High-precision double-head sensor chip

Abstract

The utility model discloses a high-precision double-head sensor chip, and belongs to the technical field of sensor chips. A high-precision double-head sensor chip comprises a ceramic body formed by combining a first diaphragm, a second diaphragm and a third diaphragm, and further comprises a cavity and a detection cavity which are respectively formed in the second diaphragm and are communicated with each other, and a plurality of triangular plugging blocks are fixedly connected above the third diaphragm; the cavity is divided into a first cavity body, a second cavity body and a buffer cavity body by the plurality of groups of triangular blocking blocks; a first oxygen pumping electrode and a second oxygen pumping electrode are fixedly connected in the third diaphragm, the first oxygen pumping electrode is located in the first cavity, and the second oxygen pumping electrode is located in the second cavity; the reaction time of the first oxygen pumping electrode and the second oxygen pumping electrode to tail gas can be prolonged, meanwhile, nitrogen oxide is prevented from escaping to the buffer cavity, the fault tolerance of the device can be improved, cross interference among different gas components is avoided, and the failure of the whole system caused by single-point faults is avoided.

Description

TECHNICAL FIELD

[0001] The utility model relates to sensor chip technical field especially relates to a high-precision double -end sensor chip. BACKGROUND

[0002] The nitrogen oxygen sensor ceramic chip is the core component of the tail gas monitoring system, is manufactured with high temperature co-fired ceramic technology, and is sintered by a plurality of zirconia ceramic laminated substrates to form a multi-chamber structure. It utilizes the ion conductivity of yttria-doped zirconia to decompose and measure the concentration through the pump oxygen electrode, and stabilizes the oxygen partial pressure in the reference channel to improve the accuracy. The chip integrates the heating electrode, which can work stably at a high temperature of 600-800 DEG C, and is suitable for harsh environments such as automobile exhaust and industrial emissions.

[0003] In the existing device, the sensor pumps out the oxygen in the tail gas through the electrochemical principle to accurately measure the concentration of nitrogen oxides. If there is residual oxygen, it will react with nitrogen oxides, causing the measured value to deviate from the actual concentration. Based on this, the utility model can minimize the residual oxygen during detection. UTILITY MODEL CONTENT

[0004] The technical problem to be solved by the utility model is to overcome the shortcomings of the prior art and provide a high-precision double-end sensor chip that can overcome the above problems or at least partially solve the above problems.

[0005] In order to achieve the above purpose, the utility model adopts the following technical scheme:

[0006] A high-precision double-end sensor chip, comprising a ceramic body composed of a first diaphragm, a second diaphragm and a third diaphragm, further comprising: a cavity and a detection cavity body are respectively formed on the second diaphragm, the cavity and the detection cavity body are communicated, a plurality of triangular blocks are fixedly connected above the third diaphragm; a plurality of triangular blocks are arranged side by side to form an anti-backflow channel; a plurality of triangular blocks divide the cavity into a first cavity, a second cavity and a buffer cavity; a first pump oxygen electrode and a second pump oxygen electrode are fixedly connected in the third diaphragm, the first pump oxygen electrode is located in the first cavity, and the second pump oxygen electrode is located in the second cavity.

[0007] Preferably, a common electrode is fixedly connected to the first diaphragm, a buffer gas cavity is formed in the first diaphragm, and the buffer gas cavity is located in the first cavity and the second cavity respectively.

[0008] Preferably, a partition plate is fixedly connected to the third diaphragm, and the partition plate divides the cavity into two independent cavities.

[0009] Preferably, a sinking channel is formed in the third diaphragm, and a measurement electrode is fixedly connected to the third diaphragm.

[0010] Preferably, the third diaphragm is fixedly connected with a fourth diaphragm below, the fourth diaphragm is fixedly connected with a fifth diaphragm below, and the fifth diaphragm is fixedly connected with a sixth diaphragm below.

[0011] Further, a reference electrode is fixedly connected to the fourth diaphragm, and a reference air channel is formed in the fourth diaphragm.

[0012] Further, a heating wire is fixedly connected in the fifth diaphragm.

[0013] Preferably, an air hole is formed in the first diaphragm and communicates with the buffer cavity.

[0014] Compared with the prior art, the high-precision double-head sensor chip has the following beneficial effects:

[0015] 1. The high-precision double-head sensor chip has the following beneficial effects: the cavity is arranged in the second diaphragm, a plurality of triangular blocks are fixed above the third diaphragm, the plurality of triangular blocks divide the cavity into a plurality of spaces, a buffer cavity is arranged in the first diaphragm, so that the reaction time of the first pump oxygen electrode and the second pump oxygen electrode on the tail gas is increased, and the escape of nitrogen oxides to the buffer cavity is avoided.

[0016] 2. The high-precision double-head sensor chip has the following beneficial effects: the partition is arranged in the cavity, so that the cavity is divided into two independent spaces, the fault tolerance of the device is increased, the cross interference between different gas components is avoided, and the single-point failure of the entire system is avoided.

[0017] The parts not involved in the device are the same as or can be realized by the prior art, the reaction time of the first pump oxygen electrode and the second pump oxygen electrode on the tail gas is increased, the escape of nitrogen oxides to the buffer cavity is avoided, the fault tolerance of the device is increased, the cross interference between different gas components is avoided, and the single-point failure of the entire system is avoided. BRIEF DESCRIPTION OF DRAWINGS

[0018] Figure 1 A structure diagram of the high-precision double-head sensor chip is provided.

[0019] Figure 2 A structure diagram of the cavity in the high-precision double-head sensor chip is provided.

[0020] Figure 3 A sectional view of the high-precision double-head sensor chip is provided.

[0021] Figure 4 A high-precision double-head sensor chip is provided.Figure 3 Enlarged structural diagram of section A;

[0022] Figure 5 This utility model proposes a high-precision dual-head sensor chip. Figure 3 Enlarged structural diagram of part B.

[0023] In the diagram: 1. First diaphragm; 11. Common electrode; 12. Buffer gas chamber; 13. Air vent; 2. Second diaphragm; 21. Triangular block; 22. Detection chamber; 23. Separator; 3. Third diaphragm; 31. Measuring electrode; 32. First oxygen pump electrode; 33. Second oxygen pump electrode; 34. Sinking channel; 4. Fourth diaphragm; 41. Reference electrode; 42. Reference air channel; 5. Fifth diaphragm; 51. Heating wire; 6. Sixth diaphragm; 7. Cavity; 71. First cavity; 72. Second cavity; 73. Buffer cavity. Detailed Implementation

[0024] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present utility model. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments.

[0025] In the description of this utility model, it should be understood that the terms "upper", "lower", "front", "rear", "left", "right", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0026] Example 1: Refer to Figures 1-5 A high-precision dual-head sensor chip includes a ceramic body composed of a first diaphragm 1, a second diaphragm 2, and a third diaphragm 3. It also includes: a cavity 7 and a detection cavity 22 respectively formed on the second diaphragm 2, the cavity 7 being connected to the detection cavity 22; multiple triangular blocks 21 fixedly connected above the third diaphragm 3; the multiple triangular blocks 21 arranged in a group to form an anti-backflow channel; the multiple groups of triangular blocks 21 dividing the cavity 7 into a first cavity 71, a second cavity 72, and a buffer cavity 73; a first oxygen pumping electrode 32 and a second oxygen pumping electrode 33 fixedly connected inside the third diaphragm 3, the first oxygen pumping electrode 32 being located inside the first cavity 71, and the second oxygen pumping electrode 33 being located inside the second cavity 72.

[0027] The utility model discloses a cavity 7 is set up in the second diaphragm 2, and a plurality of groups of triangular blocking pieces 21 are fixed above the third diaphragm 3, a plurality of groups of triangular blocking pieces 21 divide the cavity 7 into a plurality of spaces, the tail gas enters the buffer cavity 73 from the outside, then the tail gas enters the first cavity 71 after the shunt of the first group of triangular blocking pieces 21, the wider area of the tail of triangular blocking piece 21 can block the backflow of gas, the tail gas is separated from oxygen for the first time by the first pump oxygen electrode 32 in the first cavity 71 and is separated from oxygen for the second time by the second pump oxygen electrode 33 after passing through the second group of triangular blocking pieces 21 and entering the second cavity 72, and the nitrogen oxide enters the detection cavity 22 and is detected by the measuring electrode 31 after passing through the last group of triangular blocking pieces 21.

[0028] The adjacent two groups of triangular blocking pieces 21 are staggered arrangement, so that the tail gas can smoothly enter the gap of the next group of triangular blocking pieces 21 after being separated by the previous group of triangular blocking pieces 21, avoiding the tail gas from rebounding due to too strong obstruction, and the staggered design can avoid the escape of nitrogen oxide to the buffer cavity 73.

[0029] Embodiment 2: refer to Figures 1-5 , basically same with embodiment 1, further more: the first diaphragm 1 is fixedly connected with common electrode 11, the first diaphragm 1 is provided with buffer gas cavity 12, the buffer gas cavity 12 is located in the first cavity 71 and the second cavity 72 respectively, the third diaphragm 3 is fixedly connected with baffle 23, the baffle 23 divides the cavity 7 into two independent cavities, the third diaphragm 3 is provided with sinking channel 34, the third diaphragm 3 is fixedly connected with measuring electrode 31, the third diaphragm 3 is fixedly connected with fourth diaphragm 4 below, the fourth diaphragm 4 is fixedly connected with fifth diaphragm 5 below, the fifth diaphragm 5 is fixedly connected with sixth diaphragm 6 below, the fourth diaphragm 4 is fixedly connected with reference electrode 41, the fourth diaphragm 4 is provided with reference air channel 42, the fifth diaphragm 5 is fixedly connected with heating wire 51, the first diaphragm 1 is provided with air hole 13, and the air hole 13 is communicated with the buffer cavity 73.

[0030] In the utility model, the buffer gas cavity 12 is set up in the first diaphragm 1, so that the space of the first cavity 71 and the second cavity 72 can be expanded, thereby the time of the tail gas staying in the first cavity 71 and the second cavity 72 can be increased, and the time of the first pump oxygen electrode 32 and the second pump oxygen electrode 33 reacting with the tail gas can be increased, further reducing the oxygen content in the tail gas, by setting the sinking channel 34, the nitrogen oxide can be detected by entering the detection cavity 22 through the sinking channel 34 by the characteristics that the mass of nitrogen oxide is greater than that of oxygen.

[0031] Wherein the problem of limited to the cost of processing, the first diaphragm 1 and the third diaphragm 3 are respectively divided into two diaphragms, through the cutting and combination of one of the diaphragms, the buffer cavity 12 and the sinking channel 34 can be formed;

[0032] The heating wire 51 is used for rapidly heating the device to the working temperature, the reference air channel 42 is connected with the external air, and the reference electrode 41 detects the content of the external air to form a contrast with the detection result of the measuring electrode 31;

[0033] The cavity 7 is divided into two independent spaces by the partition 23, so that the tail gas in the two spaces can be subjected to independent electrochemical reactions, and the gases after the reactions are subjected to detection in the sinking channel 34, so that the fault tolerance of the device can be increased, the cross interference between different gas components can be avoided, the reliability of the sensor is improved, and the system failure caused by single point failure can be avoided.

[0034] The above only describes the preferred embodiments of the present application, and the protection scope of the present application is not limited to this. Any person skilled in the art can make equivalent replacements or changes according to the technical scheme and the inventive concept of the present application within the technical range disclosed by the present application, and all of them should be covered within the protection scope of the present application.

Claims

1. A high-precision double-end sensor chip comprising a ceramic body composed of a first diaphragm (1), a second diaphragm (2), and a third diaphragm (3), characterized in that, Also include: The second diaphragm (2) is respectively provided with a cavity (7) and a detection cavity (22), the cavity (7) is communicated with the detection cavity (22), the third diaphragm (3) is fixedly connected with a plurality of triangular blocks (21) above; A plurality of the triangular blocks (21) are arranged in parallel to form an anti-reflow channel; a plurality of triangular blocks (21) divide the cavity (7) into a first cavity (71), a second cavity (72) and a buffer cavity (73); The third diaphragm (3) is fixedly connected with a first pump oxygen electrode (32) and a second pump oxygen electrode (33) inside, the first pump oxygen electrode (32) is located in the first cavity (71), and the second pump oxygen electrode (33) is located in the second cavity (72).

2. The high-precision double-end sensor chip according to claim 1, wherein, The first diaphragm (1) is fixedly connected with a common electrode (11), and the first diaphragm (1) is provided with a buffer air cavity (12) inside, the buffer air cavity (12) is located in the first cavity (71) and the second cavity (72) respectively.

3. The high-precision double-end sensor chip according to claim 1, wherein, The third diaphragm (3) is fixedly connected with a partition (23) thereon, and the partition (23) divides the cavity (7) into two independent cavities.

4. The high-precision double-end sensor chip according to claim 1, wherein, The third diaphragm (3) is provided with a sinking channel (34) thereon, and the third diaphragm (3) is fixedly connected with a measuring electrode (31) thereon.

5. The high-precision double-end sensor chip according to claim 1, wherein, The third diaphragm (3) is fixedly connected with a fourth diaphragm (4) below, the fourth diaphragm (4) is fixedly connected with a fifth diaphragm (5) below, and the fifth diaphragm (5) is fixedly connected with a sixth diaphragm (6) below.

6. The high-precision double-end sensor chip according to claim 5, wherein, The fourth diaphragm (4) is fixedly connected with a reference electrode (41) thereon, and the fourth diaphragm (4) is provided with a reference air channel (42) thereon.

7. The high-precision double-end sensor chip according to claim 6, wherein, The fifth diaphragm (5) is fixedly connected with a heating wire (51) inside.

8. The high-precision double-end sensor chip according to claim 1, wherein, The first diaphragm (1) is provided with an air hole (13) thereon, and the air hole (13) is communicated with the buffer cavity (73).

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