39, rear back-up seal; 40, rear water seal; 42, shaft cooling rear bearing; 46, sealing plug screw. DETAILED DESCRIPTION

[0031] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all the embodiments.

[0032] Embodiment one

[0033] Please refer to Figures 1-5 The present application provides a technical solution: a high-temperature-resistant magnetic fluid sealing structure, comprising: a main shaft 101, a sealing structure and a shaft cooling structure, the main shaft 101 penetrating through the sealing structure and the shaft cooling structure, the sealing structure comprising a sealing shell 105;

[0034] In the aspect of the sealing structure body:

[0035] The shell 105 is double-flange type, and the sealing shell 105 is connected with the vacuum equipment at one end of the knife-edge flange 6. The knife-edge flange belongs to high-temperature baking flange. The traditional sealing ring is replaced by a purple copper sheet ring used in the knife-edge flange. The performance of the knife-edge flange 6 is better than that of the ordinary sealing ring, and the vacuum environment can reach high vacuum or even super-high vacuum.

[0036] The two ends of the knife-edge flange 6 are respectively provided with a first flange screw hole 7 and a second flange screw hole 15. The first flange screw hole 7 is connected with the vacuum equipment by cooperating with a screw. One side of the knife-edge flange is in a vacuum environment; and the other side of the flange is installed with a rotating part support through the second flange screw hole 15.

[0037] The shell 105 is made of stainless steel non-magnetic material, which is welded by an inner cylinder 105-1, an outer cylinder 105-2 and two bosses 105-3 to form an L-shaped water channel 9. In addition, the two bosses are provided with a first upper water inlet 13 and a first lower water inlet 21. In this case, the magnetic fluid is vertically installed, and the knife-edge flange 6 is below. Therefore, the first lower water inlet 21 is set as a water inlet, and the first upper water inlet 13 is set as a water outlet, so as to ensure that the cooling water can fill the water channel 9 after water inflow.

[0038] The shaft 101 is made of non-magnetic stainless steel material, which is welded by an equipment connecting shaft end 101-1, an inner tube 101-2, a water baffle 101-3, an outer tube 101-4 and a power connecting shaft end 101-5. The water baffle 101-3 is provided with two strips, which are welded between the inner tube 101-2 and the outer tube 101-4 to guide the water flow to flow in a certain direction. The outer tube 101-4 is provided with water inlet and outlet holes. The second upper water inlet 38 and the second lower water inlet 29 on the shaft cooling shell 105 correspond to the shunt pipe 204 to form a water passage.

[0039] A through hole 1 is arranged in the middle of the shaft 101 for the temperature probe to detect the actual temperature of the cavity of the vacuum equipment. The two sides of the shaft 101 are respectively provided with a first outer thread 2, a first key groove 18, a shaft sealing groove 17 and a second outer thread 16, which are used as rotating components to connect the vacuum equipment and the power component.

[0040] The shaft 101 is made of non-magnetic stainless steel material. A magnetic guide sleeve 111 made of magnetic material is sleeved on the outer side of the shaft 101. The shaft 101 and the magnetic guide sleeve 111 are provided with a sleeve sealing groove 24, so that the shaft and the magnetic guide sleeve 111 achieve static sealing.

[0041] The shaft 101 and the shell 105 are additionally provided with a screw cover plate 102, a threaded cover plate 103, a second magnetic shielding ring 104, a first magnetic shielding ring 106, a partition pipe 107, a dust cover 108, a heat insulation plate 109, a magnetic pole 110, a magnet 23, a front bearing 10 and a rear bearing 14.

[0042] The magnetic pole 110 is provided with two, distribution in the magnet 23 both sides, magnetic pole adopts 3cr13 or 2cr13 magnetic material, the magnet 23 is permanent magnet, the magnetic liquid groove 25 is in the inside shaft of the magnetic pole 110, the magnetic liquid groove 25 is coated with magnetic liquid, the magnetic pole 110, the magnet 23, the shaft 101 and the magnetic liquid form a magnetic field loop, it is a kind of liquid seal, it is also the main sealing part of magnetic fluid, the magnetic pole 110 and the shaft 101 are reserved gap, the magnetic pole 110 and the shaft 101 are supported by two sides front bearing 10 and rear bearing 14, to ensure that the magnetic pole 110 and the shaft 101 do not contact when the shaft 101 operates, so as to affect the magnetic fluid seal.

[0043] The magnetic pole 110 is provided with two, distribution in the magnet 23 both sides, magnetic pole adopts 3cr13 or 2cr13 magnetic material, the magnet 23 is permanent magnet, the magnetic liquid groove 25 is in the inside shaft of the magnetic pole 110, the magnetic liquid groove 25 is coated with magnetic liquid, the magnetic pole 110, the magnet 23, the shaft 101 and the magnetic liquid form a magnetic field loop, it is a kind of liquid seal, it is also the main sealing part of magnetic fluid, the magnetic pole 110 and the shaft 101 are reserved gap, the magnetic pole 110 and the shaft 101 are supported by two sides front bearing 10 and rear bearing 14, to ensure that the magnetic pole 110 and the shaft 101 do not contact when the shaft 101 operates, so as to affect the magnetic fluid seal.

[0044] The first magnetic shielding ring 106 and the second magnetic shielding ring 104 are respectively on both sides of the magnetic pole 110, for isolating the magnetic field loop emitted by the magnet 23.

[0045] The dust cover 108 is fixed on the shaft 101 by the second shaft clamp 8, and forms a dustproof labyrinth structure with the dustproof groove ring 5 of the shell 105, to prevent vacuum dust from invading the magnetic fluid.

[0046] The heat insulation plate 109 is fixedly connected with the main shaft 101 through the first shaft clamp 3, can effectively isolate the radiation heat in the vacuum equipment, and in addition, the shaft 101 is provided with the heat dissipation tooth 4, also reduces the introduction of heat on the shaft 101.

[0047] The threaded cover plate 103 compresses each component, so that the internal structure of the magnetic fluid is more compact and the precision is higher.

[0048] In the aspect of the shaft cooling structure body:

[0049] The shaft cooling structure includes a shaft cooling shell 203: the shaft cooling shell 203 is a single flange shell, the flange is provided with a flange counterbore 34, a let hole 19 and a water discharge groove 33, the flange counterbore 34 is used for installing screws to connect with the shell 105, the let hole 19 is used for bracket connection to fix the magnetic fluid, the shaft cooling shell 203 is provided with a second upper water inlet 38 and a second lower water outlet 29, the second upper water inlet 38 and the second lower water outlet 29 correspond to the water inlet and outlet holes of the outer pipe 1014 to form a passage, and the water discharge groove 33 prevents accidental water droplets and guides water out of the shell.

[0050] The shaft cooling structure further comprises a shunt pipe 204 which is connected between the shaft 101 and the shaft cooling shell 203, and the front sealing groove 30 and the rear sealing groove 27 and the second key groove 31 are arranged between the shunt pipe 204 and the shaft 101, so that the space between the shaft 101 and the shunt pipe 204 is statically sealed and linked; the shunt pipe is provided with water flow holes which connect the water channels of the shaft cooling shell 203 and the shaft 101; the shunt pipe 204 and the shaft cooling shell 203 are provided with the middle sealing groove 28 which blocks the passage between the second upper water inlet 38 and the second lower water inlet 29.

[0051] The rear cover plate 201, the rear shaft bearing 42 of the shaft cooling, the second partition ring 202, the rear water seal 40, the rear flooding seal 39, the front flooding seal 37, the first partition ring 205, the front water seal 36, the front shaft bearing 32 of the shaft cooling, and the front cover plate 206 are sequentially arranged between the shunt pipe 204 and the shaft cooling shell 203, and the shunt pipe 204 and the shaft cooling shell 203 are relatively rotated under the bearing of the front shaft bearing 32 of the shaft cooling and the rear shaft bearing 42 of the shaft cooling.

[0052] The first partition ring 205 and the second partition ring 202 press the front flooding seal 38 and the rear flooding seal 39 respectively, and then the rear water seal 40 and the sealing ring are arranged inside and outside the first partition ring 205 and the second partition ring 202 respectively, so as to form a secondary water barrier.

[0053] During operation, the first key groove 18 and the second outer thread 16 on one side of the power component connecting shaft 101 are linked to rotate together, and the sealing ring is added to the shaft sealing groove 17, so that the vacuum environment of the through hole 1 in the shaft 101 is isolated from the external atmosphere; the rotation of the shaft 101 is transmitted to the first outer thread 2 connected with the vacuum equipment, so as to input the torque into the inside of the vacuum equipment.

[0054] When the vacuum equipment operates, the second lower water inlet 29 flows into the cooling water in the shaft cooling structure, the cooling water enters the inner cavity of the shaft through the shunt pipe 204, and then is guided by the water baffle 101-3 in the shaft 101, flows from top to bottom to the equipment shaft end 101-1, and then flows from bottom to top through the shunt pipe 204 to the second upper water inlet 38, so as to reduce the temperature of the magnetic liquid in the magnetic liquid tank on the magnet guide sleeve 111 and the operating temperature of the front bearing 10 near the equipment;

[0055] On the other hand, when the first lower water inlet 21 is supplied with water, the L-shaped water channel 9 formed by welding the sealing shell 105 is filled with cooling water, so that the magnetic pole 110 is effectively cooled;

[0056] The heat insulation plate 109 arranged on the shaft 101 effectively blocks most of the radiation heat sources, and the heat dissipation teeth 4 also reduce the absorption of heat by the shaft 101; the above three aspects greatly reduce the temperature of the magnetic fluid in the magnetic liquid tank 25, and increase the service life and sealing performance of the magnetic fluid.

[0057] In operation, the rear bearing 14 mainly bears radial load, and the front bearing 10 is the main load bearing of the magnetic fluid, mainly bearing all axial load and part of radial load, and the oil evaporation loss of the front bearing 10 is most obvious due to the high temperature of the vacuum environment closest to the front bearing 10, and the front bearing 10 can conduct and cool the shaft heat to protect the subsequent magnetic liquid, so that the equipment operates stably.

[0058] In the example, the vacuum equipment has certain floating dust in operation, and the dustproof labyrinth structure formed by the dust cover 108 and the dustproof groove ring 5 can effectively isolate dust without being affected by high temperature.

[0059] Finally, the threaded cover plate 103 and the screw cover plate 102 are provided with sealing ring grooves, and the first sealing ring 44 and the second sealing ring 45 are added to prevent accidental leakage, and the threaded cover plate 103 is provided with a sealing plug screw 46, which can replace the installation of a detection monitoring device to monitor the sealing condition, so that the magnetic fluid sealing is more reliable.

[0060] In the description of the present application, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise" and the like indicate the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation of the present application.

[0061] In addition, the terms "first" and "second" are only for descriptive purposes, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" can explicitly or implicitly include one or more of the features. In the description of the present application, the meaning of "multiple" is two or more, unless otherwise specifically limited.

[0062] The above is only a preferred specific embodiment of the present application, but the protection scope of the present application is not limited thereto, and any skilled person in the art can make equivalent replacement or change according to the technical scheme and the inventive concept of the present application within the technical range disclosed by the present application, which should be covered within the protection scope of the present application.

Claims

1. A high temperature resistant magnetic fluid seal structure comprising a shaft (101), a seal structure and a shaft cooling structure, the seal structure comprising a housing (105), characterized in that, The shell (105) is welded by an inner cylinder (105-1), an outer cylinder (105-2) and two bosses (105-3), the inside of the shell (105) is provided with a shaft (101), a magnetically conductive shaft sleeve (111), a screw cover plate (102), a threaded cover plate (103), a second magnetic separation ring (104), a first magnetic separation ring (106), a partition pipe (107), a dust cover (108), a heat insulation plate (109), a magnetic pole (110), a magnet (23), a front bearing (10), a rear bearing (14) and a heat dissipation tooth (4). The outer ring side of the front bearing (10) is provided with a dust cover (108), a heat dissipation tooth (4), a dust groove ring (5), a heat insulation plate (109) and a shaft clamp, and the other side of the outer ring of the front bearing (10) is sequentially sleeved with a first magnetic separation ring (106), a magnetic pole (110), a magnet (23), a second magnetic separation ring (104), a rear bearing (14), a threaded cover plate (103) and a screw cover plate (102). The shaft cooling structure comprises a shaft cooling shell (203), and the inside of the shaft cooling shell (203) is sequentially provided with a shaft (101), a shunt pipe (204), a rear cover plate (201), a shaft clamp, a shaft cooling rear bearing (42), a second separation ring (202), a rear water seal (40), a rear flooding seal (39), a front flooding seal (37), a first separation ring (205), a front water seal (36), a shaft cooling front bearing (32) and a front cover plate (206).

2. A high temperature resistant magnetic fluid seal structure according to claim 1, wherein The shell (105) further comprises a water channel (9), a knife edge flange (6), a first flange screw hole (7), a second flange screw hole (15), a first upper water inlet (13) and a first lower water outlet (21), the shell (105) is a double-end flange, the end of the shell (105) is connected with a vacuum equipment through the knife edge flange (6), the magnetic fluid is vertically installed, and the first upper water inlet (13) and the first lower water outlet (21) are respectively located at the upper and lower positions.

3. A high temperature resistant magnetic fluid seal structure according to claim 1, wherein The shaft (101) is made of non-magnetic stainless steel material and is welded by a device connecting shaft end (101-1), an inner pipe (101-2), a water isolation plate (101-3), an outer pipe (101-4) and a power connecting shaft end (101-5), the device connecting shaft end (101-1) is a sealing structure and is provided with a first external thread (2) connected with a vacuum equipment, the power connecting shaft end (101-5) is a shaft cooling structure and is provided with a second external thread (16) and a shaft sealing groove (17), the shaft is provided with a through hole (1) in the middle, the outer side of the shaft (101) is sleeved with a magnetically conductive shaft sleeve (111), and the magnetically conductive shaft sleeve (111) is made of a magnetically conductive material.

4. A high temperature resistant magnetic fluid seal structure according to claim 1, wherein The magnet (23) is one of a button-shaped structure and a ring-shaped structure.

5. A high temperature resistant magnetic fluid seal structure according to claim 1, wherein The outer side of the magnetic pole (110) is provided with a magnetic pole sealing groove (22).

6. A high temperature resistant magnetic fluid seal according to claim 1 wherein, The dust cover (108) and the heat insulation plate (109) are fixed on the shaft (101) by the shaft clamp, and the shaft (101) is provided with the heat dissipation tooth (4) between the dust cover (108) and the heat insulation plate (109).

7. A high temperature resistant magnetic fluid seal according to claim 1 wherein, The screw cover plate (102) and the threaded cover plate (103) are provided with sealing grooves and sealing plugs (46).

8. A high temperature resistant magnetic fluid seal structure according to claim 1, wherein The front and rear water seals (37, 39) are sleeved in front of and behind the second lower water outlet (29) and the second upper water outlet (38), and the back parts thereof are pressed by the first and second partition rings (205, 202), respectively, and the outer sides of the first and second partition rings (205, 202) are provided with sealing grooves, and the inner sides thereof are provided with the front and rear water seals (36, 40).

9. A high temperature resistant magnetic fluid seal according to claim 1 wherein, The outer side of the shaft (101) is provided with a shunt pipe (204), the shunt pipe (204) is provided with a flow guide hole, the inner side of the shunt pipe (204) is provided with a second key groove (31), and a sealing groove is arranged between the shunt pipe (204) and the shaft (101); the outer side of the shunt pipe (204) and the shaft cooling shell (203) are provided with a sealing groove (28), and the shaft cooling front bearing (32) and the shaft cooling rear bearing (42) are further arranged between the shunt pipe (204) and the shaft cooling shell (203), the inner ring of one side of the shaft cooling front bearing (32) is provided with a stepped positioning, the inner ring of one side of the shaft cooling rear bearing (42) is provided with a shaft clamping limiting, the shaft cooling front bearing (32) and the shaft cooling rear bearing (42) are respectively provided with the front cover plate (206) and the rear cover plate (201), the flange of the shaft cooling shell (203) is provided with a hole (19), a flange counterbore (34) and a water discharging groove, the flange counterbore (34) cooperates with a screw positioning joint sealing structure and a shaft cooling structure.

10. A high temperature resistant magnetic fluid seal structure according to claim 1, wherein The front bearing (10) and the outer ring of the middle bearing are separated by a partition pipe (107).