Gas detection device

Abstract

The utility model relates to a gas detection device, comprising: a gas pipeline, a gas inlet of which is connected with a pipeline for transmitting a gas to be detected; the sensor assembly is arranged in the gas pipeline and is used for detecting the impurity content of the to-be-detected gas in the gas pipeline; the gas valve is arranged on the gas pipeline; the control assembly is connected with the sensor assembly and the gas valve and used for receiving the impurity content and controlling the opening degree of the gas valve under the condition that the impurity content is within the preset range so as to reduce the gas flow of the to-be-detected gas, further diffusion of a pollution source can be avoided, gas purification equipment such as a purifier can be compatible, and the cost is low.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of gas detection, and in particular to a gas detection device. BACKGROUND

[0002] In modern industrial production, especially in the fields of semiconductor manufacturing, electronic device manufacturing, medical device manufacturing, etc., the requirements for the purity and quality of special gases are becoming higher and higher. Purifiers and other gas purification equipment are generally used to produce special gases, which can meet the needs of industrial production to a certain extent.

[0003] However, the purifiers and other gas purification equipment in the related art may have impurities mixed into the gas circuit. When facing the problem of pipeline pollution, the operation of cleaning or replacing the pipeline is usually selected after confirming that pollution has occurred, which is costly. CONTENT OF THE UTILITY MODEL

[0004] Therefore, it is necessary to provide a gas detection device which can avoid further spread of pollution impurities and is compatible with purifiers and other gas purification equipment, and has low cost.

[0005] The present application provides a gas detection device, which comprises:

[0006] A gas pipeline, an air inlet of the gas pipeline is connected with a pipeline for transmitting a to-be-detected gas;

[0007] A sensor assembly arranged in the gas pipeline, configured to detect an impurity content of the to-be-detected gas in the gas pipeline;

[0008] A gas valve arranged on the gas pipeline;

[0009] A control assembly connected with the sensor assembly and the gas valve respectively, configured to receive the impurity content, and control an opening degree of the gas valve to reduce a gas flow of the to-be-detected gas when the impurity content is within a preset range.

[0010] In one of the embodiments, the control assembly is further configured to control the gas valve to be closed when the impurity content is greater than a maximum value of the preset range.

[0011] In one of the embodiments, the sensor assembly comprises:

[0012] A particulate matter sensor configured to detect a particulate matter content of the to-be-detected gas;

[0013] A humidity sensor configured to detect a humidity of the to-be-detected gas.

[0014] In one of the embodiments, the preset range comprises a particulate matter content range and a humidity range; wherein,

[0015] The control component is configured to reduce the opening degree of the gas valve when the particle size is within the particle size range and the humidity is within the humidity range, or

[0016] The control component is configured to control the gas valve to be closed when the particle size is greater than the maximum value of the particle size range or the humidity is greater than the maximum value of the humidity range.

[0017] In one embodiment, the gas detection device further comprises:

[0018] A sampling tray is provided with at least one sampling area, and part of the sampling tray is located in the gas pipeline;

[0019] At least one filter element, each of which corresponds to a sampling area;

[0020] A driving component is connected to the control component and the sampling tray, and is configured to drive the sampling tray to rotate under the control of the control component, so as to switch between a first state and a second state;

[0021] In the first state, the target filter element is located in the gas pipeline; in the second state, the target filter element is located outside the gas pipeline, and the target filter element is any filter element on the sampling tray.

[0022] In one embodiment, the sampling area is provided with a groove for accommodating the filter element.

[0023] In one embodiment, the gas detection device further comprises:

[0024] A component analyzer is connected to the control component and is configured to detect the impurity components filtered by the target filter element when the sampling tray is in the second state.

[0025] In one embodiment, the gas detection device further comprises:

[0026] An alarm component is connected to the control component;

[0027] The control component is further configured to control the alarm component to output a first alarm signal when the impurity content is greater than the minimum value of the preset range.

[0028] In one embodiment, the gas detection device further comprises:

[0029] A pressure sensor is arranged in the gas pipeline and is configured to detect the pressure in the gas pipeline;

[0030] The control component is also connected with the pressure sensor, and is configured to control the alarm component to output a second alarm signal when the pressure is greater than a pressure threshold.

[0031] In one of the embodiments, the gas detection device further comprises:

[0032] A display component is connected with the control component, and is configured to display information acquired by the control component.

[0033] The gas detection device comprises a gas pipeline, a sensor component, a gas valve and a control component, wherein the gas inlet of the gas pipeline can be connected with a pipeline of a gas purification device such as a purifier, and can be compatible with the gas purification device and work cooperatively with the gas purification device, so that the cost of updating and replacing old equipment can be effectively saved. In addition, the control component can automatically control the gas valve according to the impurity content of the gas to be detected, so as to adjust the gas flow in the gas pipeline and avoid further diffusion of the pollution source without manual intervention, thereby greatly improving the work efficiency, avoiding errors and instability caused by manual operation, and also achieving accurate control of the gas purity together with the gas purification device in the previous stage, so as to ensure the purity and quality of the gas and meet the high requirements of modern industrial production on the gas purity. The gas detection device has the advantages of high automation, good compatibility, high control precision and good safety performance. BRIEF DESCRIPTION OF DRAWINGS

[0034] Figure 1 Structure diagram of the gas detection device provided by the embodiment of the present application;

[0035] Figure 2 Structure diagram of the gas detection device provided by the embodiment of the present application;

[0036] Figure 3 Structure diagram of the gas detection device provided by the embodiment of the present application;

[0037] Figure 4 Structure diagram of the gas detection device provided by the embodiment of the present application;

[0038] Figure 5 Structure diagram of the gas detection device provided by the embodiment of the present application;

[0039] Figure 6 Structure diagram of the gas detection device provided by the embodiment of the present application;

[0040] Figure 7 Structure diagram of the gas detection device provided by the embodiment of the present application;

[0041] Figure 8Fig. 8 is a structural schematic diagram of a gas detection device according to an embodiment of the present application.

[0042] Explanation of reference numerals:

[0043] 110 - gas pipeline; 101 - gas inlet; 102 - gas outlet; 103 - housing;

[0044] 120 - sensor assembly; 121 - particulate matter sensor; 122 - humidity sensor;

[0045] 130 - gas valve; 140 - control assembly; 150 - alarm assembly; 160 - pressure sensor;

[0046] 170 - recess; 171 - drive assembly; 172 - sampling tray; 173 - filter;

[0047] 180 - component analyzer; 190 - display assembly. DETAILED DESCRIPTION

[0048] In order to make the above objectives, characteristics and advantages of the present application more apparent, specific embodiments of the present application will be described in detail below with reference to the accompanying drawings. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present application. However, it will be apparent to one skilled in the art that the present application can be practiced without some or all of these specific details. In other instances, well known process steps have not been described in detail in order not to unnecessarily obscure the present application. It is also to be understood that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting.

[0049] In the description of the present application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for the purpose of facilitating the description of the present application and simplifying the description, and therefore cannot be understood as indicating or implying that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the present application.

[0050] In addition, the terms "first", "second", etc. are used only for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the technical features indicated. Therefore, the features defined with "first", "second" can explicitly or implicitly include at least one of the features. In the description of the present application, the meaning of "a plurality of" is at least two, such as two, three, etc., unless otherwise explicitly specified.

[0051] In the utility model, unless another definite provision and limitation, the terms "mount", "connect", "electric connection", "fix" and so on should do the broad sense understanding, for example, can be fixed electric connection, also can be detachable electric connection, or be integrated;Can be mechanical electric connection, also can be electric connection;Can be directly connected, also can be indirectly connected through the intermediate medium, can be the communication of two elements or the interaction of two elements, unless another definite limitation. For the ordinary skilled person in the art, the specific meaning of the above terms in the utility model can be understood according to the specific circumstances.

[0052] In the utility model, unless another definite provision and limitation, the first feature is "on" or "under" the second feature can be that the first and second features are in direct contact, or the first and second features are indirectly in contact through an intermediate medium. Moreover, the first feature "over", "above" and "on" the second feature can be that the first feature is directly above or obliquely above the second feature, or it only means that the horizontal height of the first feature is greater than that of the second feature. The first feature "under", "below" and "on" the second feature can be that the first feature is directly below or obliquely below the second feature, or it only means that the horizontal height of the first feature is less than that of the second feature.

[0053] It should be noted that when an element is referred to as "fixed to" or "provided on" another element, it can be directly on the other element or there can be a middle element. When an element is considered to be "electrically connected" to another element, it can be directly electrically connected to the other element or there can be a middle element. The terms "vertical", "horizontal", "up", "down", "left", "right" and similar expressions used herein are for illustrative purposes only and are not the only implementation.

[0054] In an exemplary embodiment, the application provides a gas detection device, which can be applied to the gas outlet of a purifier, or the gas inlet and outlet of a high-temperature diffusion pipeline or an LPCVD pipeline, to realize detection and automatic adjustment of the output gas of the corresponding pipeline.

[0055] As shown in Figure 1 The gas detection device includes a gas pipeline 110, a sensor assembly 120, a gas valve 130 and a control assembly 140. The gas pipeline 110 includes a gas inlet 101 and a gas outlet 102. The gas inlet 101 of the gas pipeline 110 can be connected with a pipeline for transmitting a gas to be detected. The gas to be detected can be purified gas output by a purifier, or purified gas transmitted by a high-temperature diffusion pipeline or an LPCVD pipeline. Exemplarily, the purified gas includes but is not limited to nitrogen, oxygen, hydrogen, argon and the like.

[0056] The gas inlet 101 of the gas pipeline 110 can be connected with a pipeline gas outlet of a purifier to receive the to-be-tested gas output by the purifier. The gas inlet 101 of the gas pipeline 110 can be connected with a gas inlet or a gas outlet of a high-temperature diffusion pipeline or a low-pressure chemical vapor deposition (LPCVD) pipeline to receive the to-be-tested gas from the high-temperature diffusion pipeline or the LPCVD pipeline. The gas outlet 102 of the gas pipeline 110 can be connected with a semiconductor manufacturing device, an electronic device manufacturing device, a medical device manufacturing device, or the like to provide the purified gas output by the gas detection device for process production.

[0057] The sensor assembly 120 can be located in the gas pipeline 110 to detect the impurity content of the to-be-tested gas in the gas pipeline 110. The impurities in the to-be-tested gas include, but are not limited to, particulate matter, water vapor, hydrocarbons, carbon dioxide, and the like. The sensor assembly 120 can include at least one sensor to correspond to detect the impurity content of the to-be-tested gas. For example, the sensor assembly 120 can include a humidity sensor, a temperature and humidity sensor, a particulate matter sensor, and the like.

[0058] The gas valve 130 is arranged on the gas pipeline 110. For example, the gas valve 130 is arranged on the pipeline between the gas inlet 101 and the gas outlet 102 of the gas pipeline 110, and can be used to control the gas flow of the gas in the gas pipeline 110. For example, the gas valve 130 has multiple states, such as a closed state and a conductive state with different opening degrees. When the gas valve 130 is in the closed state, the to-be-tested gas at the gas inlet 101 cannot be transmitted to the gas outlet 102 through the gas valve 130. When the gas valve 130 is in the conductive state with different opening degrees, the gas flow through the gas valve 130 is different. For example, the opening degree of the gas valve 130 is positively correlated with the gas flow. The greater the opening degree of the gas valve 130, the greater the gas flow through the gas valve 130; the smaller the opening degree of the gas valve 130, the smaller the gas flow through the gas valve 130.

[0059] The control assembly 140 is connected with the sensor assembly 120 and the gas valve 130, respectively. The control assembly 140 is arranged outside the gas pipeline 110, can receive the relevant sensing data from the sensor assembly 120, and then obtain the impurity content of the to-be-tested gas, and control the opening degree of the gas valve 130 to reduce the gas flow of the to-be-tested gas when the impurity content is within a preset range.

[0060] The control component 140 can pre-store preset ranges corresponding to the impurity content. When the impurity content is within the preset range, it indicates that there is a certain amount of impurities in the to-be-tested gas, which will affect the purity of the gas. In the embodiments of the present application, the preset range has a minimum value and a maximum value. The minimum value can be understood as a first safety threshold, and the maximum value can be understood as a second safety threshold. When the impurity content is greater than or equal to the first safety threshold and less than or equal to the second safety threshold, the control component 140 can control the opening degree of the gas valve 130 to reduce the gas flow of the to-be-tested gas in the gas pipeline 110.

[0061] For example, the control component 140 can include a memory and a processor. The memory includes but is not limited to a non-volatile memory and a volatile memory, which can be used to store the preset ranges corresponding to each impurity in the to-be-tested gas. The processor includes but is not limited to a general-purpose processor, a central processing unit, a digital signal processor, and a programmable logic device, which can control the opening degree of the gas valve 130 according to the obtained impurity content to reduce the gas flow of the gas in the gas pipeline 110. In this way, the situation that the gas flow is too large and exceeds the purification capacity of the purifier per unit time can be avoided. Therefore, reducing the gas flow can reduce the working load of the front purifier and other gas purification equipment, which helps to more fully filter the gas in the purifier and reduce the impurity concentration.

[0062] The gas detection device provided by the embodiments of the present application includes a gas pipeline 110, a sensor component 120, a gas valve 130, and a control component 140. The gas inlet of the gas pipeline 110 can be connected with the pipeline of the purifier and other gas purification equipment, which can be compatible with the purifier and other gas purification equipment and work together with them to effectively save the cost of updating and replacing old equipment. In addition, the control component 140 can automatically control the gas valve 130 according to the impurity content of the to-be-tested gas to adjust the gas flow of the gas in the gas pipeline 110, avoid the further spread of the pollution source, and greatly improve the work efficiency without manual intervention. At the same time, errors and instability caused by manual operation can be avoided, and the purifier and other gas purification equipment in the front process can be used together to accurately control the purity of the gas, ensure the purity and quality of the gas, meet the high requirements of modern industrial production on the purity of the gas, and have the advantages of high automation, good compatibility, high control precision, and good safety performance.

[0063] In an exemplary embodiment, the preset range can include a minimum value and a maximum value. When the impurity content is greater than the maximum value of the preset range, it indicates that there is too much impurity in the to-be-tested gas, and the to-be-tested gas does not meet the requirements of the purified gas. In this case, the control component 140 can control the gas valve 130 to be closed to avoid the to-be-tested gas in the gas pipeline 110 flowing to the gas outlet 102 of the gas pipeline 110.

[0064] The gas detection device in the embodiment can control the automatic gas valve to close when the impurity content of the to-be-detected gas is too high, timely handle the sudden pollution event, avoid the to-be-detected gas from continuing to be transmitted to the subsequent pipeline, for example, the gas inlet pipeline of the LPCVD, and the occurrence of the pollution of the subsequent pipeline, thereby reducing the waste of resources and reducing the production cost. In addition, the control component 140 can flexibly control the gas valve 130 according to the impurity content of the to-be-detected gas, and can meet the needs of different industrial productions.

[0065] In an exemplary embodiment, the impurities present in the to-be-detected gas include but are not limited to particulate matter, water vapor and other gas impurities. The particulate matter includes but is not limited to solid particulate matter and liquid particulate matter. Please continue to refer to Figure 1 , the sensor component 120 can include a particulate matter sensor 121 and a humidity sensor 122. Exemplarily, the particulate matter sensor 121 can be located on the inner wall of the gas pipeline 110 and used to detect the particulate matter of the to-be-detected gas. The humidity sensor 122 can also be located on the inner wall of the gas pipeline 110 and used to detect the humidity of the to-be-detected gas. Optionally, the specific arrangement positions of the particulate matter sensor 121 and the humidity sensor 122 are not limited, and the particulate matter sensor 121 and the humidity sensor 122 can be arranged adjacently on the inner wall of the gas pipeline 110 or symmetrically about the central axis of the gas pipeline 110.

[0066] In an exemplary embodiment, the particulate matter sensor 121 includes but is not limited to an optical particulate matter sensor (for example, a laser dust sensor), an electrochemical particulate matter sensor, an ionic particulate matter sensor, a gas sensor and the like. For the convenience of description, the laser dust sensor is taken as an example for description in the embodiment of the present application. The particulate matter measurement range of the particulate matter sensor 121 is 0-1000 particles / cm³, and the measurement accuracy is ±10 particles / cm³.

[0067] In an exemplary embodiment, the humidity sensor 122 can include a capacitive humidity sensor, a resistive humidity sensor, a semiconductor humidity sensor, a digital temperature and humidity sensor and the like. For the convenience of description, the digital temperature and humidity sensor 122 is taken as an example for description in the embodiment of the present application. The relative humidity measurement range of the humidity sensor 122 is 0-100% RH, and the typical relative humidity accuracy is 1.8% RH.

[0068] The control component 140 can pre-store a humidity range corresponding to the humidity and a particulate matter range corresponding to the particulate matter. The control component 140 can acquire the particulate matter and the humidity of the to-be-detected gas based on the sensor component 120, and reduce the opening degree of the gas valve 130 when the particulate matter is within the particulate matter range and the humidity is within the humidity range, so as to reduce the gas flow of the to-be-detected gas in the gas pipeline 110.

[0069] In this application, for the convenience of illustration, the humidity range is taken as an example, which includes 80%-85%; the particle size range is taken as an example, which includes 50-500 particles / cm³. That is, the first level safety threshold corresponding to the humidity is 80%, the second level safety threshold corresponding to the humidity is 85%, the first level safety threshold corresponding to the particle size is 50 particles / cm³, and the first level safety threshold corresponding to the particle size is 500 particles / cm³. It should be noted that the humidity range and the particle size range can be adjusted according to actual needs, and are not limited to the above examples. For example, in the case that the particle size of the gas to be measured is greater than 50 particles / cm³ and less than 500 particles / cm³, and the relative humidity is greater than 80% and less than 85%, the control component 140 can control the gas valve 130 to reduce the opening degree, so as to reduce the gas flow of the gas pipeline 110. For example, the control component 140 can control the gas valve 130 to reduce the opening degree according to a preset step, so that the gas flow of the gas pipeline 110 is reduced at a speed of a preset percentage (for example, 10%) per second, until the impurity content in the gas to be measured is lower than the corresponding first level safety threshold. The preset step and the preset percentage are set correspondingly, and the preset step can be pre-stored in the control component 140. It should be noted that the preset step and the preset percentage can be adjusted according to actual needs, and are not limited in the embodiments of the present application.

[0070] In an exemplary embodiment, the control component 140 is configured to control the gas valve 130 to be closed when the particle size is greater than the maximum value of the particle size range or the humidity is greater than the maximum value of the humidity range. Alternatively, the control component 140 is configured to control the gas valve 130 to be closed when the humidity is greater than the maximum value of the humidity range. For example, the maximum value of the particle size range (i.e., the second level safety threshold) can be 500 particles / cm³, and the maximum value of the humidity range (i.e., the second level safety threshold) can be 85%. If the particle size of the gas to be measured is greater than 500 particles / cm³, the control component 140 controls the gas valve 130 to be closed. Alternatively, if the humidity of the gas to be measured is greater than 85%, the control component 140 controls the gas valve 130 to be closed.

[0071] The gas detection device in the embodiment can control the automatic gas valve to be closed when the particle size of the gas to be measured is too high or the humidity is too high, so as to timely deal with the sudden pollution event, avoid the gas to continue to be transmitted to the subsequent pipeline, for example, the inlet pipeline of the LPCVD, and prevent the pollution of the subsequent pipeline, which can reduce the waste of resources and reduce the production cost. In addition, the control component 140 can flexibly control the gas valve 130 according to the impurity content of the gas to be measured, so as to meet the needs of different industrial productions.

[0072] AsFigure 2 As shown, in an exemplary embodiment, the gas detection device further includes an alarm component 150 connected to the control component 140. The alarm component 150 can output a first alarm signal under the control of the control component 140. Specifically, the control component 140 can control the alarm component 150 to output the first alarm signal when the impurity content exceeds a preset minimum value. The type of the first alarm signal includes, but is not limited to, sound wave signals, light wave signals, and SMS signals.

[0073] For example, the first alarm signal may include a first sub-signal and a second sub-signal, wherein the first sub-signal and the second sub-signal are different. The control component 140 may control the alarm component 150 to output the first sub-signal when the impurity content is within a preset range, and control the alarm component 150 to output the second sub-signal when the impurity content exceeds the maximum value of the preset range. The warning level of the second sub-signal is greater than that of the first sub-signal. For example, the higher the output frequency, brightness, or volume of the alarm signal, the higher the corresponding warning level.

[0074] In this embodiment, the alarm component 150 in the gas detection device can output a first alarm signal when the impurity content exceeds the minimum value of the preset range, controlled by the control component 140, to remind the staff to pay attention, thereby improving production safety and ensuring the safety of operators and equipment.

[0075] like Figure 3 As shown, in an exemplary embodiment, the gas detection device further includes a pressure sensor 160 disposed in the gas pipeline 110, which can be used to detect the pressure in the gas pipeline 110. Exemplarily, the pressure sensor 160 may be of the type of resistance strain gauge, capacitive, piezoelectric, resonant, etc.

[0076] The control component 140 is also connected to the pressure sensor 160 for controlling the alarm component 150 to output a second alarm signal when the pressure exceeds a pressure threshold. Exemplarily, the second alarm signal includes, but is not limited to, an acoustic signal, a light signal, and a text message.

[0077] In this embodiment, the alarm component 150 in the gas detection device can output a second alarm signal when the pressure in the gas pipeline 110 exceeds the pressure threshold, controlled by the control component 140, to alert the staff and improve production safety, thereby ensuring the safety of operators and equipment.

[0078] like Figures 4-6As shown, in an exemplary embodiment, the gas detection device further comprises a driving assembly 171, a sampling tray 172 and at least one filter 173. The driving assembly 171 is connected with the control assembly 140 and the sampling tray 172 respectively, and the driving assembly 171 can drive the sampling tray 172 to rotate under the control of the control assembly 140.

[0079] The sampling tray 172 can comprise a first face and a second face arranged oppositely, wherein the first face of the sampling tray 172 faces the direction of the gas inlet 101 of the gas pipeline 110, and the second face of the sampling tray 172 faces the gas outlet 102 of the gas pipeline 110. The sampling tray 172 is provided with at least one sampling area, and each sampling area can be correspondingly provided with a filter 173. The filter 173 can be used to filter impurities in the gas to be detected. For example, the filter 173 can include, but is not limited to, an ultra-thin filter element, a filter screen, etc.

[0080] The sampling area can be located on the first face of the sampling tray 172. For example, the sampling tray 172 is provided with a plurality of sampling areas, and the plurality of sampling areas are uniformly distributed on the sampling tray 172. For example, the sampling tray 172 can comprise four sampling areas, and the four sampling areas are arranged in a ring shape on the sampling tray 172. Correspondingly, the four filters 173 are correspondingly arranged with the four sampling areas respectively.

[0081] The driving assembly 171 can be connected with the geometric center of the sampling tray 172 to drive the sampling tray 172 to rotate. The driving assembly 171 is located outside the gas pipeline 110 and on the side where the second face of the sampling tray 172 is located. It can be understood that the geometric center of the sampling tray 172 is located outside the gas pipeline 110. For example, the driving assembly 171 can comprise a rotating shaft connected with the sampling tray 172, a driving circuit for driving the rotating shaft to rotate, etc. In the embodiments of the present application, the specific components of the driving motor are not limited, and are not limited to the foregoing examples.

[0082] The control assembly 140 can control the driving assembly 171 to drive the sampling tray 172 to rotate, so as to switch the sampling tray 172 between a first state and a second state. In the first state, the target filter is located in the gas pipeline 110; in the second state, the target filter is located outside the gas pipeline 110. The target filter can include any filter 173 on the sampling tray 172. For the convenience of description, it is assumed that the sampling tray 172 is provided with four filters 173, for example, a first filter, a second filter, a third filter and a fourth filter, and the first filter is taken as an example to illustrate the target filter. When the driving assembly 171 drives the sampling tray 172 to rotate to the first state, the first filter is located in the gas pipeline 110; in the second state, the first filter is located outside the gas pipeline 110.

[0083] The control component 140 can control the driving component 171 to drive the sampling tray 172 to rotate to rotate the target filter currently located in the gas pipeline 110 to outside of the gas pipeline 110 when the impurity content of the gas to be measured is in the preset range. For example, the control component 140 can control the driving component 171 to drive the sampling tray 172 to rotate after the opening of the gas valve 130, or control the opening of the gas valve 130 after controlling the driving component 171 to drive the sampling tray 172 to rotate.

[0084] Optionally, the control component 140 can control the driving component 171 to drive the sampling tray 172 to rotate to rotate the target filter currently located in the gas pipeline 110 to outside of the gas pipeline 110 when the impurity content of the gas to be measured is greater than or equal to the maximum value of the preset range. For example, the control component 140 can control the driving component 171 to drive the sampling tray 172 to rotate after the closing of the gas valve 130, or control the closing of the gas valve 130 after controlling the driving component 171 to drive the sampling tray 172 to rotate.

[0085] In the embodiment, the driving component 171 is controlled to drive the sampling tray 172 to rotate to move the filter 173 located in the gas pipeline 110 to outside of the gas pipeline 110 to collect the impurities of the gas to be measured in the gas pipeline 110, so that the sampling efficiency and sampling accuracy of the impurities in the gas to be measured can be realized by avoiding collecting the impurity sample of the gas to be measured in the gas pipeline 110 in a manual manner.

[0086] Please continue to refer to Figure 6 In an exemplary embodiment, the sampling area is provided with a groove 170, and the filter 173 is located in the groove 170. The groove 170 can be used to carry the filter 173 and limit the filter 173 to avoid the filter 173 from falling into the gas pipeline 110 during the movement of the sampling tray 172.

[0087] As shown in Figure 7 In an exemplary embodiment, the gas detection device includes a gas pipeline 110, a sensor component 120, a gas valve 130, a control component 140, a sampling tray 172, a filter 173, a driving component 171, and a component analyzer 180.

[0088] The component analyzer 180 is used to detect impurity components on a target filter when the sampling tray 172 is in the second state. The drive assembly 171 can drive the sampling tray 172 to rotate, transferring the target filter on the sampling tray 172 to the stage of the component analyzer 180, thereby enabling the detection of impurity components on the target filter on the stage to sample and detect the types of impurity elements in the gas path. For example, the component analyzer can be an X-ray fluorescence (XRF) analyzer with an element detection range from fluorine (F) to americium (Am) and a measurement accuracy of 1 part per million (ppm) to 100%.

[0089] In this embodiment, the drive assembly 171, sampling tray 172, filter 173, control assembly 140, and component analyzer 180 are included. The sampling tray 172 can be adapted to the gas pipeline 110 and the component analyzer 180. When the sampling tray 172 is in the second state, it can be located on the stage of the component analyzer 180 to realize automated sampling and detection of impurity components in the gas to be tested, thereby improving the analysis efficiency and accuracy of impurity components in the gas to be tested.

[0090] In an exemplary embodiment, the component analyzer 180 can output the detected component results to the control component 140. The control component 140 can analyze the acquired component results. When the content of any impurity element exceeds a preset threshold, the control component 140 can control the gas valve 130 to close to prevent contamination of the gas pipeline to the pipeline connected to the gas outlet. Optionally, the control component 140 can also control the alarm component 150 to output a third alarm signal when the content of any impurity element exceeds the preset threshold to alert personnel. The type of the third alarm signal is the same as the aforementioned first and second alarm signals, and will not be described again here.

[0091] like Figure 8 As shown, in an exemplary embodiment, the gas detection device further includes a display component 190 connected to the control component 140. The display component 190 can be used to display information acquired by the control component 140. In this embodiment, the information acquired by the control component 140 includes, but is not limited to, impurity content (e.g., large real-time data collected by each sensor in the sensor component 120), pressure values ​​within the gas pipeline 110, impurity components acquired by the component analyzer 180, and their corresponding concentrations.

[0092] In an exemplary embodiment, the display assembly 190 can include a display and an operation panel, which can be used to set preset ranges of impurity content, such as maximum and minimum values of particle size range, maximum and minimum values of humidity range, pressure threshold value, and the like. For example, the operation panel can receive preset threshold value information input by the worker to set the preset ranges of impurity content, and the like.

[0093] Optionally, the display assembly 190 can also be used to adjust the display mode of the display information. The display mode includes, but is not limited to, table, curve, bar chart, pie chart, and line chart.

[0094] Optionally, the display assembly 190 can also display operation guide documents, help documents, and the like related to the gas detection device to provide assistance to the worker.

[0095] Please continue to refer to Figure 8 Optionally, the gas detection device can also include a housing 103, and the alarm assembly 150 can be arranged on the housing 103.

[0096] In an exemplary embodiment, the gas detection device further includes a protection circuit, such as an overcurrent protection, an overvoltage protection, an undervoltage protection, and the like, to provide multiple safety protection functions and ensure the safety of the device and the operator.

[0097] The technical features of the above embodiments can be combined in any manner. To make the description concise, all possible combinations of the technical features in the above embodiments are not described, but as long as the combinations of the technical features do not contradict, they should be considered as the scope of the present disclosure.

[0098] The above embodiments only express several implementation manners of the present disclosure, and the description is relatively specific and detailed, but it should not be understood as a limitation on the scope of the present disclosure. It should be noted that for ordinary skilled persons in the art, without departing from the concept of the present disclosure, a number of modifications and improvements can be made, which are all within the protection scope of the present disclosure. Therefore, the protection scope of the present disclosure should be subject to the appended claims.

Claims

1. A gas detection device, characterized by, The gas detection device comprises: a gas pipeline, an inlet of which is connected with a pipeline for transmitting a gas to be detected; a sensor assembly arranged in the gas pipeline, configured to detect an impurity content of the gas to be detected in the gas pipeline; a gas valve arranged on the gas pipeline; a control assembly connected with the sensor assembly and the gas valve respectively, configured to receive the impurity content, and control an opening degree of the gas valve to reduce a gas flow of the gas to be detected when the impurity content is within a preset range.

2. The gas detection device of claim 1, wherein, The control assembly is further configured to control the gas valve to be closed when the impurity content is greater than a maximum value of the preset range.

3. The gas detection apparatus according to claim 1 or 2, characterized by The sensor assembly comprises: a particulate matter sensor configured to detect a particulate matter content of the gas to be detected; a humidity sensor configured to detect a humidity of the gas to be detected.

4. The gas detection device of claim 3, wherein, The preset range comprises a particulate matter content range and a humidity range; wherein, the control assembly is configured to reduce the opening degree of the gas valve when the particulate matter content is within the particulate matter content range and the humidity is within the humidity range, or the control assembly is configured to control the gas valve to be closed when the particulate matter content is greater than a maximum value of the particulate matter content range or the humidity is greater than a maximum value of the humidity range.

5. The gas detection device of claim 1, wherein, The gas detection device further comprises: a sampling tray provided with at least one sampling area, and part of the sampling tray is arranged in the gas pipeline; at least one filter element, each filter element is arranged in a corresponding sampling area; a driving assembly connected with the control assembly and the sampling tray respectively, configured to drive the sampling tray to rotate under the control of the control assembly, so as to switch between a first state and a second state; wherein, in the first state, a target filter element is arranged in the gas pipeline; in the second state, the target filter element is arranged outside the gas pipeline, and the target filter element is any filter element on the sampling tray.

6. The gas detection device of claim 5, wherein, The sampling area is provided with a groove for accommodating the filter element.

7. The gas detection device of claim 5, wherein, The gas detection device further comprises: a component analyzer connected with the control assembly, configured to detect an impurity component filtered by the target filter element when the sampling tray is in the second state.

8. The gas detection device of claim 1, wherein, The gas detection device further comprises: an alarm assembly connected with the control assembly; the control assembly is further configured to control the alarm assembly to output a first alarm signal when the impurity content is greater than a minimum value of the preset range.

9. The gas detection device of claim 8, wherein, The gas detection device further comprises: a pressure sensor arranged in the gas pipeline, configured to detect a pressure in the gas pipeline; the control assembly is further connected with the pressure sensor, and configured to control the alarm assembly to output a second alarm signal when the pressure is greater than a pressure threshold.

10. The gas detection device of claim 1, wherein, The gas detection device further comprises: a display assembly connected with the control assembly, configured to display information acquired by the control assembly.

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