Grinding wheel
By setting an annular mounting groove and a drain groove on the annular base, a discharge gap and a drain channel are formed, which solves the problem of low discharge efficiency of grinding wheel debris and coolant, realizes efficient discharge of debris and coolant, extends the service life of the grinding wheel and ensures the grinding quality.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-31
- Publication Date
- 2026-04-14
AI Technical Summary
Existing grinding wheels have low efficiency in removing debris and coolant when grinding wafers, which affects grinding quality and lifespan.
An annular mounting groove and a drain groove are set on the annular base to form a discharge gap and a drain channel, thereby increasing the size of the discharge channel for debris and coolant.
It improves the discharge efficiency of debris and coolant, avoids debris accumulation and coolant residue, extends the service life of the grinding wheel, and ensures grinding quality and normal operation.
Smart Images
Figure CN224115972U_ABST
Abstract
Description
Technical Field
[0001] This application relates to the field of semiconductor manufacturing technology, and more particularly to a grinding wheel. Background Technology
[0002] Grinding wheels are widely used in wafer grinding and thinning processes. A grinding wheel mainly consists of a hub and grinding teeth. Grooves are cut into the hub to mount the grinding teeth, allowing the teeth to be embedded in the grooves.
[0003] In related technologies, the debris and coolant generated when grinding wafers with grinding wheels can only be discharged from the gap between adjacent grinding wheel teeth. The discharge of debris and coolant is slow and can easily affect the normal grinding of grinding wheel teeth. Utility Model Content
[0004] This utility model discloses a grinding wheel and grinding wheel production equipment, which can increase the gap for the discharge of debris and coolant, thereby improving the discharge efficiency of debris and coolant.
[0005] To achieve the above objectives, the first aspect of this utility model discloses a grinding wheel, comprising:
[0006] An annular base is provided with an annular mounting groove, which is arranged around the center of the annular base. The annular base is also provided with a drain trough, which is located on the side of the annular mounting groove away from the center of the annular base, and the drain trough is connected to the annular mounting groove.
[0007] Multiple grinding wheel teeth are installed in the annular mounting groove, and a discharge gap is formed between two adjacent grinding wheel teeth. The discharge gap and the drain groove together form a drain channel for discharging the debris and / or coolant.
[0008] By providing a drain trough communicating with the discharge gap on the annular base, and with the drain trough located on the side of the annular mounting groove away from the center of the annular base, the two together form a drain channel for discharging debris and / or coolant. This increases the size of the drain channel, thereby improving the discharge efficiency of debris and / or coolant.
[0009] The timely removal of chips serves several purposes. First, it prevents chips from accumulating inside the grinding wheel, thus avoiding interference with its normal operation. Second, it prevents chips from causing wear on the grinding wheel's structure, thereby extending its service life. Third, timely chip removal prevents chips from re-entering the grinding process, avoiding chip damage to the wafer during grinding and ensuring the grinding quality of the grinding wheel.
[0010] The drainage of cooling water serves several purposes. First, it allows for effective heat dissipation from the grinding wheel, preventing disruption to its normal operation. Second, it prevents coolant residue inside the grinding wheel from causing corrosion. Third, it maintains proper coolant circulation within the grinding wheel, preventing excessive coolant buildup.
[0011] As an optional implementation, the annular mounting groove includes opposing first and second sidewalls, the first and second sidewalls defining a mounting space for the grinding wheel teeth, and the second sidewall being farther from the center of the annular base than the first sidewall.
[0012] The sewage trough extends through the second sidewall to connect with the annular mounting groove.
[0013] On the one hand, the drain trough penetrates the second sidewall and directly connects to the annular mounting groove. This direct connection between the drain trough and the annular mounting groove reduces the overall length of the drain channel, allowing debris and / or coolant to be discharged more quickly, thereby improving the discharge efficiency. On the other hand, the drain trough penetrates the second sidewall, which is located on the outermost side of the entire annular base along its radial direction. This means one end of the drain trough directly connects to the outside of the grinding wheel. This allows debris and / or coolant to be discharged directly from the drain trough to the outside of the grinding wheel, preventing debris and / or coolant from accumulating inside the grinding wheel and affecting its normal operation.
[0014] As an optional implementation, multiple sewage discharge troughs are provided, and each sewage discharge trough is respectively configured to correspond one-to-one with each discharge gap.
[0015] By setting the drain trough and discharge gap in a one-to-one correspondence, each discharge gap can be connected to a drain trough, thereby improving the overall drain efficiency of the grinding wheel.
[0016] As an optional implementation, the bottom surface of the drain trough is flush with the bottom surface of the discharge gap along the thickness direction of the annular substrate.
[0017] Considering that the discharge gap is formed by installing two adjacent grinding wheel teeth in the annular mounting groove, the discharge gap actually constitutes part of the annular mounting groove. Therefore, the bottom surface of the discharge gap is essentially the bottom surface of the annular mounting groove, while the bottom surface of the drain trough is its bottom surface located on the second sidewall. By making the bottom surface of the drain trough flush with the bottom surface of the discharge gap, on the one hand, it avoids the drain trough partially obstructing the discharge gap, thus preventing a reduction in the size of the drain channel and facilitating the discharge of debris and / or coolant. On the other hand, it prevents the overall structural strength of the annular base from being affected by an excessively deep drain trough.
[0018] As an optional implementation, the projection of the sewage trough onto a plane perpendicular to the thickness direction of the annular base includes an inner ring and an outer ring, wherein the inner ring and the outer ring are concentric.
[0019] The cross-section of the sewage trough includes a first side and a second side arranged opposite to each other. The first side and the second side are both connected to the inner ring and the outer ring. The connection points of the first side, the second side and the inner ring form a first intersection point. The line connecting the midpoint of the line connecting the two first intersection points and the center of the inner ring is a reference line. The reference line is parallel to both the first side and the second side.
[0020] By ensuring that the distance between the first and second sides is consistent in width along the radial direction of the annular base, the processing difficulty of the sewage trough can be reduced.
[0021] On the other hand, it allows for a smoother discharge path for debris and / or coolant as they pass through the discharge gap and drain trough, thus facilitating better discharge of debris and / or coolant.
[0022] As an optional implementation, the projection of the sewage trough onto a plane perpendicular to the thickness direction of the annular base includes an inner ring and an outer ring, wherein the inner ring and the outer ring are concentric.
[0023] The cross-section of the sewage trough along the first direction includes a first side and a second side arranged opposite to each other. The first side and the second side are both connected to the inner ring and the outer ring. The connection points of the first side, the second side and the inner ring form a first intersection point. The line connecting the midpoint of the line connecting the two first intersection points and the center of the inner ring is a reference line. The straight line containing the first side and the second side intersects the reference line. The distance between the first side and the second side is the same or gradually decreases along the direction away from the center of the annular base.
[0024] Because the grinding wheel rotates around the center of the annular substrate during grinding, allowing multiple grinding teeth to sequentially contact the wafer surface for grinding, the debris and / or coolant inside the grinding wheel are subjected to centrifugal force, causing them to move along the direction of the grinding wheel's rotation within the annular substrate. By intersecting the baseline with the straight line containing the first and second sides, the extension direction of the drain trough can be offset along the movement direction of the debris and / or coolant, allowing the drain trough to better adapt to the movement direction of the debris and / or coolant, thus improving the discharge of debris and / or coolant.
[0025] As an optional implementation, the connection points of the first side, the second side and the outer ring each form a second intersection point. The line connecting the midpoint of the line connecting the two second intersection points and the midpoint of the line connecting the two first intersection points is an offset line. The offset line intersects the baseline, and the angle between the offset line and the baseline is in the range of 12° to 20°.
[0026] At this point, the extension direction of the drain trough is parallel to the tangential direction of the rotation direction of the debris and / or coolant inside the annular matrix. This allows the offset angle of the drain trough to better match the movement direction of the debris and / or coolant, enabling the debris and / or coolant to be discharged directly along the extension direction of the drain trough. This reduces the resistance of the drain trough sidewall to the debris and / or coolant as they move within the drain trough, thereby increasing the discharge speed of the debris and / or coolant from the drain trough. This helps ensure that the normal operation of the grinding wheel is not affected by the accumulation of debris or coolant.
[0027] As an alternative implementation, the peripheral surface of the grinding wheel teeth is configured as an arc surface.
[0028] The curved surface of the grinding wheel teeth reduces damage to the wafer surface during grinding, thus preventing scratches or wafer breakage.
[0029] As an optional implementation, the cross-sectional shape of the grinding wheel teeth parallel to the surface of the annular base is any one of circular, elliptical, or racetrack-shaped.
[0030] As an optional implementation, the annular base includes a first surface and a second surface that are opposite to each other along the thickness direction. The first surface is provided with the annular mounting groove and the drain groove. The first surface is also provided with a first cavity. On the first surface, the first cavity, the annular mounting groove and the drain groove are arranged sequentially along the radial direction of the annular base.
[0031] A second cavity is provided on the second surface, and the second cavity is in communication with the first cavity. The inner wall of the first cavity is inclined so that the opening width of the first cavity gradually increases from the second surface toward the direction closer to the first surface.
[0032] By setting up a first cavity and a second cavity, the grinding wheel can be made hollow, thereby reducing its weight and the amount of raw materials required for its production. On the other hand, cooling water can be introduced into the hollow part of the grinding wheel to cool it down, preventing damage to the wafer due to excessive temperature during the grinding process and avoiding any disruption to the normal operation of the grinding wheel.
[0033] As an optional implementation, the angle between the inner wall of the first cavity and the first surface is in the range of 45° to 55°.
[0034] By creating an angle between the inner wall of the first cavity and the first surface, the debris and / or coolant inside the grinding wheel can automatically flow towards the drain channel along the inclined direction of the inner wall of the first cavity. This increases the discharge speed of debris and / or coolant, helping to ensure that the normal operation of the grinding wheel is not affected by the accumulation of debris or coolant.
[0035] Compared with the prior art, the beneficial effects of this application are:
[0036] This utility model provides a grinding wheel with an annular mounting groove around the center of an annular base for mounting multiple grinding wheel teeth. A discharge gap is formed between adjacent grinding wheel teeth. A drain groove is provided on the side of the annular mounting groove away from the center of the annular base, corresponding to the discharge gap. The discharge gap and the drain groove together form a drain channel for discharging debris and / or coolant, allowing debris and / or coolant generated inside the annular base during grinding to be discharged through the drain channel. By adding the drain groove, the size of the drain channel is increased, thereby improving the discharge efficiency of debris and / or coolant, ensuring that the normal grinding of the grinding gear is not affected. Attached Figure Description
[0037] To more clearly illustrate the technical solutions in the embodiments of this application, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.
[0038] Figure 1 This is a schematic diagram of the structure of the grinding wheel disclosed in the embodiments of this application;
[0039] Figure 2yes Figure 1 A magnified view of a section at point A in the middle;
[0040] Figure 3 This is a schematic diagram of the first type of sewage trough structure;
[0041] Figure 4 This is a schematic diagram of the second type of sewage trough structure;
[0042] Figure 5 This is a schematic diagram of the third type of sewage trough structure;
[0043] Figure 6 This is a schematic diagram of the fourth type of sewage trough structure;
[0044] Figure 7 This is a schematic diagram of the first cross-sectional shape of the grinding wheel teeth;
[0045] Figure 8 This is a schematic diagram of the second cross-sectional shape of the grinding wheel teeth;
[0046] Figure 9 This is a schematic diagram of the third cross-sectional shape of the grinding wheel teeth;
[0047] Figure 10 This is a top view of the hot pressing mold disclosed in the embodiments of this application;
[0048] Figure 11 This is a side view of the hot pressing mold disclosed in the embodiments of this application;
[0049] Figure 12 yes Figure 11 Cross-sectional view at point BB;
[0050] Figure 13 This is a schematic diagram of the processing equipment disclosed in the embodiments of this application;
[0051] Figure 14 This is a side view of the processing equipment disclosed in the embodiments of this application;
[0052] Figure 15 This is a schematic diagram of the grinding wheel disclosed in the embodiments of this application from another perspective;
[0053] Figure 16 This is a top view of the grinding wheel disclosed in the embodiments of this application;
[0054] Figure 17 yes Figure 16 Cross-sectional view at point C.
[0055] Explanation of reference numerals in the attached figures:
[0056] 100-Grinding wheel; 1-Annular base; 11-Annular mounting groove; 111-First sidewall; 112-Second sidewall; 12-Drainage trough; 121-First side edge; 121a-First intersection point; 121b-Second intersection point; 122-Second side edge; 13-Inner ring; 14-Outer ring; 15-First surface; 151-First cavity; 151a-Inner wall surface; 16-Second surface; 161-Second cavity; 2-Grinding wheel tooth; 21-Discharge gap; 22-Cross section; 200-Hot pressing mold; 210-First mold; 211-Material cavity; 220-Second mold; 300-Processing equipment; 310-Clamping fixture; 311-Clamping groove; 320-Grinding wheel; a-First included angle; b-Second included angle; O-Baseline; N-Offset line. Detailed Implementation
[0057] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.
[0058] In this application, the terms "upper," "lower," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. These terms are primarily for the purpose of better describing this application and its embodiments, and are not intended to limit the indicated devices, elements, or components to having a specific orientation, or to be constructed and operated in a specific orientation.
[0059] Furthermore, in addition to indicating location or positional relationship, some of the aforementioned terms may also have other meanings. For example, the term "above" may also be used in some cases to indicate a certain dependency or connection relationship. Those skilled in the art can understand the specific meaning of these terms in this application based on the specific circumstances.
[0060] Furthermore, the terms "setup" and "connection" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral structure; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium, or an internal connection between two devices, components, or parts. Those skilled in the art can understand the specific meaning of these terms in this application based on the specific circumstances.
[0061] Furthermore, the terms "first," "second," etc., are primarily used to distinguish different devices, elements, or components (which may be the same or different in specific type and construction), and are not intended to indicate or imply the relative importance or quantity of the indicated devices, elements, or components. Unless otherwise stated, "a plurality of" means two or more.
[0062] Wafer thinning is a key process in semiconductor device manufacturing. Its main function is to grind the back of the wafer to thin the silicon material so that it can be processed and packaged into chips.
[0063] The main method of wafer thinning is mechanical grinding, which uses a high-speed rotating grinding wheel to grind the wafer. During the grinding process, debris is generated and needs to be removed from inside the grinding wheel to avoid affecting its normal operation. In addition, the grinding wheel generates heat as it continuously grinds and thins the wafer, so cooling water is circulated during the wafer thinning process to lower the temperature.
[0064] In related technologies, the debris and coolant generated during grinding by the grinding wheel can only be discharged through the gap between adjacent grinding wheel teeth. Because this gap is relatively small, the discharge of debris and coolant is slow, which can easily affect the normal grinding operation of the grinding wheel.
[0065] In view of this, this application discloses a grinding wheel. An annular mounting groove is provided around the center of an annular base, and multiple grinding wheel teeth are mounted in the annular mounting groove. A drain groove connected to the annular mounting groove is provided on the side of the annular mounting groove away from the center of the annular base. A discharge gap is formed between adjacent grinding wheel teeth. The discharge gap and the drain groove together form a drain channel for discharging debris and / or coolant. In this way, by setting a drain groove connected to the discharge gap to form a drain channel, the size of the drain channel can be increased, thereby improving the discharge efficiency of debris and / or coolant. On the one hand, it can prevent debris from getting stuck between the grinding wheel teeth during the grinding process, affecting the normal grinding of the grinding wheel; on the other hand, it can allow coolant to be discharged in a timely manner, preventing the grinding wheel from damaging the wafer due to excessive temperature during the grinding process.
[0066] The technical solution of this application will be further described below with reference to the embodiments and accompanying drawings.
[0067] Please see Figure 1 and Figure 2 , Figure 1 This is a schematic diagram of the structure of the grinding wheel disclosed in the embodiments of this application. Figure 2 yes Figure 1A partial enlarged view at point A. The grinding wheel 100 includes an annular base 1 and multiple grinding wheel teeth 2. The annular base 1 has an annular mounting groove 11, which surrounds the center of the annular base 1. A drain groove 12 is also provided on the annular base 1, located on the side of the annular mounting groove 11 away from the center of the annular base 1, and is connected to the annular mounting groove 11. The multiple grinding wheel teeth 2 are all mounted in the annular mounting groove 11, and a discharge gap 21 is formed between adjacent grinding wheel teeth 2. This discharge gap 21 and the drain groove 12 together form a drain channel for discharging debris and / or coolant.
[0068] The grinding wheel 100 of this application has a drain groove 12 on the annular base 1. The drain groove 12 is located on the side of the annular mounting groove 11 away from the center of the annular base 1. The drain groove 12 communicates with the discharge gap 21 formed between two adjacent grinding wheel teeth 2, and the two together form a drain channel for discharging debris and / or coolant. In this way, by setting the drain groove 12, the size of the drain channel can be increased, thereby improving the discharge efficiency of debris and / or coolant.
[0069] Furthermore, the removal of debris from the grinding wheel 100 serves several purposes. First, it prevents debris from accumulating inside the wheel, thus avoiding disruption to its normal operation. Second, it prevents debris from causing wear on the grinding wheel 100's structure, thereby extending its service life. Third, timely debris removal prevents it from re-entering the grinding process of the wheel teeth 2, avoiding damage to the wafer during grinding and ensuring the grinding quality of the grinding wheel 100.
[0070] As for the drainage of cooling water, on the one hand, it can effectively dissipate heat from the grinding wheel 100, avoiding any impact on the normal operation of the grinding wheel 100; on the other hand, it can prevent coolant residue inside the grinding wheel 100 from causing corrosion. Furthermore, it can maintain the normal circulation of coolant inside the grinding wheel 100, preventing excessive liquid accumulation inside the grinding wheel 100.
[0071] It is understood that the material of the aforementioned annular substrate 1 can be aluminum alloy or steel, etc., and this embodiment does not specifically limit it.
[0072] It is understood that the material of the grinding wheel teeth 2 can be diamond or cermet, etc., and this embodiment does not make specific limitations on this.
[0073] Please see Figure 1 and Figure 2Optionally, the annular base 1 can be, for example, a circular annular base or a polygonal annular base. Considering that the annular base 1 needs to drive the grinding wheel teeth 2 to rotate, the annular base 1 is preferably a circular annular base. The following description will use the example of the annular base 1 being a circular annular base.
[0074] In some embodiments, the annular mounting groove 11 is arranged around the circumference of the annular base 1. The annular mounting groove 11 includes opposing first sidewalls 111 and second sidewalls 112, which define the mounting space for the grinding wheel teeth 2. The second sidewall 112 is farther from the center of the annular base 1 than the first sidewall 111. The drain trough 12 penetrates the second sidewall 112 to connect with the annular mounting groove 11. By having the drain trough 12 penetrate the second sidewall 112 and directly connect with the annular mounting groove 11, the overall length of the drain channel can be reduced, allowing debris and / or coolant to be discharged more quickly, thereby improving the discharge efficiency of debris and / or coolant.
[0075] Additionally, see Figure 1 and Figure 2 The second sidewall 112 is located on the outermost side of the entire annular base 1 along its radial direction. It is penetrated by the drain trough 12, that is, one end of the drain trough 12 is directly connected to the outside of the grinding wheel 100. In this way, the debris and / or coolant can be directly discharged from the drain trough 12 to the outside of the entire grinding wheel 100, avoiding the accumulation of debris and / or coolant inside the grinding wheel 100, which would affect the normal operation of the grinding wheel 100.
[0076] In some embodiments, please refer to Figure 1 and Figure 2 Multiple drain troughs 12 can be provided, each drain trough 12 corresponding to a drain gap 21. By providing a one-to-one correspondence between the drain troughs 12 and the drain gaps 21, each drain gap 21 is connected to a drain trough 12, thereby improving the overall draining efficiency of the grinding wheel 100. Of course, in other embodiments, there can be only one drain trough 12, for example, it can be arranged around the annular mounting groove 11. This can greatly increase the draining area of the drain trough 12, which is beneficial to improving the speed of draining debris and / or coolant.
[0077] Optionally, please refer to Figure 1 and Figure 2Along the thickness direction of the annular base 1, the bottom surface of each drain trough 12 is flush with the bottom surface of the corresponding drain gap 21. Considering that the drain gap is formed by installing two adjacent grinding wheel teeth 2 in the annular mounting groove 11, that is, the drain gap actually constitutes part of the annular mounting groove 11. Based on this, the bottom surface of the drain gap is actually the bottom surface of the annular mounting groove 11. The bottom surface of the drain trough 12 is its bottom surface located on the second side wall 112. By setting the drain trough 12 to be flush with the bottom surface of the drain gap 21, it is more conducive to the discharge of debris and / or coolant. In addition, the flushness of the bottom surface of the drain trough 12 with the bottom surface of the drain gap 21 can also prevent the drain trough 12 from partially obstructing the drain gap 21, which would reduce the size of the drain channel and affect the discharge efficiency of debris and / or coolant. Of course, if the bottom surface of the drain trough 12 is lower than the bottom surface of the drain gap, the depth of the drain trough 12 will be too large, which will affect the structural strength of the second side wall 112, thereby affecting the overall structural strength of the annular base 1.
[0078] In some embodiments, please refer to Figure 3 , Figure 3 This is a schematic diagram of the first structure of the sewage trough. The projection of the sewage trough 12 onto a plane perpendicular to the thickness direction of the annular base 1 includes an inner ring 13 and an outer ring 14, which are concentric. The cross-section of the sewage trough 12 includes a first side 121 and a second side 122 arranged opposite to each other, both of which are connected to the inner ring 13 and the outer ring 14. The first side 121 and the second side 122 each form a first intersection point 121a at their respective connections with the inner ring 13. The line connecting the midpoint of the line connecting the two first intersection points 121a and the center of the inner ring 13 is a reference line O. This reference line O is parallel to both the first side 121 and the second side 122, meaning that the distance between the first side 121 and the second side 122 is the same width along the radial direction of the annular base 1.
[0079] By ensuring that the distance between the first side 121 and the second side 122 is consistent in width along the radial direction of the annular base 1, the processing difficulty of the sewage trough 12 can be reduced.
[0080] On the other hand, it can make the discharge path of debris and / or coolant more unobstructed when passing through the discharge gap and drain 12 in sequence, thereby helping to better discharge debris and / or coolant.
[0081] In other embodiments, the straight lines containing the first side 121 and the second side 122 may also intersect the reference line O. It is understood that there can be various examples where the straight lines containing the first side 121 and the second side 122 intersect the reference line O. Since the grinding wheel 100 rotates around the center of the annular substrate 1 during grinding, allowing multiple grinding wheel teeth 2 to sequentially contact the wafer surface for grinding, the debris and / or coolant inside the grinding wheel 100 are subjected to centrifugal force, causing them to move along the rotation direction of the grinding wheel 100 within the annular substrate 1. Based on this, to better adapt the drain trough 12 to the movement direction of the debris and / or coolant for better discharge, the straight lines containing the first side 121 and the second side 122 intersect the reference line O, so that the extension direction of the drain trough 12 can be offset along the movement direction of the debris and / or coolant.
[0082] For one example, please refer to Figure 4 , Figure 4 This is a schematic diagram of the second structure of the drain trough. The distance between the first side 121 and the second side 122 is the same along the direction away from the center of the annular base 1. That is, the drain trough 12 is configured with a constant width, and the extension direction of the drain trough 12 is inclined along the rotation direction of the grinding wheel 100. This allows the drain trough 12 to better adapt to the movement direction of the debris and / or coolant, so that the debris and / or coolant can be directly discharged in the drain trough 12 along the extension direction of the drain trough 12. This reduces the resistance of the drain trough 12 sidewall to the debris and / or coolant when the debris and / or coolant move in the drain trough 12, thereby increasing the speed at which the debris and / or coolant are discharged from the drain trough 12. This helps to ensure that the normal operation of the grinding wheel 100 is not affected by the accumulation of debris or coolant.
[0083] For another example, please refer to Figure 5 and Figure 6 , Figure 5 This is a schematic diagram of the third type of sewage trough. Figure 6 This is a schematic diagram of the fourth structure of the drain trough. The opening width of the drain trough 12 gradually decreases along the direction away from the center of the annular base 1. In this case, according to Bernoulli's principle, the distance between the first side 121 and the second side 122 gradually decreases along the direction away from the center of the annular base 1. Therefore, the discharge velocity of debris and / or coolant in this direction gradually increases. This helps to further improve the overall discharge velocity of debris and / or coolant, thereby ensuring that the normal operation of the grinding wheel 100 is not affected by the accumulation of debris or coolant. It is understood that this example can have two schemes, which will be explained separately below.
[0084] Optionally, such as Figure 5As shown, the first angle α between the straight lines containing the first side 121 and the second side 122 and the reference line O is the same. At this time, since the openings of the first side 121 and the second side 122 near the inner ring 13 are larger than the openings near the outer ring 14, it helps to increase the probability of debris and / or coolant entering the openings of the first side 121 and the second side 122 near the inner ring 13. Furthermore, the opening between the first side 121 and the second side 122 gradually decreases in the direction away from the center of the annular base 1. Thus, after debris and / or coolant enter the openings of the first side 121 and the second side 122 near the inner ring 13, the discharge speed gradually increases, thereby increasing the overall discharge speed of debris and / or coolant. This ensures that the normal operation of the grinding wheel 100 is not affected by the accumulation of debris or coolant.
[0085] Optionally, such as Figure 6 As shown, the first angle α between the straight lines containing the first side 121 and the second side 122 and the baseline O is different. Since the openings of the first side 121 and the second side 122 near the inner ring 13 are larger than the openings near the outer ring 14, this helps increase the probability of debris and / or coolant entering the first side 121 and the second side 122 near the inner ring 13. Furthermore, the distance between the first side 121 and the second side 122 gradually decreases along the direction away from the center of the annular base 1. This means that after debris and / or coolant enter the openings of the first side 121 and the second side 122 near the inner ring 13, the discharge speed gradually increases, thereby improving the overall discharge speed of debris and / or coolant. In addition, the extension direction of the drain trough 12 is inclined along the rotation direction of the grinding wheel 100. This allows the drain trough 12 to better adapt to the movement direction of the debris and / or coolant, so that the debris and / or coolant can be directly discharged from the drain trough 12 along the extension direction of the drain trough 12. This reduces the resistance of the drain trough 12 sidewall to the debris and / or coolant when the debris and / or coolant move in the drain trough 12, thereby increasing the speed at which the debris and / or coolant are discharged from the drain trough 12. This helps to ensure that the normal operation of the grinding wheel 100 is not affected by the accumulation of debris or coolant.
[0086] In some embodiments, please refer to Figure 4 and Figure 6When the extension direction of the sewage trough 12 is inclined along the rotation direction of the grinding wheel 100 in two cases, namely, one is that the straight line containing the first side 121 and the second side 122 intersects the reference line O, and the opening width between the first side 121 and the second side 122 is the same in the direction away from the center of the annular base 1; the other is that the straight line containing the first side 121 and the second side 122 intersects the reference line O, and the opening width between the first side 121 and the second side 122 gradually decreases in the direction away from the center of the annular base 1, and at the same time, the first included angle α between the straight line containing the first side 121 and the second side 122 and the reference line O is different. At this time, the grinding wheel 100 also includes an offset line N. The first side 121 and the second side 122 have two second intersection points 121b with the outer ring 14. The offset line N is the straight line connecting the second midpoint of the line connecting the two second intersection points 121b and the first midpoint. The first included angle α between the offset line N and the reference line O is in the range of 12° to 20°, for example, it can be 12° to 18°, 14° to 18°, 12° to 16°, 16° to 20°, etc., and can be 12°, 16° or 20° for example. Taking an angle α between the offset line N and the baseline O as 16° as an example, the extension direction of the drain trough 12 is parallel to the tangent direction of the rotation direction of the debris and / or coolant inside the annular base 1. This allows the offset angle of the drain trough 12 to better match the movement direction of the debris and / or coolant, so that the debris and / or coolant can be directly discharged along the extension direction of the drain trough 12. This reduces the resistance of the drain trough 12 sidewall to the debris and / or coolant when it moves, thereby increasing the speed at which the debris and / or coolant is discharged from the drain trough 12. This helps to ensure that the normal operation of the grinding wheel 100 is not affected by the accumulation of debris or coolant.
[0087] Understandably, during grinding, the grinding wheel 100 rotates around the center of the annular base 1, causing multiple grinding wheel teeth 2 to sequentially contact the wafer surface for grinding. Therefore, during grinding, the peripheral surface of each grinding wheel tooth 2 first contacts the wafer surface. To avoid damage to the wafer surface from the peripheral surface of the grinding wheel teeth 2, the peripheral surface of the grinding wheel teeth 2 is constructed as an arc surface. By constructing the peripheral surface of the grinding wheel teeth 2 as an arc surface, the damage to the wafer surface during grinding can be reduced, thereby preventing scratches or wafer breakage. Furthermore, constructing the peripheral surface of the grinding wheel teeth 2 as an arc surface further reduces the possibility of debris adhering to the sides of the grinding wheel teeth 2, thereby preventing debris residue between the grinding wheel teeth 2 from affecting the grinding of the wafer by the grinding wheel 100.
[0088] Optionally, please refer to Figures 7 to 9 , Figure 7This is a schematic diagram of the first cross-sectional shape of the grinding wheel teeth. Figure 8 This is a schematic diagram of the second cross-sectional shape of the grinding wheel teeth. Figure 9 This is a schematic diagram of the third cross-sectional shape of the grinding wheel tooth. The shape of the cross-section 22 of the grinding wheel tooth 2 along the radial direction of the annular base 1 can be any one of circular, elliptical or racetrack shape, and this embodiment does not make any specific limitation on it.
[0089] It is understandable that the aforementioned runway shape specifically includes two arc-shaped segments and two straight segments connecting the two arc-shaped segments.
[0090] It is understandable that there can be various processing equipment for the grinding wheel teeth 2. For example, when the cross-sectional shape 22 of the grinding wheel teeth 2 is circular or elliptical, it can be manufactured using a hot pressing process, such as using... Figures 10 to 12 The hot press forming mold 200 shown.
[0091] See some examples. Figures 10 to 12 , Figure 10 This is a top view of the hot pressing mold disclosed in the embodiments of this application. Figure 11 This is a side view of the hot pressing mold disclosed in the embodiments of this application. Figure 12 yes Figure 11 Cross-sectional view at point BB. The hot pressing molding die 200 includes a first die 210 and two second dies 220. The first die 210 is a cylindrical die with a through material cavity 211 along its length. The two second dies 220 are cylindrical dies with outer diameters matching the inner diameters of the material cavities 211, so that the two second dies 220 can be placed inside the material cavities 211. The two second dies 220 are configured to be inserted from both ends of the material cavity 211 after the material is placed in the material cavity 211, thereby sealing both ends of the material cavity 211 and pressing the material into grinding wheel teeth 2 with a cross-sectional shape 22 that is circular or elliptical.
[0092] In other examples, when the cross-sectional shape 22 of the grinding wheel tooth 2 is racetrack-shaped, a method such as... Figure 13 and Figure 14 The processing equipment shown is used for manufacturing. Figure 13 This is a schematic diagram of the processing equipment disclosed in the embodiments of this application. Figure 14 This is a side view of the processing equipment disclosed in the embodiments of this application. The processing equipment 300 includes a clamp 310 and a grinding wheel 320. The clamp 310 includes a clamping groove 311 for clamping a plurality of grinding wheel teeth 2. The side of the grinding wheel 320 is arc-shaped, and the arc-shaped side is configured to match the arc-shaped shape of the two ends of the grinding wheel teeth 2, which has a racetrack-shaped cross-section 22.
[0093] In some embodiments, please refer to Figures 15 to 17 , Figure 15This is a schematic diagram of the grinding wheel disclosed in the embodiments of this application from another perspective. Figure 16 This is a top view of the grinding wheel disclosed in the embodiments of this application. Figure 17 yes Figure 16 A cross-sectional view at point CC. The annular substrate 1 includes a first surface 15 and a second surface 16 opposite to each other along the thickness direction. The first surface 15 is provided with the aforementioned annular mounting groove 11 and a drain groove 12. The first surface 15 is also provided with a first cavity 151. On the first surface 15, the first cavity 151, the annular mounting groove 11, and the drain groove 12 are arranged sequentially along the radial direction of the annular substrate 1. Meanwhile, the second surface 16 is provided with a second cavity 161, which is connected to the first cavity 151. By providing the first cavity 151 and the second cavity 161, on the one hand, the interior of the grinding wheel 100 can be made hollow, thereby reducing the weight of the grinding wheel 100 and reducing the amount of raw materials required for the production of the grinding wheel 100. On the other hand, cooling water can be introduced through the hollow part of the grinding wheel 100 to cool the grinding wheel 100, thereby avoiding damage to the wafer due to excessive temperature during the grinding process and avoiding affecting the normal operation of the grinding wheel 100.
[0094] Optionally, please refer to Figures 15 to 17 The inner wall surface 151a of the first cavity 151 is inclined so that the opening width of the first cavity 151 gradually increases along the direction close to the first surface 15. This allows the debris and / or coolant inside the grinding wheel 100 to automatically flow to the drain channel along the inclined direction of the inner wall surface 151a of the first cavity 151, thereby increasing the discharge speed of debris and / or coolant and helping to ensure that the normal operation of the grinding wheel 100 is not affected by the accumulation of debris or coolant.
[0095] It is understood that the second included angle b between the inner wall surface 151a of the first cavity 151 and the first surface 15 is in the range of 45° to 55°, for example, it can be 45° to 50°, 47° to 50°, 45° to 48°, 48° to 55°, and exemplaryly it can be 45°, 50° or 55°. Within this angle range, it helps to allow the debris and / or coolant inside the grinding wheel 100 to automatically flow to the drain channel along the inclined direction of the inner wall surface 151a of the first cavity 151, thereby improving the discharge speed of debris and / or coolant, and helping to ensure that the normal operation of the grinding wheel 100 is not affected by the accumulation of debris or coolant.
[0096] It is understood that the way coolant is injected into the grinding wheel 100 can be by setting a coolant spray device on the outside or by setting a through water injection hole on the inner wall surface 151a of the first cavity 151. This embodiment does not specifically limit this.
[0097] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this application, and are not intended to limit them. Although this application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features therein. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of this application.
Claims
1. A grinding wheel, characterized in that, The grinding wheel includes: An annular base is provided with an annular mounting groove, which is arranged around the center of the annular base. The annular base is also provided with a drain trough, which is located on the side of the annular mounting groove away from the center of the annular base, and the drain trough is connected to the annular mounting groove. Multiple grinding wheel teeth are installed in the annular mounting groove, and a discharge gap is formed between two adjacent grinding wheel teeth. The discharge gap and the drain groove together form a drain channel for discharging debris and / or coolant. The annular base includes a first surface and a second surface that are opposite to each other along the thickness direction. The first surface is provided with the annular mounting groove and the drain groove. The first surface is also provided with a first cavity. On the first surface, the first cavity, the annular mounting groove and the drain groove are arranged in sequence along the radial direction of the annular base. A second cavity is provided on the second surface, and the second cavity is in communication with the first cavity. The inner wall of the first cavity is inclined so that the opening width of the first cavity gradually increases in the direction close to the first surface.
2. The grinding wheel according to claim 1, characterized in that, The annular mounting groove includes a first sidewall and a second sidewall opposite to each other, and the first sidewall and the second sidewall define the mounting space for the grinding wheel teeth. The second sidewall is farther away from the center of the annular base than the first sidewall. The sewage trough extends through the second sidewall to connect with the annular mounting groove.
3. The grinding wheel according to claim 2, characterized in that, Multiple sewage discharge troughs are provided, and each sewage discharge trough is respectively configured to correspond one-to-one with each discharge gap.
4. The grinding wheel according to claim 3, characterized in that, Along the thickness direction of the annular base, the bottom surface of the drain trough is flush with the bottom surface of the discharge gap.
5. The grinding wheel according to claim 1, characterized in that, The projection of the sewage trough onto a plane perpendicular to the thickness direction of the annular base includes an inner ring and an outer ring, the inner ring and the outer ring having the same center; The cross-section of the sewage trough includes a first side and a second side arranged opposite to each other. The first side and the second side are both connected to the inner ring and the outer ring. The connection points of the first side, the second side and the inner ring form a first intersection point. The line connecting the midpoint of the line connecting the two first intersection points and the center of the inner ring is a reference line. The reference line is parallel to both the first side and the second side.
6. The grinding wheel according to claim 1, characterized in that, The projection of the sewage trough onto a plane perpendicular to the thickness direction of the annular base includes an inner ring and an outer ring, the inner ring and the outer ring having the same center; The cross-section of the sewage trough along the first direction includes a first side and a second side arranged opposite to each other. The first side and the second side are both connected to the inner ring and the outer ring. The connection points of the first side, the second side and the inner ring form a first intersection point. The line connecting the midpoint of the line connecting the two first intersection points and the center of the inner ring is a reference line. The straight line containing the first side and the second side intersects the reference line. The distance between the first side and the second side is the same or gradually decreases along the direction away from the center of the annular base.
7. The grinding wheel according to claim 6, characterized in that, The first side, the second side and the outer ring are connected to form a second intersection point. The line connecting the midpoint of the line connecting the two second intersection points and the midpoint of the line connecting the two first intersection points is an offset line. The offset line intersects the baseline. The angle between the offset line and the baseline is 12°~20°.
8. The grinding wheel according to any one of claims 1-7, characterized in that, The peripheral surface of the grinding wheel teeth is constructed as an arc surface.
9. The grinding wheel according to claim 8, characterized in that, The cross-sectional shape of the grinding wheel teeth along the radial direction of the annular base is any one of circular, elliptical, or racetrack-shaped.
10. The grinding wheel according to any one of claims 1-7, characterized in that, The angle between the inner wall of the first cavity and the first surface is in the range of 45° to 55°.