Pressure maintaining device

Abstract

The utility model belongs to the technical field of physical vapor deposition, and discloses a pressure maintaining device. The device comprises a U-shaped liquid level meter, a U-shaped pipe is installed in the U-shaped liquid level meter, the U-shaped pipe is filled with liquid, ports in the two sides of the U-shaped pipe are communicated with a first pipeline and a second pipeline respectively, the first pipeline is communicated with the second pipeline, a third pipeline is externally connected to the first pipeline, and a third manual valve is installed on the third pipeline. The tail end of the third pipeline is communicated with a target material inner cooling pipeline, a second manual valve is installed on the second pipeline, a fourth pipeline is communicated with the third pipeline between the third manual valve and the first pipeline, a fourth manual valve is installed on the fourth pipeline, the fourth pipeline is communicated with an air source, and a pressure reducing valve is installed between the air source and the fourth manual valve. The pressure reducing valve can display a pressure value; the problem of PVD damage caused by leakage in the target material in the prior art is solved.

Description

Technical Field

[0001] This utility model relates to the field of physical vapor deposition technology, and in particular to a pressure holding device. Background Technology

[0002] PVD (Physical Vapor Deposition) equipment, also known as physical vapor deposition equipment, refers to a process that uses low-voltage, high-current arc discharge technology under vacuum conditions. This technology evaporates the target material and ionizes both the evaporated material and the gas. The electric field then accelerates the ionization, causing the evaporated material and its reaction products to deposit onto the workpiece. In PVD, the target material is rotated; it is typically cylindrical and contains a stationary magnetic rod that rotates slowly. During magnetron sputtering, the magnetic rod controls plasma formation, ion orbits, and improves sputtering efficiency and uniformity. By controlling the magnetic field, it influences plasma formation and ion behavior, thereby affecting the quality and performance of the final thin film.

[0003] To reduce the risk of overheating during operation, cooling liquid is typically introduced into the target installation. Cooling pipes are installed inside the target, but leaks may occur between the joints of the cooling pipes, causing the cooling liquid to leak to the outside and resulting in irreversible damage to the PVD. Utility Model Content

[0004] The purpose of this invention is to provide a pressure-holding device to solve the problem of PVD damage caused by leakage inside the target material under the existing technology.

[0005] To achieve this objective, the present invention adopts the following technical solution: The present invention provides a stacking device, including a U-shaped level gauge, a U-shaped tube installed inside the U-shaped level gauge, the U-shaped tube being filled with liquid, the two ends of the U-shaped tube being connected to a first pipeline and a second pipeline respectively, the first pipeline and the second pipeline being interconnected, a third pipeline being connected externally to the first pipeline, a No. 3 manual valve being installed on the third pipeline, the end of the third pipeline being connected to a cooling pipeline inside the target material, a No. 2 manual valve being installed on the second pipeline, a fourth pipeline being connected to the third pipeline between the No. 3 manual valve and the first pipeline, a No. 4 manual valve being installed on the fourth pipeline, the fourth pipeline being connected to a gas source, a pressure reducing valve being installed between the gas source and the No. 4 manual valve, the pressure reducing valve being able to display a pressure value.

[0006] Preferably, the fifth pipeline is connected to the third pipeline between the third manual valve and the first pipeline, and the fifth pipeline is equipped with a fifth manual valve and is connected to the outside.

[0007] Preferably, a knob is rotatably mounted on the pressure reducing valve, and the knob can adjust the flow rate of gas in the fourth pipeline.

[0008] Preferably, a sixth pipeline is also connected to the third pipeline, and a manual valve No. 6 is installed on the sixth pipeline, which is connected to the outside.

[0009] Preferably, the U-shaped level gauge includes a housing, the U-shaped tube is installed inside the housing, a transparent plate is installed on one side of the housing, and scale lines are printed on the transparent plate, perpendicular to the projection of the transparent plate, and the scale lines coincide with the U-shaped tube.

[0010] Preferably, the U-shaped tube is filled with a liquid, which is pure water, and the liquid is U-shaped with a color-developing solution dripped at both ends.

[0011] Preferably, the third manual valve and the first pipeline are connected by a cross valve, and the fourth pipeline and the fifth pipeline are also connected to the cross valve.

[0012] Beneficial effects: After filling the U-shaped level gauge with liquid, connect the third pipeline to the target material, open the second, third, and fourth manual valves, and observe the reading on the pressure reducing valve. When the pressure of the pressure reducing valve is greater than atmospheric pressure, close the fourth manual valve, and then close the second manual valve. If there is internal leakage in the target material, the pressure in the first pipeline will decrease because it is connected to the inside of the target material. Meanwhile, the second pipeline is isolated from the first pipeline and always maintains the highest pressure of the gas source input. This causes the liquid in the U-shaped level gauge to be pushed into the first pipeline by the gas in the second pipeline, making the liquid on the first pipeline side of the U-shaped level gauge higher than the liquid on the second pipeline side. If the target material does not leak, the liquid in the U-shaped level gauge remains at the same height, making it easier for inspectors to promptly determine whether there is internal leakage in the target material and reducing the probability of PVD damage. Attached Figure Description

[0013] Figure 1 This is a main drawing of the pressure-holding device of this utility model.

[0014] In the diagram: 1. First pipeline; 2. Second pipeline; 21. Manual valve No. 2; 3. Third pipeline; 31. Manual valve No. 3; 4. Fourth pipeline; 41. Manual valve No. 4; 5. Fifth pipeline; 51. Manual valve No. 5; 6. Sixth pipeline; 61. Manual valve No. 6; 7. U-shaped level gauge; 71. U-shaped tube; 72. Liquid; 8. Pressure reducing valve; 9. Cross valve. Detailed Implementation

[0015] The present invention will now be described in further detail with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present invention and not intended to limit it. Furthermore, it should be noted that, for ease of description, the accompanying drawings show only the parts relevant to the present invention, not the entire structure.

[0016] In the description of this utility model, unless otherwise explicitly specified and limited, the terms "connected," "linked," and "fixed" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0017] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0018] In the description of this embodiment, the terms "upper," "lower," "right," etc., refer to the orientation or positional relationship shown in the accompanying drawings. They are used only for ease of description and simplification of operation, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. In addition, the terms "first" and "second" are only used for distinction in description and have no special meaning.

[0019] Under current technology, before performing physical vapor deposition (PVD) operations, operators cannot identify whether there is a leak inside the target material in the PVD equipment. Often, leaks of coolant inside the target material can damage the PVD equipment.

[0020] To solve the above problems, such as Figure 1As shown, this utility model provides a pressure-holding device, including a U-shaped level gauge 7, a U-shaped tube 71 installed inside the U-shaped level gauge 7, liquid 72 filled inside the U-shaped tube 71, the two ends of the U-shaped tube 71 are respectively connected to a first pipeline 1 and a second pipeline 2, the first pipeline 1 and the second pipeline 2 are interconnected, a third pipeline 3 is externally connected to the first pipeline 1, a third manual valve 31 is installed on the third pipeline 3, the end of the third pipeline 3 is connected to the cooling pipeline inside the target material, a second manual valve 21 is installed on the second pipeline 2, a fourth pipeline 4 is connected to the third pipeline 3 between the third manual valve 31 and the first pipeline 1, a fourth manual valve 41 is installed on the fourth pipeline 4, the fourth pipeline 4 is connected to a gas source, a pressure reducing valve 8 is installed between the gas source and the fourth manual valve 41, the pressure reducing valve 8 can display the pressure value.

[0021] After liquid 72 is poured into the U-shaped level gauge 7, since both sides of the U-shaped level gauge 7 are connected to the atmosphere, the liquid 72 remains level in the U-shaped level gauge 7 under atmospheric pressure. Then, the first pipe 1 and the second pipe 2 are connected to both sides of the U-shaped level gauge 7, the third pipe 3 is connected to the internal cavity of the target material, and the fourth pipe 4 is connected to the air source. The second manual valve 21, the third manual valve 31, and the fourth manual valve 41 are opened, allowing the air source to enter the target material, the first pipe 1, the second pipe 2, and finally the spaces on both sides of the U-shaped level gauge 7 where liquid 72 is not poured. The reading on the pressure reducing valve 8 is observed. When the pressure of the pressure reducing valve 8 is greater than atmospheric pressure (usually 6 bar), maintaining a sufficiently high pressure can detect whether there is a leak inside the target material, making the difference between the two sides of the U-shaped level gauge 7 larger. After the reading on the pressure reducing valve 8 reaches the set pressure value, the fourth manual valve 41 is closed, followed by the second manual valve 21. If there is air leakage inside the target material, due to… The first pipeline 1 is connected to the inside of the target material. The pressure in the first pipeline 1 will decrease over time. Since the second manual valve 21 is closed, the second pipeline 2 is isolated from the first pipeline 1. The second pipeline 2 always maintains the highest pressure at the end of the gas supply input. At this time, the pressure on the side of the U-shaped level gauge 7 connected to the second pipeline 2 will be greater than the pressure on the side of the first pipeline 1 connected to the U-shaped level gauge 7. This causes the liquid 72 in the U-shaped level gauge 7 to be pushed into the first pipeline 1 by the gas in the second pipeline 2. As a result, the liquid 72 on the first pipeline 1 side of the U-shaped level gauge 7 gradually becomes higher than the liquid 72 on the second pipeline 2 side over time. If the target material does not leak, the pressure on both sides of the U-shaped level gauge 7 will be the same, which will keep the liquid 72 in the U-shaped level gauge 7 at the same height. Before physical vapor deposition, a pressure holding device is used to connect the U-shaped level gauge 7 and the gas source for advance detection. This allows the testing personnel to determine in time whether there is a leak inside the target material and reduce the probability of PVD damage.

[0022] The fifth pipeline 5 is connected to the third pipeline 3 between the third manual valve 31 and the first pipeline 1. The fifth pipeline 5 is equipped with the fifth manual valve 51 and is connected to the outside. After the pressure holding device test is completed, the second manual valve 21 is opened and the third manual valve 31 is closed, so that the gas in the first pipeline 1, the second pipeline 2, the fourth pipeline 4 and the U-shaped level gauge 7 is discharged from the fifth pipeline 5. Since the third manual valve 31 is in the closed state, it can prevent the liquid 72 in the U-shaped level gauge 7 from entering the target material from the third pipeline 3 during the discharge process, and prevent impurities from entering the target material. This reduces the probability of PVD damage during the entire pressure holding device disassembly and assembly process.

[0023] A knob is installed on the pressure reducing valve 8. The knob can adjust the flow rate of gas in the fourth pipeline 4. This allows for precise control of the gas pressure entering the pressure holding device, preventing the pressure in the pressure holding device from being too high or too low, and ensuring that the gas entering the pressure holding device reaches the set range.

[0024] The third pipe 3 is also connected to a sixth pipe 6, which is equipped with a sixth manual valve 61. The sixth pipe 6 is connected to the outside. By opening the sixth manual valve 61, the gas inside the target material can be discharged after the pressure holding device test is completed. Since the third manual valve 31 is set, the gas on both sides of the third manual valve 31 can be discharged independently. The gas on the side of the third manual valve 31 closer to the target material is discharged through the sixth pipe 6, and the gas on the side of the third manual valve 31 closer to the U-shaped liquid level gauge 7 is discharged through the sixth pipe 6, so as to prevent the liquid 72 from entering the target material under the drive of the discharged gas and reduce the probability of PVD damage.

[0025] The U-shaped level gauge 7 includes a housing, with a U-shaped tube 71 installed inside. A transparent plate is mounted on one side of the housing, and scale lines are printed on the transparent plate, perpendicular to the projection of the transparent plate. The scale lines coincide with the U-shaped tube 71. By setting the scale lines, it is possible to observe whether the liquid 72 inside the U-shaped level gauge 7 is level before the detection begins, improving the accuracy of the pressure-holding device. During the process of the liquid 72 being pushed by gas inside the U-shaped level gauge 7, the scale lines allow a direct view of the distance the liquid 72 moves within the U-shaped level gauge 7, enabling the determination of the degree of leakage. If the movement distance is too large, the leakage degree is large; if the movement distance is too small, the leakage degree is small, allowing the detection personnel to confirm the extent of the leakage.

[0026] Liquid 72, which is pure water, is filled inside the U-shaped tube 71. Liquid 72 is U-shaped, and a colorimetric solution is dripped at both ends of liquid 72. The colorimetric solution facilitates observation by the testing personnel. The colorimetric solution coincides with the scale line, reducing the difficulty of observation and making it easier for the testing personnel to confirm the degree of leakage.

[0027] The No. 3 manual valve 31 and the first pipeline 1 are connected by a cross valve 9. The cross valve 9 is also connected to the fourth pipeline 4 and the fifth pipeline 5. By setting the cross valve 9, the number of pipelines in the pressure holding device can be reduced, making it easier for workers to assemble and disassemble.

[0028] Obviously, the above embodiments of this utility model are merely examples for clearly illustrating the present utility model, and are not intended to limit the implementation of the present utility model. Those skilled in the art can make various obvious changes, readjustments, and substitutions without departing from the protection scope of this utility model. It is neither necessary nor possible to exhaustively describe all embodiments here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this utility model should be included within the protection scope of the claims of this utility model.

Claims

1. A pressure-holding device, characterized in that, Includes a U-shaped level gauge (7), with a U-shaped tube (71) installed inside the U-shaped level gauge (7), the U-shaped tube (71) filled with liquid (72), the two ends of the U-shaped tube (71) respectively connected to a first pipeline (1) and a second pipeline (2), the first pipeline (1) and the second pipeline (2) being interconnected, a third pipeline (3) externally connected to the first pipeline (1), a third manual valve (31) installed on the third pipeline (3), the third pipeline ( 3) The end is connected to the internal cooling pipe of the target material. The second pipe (2) is equipped with a second manual valve (21). The fourth pipe (4) is connected to the third pipe (3) between the third manual valve (31) and the first pipe (1). The fourth pipe (4) is equipped with a fourth manual valve (41). The fourth pipe (4) is connected to the air source. A pressure reducing valve (8) is installed between the air source and the fourth manual valve (41). The pressure reducing valve (8) can display the pressure value.

2. The pressure-holding device according to claim 1, characterized in that, The fifth pipeline (5) is connected to the third pipeline (3) between the third manual valve (31) and the first pipeline (1). The fifth pipeline (5) is equipped with a fifth manual valve (51) and is connected to the outside.

3. The pressure-holding device according to claim 1, characterized in that, A knob is rotatably mounted on the pressure reducing valve (8), which can adjust the flow rate of gas in the fourth pipeline (4).

4. The pressure-holding device according to claim 1, characterized in that, The third pipeline (3) is also connected to a sixth pipeline (6), and a sixth manual valve (61) is installed on the sixth pipeline (6). The sixth pipeline (6) is connected to the outside.

5. The pressure-holding device according to claim 1, characterized in that, The U-shaped level gauge (7) includes a housing, and the U-shaped tube (71) is installed inside the housing. A transparent plate is installed on one side of the housing, and scale lines are printed on the transparent plate, which are perpendicular to the projection of the transparent plate. The scale lines coincide with the U-shaped tube (71).

6. The pressure-holding device according to claim 5, characterized in that, The U-shaped tube (71) is filled with liquid (72), which is pure water. The liquid (72) is U-shaped, and color-developing solution is dripped at both ends of the liquid (72).

7. The pressure-holding device according to claim 2, characterized in that, The third manual valve (31) and the first pipeline (1) are connected by a cross valve (9), and the fourth pipeline (4) and the fifth pipeline (5) are also connected to the cross valve (9).

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