Heater, heating device and furnace tube machine table
By using a combination of annular lamp tubes and uniform light lens rings in the furnace tube machine, the problem of axial temperature non-uniformity in the furnace tube was solved, which improved the uniformity of wafer film thickness and reduced energy consumption, and simplified maintenance.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-04-14
- Publication Date
- 2026-04-10
AI Technical Summary
Existing furnace tube machines cannot effectively regulate the temperature in different areas along the furnace tube axis, making it difficult to improve the unevenness of the film thickness formed on the wafer.
The system employs a combination of a ring-shaped lamp tube, a filament, and a uniform light lens ring. The uniform light lens ring converts the light from the filament into parallel light, and combined with a temperature sensor and a temperature controller, it allows for zoned temperature regulation in the axial direction of the furnace tube.
It improves the uniformity of the film thickness on wafers at different locations within the furnace tube, reduces energy consumption and simplifies maintenance, while also improving the cost-effectiveness of the heater.
Smart Images
Figure CN224111323U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The application belongs to the technical field of semiconductor manufacturing equipment, and particularly relates to a heater, a heating device and a furnace tube machine. BACKGROUND
[0002] The furnace tube machine is a process equipment for wafer processing (for example, thermal oxidation, thin film deposition, diffusion doping, annealing, etc.). Wafer processing is a very precise process, and temperature is a very important index in wafer processing, which directly affects the thickness and uniformity of the formed film layer.
[0003] The furnace tube machine comprises a furnace tube and a boat, the boat is arranged in the furnace tube, the boat comprises a plurality of wafer slots (BoatSlot), the plurality of wafer slots are arranged along the axial direction of the furnace tube, and the wafer to be processed is arranged in the wafer slot. When the temperature distribution in different regions of the furnace tube is uneven, the thickness of the film layer formed on different wafers is also uneven.
[0004] In the existing furnace tube machine, the filaments of the heater are arranged on the outer side of the furnace tube along the axial direction of the furnace tube, and adjusting the temperature of the filaments will cause the temperature in the whole furnace tube to rise or fall, so that the temperature in different regions of the furnace tube cannot be adjusted in different zones, and the uniformity of the thickness of the film layer formed on the wafers at different positions in the furnace tube is difficult to further improve. CONTENT OF THE INVENTION
[0005] The application aims to provide a heater, a heating device and a furnace tube machine to improve the temperature distribution uniformity in different regions of the furnace tube, and further improve the uniformity of the thickness of the film layer formed on the wafers at different positions.
[0006] In order to achieve the above-mentioned purpose, the application provides a heater for heating a furnace tube, which comprises:
[0007] An annular lamp tube for sleeving on the furnace tube;
[0008] A filament arranged in the annular lamp tube, the filament is arranged around the furnace tube;
[0009] An even light lens ring arranged on the annular lamp tube, the even light lens ring is located on the side of the filament close to the furnace tube, and is used for converting the light of at least part of the filament into parallel light.
[0010] Optionally, the even light lens ring is a convex lens, and the filament is arranged at the focal point of the even light lens ring.
[0011] Optionally, the homogenizing lens ring is a concave lens, and the heater further comprises a reflecting film located on a side of the filament away from the homogenizing lens ring, for reflecting part of light of the filament to the homogenizing lens ring, and at least part of the reflected light of the reflecting film passes through a focal point of the homogenizing lens ring on a side away from the filament.
[0012] Optionally, the homogenizing lens ring is arranged outside the annular lamp tube; or
[0013] the homogenizing lens ring is arranged inside the annular lamp tube; or
[0014] the annular lamp tube is provided with a ring groove on a side close to the furnace tube, and the homogenizing lens ring is arranged in the ring groove.
[0015] Optionally, the annular lamp tube comprises a first shell and a second shell connected to each other, the second shell is located on a side of the first shell close to the furnace tube, the homogenizing lens ring is arranged on the second shell, and at least the second shell is capable of transmitting light.
[0016] Optionally, the homogenizing lens ring is a concave lens, and the heater further comprises a reflecting film located on a side of the filament away from the homogenizing lens ring, for reflecting part of light of the filament to the homogenizing lens ring, and at least part of the reflected light of the reflecting film passes through a focal point of the homogenizing lens ring on a side away from the filament;
[0017] the first shell is capable of transmitting light, the reflecting film is formed on an inner side of the first shell, or the first shell is the reflecting film.
[0018] Optionally, a height of the annular lamp tube in an axial direction of the furnace tube is 3-8 mm, and a height of the homogenizing lens ring in the axial direction of the furnace tube is less than the height of the annular lamp tube in the axial direction of the furnace tube.
[0019] The application further provides a heating device, comprising:
[0020] a plurality of the heaters;
[0021] a temperature sensor for detecting a wafer temperature in the furnace tube;
[0022] a power supply connected to the filament;
[0023] a temperature controller connected to the temperature sensor and the power supply, for adjusting a heating power of the heater where the temperature sensor is located according to the temperature detected by the temperature sensor.
[0024] The application further provides a furnace tube machine, comprising:
[0025] The furnace tube;
[0026] The heating device, a heater of the heating device is sleeved on the furnace tube, and a plurality of the heaters are arranged at intervals along the axial direction of the furnace tube.
[0027] Optionally, along the axial direction of the furnace tube, all the heaters are divided into N heater groups, N is greater than or equal to 2, each heater group includes at least two heaters, all the filaments in the same heater group are connected in series, and the filaments in different heater groups are connected in parallel.
[0028] The heating device and the furnace tube machine disclosed in the present application have the following beneficial effects:
[0029] In the present application, the heater includes a ring-shaped lamp tube, a filament and a light homogenizing lens ring, the ring-shaped lamp tube is used for sleeving on the furnace tube, the filament is arranged in the ring-shaped lamp tube, the filament is arranged around the furnace tube, and the light homogenizing lens ring is arranged on the ring-shaped lamp tube and located on the side of the filament close to the furnace tube and used for converting the light of at least part of the filament into parallel light. The parallel light heats the furnace tube, and the temperature distribution of different regions in the axial direction of the furnace tube is more uniform, and the thickness uniformity of the film layer formed on the wafer at different positions in the furnace tube can be improved.
[0030] The heater is applied to the furnace tube machine, and a plurality of the heaters are arranged at intervals along the axial direction of the furnace tube. Compared with the scheme that the filaments are arranged outside the furnace tube along the axial direction of the furnace tube, the temperature of different regions in the axial direction of the furnace tube can be adjusted by adjusting the power of different heaters, so that the thickness uniformity of the film layer formed on the wafer at different positions in the furnace tube can be improved.
[0031] Other characteristics and advantages of the present application will become apparent from the following detailed description, or will be learned by practice of the present application.
[0032] It should be understood that the above general description and the following detailed description are only exemplary and explanatory, and cannot limit the present disclosure. BRIEF DESCRIPTION OF DRAWINGS
[0033] The drawings herein are incorporated into the specification and form part of the specification, show embodiments consistent with the present application, and together with the specification serve to explain the principles of the present application. Obviously, the drawings in the following description are only some embodiments of the present application, and other drawings can be obtained by those skilled in the art without creative labor.
[0034] Figure 1 is a schematic diagram of a heater structure in an embodiment of the present application.
[0035] Figure 2 is a schematic diagram of a heater applied to a furnace tube machine in an embodiment of the present application.
[0036] Figure 3 is a schematic diagram of a heater structure with a concave lens in an embodiment of the present application.
[0037] Figure 4 is a schematic diagram of an exploded structure of a ring-shaped lamp tube in an embodiment of the present application.
[0038] Figure 5 is a schematic diagram of a filament mounted on a first housing through a support in an embodiment of the present application.
[0039] Figure 6 is a schematic diagram of a top view of a furnace tube machine in an embodiment of the present application.
[0040] Figure 7 is a comparison diagram of film layer thickness uniformity of a furnace tube machine in the present application and an existing furnace tube machine.
[0041] Figure 8 is a comparison diagram of thermal efficiency of a heater of a furnace tube machine in the present application and an existing furnace tube machine.
[0042] BRIEF DESCRIPTION OF DRAWINGS
[0043] 100, heater; 110, ring-shaped lamp tube; 111, first housing; 112, second housing; 120, filament; 130, light uniformity lens ring; 140, reflective film; 150, light transmission support;
[0044] 200, furnace tube; 300, temperature sensor; 400, power supply. DETAILED DESCRIPTION
[0045] Example implementations will now be described more fully with reference to the accompanying drawings. Example implementations may, however, be implemented in many different forms and should not be construed as limited to the examples set forth herein; rather, these implementations are provided so that this disclosure will be thorough and complete, and will fully convey the scope of example implementations to those skilled in the art.
[0046] Moreover, the described features, structures, or characteristics can be combined in any suitable manner in one or more embodiments. In the following description, numerous specific details are provided to give a thorough understanding of embodiments of the application. One skilled in the relevant art will recognize, however, that the
[0047] The application will be described in further detail below with reference to the drawings and specific embodiments. It is necessary to note that the technical features involved in the various embodiments of the application described below can be combined with each other as long as they do not conflict with each other. The embodiments described below by reference to the drawings are exemplary and are intended to explain the application, and cannot be understood as limiting the application.
[0048] The embodiment provides a heater 100 for heating a furnace tube 200. The furnace tube 200 can be a tubular hollow shell made of quartz, and the furnace tube 200 is closed at one end and open at the other end. A wafer to be processed can be sent into the furnace tube 200 by a wafer boat, and the wafer can be processed by heat oxidation, thin film deposition, diffusion doping, annealing and the like.
[0049] Referring to FIGS. 1 and 2, the heater 100 comprises a ring-shaped lamp tube 110, a filament 120 and a homogenizing lens ring 130. Figure 1 and Figure 2 The ring-shaped lamp tube 110 is used to be sleeved on the furnace tube 200, that is, the ring-shaped lamp tube 110 circumferentially surrounds the furnace tube 200. The ring-shaped lamp tube 110 can be in contact with the furnace tube 200 or form a certain interval with the furnace tube 200. The cross section of the ring-shaped lamp tube 110 perpendicular to the center line is generally circular or elliptical.
[0050] The filament 120 is arranged in the ring-shaped lamp tube 110, and the filament 120 is arranged around the furnace tube 200. That is, the filament 120 can circumferentially heat the furnace tube 200. The filament 120 can be made of tungsten metal or the like. The homogenizing lens ring 130 is arranged on the ring-shaped lamp tube 110, and the homogenizing lens ring 130 is located on the side of the filament 120 close to the furnace tube 200, and is used to convert the light of at least part of the filament 120 into parallel light.
[0051] In the existing furnace tube machine, the filament 120 of the heater 100 is arranged outside the furnace tube 200 in the axial direction of the furnace tube 200. Adjusting the temperature of the filament 120 will cause the temperature inside the entire furnace tube 200 to rise or fall, and the temperature of different regions of the furnace tube 200 in the axial direction cannot be adjusted in different regions, and the uniformity of the thickness of the film layer formed on the wafers at different positions in the furnace tube 200 is difficult to further improve.
[0052] In this embodiment, the heater 100 includes an annular lamp tube 110, a filament 120, and a uniform light lens ring 130. The annular lamp tube 110 is fitted onto the furnace tube 200. The filament 120 is disposed inside the annular lamp tube 110 and surrounds the furnace tube 200. The uniform light lens ring 130 is disposed on the annular lamp tube 110, located on the side of the filament 120 closer to the furnace tube 200, and is used to convert at least a portion of the light from the filament 120 into parallel light. Parallel light heats the furnace tube 200, resulting in a more uniform temperature distribution in the heating area of the heater 100 and uniform thickness of the film layer formed on the wafer at different locations within the furnace tube 200. Furthermore, the uniform light lens ring 130 can also concentrate heating energy, reducing the energy consumption of the furnace tube equipment.
[0053] Furthermore, the heater 100 is integrated into one unit, which improves heating uniformity and reduces energy consumption. At the same time, the heater 100 has low cost and is easy to use. When applied to the furnace tube machine, the heater 100 can also reduce the maintenance difficulty of the entire furnace tube machine.
[0054] Heater 100 is applied to furnace tube machine. Multiple heaters 100 are spaced apart along the axial direction of furnace tube 200. Compared with the scheme where filament 120 is arranged on the outside of furnace tube 200 along the axial direction of furnace tube 200, the temperature of different areas in the axial direction of furnace tube 200 can be zonal by adjusting the power of different heaters 100, so as to improve the uniformity of the thickness of the film layer formed on the wafer at different positions in furnace tube 200.
[0055] In some embodiments, the uniform lens ring 130 is a convex lens, such as... Figure 1 As shown ( Figure 1 The middle arrow indicates a light ray. The filament 120 is positioned at the focal point of the uniform lens ring 130.
[0056] Since the filament 120 is located at the focal point of the uniform light lens ring 130, some of the light emitted by the filament 120 is directed towards the uniform light lens ring 130. After refraction by the uniform light lens ring 130, the light rays directed towards the uniform light lens ring 130 are converted into parallel light and directed towards the furnace tube 200, thereby improving the uniformity of temperature distribution in the heating area of the heater 100.
[0057] In some embodiments, the uniform lens ring 130 is a concave lens, such as... Figure 3 As shown ( Figure 3 (The middle arrow indicates a light ray). When the homogenizing lens ring 130 is a concave lens, the heater 100 also includes a reflective film 140, which is located on the side of the filament 120 away from the homogenizing lens ring 130, and is used to reflect a portion of the light from the filament 120 toward the homogenizing lens ring 130. The extension of at least part of the reflected light from the reflective film 140 passes through the focal point of the homogenizing lens ring 130 on the side away from the filament 120.
[0058] The reflected light is refracted by the homogenizing lens ring 130, and converted into parallel light, which is emitted to the furnace tube 200, thereby improving the uniformity of the temperature distribution of the heating area of the heater 100.
[0059] In some embodiments, the annular lamp tube 110 comprises a first shell 111 and a second shell 112 connected to each other, and the second shell 112 is located on the side of the first shell 111 close to the furnace tube 200, as shown in FIG. 1. Figure 4 The interface between the first shell 111 and the second shell 112 is coaxial with the furnace tube 200. The homogenizing lens ring 130 is arranged on the second shell 112, and at least the second shell 112 is capable of transmitting light. The first shell 111 is provided with a wire hole (not shown) through which a power line is connected to the filament 120 and the power supply 400, but is not limited thereto, and the position of the wire hole on the annular lamp tube 110 can be arranged according to actual needs.
[0060] The homogenizing lens ring 130 and the second shell 112 can be made of quartz, silicon carbide (SiC), or the like. The homogenizing lens ring 130 and the second shell 112 can be adhesively connected, and the first shell 111 and the second shell 112 can also be adhesively connected.
[0061] The annular lamp tube 110 is assembled and connected by the first shell 111 and the second shell 112, which facilitates the installation of the filament 120, the homogenizing lens ring 130, and the like. The second shell 112 is located on the side of the first shell 111 close to the furnace tube 200, and the interface between the first shell 111 and the second shell 112 is coaxial with the furnace tube 200. In this way, the reflective film 140 can be formed on the inner surface of the first shell 111, and the reflective film 140 is arranged in a simpler manner.
[0062] In some embodiments, when the homogenizing lens ring 130 is a concave lens, the heater 100 further comprises a reflective film 140, which can be made of a metal material. The reflective film 140 can be plated on the inner surface of the first shell 111 or pasted on the inner surface of the first shell 111. The first shell 111 and the second shell 112 can be made of the same material to facilitate the adhesion between the first shell 111 and the second shell 112. It should be understood that the first shell 111 can also be made of other non-transparent materials, which can be determined as appropriate.
[0063] The first shell 111 and the second shell 112 are made of the same material, and the reflective film 140 is arranged on the inner surface of the first shell 111, which can reduce the manufacturing cost of the heater 100.
[0064] It should be noted that the reflecting film 140 can be arranged on the inner surface of the first shell 111, but is not limited thereto, and the first shell 111 can also be used as the reflecting film 140, that is, the first shell 111 is made of a metal material, the inner surface of the first shell 111 is a reflecting surface capable of reflecting light, and the specific implementation can be determined as required.
[0065] In some embodiments, the light homogenizing lens ring 130 is arranged on the inner side of the annular lamp tube 110, as shown in Figure 1 and Figure 3 .
[0066] The light homogenizing lens ring 130 is arranged on the inner side of the annular lamp tube 110, which does not affect the installation size of the heater 100, makes it more convenient to install the heater 100 to the outer side of the furnace tube 200, and can also avoid the surface of the light homogenizing lens ring 130 from being contaminated. When the light homogenizing lens ring 130 is a convex lens, the outer contour of the side of the light homogenizing lens ring 130 close to the furnace tube 200 is similar to the inner contour of the annular lamp tube 110. Arranging the light homogenizing lens ring 130 on the inner side of the annular lamp tube 110 makes it more convenient to bond the light homogenizing lens ring 130 and the annular lamp tube 110.
[0067] In some embodiments, the light homogenizing lens ring 130 can be arranged on the outer side of the annular lamp tube 110.
[0068] When the light homogenizing lens ring 130 is a concave lens, the outer contour of the side of the light homogenizing lens ring 130 away from the furnace tube 200 is similar to the outer contour of the annular lamp tube 110. Arranging the light homogenizing lens ring 130 on the outer side of the annular lamp tube 110 makes it more convenient to bond the light homogenizing lens ring 130 and the annular lamp tube 110.
[0069] In some embodiments, the annular lamp tube 110 is provided with a ring groove on the side close to the furnace tube 200, and the light homogenizing lens ring 130 is located in the ring groove, and the light homogenizing lens ring 130 is partially located in the annular lamp tube 110 and partially located outside the annular lamp tube 110, as shown in Figure 4 . The annular lamp tube 110 and the light homogenizing lens ring 130 can be assembled and connected, but are not limited thereto, and the annular lamp tube 110 and the light homogenizing lens ring 130 can also be integrally connected, that is, the annular lamp tube 110 and the light homogenizing lens ring 130 are an integral structure made of the same material, and the specific implementation can be determined as required. The annular lamp tube 110 includes the first shell 111 and the second shell 112 connected to each other, the second shell 112 is located on the side of the first shell 111 close to the furnace tube 200, and the ring groove is arranged on the second shell 112.
[0070] The annular lamp tube 110 is provided with a ring groove on the side close to the furnace tube 200, and the light homogenizing lens ring 130 is located in the ring groove, and the annular lamp tube 110 does not affect the shape of the light homogenizing lens ring 130, and does not affect the light homogenizing lens ring 130 converting the light of the filament 120 into parallel light.
[0071] In some embodiments, the outer surface of the uniform lens ring 130 is provided with a silver or aluminum oxide coating.
[0072] Forming a silver or aluminum oxide coating on the outer surface of the light-diffusing lens ring 130 can reduce the adhesion of contaminants to the outer surface of the light-diffusing lens ring 130. It also facilitates the cleaning of contaminants when they affect the operation of the light-diffusing lens ring 130.
[0073] In some embodiments, the height H1 of the annular lamp 110 in the axial direction of the furnace tube 200 is 3 mm to 8 mm, which is 0.5 to 1 times the distance between adjacent wafer slots on the wafer boat. When the annular lamp 110 is applied to the furnace tube machine, one or more heaters 100 are provided for heating each area of the wafer to be processed. The height H2 of the uniform light lens ring 130 in the axial direction of the furnace tube 200 is less than the height of the annular lamp 110 in the axial direction of the furnace tube 200.
[0074] The height H1 of the ring lamp 110 in the axial direction of the furnace tube 200 is 3 mm to 8 mm. When the ring lamp 110 is applied to the furnace tube machine, one or more heaters 100 are set for heating in the area where each wafer to be processed is located. Therefore, by adjusting the power of different heaters 100, the temperature of different areas in the axial direction of the furnace tube 200 can be adjusted in zones to improve the uniformity of the film thickness formed on the wafers at different positions in the furnace tube 200.
[0075] In some embodiments, the filament 120 is connected to the first housing 111 via a light-transmitting bracket 150, such as... Figure 4 As shown, this allows for control of the positional relationship between the filament 120 and the focal point of the uniform light lens ring 130. Multiple light-transmitting supports 150 can be spaced around the filament 120, such as... Figure 5 As shown, this provides multi-point support for the filament 120.
[0076] The filament 120 is mounted on the first housing 111 via multiple light-transmitting supports 150. Using these supports reduces light shading and improves the thermal efficiency of the filament 120. The multiple supports also prevent displacement of the filament 120, which would affect the beam-diffusing lens ring 130's conversion of the filament 120's light into parallel light.
[0077] When manufacturing the heater 100, firstly, the first housing 111, the second housing 112, and the light-diffusing lens ring 130 are manufactured. The second housing 112 and the light-diffusing lens ring 130 are assembled and connected or integrally formed. The filament 120 is installed on the first housing 111 through the light-transmitting bracket 150, and the filament 120 is connected to the power cord through the wire hole. The first housing 111 and the second housing 112 are assembled and connected.
[0078] The application also provides a heating device, which comprises a plurality of heaters 100, a plurality of temperature sensors 300, a power supply 400 and a temperature controller. The temperature sensors 300 are used to detect the temperature of the wafer in the furnace tube 200, and preferably, the temperature sensors 300 are arranged on the side of the annular lamp tube 110 close to the furnace tube 200. The power supply 400 is connected with the lamp filament 120, as shown in Figure 6 The temperature controller is connected with the temperature sensors 300 and the power supply 400, and is used to adjust the heating power of the heater 100 where the temperature sensor 300 is arranged according to the temperature detected by the temperature sensor 300 and the set temperature.
[0079] When the temperature detected by the temperature sensor 300 is less than the set temperature, the temperature controller controls the power supply 400 to increase the heating power of the heater 100, so as to increase the heating temperature of the lamp filament 120; when the temperature detected by the temperature sensor 300 is greater than the set temperature, the temperature controller controls the power supply 400 to decrease the heating power of the heater 100, so as to decrease the heating temperature of the lamp filament 120, thereby realizing that the temperature of the wafer being heated is consistent with the set temperature.
[0080] By adjusting the power of different heaters 100 through the temperature controller, the temperature of different regions in the axial direction of the furnace tube 200 is adjusted in a partitioned manner, so as to improve the thickness uniformity of the film layer formed on the wafers at different positions in the furnace tube 200.
[0081] The application also provides a furnace tube machine, which comprises a furnace tube 200 and a heating device. The heater 100 of the heating device is sleeved on the furnace tube 200, and a plurality of heaters 100 are arranged in the axial direction of the furnace tube 200 in a spaced manner. The center line of the annular lamp tube 110 of the heater 100 is circular and located on the axis of the furnace tube 200.
[0082] The difference between the maximum thickness and the minimum thickness of the film layer formed by the existing furnace tube machine is greater than 30 angstroms, and the difference between the maximum thickness and the minimum thickness of the film layer formed by the furnace tube machine in the embodiment is 2-10 angstroms. The deviation of the thickness of the film layer formed by the existing furnace tube machine from the set thickness is greater than the deviation of the thickness of the film layer formed by the furnace tube machine in the embodiment from the set thickness, as shown in Figure 7 The average thermal efficiency of the heater 100 of the existing furnace tube machine is about 72%, and the average thermal efficiency of the heater 100 of the furnace tube machine in the embodiment is about 85%.
[0083] Therefore, by adjusting the power of different heaters 100 through the temperature controller, the temperature of different regions in the axial direction of the furnace tube 200 is adjusted in a partitioned manner, so as to improve the temperature uniformity of different regions in the axial direction of the furnace tube 200, thereby improving the thickness uniformity of the film layer formed on the wafers at different positions in the furnace tube 200. By converting part of the light of the lamp filament 120 into parallel light through the light homogenizing lens ring 130, the heating energy can be concentrated, and the energy consumption of the furnace tube machine can be reduced.
[0084] In some embodiments, all the heaters 100 are divided into N heater groups along the axial direction of the furnace tube 200, N is greater than or equal to 2. For example Figure 1 As shown, all the heaters 100 are divided into 5 heater groups, which are heater group S1, heater group S2, heater group S3, heater group S4, and heater group S5. Each heater group includes at least two heaters 100, all the filaments 120 in the same heater group are connected in series, and the filaments 120 in different heater groups are connected in parallel. The number of heaters 100 in different heater groups can be the same or different.
[0085] All the filaments 120 in the same heater group are connected in series, and a temperature sensor 300 does not need to be arranged for each heater 100, which can reduce the manufacturing cost of the furnace tube machine; and the heating power of each heater 100 does not need to be controlled separately, which can reduce the control difficulty of the temperature controller.
[0086] The terms "first", "second", and the like in the description of the specification are only used for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the technical features indicated. Therefore, the features defined with "first", "second", and the like can explicitly or implicitly include one or more of the features. In the description of the present application, the meaning of "a plurality of" is two or more, unless otherwise specifically limited.
[0087] In the present application, unless otherwise specifically defined and limited, the terms "assembly", "connection" and the like should be understood broadly, for example, it can be fixed connection, or detachable connection, or integrated; it can be mechanical connection, or electrical connection; it can be direct connection, or indirect connection through intermediate medium, it can be the internal communication of two elements or the interaction relationship between two elements. For ordinary skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.
[0088] In the description of the specification, the description of the terms "some embodiments", "exemplarily" and the like means that the specific features, structures, materials or characteristics described in conjunction with the embodiments or examples are contained in at least one embodiment or example of the present application. In the present specification, the illustrative description of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any appropriate manner in any one or more embodiments or examples. In addition, those skilled in the art can combine and combine the different embodiments or examples described in the specification and the features of different embodiments or examples without contradiction.
[0089] Although the embodiments of the present application have been shown and described above, it is to be understood that the above embodiments are merely exemplary, and are not to be understood as limiting the present application, and any changes, modifications, replacements and variations of the above embodiments made by those skilled in the art within the scope of the present application should be included in the scope of the present application.
Claims
1. A heater for heating a furnace tube, characterized by, The heater comprises: a ring-shaped lamp tube, which is sleeved on the furnace tube; a filament, which is arranged in the ring-shaped lamp tube and surrounds the furnace tube; a homogenizing lens ring, which is arranged on the ring-shaped lamp tube and is located on the side of the filament close to the furnace tube, and is used for converting light of at least part of the filament into parallel light.
2. The heater of claim 1, wherein The homogenizing lens ring is a convex lens, and the filament is arranged at the focal point of the homogenizing lens ring.
3. The heater of claim 1, wherein, The homogenizing lens ring is a concave lens, and the heater further comprises a reflecting film, which is located on the side of the filament away from the homogenizing lens ring, and is used for reflecting part of the light of the filament towards the homogenizing lens ring, and the extension line of at least part of the reflected light of the reflecting film passes through the focal point on the side of the homogenizing lens ring away from the filament.
4. The heater of claim 1, wherein The homogenizing lens ring is arranged on the outside of the ring-shaped lamp tube; or The homogenizing lens ring is arranged on the inside of the ring-shaped lamp tube; or The ring-shaped lamp tube is provided with a ring groove on the side close to the furnace tube, and the homogenizing lens ring is located in the ring groove.
5. The heater of claim 1, wherein The ring-shaped lamp tube comprises a first shell and a second shell connected with each other, the second shell is located on the side of the first shell close to the furnace tube, the homogenizing lens ring is arranged on the second shell, and at least the second shell is capable of transmitting light.
6. The heater of claim 5, wherein, The homogenizing lens ring is a concave lens, and the heater further comprises a reflecting film, which is located on the side of the filament away from the homogenizing lens ring, and is used for reflecting part of the light of the filament towards the homogenizing lens ring, and the extension line of at least part of the reflected light of the reflecting film passes through the focal point on the side of the homogenizing lens ring away from the filament; The first shell is capable of transmitting light, the reflecting film is formed on the inside of the first shell, or the first shell is the reflecting film.
7. The heater of claim 1, wherein The height of the ring-shaped lamp tube in the axial direction of the furnace tube is 3-8 mm, and the height of the homogenizing lens ring in the axial direction of the furnace tube is less than the height of the ring-shaped lamp tube in the axial direction of the furnace tube.
8. A heating device, characterized by It comprises: a plurality of heaters as claimed in any one of claims 1-7; a temperature sensor, which is used for detecting the temperature of a wafer in the furnace tube; a power supply, which is connected with the filament; a temperature controller, which is connected with the temperature sensor and the power supply, and is used for adjusting the heating power of the heater where the temperature sensor is located according to the temperature detected by the temperature sensor.
9. A furnace tube station characterized by, It comprises: a furnace tube; the heating device as claimed in claim 8, wherein the heaters of the heating device are sleeved on the furnace tube, and a plurality of the heaters are arranged at intervals in the axial direction of the furnace tube.
10. The tube furnace station according to claim 9, wherein In the axial direction of the furnace tube, all the heaters are divided into N heater groups, N is greater than or equal to 2, each heater group comprises at least two heaters, all the filaments in the same heater group are connected in series, and the filaments in different heater groups are connected in parallel.