Adjusting mechanism of light receiving device

Abstract

The utility model relates to an adjusting mechanism of a light receiving device, which comprises a supporting seat and a floating disc, a driving part of the adjusting mechanism is arranged on an easy-to-operate front side and an easy-to-operate end side, the driving part comprises a transverse driving part and a vertical driving part, the transverse driving part drives at least one part of the floating disc to move along the end face of the supporting seat, and the vertical driving part drives at least one part of the floating disc to move along the end face of the supporting seat. The vertical driving part is used for adjusting the distance and inclination of the floating disc relative to the supporting base so as to change the height of the floating disc in the normal direction of the end face of the supporting base and the swing angle of the floating disc. The lens cone can be adjusted in multiple degrees of freedom from the two sides, and the defect that adjustment needs to be conducted from multiple side faces in the prior art is overcome.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of wafer measurement technology, and particularly relates to an adjusting mechanism of a light receiving device. BACKGROUND

[0002] At present, one of wafer surface measurement technologies is to use laser to scan a high-speed rotating wafer, and to collect the reflected light (specular reflection or diffuse reflection) of the wafer surface by a light receiving device. According to the different incident angles of the measurement light and the precision error of processing and assembly, after the installation is completed, the light receiving angle of the light receiving device needs to be adjusted to meet the angle requirement of the measurement light.

[0003] However, the installation space of the wafer measurement device is narrow, and the light receiving device cannot be adjusted from multiple directions, resulting in poor adjustable freedom. Moreover, the existing adjusting mechanism has a complex structure and occupies a large space, and is not suitable for the installation environment of the wafer measurement device. Therefore, how to design the adjusting mechanism of the light receiving device to meet the multi-freedom adjustment requirement in a narrow space is a technical problem to be solved in the field. CONTENT OF THE INVENTION

[0004] In order to solve the above technical problems, the present application provides an adjusting mechanism of a light receiving device, which optimizes the internal structure of the adjusting mechanism and sets the driving part of the adjusting mechanism on the end surface which is easy to operate, so as to realize multi-freedom adjustment of the light receiving device in the narrow space of the measurement device rack.

[0005] In order to achieve the above purpose, the adjusting mechanism of the light receiving device of the present application comprises a support seat and a floating disc, wherein the support seat is fixed on the measurement device rack, the floating disc is floatingly connected to the support seat, the lens barrel is installed on the floating disc, and the floating disc drives the lens barrel to move to adjust the light receiving angle. There is an operation space on the front side (the front side in the present application refers to the side which is not interfered by other parts and is convenient to operate) and the end side of the adjusting mechanism, and the driving part is arranged on the front side and the end side of the adjusting mechanism. The driving part comprises a horizontal driving part and a vertical driving part, wherein the horizontal driving part drives at least a part of the floating disc to move along the end surface of the support seat, and the vertical driving part is used to adjust the distance and the inclination of the floating disc relative to the support seat, so as to change the height of the floating disc in the normal direction of the end surface of the support seat and the swing angle of the floating disc.

[0006] As one of the preferred modes of the adjusting mechanism, the lateral driving part is arranged at the front side of the floating disc, and the vertical driving part is arranged at the front side of the support base and the end side of the floating disc. The floating disc comprises a floating body and a lens barrel carrier, a containing cavity is arranged in the middle of the floating body, at least part of the lens barrel carrier is located in the containing cavity, and the lens barrel is mounted on the lens barrel carrier. The lateral driving part comprises two lateral driving members arranged at the front side of the floating body, the two lateral driving members are spaced apart along the circumference of the floating body, the lateral driving members abut against the lens barrel carrier and are used for driving the lens barrel carrier; elastic supporting members are arranged in the containing cavity at positions balanced with the force applied by the lateral driving members, the elastic supporting members abut against the lens barrel carrier, the elastic supporting members provide elastic support for the lens barrel carrier, and the lens barrel carrier can move in the containing cavity and keep stable when the lens barrel carrier is driven by the lateral driving members.

[0007] The vertical driving part comprises a front vertical driving part arranged at the front side of the support base and an end vertical driving member arranged at the end side of the floating body, or a front vertical driving part arranged at the front side of the support base and two end vertical driving members arranged at the end side of the floating body. The front vertical driving part comprises a front vertical driving member and a turning member arranged in the support base, the front vertical driving member drives the turning member, the turning member abuts against the end face of the floating body, and the turning member converts the movement of the front vertical driving member into the abutting movement of the floating body. The end vertical driving member is mounted at the end side of the floating body and abuts against the end face of the support base through the floating body. The front vertical driving part and the end vertical driving member are arranged in a circumferential direction of the adjusting mechanism.

[0008] Further, the end of one lateral driving member abuts against the lens barrel carrier, and the other lateral driving member drives a lateral turning member arranged in the floating body, the lateral turning member abuts against the lens barrel carrier, and the lateral turning member converts the movement of the lateral driving member into the abutting movement of the lens barrel carrier.

[0009] The driving member can be selected from an electric driving member such as an electric telescopic rod, a manual driving member such as a tightening screw, and a hydraulic driving member such as a hydraulic telescopic rod, as long as the driving member can be arranged in the space at the front side and the end side of the adjusting mechanism.

[0010] The adjusting mechanism of the light collecting device has the following technical effects:

[0011] The adjusting mechanism of the light collecting device has the following technical effects: BRIEF DESCRIPTION OF DRAWINGS

[0012] Figure 1 is a structural view of the light collecting device located on the measuring device rack.

[0013] Figure 2 is a structural view of an adjusting mechanism of a light receiving device.

[0014] Figure 3 is another view of the adjusting mechanism of the light receiving device.

[0015] Figure 4 is a structural view of a support seat.

[0016] Figure 5 is a structural view of a floating disc. DETAILED DESCRIPTION

[0017] The specific embodiments of the present application will be described in detail below with reference to the accompanying drawings. It should be understood that the specific embodiments described herein are merely intended to illustrate and explain the present application, and are not intended to limit the present application.

[0018] Referring to Figures 1-5 An adjusting mechanism of a light receiving device includes a support seat 16 and a floating disc, wherein the support seat 16 is fixed on a measuring device rack 3, and the floating disc is floatingly connected to the support seat 16. The floating disc includes a floating body 17 and a lens barrel carrier 18, the lens barrel carrier 18 is movably installed on the floating body 17, a light receiving hole 19 is provided through the support seat 16, the floating body 17 and the lens barrel carrier 18, a light receiving lens barrel 20 is installed on the lens barrel carrier 18, and the lens barrel carrier 18 drives the light receiving lens barrel 20 to move to adjust the light receiving angle.

[0019] The vertical driving part is provided at the front side of the support seat 16 and the end side of the floating body 17, and includes two front vertical driving parts at the front side of the support seat 16 and one end vertical driving part at the end side of the floating body 17. The driving part of the vertical driving part is selected as a jacking screw. Two front vertical jacking screws 21 are spaced apart along the circumference of the support seat 16 and are screwed to the support seat 16, respectively. The end of the front vertical jacking screw 21 abuts against a turning part inside the support seat 16, and the turning part is selected as a turning ball 22. The turning ball 22 is driven by the front vertical jacking screw 21 to abut against the end face of the floating body 17. The movement direction of the turning ball 22 is 90° to the movement direction of the front vertical jacking screw 21. The end of the front vertical jacking screw 21 extrudes the turning ball 22, and the turning ball 22 is moved towards the end face of the floating body 17 to drive the floating disc.

[0020] One end vertical jacking screw 23 is installed on the end side of the floating body 17, and forms a triangular arrangement with the two front vertical jacking screws 21. The end vertical jacking screw 23 is screwed on the floating body 17, and the end of the end vertical jacking screw 23 penetrates through the floating body 17 and abuts against the end face of the support seat 16 to drive the floating disc. The front vertical jacking screw 21 and the end vertical jacking screw 23 cooperate to change the height of the floating disc in the normal direction of the end face of the support seat 16, or to change the swing angle of the floating disc. As one of the alternative ways, the end vertical jacking screw 23 is screwed on the end side of the support seat 16, and is rotationally connected between the end vertical jacking screw 23 and the floating body 17 to drive the floating body 17 to move and change the swing angle of the floating body 17.

[0021] The lateral driving part is arranged on the front side of the floating body 17, and includes two lateral driving members arranged on the front side of the floating body 17. The lateral driving member is selected from a jacking screw. Two lateral jacking screws 24 are arranged on the floating body 17 in a circumferential direction and are screwed on the floating body 17, respectively. The floating body 17 is provided with a receiving cavity 25 in the middle. One end of the lens barrel carrier 18 is located in the receiving cavity 25. The end of one of the lateral jacking screws 24 abuts against the lens barrel carrier 18. The other lateral jacking screw 24 abuts against a lateral turning member arranged in the floating body 17. The lateral turning member is selected from a lateral turning ball 26. The lateral turning ball 26 is driven by the lateral jacking screw 24 to abut against the lens barrel carrier 18. The movement direction of the lateral turning ball 26 is perpendicular to the movement direction of the lateral jacking screw 24. An elastic support member two 27 is arranged in the receiving cavity 25 at a position balanced with the force applied by the lateral jacking screw 24. The elastic support member two 27 abuts against the lens barrel carrier 18 to provide elastic support for the lens barrel carrier 18, so that the lens barrel carrier 18 can stably move in the receiving cavity 25 when the lens barrel carrier 18 is driven by the lateral jacking screw 24.

[0022] Since the driving member is a jacking screw, in order to increase the stability of the movement of the floating disc, especially when the floating disc is located on the lower side of the support seat 16, an elastic connecting member is arranged between the floating body 17 and the support seat 16. The elastic connecting member includes two rod bodies 281 and an elastic body 282 arranged between the rod bodies 281. The rod bodies 281 are arranged in the grooves 29 of the opposite surfaces of the floating body 17 and the support seat 16. The elastic body 282 is arranged in the through hole of the floating body 17 and the support seat 16. The elastic connecting member provides a pulling force to the floating disc towards the support seat 16, which is beneficial to the stable movement of the floating disc under the driving of the jacking screw.

[0023] An end plate 29 is arranged on the end face of the floating body 17. The end plate 29 blocks the end of the lens barrel carrier 18 in the receiving cavity 25 to prevent it from being separated from the receiving cavity 25.

[0024] The basic principle, main features and advantages in the explored field of the utility model are described in detail above, and some use examples are described in detail. Finally, it should be pointed out that: the examples given above are only used to explain the utility model and not to limit the utility model. Although the utility model is described in detail with reference to the examples, those skilled in the art can still modify the described examples and schemes, or replace related technical parts, so that any modification, equivalent replacement within the spirit and principles of the utility model is within the protection scope of the claims of the utility model.

Claims

1. An adjusting mechanism of a light collecting device, characterized by: The adjusting mechanism comprises a support base fixed on a measuring device frame and a floating disc floatingly connected to the support base, and a lens barrel is mounted on the floating disc; a driving part is arranged on the front side and the end side of the adjusting mechanism; the driving part comprises a transverse driving part and a vertical driving part, the transverse driving part drives at least a part of the floating disc to move along the end face of the support base, and the vertical driving part is used for adjusting the distance and the inclination of the floating disc relative to the support base.

2. An adjusting mechanism for a light collecting device as claimed in claim 1, characterized in that: The transverse driving part is arranged on the front side of the floating disc, and the vertical driving part is arranged on the front side of the support base and the end side of the floating disc; the floating disc comprises a floating body and a lens barrel carrier, a receiving cavity is arranged in the middle of the floating body, at least a part of the lens barrel carrier is located in the receiving cavity, and the lens barrel is mounted on the lens barrel carrier; the transverse driving part comprises two transverse driving members arranged on the front side of the floating body, the two transverse driving members are spaced apart in the circumferential direction of the floating body, and the transverse driving members abut against the lens barrel carrier; an elastic support member is arranged in the receiving cavity at a position balanced with the force applied by the transverse driving members, and the elastic support member abuts against the lens barrel carrier; The vertical driving part comprises two front vertical driving parts arranged on the front side of the support base and an end vertical driving member arranged on the end side of the floating body, or one front vertical driving part arranged on the front side of the support base and two end vertical driving members arranged on the end side of the floating body; the front vertical driving part comprises a front vertical driving member and a turning member arranged in the support base, the front vertical driving member drives the turning member, the turning member abuts against the end face of the floating body, and the turning member converts the movement of the front vertical driving member into the abutting movement of the floating body; the end vertical driving member is mounted on the end side of the floating body and abuts against the end face of the support base through the floating body; the front vertical driving part and the end vertical driving member are arranged in the circumferential direction of the adjusting mechanism.

3. An adjusting mechanism for a light collecting device as claimed in claim 2, characterized in that: The end of one of the transverse driving members abuts against the lens barrel carrier, and the other transverse driving member drives a transverse turning member arranged in the floating body, the transverse turning member abuts against the lens barrel carrier, and the transverse turning member converts the movement of the transverse driving member into the abutting movement of the lens barrel carrier.

4. An adjusting mechanism for a light collecting device according to claim 2 or 3, characterized in that: The transverse driving members, the front vertical driving members and the end vertical driving members are selected from top screws, the top screws arranged on the front side of the support base are screwed on the front side of the support base, the top screws arranged on the front side of the floating body are screwed on the front side of the floating body, the top screws arranged on the end side of the floating body are screwed on the support base or the floating body, when the top screws are screwed on the end side of the support base, the top screws are rotationally connected to the floating body, and when the top screws are screwed on the floating body, the top screws abut against the end face of the support base through the floating body.

5. An adjusting mechanism for a light collecting device as claimed in claim 4, characterized in that: An elastic connecting member is arranged between the floating body and the support base, the elastic connecting member comprises two rod bodies and an elastic body arranged between the rod bodies, the rod bodies are respectively arranged in grooves on the opposite surfaces of the floating body and the support base, and the elastic body is arranged in a through hole of the floating body and the support base.

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