Vacuum switching device and tabletop adsorption detection equipment

Abstract

The utility model discloses a vacuum switching device and table board adsorption detection equipment. The air valve comprises a barrel assembly, a piston disc and a driving part, the barrel assembly is provided with a vacuum cavity, a vacuum opening and a pressure relief opening, the vacuum opening and the pressure relief opening are communicated with the vacuum cavity, the driving part is installed at a first port of the barrel assembly, and a driving shaft of the driving part is connected with the piston disc; the adsorption mechanism is mounted at a second port of the barrel assembly; in the adsorption state, the piston disc cuts off communication between the pressure relief opening and the vacuum opening, and the piston disc keeps dynamic balance at the stop position; and in the release state, the piston disc cuts off communication between the vacuum cavity and the adsorption mechanism. By means of the mode, the vacuum switching device can switch the adsorption state and the release state of the vacuum generator in real time under the condition that the vacuum generator does not stop, frequent starting and stopping of the vacuum generator are avoided, long-term stalling of the vacuum generator in the adsorption state can be prevented, and the service life of the vacuum generator is prolonged. And the service life of the vacuum generator connected to the vacuum port is effectively prevented from being shortened.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of solar cell manufacturing equipment, in particular to a vacuum switching device and a table surface adsorption detection equipment. BACKGROUND

[0002] In the solar cell manufacturing and detection process, many process flows flow into the laser processing process flow, component EL detection process flow, etc., and the battery piece or component needs to be vacuum adsorbed.

[0003] However, the existing vacuum switching device is prone to mechanical wear, sealing failure or drive system overload under high-frequency operation and abnormal stall conditions, which causes the service life of the vacuum generator to be sharply shortened. CONTENT OF THE UTILITY MODEL

[0004] The present application mainly provides a vacuum switching device and a table surface adsorption detection equipment to solve the problem of the sharp shortening of the service life of the vacuum generator caused by the frequent start-stop and stall of the vacuum switching device.

[0005] To solve the above technical problems, one technical scheme adopted by the present application is to provide a vacuum switching device. The vacuum switching device comprises: a wind valve, including a cylinder assembly, a piston disc and a driving piece, the cylinder assembly has a first port and a second port arranged opposite at both ends, the cylinder assembly has a vacuum cavity and a vacuum port and a pressure relief port communicating with the vacuum cavity, the driving piece is installed at the first port of the cylinder assembly and its driving shaft is connected with the piston disc, and the piston disc is located in the vacuum cavity; an adsorption mechanism is installed at the second port of the cylinder assembly, and the adsorption mechanism communicates with the vacuum cavity; wherein the pressure relief port is arranged on the side away from the adsorption mechanism, and the vacuum switching device includes an adsorption state and a release state, in the adsorption state, the driving piece drives the piston disc to move to the stop position in the cylinder assembly, cutting off the communication between the pressure relief port and the vacuum port, so that the vacuum port provides negative pressure conditions to the adsorption mechanism through the vacuum cavity, and the piston disc is kept in dynamic balance at the stop position under the action of the vacuum degree in the vacuum cavity and the driving piece, so as to maintain the vacuum degree in the vacuum cavity at a preset value, and the adsorption mechanism keeps continuous and stable pressure adsorption; in the release state, the driving piece drives the piston disc to move to the release position in the cylinder assembly, cutting off the communication between the adsorption mechanism and the vacuum port, so that the vacuum port, the vacuum cavity and the pressure relief port are communicated with each other.

[0006] In some embodiments, the piston disc edge is in sealing contact with the inner wall of the cylinder assembly, the stop position is between the pressure relief port and the vacuum port near the upper edge of the adsorption mechanism, and the release position is near one side of the vacuum port.

[0007] In some embodiments, the inner wall of the first port and the second port of the cylinder assembly is respectively provided with a stop baffle and a release baffle, one side of the piston disc is used to contact the stop baffle to form a sealing contact, and the other side of the piston disc is used to contact the release baffle to form a sealing contact; wherein the stop baffle is arranged between the pressure relief port and the vacuum port near the upper edge of the adsorption mechanism; the stop position is the end of the stop baffle towards the adsorption mechanism, and the release position is the end of the release baffle away from the adsorption mechanism.

[0008] In some embodiments, the cylinder assembly comprises a vacuum cavity and a first flange connected to the first end of the vacuum cavity, the pressure relief port is arranged on the first flange, the driving member is connected to the first flange, the vacuum port is arranged on the side wall of the vacuum cavity, and the adsorption mechanism is connected to the second end of the vacuum cavity.

[0009] wherein the stop position is the end of the first flange towards the adsorption mechanism; and the second port is the port of the second end of the vacuum cavity.

[0010] The second end of the vacuum cavity is provided with a baffle; and the release position is the end of the baffle away from the adsorption mechanism.

[0011] Both sides of the piston disc are provided with sealing pads, the sealing pad on the piston disc towards the first flange is used to form a sealing contact with the end of the first flange, and the sealing pad on the other side is used to form a sealing contact with the baffle.

[0012] In some embodiments, the first flange comprises a flange plate and a neck, the flange plate is provided with the pressure relief port and connected to the first end of the vacuum cavity, one end of the neck is connected to the flange plate and the neck is arranged in the vacuum cavity, the other end of the neck constitutes the stop position, the pressure relief port communicates with the space in the neck, and the driving member is connected to the flange plate.

[0013] In some embodiments, the driving member is a gas cylinder, which is used to apply a set tension to the piston disc, so that the piston disc abuts against the stop position.

[0014] In some embodiments, the adsorption mechanism comprises a suction cup, a top column and an adapter cylinder, one end of the adapter cylinder is connected to the second port of the cylinder assembly, the other end of the adapter cylinder is connected to the suction cup, the top column is connected to the adapter cylinder and protrudes from the suction cup, the top column is used to open the lifting adsorption port of the carrier plate to be connected, and the suction cup is used to be adsorbed at the lifting adsorption port.

[0015] In some embodiments, the adapter cylinder comprises a movable cylinder, the movable cylinder is configured to be movable along the axial direction, the top column and the suction cup are connected to the movable cylinder, the movable cylinder is used to carry the top column to open the lifting adsorption port of the carrier plate and to make the suction cup tightly contact with the carrier plate.

[0016] In some embodiments, the adapter cylinder further comprises a second flange, the second flange is connected to the second port of the cylinder assembly, and a sliding cavity in sliding fit with the movable cylinder is arranged in the second flange.

[0017] In some embodiments, one end of the movable cylinder in the sliding cavity is provided with an outer flange, and an inner wall of one end of the sliding cavity towards the suction cup is provided with an inner flange, the outer flange is used to form a limiting fit with the inner flange, and a sealing member is arranged on the outer flange and / or the inner flange.

[0018] The adsorption mechanism further comprises a lifting member, the lifting member is installed on the second flange, and a driving end of the lifting member is connected to the movable cylinder.

[0019] In the adsorption state, the driving end of the lifting member pushes the movable cylinder to move, so that the outer flange forms a limiting fit with the inner flange; in the release state, the driving end of the lifting member drives the movable cylinder to reset, so that the outer flange is separated from the inner flange.

[0020] To solve the above technical problems, another technical solution adopted by the present application is to provide a table surface adsorption detection equipment. The table surface adsorption detection equipment comprises a carrier plate and a vacuum switching device as described above, one side of the carrier plate is provided with a table surface adsorption hole, the other side of the carrier plate is provided with a lifting adsorption port, the adsorption mechanism is connected to the lifting adsorption port, and the vacuum port of the vacuum switching device is connected to a negative pressure air blower.

[0021] The application has the beneficial effects that: different from the prior art, the application discloses a vacuum switching device and a table surface adsorption detection equipment. The vacuum switching device provided by the application can switch the adsorption state and the release state in real time without stopping the vacuum generator connected to the vacuum port, avoids frequent starting and stopping of the vacuum generator, is beneficial to increasing the service life of the vacuum generator and improving the stability of the vacuum generator, even if the adsorption is stalled, the piston disc can dynamically abut against the stop position and be separated from the stop position, so that the vacuum degree in the vacuum cavity can be maintained at a preset value, the vacuum generator can be prevented from being stalled for a long time in the adsorption state, the service life of the vacuum generator is reduced, and the adsorption instability phenomenon caused by the vacuum degree fluctuation can be effectively avoided, and the adsorption mechanism can reliably work under various working conditions. BRIEF DESCRIPTION OF DRAWINGS

[0022] In order to more clearly illustrate the technical solutions in the embodiments of the application or the prior art, the following will briefly introduce the drawings needed to be used in the embodiments or the prior art description. Obviously, the drawings in the following description only constitute some embodiments of the application, and for those skilled in the art, other drawings can be obtained from these drawings without creative labor, and the drawings are as follows:

[0023] Figure 1 is a structural schematic view of the vacuum switching device provided by the application in the adsorption state;

[0024] Figure 2 is a structural schematic view of the vacuum switching device provided by the application in the release state; Figure 1

[0025] Figure 3 is a structural schematic view of an embodiment of the table surface adsorption equipment provided by the application. DETAILED DESCRIPTION

[0026] The technical solutions in the embodiments of the application will be described clearly and completely below with reference to the drawings in the embodiments of the application. Obviously, the described embodiments are only some of the embodiments of the application, not all the embodiments. Based on the embodiments in the application, all other embodiments obtained by those skilled in the art without creative labor are within the protection scope of the application.

[0027] ​The terms "first", "second", "third" in the embodiments of the present application are only used for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the technical features indicated. Therefore, the features defined with "first", "second", "third" can explicitly or implicitly include at least one of the features. In the description of the present application, the meaning of "a plurality of" is at least two, such as two, three, etc., unless otherwise explicitly specified. In addition, the terms "include" and "have" and any variations thereof are intended to cover non-exclusive inclusion. For example, a process, method, system, product or device including a series of steps or units is not limited to the listed steps or units, but can optionally include steps or units not listed, or can optionally include other steps or units inherent to the process, method, product or device.

[0028] Reference to "embodiments" herein means that the specific features, structures or properties described in connection with the embodiments can be included in at least one embodiment of the present application. The phrase appears at various places in the specification does not necessarily refer to the same embodiments, nor is it necessarily independent or alternative to other embodiments. It is explicitly and implicitly understood by those skilled in the art that the embodiments described herein can be combined with other embodiments.

[0029] The present application provides a vacuum switching device 100, in combination with Figures 1 to 3 , Figure 1 is a structural schematic diagram of the vacuum switching device provided by the present application in an adsorption state, Figure 2 is a structural schematic diagram of the vacuum switching device shown in Figure 1 in a release state, Figure 3 is a structural schematic diagram of an embodiment of a table adsorption equipment including the vacuum switching device provided by the present application.

[0030] The vacuum switching device 100 includes a wind valve 10 and an adsorption mechanism 20, the adsorption mechanism 20 is connected to the wind valve 10, the wind valve 10 is connected to a vacuum generator, wherein the vacuum generator is used to generate negative pressure, the wind valve 10 is used to switch the negative pressure to the path, so that the negative pressure leads to the adsorption mechanism 20, or the negative pressure leads to the pressure relief port 102 on the wind valve 10, so that the vacuum switching can be realized without stopping the vacuum generator, avoiding frequent start and stop of the vacuum generator, which is beneficial to increase the service life of the vacuum generator and improve its stability.

[0031] In the present application, the vacuum generator is a negative pressure blower or a vacuum pump, etc., and the present application does not limit the specific type. Since the negative pressure blower is often used for negative pressure adsorption and dust extraction, it is less used for vacuum extraction equipment. When extracting vacuum, the negative pressure blower is easily damaged due to stall. The vacuum switching device of the present application can avoid stall, and has greater advantages when used with the negative pressure blower.

[0032] Specifically, the air valve 10 comprises a cylinder assembly 12, a piston disc 14 and a driving member 16, the cylinder assembly 12 has a vacuum cavity 101, a vacuum port 103 and a pressure relief port 102, the driving member 16 is installed at a first port of the cylinder assembly 12 and its driving shaft is connected with the piston disc 14, the piston disc 14 is located in the vacuum cavity 101; an adsorption mechanism 20 is installed at a second port of the cylinder assembly 12, and the adsorption mechanism 20 is communicated with the vacuum cavity 101; wherein the pressure relief port 102 is arranged at a side of the vacuum port 103 away from the adsorption mechanism 20.

[0033] The vacuum switching device 100 comprises an adsorption state and a release state, as shown in Figure 1 the adsorption state, the driving member 16 drives the piston disc 14 to move to a stop position in the cylinder assembly 12, cuts off the communication between the pressure relief port 102 and the vacuum port 103, and makes the adsorption mechanism 20 and the vacuum port 103 communicated, so that the vacuum port 103 provides negative pressure condition to the adsorption mechanism 20 through the vacuum cavity 101, and the piston disc 14 is kept in dynamic balance at the stop position under the action of the vacuum degree in the vacuum cavity 101 and the driving member 16, so as to maintain the vacuum degree in the vacuum cavity 101 at a preset value, at this time the adsorption mechanism 20 keeps continuous and stable pressure adsorption; as shown in Figure 2 the release state, the driving member 16 drives the piston disc 14 to move to a release position in the cylinder assembly 12, cuts off the communication between the adsorption mechanism 20 and the vacuum port 103, and makes the vacuum port 103, the vacuum cavity 101 and the pressure relief port 102 communicated with each other.

[0034] Referring to Figure 1 and Figure 2 , the vacuum port 103 is arranged on the side wall of the cylinder assembly 12, the pressure relief port 102 is arranged on the side wall or the bottom of the cylinder assembly 12, and the vacuum port 103 is arranged above the pressure relief port 102. Referring to Figure 1 , the driving member 16 drives the piston disc 14 to move upward, to above the pressure relief port 102 and not higher than the upper end of the vacuum port 103, the communication between the vacuum port 103 and the pressure relief port 102 is cut off by the piston disc 14, so that the vacuum port 103, the vacuum cavity 101 and the second port are communicated, which is the aforementioned stop position. Referring to Figure 2 , the driving member 16 drives the piston disc 14 to move upward, to above the upper end of the vacuum port 103, the communication between the adsorption mechanism 20 and the vacuum port 103 is cut off by the piston disc 14, so that the vacuum port 103, the vacuum cavity 101 and the pressure relief port 102 are communicated with each other, which is the aforementioned release position.

[0035] The vacuum generator is connected to the vacuum port 103 to generate a negative pressure condition in the vacuum cavity 101; the piston disc 14 is driven by the driving member 16 to move between the release position and the stop position of the cylinder assembly 12 to flexibly switch the release and adsorption states, so that the vacuum switching can be realized without stopping the vacuum generator, the vacuum generator is prevented from frequent starting and stopping, and the service life of the vacuum generator is increased and the stability of the vacuum generator is improved.

[0036] In the adsorption state, the adsorption mechanism 20 is connected to the vacuum cavity 101, the vacuum generator, the vacuum port 103, the vacuum cavity 101 and the adsorption mechanism 20 form a stable negative pressure adsorption path, and the adsorption mechanism 20 continuously and stably adsorbs the object; in the release state, the connection between the vacuum port 103 and the adsorption mechanism 20 is cut off, and the vacuum port 103 is connected to the pressure relief port 102, so that the adsorption mechanism 20 can quickly release the adsorbed object and realize efficient switching.

[0037] Further, in the adsorption state, the vacuum degree in the vacuum cavity 101 and the force of the driving member 16 on the piston disc 14 can be dynamically balanced, so that the vacuum degree in the vacuum cavity 101 can be accurately controlled to a set value, and the adsorption force of the adsorption mechanism 20 is kept stable.

[0038] Specifically, the pressure difference between the vacuum degree in the vacuum cavity 101 and the atmospheric pressure will generate a first force on the piston disc 14, which will make the piston disc 14 have a tendency to move towards the second port, when the first force exceeds the second force applied by the driving member 16 on the piston disc 14, the piston disc 14 will temporarily leave the stop position, and the pressure relief port 102 is connected to the vacuum cavity 101 to reduce the vacuum degree in the vacuum cavity 101, until the first force and the second force are balanced again, the piston disc 14 returns to the stop position, maintains the preset vacuum degree, and ensures the stability of adsorption.

[0039] For example, after the preset vacuum value is determined, the area of the piston disc 14 and the pulling force provided by the driving member 16 on the piston disc 14 can be set correspondingly, when the vacuum value in the vacuum cavity 101 exceeds the preset value, the piston disc 14 leaves the stop position, the pressure relief port 102 is connected to the vacuum cavity 101, the vacuum degree in the vacuum cavity 101 decreases, the first force decreases to be less than the second force, the piston disc 14 returns to the stop position, the piston disc 14 cuts off the connection between the vacuum cavity 101 and the pressure relief port 102, and finally the vacuum value in the vacuum cavity 101 is stably maintained at the preset value. The cross-sectional size of the piston disc 14 and the selection of the driving member 16 can be designed to meet different vacuum degree requirements in the vacuum cavity 101.

[0040] The driving member 16 can be electric or pneumatic to control the precise movement of the piston disc 14, ensuring quick response and efficient operation of the switching process. For example, the driving member 16 includes a motor and a transmission mechanism, the motor drives the piston disc 14 to move precisely through the transmission mechanism, realizing the quick switching of the adsorption and release states. In addition, the driving member 16 composed of the motor and the transmission mechanism can also exert a torque of a preset size to enable the piston disc 14 to abut against the stop position, so as to stably maintain the vacuum degree in the vacuum cavity 101 at a preset vacuum degree, which can prevent the vacuum generator from long-term locking in the adsorption state, causing the service life of the vacuum generator to be reduced, and can effectively avoid the instability of adsorption caused by the fluctuation of the vacuum degree, ensuring that the adsorption mechanism 20 can work reliably under various working conditions.

[0041] In the embodiment, the driving member 16 is a cylinder, which is used to exert a set tension on the piston disc 14, so that the piston disc 14 abuts against the stop position, wherein the cylinder bore can be selected to realize the requirement of maintaining different vacuum degrees in the vacuum cavity 101. For example, the tension provided by the cylinder on the piston disc 14 as the second force, when the vacuum value in the vacuum cavity 101 exceeds the preset value, the cylinder piston is pulled out by the first force generated by the vacuum degree, and the piston disc 14 is separated from the stop position.

[0042] Continuing to refer to Figure 1 and Figure 2 , the cylinder assembly 12 includes a vacuum cavity 121 and a first flange 122 connected to the first end of the vacuum cavity 121, the pressure relief port 102 is provided on the first flange 122, the driving member 16 is connected to the first flange 122, the vacuum port 103 is provided on the side wall of the vacuum cavity 121, and the adsorption mechanism 20 is connected to the second end of the vacuum cavity 121; wherein the stop position is the end of the first flange 122 facing the adsorption mechanism 20; the second port is the port of the second end of the vacuum cavity 121.

[0043] The vacuum cavity 121 is a cylindrical cavity, and the piston disc 14 can move along the axis direction of the vacuum cavity 101 in it; the first flange 122 not only plays a role in connecting the vacuum cavity 121 and the driving member 16, but also ensures the sealing between them, and can also bear the pressure relief port 102, the end of which also acts as a stop position and can realize contact sealing with the piston disc 14, ensuring the vacuum stability and safety of the air valve 10, while greatly optimizing the structural design of the air valve 10 and improving its overall reliability and service life.

[0044] The first flange 122 comprises a flange plate 123 and a neck 124, the flange plate 123 is provided with the pressure relief port 102 and connected to the first end of the vacuum cavity 121, one end of the neck 124 is connected to the flange plate 123 and the neck 124 is arranged in the vacuum cavity 121, the other end of the neck 124 constitutes a stop position, the pressure relief port 102 communicates with the space in the neck 124, and the driving member 16 is connected to the flange plate 123.

[0045] The piston disc 14 is separated from the end of the neck 124, the contact seal between the two is broken, the vacuum cavity 101 communicates with the space in the neck 124, causing the vacuum degree to rapidly decrease, so that the piston disc 14 can automatically adjust and reestablish the stable state of the piston disc 14, and maintain the vacuum value in the vacuum cavity 101 as the preset vacuum value.

[0046] The flange plate 123 is arranged in a sealed manner between the vacuum cavity 121 and is connected by a fastener, which ensures the sealing between the flange plate 123 and the vacuum cavity 121, and the flange plate 123 can well bear the driving member 16 and is provided with the pressure relief port 102 thereon, so that the structural strength of the vacuum cavity 121 is not weakened, and further, the neck 124 can be used as a stop position, so that the structural design of the vacuum cavity 121 can be more simple, and the manufacturing cost is effectively reduced.

[0047] Further, the second port of the vacuum cavity 121 is provided with a baffle 125, the baffle 125 is used as a release position, both sides of the piston disc 14 are provided with sealing pads (not shown in the figure), the sealing pad on the piston disc 14 towards the first flange 122 is used to form a sealing contact with the end of the first flange 122, and the sealing pad on the other side is used to form a sealing contact with the baffle 125. Among them, the piston disc 14 forms a sealing contact with the baffle 125 of the second port, which can cut off the communication between the suction mechanism 20 and the vacuum cavity 101.

[0048] The sealing pads on both sides of the piston disc 14 can ensure the formation of a contact seal, thereby reliably cutting off the communication between the pressure relief port 102 and the vacuum cavity 101, or cutting off the communication between the suction mechanism 20 and the vacuum cavity 101; the baffle 125 can also be used as a carrier connected to the suction mechanism 20, for example, a screw is used to connect the baffle 125 and the suction mechanism 20, and of course, the baffle 125 and the suction mechanism 20 are also provided with sealing pads.

[0049] In the above embodiment, the sealing pads are arranged on both sides of the piston disc 14, the first flange 122 is arranged at the first port as a stop position, and the baffle 125 is arranged at the second port as a release position, and the sealing pads on both sides of the piston disc 14 realize sealing contact.

[0050] The essence of the above embodiment is that the first port and the second port are respectively provided with structures that can be sealed with the piston disc 14 to achieve sealing, for example, the inner wall of the first port and the second port of the barrel assembly 12 is respectively provided with a stop baffle (not shown, equivalent to the aforementioned flange 122) and a release baffle (not shown, equivalent to the aforementioned baffle 125), one side of the piston disc 14 can contact the stop baffle to form a sealing contact, and the other side of the piston disc 14 can contact the release baffle to form a sealing contact. It should be noted that the stop baffle is arranged between the upper edge of the pressure relief port 102 and the vacuum port 103 close to the suction mechanism 20, and the release baffle is arranged between the vacuum port 103 and the second port of the barrel assembly 12; the stop position is the end of the stop baffle towards the suction mechanism 20, and the release position is the end of the release baffle away from the suction mechanism 20.

[0051] The present application is not limited to this, the piston disc 14 can contact the side wall of the vacuum cavity 101, for example, the edge of the piston disc 14 directly contacts the inner wall of the vacuum cavity 101, or contacts the inner wall of the vacuum cavity 101 by arranging a sealing gasket on the edge thereof. At this time, the piston disc 14 is located above the pressure relief port 102 and does not exceed the upper edge of the vacuum port 10 close to the suction mechanism 20, that is, the communication between the pressure relief port 102 and the vacuum port 103 can be cut off by the contact sealing formed by the piston disc 14 and the inner wall of the vacuum cavity 101, so that the suction mechanism 20 and the vacuum hole 103 are communicated, that is, located at the stop position, and the stop position is located between the upper edge of the pressure relief port 102 and the vacuum port 103 close to the suction mechanism 20. The piston disc 14 is located above the vacuum port 103, that is, the communication between the suction mechanism 20 and the vacuum port 103 can be cut off by the contact sealing formed by the piston disc 14 and the inner wall of the vacuum cavity 101, so that the pressure relief port 102 and the vacuum port 103 are communicated, that is, located at the release position, and the release position is located on the side of the vacuum port 103 close to the suction mechanism 20. In this way, there is no need to additionally arrange flanges and baffles.

[0052] Continuing to refer to Figure 1 and Figure 2 , the suction mechanism 20 includes a suction disc 21, a top column 22 and an adapter barrel 23, one end of the adapter barrel 23 is connected to the second port of the barrel assembly 12, the suction disc 21 is connected to the other end of the adapter barrel 23, and the top column 22 is connected in the adapter barrel 23 and protrudes from the suction disc 21. The top column 22 is used to lift and suction the top suction port of the to-be-connected carrier plate, and the suction disc 21 is used to be suctioned at the top suction port.

[0053] The adapter barrel 23 is sealingly connected with the baffle 125, and the lifting action of the top column 22 cooperates with the suction of the suction disc 21 to ensure that the carrier plate can be stably connected with the suction mechanism 20, so as to suction the material through the carrier plate, thereby realizing precise carrying and positioning of the material.

[0054] The side of the carrier plate away from the adsorption mechanism 20 is provided with a plurality of mesa adsorption holes for adsorbing materials. When the materials on the carrier plate need to be adsorbed, the adapter cylinder 23 carries the top column 22 and the suction cup 21 to rise together, wherein the top column 22 can accurately lift the top adsorption hole of the carrier plate, and the suction cup 21 is then tightly adsorbed on the side of the top adsorption hole to connect the negative pressure space in the carrier plate and the adsorption mechanism 20. The mesa adsorption hole is also connected to the negative pressure space, so that a stable adsorption force can be formed at the mesa adsorption hole, so that the carrier plate can adsorb materials. After the process of the materials on the carrier plate is completed, the vacuum switching device 100 breaks the vacuum, that is, the pressure relief port 102 is connected to the vacuum chamber 101 to release the pressure, and the materials on the carrier plate are released without damage.

[0055] In other embodiments, the adsorption mechanism 20 includes a suction cup 21, and it can independently adsorb materials without the aid of a carrier plate as described above.

[0056] Optionally, the vacuum switching device 100 as a whole can be installed on a lifting mechanism, and the lifting mechanism drives the vacuum switching device 100 to rise and fall, thereby realizing the synchronous lifting of the adsorption mechanism 20.

[0057] Optionally, the adsorption mechanism 20 can also be driven to rise and fall independently, that is, the adsorption mechanism 20 can be lifted and lowered relative to the air valve 10. For example, the adapter cylinder 23 is slidingly arranged at the second port of the cylinder assembly 12 and in contact with the vacuum cavity 121. The up and down movement of the adapter cylinder 23 is controlled by the driving device to realize the independent lifting of the adsorption mechanism 20.

[0058] In this embodiment, the adapter cylinder 23 includes a movable cylinder 231, which is configured to move axially along its axis. The top column 22 and the suction cup 21 are connected to the movable cylinder 231, which is used to carry the top column 22 to lift the top adsorption hole of the carrier plate and make the suction cup 21 tightly fit the carrier plate.

[0059] The movable cylinder 231 can be driven to move axially along its axis to drive the top column 22 and the suction cup 21 to rise and fall synchronously, that is, it can move axially relative to the vacuum cavity 121, and in the adsorption state, the movable cylinder 231 is connected to the vacuum cavity 121, thereby ensuring that the adsorption force is effectively transmitted to the carrier plate.

[0060] Optionally, the movable cylinder 231 is slidingly arranged at the second port of the cylinder assembly 12 and in contact with the vacuum cavity 121.

[0061] In this embodiment, the adapter cylinder 23 further comprises a second flange 232 connected to the second port of the cylinder assembly 12, and a sliding cavity 233 is arranged in the second flange 232 and slidably connected to the movable cylinder 231; wherein one end of the movable cylinder 231 located in the sliding cavity 233 is provided with an outer flange 234, and an inner flange 235 is arranged on the inner wall of one end of the sliding cavity 233 facing the suction cup 21, the outer flange 234 is used to form a limiting fit with the inner flange 235, and a sealing element (not shown in the figure) is arranged on the outer flange 234 and / or the inner flange 235.

[0062] Specifically, the second flange 232 is connected to the baffle 125, the movable cylinder 231 is slidably connected to the second flange 232, the second flange 232 is fixed, and the movable cylinder 231 can move axially relative to the second flange 232.

[0063] For reference Figure 1 and Figure 2 When switching from the release state to the adsorption state, the movable cylinder 231 moves upward along the axial direction, the outer flange 234 forms a limiting fit with the inner flange 235, and the outer flange 234 and the inner flange 235 form a sealing structure, which ensures that the adsorption force provided to the carrier plate is stable; after switching from the adsorption state to the release state, the adsorption of the material by the carrier plate is released, and the movable cylinder 231 moves downward along the axial direction, and the outer flange 234 is separated from the inner flange 235.

[0064] Further, the adsorption mechanism 20 further comprises a jacking element 24, which is installed on the second flange 232, and the driving end of the jacking element 24 is connected to the movable cylinder 231; wherein in the adsorption state, the driving end of the jacking element 24 pushes the movable cylinder 231 to move, so that the outer flange 234 forms a limiting fit with the inner flange 235; in the release state, the driving end of the jacking element 24 drives the movable cylinder 231 to reset, so that the outer flange 234 is separated from the inner flange 235.

[0065] The jacking element 24 can be a jacking cylinder, a miniature hydraulic cylinder or an electric push rod, etc., which ensures the precise movement of the movable cylinder 231, and further realizes the close fit or smooth separation of the carrier plate and the suction cup 21, ensures the stability and reliability of the carrier plate in the process of adsorbing and releasing the material, and improves the overall working efficiency.

[0066] Two or three equal number of jacking elements 24 can be arranged on the second flange 232, and the plurality of jacking elements 24 are uniformly distributed to balance the driving force on the movable cylinder 231, further optimize the movement precision and stability of the movable cylinder 231, so as to ensure that the carrier plate does not deviate during the adsorption and release process, and improve the safety and efficiency of the operation.

[0067] For reference Figure 3 , Figure 3 is a structural schematic diagram of an embodiment of the table adsorption equipment provided by the present application.

[0068] Based on this, the application also provides a table adsorption detection equipment 200, which comprises a carrier plate 210 and the vacuum switching device 100 as described above. The carrier plate 210 is provided with a table adsorption hole on one side and a jacking adsorption port 212 on the other side. The adsorption mechanism 20 is connected to the jacking adsorption port 212, and the vacuum port 103 is connected to the negative pressure blower.

[0069] The table adsorption detection equipment 200 is used to accept the carrier plate 210 carrying materials. Before detection, the adsorption mechanism 20 is connected to the jacking adsorption port 212 on the carrier plate 210, and the air valve 10 is switched to the adsorption state, thereby providing negative pressure for the carrier plate 210 to adsorb and fix the materials thereon. After the materials are detected, the air valve 10 is switched to the release state, the carrier plate 210 releases the adsorption of the materials, the adsorption mechanism 20 leaves the jacking adsorption port 212 of the carrier plate 210, the carrier plate 210 is removed from the table adsorption detection equipment, and the next carrier plate 210 carrying materials enters the table adsorption detection equipment for detection.

[0070] Different from the prior art, the application discloses a vacuum switching device and a table adsorption detection equipment. The vacuum switching device provided by the application can switch the adsorption state and the release state in real time without stopping the vacuum generator connected to the vacuum port, thereby avoiding frequent starting and stopping of the vacuum generator, increasing the service life of the vacuum generator, and improving the stability thereof. Even if the adsorption is blocked, the piston disc can dynamically abut against and leave the stop position, thereby maintaining the vacuum degree in the vacuum cavity at a preset value, preventing the vacuum generator from being blocked for a long time in the adsorption state, reducing the service life of the vacuum generator, and effectively avoiding the instability of adsorption caused by the fluctuation of the vacuum degree, so as to ensure that the adsorption mechanism can work reliably under various working conditions.

[0071] The above is only an embodiment of the application, and does not limit the patent scope of the application. Any equivalent structure or equivalent process transformation based on the content of the specification and drawings, or direct or indirect application in other related technical fields, is also included in the patent protection scope of the application.

Claims

1. A vacuum switching device, characterized in that The application relates to a wind valve, which comprises a cylinder assembly, a piston disc and a driving member, the cylinder assembly is provided with a vacuum cavity, a vacuum port and a pressure relief port, the two ends of the cylinder assembly are provided with a first port and a second port, the driving member is installed at the first port of the cylinder assembly, the driving shaft of the driving member is connected with the piston disc, and the piston disc is located in the vacuum cavity. An adsorption mechanism is installed at the second port of the cylinder assembly, and the adsorption mechanism is connected with the vacuum cavity. The pressure relief port is arranged on the side of the vacuum port away from the adsorption mechanism, the vacuum switching device comprises an adsorption state and a release state, in the adsorption state, the driving member drives the piston disc to move to a stop position in the cylinder assembly, the communication between the pressure relief port and the vacuum port is cut off, the vacuum port provides a negative pressure condition for the adsorption mechanism through the vacuum cavity, and the piston disc is kept in dynamic balance at the stop position under the action of the vacuum degree in the vacuum cavity and the driving member, so that the vacuum degree in the vacuum cavity is maintained at a preset value, and the adsorption mechanism keeps continuous and stable pressure adsorption. In the release state, the driving member drives the piston disc to move to a release position in the cylinder assembly, the communication between the adsorption mechanism and the vacuum port is cut off, so that the vacuum port, the vacuum cavity and the pressure relief port are connected with each other. The edge of the piston disc is in sealing contact with the inner wall of the cylinder assembly, the stop position is located between the upper edge of the pressure relief port and the vacuum port close to the adsorption mechanism, and the release position is located on the side of the vacuum port close to the adsorption mechanism.

2. The vacuum switching device according to claim 1, characterized in that The inner walls of the first port and the second port of the cylinder assembly are respectively provided with a stop baffle and a release baffle, one side of the piston disc is used for contacting the stop baffle to form sealing contact, and the other side of the piston disc is used for contacting the release baffle to form sealing contact; wherein the stop baffle is arranged between the upper edge of the pressure relief port and the vacuum port close to the adsorption mechanism; the stop position is the end part of the stop baffle towards the adsorption mechanism, and the release position is the end part of the release baffle away from the adsorption mechanism.

3. The vacuum switching device according to claim 1, characterized in that The cylinder assembly comprises a vacuum cavity and a first flange connected to the first end of the vacuum cavity, the pressure relief port is arranged on the first flange, the driving member is connected to the first flange, the vacuum port is arranged on the side wall of the vacuum cavity, and the adsorption mechanism is connected to the second end of the vacuum cavity.

4. The vacuum switching device according to claim 1, characterized in that The stop position is the end part of the first flange towards the adsorption mechanism, and the second port is the port of the second end of the vacuum cavity. The second end of the vacuum cavity is provided with a baffle, and the release position is the end part of the baffle away from the adsorption mechanism. Both sides of the piston disc are provided with sealing pads, the sealing pad on the piston disc towards the first flange is used to form sealing contact with the end part of the first flange, and the sealing pad on the other side is used to form sealing contact with the baffle. ​ 5. The vacuum switching device according to claim 4, characterized in that The first flange comprises a flange plate and a neck, the flange plate is provided with the pressure relief port and connected to the first end of the vacuum cavity, one end of the neck is connected to the flange plate and the neck is arranged in the vacuum cavity, the other end of the neck constitutes the stop position, the pressure relief port communicates with the space in the neck, and the driving member is connected to the flange plate.

6. Vacuum switching device according to any of claims 1 to 5, characterized in that The driving member is a cylinder, which is used to apply a set tension to the piston plate so that the piston plate abuts against the stop position.

7. The vacuum switching device according to claim 1, characterized in that The suction mechanism comprises a suction disc, a jacking column and an adapter cylinder, one end of the adapter cylinder is connected to the second port of the cylinder assembly, the other end of the adapter cylinder is connected to the suction disc, the jacking column is connected to the adapter cylinder and protrudes from the suction disc, the jacking column is used to open the jacking suction port of the to-be-connected carrier plate, and the suction disc is used to be adsorbed at the jacking suction port.

8. The vacuum switching device according to claim 7, characterized in that The adapter cylinder comprises a movable cylinder body, the movable cylinder body is configured to be movable in an axial direction, the jacking column and the suction disc are connected to the movable cylinder body, the movable cylinder body is used to carry the jacking column to open the jacking suction port of the carrier plate and to make the suction disc tightly fit the carrier plate.

9. The vacuum switching device according to claim 8, characterized in that The adapter cylinder further comprises a second flange, the second flange is connected to the second port of the cylinder assembly, and a sliding cavity in sliding fit with the movable cylinder body is arranged in the second flange. The end of the movable cylinder body in the sliding cavity is provided with an outer flange, and an inner flange is arranged on the inner wall of the end of the sliding cavity facing the suction disc, the outer flange is used to form a limiting fit with the inner flange, and a sealing member is arranged on the outer flange and / or the inner flange. The suction mechanism further comprises a jacking member, the jacking member is mounted on the second flange, and a driving end of the jacking member is connected to the movable cylinder body. In the suction state, the driving end of the jacking member pushes the movable cylinder body to move, so that the outer flange forms a limiting fit with the inner flange; in the release state, the driving end of the jacking member drives the movable cylinder body to reset, so that the outer flange is separated from the inner flange.

10. A mesa adsorption detection apparatus, characterized by comprising: The table surface suction detection equipment comprises a carrier plate and the vacuum switching device according to any one of claims 1 to 9, one side of the carrier plate is provided with a table surface suction hole, the other side of the carrier plate is provided with a jacking suction port, the suction mechanism is connected to the jacking suction port, and the vacuum port of the vacuum switching device is connected to a negative pressure air blower.

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