Grinding wheel vertical coordinate calibration tool and thinning machine

Abstract

The utility model discloses a grinding wheel vertical coordinate calibration tool which comprises a base, a movable part capable of moving within a certain stroke relative to the base in the height direction is arranged on the base, an abutting disc and a contact sensor are arranged on the movable part, the abutting disc is arranged above the movable part in a protruding mode, and the axis of the abutting disc extends in the height direction. The contact sensor is arranged below the abutting disc, a detection part of the contact sensor protrudes to the position below the movable piece, and the axis of the detection part extends in the height direction. The movable part is further connected with the base through a reset elastic part, and the reset elastic part is used for enabling the movable part to reset to the initial height after the movable part moves downwards. According to the tool, descending of the grinding wheel does not need to be controlled manually, the requirement for operators can be effectively lowered, the grinding wheel can move downwards at a high speed, calibration efficiency can be improved, meanwhile, hard contact can be avoided through the buffering capacity of the contact sensor 200, and calibration safety is guaranteed.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor processing equipment, and in particular to a tool for calibrating the vertical coordinates of grinding wheels. Background Technology

[0002] When thinning wafers using a wafer thinner, the grinding is performed with the table surface of the wafer carrier as the reference. Therefore, it is necessary to know the vertical coordinate of the grinding wheel when it just contacts the table surface of the wafer carrier.

[0003] As shown in patent document CN117182688B, the existing method is to manually control the grinding wheel to feed downward from the vertical origin until the grinding wheel contacts the top surface of the tool setting block on the plate carrier, record the height the grinding wheel moves downward during this process, and combine it with the thickness of the tool setting block to determine the vertical coordinate of the grinding wheel.

[0004] This method requires operators to control the downward movement of the spindle, which places high demands on the operators. Furthermore, when the grinding wheel moves down close to the tool setting block, it needs to move down at a relatively slow speed, which is not conducive to improving efficiency. Utility Model Content

[0005] The purpose of this invention is to solve the above-mentioned problems in the prior art and to provide a tool for calibrating the vertical coordinates of a grinding wheel.

[0006] The objective of this utility model is achieved through the following technical solution:

[0007] A grinding wheel vertical coordinate calibration tool includes a base. A movable component is mounted on the base and can move relative to it within a certain stroke along the height direction. A stop plate and a contact sensor are mounted on the movable component. The stop plate protrudes above the movable component, and its axis extends along the height direction. The contact sensor is located below the stop plate, and its detection part protrudes below the movable component, with its axis extending along the height direction. The movable component is also connected to the base via a reset elastic element, which is used to reset the movable component to its initial height after it has moved downwards.

[0008] Preferably, the base includes a limiting component for connecting the movable part. The limiting component includes a support block. The support block has a horizontal abutment plate and a limiting bolt on the side facing the movable part. The abutment plate is embedded in a relief groove on the movable part. The limiting bolt passes through a waist-shaped hole on the movable part, and the head of the limiting bolt abuts against the outer side of the movable part facing away from the support block. The waist-shaped hole extends along the height direction.

[0009] Preferably, the base includes a first connecting plate connected to the limiting component, the first connecting plate being connected to the upper end of the support column, and the lower end of the support column being connected to a second connecting plate.

[0010] Preferably, the second connecting plate is disposed in a rotating mechanism that drives the base to rotate about the axis of the support column.

[0011] Preferably, the reset elastic element is a tension spring, the upper end of which is hung on a hanging plate provided on the abutment plate, and the lower end of which is connected to an annular groove on a connecting post provided on the inner side of the movable element.

[0012] Preferably, the abutment plate is connected to a support seat on the outer side of the movable part, and a set of spheres distributed in a polygonal pattern around the axis of the abutment plate are protruding on the support seat. The abutment plate is connected to an elastic pull member that applies a downward force to it so that the bottom of the abutment plate abuts against the set of spheres.

[0013] Preferably, one of the spheres is embedded in the first limiting groove at the top of the support base, and the other sphere is disposed on the adjusting column, which is threadedly connected to the vertical screw hole on the support base.

[0014] Preferably, the adjusting column is fixed to the support base by a locking nut.

[0015] Preferably, the ball disposed in the first limiting groove is also embedded in the second limiting groove at the bottom of the abutment plate, and a ball disposed on the adjusting column is disposed at the strip groove at the bottom of the abutment plate, the strip groove extending radially along the abutment plate.

[0016] Thinning machine, including the grinding wheel vertical coordinate calibration tool as described in any of the above.

[0017] The advantages of this utility model's technical solution are mainly reflected in:

[0018] When performing vertical coordinate calibration, the tool of this invention does not require manual control of the grinding wheel's descent, effectively reducing the demands on operators. Furthermore, the grinding wheel can move downwards at a relatively fast speed, which helps improve calibration efficiency. At the same time, the buffering capacity of the contact sensor can prevent hard contact, ensuring calibration safety. Attached Figure Description

[0019] Figure 1 This is a schematic diagram of one embodiment of the grinding wheel vertical coordinate calibration tool of this utility model;

[0020] Figure 2 This is a schematic diagram of another embodiment of the grinding wheel vertical coordinate calibration tool of this utility model;

[0021] Figure 3 This is a partial sectional view of the grinding wheel vertical coordinate calibration tool of this utility model;

[0022] Figure 4This is a partial end view of the grinding wheel vertical coordinate calibration tool of this utility model;

[0023] Figure 5 This is a schematic diagram illustrating the principle of using the grinding wheel vertical coordinate calibration tool of this utility model for grinding wheel vertical coordinate calibration. Detailed Implementation

[0024] The purpose, advantages, and features of this utility model will be illustrated and explained through the following non-limiting description of preferred embodiments. These embodiments are merely typical examples of applying the technical solutions of this utility model, and all technical solutions formed by equivalent substitutions or equivalent transformations fall within the scope of protection claimed by this utility model.

[0025] In the description of the solution, it should be noted that the terms "center," "upper," "lower," "left," "right," "front," "rear," "vertical," "horizontal," "inner," and "outer," etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings and are only for the convenience and simplification of description. They do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0026] Example 1

[0027] The vertical coordinate calibration tool for the grinding wheel disclosed in this utility model is described below with reference to the accompanying drawings. Figure 1 As shown, it includes a base 100, which includes a first connecting plate 110 connected to the upper end of a support column 120, and a second connecting plate 130 connected to the lower end of the support column 120. The second connecting plate 130 may be provided with connecting holes for fixing the base 100 inside the thinning machine.

[0028] Of course, in other embodiments, as shown in the appendix Figure 2 As shown, the second connecting plate 130 can be connected to the rotating mechanism 300 through the connecting hole. The rotating mechanism drives the base 100 to rotate around the axis of the support column 120. The rotating mechanism can be, for example, a rotary cylinder, or other structures that can achieve the same function, such as a turntable.

[0029] As attached Figure 1As shown, a limiting component 140 is provided on the first connecting plate 110 of the base 100. The limiting component 140 is provided with a movable member 500 that can move relative to it within a certain stroke along the height direction. The limiting component 140 includes a support block 141, which is connected to the far end of the first connecting plate 110. A horizontal abutment plate 142 and a limiting bolt 143 are provided on the side of the support block 141 facing the movable member 500. The abutment plate 142 is embedded in a relief groove 510 on the movable member 500. Furthermore, a forward protrusion 144 is provided on the end of the abutment plate 142 facing the movable member 500. The forward protrusion 144 is close to the bottom of the abutment plate 142 and embedded in the relief groove 510, which can effectively reduce the height of the relief groove 510. The limiting bolt 143 passes through the waist-shaped hole 520 on the movable member 500, and the head of the limiting bolt 143 abuts against the outer side of the movable member 500 facing away from the support block 141. The waist-shaped hole 520 extends along the height direction, so that the limiting bolt cooperates with the abutment plate 142 to limit the distance between the support block 141 and the movable member 500, and prevent the two from separating from each other.

[0030] As attached Figure 1 As shown, the movable member 500 is also connected to the base 100 via a reset elastic member 700. The reset elastic member is used to reset the movable member 500 to its initial height after it has moved down. At this time, the bottom of the clearance groove 510 abuts against the front protrusion 144. The reset elastic member 700 is a tension spring. The upper end of the tension spring is hung on the hanging plate 145 provided on the abutment plate 142, and the lower end of the tension spring is connected to the annular groove on the connecting post 530 provided inside the movable member 500. There are two sets of tension springs, each set located on one side of the abutment plate 142.

[0031] As attached Figure 1 As shown, the movable member 500 is provided with a stop plate 900 and a contact sensor 200. The stop plate 900 protrudes above the movable member 500 and its axis extends along the height direction. The contact sensor 200 is located below the stop plate 900 and its detection part 210 protrudes below the movable member 500. The axis of the detection part 210 extends along the height direction.

[0032] As attached Figure 1 Appendix Figure 3As shown, the abutment plate 900 is connected to the support base 400 on the outer side of the movable part. The support base 400 is provided with a set of spheres 600 distributed in a polygonal pattern around the axis of the abutment plate 900. Preferably, there are three spheres 600. The abutment plate 900 is connected to an elastic pull member 800 that applies a downward pulling force to it so that the bottom of the abutment plate 900 abuts against the set of spheres 600. Specifically, a connecting pin 910 is provided at the bottom of the abutment plate 900. The connecting pin 910 passes through the countersunk hole 410 on the support base 400. A limiting plate 920 located below the support base 400 is fitted on the connecting pin 910. The limiting plate 920 is located above the limiting nut 930 screwed on the connecting pin 910. The elastic pull-down member 800 is, for example, a spring or a set of leaf springs fitted on the connecting pin 910. The elastic pull-down member 800 abuts against the limiting plate 920 and applies downward pressure to the limiting plate 920, thereby causing the abutment plate 142 to abut against a set of balls 600.

[0033] As attached Figure 3 Appendix Figure 4 As shown, to better ensure the horizontal level of the abutment plate 900 via the spheres 600, one sphere 600 is embedded in the first limiting groove 420 at the top of the support base 400, and the other sphere 600 is mounted on the adjusting post 610, which is threadedly connected to a vertical screw hole on the support base 400. Adjusting the height of the adjusting post 610 effectively adjusts the height of the two spheres 600, thus facilitating the horizontal state of the abutment plate 900, i.e., ensuring the vertical axis of the abutment plate 900. Furthermore, to ensure the stability of the adjusting post 610's position, it is fixed to the support base 400 by two locking nuts 620.

[0034] Furthermore, in order to better limit the position of the abutment plate 900 and prevent it from translating or rotating, a ball 600 disposed in the first limiting groove 420 is simultaneously embedded in the second limiting groove 910 at the bottom of the abutment plate 900, and a ball 600 disposed on the adjusting column 610 is disposed at the strip groove 920 at the bottom of the abutment plate 900, the strip groove 920 extending radially along the abutment plate 900.

[0035] The contact sensor 200 is, for example, a known pressure sensor or a normally open contact sensor, with its detection part 210 facing downwards and the axis of the detection part 210 coinciding with the axis of the abutment plate 900.

[0036] After replacing grinding wheel A, as shown in the attached document. Figure 5As shown, the abutment plate 900 of the vertical coordinate calibration tool for grinding wheel A can be positioned below grinding wheel A, and the contact sensor 200 can be positioned above the plate carrier B, with the distance between the contact sensor 200 and the plate carrier B being less than the travel distance of the movable part 500. Then, grinding wheel A is moved downward from the origin height, and the signal from the contact sensor 200 is acquired in real time. When grinding wheel A contacts the abutment plate 900 and continues to move downward, the movable part 500 moves downward and drives the contact sensor 200 to move downward synchronously. When the detection part 210 of the contact sensor 200 contacts the plate carrier B, the contact sensor 200 is triggered. At this time, the downward distance S1 of grinding wheel A is recorded, and the vertical coordinate of grinding wheel A when it just contacts the surface of the plate carrier B can be determined based on the distance S2 between the top surface of the force table and the bottom of the detection part 210 of the contact sensor 200.

[0037] Example 2

[0038] This embodiment discloses a thinning machine, including a vertical coordinate calibration tool for grinding wheel A as described above.

[0039] This utility model has many other embodiments. All technical solutions formed by equivalent transformation or equivalent transformation fall within the protection scope of this utility model.

Claims

1. A grinding wheel vertical coordinate calibration tool, including a base, characterized in that: The base is provided with a movable component that can move relative to it within a certain stroke along the height direction. The movable component is provided with a stop plate and a contact sensor. The stop plate protrudes above the movable component and its axis extends along the height direction. The contact sensor is located below the stop plate and its detection part protrudes below the movable component. The axis of the detection part extends along the height direction. The movable component is also connected to the base through a reset elastic element, which is used to reset the movable component to its initial height after it moves down.

2. The grinding wheel vertical coordinate calibration tool according to claim 1, characterized in that: The base includes a limiting assembly for connecting the movable component. The limiting assembly includes a support block. The support block has a horizontal abutment plate and a limiting bolt on the side facing the movable component. The abutment plate is embedded in a relief groove on the movable component. The limiting bolt passes through a waist-shaped hole on the movable component, and the head of the limiting bolt abuts against the outer side of the movable component facing away from the support block. The waist-shaped hole extends along the height direction.

3. The grinding wheel vertical coordinate calibration tool according to claim 2, characterized in that: The base includes a first connecting plate connected to the limiting component, the first connecting plate being connected to the upper end of the support column, and the lower end of the support column being connected to a second connecting plate.

4. The grinding wheel vertical coordinate calibration tool according to claim 3, characterized in that: The second connecting plate is disposed in a rotating mechanism that drives the base to rotate about the axis of the support column.

5. The grinding wheel vertical coordinate calibration tool according to claim 2, characterized in that: The reset elastic element is a tension spring. The upper end of the tension spring is hung on the hanging plate provided on the abutment plate, and the lower end of the tension spring is connected to the annular groove on the connecting post provided on the inner side of the movable part.

6. The grinding wheel vertical coordinate calibration tool according to any one of claims 1-5, characterized in that: The abutment plate is connected to a support base on the outer side of the movable part. A set of spheres distributed in a polygon around the axis of the abutment plate are protruding on the support base. The abutment plate is connected to an elastic pull member that applies a downward force to it so that the bottom of the abutment plate abuts against the set of spheres.

7. The grinding wheel vertical coordinate calibration tool according to claim 6, characterized in that: One of the spheres is embedded in the first limiting groove at the top of the support base, and the other sphere is disposed on the adjusting column, which is threadedly connected to the vertical screw hole on the support base.

8. The grinding wheel vertical coordinate calibration tool according to claim 7, characterized in that: The adjusting column is fixed to the support base by a locking nut.

9. The grinding wheel vertical coordinate calibration tool according to claim 7, characterized in that: The ball set in the first limiting groove is also embedded in the second limiting groove at the bottom of the abutment plate, and a ball set on the adjusting column is set in the strip groove at the bottom of the abutment plate, the strip groove extending radially along the abutment plate.

10. A thinning machine, characterized in that: Includes the grinding wheel vertical coordinate calibration tool as described in any one of claims 1-9.

Images